Vacuum Solutions Application Support Service LEYBOLD VACUUM

GA 09.406 / 6.02

IONIVAC
Gauge Heads and
Nude Gauge Heads

Cat. No.
163 14 / 17 / 42 / 43
158 17 / 18
158 57 / 60 / 62 / 66 / 67

Operating Instructions

Vacuum Solutions Application Support Service LEYBOLD VACUUM

GA 09.406 / 6.02

IONIVAC
Gauge Heads and
Nude Gauge Heads

Cat. No.
163 14 / 17 / 42 / 43
158 17 / 18
158 57 / 60 / 62 / 66 / 67

Operating Instructions
Note
The meaning of the sticker is described in Section 2.4.
Set-up the corresponding values on the operating unit
used!

LEYBOLD-Service
If a gauge head is returned to LEYBOLD, indicate
whether the gauge head is free of substances damaging
to health or whether it is contaminated. If it is contami-
nated also indicate the nature of hazard. LEYBOLD
must return any gauge head without a declaration of
contamination to the sender’s address.

General Note
The right of alterations in the design and the technical
data is reserved.
The illustrations are not binding.

2 GA 09.406/6.02 - 01/02

Note
The meaning of the sticker is described in Section 2.4.
Set-up the corresponding values on the operating unit
used!

LEYBOLD-Service
If a gauge head is returned to LEYBOLD, indicate
whether the gauge head is free of substances damaging
to health or whether it is contaminated. If it is contami-
nated also indicate the nature of hazard. LEYBOLD
must return any gauge head without a declaration of
contamination to the sender’s address.

General Note
The right of alterations in the design and the technical
data is reserved.
The illustrations are not binding.

2 GA 09.406/6.02 - 01/02
Contents
Page Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . 4 2.3 Connection of the Gauge
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Head- and Extension Cable . . . . . . . . . . . . 16
1.1.1 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 2.3.1 Nude Gauge Head IE 21 and IE 220 . . . . . 18
1.2 Technical Data . . . . . . . . . . . . . . . . . . . . . . 5 2.3.2 Nude Gauge Head IE 211 . . . . . . . . . . . . . 18
1.3 Technical Description . . . . . . . . . . . . . . . . . 8 2.3.3 Nude Gauge Head IE 413 / lE 511 . . . . . . . 18
1.3.1 Gauge Head IR 10 and Nude 2.3.4 Nude Gauge Head IE 414 / lE 514 . . . . . . . 19
Gauge Head IE 10 . . . . . . . . . . . . . . . . . . . 8 2.4 Adjustment of Calibration
1.3.2 Gauge Head IR 20 and Nude Values on Operating Units . . . . . . . . . . . . . 20
Gauge Head IE 20 and IE 211 . . . . . . . . . . . 8 2.4.1 Adjustments for Nude
1.3.3 Nude Gauge Head IE 21 and IE 220 . . . . . . 9 Gauge Heads IE 21 / lE 220 . . . . . . . . .. . . 20
1.3.4 Nude Gauge Head IE 413 / lE 511 . . . . . . . . 9 2.4.2 Adjustments for Nude
1.3.5 Nude Gauge Head IE 414 / lE 514 . . . . . . . 10 Gauge Heads IE 413 / lE 511 . . . . . . . .. . . 20
1.4 Equipment . . . . . . . . . . . . . . . . . . . . . . . . 10 2.4.3 Adjustments for Nude
1.4.1 Scope of Delivery . . . . . . . . . . . . . . . . . . . 10 Gauge Heads IE 414 / lE 514 . . . . . . . .. . . 20
1.4.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . 10 2.5 Protective Measures . . . . . . . . . . . . . . . . . . 21
1.4.2.1 Nude Gauge Heads IE 10, IE 20, IE 21 2.6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . 21
and Gauge Heads IR 10 / lR 20 . . . . . . . . . 10
3 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 22
1.4.2.2 Nude Gauge Heads IE 211, IE 220,
3.1 Exchanging the Cathode . . . . . . . . . . . . . . 22
IE 413 / lE 511 and IE 414 / lE 514 . . . . . . . 11
3.2 Exchanging the Anode Filament . . . . . . . . . 22
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 12 3.3 Exchanging the lon Collector . . . . . . . . . . . 23
2.1 Connection to the Vacuum System . . . . . . 12 3.4 Service at LEYBOLD’s . . . . . . . . . . . . . . . . 24
2.1.1 Nude Gauge Head IE 10 . . . . . . . . . . . . . . 12
2.1.2 Gauge Head IR 10 and IR 20 . . . . . . . . . . . 12
2.1.3 Nude Gauge Heads . . . . . . . . . . . . . . . . . 13
2.2 Dimensional Drawings . . . . . . . . . . . . . . . . 14

