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Electron Stopping Powers: Cedric J. Powell

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Electron Stopping Powers

Cedric J. Powell

Numerical data are given for collision electron stopping powers The table gives collision stopping powers for 22 elemental solids
in 22 elemental solids for energies between 100 eV and 30 keV. at energies between 100 eV and 30 keV (Refs. 5 and 6). These stop-
These stopping powers were determined with an algorithm that ping powers were determined by interpolation with a clamped cu-
utilizes experimental optical data for each solid. bic spline from the published data (Refs. 5 and 6) which had been
The stopping power for electrons and other charged particles calculated with an algorithm that utilizes experimental optical data
in matter is often needed in calculations of electron transport in for each solid. Comparisons with stopping powers from the Bethe
a medium, particularly in radiation physics and in descriptions of stopping-power equation at 30 keV showed a root-mean-square
signal generation in analytical techniques such as electron-probe difference of about 10%. This level of agreement was considered
microanalysis and Auger electron spectroscopy. The stopping satisfactory on account of uncertainties of the algorithm and opti-
power is defined as the average rate at which the charged particles cal data used for the calculations as well as uncertainties of the
lose energy at any point along their trajectories. For electrons, it mean excitation energies used with the Bethe equation.
is customary to separate the total stopping power into two com- The stopping powers in the table are given in units of eV/Å (1 Å
ponents, the collision stopping power due to inelastic-scattering = 10–10 m) for a range of electron energies. The elemental solids are
events of the electrons in a medium and the radiative stopping listed in order of atomic number. For some applications, the mass
power due to the emission of bremsstrahlung in the electric field collision stopping power is desired and these values can be ob-
of the atomic nucleus and atomic electrons (Ref. 1). For electron tained by dividing the tabulated values by the density of the solid.
energies less than 30 keV, the radiative stopping power is less than
1% of the collision stopping power (Ref. 1), and is neglected in the
numerical data given here.
References
Numerical data for collision and radiative stopping powers at 1. Stopping Powers for Electrons and Positrons, ICRU Report 37
electron energies between 10 keV and 1 GeV have been published (International Commission on Radiation Units and Measurements,
for materials of interest in radiation physics and dosimetry (Ref. 1). Bethesda, 1984).
Similar data can also be obtained from a web site of the National 2. Berger, M. J., Coursey, J. S., Zucker, M. A., and Chang, J., Stopping-
Institute of Standards and Technology (Ref. 2). The collision stop- Power and Range Tables for Electrons, Positrons, and Helium Ions,
Version 1.2.3, (http://physics.nist.gov/Star.html), (http://physics.nist.
ping powers were calculated from the theory of Bethe (Refs. 3 and gov/PhysRefData/Star/Text/contents.html), 2005.
4) and recommended values of the one material-dependent pa- 3. Bethe, H., Ann. Physik 5, 325, 1930.
rameter, the mean excitation energy (Ref. 1). While the Bethe the- 4. Inokuti, M., Rev. Mod. Phys. 43, 297, 1971.
ory is expected to be valid for electron energies much larger than 5. Tanuma, S., Powell, C. J., and Penn, D. R., Surf. Interface Anal. 37, 978,
the largest K-shell binding energy of atoms in the particular mate- 2005.
rial, the Bethe stopping-power equation is frequently utilized to 6. Tanuma, S., Powell, C. J., and Penn, D. R., J. Appl. Phys. 103, 063707,
calculate stopping powers for energies of 10 keV and above (Refs. 1 2008.
and 2). Detailed analyses of the Bethe stopping-power theory have
been published (Refs. 1 and 4).

