Adxl330 PDF
Adxl330 PDF
Adxl330 PDF
i MEMS Accelerometer
ADXL330
FEATURES
GENERAL DESCRIPTION
3-axis sensing
Small, low-profile package
4 mm 4 mm 1.45 mm LFCSP
Low power
180 A at VS = 1.8 V (typical)
Single-supply operation
1.8 V to 3.6 V
10,000 g shock survival
Excellent temperature stability
BW adjustment with a single capacitor per axis
RoHS/WEEE lead-free compliant
APPLICATIONS
VS
RFILT
ADXL330
XOUT
OUTPUT AMP
CX
3-AXIS
SENSOR
CDC
RFILT
AC AMP
DEMOD
OUTPUT AMP
YOUT
CY
RFILT
OUTPUT AMP
ZOUT
CZ
ST
05677-001
COM
Figure 1.
Rev. A
Information furnished by Analog Devices is believed to be accurate and reliable. However, no
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other
rights of third parties that may result from its use. Specifications subject to change without notice. No
license is granted by implication or otherwise under any patent or patent rights of Analog Devices.
Trademarks and registered trademarks are the property of their respective owners.
ADXL330
TABLE OF CONTENTS
Features .............................................................................................. 1
Performance................................................................................ 11
Applications....................................................................................... 1
Applications..................................................................................... 12
Specifications..................................................................................... 3
Mechanical Sensor...................................................................... 11
REVISION HISTORY
9/06Rev. 0 to Rev. A
Changes to Ordering Guide .......................................................... 14
3/06Revision 0: Initial Version
Rev. A | Page 2 of 16
ADXL330
SPECIFICATIONS
TA = 25C, VS = 3 V, CX = CY = CZ = 0.1 F, acceleration = 0 g, unless otherwise noted. All minimum and maximum specifications are
guaranteed. Typical specifications are not guaranteed.
Table 1.
Parameter
SENSOR INPUT
Measurement Range
Nonlinearity
Package Alignment Error
Interaxis Alignment Error
Cross Axis Sensitivity 1
SENSITIVITY (RATIOMETRIC) 2
Sensitivity at XOUT, YOUT, ZOUT
Sensitivity Change Due to Temperature 3
ZERO g BIAS LEVEL (RATIOMETRIC)
0 g Voltage at XOUT, YOUT, ZOUT
0 g Offset vs. Temperature
NOISE PERFORMANCE
Noise Density XOUT, YOUT
Noise Density ZOUT
FREQUENCY RESPONSE 4
Bandwidth XOUT, YOUT 5
Bandwidth ZOUT5
RFILT Tolerance
Sensor Resonant Frequency
SELF TEST 6
Logic Input Low
Logic Input High
ST Actuation Current
Output Change at XOUT
Output Change at YOUT
Output Change at ZOUT
OUTPUT AMPLIFIER
Output Swing Low
Output Swing High
POWER SUPPLY
Operating Voltage Range
Supply Current
Turn-On Time 7
TEMPERATURE
Operating Temperature Range
T
Conditions
Each axis
Min
Typ
3.6
0.3
1
0.1
1
270
300
0.015
330
mV/g
%/C
1.2
1.5
1
1.8
V
mg/C
% of full scale
Each axis
VS = 3 V
VS = 3 V
Each axis
VS = 3 V
Max
Unit
g
%
Degrees
Degrees
%
280
350
g/Hz rms
g/Hz rms
1600
550
32 15%
5.5
Hz
Hz
k
kHz
Self test 0 to 1
Self test 0 to 1
Self test 0 to 1
+0.6
+2.4
+60
150
+150
60
V
V
A
mV
mV
mV
No load
No load
0.1
2.8
V
V
No external filter
No external filter
1.8
VS = 3 V
No external filter
25
3.6
V
A
ms
+70
320
1
Rev. A | Page 3 of 16
ADXL330
ABSOLUTE MAXIMUM RATINGS
Table 2.