GA 09.406/6.02 - 01/02 3

Contents
Page Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . 4 2.3 Connection of the Gauge
1.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Head- and Extension Cable . . . . . . . . . . . . 16
1.1.1 Purpose . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 2.3.1 Nude Gauge Head IE 21 and IE 220 . . . . . 18
1.2 Technical Data . . . . . . . . . . . . . . . . . . . . . . 5 2.3.2 Nude Gauge Head IE 211 . . . . . . . . . . . . . 18
1.3 Technical Description . . . . . . . . . . . . . . . . . 8 2.3.3 Nude Gauge Head IE 413 / lE 511 . . . . . . . 18
1.3.1 Gauge Head IR 10 and Nude 2.3.4 Nude Gauge Head IE 414 / lE 514 . . . . . . . 19
Gauge Head IE 10 . . . . . . . . . . . . . . . . . . . 8 2.4 Adjustment of Calibration
1.3.2 Gauge Head IR 20 and Nude Values on Operating Units . . . . . . . . . . . . . 20
Gauge Head IE 20 and IE 211 . . . . . . . . . . . 8 2.4.1 Adjustments for Nude
1.3.3 Nude Gauge Head IE 21 and IE 220 . . . . . . 9 Gauge Heads IE 21 / lE 220 . . . . . . . . .. . . 20
1.3.4 Nude Gauge Head IE 413 / lE 511 . . . . . . . . 9 2.4.2 Adjustments for Nude
1.3.5 Nude Gauge Head IE 414 / lE 514 . . . . . . . 10 Gauge Heads IE 413 / lE 511 . . . . . . . .. . . 20
1.4 Equipment . . . . . . . . . . . . . . . . . . . . . . . . 10 2.4.3 Adjustments for Nude
1.4.1 Scope of Delivery . . . . . . . . . . . . . . . . . . . 10 Gauge Heads IE 414 / lE 514 . . . . . . . .. . . 20
1.4.2 Accessories . . . . . . . . . . . . . . . . . . . . . . . 10 2.5 Protective Measures . . . . . . . . . . . . . . . . . . 21
1.4.2.1 Nude Gauge Heads IE 10, IE 20, IE 21 2.6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . 21
and Gauge Heads IR 10 / lR 20 . . . . . . . . . 10
3 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 22
1.4.2.2 Nude Gauge Heads IE 211, IE 220,
3.1 Exchanging the Cathode . . . . . . . . . . . . . . 22
IE 413 / lE 511 and IE 414 / lE 514 . . . . . . . 11
3.2 Exchanging the Anode Filament . . . . . . . . . 22
2 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 12 3.3 Exchanging the lon Collector . . . . . . . . . . . 23
2.1 Connection to the Vacuum System . . . . . . 12 3.4 Service at LEYBOLD’s . . . . . . . . . . . . . . . . 24
2.1.1 Nude Gauge Head IE 10 . . . . . . . . . . . . . . 12
2.1.2 Gauge Head IR 10 and IR 20 . . . . . . . . . . . 12
2.1.3 Nude Gauge Heads . . . . . . . . . . . . . . . . . 13
2.2 Dimensional Drawings . . . . . . . . . . . . . . . . 14

GA 09.406/6.02 - 01/02 3
1 Description
1.1 General Before doing so, examine the shipping container for any
extemal damage.
These Operating Instructions contain impor-
Then remove all the packaging materials.
tant information on the functions, installation
and operation of the gauge heads and nude Note
gauge heads. The shipping container and packaging materials must be
kept in the event of complaints about damage.
Important remarks concerning operational safety and
protection are emphasized as follows:
Check for completeness (see Section 1.4).
Warning Indicates procedures that must be stric-
Carry out a careful visual examination.
tly observed to prevent hazards to peo-
ple. If any damage is discovered, report it immediately to the
forwarding agent and insurer.
If the damaged part has to be replaced, please get in
Important Indicates procedures that must be strict- touch with the orders department.
ly observed to prevent any damage or
destruction.
1.1.1 Purpose
Note
Indicates special technical requirements that the user The gauge heads and nude gauge heads may only be
must comply with. used for the measurement of total pressures in vacuum
systems and this only in connection with the specified
Unpack the gauge head resp. the nude gauge head operating units given in Section 2.3.
immediately after delivery, even if it is to be put into ope-
ration at a later date.

