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Ossila Spin Coater User Guide

Ossila Ltd Spin Coater User Guide Copyright 2009 2014 1

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Contents
SECTION 1. SAFETY 4
1.1. STANDARDS STATEMENT 4
1.2. GENERAL HAZARDS 4
1.2.1 HAZARD ICONS 5
1.3. POWER CORD SAFETY 5
1.4. SERVICING 5
SECTION 2. EC Declaration of Conformity 6
SECTION 3. SYSTEM COMPONENTS 8
3.1. OSSILA PERSONAL SPIN COATER 8
3.2. POWER SUPPLY 8
3.3. CHUCKS 9
3.4. LID & SAFETY INTERLOCK 9
SECTION 4. SPECIFICATIONS 10
SECTION 5. INSTALLATIONS 10
SECTION 6. PROGRAMMING THE OSSILA PERSONAL SPIN COATER 11
6.1. OSSILA PERSONAL SPIN COATER CONTROL PANEL 11
6.2. OPERATIONAL KEYS 12
6.3. HOW TO PROGRAM THE OSSILA PERSONAL SPIN COATER 13
SECTION 7. MAINTENANCE 15
7.1. CLEANING 15
SECTION 8. OSSILA PERSONAL SPIN COATER TROUBLESHOOTING 16
SECTION 9. WARRANTY INFORMATION AND CONTACT DETAILS 17
SECTION 10. List of compatible components 18

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OVERVIEW
The Ossila Personal Spin Coater system is designed for low production spin coating
applications and experimentation. The compact size design offers the ideal solution for a
busy lab where space is at a premium. It comes with an easy installation which does not
require a vacuum pump or nitrogen line.
The Ossila Personal Spin Coater provides the ability to hold the substrate firmly on the
chuck and provide a better uniform coating film quality across the substrate.
Operation of the spin coater is controlled by a custom-designed controller. During a
cycle, the product recipe number, spinning speed, and remaining time are displayed on a
user interface screen. The acceleration and deceleration rates are calculated by the
controller to provide various ramp profiles.

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Warning
To avoid safety hazards read the following:
Do not leave devices with applied bias or current, unattended as a power failure may
result in board damage or device damage and potentially hazardous situations.

SECTION 1. SAFETY

1.1. STANDARDS STATEMENT

This Ossila Personal Spin Coater is designed to be used as instructed. Operator safety
and consideration of safe reliable product parts were key elements in the design. All
commercially standard components used in this machine have a minimum of UL and/or
CSA ratings. Components built to CE standards have been used wherever possible. Any
local or regional certifications required above and beyond the aforementioned are the
responsibility of the customer.

1.2. GENERAL HAZARDS

WARNING: Improper handling for operation or service of this

! equipment can result in serious injury or death?. Read this manual

before operating or servicing this equipment.

DANGER: This machine is not classified as "Intrinsically Safe." DO NOT use the
Ossila Personal Spin Coater in the presence of an explosive atmosphere.
DANGER: Use under an exhaust hood when flammable or harmful solvents are
being used.
WARNING: To avoid severe injury, do not touch or hold the shaft or chuck while it
is rotating.
WARNING: Do not operate without lid in place to protect operator and others
from injury as substrates may fly off rotating chuck if used incorrectly.
WARNING: To avoid electrical shock or injury, do not remove lid or try to access
any internal parts. Before servicing the Ossila spin coater, DISCONNECT power
cord from outlet and wait 10 minutes (high voltage may exist in the machine for
some time after removal of power).
CAUTION: The Ossila spin coater uses a ground type power plug, which must be
connected to a grounded outlet to prevent electrical shock.

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CAUTION: Consult your Material Safety Data Sheets for information about any
chemicals you use in your process, and their possible toxicity or reaction with the
polypropylene spin coater bowl.

1.2.1 HAZARD ICONS

The following symbols can be found at points throughout the rest of the manual. Note
and read each warning before attempting any associated operations.