Parameter
Acceleration (Any Axis, Unpowered)
Acceleration (Any Axis, Powered)
VS
All Other Pins
Output Short-Circuit Duration
(Any Pin to Common)
Temperature Range (Powered)
Temperature Range (Storage)
Rating
10,000 g
10,000 g
0.3 V to +7.0 V
(COM 0.3 V) to (VS + 0.3 V)
Indefinite
55C to +125C
65C to +150C
CRITICAL ZONE
TL TO TP
tP
TP
TEMPERATURE
RAMP-UP
TL
tL
TSMAX
TSMIN
tS
RAMP-DOWN
05677-002
PREHEAT
t25C TO PEAK
TIME
Sn63/Pb37
3C/s max
Pb-Free
3C/s max
100C
150C
60 s to 120 s
150C
200C
60 s to 180 s
3C/s max
3C/s max
183C
60 s to 150 s
240C + 0C/5C
10 s to 30 s
6C/s max
6 minutes max
217C
60 s to 150 s
260C + 0C/5C
20 s to 40 s
6C/s max
8 minutes max
ESD CAUTION
ESD (electrostatic discharge) sensitive device. Electrostatic charges as high as 4000 V readily accumulate on the
human body and test equipment and can discharge without detection. Although this product features
proprietary ESD protection circuitry, permanent damage may occur on devices subjected to high energy
electrostatic discharges. Therefore, proper ESD precautions are recommended to avoid performance
degradation or loss of functionality.
Rev. A | Page 4 of 16
ADXL330
0.50
MAX
NC
VS
VS
NC
NC
ST
15
14
0.325
13
ADXL330
TOP VIEW
(Not to Scale)
12
XOUT
11
NC
10
YOUT
0.35
MAX
0.65
+Y
+X
COM
9
7
NC
NC = NO CONNECT
1.95
0.325
05677-029
ZOUT
NC
+Z
COM
COM
COM
Mnemonic
NC
ST
COM
NC
COM
COM
COM
ZOUT
NC
YOUT
NC
XOUT
NC
VS
VS
NC
Description
No Connect
Self Test
Common
No Connect
Common
Common
Common
Z Channel Output
No Connect
Y Channel Output
No Connect
X Channel Output
No Connect
Supply Voltage (1.8 V to 3.6 V)
Supply Voltage (1.8 V to 3.6 V)
No Connect
Rev. A | Page 5 of 16
05677-032
1.95
ADXL330
TYPICAL PERFORMANCE CHARACTERISTICS
35
16
30
14
12
25
% OF POPULATION
20
15
10
10
8
6
4
0
1.42
1.44
1.46
1.48
1.50
1.52
1.54
1.56
1.58
0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09
OUTPUT (V)
OUTPUT (V)
35
14
30
12
% OF POPULATION
40
25
20
15
10
8
6
10
05677-004
% OF POPULATION
0
1.42
1.44
1.46
1.48
1.50
1.52
05677-006
05677-003
1.54
1.56
05677-007
% OF POPULATION
N > 1000 for all typical performance plots, unless otherwise noted.
1.58
0.95 0.96 0.97 0.98 0.99 1.00 1.01 1.02 1.03 1.04 1.05 1.06 1.07 1.08 1.09
OUTPUT (V)
OUTPUT (V)
40
25
35
20
% OF POPULATION
25
20
15
15
10
10
0
1.42
1.44
1.46
1.48
1.50
1.52
1.54
1.56
05677-008
5
5
05677-005
% OF POPULATION
30
1.58
0.88 0.90 0.92 0.94 0.96 0.98 1.00 1.02 1.04 1.06 1.08 1.10 1.12 1.14 1.16
OUTPUT (V)
OUTPUT (V)
Rev. A | Page 6 of 16
ADXL330
35
1.55
N=8
1.54
30
25
1.52
1.51
20
VOLTS
% OF POPULATION
1.53
15
1.50
1.49
1.48
10
05677-009
0
2.5 2.0 1.5 1.0 0.5
0.5
1.0
1.5
2.0
05677-012
1.47
5
1.46
1.45
30
2.5
20
10
10
20
30
40
50
60
70
80
TEMPERATURE (C)
Figure 14. X-Axis Zero g Bias vs. Temperature8 Parts Soldered to PCB
40
1.55
N=8
1.54
35
1.53
1.52
25
1.51
VOLTS
% OF POPULATION
30
20
1.50
1.49
15
1.48
10
05677-010
0
2.5 2.0 1.5 1.0 0.5
0.5
1.0
1.5
2.0
05677-013
1.47
5
1.46
1.45
30
2.5
20
10
10
20
30
40
50
60
70
80
TEMPERATURE (C)
Figure 15. Y-Axis Zero g Bias vs. Temperature8 Parts Soldered to PCB
30
1.55
N=8
1.54
1.53
1.52
20
VOLTS
1.51
15
1.50
1.49
10
1.48
0
2.5 2.0 1.5 1.0 0.5
0.5
1.0
1.5
2.0
1.46
1.45
30
2.5
05677-014
1.47
5
05677-011
% OF POPULATION
25