4 GA 09.406/6.02 - 01/02

1 Description
1.1 General Before doing so, examine the shipping container for any
extemal damage.
These Operating Instructions contain impor-
tant information on the functions, installation Then remove all the packaging materials.
and operation of the gauge heads and nude Note
gauge heads. The shipping container and packaging materials must be
Important remarks concerning operational safety and kept in the event of complaints about damage.
protection are emphasized as follows:
Check for completeness (see Section 1.4).
Warning Indicates procedures that must be stric-
Carry out a careful visual examination.
tly observed to prevent hazards to peo-
ple. If any damage is discovered, report it immediately to the
forwarding agent and insurer.
If the damaged part has to be replaced, please get in
Important Indicates procedures that must be strict- touch with the orders department.
ly observed to prevent any damage or
destruction.
1.1.1 Purpose
Note
Indicates special technical requirements that the user The gauge heads and nude gauge heads may only be
must comply with. used for the measurement of total pressures in vacuum
systems and this only in connection with the specified
Unpack the gauge head resp. the nude gauge head operating units given in Section 2.3.
immediately after delivery, even if it is to be put into ope-
ration at a later date.

4 GA 09.406/6.02 - 01/02
1.2 Technical Data
General gauge head data
Gauge Head (Cat. No.) IE 10 (163 43) IR 10 (163 42) IR 20 (163 17) IE 20 (163 14)
GIass type of gauge head -- Schott glass 8250 Schott glass 8250 --
Material of lead-in pins NiFe NiFe NiFe NiFe
Material of insulator compression glass Schott glass 8250 Schott glass 8250 compression glass
Material of pin sealing plate nickel plated -- -- nickel plated
Material of flange stainless steel -- -- stainless steel
Material of cathode iridium with iridium with iridium with iridium with
yttric oxide coating yttric oxide coating yttric oxide coating thoria coating
Material of anode Ni Ni tungsten tungsten
Material of collector Mo Mo tungsten tungsten
Material of grid Mo Mo tungsten tungsten
Outside dia. of the connection tube -- 25 mm 25 mm --
Material of the reflector -- -- -- --
Flange connection DN 40 KF -- -- DN 40 KF
Electrode system configuration concentric triode concentric triode Bayard-Alpert Bayard-Alpert
Max. ambient temperature
during operation 80 °C 80 °C 80 °C 80 °C
Max. bake-out temperature
without plug 150 °C 400 °C 400 °C 150 °C
X-ray limit < 1·10-7 mbar < 1·10-7 mbar < 1·10-10 mbar < 1·10-10 mbar
Upper limit of measuring range 1 mbar 1 mbar 1·10-3 mbar 1·10-2 mbar
Lower limit of measuring range 1·10-5 mbar 1·10-5 mbar 2·10-10 mbar 2·10-10 mbar
Operating characteristics IM 110 D IM 110 D IM 210 / lM 210 D IM 210 / IM 210 D
when used with control unit IT 230 / lT 230 DS IT 230 / lT 230 DS
Collector potential 0V 0V 0V 0V
Cathode potential + 10 V + 10 V + 30 V + 30 V
Anode potential + 100 V + 100 V + 200 V + 200 V
Reflector potential -- -- -- --
Emission current range 0.016 mA 0.016 mA 0.07 - 1.5 mA 0.07 - 1.5 mA
Cathode heater current 4 A (typ.) 4 A (typ.) 1.5 A (typ.) 1.5 A (typ.)
Cathode heater voltage 2 V (typ.) 2 V (typ.) 3 V (typ.) 3 V (typ.)
Sensitivity for nitrogen 0.5 mbar-1 0.5 mbar-1 5 mbar-1 5 mbar-1 (typ.)
Max. power when baking out 25 mA / 600 V 25 mA / 600 V 8A/9V 8A/9V

* With an adapter (special part) bake-out is possible up to 400 °C at the flange.

