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optoNCDT // Laser displacement sensors (triangulation)

optoNCDT Laser triangulation sensors
2 Laser triangulation sensors optoNCDT
- Non-contact and wear-free
- Large distance from the

measurement object
- Small light spot for smallest parts
-P
recise measurement results with
high dynamics
- Almost independent of surface

properties
Measuring principle: laser triangulation optoNCDT stands for high precision laser Certified quality: calibration protocol
Laser triangulation sensors operate with a triangulation sensors To document the performance capability of
laser diode which projects a visible light spot optoNCDT sensors are setting milestones for the optoNCDT sensors, each sensor is cali-
onto the surface of the measurement target. industrial laser displacement measurement. brated before delivery and supplied with its
The light reflected from the spot is imaged by Micro-Epsilon laser sensors stand out due own calibration protocol. This document is
an optical receiving system onto a position- to size, measuring rate, software and, above supplied with the sensor and is used as proof
sensitive element. If the light spot changes all, due to precision. The current optoNCDT to the achieved measurement precision.
its position, this change is imaged on the range now offers numerous series, each of
receiving element and evaluated. With the which is amongst the best in its class.
1610 series, an analog PSD module is used
as position-sensitive measuring element, Laser-based optical displacement sensors
whereas CMOS elements and CCD elements measure from a large distance to the target
are used with the other high-performance using a very small spot which enables mea-
sensors. surements on the very small parts. The large
measurement distance in turn enables mea-
Receiver surements to be taken against difficult target
element surfaces such as hot metals. The non-contact
principle enables wear-free measurements
as the sensors are not subject to any physi-
cal contact with the target. Furthermore, the
Multi-lens
Laser laser triangulation principle is ideal for very
diode fast measurements with high accuracy and
optical system
resolution.
Filter
Start of measuring range
Midrange
End of measuring range

3
Page
General information
optoNCDT Technology 4-5
optoNCDT Application examples 6-7
Measuring ranges Resolution Linearity Measuring rate Laser Targets

Compact class
optoNCDT 1320 10 - 100mm >1m* 0.12% up to 2kHz red 8-9
optoNCDT 1420 10 - 200mm >0.5m* from 0.08% up to 4kHz red all common targets 10 - 11
optoNCDT 1420 CL1 10 - 50mm >0.5m* from 0.08% up to 4kHz red class 1 12 - 13
High Speed PSD Sensor

optoNCDT 1610 / 1630 4 - 100mm >0.2m 0.2% up to 100kHz red all common targets 14 - 15
Industry Standard
optoNCDT 1700 2 - 750mm >0.1m from 0.08% up to 2.5kHz red all common targets 16 - 17
High Performance Sensors

optoNCDT 2300 2 - 300mm >0.03m from 0.02% up to 49.14kHz red all common targets 18 - 19
Sensors with small laser line

optoNCDT 1700LL 2 - 50mm >0.1m from 0.08% up to 2.5kHz red 20 - 21
shiny / structured
optoNCDT 2300LL 2 - 50mm >0.03m from 0.02% up to 49.14kHz red 22 - 23
Long-range sensors
optoNCDT 1710-50 50mm >7.5m 0.1% up to 2.5kHz red 24 - 25
optoNCDT 2310 10 - 50mm >0.5m 0.03% up to 49.14kHz red all commontargets 26 - 27
optoNCDT 1710-1000 1000mm >100m 0.1% up to 2.5kHz red 28 - 29
Blue Laser Sensors

optoNCDT 1700BL 20 - 1000mm >1.5m from 0.08% up to 2.5kHz blue red-hot glowing / 30 - 31
optoNCDT 2300BL 2 - 50mm 0.03m from 0.03% up to 49.14kHz blue transparent / organic 32 - 33
optoNCDT 2300-2DR 2mm 0.03m 0.03% up to 49.14kHz blue reflecting / transparent 34 - 35
Accessories
Cables and protection housings 36 - 37
Interface converters and signal processing units 38 - 39
*corresponds to repeatability
4 Advantages and special features optoNCDT
y (mm)
One of a kind: correct measurement

Real Time Surface Compensation (RTSC)
for maximum speed
The unique RTSC function compensates for

t
the amount of reflection from the target sur-
face during continuous exposure and in real-
time.
y (mm)
The exposure time or the amount of light pro- y (mm)
duced by the laser is optimally matched to the

correct measurement
reflection characteristics of the target surface. measurement error
Unique to optoNCDT 1700 and 2300 laser

sensors, this innovative real-time control
always achieves optimum results, even with t t
rapidly changing surface types. Comparison: optoNCDT with RTSC and conventional sensor
Cables suitable for drag chain systems

y (mm)
Unique ease of use via web interface Designed for industrial applications All sensor cables for optoNCDT sensors
All optoNCDT 1320, 1420 and 2300 laser The sensors in the optoNCDT product range are rated for use in drag chains and are
measurement error
sensors are operated using an intuitive web are designed for industrial applications. Due therefore suitable for various fields of applica-
interface by connecting the sensor to a PC. to their robust construction and technical tions. Cables suitable for use with robots are
This web interface enables the user to make features, they achieve precise measurement available for any ILD series.
settings for the processing of measured results even in harsh ambient conditions.
values and signals, e.g. peak selection, filter Each series is available in a number of diffe-
t Adjustable filter functions
and masking features for the video signal. rent measuring ranges which cover almost all A number of filters are available in order to
common measuring distances. obtain optimum results for each applica-
tion: moving average, recursive average and
Compact with integrated controller median. The filters are applied directly to the
Despite their very compact dimensions, the measurement results.
ILD series have a fully integrated controller. As
a result, simple, rapid installation and wiring
Original
is possible. The sensors can be integrated
easily even into restricted installation space.
High measuring rates

with filter (N=128)
High measuring rates are required for fast
moving targets or measurements on difficult
surfaces. Sensors in the 2300 Series achieve
a measuring rate of up to 49kHz. The analog
1630 high-speed series achieves measuring
Vibration measurement with moving average
rates of up to 100kHz.
Analog and digital output types Original

The optoNCDT sensors are equipped with
different outputs to fulfil industrial user
requirements. As well as analog interfaces,
digital interfaces are also available for direct with filter (N=9)
connection with the existing production envi-
ronment. For further signal processing, inter-
face converters and signal processing units
are available.
Profile measurement with median
5
Innovative Sensors
with Blue Laser Technology Laser off
OK
Midrange
Power off
Ethernet, RS422
EtherCat, operational mode
Laser off
OK
Midrange
Power off
Ethernet, RS422
Laser off
OK
Midrange
Power off
Ethernet, RS422
Laser off
OK
Midrange
Power off
Ethernet, RS422
The optoNCDT BL models are equipped with

Error EtherCat, init mode Error EtherCat, init mode Error EtherCat, init mode Error EtherCat, init mode
a blue laser diode and are used when stan- optoNCDT optoNCDT optoNCDT optoNCDT
dard sensors with a red laser diode are ope-

rating at their performance limits.
Due to its shorter wavelength, the blue laser

does not penetrate the target surface, pro-
jecting a small light spot on the surface and
therefore providing stable and precise results.
This technology is preferably used with orga-
nic and (semi-)transparent objects, as well as
The red laser penetrates the surfaces of some materials which produces a blurry image on the sensor element.
for red-hot glowing metals.
Sensors with blue laser light do not penetrate the material and are imaged sharply onto the receiver element.
Synchronous measurement
with multiple sensors
For many applications, it is necessary to mea-
sure or acquire data simultaneously using
multiple sensors. Micro-Epsilon offers diffe-
Synchronisiation at thickness measurements of two sensors
rent signal processing units to support syn-
chronized measurements. A true synchro- Sensor 1 Sensor 1
td
nous measurement is required to precisely
acquire moving or oscillating objects during real thickness
Sensor 2 Sensor 2
thickness or differential measurements. In
this case, one optoNCDT acts as the master,
error
which provides the corresponding cycle pulse
t t
for the second sensor (slave). This function Genuine synchronisation during thickness Conventional laser sensor with usual
facilitates the genuine synchronous pulsing of measurement using two optoNCDT sensors time offset erroneous measurement
with simultaneous data acquisition
two sensors.
[available for all 1700 and 2300 models]
Customer-specific sensor modifications

For applications where the above standard sensors do not
meet your requirements, it is possible to supply a sensor
with modified optical system, design or equipment.
Please contact us - we will be pleased to advise you.
Options
Modified offset and measuring range
Custom housing or mounting geometry
Optional interfaces
Special cable length
90 beam deflection
Vacuum suitability
Reduced mass
Increased shock and vibration resistance
6 Typical applications optoNCDT
Distance of vehicle to road surface

In road tests, pitching and rolling movements,
spring compression during braking and other
quantities are measured with optoNCDT Car body positioning in production lines
sensors. optoNCDT is particularly suitable For automated processing of car bodies or
here due to its compact construction and the vehicles, an exact determination of the positi-
possibility of powering the sensor from the on relative to the processing tool is necessary
vehicle power supply. For these applications, (drilling, punching, fitting, subassemblies).
special models with increased resistance to With its Real Time Surface Compensation, the
extraneous light and vibration are available. optoNCDT sensor is ideally suited to the high-
precision acquisition of painted surfaces.
Shape conformance on aluminum wheels