This symbol warns of the potential for an ELECTRICAL SHOCK.

! This symbol signifies a GENERAL WARNING, which accompanying text

will explain.

1.3. POWER CORD SAFETY

Emergency Power Disconnect options: Use the power cord as a
disconnecting method.
To facilitate disconnect, make sure the power outlet for this cord is
readily accessible to the operator.

NOTE for users outside the UK: Select the plug that is rated for the supply circuit voltage
available. The supply circuit must be overcurrent protected at a value not exceeding 7
amps.

1.4. SERVICING
If servicing is required, please return the unit to Ossila Ltd. Any
other action may void the warranty.

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SECTION 2. EC Declaration of Conformity
In line with directive 2004/108/EC of the European Parliament and of the Council and
directive 2006/95/EC of the European Parliament and of the Council.
--
Manufacturer Name: Ossila Limited
Manufacturer Address: Kroto Innovation Centre, North Campus, Broad Lane, Sheffield, S3
7HQ
--
Item: OFET testing rig for use with PXI system
Model number: FACT1.1
--
Specifications of product under harmonised standards:
2004/108/EC
EN 61326-1:2006 Electrical equipment for measurement, control and laboratory use
EMC requirements Part 1: General requirements IEC 61326-1:2005
EN 61326-2-1:2006 Electrical equipment for measurement, control and laboratory use
EMC requirements Part 2-1: Particular requirements Test configurations, operational
conditions and performance criteria for sensitive test and measurement equipment for EMC
unprotected applications IEC 61326-2-1:2005

2006/95/EC

EN 61010-1:2010 Safety requirements for electrical equipment for measurement,

control, and laboratory use - Part 1: General requirements IEC 61010-1:2010
EN 61010-2-030:2010 Safety requirements for electrical equipment for measurement,
control, and laboratory use - Part 2-030: Particular requirements for testing and
measuring circuits IEC 61010-2-030:2010
EN 61140:2002 Protection against electric shock - Common aspects for installation and
equipment IEC 61140:2001
EN 61187:1994 Electrical and electronic measuring equipment - Documentation IEC
61187:1993 (Modified)
EN 61010-2-081:2002 Safety requirements for electrical equipment for measurement,
control and laboratory use - Part 2-081: Particular requirements for automatic and semi-
automatic laboratory equipment for analysis and other purposes IEC 61010-2-081:2001

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Declaration:
I hereby declare that the equipment named above has been designed to comply with the
relevant sections of the above referenced specifications. The unit complies with all
applicable Essential Requirements of the Directives.
--
Signed:
Name: Dr James Kingsley
Date: 23/11/2012

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SECTION 3. SYSTEM COMPONENTS

3.1. OSSILA PERSONAL SPIN COATER

Figure 3.1: Ossila Personal Spin Coater

The Ossila Personal Spin Coater offers the ideal solution for a busy lab where space is
at a premium due to its compact size and portability. It does not require a vacuum
pump or a nitrogen line and offers better film quality, for the ultimate plug-and-play
spin coater.

3.2. POWER SUPPLY

Figure 3.2: Power Supply Adapter

The Ossila Personal Spin Coater is powered from a 24V mains adapter which does not
require a high voltage near safety cabinets.

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3.3. CHUCKS
The chucks are designed to close tolerances and provide an exceptionally flat, rigid
surface for mounting substrates of different sizes, weights, and shapes. Proper chuck
selection should be based upon substrate size.

The chuck has a push-fit connection to the motor coupling in the bowl of the spin coater,
and is easily removable for cleaning or interchanging with other chucks

The chuck is made from polypropylene, which has a high degree of chemical resistance.
For cleaning see Section 7.1.

Figure 3.2: Polypropylene chuck.

3.4. LID & SAFETY INTERLOCK

The lid has a safety interlock switch that prevents the user from running a program while
the lid is open. If the lid is opened during a cycle, electronic breaking will immediately
terminate the running program to help prevent injury to the user.