GA 09.406/6.02 - 01/02 5

1.2 Technical Data

General gauge head data
Gauge Head (Cat. No.) IE 10 (163 43) IR 10 (163 42) IR 20 (163 17) IE 20 (163 14)
GIass type of gauge head -- Schott glass 8250 Schott glass 8250 --
Material of lead-in pins NiFe NiFe NiFe NiFe
Material of insulator compression glass Schott glass 8250 Schott glass 8250 compression glass
Material of pin sealing plate nickel plated -- -- nickel plated
Material of flange stainless steel -- -- stainless steel
Material of cathode iridium with iridium with iridium with iridium with
yttric oxide coating yttric oxide coating yttric oxide coating thoria coating
Material of anode Ni Ni tungsten tungsten
Material of collector Mo Mo tungsten tungsten
Material of grid Mo Mo tungsten tungsten
Outside dia. of the connection tube -- 25 mm 25 mm --
Material of the reflector -- -- -- --
Flange connection DN 40 KF -- -- DN 40 KF
Electrode system configuration concentric triode concentric triode Bayard-Alpert Bayard-Alpert
Max. ambient temperature
during operation 80 °C 80 °C 80 °C 80 °C
Max. bake-out temperature
without plug 150 °C 400 °C 400 °C 150 °C
X-ray limit < 1·10-7 mbar < 1·10-7 mbar < 1·10-10 mbar < 1·10-10 mbar
Upper limit of measuring range 1 mbar 1 mbar 1·10-3 mbar 1·10-2 mbar
Lower limit of measuring range 1·10-5 mbar 1·10-5 mbar 2·10-10 mbar 2·10-10 mbar
Operating characteristics IM 110 D IM 110 D IM 210 / lM 210 D IM 210 / IM 210 D
when used with control unit IT 230 / lT 230 DS IT 230 / lT 230 DS
Collector potential 0V 0V 0V 0V
Cathode potential + 10 V + 10 V + 30 V + 30 V
Anode potential + 100 V + 100 V + 200 V + 200 V
Reflector potential -- -- -- --
Emission current range 0.016 mA 0.016 mA 0.07 - 1.5 mA 0.07 - 1.5 mA
Cathode heater current 4 A (typ.) 4 A (typ.) 1.5 A (typ.) 1.5 A (typ.)
Cathode heater voltage 2 V (typ.) 2 V (typ.) 3 V (typ.) 3 V (typ.)
Sensitivity for nitrogen 0.5 mbar-1 0.5 mbar-1 5 mbar-1 5 mbar-1 (typ.)
Max. power when baking out 25 mA / 600 V 25 mA / 600 V 8A/9V 8A/9V

* With an adapter (special part) bake-out is possible up to 400 °C at the flange.

GA 09.406/6.02 - 01/02 5
General gauge head data (Cat. No.) IE 211 (158 57) IE 21 (158 17) IE 220 (158 18)
GIass type of gauge head -- -- --
Material of lead-in pins NiFe NiFe NiFe
Material of insulator Al203-ceramic, glazed compression glass Al203-ceramic, glazed
Material of pin sealing plate NiFe nickel plated NiFe
Material of flange stainless steel stainless steel stainless steel
Material of cathode iridium with yttric oxide coating iridium with yttric oxide coating
Material of anode tungsten tungsten tungsten
Material of collector tungsten tungsten tungsten
Material of grid tungsten tungsten tungsten
Outside dia. of the connection tube -- -- --
Material of the reflector -- -- --
Flange connection DN 40 CF DN 40 KF DN 40 CF
Electrode system configuration Bayard-Alpert Bayard-Alpert Bayard-Alpert
Max. ambient temperature
during operation 80 °C * 80 °C 80 °C * (150 °C with gauge head cable 158 23)
Max. bake-out temperature
without plug 400 °C 150 °C 400 °C
X-ray limit < 1·10-10 mbar < 1,5·10-10 mbar < 1,5·10-10 mbar
Upper limit of measuring range 1·10-2 mbar 1·10-2 mbar 1·10-2 mbar
Lower limit of measuring range 2·10-10 mbar 2·10-10 mbar 2·10-10 mbar
Operating characteristics IM 210 / IM 210 D
when used with control unit IT 230 / IT 230 DS IM 220 / IM 221 IM 220 / IM 221
Collector potential 0V 0V 0V
Cathode potential + 30 V + 10 V + 10 V
Anode potential + 200 V + 160 V + 160 V
Reflector potential -- -- --
Emission current range 0.07 - 1.5 mA 0.08 - 8 mA 0.08 - 8 mA
Cathode heater current 1.5 A (typ.) 1.5 A (typ.) 1.5 A (typ.)
Cathode heater voltage 3 V (typ.) 3 V (typ.) 3 V (typ.)
Sensitivity for nitrogen 5 mbar-1 (typ.) 6.25 mbar-1 (typ.) 6.25 mbar-1 (typ.)
Max. power when baking out 8A/9V 8A/9V 8A/9V

* With an adapter (special part) bake-out is possible up to 400 °C at the flange.