After casting, aluminum wheels are measu-
red for a range of properties, e.g. hub depth,
roundness and bulging.
Distance measurement in dispenser

systems
Determining the exact distance value is a cri-
tical factor with dispensers for solder paste Synchronous thickness measurement
and adhesives. Compact laser sensors from optoNCDT sensors are ideally suited to the thickness measurement of a variety of (web)
Micro-Epsilon rapidly detect the exact dis- materials. Due to the high measuring rate and the possibility of synchronizing multiple sensors,
tance from the printed circuit board. even moving and oscillating targets can be reliably acquired.
7
Blue Laser Sensors for Dimensional Ins-

pection
With certain measurement objects, the
red laser beam penetrates the object. This
effect does not occur with Blue Laser sensors
as their laser point is sharply imaged onto
the surface. Therefore, the sensors provide
a stable and low-noise measurement signal.
Blue Laser sensors are particularly suitable
for detecting red-hot glowing metals as well
as (semi-) transparent and organic materials.
Flatness measurement of IC pins Package dimensions

To achieve the best quality during board as- In fully-automated logistics processes, the
sembly, all IC pins must lie in one plane. In dimensions of packages are checked. Due
modern pick-and-place machines, the ICs are to the large measuring range and the high
measured directly before placement. The tiny measuring rate, compact laser sensors from
light spot diameters enable the measurement Micro-Epsilon are used for automated, dimen-
of the smallest pin geometries. sional inspection.
optoNCDT LL for shiny metallic surfaces

The surface roughness of an object to be measured causes interfe-
rences in the laser point. This physical effect is particularly strong in
shiny metallic objects and impedes an exact measurement.
optoNCDT LL (Laser Line) sensors compensate for this effect with an

oval-shaped laser spot of just a few mm in width which is similar to a
short laser line. Interferences caused by surface roughness, defects,
indentations or holes are filtered out using the oval-shaped light spot
combined with special software algorithms. Furthermore, this type of
sensor is suitable for distance measurements on structured surfaces
i.e. when the distance to the surface and not the structure itself needs
to be measured.
8 Compact laser triangulation displacement sensor optoNCDT 1320
Ideal for serial and OEM

applications
Compact design with integrated
controller
312Hz
375Hz Measuring rate up to 2kHz
1000Hz
Analog Analog and digital output

Digital
Trigger Trigger input and teach-in
TeachIn
select Plug & Play via select button
Application-specific presets
for fast sensor settings
ATC Auto Target Compensation
The optoNCDT 1320 is a new laser triangu- Plug & Play due to unique ease of use
lation sensor with compact size. This series The optoNCDT 1320 models enable quick
provides the ideal entry-level sensor for pre- sensor commissioning using the multi-
cise measurement of displacement, distance function sensor button. An intuitive web inter-
and position. This series measures displace- face enables the user to carry out extended
ment, distance and position. The controller is sensor settings. The settings for the measu-
integrated in the housing which considerably rement task can be quickly selected using
simplifies the installation procedure. Due to its predefined presets. Using the 'Standard',
extremely compact size, the sensor can also 'Changing surfaces' and 'Material with pene-
be integrated into restricted installation space. tration' settings, precise measurement results
Due to its low weight, the optoNCDT 1320 is are easily achieved without any complex
ideally suitable for applications where high optimization. The quality slider enables the
accelerations occur e.g. on the robot arm or in sensor to be adapted to static and dynamic
pick-and-place machines. processes.
The optoNCDT 1320 offers high accuracy and 46 20

adjustable measuring rates up to 2kHz. The
Auto Target Compensation (ATC) provides
stable distance signal control regardless of
target color or brightness. Very small objects
2x M3 threads or
can be detected reliably due to the small and as mounting holes
sharply projected measurement spot size. for M2
30
2.70
3 40
8 6 7.50
SMR
10
Laser
MR SMR Y
Limits for free
10 20 10 space
MR
25 25 21
Keep this area free from
50 35 28 other light sources and/or
their reflections
100 50 46
Y 2 8
9
Model ILD1320-10 ILD1320-25 ILD1320-50 ILD1320-100

Measuring range 10mm 25mm 50mm 100mm
Start of measuring range SMR 20mm 25mm 35mm 50mm
Midrange MMR 25mm 37.5mm 60mm 100mm
End of measuring range EMR 30mm 50mm 85mm 150mm
12m 30m 60m 120m
Linearity
0.12% FSO
Repeatability 1) 1m 2.5m 5m 10m
Measuring rate 2) 0.25kHz / 0.5kHz / 1kHz / 2kHz
Light source Semiconductor laser <1 mW, 670 nm (red)
Permissible ambient light 10,000 lx
SMR 90 x 120m 100 x 140m 90 x 120m
Spot diameter MMR 45 x 40m 120 x 130m 230 x 240m 750 x 1100m
10% EMR 140 x 160m 390 x 500m 630 x 820m
smallest diameter 45 x 40m with 24mm 55 x 50m with 31mm 70 x 65m with 42mm -
Protection class IP65
Laser protection class Class 2 according to DIN EN 60825-1 : 2008-05
Temperature stability 0.03% FSO/C
Operating temperature 0C ... +50C (non-condensing)
Storage temperature -20C... +70C (non-condensing)
1x HTL Laser on/off;
Control inputs/outputs
1 x HTL Multifunction input Trigger in / zero setting / mastering / teach (1x error output npn, pnp, push pull)
Measurment analog 4...20 mA; 12 bit; freely scalable within the measuring range 3)
value output digital RS422 / 16bit
Signal processing 14bit
Vibration 20g / 20 ... 500Hz (according to IEC 60068-2-6)
Shock 15g / 6ms / 3 axes (according to IEC 60068-2-29)
without cable approx. 30g
Weight
with 3m cable approx. 145g
Displays 2 x 3 color LEDs for power and status
Button Select button for zero / teach / factory settings
Operation
Web interface selectable presets 4)
Power supply 11-30V DC, 24V P< 2 W
Sensor cable 3m integrated, open ends
Electronics integrated signal processor
EN 61 000-6-3 / DIN EN 61326-1 (Class B)
Electromagnetic compatibility (EMC)
EN 61 000-6-2 / DIN EN 61326-1
FSO = Full Scale Output; The specified data apply to a white, diffuse reflecting surface (reference: ceramics)
SMR = Start of measuring range; MMR = Midrange; EMR = End of measuring range
1)
Measuring rate 1kHz, median 9; 2) Factory setting 1kHz; modifying the factory settings requires the IF2001/USB converter (optionally available);
3)
The D/A conversion is executed at 12bit; 4) Connection to PC via IF2001/USB (optionally available)
10 Smart laser triangulation displacement sensor optoNCDT 1420

applications
controller
312Hz
1000Hz
Analog Analog (U/I) and digital output

Digital
Trigger Trigger input / teach-in
TeachIn zero-setting / mastering
Configuration via web interface
or Plug & Play
Application-specific presets
and individual setups
The optoNCDT 1420 offers a unique com- Highest precision in a minimum of space The quality slider enables the sensor to be ad-
bination of speed, size, performance and Compact size combined with low weight apted to static and dynamic processes.
application versatility in the range of com- opens up new fields of application. Analog
pact triangulation sensors. The sensor with and digital output signals enable to integrate Up to eight user-specific sensors settings
integrated controller is used in restricted ins- the sensor into plant or machine control sys- can be stored and exported in the setup ma-
tallation space or dynamic applications. The tems. The triangulation sensor achieves a high nagement. The video signal display, the signal
selectable connector type, i.e. cable or pigtail, measurement accuracy with measuring rates peak selection and a freely adjustable signal
together with compact size reduce the sen- of up to 4kHz. averaging enable to optimize the measure-
sor installation effort to a minimum. The Auto ment task.
Target Compensation (ATC) provides stable Unique ease of use, individual results
distance signal control. The high-performance All optoNCDT 1420 models are operated The ROI function (region of interest) allows
optical system projects the small light spot using an extended web interface. The settings e.g. for interfering signals in the background
sharply onto the measurement object which for the measurement task can be quickly se- to be filtered out. The remaining signal peak is
enables to even detect smallest components lected using predefined presets. optimally corrected.
and every little detail reliably.
46 20
2x M3 threads or
as mounting holes
for M2
30
2.70
3 40
8 6 7.50
SMR
MR SMR Y
10
10 20 10 Laser
25 25 21
Limits for free
50 35 28 space
MR
100 50 46
Keep this area free from
200 60 70 other light sources and/or
their reflections
500 100 90
Y 2 8
11
Model ILD1420-10 ILD1420-25 ILD1420-50 ILD1420-100 ILD1420-200 ILD1420-500