LID
SAFETY
INTERLOC
K

Figure 3.4: Spin Coater Lid and Safety Interlock.

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SECTION 4. SPECIFICATIONS
The Ossila Personal Spin Coater can store 99 programs with maximum of 100 action
steps each.

Table 1: Ossila Personal Spin Coater Specification.

Programs 99 programs with up to 100 steps each
Speed stability <2%
Speed 120 RPM to 6000 RPM
Spin time 1 sec - 999 sec
Power supply DC 24V 2A
Interlock Software/hardware lid interlock
Dimensions 267mm x 230mm x 141mm
Materials Central polypropylene unit, aluminium frame with fluorinated
ethylene propylene (FEP)-coated display and keypad, acrylonitrile
butadiene styrene (ABS) side and base panels and glass lid.

SECTION 5. INSTALLATIONS
NOTE: for users outside the UK the spin coater is shipped with an unterminated power
cord so that the appropriate power plug (non-locking 240V, 10A) may be attached.
NOTE: The supply circuit must be overcurrent protected at a value not exceeding 7
amps.
Do not apply power until all other connections have been made.
Place the machine on a solid, level surface, free from vibration and
temperature extremes. For optimum performance, make sure that the
chuck is also level.
Refer to the specifications section or to the label on the power adapter
for electrical requirements.
NOTE: the machine is not for use in a hazardous atmosphere.

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Figure 5.1: Power jack completely secured

SECTION 6. PROGRAMMING THE OSSILA PERSONAL SPIN COATER

6.1. OSSILA PERSONAL SPIN COATER CONTROL PANEL

Figure 6.1: Ossila Personal Spin Coater Display.

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6.2. OPERATIONAL KEYS

Figure 6.2: Ossila Personal Spin Coater keypad.

1. START This key is used to initiate a programmed sequence. While a program is

running the display will show RUNNING with the current RPM and elapsed time.
The RUNNING parameters will disappear after the program is finished.
2. STOP This key is used to terminate the running program. It will reset to the first
step of a given program when pressed.
3. PROGRAM These keys are used to select the desired program. The key allows
the user to move backwards through the programs and the key to move
forwards through the programs.
4. CURSOR These keys are used to navigate between the changeable parameters
within a program. While navigating the cursor icon will indicate which parameter is
selected.
5. VALUE These keys are used to change the values where the cursor is located. The
keys are divided into three columns; small increase/decrease (by 1 or 10) , medium
increase/decrease (by 10 or 100) and large increase/decrease (by 100 or 1000) .
Table 2 shows the increase and decrease value for each button with respect to the
profile.

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Table 2: Keypad Representation for each program profile.

Buttons No. of Step STEP RPM TIME
(max 100 steps) (max 100 steps) (max 6000 rpm) (max 999 sec)

+1 +1 +10 +1

-1 -1 -10 -1

+10 +10 +100 +10

-10 -10 -100 -10

+10 +10 +1000 +10

-10 -10 -1000 -10

6.3. HOW TO PROGRAM THE OSSILA PERSONAL SPIN COATER

The Ossila Personal Spin Coater has a built-in set of experimental programs.

Table 3: Built-in Programs for Testing.

Program No. Step No. RPM TIME (sec)
Program 01 1 2000 30
Program 02 1 2000 30
2 5000 5

1. Select the program number by using the PROGRAM buttons.

2. To modify the program, the user can alter the number of steps for the program by
pressing or . The maximum number of steps is 100.

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3. Navigate to STEP: line using the cursor to choose which step number is to be
modified. The step number can be selected by using the and keys.

4. Navigate to the RPM : line to change the speed of the current step. Use the
VALUE buttons to increase or decrease the value. The maximum value is 6000 rpm.

5. Navigate to the TIME: line to specify the time for the current step. Use the
VALUE buttons to increase or decrease the value. The maximum value is 999 sec.