20
10
10
20
30
40
50
60
70
80
TEMPERATURE (C)
Figure 16. Z-Axis Zero g Bias vs. Temperature8 Parts Soldered to PCB
Rev. A | Page 7 of 16
ADXL330
60
35
30
40
30
20
10
0.26
0.27
0.28
0.29
0.30
0.31
0.32
0.33
20
15
10
5
05677-015
25
0
0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210
0.34
SENSITIVITY (V/g)
SENSITIVITY (V/g)
70
40
60
35
30
50
% OF POPULATION
40
30
20
25
20
15
05677-016
10
0
0.26
0.27
0.28
0.29
0.30
0.31
0.32
0.33
0
0.170 0.174 0.178 0.182 0.186 0.190 0.194 0.198 0.202 0.206 0.210
0.34
SENSITIVITY (V/g)
05677-019
10
SENSITIVITY (V/g)
70
40
60
35
30
% OF POPULATION
50
40
30
20
25
20
15
10
5
05677-017
10
0
0.25
0.26
0.27
0.28
0.29
0.30
0.31
0.32
0
0.172 0.176 0.180 0.184 0.188 0.192 0.196 0.200 0.204 0.208 0.212
0.33
SENSITIVITY (V/g)
SENSITIVITY (V/g)
Rev. A | Page 8 of 16
05677-020
% OF POPULATION
% OF POPULATION
05677-018
% OF POPULATION
% OF POPULATION
50
ADXL330
90
0.33
N=8
80
0.32
60
SENSITIVITY (V/g)
% OF POPULATION
70
50
40
30
0.31
0.30
0.29
20
0
2.0 1.6 1.2 0.8 0.4
0.4
0.8
1.2
1.6
0.27
30
2.0
05677-024
05677-021
0.28
10
20
10
DRIFT (%)
10
20
30
40
50
60
70
80
70
80
70
80
TEMPERATURE (C)
70
0.33
N=8
0.32
50
SENSITIVITY (V/g)
40
30
0.31
0.30
0.29
20
0.28
05677-022
10
0
2.0 1.6 1.2 0.8 0.4
0.4
0.8
1.2
1.6
0.27
30
2.0
05677-025
% OF POPULATION
60
20
10
DRIFT (%)
10
20
30
40
50
60
TEMPERATURE (C)
25
0.33
N=8
0.32
SENSITIVITY (V/g)
15
10
0.31
0.30
0.29
0
1.0 0.6 0.2
0.2
0.6
1.0
1.4
1.8
2.2
2.6
0.27
30
3.0
DRIFT (%)
05677-026
0.28
05677-023
% OF POPULATION
20
20
10
10
20
30
40
50
60
TEMPERATURE (C)
Rev. A | Page 9 of 16
ADXL330
600
400
300
200
2
1
05677-028
100
05677-027
CURRENT (A)
500
0
0
SUPPLY (V)
B
W
M1.00ms
T 9.400%
A CH1
300mV
Rev. A | Page 10 of 16
ADXL330
THEORY OF OPERATION
The ADXL330 is a complete 3-axis acceleration measurement
system on a single monolithic IC. The ADXL330 has a measurement range of 3 g minimum. It contains a polysilicon surface
micromachined sensor and signal conditioning circuitry to
implement an open-loop acceleration measurement architecture.
The output signals are analog voltages that are proportional to
acceleration. The accelerometer can measure the static acceleration of gravity in tilt sensing applications as well as dynamic
acceleration resulting from motion, shock, or vibration.
The sensor is a polysilicon surface micromachined structure
built on top of a silicon wafer. Polysilicon springs suspend the
structure over the surface of the wafer and provide a resistance
against acceleration forces. Deflection of the structure is measured using a differential capacitor that consists of independent
fixed plates and plates attached to the moving mass. The fixed
plates are driven by 180 out-of-phase square waves. Acceleration
deflects the moving mass and unbalances the differential
capacitor resulting in a sensor output whose amplitude is
proportional to acceleration. Phase-sensitive demodulation
techniques are then used to determine the magnitude and
direction of the acceleration.
The demodulator output is amplified and brought off-chip
through a 32 k resistor. The user then sets the signal bandwidth of the device by adding a capacitor. This filtering improves
measurement resolution and helps prevent aliasing.