Measuring range 10mm 25mm 50mm 100mm 200mm 500mm
Start of measuring range SMR 20mm 25mm 35mm 50mm 60mm 100mm
Midrange MMR 25mm 37.5mm 60mm 100mm 160mm 350mm
End of measuring range EMR 30mm 50mm 85mm 150mm 260mm 600mm
8 - 10m 20 - 25m 40 - 50m 80 - 100m 160 - 200m 500 - 1000m
Linearity 1)
0.08 ... 0.1% FSO 0.1 ... 0.2% FSO
Repeatability 2) 0.5m 1m 2m 4m 8m 20 - 40m
Measuring rate 3) 0.25kHz / 0.5kHz / 1kHz / 2kHz / 4kHz
SMR 90 x 120m 100 x 140m 90 x 120m
Spot diameter MMR 45 x 40m 120 x 130m 230 x 240m 750 x 1100m 750 x 1100m 750 x 1100m
10% EMR 140 x 160m 390 x 500m 630 x 820m
smallest diameter 45 x 40m with 24mm 55 x 50m with 31mm 70 x 65m with 42mm - -
Storage temperature -20C ... +70C (non-condensing)
Measurement analog 4...20 mA (1-5 V with cable PCF1420-3/U); 12 bit; freely scalable within the measuring range 4)
Weight
with pigtail approx. 60g
button Select button for zero / teach / factory settings
Operation Application-specific presets; peak selection, video signal; freely selectable averaging possibilities;
web interface
data reduction; setup management 5)
Power supply 11-30V DC, 24V P< 2W
3m integrated, open ends
Sensor cable
0.3m pigtail with 12-pole M12 connector
Electromagnetic compatibility EN 61 000-6-3 / DIN EN 61326-1 (Class B)
(EMC) EN 61 000-6-2 / DIN EN 61326-1
SMR = start of measuring range; MMR = midrange; EMR = end of measuring range
1)
Values apply from 0 - 50% FSO or 50 - 100% FSO; 2) Measuring rate: 2kHz, median 9;
3)
Factory setting 2kHz; modifying the factory settings requires the IF2001/USB converter (optionally available)
4)
The d/a conversion is executed with 12 Bit; 5) Connection to PC via IF2001/USB (optionally available)
12 Smart triangulation displacement sensor of laser class 1 optoNCDT 1420 CL1

applications
Laser class 1

controller
312Hz
1000Hz

Digital
Trigger Trigger input / teach-in
TeachIn zero-setting / mastering
or Plug & Play
optoNCDT CL1 laser sensors are used in Use in pharmaceutical and medical
measurement tasks which require laser class engineering
1. With this laser class, the radiated power is In medical engineering, laser sensors are
at max. 390W, which is significantly lower often used to determine distances to very
than laser class 2. sensitive surfaces. Laser class 2 sensors
can under certain circumstances cause a
Use in automotive production chemical or thermal reaction of the surface.
Particularly in the field of automotive produc-
tion, increased demands are being placed Here, optoNCDT 1420 CL1 sensors use only
on manufacturers to take adequate safety about one third of the energy of a laser class
precautions in their production plants, inclu- 2 sensor due to their reduced laser power of
ding the use of laser class 1 sensors if people max. 390 W. This enables measurements of
are working in close proximity to laser sensors. even sensitive materials such as substrates
For example, this is the case when handling without causing any alterations of the target
equipment for the attachment or installation material.
of interior parts is used while laser sensors
precisely align these parts. 46 20
2x M3 threads or
as mounting holes
for M2
30
2.70
3 40
8 6 7.50
SMR
10
Laser
MR SMR Y
Limits for free
space
10 20 10
MR
25 25 21 Keep this area free from

other light sources and/or
50 35 28
their reflections
Y 2 8
13
Model ILD1420-10CL1 ILD1420-25CL1 ILD1420-50CL1 ILD1420-100CL1 ILD1420-200CL1

Measuring range 10mm 25mm 50mm 100mm on request 200mm on request
Start of measuring range SMR 20mm 25mm 35mm - -
Midrange MMR 25mm 37.5mm 60mm - -
End of measuring range EMR 30mm 50mm 85mm - -
8 - 10m 20 - 25m 40 - 50m - -
Linearity 1)
0.08 ... 0.1% FSO
Repeatability 2) 0.5m 1m 2m - -
Measuring rate 3) 0.25kHz / 0.5kHz / 1kHz / 2kHz / 4kHz
Light source Semiconductor laser <0.39mW, 670nm (red)
SMR 90 x 120m 100 x 140m 90 x 120m
Spot diameter MMR 45 x 40m 120 x 130m 230 x 240m - -
10% EMR 140 x 160m 390 x 500m 630 x 820m
smallest diameter 45 x 40m with 24mm 55 x 50m with 31mm 70 x 65m with 42mm - -
Laser protection class Class 1 in accordance with DIN EN 60825-1 : 2015-07
Storage temperature -20C ... +70C (non-condensing)
Measurement analog 4...20mA (1-5V with cable PCF1420-3/U); 12 bit; freely scalable within the measuring range 4)
Weight
with pigtail approx. 60g
button Select button for zero / teach / factory settings
Operation Application-specific presets; peak selection, video signal; freely selectable averaging possibilities; data reduction;
web interface
setup management 5)
Power supply 11-30V DC, 24V P< 2W
3m integrated, open ends
Sensor cable
0.3m pigtail with 12-pole M12 connector
EN 61 000-6-3 / DIN EN 61326-1 (Class B)
Electromagnetic compatibility (EMC)
EN 61 000-6-2 / DIN EN 61326-1
SMR = start of measuring range; MMR = midrange; EMR = end of measuring range
1)
Values apply from 0 - 50% FSO or 50 - 100% FSO; 2) Measuring rate: 2kHz, median 9; 3) Factory setting 2kHz;
modifying the factory settings requires the IF2001/USB converter (optionally available)
4)
The d/a conversion is executed with 12 Bit; 5) Connection to PC via IF2001/USB (optionally available)
14 High Speed PSD Sensors optoNCDT 1610 / 1630
Nine models with measuring ranges

from 4mm to 100mm
Sensor head and
separate controller
Up to 100kHz (-3dB) true analog
frequency response
INTER Analog outputs (U/I)
FACE Ethernet
Controller
102 27.5
Controller 92 4
Analog laser triangulation sensors of the 102 27.5
optoNCDT 1610 and 1630 series are 4
8
92
4.4 4.4
designed for extremely fast measurement
8
processes. Equipped with a PSD array,
74
64
the sensors automatically adapt to the Status LED

reflection factor of the measurement object
74
64
Status LED
enabling measurements even on changing LAN connector
surfaces. LAN connector
The LD 1610 series achieves a frequency

response of 10kHz (-3dB) while the LD 1630 optoNCDT 1610/1630 (4/10/20mm) optoNCDT 1610/1630 (50/100mm)
series is suitable for measurements up to 100 100
optoNCDT
17.2 1610/1630 (4/10/20mm)
8.5 optoNCDT
40 1610/1630 (50/100mm)
kHz (-3dB). 100
17.2 8.5 40
Equipped with analog interfaces (current,

4
M4 M4
voltage) and an optional Ethernet interface, M4
4
30
the controller can be easily integrated into di- M4 20 M4 M4
50
42
50
42
2030 72
verse systems. 8.5 20
8.5
50
4 42
50
42
20 M4 72 M4
8.5 8.5
M4 M4
A
46
4
A
15
9.5
SMR SMR
46
A
30
21 15
9.5
30
21
SMR SMR
MR
MR
MR SMR A
4 22 15
10 40 13.6
20 55 20.5
50 115 26.6
MR
100 170 25.8

MR
15
Sensors LD1610-4 LD1610-10 LD1610-20 LD1610-50 LD1610-100

Measuring range 4mm 10mm 20mm 50mm 100mm
Start of measuring range 22mm 40mm 55mm 115mm 170mm
8m 20m 40m 100m 200m
Linearity
0.2% FSO
Resolution (noise, dynamic1)) 2.6m 6.5m 13.0m 32.5m 65m
Resolution (noise, dynamic2)) 0.2m 0.5m 1m 2.5m 6m
Spot diameter 0.3mm 0.6mm 0.9mm 1.5mm 1.5mm
Frequency response 10kHz (-3dB)
Light source laser, wavelength 670nm, red (visible)
Laser protection class Class 2
Max. Vibration 10g to 1kHz (sensor head, 20g optional)
Operating temperature 0C +50C
Storage temperature -20C ... +70C
Other measuring ranges on request 1)
Measurement on white target - Frequency response 10kHz 2)
Measurement on white target - Frequency response 20Hz
Sensors LD1630-4 LD1630-10 LD1630-20 LD1630-50

Start of measuring range 22mm 40mm 55mm 115mm
12m 30m 60m 150m
Linearity
0.3% FSO
Resolution (noise, dynamic 1)) 7m 17.5m 35m 50m
Resolution (noise, dynamic 2)) 0.4m 1m 2m 7.5m
Spot diameter 0.3mm 0.6mm 0.9mm 1.5mm
Frequency response 100kHz (-3dB)
Light source laser, wavelength 670nm, red (visible)
Laser protection class Class 2
Max. Vibration 5g to 1kHz (sensor head, 20g optional)
Other measuring ranges on request 1) Measurement on white target - Frequency response 100kHz 2) Measurement on white target - Frequency response 230Hz
Controller
Distance 10V (optional 0 ... 10V / 0 ... 5V) ; 4 ... 20mA
Impedance approx. 0 Ohm (10mA max.)
Tilt angle with 30 object inclination (axis A): approx. 0.5% (white target)
Analog output
Frequency response DC ... 10kHz / 100kHz
Thermal drift 0.02% C FSO
Light intensity 0V ... 10V
Digital output Ethernet (optional) TCP/IP factory set IP 192.168.122.245 (frequency response 1 - 30kHz)
MIN +24V when distance < MIN, LED yellow
Switching outputs OK +24V when distance > MIN and < MAX, LED green
with display MAX +24V when distance > MAX, LED orange
Error +24 V, LED red
Switching hysteresis approx. 0.5% FSO
Permissible ambient light 20,000 lux
Operating time 50,000h (laser diode)
Insulation voltage 200V DC, 0 V against housing
Humidity up to 90% RH, non-condensing
Protection class sensor: IP64, controller: IP40
Power supply +24V DC / 200mA (10 ... 30V)
Connector 25-in D-sub
Sensor cable length, standard 2m
16 The universal sensor with integrated controller optoNCDT 1700
Eleven models with measuring

ranges from 2mm to 1000mm
Real Time Surface Compensation

312Hz
375Hz
Adjustable measuring rate
1000Hz up to 2.5kHz
Analog Analog (U/I)
Digital and digital output
Finside
ilter Adjustable filter functions
(firmware)
High flex cables for
dragchain or robot use
Calibration certificate included
The standard among laser Adjustable limit switches

triangulation sensors As well as in precise measurement, the
The optoNCDT 1700 plays a leading role optoNCDT 1700 sensors are also used for
in its class in terms of its combination of tolerance and limit value monitoring. Two
performance and range of features. Due to its switching points are parameterized via the
compact design with integrated controller, the software. The switching hysteresis can also
sensor is extremely versatile in these appli- be configured individually.
cations and can easily be integrated in re-
stricted installation spaces. The powerful
sensor and its innovative RTSC feature enable
measurements against diverse surface types.
MR SMR A B
optoNCDT 1700 (2/10/20/50/100/200/250VTmm) optoNCDT 1700 (40/500/750mm)
2 24 35 40 44.8 25.8 16.8
97 150
89 3x Mounting holes 140 10 30 34.3 35.2 35.6 28.7 20.5
80 4.5 mm 130 3x Mounting 20 40 28.8 27.5 26.7 30.1 22.0
75 holes
4.5 mm 50 45 26.5 23.0 18.3 31.5 22.5
18.5
100 70 19.0 15.4 10.9 32.6 24.1