6. Navigate back to STEP: line using the cursor then increases the number of the step
to set the RPM, TIME and RAMP.

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7. Once everything is set and ready, press START to run the program. At the bottom
of the display the current elapsed time and RPM will be shown.

SECTION 7. MAINTENANCE

7.1. CLEANING
To clean the lid, bowl and chuck use a solvent that is appropriate to
dissolve the materials that have been spin coated.
Use a soft cloth or towel in order to avoid damage to the polypropylene.
Take care when cleaning around the controller and display area because
organic solvents may damage/remove the label.

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SECTION 8. OSSILA PERSONAL SPIN COATER TROUBLESHOOTING

Problem Possible cause Action

Spin coater will not The power supply may not be Check the connection and make
power up connected properly or the sure the power is turned ON.
switch is in the OFF position.
Cycle will not start No recipe programmed. Select/program a recipe.

Lid open/close not sensed, or Open and close the lid properly.
lid still open.
Cycle starts, but Recipe problem. Review, edit and re-enter recipe
immediately stops as needed
Display time or RPM The display is an Turn OFF the spin coater for 5
appears incorrect approximation; it updates seconds and then restart.
when the control has available
time.
Performance Customised chuck causing The control program takes into
irregularities imbalance. account the chuck weight and
moment of inertia). Use a chuck
that has been calibrated for
your spin coater.
Spin coater not properly Ensure that spin coater and
balanced. chuck are both level, with the
spin coater placed on a flat and
sturdy surface.

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SECTION 9. WARRANTY INFORMATION AND CONTACT DETAILS

Ossila warrants that:

(a) Ossila has (or will have at the relevant time) the right to sell the Products;

(b) the Customer shall enjoy quiet possession of the Products, subject to the rights
referred to in Clause [8.1(b)];

(c) the Products correspond to any description of the Products supplied by Ossila to
the Customer;

(d) the Products are of satisfactory quality;

(e) the Products are fit for any purpose expressly (but not merely impliedly) made
known by the Customer to Ossila before the relevant Contract is made;

(f) the Products correspond to any sample of the Products supplied by Ossila to the
Customer, and will be free from any defect making their quality unsatisfactory, which
would not be apparent on reasonable examination of the sample;

(g) the Products will comply with all laws, rules, regulations applicable to the
marketing and sale of the Products in United Kingdom.

(h) if, within one year of purchase, the customer experiences system failure or
damage within reasonable constraints the system may be returned to Ossila for
maintenance. Please note that if any system compartment is opened within this
period, warranty will be voided.

To the best of our knowledge the technical information provided here is accurate.
However, Ossila assume no liability for the accuracy of this information. The values
provided here are typical at the time of manufacture and may vary over time and from
batch to batch.

Ossila Contact Details:

Technical Contact:
Kroto Innovation Centre Dr Max Reinhardt
North Campus m.reinhardt@ossila.com
Broad Lane
Sheffield
S3 7HQ Customer Services Contact:
UK Lucy Pickford
l.pickford@ossila.com
Phone no: +44 (0) 114 213 2770
Fax no: +44 (0)800 098 8142

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SECTION 10. List of compatible components

Substrates
ITO OFET Substrates
Unpatterned ITO substrates. Ideal for spin-coating gate
dielectrics on.
Compatible when used with the Low density fabrication
system.

Pre-patterned ITO OFET Substrates

The Ossila pre-patterned ITO OFET substrates have been
designed to enable the fabrication and characterisation of
transistors without the need for vacuum evaporations or
probe stations.

Silicon Oxide OFET Substrates

A range of silicon substrates with thermal oxides on. Pre-
cut to fit the Ossila OFET fabrication systems but also used
for a number of other applications including ellipsometry
and X-ray measurements.
Compatible when used with the Low density fabrication
system.

Synthetic Quartz Coated Substrates

Flat glass substrates coated with 20 nm of SiO2 to help
with surface wetting and prevent ion migration from the
glass to the active layer.
Compatible when used with the Low density fabrication
system.

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