Finfettechnology

FinFET TECHNOLOGY
INTRODUCTION
Since the fabrication of MOSFET, the minimum channel length
has been shrinking continuously. As devices shrink further and
further, the problems with conventional (planar) MOSFETs are
increasing. Industry is currently at the 90nm node (ie. DRAM
half metal pitch, which corresponds to gate lengths of about
70nm). As we go down to the 65nm, 45nm, etc nodes, there
seem to be no viable options of continuing forth with the
conventional MOSFET. The motivation behind this decrease has
been an increasing interest in high speed devices and in very
large scale integrated circuits. The sustained scaling of
conventional bulk device requires innovations to circumvent the
barriers of fundamental physics constraining the conventional
MOSFET device structure.
Alternative device structures based on silicon-on-
insulator (SOI) technology have emerged as an effective
means of extending MOS scaling beyond bulk limits for
mainstream high-performance or low-power applications
.Partially depleted (PD) SOI was the first SOI technology
introduced for high-performance microprocessor
applications. The ultra-thin-body fully depleted (FD) SOI
and the non-planar FinFET device structures promise to be
the potential future technology/device choices.
Here, we review the design challenges of these emerging

technologies with particular emphasis on the implications
and impacts of individual device scaling elements and
unique device structures on the circuit design.
What is a FinFET ?
Type 3 DG-FETs are called FinFETs .
Even though current conduction is in
the plane of the wafer, it is not strictly a
planar device. Rather, it is referred to
as a quasi-planar device, because its
geometry in the vertical direction (viz.
the fin height) also affects device
behavior. Amongst the DG-FET types,
the FinFET is the easiest one to
fabricate. Its schematic is shown in
Fig.4.
Fig. 4: FinFET structure, with dimensions marked (from [4])

while the gate length L of a FinFET is in the same sense as
that in a conventional planar FET, the device width W is quite
different. W is defined as:
W = 2 H fin + T fin
where Hfin and Tfin are the fin height and thickness
respectively and known as fin width.
Because of the vertically thin channel structure, it is referred

to as a fin because it resembles a fishs fin hence the name
FinFET . A gate can also be fabricated at the top of the fin, in
which case it is a triple gate FET. Or optionally, the oxide
above the fin can be made thick enough so that the gate
above the fin is as good as not being present .
Why FinFET is Used ?
Researchers are making
progress in developing new
types of transistors, called
finFETs , which use a finlike
structure instead of the
conventional flat design,
possibly enabling engineers to
create faster and more
compact circuits and
computer chips . The fins are
made not of silicon, but from a
material called indium-gallium-
arsenide, as shown in this
illustration.
In addition to making smaller transistors possible, finFETs
also might conduct electrons at least five times faster than
conventional silicon transistors, called MOSFETs, or metal-
oxide-semiconductor field-effect transistors .
FinFET fabrication
The key challenges in FinFET fabrication are the thin, uniform

fin and also in reducing the source-drain series resistance.
FinFETs have broadly been reported to have been fabricated in
2 ways :
Gate-first process: Here the gate stack is patterned/formed

first, and then the source and drain regions are formed.
Gate-last process (also called replacement gate process): Here

source and drain regions are formed first and then the gate is
formed.
Fabrication Steps
High level FinFET fabrication steps (a-b): Gate-first process, (c-f): Gate last
FinFETs are usually fabricated on an SOI substrate. It starts
by patterning and etching thin fins on the SOI wafer using a
hard mask. The hard mask is retained throughout the
process to protect the fin. The fin thickness is typically half or
one third the gate length, so it is a very small dimension. It is
made by either e-beam lithography or by optical lithography
using extensive linewidth trimming .
In the gate-first process, fabrication steps after the fin