67
75
A 200 70 19.0 9.78 6.97 33.1 24.1

37.5
B
70
80
250VT 70 19.0 8.4 6 33.5 24.1

A
4 8 40 175 22.1 21.9 21.8 101 86
40
4
B
13.4
SMR
15
300 200 18.3 12.2 9.6 99.4 81
5 12
5
Start of measuring
15 17.5 500 200 19.3 9.8 7.0 101 85
SMR
range
MR
750 200 19.3 7.7 5.0 101 85

End of measuring Start of measuring
range range
Connector (sensor side)
MR
15
End of measuring
range
13.2
~50
30
15
24.2 36.1 Connector (sensor cable)

35
17.5
~15
31 75
~51
(Dimensions in mm, not to scale. All CAD files are available online.)
17
ILD ILD ILD ILD ILD ILD ILD ILD ILD ILD ILD
Model
1700-2 1700-10 1700-20 1700-40 1700-50 1700-100 1700-200 1700-250VT 1700-300 1700-500 1700-750
Measuring range 2mm 10mm 20mm 40mm 50mm 100mm 200mm 250mm 300mm 500mm 750mm
Start of measuring range 24mm 30mm 40mm 175mm 45mm 70mm 70mm 70mm 200mm 200mm 200mm
Midrange 25mm 35mm 50mm 195mm 70mm 120mm 170mm 195mm 350mm 450mm 575mm
End of measuring range 26mm 40mm 60mm 215mm 95mm 170mm 270mm 320mm 500mm 700mm 950mm
2m 8m 16m 32m 40m 80m 200m 630m 240m 400m 750m

Linearity 0.1% 0.08% 0.1% 0.25% 0.08% 0.08% 0.1%
FSO FSO FSO FSO FSO FSO FSO
Resolution
0.1m 0.5m 1.5m 4m 3m 6m 12m 50m 18m 30m 50m
(at 2.5kHz, without averaging)
Measuring rate 2.5kHz / 1.25kHz / 625Hz / 312.5Hz (adjustable)
Light source Semiconductor laser <1mW, 670nm (red)

Permissible ambient light
10,000lx 15,000lx 10,000lx
(at 2.5kHz)
Laser safety class Class 2 in accordance with DIN EN 60825-1 : 2001-11
SMR 80m 110m 320m 230m 570m 740m 1300m 1500m 580 x 860m 1500m 1500m
Spot
MMR 35m 50m 45m 210m 55m 60m 1300m 1500m 380 x 380m 1500m 1500m
diameter
EMR 80m 110m 320m 230m 570m 700m 1300m 1500m 470 x 530m 1500m 1500m
0.025% 0.025%
Temperature stability 1)
0.01% FSO/C 0.01% FSO/C
FSO/C FSO/C
Operating temperature 0C ... +50C 0C ... +55C 0C ... +50C
Measurements switchable: 4 ... 20mA / 0 ... 10V RS 422 / USB (optional with cable PC1700-3/USB)
Output
Switching outputs 1 x error or 2x limit values (configurable)
Switching input Laser ON-OFF / Zero
Operation via membrane keypad on sensor or via PC with ILD 1700 tool
Power supply 24VDC (11 30 VDC), max. 150mA

Sensor cable
standard 0.25m integrated / option: 3m or 10m extensions
(with connector)
Synchronization possible for simultaneous or alternating measurements
Vibration 2g / 20 ... 500Hz
Shock 15g / 6ms

approx.
Weight (with 25cm cable) approx. 550g approx. 550g approx. 550g approx. 600g
600g
1)
based on digital output
18 Highly dynamic laser sensor with integrated controller optoNCDT 2300
Eight models with measuring

312Hz
375Hz
1000Hz up to 49.14kHz
INTER Ethernet / EtherCAT / RS422
FACE Analog ouput via C-Box
Advanced
Measurement of
diffuse and specular surfaces
Thickness measurement of
transparent materials
The optoNCDT 2300 is the new, high Surface Compensation) feature is a develop- Data output is via Ethernet, RS422 or Ether-
performance version of Micro-Epsilon laser ment of the companys already proven RTSC CAT. The C-Box enables analog signal output.
triangulation sensors and offers an adjus- technology and, with its improved dynamic All sensor configurations are carried out using
table measuring rate of up to 49.14kHz. The range, enables a more precise real time sur- a user-friendly web interface. The optoNCDT
entire electronics is already integrated in a face compensation during the measurement 2300 is particularly used for high speed appli-
compact sensor housing which is a world- process. The threshold value of the compen- cations such as the monitoring of vibrations or
wide unique feature of this sensor class. sation range can be easily configured via the measurements on challenging surfaces.
The new A-RTSC (Advanced Real Time software.
optoNCDT
optoNCDT 2300-2
2300-2 ...
... 2300-100
2300-100 optoNCDT
optoNCDT 2300-2
2300-2 ...
... 2300-20
2300-20 optoNCDT 2300-200
optoNCDT 2300-200 /2300-300
/2300-300
Diffuse
Diffuse reflection
reflection Direct
Direct reflection
reflection
150
150
140
140
97
97 30
30 130
89 9977 130 3x
3x mounting
mounting
89 75 holes
8899 75 holes
44 4.5
4.5 4.5mm
4.5mm
18.5
44.5
.5
18.5
44
75
67
75
67
70
80
6677
7755
70
80
Mounting
Mounting holes
33.5
holes
33.5
4.5
4.5 for
for M4
M4 screws
3333.5.5
screws 91.6
91.6
4040
Mounting
Mounting holes
holes
44
4.5
4.5 for
for M4
M4 screws
screws 7 4488
44
10
10 48
48 7 77
15 1100 5
55
13.5 15 5
SMR
13.5 1133.5
RR
SMR
.5
+00.5.5MM
Laser Limits
Limits for
for free
free 15
15
SMR
Laser
SMR
space
space
SSMMRR+

Start
Start of
of
(dir.R)
MB(dir.R)
Limits
Limits for
for free measuring
measuring range
space
free range
space
MR
MR
MR
MB
MR
Keep
Keep this
this area
area free
free from
from 22 End of
End of measuring
measuring
other
other light
light sources
sources and/or
and/or
range
range
Y 22 their reflections
their reflections
Y
35
35
17.5
MR SMR Y
17.5
2 24 1.5
5 24 3.5 MR SMR + 0.5 MR
10 30 6.5 2 25 20.5
20 40 10.0 5 26.5 20 MR A B
50 45 23.0 10 35 17.5 200 25.1 16.7 13.1 91.6 76
100 70 33.5 20 50 13.8 300 18.3 12.2 9.6 99.4 81
19
Model ILD2300-2 ILD2300-5 ILD2300-10 ILD2300-20 ILD2300-50 ILD2300-100 ILD2300-200 ILD2300-300

Measuring range 1) 2 (2)mm 5 (2)mm 10 (5)mm 20 (10)mm 50 (25)mm 100 (50)mm 200 (100)mm 300 (150)mm
Start of measuring range SMR 24 (24)mm 24 (24)mm 30 (35)mm 40 (50)mm 45 (70)mm 70 (120)mm 130 (230)mm 200 (350)mm
Midrange MMR 25 (25)mm 26.5 (25)mm 35 (37.5)mm 50 (55)mm 70 (82.5)mm 120 (145)mm 230 (280)mm 350 (425)mm
End of measuring range EMR 26 (26)mm 29 (26)mm 40 (40)mm 60 (60)mm 95 (95)mm 170 (170)mm 330 (330)mm 500 (500)mm
0.6m 1.5m 2m 4m 10m 20m 60m 90m
Linearity
0.03% FSO 0.02% FSO 0.02% FSO 0.03% FSO
0.03m 0.08m 0.15m 0.3m 0.8m 1.5m 3m 4.5m
Resolution (with 20kHz)
0.0015% FSO
Measuring rate switchable (software) 49.14 / 30 / 20 / 10 / 5 / 2.5 / 1.5kHz (49.14kHz with reduced measuring range)
Permissible ambient light 10,00040,000lx
SMR 55 x 85m 70 x 80m 75 x 85m 140 x 200m 255 x 350m 350m 1300m 580 x 860m
Spot diameter MMR 23 x 23m 30 x 30m 32 x 45m 46 x 45m 70 x 70m 130m 1300m 380 x 380m
EMR 35 x 85m 70 x 80m 110 x 160m 140 x 200m 255 x 350m 350m 1300m 470 x 530m
Light source laser diode (670nm) class 2
Operating temperature 0C ... +50C
Ethernet / EtherCAT
Inputs/Outputs RS422
analog output via CSP2008 / C-Box
Laser on/off
Inputs
Sync/Trigger input
Power supply 24 VDC (11 30V); PV < 3W
LED status / power / Ethernet / EtherCAT
Standard 0.25 m (with connector)
Sensor cable
Option 3 / 6 / 9 m with 15-pole sub-D Connector
EN 61326-1: 2006-10
Electromagnetic
DIN EN 55011: 2007-11 (group 1, class B)
compatibility (EMC)
EN 61 000-6-2: 2006-03
Shock 15g / 6ms / 3 axes
1)
Range specifications: value in brackets is valid for a measuring rate of 49.14kHz
ILD 2300-2
ILD 2300-5
Start of measuring range

