Bomba de Vacio
Bomba de Vacio
Bomba de Vacio
The Drystar system’s non-contacting mechanism reduces wear and maintenance for higher up time and
provides for faster pump down performance. The Drystar packages are effective and cost efficient, and offer
the ability to handle dust and water vapor without the risk of process contamination, loss of performance
and maintenance issues associated with oil sealed vacuum pumping systems.
Applications
• Coating
— Glass, roll/web, anti-reflection (A/R)
• Plasma processing
• Cylinder evacuation and drying
• CVD
• Freeze drying and other drying
applications
• Load lock
• Heat treatment
— Low pressure nitriding, sintering,
brazing
50 Hz 60 Hz
GV80 Dry Pump EH500 Booster GV80 Dry Pump EH500 Booster
Peak Pump Speed 400 m /hr (236 cfm)3
475 m /hr (280 cfm)
3
Performance
10 -4 10 -3 10 -2 10 -1 1 10 100 750 Torr
GV80 + EH500 Booster 50-60Hz 600 350
500 300
250
Speed ft³/min -1
400
Speed m³/h -1
200
300
150
200
100
100 50
GV80 + EH500
0 0
10-4 10-3 10-2 10-1 100 101 10 2 103 mbar
50Hz 60Hz
1000 750
Pump-down GV80 + EH500 Booster
50hz
60hz
100
100
Chamber Pressure (mbar)
10
10
1
1
0.1
0.1
0.01
0.01
Pump-down times - 3 m3 chamber made of stainless steel and nitrile seals. Area factor of 3
DRYSTAR GV80 AND EH500 PACKAGE
Dimensions (mm)
SYSTEM
INLET TP-1
ISO100 TP-1
92
624
NW40
SYSTEM
EXHAUST
TP-2
777
200
674
904.6 501
179 591
173
674
301
Global Contacts
EUROPE USA BRAZIL ISRAEL
UK Crawley +44 1293 528844 Wilmington, MA +1 978 658 5410 Sao Paulo +55 11 3952 5000 Qiryat-Gat +972 8 681 0633
UK Local Rate (UK only) 08459 212223 Toll free (USA only) +1 800 848 9800
CHINA KOREA
Benelux Brussels +32 2 363 0030 ASIA PACIFIC Shanghai +86 21 5866 9618 Bundang +82 31 716 7070
France Paris +33 1 47 98 24 01 Taiwan R.O.C. Toufen Town +886 37 611422
Germany Munich 0800 000 1456 INDIA JAPAN
Singapore +65 6546 8408
Italy Milan +39 02 48 4471 Mumbai +91 22 2565 1177 Yachiyo +81 47 458 8831
Rev 01/2008
info@edwardsvacuum.com
Publication Number: A70211895, Issue A
© Edwards Limited 2008. All rights reserved.
Edwards and the Edwards logo are trade marks of Edwards Limited.