TABLE 1. Values of collision electron stopping powers in eV/Å for the indicated elemental solids and electron energies (Refs. 5 and 6)

Electron energy in eV
100 200 300 400 500 1000 1500 2000 3000 4000 5000 10000 15000 20000 30000
Li 1.71 1.49 1.31 1.15 1.02 0.657 0.493 0.399 0.292 0.233 0.195 0.110 0.0787 0.0617 0.0437
Be 6.43 4.69 3.96 3.52 3.17 2.13 1.63 1.33 0.982 0.787 0.660 0.377 0.270 0.212 0.150
Ca 4.84 4.09 3.39 2.90 2.54 1.73 1.39 1.16 0.881 0.715 0.606 0.353 0.255 0.201 0.143
Cb 8.14 6.80 5.60 4.76 4.15 2.72 2.11 1.73 1.30 1.05 0.883 0.509 0.366 0.288 0.205
Cc 10.02 9.02 7.57 6.49 5.69 3.80 2.97 2.46 1.85 1.50 1.27 0.734 0.528 0.416 0.296
Na 1.57 1.67 1.59 1.47 1.35 0.936 0.721 0.591 0.441 0.359 0.306 0.181 0.131 0.104 0.0747
Mg 3.40 3.23 3.07 2.82 2.61 1.84 1.44 1.18 0.887 0.718 0.610 0.362 0.263 0.209 0.150
Al 4.99 3.86 3.59 3.36 3.16 2.35 1.86 1.55 1.17 0.947 0.804 0.481 0.351 0.280 0.201
Si 4.66 3.34 3.02 2.87 2.72 2.06 1.64 1.37 1.04 0.845 0.716 0.426 0.312 0.248 0.178
K 1.79 1.37 1.11 0.944 0.825 0.572 0.472 0.404 0.316 0.261 0.223 0.133 0.0973 0.0778 0.0564
Sc 7.19 6.28 5.23 4.49 3.94 2.54 2.02 1.70 1.31 1.08 0.922 0.547 0.397 0.316 0.228
Ni 7.04 8.73 8.71 8.26 7.74 5.70 4.51 3.75 2.92 2.45 2.13 1.31 0.969 0.776 0.562
Cu 6.27 7.23 7.27 7.05 6.73 5.15 4.14 3.48 2.71 2.28 1.99 1.24 0.920 0.738 0.536
Ge 4.78 4.29 4.07 3.90 3.75 2.99 2.46 2.09 1.61 1.34 1.17 0.732 0.544 0.437 0.318
Zr 6.51 5.61 4.68 4.02 3.58 2.65 2.23 1.94 1.55 1.30 1.13 0.701 0.528 0.428 0.315
Ag 7.43 11.45 10.53 9.32 8.34 5.84 4.85 4.19 3.37 2.80 2.41 1.47 1.08 0.872 0.638
In 4.60 6.19 5.91 5.26 4.71 3.19 2.56 2.23 1.82 1.55 1.35 0.849 0.632 0.513 0.378

12-122
Electron Stopping Powers 12-123

Electron energy in eV
100 200 300 400 500 1000 1500 2000 3000 4000 5000 10000 15000 20000 30000
Sn 3.94 5.71 5.70 5.14 4.63 3.18 2.52 2.19 1.79 1.53 1.34 0.840 0.626 0.507 0.374
Cs 1.50 1.19 1.27 1.16 1.05 0.718 0.562 0.472 0.383 0.329 0.290 0.187 0.140 0.113 0.0839
Gd 6.28 5.58 4.85 4.62 4.32 3.20 2.58 2.19 1.70 1.43 1.26 0.829 0.629 0.512 0.378
Tb 7.87 7.25 6.24 5.73 5.28 3.82 3.06 2.58 1.99 1.65 1.44 0.926 0.697 0.563 0.413
Dy 7.43 7.12 6.25 5.79 5.38 3.97 3.20 2.71 2.10 1.74 1.52 0.978 0.736 0.596 0.437
Pt 9.35 10.81 9.88 8.98 8.33 6.54 5.60 4.95 4.06 3.45 3.02 1.95 1.50 1.23 0.920
Bi 4.79 6.16 5.81 5.21 4.70 3.41 2.85 2.50 2.05 1.75 1.53 0.968 0.744 0.605 0.450
a
Glassy carbon
b
Graphite
c
Diamond

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