ILD 2300-10 Measuring range up to 30kHz measuring rate
Measuring range 49.14kHz measuring rate
ILD 2300-20
ILD 2300-50
ILD 2300-100
ILD 2300-200
ILD 2300-300
50mm 100mm 150mm 200mm 250mm 300mm 350mm 400mm 450mm 500mm
20 Sensor for shiny metallic and rough surfaces optoNCDT 1700LL
Laser Line averages across shiny

metallic or structured surfaces
Four models with measuring

312Hz
375Hz
1000Hz up to 2.5kHz
Analog Analog (U/I)
Finside
(firmware)
High flex cables for
dragchain or robot use
The compact optoNCDT 1700LL is perfect- optoNCDT 1700LL (2/10/20/50mm)

ly suitable for measurements against shiny
97
and structured surfaces. The point-shaped 89 3x Mounting
laser beam is widened using a lens to form 80 holes 4.5mm
an oval point. Therefore, physically induced

interferences can be easily filtered enabling
measurements on shiny surfaces. Due to its
67
75
extremely compact size, the sensor can easily

A
37.5
be integrated into restricted installation space. B
4 8
4
13.4 15
SMR

Start of measuring Connector (sensor side)
range
MR
15
End of measuring ~50

range
Connector (sensor cable)

13.2
30
~15
15
24.2 36.1 ~51
Dimensions in mm, not to scale.
MR SMR A B
2 24 35 40 44.8 25.8 16.8
10 30 34.3 35.2 35.6 28.7 20.5
20 40 28.8 27.5 26.7 30.1 22.0
50 45 26.5 23.0 18.3 31.5 22.5

21
Model ILD1700-2LL ILD1700-10LL ILD1700-20LL ILD1700-50LL
Start of measuring range 24mm 30mm 40mm 45mm
Midrange 25mm 35mm 50mm 70mm
End of measuring range 26mm 40mm 60mm 95mm
2m 8m 16m 40m
Linearity
0.1% FSO 0.08% FSO
Resolution 1) (at 2.5kHz without averaging) 0.1m 0.5m 1.5m 3m
Light source Semiconductor laser <1 mW, 670nm (red)
Permissible ambient light with 2.5kHz 10,000lx
Laser safety class Class 2 according to DIN EN 60825-1 : 2008-05
SMR 85 x 240m 120 x 405m 185 x 485m 350 x 320m
EMR 64 x 400m 125 x 835m 195 x 1200m 300 x 1940m
Temperature stability 2) 0.025% FSO/C 0.01% FSO/C
Measurements switchable: 4 ... 20mA / 0 ... 10V / RS422 / USB (optional via cable PC1700-3/USB)
Output
Sensor cable (with connector) standard 0.25m integrated / option: 3m or 10m extensions
Shock 15g / 6ms
Weight (with 25cm cable) approx. 550g

1)
With measurements against high-gloss surfaces (targets) the resolution depends on the material
2)
22 Sensor for shiny metallic surfaces optoNCDT 2300LL
Laser Line averages across shiny

metallic or structured surfaces
312Hz
375Hz
Advanced
Real-Time-Surface-Compensation
The optoNCDT 2300LL is ideally suitable for optoNCDT 2300LL

measurements against shiny and structured
surfaces. The point-shaped laser beam is 97 30
89
widened using a lens to form an oval point. 4 4.5
Therefore, physically induced interferences
can be easily filtered enabling measurements
on shiny surfaces. Due to its extremely com-
75
67
pact size, the sensor can easily be integrated

33.5
into restricted installation space.

Mounting holes
4
The "Advanced Real Time Surface Compen- 10 48

4.5 for M4 screws
7 7
sation" (A-RTSC), with its improved dynamic 13.5 15
MBA
range, enables a more precise real time sur- Laser
face compensation during the measurement

process. Data output is via Ethernet, RS422 Limits for free
space
or EtherCAT. All sensor configurations are
MB
carried out using a user-friendly web interface. Keep this area free from
other light sources and/or
Y 2 their reflections
MR SMR Y
2 24 1.5
10 30 6.5
20 40 10.0
50 45 23.0
23
Model ILD2300-2LL ILD2300-10LL ILD2300-20LL ILD2300-50LL
Measuring range 1)
2 (2)mm 10 (5)mm 20 (10)mm 50 (25)mm
Start of measuring range SMR 24 (24)mm 30 (35)mm 40 (50)mm 45 (70)mm
Midrange MMR 25 (25)mm 35 (37.5)mm 50 (55)mm 70 (82.5)mm
End of measuring range EMR 26 (26)mm 40 (40)mm 60 (60)mm 95 (95)mm
0.6m 2m 4m 10m
Linearity
0.03% FSO 0.02% FSO
0.03m 0.15m 0.3m 0.8m

Resolution (20kHz)
0.0015% FSO
SMR 85 x 240m 120 x 405m 185 x 485m 350 x 320m
EMR 64 x 400m 125 x 835m 195 x 1200m 300 x 1940m

Ethernet / EtherCAT
Laser on/off
Inputs
Sync/Trigger input
Standard 0.25m (with connector)

Sensor cable
Option 3 / 6 / 9m with 15-pole sub-D Connector

EN 61326-1: 2006-10
Electromagnetic
compatibility (EMC)
EN 61 000-6-2: 2006-03

1)
24 Long-range sensors for large distances optoNCDT 1710-50
High accuracy and

long standoff distances
312Hz
375Hz
Adjustable measurement rate
1000Hz up to 2.5kHz

Digital
Finside
(firmware)
optoNCDT 1710-50 long-range laser sensors optoNCDT 1710-50 (50mm)

are designed for large measurement dis-
Window cmos ( 35.5) 30 free Window laser ( 12.5) 5 free
tances combined with high precision. They
operate according to the triangulation and
measure distances without contact on a wide
48
range of material surfaces.

24
39 147 14
Unlike conventional laser triangulation sen-

sors, the long-range series measures over a
large measurement distance and is therefore
better protected against possible collisions.
The integrated Real Time Surface Compen-
sation enables measurements even on chan-
ging surfaces.
73
83
90
61
Mounting holes 6
95
190
195
550
(Dimensions in mm, not to scale.) Measuring range 50

25
Model ILD1710-50
Measuring range 50mm
Start of measuring range 550mm
Midrange 575mm
End of measuring range 600mm
50m
Linearity
0.1% FSO
7.5m
Resolution
0.015% FSO (at 2.5kHz without averaging)
SMR 400 x 500m
Spot diameter MMR 400 x 500m
EMR 400 x 500m
Light source semiconductor laser <1mW, 670nm (red)
Operating temperature 0C ... 50C
Storage temperature -20C ... 70C
Analog 4 ... 20mA (0 ... 10V)
Output Digital RS422 / USB (optional with cable PC1700-3/USB)
Sensor cable standard: 0.25 m - integrated
Shock 15g / 6ms
Weight Sensor approx. 800g

FSO = Full Scale Output; All specifications apply for a diffusely reflecting matt white ceramic target;
SMR = Start of measuring range MMR = Midrange EMR = End of measuring range
26 Long-range sensors for large distances optoNCDT 2310
High accuracy and

312Hz
375Hz
INTER Ethernet / Ethercat / RS422
Advanced
The optoNCDT 2310 long-range laser sensors optoNCDT 2310-10/2310-20/2310-40 optoNCDT 2310-50
Window cmos ( 35.5) 30 free Window laser ( 12.5) 5 free
are designed for large measurement distan- 150
ces combined with high precision. 140
130
75 3x Mounting
48
They operate according to the triangula- holes 4.5mm
18.5
24
tion and measure distances without contact 39 147 14
on a wide range of material surfaces. Un-
like conventional laser triangulation sensors,
70
80
the long-range series measures over a large

91.6
measurement distance and is therefore bet-
40
ter protected against possible collisions. The

integrated Real Time Surface Compensation 5
5
15
enables measurements even on changing
73
83
90
61
surfaces.
SMR
3x Mounting holes
6
95
MR 190
195
35
17.5
550
MR 50
(Dimensions in mm, not to scale.)