formation are similar to that in a conventional bulk MOSFET
process. In the gate-last process, the source/drain is formed
immediately after fin patterning.
Recent Development In FinFET
Many developments are made in FinFET technology till date.
In order to fabricate a best possible FinFET with better
performance , some factors were kept in mind ;
Series resistance should be low , as Ultra thin fins result in
better SCE, (but ultra thin fins increased series resistance) .
The fabrication process has to be easily integrate-able into
conventional CMOS process to the extent possible.
Keeping such considerations in mind and others, there have
been many efforts to fabricate and characterize FinFETs.
More recently, Kedzierski, fabricated a
high performance FinFET using a gate-
first process , with a 30nm gate length.
Epitaxial RSD, highly angled S/D
implants, and CoSi2 silicidation were
used to reduce series resistance. High
performance nFETs and pFETs with ION
of 1460uA/um and 850uA/um were
reported. The fin thickness and height
was 20nm and 65nm respectively, with
a 1.6nm oxide. Many devices were
fabricated to specifically study the
effect of fin thickness and height on
the series resistance. Devices were
fabricated in the <100> as well as
<110> direction. Above Fig shows a
cross section.
Application of FinFET
DG devices like Fin FETs offer unique opportunities for

microprocessor design . compared to a planar process in the
same technology node, FinFETs have reduced channel and gate
leakage currents. This can lead to considerable power reductions
when converting a planar design to fin FET technology. Utilizing
fin FETs would lead to a reduction in total power by a factor of
two, without compromising performance.
Another possibility to save power arises when both
gates can be controlled separately. The second gate can be used
to control the threshold voltage of the device, thereby allowing
fast switching on one side and reduced leakage currents when
circuits are idle.
Application in OTA & simulation Circuit
An operational transconductance amplifier (OTA) is a voltage

controlled current source. One of the first papers on OTA in
the literature appeared nearly 38 years ago . This paper
described a bipolar OTA. At that time the emphasis was on
amplifiers with feedback, such as opamps. In many analog or
mixed VLSI applications, an operational amplifier may not be
appropriate to use for an active element. For example, when
designing integrated high-frequency active filter circuitry, a
much simpler building block, called an OTA, is often used.
More specifically the term operational comes from the fact
that it takes the difference of two voltages as the input for the
current conversion.
The ideal transfer characteristic is given below in equation (1)
and (2).
Iout = gm (Vin+ - Vin-) (1)
Iout = gm .Vin (2)
Where gm is the transconductance, IC control current,

Vin+,Vin- and Vin are input voltages of OTA.
In this work, design of an operational transconductance
amplifier with 45nm FinFET technology is attempted. Two
gates of each FinFET are connected to each other. Schematic
of proposed OTA circuit is given in figure 8. Characteristics
graphs of such OTA are given in figures
4-7 respectively.
Figure 7 Frequency response of the OTA circuit
Figure 4.Output current vs. input voltage difference graph
Figure 8.Schematic of the designed 45nm SOI OTA

FinFET Advantages
1. Having excellent control of short channel effects in
submicron regime and making transistors still
scalable. Due to this reason, the small- length
transistor can have a larger intrinsic gain compared
to the bulk counterpart.
3. Much Lower off-state current compared to bulk

counterpart.
5. Promising matching behavior.

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FinFET TECHNOLOGY

Here, we review the design challenges of these emerging

Fig. 4: FinFET structure, with dimensions marked (from [4])

Because of the vertically thin channel structure, it is referred

The key challenges in FinFET fabrication are the thin, uniform

Gate-first process: Here the gate stack is patterned/formed

Gate-last process (also called replacement gate process): Here

In the gate-first process, fabrication steps after the fin

DG devices like Fin FETs offer unique opportunities for

An operational transconductance amplifier (OTA) is a voltage

Iout = gm .Vin (2)

Where gm is the transconductance, IC control current,

Figure 4.Output current vs. input voltage difference graph

Figure 8.Schematic of the designed 45nm SOI OTA

3. Much Lower off-state current compared to bulk

5. Promising matching behavior.

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