MECHANICAL SENSOR
The ADXL330 uses a single structure for sensing the X, Y, and
Z axes. As a result, the three axes sense directions are highly
orthogonal with little cross axis sensitivity. Mechanical misalignment of the sensor die to the package is the chief source
of cross axis sensitivity. Mechanical misalignment can, of
course, be calibrated out at the system level.
PERFORMANCE
Rather than using additional temperature compensation
circuitry, innovative design techniques ensure high
performance is built-in to the ADXL330. As a result, there is
neither quantization error nor nonmonotonic behavior, and
temperature hysteresis is very low (typically less than 3 mg over
the 25C to +70C temperature range).
Figure 14, Figure 15, and Figure 16 show the zero g output
performance of eight parts (X-, Y-, and Z-axis) soldered to a
PCB over a 25C to +70C temperature range.
Figure 26, Figure 27, and Figure 28 demonstrate the typical
sensitivity shift over temperature for supply voltages of 3 V. This
is typically better than 1% over the 25C to +70C
temperature range.
Rev. A | Page 11 of 16
ADXL330
APPLICATIONS
POWER SUPPLY DECOUPLING
For most applications, a single 0.1 F capacitor, CDC, placed
close to the ADXL330 supply pins adequately decouples the
accelerometer from noise on the power supply. However, in
applications where noise is present at the 50 kHz internal clock
frequency (or any harmonic thereof), additional care in power
supply bypassing is required as this noise can cause errors in
acceleration measurement. If additional decoupling is needed,
a 100 (or smaller) resistor or ferrite bead can be inserted in
the supply line. Additionally, a larger bulk bypass capacitor
(1 F or greater) can be added in parallel to CDC. Ensure that
the connection from the ADXL330 ground to the power supply
ground is low impedance because noise transmitted through
ground has a similar effect as noise transmitted through VS.
Capacitor (F)
4.7
0.47
0.10
0.05
0.027
0.01
SELF TEST
The ST pin controls the self test feature. When this pin is set to
VS, an electrostatic force is exerted on the accelerometer beam.
The resulting movement of the beam allows the user to test if
the accelerometer is functional. The typical change in output is
500 mg (corresponding to 150 mV) in the X-axis, 500 mg (or
150 mV) on the Y-axis, and 200 mg (or 60 mV) on the Z-axis.
This ST pin may be left open circuit or connected to common
(COM) in normal use.
Peak-to-Peak Value
2 rms
4 rms
6 rms
8 rms
Rev. A | Page 12 of 16
ADXL330
The ADXL330 output is ratiometric, therefore, the output
sensitivity (or scale factor) varies proportionally to the
supply voltage. At VS = 3.6 V, the output sensitivity is
typically 360 mV/g. At VS = 2 V, the output sensitivity is
typically 195 mV/g.
AZ
AX
XOUT = 1g
YOUT = 0g
ZOUT = 0g
TOP
GRAVITY
TOP
TOP
XOUT = 0g
YOUT = 1g
ZOUT = 0g
TOP
XOUT = 1g
YOUT = 0g
ZOUT = 0g
TOP
XOUT = 0g
YOUT = 0g
ZOUT = 1g
Rev. A | Page 13 of 16
XOUT = 0g
YOUT = 0g
ZOUT = 1g
05677-031
XOUT = 0g
YOUT = 1g
ZOUT = 0g
05677-030
AY
ADXL330
OUTLINE DIMENSIONS
0.20 MIN
PIN 1
INDICATOR
0.20 MIN
13
PIN 1
INDICATOR
4.15
4.00 SQ
3.85
0.65 BSC
TOP
VIEW
16
1
12
BOTTOM
VIEW
9
4
8
0.55
0.50
0.45
2.43
1.75 SQ
1.08
1.95 BSC
0.05 MAX
0.02 NOM
SEATING
PLANE
0.35
0.30
0.25
COPLANARITY
0.05
072606-A
1.50
1.45
1.40
ORDERING GUIDE
Model
ADXL330KCPZ 1
ADXL330KCPZRL1
EVAL-ADXL330Z1
1
Measurement Range
3 g
3 g
Specified Voltage
3V
3V
Temperature Range
25C to +70C
25C to +70C
Z = Pb-free part.
Rev. A | Page 14 of 16
Package Description
16-Lead LFCSP_LQ
16-Lead LFCSP_LQ
Evaluation Board
Package Option
CP-16-5a
CP-16-5a
ADXL330
NOTES
Rev. A | Page 15 of 16
ADXL330
NOTES
Rev. A | Page 16 of 16