27
Model ILD2310-10 ILD2310-20 ILD2310-40 ILD2310-50
Measuring range 1)
10 (5)mm 20 (10)mm 40 (20)mm 50 (25)mm
Start of measuring range 95 (100)mm 90 (100)mm 175 (195)mm 550 (575)mm
Midrange 100 (102.5)mm 100 (105)mm 195 (205)mm 575 (587.5)mm
End of measuring range 105 (105)mm 110 (110)mm 215 (215)mm 600 (600)mm
3m 6m 12m 50m
Linearity
0.03% FSO 0.03% FSO 0.03% FSO 0.1% FSO
0.5m 1m 0.6m 7.5m

Resolution 0.005% FSO
0.005% FSO 0.0015% FSO 0.015% FSO
(at 10kHz without averaging)
SMR 400 x 500m 200m 230m 400 ... 500m
Spot diameter MMR 400 x 500m 60m 210m 400 ... 500m
EMR 400 x 500m 200m 230m 400 ... 500m

Ethernet / EtherCAT
Laser on/off
Inputs
Sync/Trigger input
Sensor cable standard: 0.25m - integrated
EN 61326-1: 2006-10
Electromagnetic
compatibility (EMC)
EN 61 000-6-2: 2006-03

1)
28 Universal sensor with 1,000 millimeter range optoNCDT 1710-1000
High accuracy and

Model with measuring range
up to 1000mm
312Hz
375Hz
1000Hz up to 2.5kHz
Analog Analog (U/I)

Finside
(firmware)
The optoNCDT 1710-1000 series is extremely optoNCDT 1710-1000

versatile due to its well-conceived design with
integrated controller. The powerful sensor and 47
its innovative RTSC feature enable measure-
ments against diverse surface types.
The 1710-1000 model is designed for

measurements with a large distance from the
target.
190
200
operator panel
95
85
)6
(
61 24
71 48
73 5
83
24
9
field of view - keep free

32
(4.65)
(4.2)
(6.3)
(7.45)
(8.3)
145
connector
9
cable
0.25m
SMR =1000 MR= 1000
29
Model ILD1710-1000
Measuring range 1000mm
Start of measuring range (offset distance) 1000mm
Midrange 1500mm
End of measuring range 2000mm
1mm
Linearity
0.1% FSO
Resolution (at 2.5kHz without averaging) 100m
Permissible ambient light at 2.5kHz 10,000 lx
Laser protection class Class 2 in accordance with DIN EN 60825-1 : 2008-05
SMR 2.5 ... 5mm
Spot diameter MMR 2.5 ... 5mm
EMR 2.5 ... 5mm
Operating temperature 0C ... 50C
Output
Power supply 24VDC (11 ... 30 VDC), max. 150mA
Sensor cable standard 0.25m integrated
Shock 15g / 6ms
Weight ~ 0.8kg
SMR = Start of measuring range MMR = Midrange EMR = End of measuring range
optoNCDT 1700BL (20/200 mm) o
30 Blue Laser Triangulation Displacement Sensors optoNCDT 1700BL
97 3x Mounting
89 holes
80 4.5
Six models with measuring ranges

from 20mm to 1000mm
67
75
Blue
A Laser Technology
37.5
B
(Blue violet laser diode 405nm)
4 8
40
4
Start of 13.4
measuring 15
range
312Hz Adjustable measuring rate
375Hz
1000Hz up to 2.5kHz
Measuring
Analog
range Analog (U/I)
Finside
(firmware)
High flex cables for dragchain
13.2
30
or robot use
15
24.2 36.1
35
optoNCDT 1700BL (20/200 mm) optoNCDT 1700BL (500/750 mm)

optoNCDT 1700BL (20/200 mm) optoNCDT 1710optoNCDT
(50/1000mm)
1700BL (500/750mm)
Equipped with a blue-violet laser diode 97 3x Mounting 150
89 holes 140
(405nm), the optoNCDT 1700BL sensor 97 3x Mounting
4.5 mm
35.5 150 12.5
80 130
achieves high accuracies on red-hot glowing 89 holes 140
75 3x Mounting
80 4.5 130
metals and organic materials. holes
18.5 18.5
75 3x Mounting
4.5 mm
48
holes
24
4.5
In numerous applications, Blue Laser sensors
67
75
39 147 14
A
are superior to standard sensors that use a
37.5 37.5
67
75
70
80
A
red laser diode. In contrast to a red laser, the B A
70
80
4 8
reduced wavelength of the blue laser light
40
4
Start of B
13.4 15 A
measuring 4 8
does not penetrate materials such as wood,
40
4
Start
rangeof B
13.4 15 5 12
skin and foods. The blue laser generates a mi- measuring
5
Start of 15 17.5
range
measuring 5 12
nimal laser point on the surface and therefore
5
Measuring Start of
range 15 17.5
range
offers more stable, precise measurements. Measuring
measuring
range 3x Mounting holes 6
73
83
90
61
range
Measuring
optoNCDT
The inner workings1700BL
of the(500/750mm)
Blue Laser triangu- range
Measuring
lation sensor are a complete
150 re-design. The range 95
sensors are equipped 140 with new high-end
13.2 13.2
190
30
15
130 195
lenses, new intelligent laser control and evalu-
30
75 24.2 36.1
3x Mounting
35
15
ation algorithms.
17.5 17.5
holes 24.2 (500/750mm)
18.5
optoNCDT 1700BL (20/200 mm) optoNCDT 1700BL 36.1 Start

35
4.5
31 75 Measuring
97 150 range
3x Mounting 31 75
89 holes 140
80 4.5 130
70
80
75 3x Mounting
A holes
18.5
8 optoNCDT 1710 (50/1000 mm) Connector (sensor side)

40
B 4.5
5
optoNCDT
35.5 1710 (50/1000mm) 12.5 Connector (sensor side)
15 15
MR SMR A B
67
75
5 12
5
A 20Start of 40 30.1 22.0 15 17.5 35.5 12.5 ~50

37.5
B measuring
70
80
200 range 100 35.4 25.1 ~50

48
500 200 101 8 85 A

4
24
40
4
Start of B
48
13.4
measuring 750 200 10115 85 39 147 14 Measuring
24
Measuring
range range
range 5 12 Connector (sensor cable)
5
39Start of 147 14
15 17.5
~15 ~15
measuring
Measuring
range
range ~51
~51
35
17.5
Measuring
range
31 75
13.2
30
73
83
90
61
3x Mounting holes 6
15
24.2 36.1
73
83
90
61
3x Mounting holes 6
5
31
ILD ILD ILD ILD ILD ILD

Model
1700-20BL 1700-200BL 1700-500BL 1700-750BL 1710-50BL 1710-1000BL
Measuring range 20mm 200mm 500mm 750mm 50mm 1000mm
Start of measuring range 40mm 100mm 200mm 200mm 550mm 1000mm
Midrange 50mm 200mm 450mm 575mm 575mm 1500mm
End of measuring range 60mm 300mm 700mm 950mm 600mm 2000mm
16m 200m 400m 750m 50m 1mm

Linearity
0.08% FSO 0.1% FSO 0.08% FSO 0.1% FSO 0.1% FSO 0.1% FSO
Resolution (at 2.5kHz without averaging) 1.5m 12m 30m 50m 5m 100m
Light source Semiconductor laser <1 mW, 405nm (blue violet), laser class 2
Permissible ambient light (with 2.5kHz) 10,000lx
Laser safety class Class 2 in accordance with DIN EN 60825-1 : 2008-05
SMR 320m 1300m 1500m 1500m 400 x 500m 2.55mm

optoNCDT 1700BL (500/750mm)
Spot diameter MMR 45m 1300m 1500m 1500m 400 x 500m 2.55mm
optoNCDT 1700BL
150(500/750mm)
EMR 320m 1300m 1500m 1500m 400 x 500m 2.55mm
140
150
Temperature stability1)
130 0.01% FSO/C
140 75 3x Mounting
Operating temperatureholes
130 0C ... +50C
18.5 18.5
75 4.5
Storage temperature 3x Mounting -20C ... +70C
holes
4.5
Output
70
80
Switching
A input Laser ON-OFF / Zero
70
80
40
B
A
40
Power Bsupply
5 12 24VDC (11 ... 30 VDC), max. 150mA
5
Start of 15 17.5
measuring Sensor cable
5
(with connector) standard 0.25m integrated / option: 3m or 10m extensions
12
5
range
Start of 15
Synchronization 17.5 possible for simultaneous or alternating measurements
measuring
range
Measuring
range Vibration 2g / 20 ... 500Hz
Measuring
range Shock 15g / 6ms
Weight (with 25cm cable) approx. 550g approx. 550g approx. 600g approx. 600g approx. 800g approx. 800g
17.5 17.5
1)
31 75
31 75

15 15
~50
~50

~15 ~15
~51
~51
32 Blue Laser Triangulation Displacement Sensors optoNCDT 2300BL
Three models with measuring

Blue Laser Technology
312Hz
375Hz
INTER Ethernet / Ethercat / RS422
Advanced
Measurement of
diffuse and specular surfaces
Blue Laser sensors in the optoNCDT 2300BL optoNCDT 2310-50BL

series are designed for high speed displace- Window cmos ( 35.5) 30 free Window laser ( 12.5) 5 free
ment, distance and position measurements

on red-hot glowing metals and organic ma-
48
terials. In numerous applications, Blue Laser
24
sensors are superior to standard sensors that
39 147 14
use a red laser diode. In contrast to a red
laser, the blue-violet laser light does not pene-
trate materials such as wood, skin and foods.
The blue laser generates a minimal laser point
on the surface and therefore offers more
stable, precise measurements.
optoNCDT
optoNCDT2300-2BL
2300-2BL/ 2300-5BL
/ 2300-5BL optoNCDT
optoNCDT2300-2BL
2300-2BL/ 2300-5BL
/ 2300-5BL
73
83
90
61
3x Mounting holes 6
Diffuse
Diffuse
reflection
reflection Direct
Direct
reflection
reflection
9797 3030
8989 9797
8989 95
44 4.54.5
4.54.5 190
4 4
195
75
75
67
67
7657
67
75
Mounting
Mounting holes
holes
33.5
33.5
4.5
4.5
forfor
M4M4screws
screws
33.5
33.5
Mounting
Mounting holes
holes
4
4
4.5
4.5
forfor
M4M4screws
screws 4848
4
4
1010 4848 77 77
1515 1010
13.5
13.5
SMR
SMR
131.53.5
0.5 MR
SMR + 0.5 MR
550
Laser
Laser Limits
Limits
forfor
free
free
space
space
SMR +
MB (dir.R)
MB (dir.R)
Limits
Limits
forfor
free
free
space
space
MR
MR
Keep
Keep thisthis
area
area
free
free
from
from
other
otherlight
light
sources
sources and/or
and/or 2 2
their
their
reflections
reflections
YY 22
MR SMR Y MR SMR + 0.5 MR

2 24 1.5 2 25 20.5
MR 50
5 24 3.5 5 26.5 20 (Dimensions in mm, not to scale.)

33
Model ILD2300-2 BL ILD2300-5 BL ILD2310-50 BL
Measuring range 1)
2 (2)mm 5 (2)mm 50 (25)mm
Start of measuring range SMR 24 (24)mm 24 (24)mm 550 (575)mm
Midrange MMR 25 (25)mm 26.5 (25)mm 575 (587.5)mm
End of measuring range EMR 26 (26)mm 29 (26)mm 600 (600)mm
0.6m 1.5m 40m

Linearity
0.03% FSO 0.08% FSO
0.03m 0.08m 7.5m

Resolution (20kHz)
0.0015% FSO 0.015% FSO
SMR 70 x 80m 200 x 200m 400 ... 500m

Spot diameter MMR 20 x 20m 20 x 20m 400 ... 500m
EMR 80 x 100m 200 x 400m 400 ... 500m

Ethernet / EtherCAT
Laser on/off
Inputs
Sync/Trigger input
Power supply 24 VDC (11 ... 30V); PV < 3W

Sensor cable
Option 3 / 6 / 9m with 15-pole sub-D Connector

EN 61326-1: 2006-10
Electromagnetic
DIN EN 55011: 2007-11 (group 1. class B)
compatibility (EMC)
EN 61 000-6-2: 2006-03

Weight (with 25cm cable) 550g 550g approx. 800g
1)
34 High Precision Blue Laser Sensor for Reflective Objects optoNCDT 2300-2DR
Blue Laser Technology

312Hz
375Hz
FACE Analog ouput via C-Box/2A
Advanced
Blue Laser Sensor for direct reflection

The optoNCDT 2300-2DR high precision laser
triangulation sensor is designed for highly dy-
namic measurements on reflective and shiny
targets. The sensor can be fixed parallel to the
measurement object, which greatly simplifies
the installation process. Unlike conventional The sensor is used for production control
laser triangulation sensors, the optoNCDT purposes such as thickness measurement of
2300-2DR uses the directly reflected light flat glass, assembly monitoring of extremely
of the laser. During measurements, the blue small parts and for distance measurements on
laser light is directly reflected by the annealed glass.
measurement object onto the receiving op-
tics. Due to the blue laser light, the signal Compact and easy to integrate
on the receiver element is extremely stable, The entire electronics is integrated in a
which means the sensor is able to measure compact sensor housing which is a worldwi-
to nanometer resolution. An extremely small de unique feature of this sensor class. Data
laser spot size enables the detection of very output is via Ethernet, RS422 or EtherCAT.
small objects. The EtherCAT version will be available from
Q2/2017. If the sensor is operated with the
High speed and precision on C-Box/2A signal processing unit (optional),
reflective, shiny surfaces an analog output is also available. All sensor
The optoNCDT 2300-2DR offers an adjustable configurations are carried out using a user-
measuring rate up to 49kHz and so is suitable friendly web interface.
for dynamic high speed process monitoring.
The new A-RTSC (Advanced Real Time Sur-
face Compensation) feature is a development
of the proven RTSC technology and enables
more precise real time surface compensation
when measuring onto different surface types.
35
Model ILD 2300-2DR

Measuring range 1)
2mm (1mm)
Start of measuring range 9mm (9mm)
Midrange 10mm (9.5mm)
End of measuring range 11mm (10mm)
0.6m
Linearity
0.03% FSO
30nm
Resolution (20kHz)
0.0015% FSO
SMR 21.6 x 25m
Spot diameter MMR 8.5 x 11m
EMR 22.4 x 23.7m
Inputs/Outputs RS422 / Ethernet / EtherCAT (available from Q2/2017)
Laser on/off
Inputs
Synch / Trigger
Power supply 24 VDC (1130V); PV < 2W
off = Laser OFF
red = poor target; out of range
Status LED
yellow = MMR
Displays green = ok
off = Power OFF
Power LED
green = Ethernet / RS422
Sensor cable
Option 3/10m with 15-pole sub-D Connector
Electromagnetic compatibility (EMC) according to EN 55011/12.1998 and EN 50082-2/ 02.1996
FSO = Full Scale Output
1)
30
15
17 x 45
95
88
90
10
3.5
3.5 40.5 (45.5)

MR = 2
86
93
36 Accessories optoNCDT
Accessories for all optoNCDT Series Accessories optoNCDT 1610/1630

Power supply Supply and output cable
PS 2020 (power supply 24 V / 2.5 A, input 100 - 240 VAC, PC 1605-3 (3m)
output 24 VDC / 2.5 A, mounting onto symmetrical standard PC 1605-6 (6m)
rail 35mm x 7.5mm, DIN 50022) PC 1607-5/BNC (5m, BNC connector)
Controller unit for evaluation and signal conversion Accessories optoNCDT1700/1700LL/1700BL

CSP 2008 (controller for multiple signal processing; Supply and output cable (drag-chain suitable)
analog and digital interfaces) PC 1700-3 (3m)
PC 1700-10 (10m)
Controller unit for evaluation and signal conversion PC 1700-10/IF2008 (10m, for use with interface card IF2008)
C-Box/2A (controller for conversion and evaluation PC 1700-3/T (3m, for use with trigger box)
of up to two sensor signals) PC 1700-10/T (10m, for use with trigger box)
PC 1700-3/USB (3m, with USB-RS422-converter, power supply
Interface card 90 ... 230 VAC)
IF2008 (interface card for multiple signal processing;
analog and digital interfaces) Supply and output cable (suitable for use with robots)
PCR 1700-5 (5m)
USB converter PCR 1700-10 (10m)
IF2001/USB RS422/USB Converter
(converter for digital signals in USB) Supply and output cables for temperatures up to 200C
PC1700-3/OE/HT (3m)
USB converter PC1700-6/OE/HT (6m)
IF2004/USB 4 channels RS422/USB Converter PC1700-15/OE/HT (15m)
(converter, up to 4 digital signals in USB)
Protection housing
Accessories optoNCDT 1320/1420/1402CL1 SGHF (with air-purge collar), sizes S and M
upply and output cable, drag-chain suitable
S SGH (without air-purge collar), sizes S and M
PCF1420-1/I (1m, output 4...20mA) SGHF-HT (with water cooling)
PCF1420-1/I(01) (1m, output 4...20mA)
PCF1420-3/I (3m, output 4...20mA) Accessories optoNCDT 2300/2300LL/2300BL
PCF1420-6/I (6m, output 4...20mA) Supply and output cable
PCF1420-10/I (10m, output 4...20 mA) PC2300-0,5Y (connection cable to PC or SPS; for operation
PCF1420-15/I (15m, output 4...20mA) a PC2300-3/SUB-D will be required)
PCF1420-3/U (3m, with integrated resistor, output 1...5 VDC)* PC2300-3/SUB-D (3m; for operation a PC2300-0,5Y will be required)
PCF1420-6/U (6m, with integrated resistor, output 1...5 VDC)* PC 2300-3/CSP (3m, connection cable ILD2300-UniController)
PCF1420-10/U (10m, with integrated resistor, output 1...5 VDC)* PC 2300-3/IF2008 (interface and supply cable)
PCF1420-15/U (15m, with integrated resistor, output 1...5 VDC)* PC 2300-3/OE (3m)
PCF1420-3/IF2008 (3m, interface and supply cable) PC 2300-6/OE (6m)
PC1420-6/IF2008 (6m, supply and output cable) PC 2300-9/OE (9m)
PCF1420-10/IF2008 (10m, interface and supply cable) PC 2300-3/CSP (3m, connection cable ILD2300-UniController)
PC 1402-3/CSP (3m, connection cable for CSP 2008, PC 2300-10/CSP (10m, connection cable ILD2300-UniController)
only for optoNCDT 1420) PC 2300-15/CSP (15m, connection cable ILD2300-UniController)
* on request with output 2...10 VDC PC 2300-15/OE (15m)
* other cable lengths on request
Supply and output cable, suitable for use with robots
(available in 90 version) Protection housing
PCR 1402-3/I (3m) SGHF (with air-purge collar), sizes S and M
PCR 1402-6/I (6m) SGH (without air-purge collar), sizes S and M
PCR 1402-8/I (8m) SGHF-HT (with water cooling)
Supply and output cables for temperatures up to 200C

PC2300-3/OE/HT (3m)
PC2300-6/OE/HT (6m)
PC2300-9/OE/HT (9m)
PC2300-15/OE/HT (15m)
37
Setup and configuration software

The scope of supply includes a software for easy sensor configuration.
The settings can be implemented conveniently via a Windows user in-
terface on the PC. The sensor parameters are sent to the sensor via the
serial port and can also be saved if required. The software is available as
single and multi-channel version. The sensor is connected to the PC via
the sensor cable using a USB converter.
[for any ILD sensor]
Free download
Download free of charge from www.micro-epsilon.com/download:
software, driver and well-documented driver DLL for easy sensor inte-
gration in existing or customer software.
Protection housing for harsh environment
To protect the laser sensors in extreme environments, individual pro-

tective housings are available for all sensor models. There are three
different models:
SGH model:
Completely enclosed housing with an integrated front window, where
the sensor measures through the window. The water-resistant housing
provides protection against solvents and detergents.
SGHF model:
SGx ILD size S (140x140x71mm)
With window and compressed-air connection ideal for high ambient
for optoNCDT 1700 / 2300 dimensions 97x75mm
temperatures. The integrated air cooling of the housing offers optimum
protection for the sensor.
SGx ILD size M (140x180x71mm)
for optoNCDT 1700 / 2300 dimensions 150x80mm
SGHF-HT model:
This water-cooled protection housing with window and compressed-
air connection is designed for measurement tasks in ambient tempe-
ratures up to 200C.
Suitable for all long-range sensors
optoNCDT 1710
optoNCDT 1700-500 and optoNCDT 1700-750
optoNCDT 2310
optoNCDT 2300-200
Maximum ambient temperature 200C
Maximum cooling water temperature T(max) = 10C
Minimum water flow rate Q(min) = 3 liters/min
38 Accessories optoNCDT
IF2008 - PCI interface card

The IF2008 interface card is designed for installation in PCs
and enables the synchronous capture of four digital sensor
signals and two encoders. The IF2008E expansion board enables the
acquisition of two digital sensor signals, two analog sensor signals and
eight I/O signals. The absolutely synchronous data acquisition plays an
important role particularly for planarity or thickness measurement tasks.
The data are stored in a FIFO memory in order to enable resource-saving
processing in the PC in blocks.
Features
4x digital signals and 2x encoders with IF2008 basic PCB
2x digital signals, 2x analog signals and 8x I/O signals with
IF2008E expansion board
Interface card IF2008, IF2008E
Additional expansion board for a total of 6x digital signals, for individual signal processing
2x encoders, 2x analog signals and 8x I/O signals
FIFO data memory
Synchronous data acquisition
IF2001/USB converter RS422 to USB

The RS422/USB converter transforms digital signals from a laser-optical
sensor into a USB data packet. The sensor and the converter are con-
nected via the RS422 interface of the converter. Data output is done via
USB interface. The converter loops through further signals and features
such as laser on/off, switch signals and function output. The connected
sensors and the converter can be programmed through software.
IF2004/USB: 4-channel converter from RS422 to USB

The RS422/USB converter is used for transforming digital signals from up
to four optical sensors into USB data signals. The converter has four trig-
ger inputs and a trigger output for connecting additional converters. Data
is output via an USB interface. The connected sensors and the converter
can be programmed through software.
Features
4x digital signals via RS422
4x trigger inputs, 1x trigger output
Synchronous data acquisition
Data output via USB
C-Box controller for conversion and evaluation

of up to two sensor signals
C-Box/2A is used for fast D/A conversion of two digital input signals or for
evaluating two digital sensor signals. The controller is compatible with the
optoNCDT 2300 laser triangulation sensors. Output of the sensor signals
is possible via two configurable analog outputs, Ethernet or USB.
Handling of the C-Box/2A and of the connected sensors are performed

via web interface. Averaging functions, thickness, diameter, step and inc-
linations can be calculated. The D/A conversion is executed at 16 Bit and
max. 70kHz.
39
System design
Sensors via RS422

optoNCDT 1420
optoNCDT 1700
optoNCDT 2300
optoCONTROL 2500
optoCONTROL 2600
confocalDT 2451/2471
Beckhoff modules for extended inputs / outputs

EK1100, EtherCat bus coupler
EL4102, analog output terminal, 0 ... +10V, 2 channels (16bit), EtherCAT
EL4132, analog output terminal, -10... +10V, 2 channels (16bit), EtherCAT
CSP2008 - Universal controller for up to six sensor signals EL4024, analog output terminal, 4 ... 20mA, 4 channels (12bit), EtherCAT
EL2002, digital output terminal, 24 VDC/ 0,5 A, 2 channels, EtherCAT
The controller CSP2008 has been designed to process two to six both
EL2004, digital output terminal, 24 VDC/ 0,5 A, 4 channels, EtherCAT
optical and other sensors from Micro-Epsilon (6x digital or 4x analog input EL3142, analog input terminal, 0 ... 20mA, 2 channels (16bit), EtherCAT
signals max., 2x internal + 4x external via Beckhoff EtherCAT modules. EL3162, analog input terminal, 0 ... 10V, 2 channels (16bit), EtherCAT
EtherCAT is intended as external bus for connecting further sensors and EL1002, digital input terminal, 24 VDC/3 ms, 2 channels, EtherCAT
EL1012, digital input terminal, 24 VDC/10 s, 2 channels, EtherCAT
I/O modules. The controller is equipped with a display offering multi-color
EL1014, digital input terminal, 24 VDC/10 s, 4 channels, EtherCAT
backlighting which changes its color in the case of exceeding the limit EL1104, digital input terminal, 24 VDC/3 ms, 4 channels, EtherCAT
value while a signal is displayed. EL5101, incremental encoder interface, RS485 differential inputs, EtherCAT
EK1122, 2-Port EtherCAT junction
RS422 extension terminal
Features
Real-time capability up to 100kHz (processing and output of
measured values with 100kHz)
146
Unique user interface (web browser) for the configuration of the
controller via Ethernet on a PC. The user interface does not require any
45.2
program installation. Display and storage of measured values

96.8
103.1
on the PC via web browser.

35
Simple sensor connection with automatic sensor recognition, configu-

ration of the sensor using buttons and display on universal controller or 57.9
via web browser 3.3 69.1
Modular system upgradable with additional I/O modules for customer- Universal controller with mounting rail TS 35
specific requirements. Internal communication between I/O components (dimensions in mm, not to scale)
via EtherCAT connection (CSP 2008 acts as master).
Extremely flexible; function modules are freely combinable
Simple mounting using mounting rail TS 35
High performance sensors made by Micro-Epsilon
Sensors and systems for displacement Sensors and measurement devices for 2D/3D profile sensors (laser scanner)
and position non-contact temperature measurement
Optical micrometers, fiber Color recognition sensors, LED analyzers Measurement and inspection systems
optic sensors and fiber optics and color online spectrometer
Modifications reserved / Y9766188-F021057GKE
MICRO-EPSILON USA
8120 Brownleigh Dr. Raleigh, NC 27617 / USA
Phone +1/919/787-9707 Fax +1/919/787-9706
me-usa@micro-epsilon.com www.micro-epsilon.com

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More Precision

optoNCDT // Laser displacement sensors (triangulation)

2 Laser triangulation sensors optoNCDT

- Non-contact and wear-free

- Large distance from the

- Small light spot for smallest parts

- Almost independent of surface

Start of measuring range

End of measuring range

Measuring ranges Resolution Linearity Measuring rate Laser Targets

High Speed PSD Sensor

High Performance Sensors

Sensors with small laser line

Blue Laser Sensors

One of a kind: correct measurement

The unique RTSC function compensates for

duced by the laser is optimally matched to the

Unique to optoNCDT 1700 and 2300 laser

Cables suitable for drag chain systems

High measuring rates

Analog and digital output types Original

The optoNCDT BL models are equipped with

dard sensors with a red laser diode are ope-

Due to its shorter wavelength, the blue laser

Customer-specific sensor modifications

Distance of vehicle to road surface

Shape conformance on aluminum wheels

Distance measurement in dispenser

Blue Laser Sensors for Dimensional Ins-

Flatness measurement of IC pins Package dimensions

optoNCDT LL for shiny metallic surfaces

optoNCDT LL (Laser Line) sensors compensate for this effect with an

Ideal for serial and OEM

Analog Analog and digital output

ATC Auto Target Compensation

The optoNCDT 1320 offers high accuracy and 46 20

Model ILD1320-10 ILD1320-25 ILD1320-50 ILD1320-100

Ideal for serial and OEM

Analog Analog (U/I) and digital output

ATC Auto Target Compensation

Model ILD1420-10 ILD1420-25 ILD1420-50 ILD1420-100 ILD1420-200 ILD1420-500

Ideal for serial and OEM

Compact design with integrated

Analog Analog and digital output

ATC Auto Target Compensation

25 25 21 Keep this area free from

Model ILD1420-10CL1 ILD1420-25CL1 ILD1420-50CL1 ILD1420-100CL1 ILD1420-200CL1

Nine models with measuring ranges

the sensors automatically adapt to the Status LED

surfaces. LAN connector

The LD 1610 series achieves a frequency

Equipped with analog interfaces (current,

100 170 25.8

Sensors LD1610-4 LD1610-10 LD1610-20 LD1610-50 LD1610-100

Sensors LD1630-4 LD1630-10 LD1630-20 LD1630-50

Eleven models with measuring

Real Time Surface Compensation

Calibration certificate included

The standard among laser Adjustable limit switches

- Large distance from the

- Almost independent of surface