6 GA 09.406/6.02 - 01/02

General gauge head data (Cat. No.) IE 211 (158 57) IE 21 (158 17) IE 220 (158 18)
GIass type of gauge head -- -- --
Material of lead-in pins NiFe NiFe NiFe
Material of insulator Al203-ceramic, glazed compression glass Al203-ceramic, glazed
Material of pin sealing plate NiFe nickel plated NiFe
Material of flange stainless steel stainless steel stainless steel
Material of cathode iridium with yttric oxide coating iridium with yttric oxide coating
Material of anode tungsten tungsten tungsten
Material of collector tungsten tungsten tungsten
Material of grid tungsten tungsten tungsten
Outside dia. of the connection tube -- -- --
Material of the reflector -- -- --
Flange connection DN 40 CF DN 40 KF DN 40 CF
Electrode system configuration Bayard-Alpert Bayard-Alpert Bayard-Alpert
Max. ambient temperature
during operation 80 °C * 80 °C 80 °C * (150 °C with gauge head cable 158 23)
Max. bake-out temperature
without plug 400 °C 150 °C 400 °C
X-ray limit < 1·10-10 mbar < 1,5·10-10 mbar < 1,5·10-10 mbar
Upper limit of measuring range 1·10-2 mbar 1·10-2 mbar 1·10-2 mbar
Lower limit of measuring range 2·10-10 mbar 2·10-10 mbar 2·10-10 mbar
Operating characteristics IM 210 / IM 210 D
when used with control unit IT 230 / IT 230 DS IM 220 / IM 221 IM 220 / IM 221
Collector potential 0V 0V 0V
Cathode potential + 30 V + 10 V + 10 V
Anode potential + 200 V + 160 V + 160 V
Reflector potential -- -- --
Emission current range 0.07 - 1.5 mA 0.08 - 8 mA 0.08 - 8 mA
Cathode heater current 1.5 A (typ.) 1.5 A (typ.) 1.5 A (typ.)
Cathode heater voltage 3 V (typ.) 3 V (typ.) 3 V (typ.)
Sensitivity for nitrogen 5 mbar-1 (typ.) 6.25 mbar-1 (typ.) 6.25 mbar-1 (typ.)
Max. power when baking out 8A/9V 8A/9V 8A/9V

* With an adapter (special part) bake-out is possible up to 400 °C at the flange.

6 GA 09.406/6.02 - 01/02
General gauge head data (Cat. No.) IE 414 (158 66) IE 514 (158 67) IE 413 (158 62) IE 511 (158 60)
GIass type of gauge head -- -- -- --
Material of lead-in pins NiFe NiFe NiFe NiFe
Material of insulator Al203-ceramic, glazed Al203-ceramic, glazed Al203-ceramic, glazed Al203-ceramic, glazed
Material of pin sealing plate NiFe NiFe NiFe NiFe
Material of flange stainless steel stainless steel stainless steel stainless steel
Material of cathode iridium with yttric oxide coating iridium with yttric oxide coating
Material of anode Pt/Ir 90/10 and Mo and CoNiCr Pt/Ir 90/10 and Mo and CoNiCr
Mo/Pt wrapped wire Mo/Pt wrapped wire
Material of collector tungsten tungsten tungsten tungsten
Material of grid -- -- -- --
Outside dia. of the connection tube -- -- -- --
Material of the reflector NiFe NiFe NiFe NiFe
Flange connection DN 40 CF DN 40 CF DN 40 CF DN 40 CF
Electrode system configuration Bayard-Alpert Extractor-System Bayard-Alpert Extractor-System
Max. ambient temperature
during operation 80 °C * (250 °C with 80 °C * (250 °C with 80 °C * 80 °C *
gauge head cable 158 44) gauge head cab. 158 44)
Max. bake-out temperature without plug 400 °C 400 °C 400 °C 400 °C
X-ray limit < 1·10-11 mbar < 1·10-12 mbar < 1·10-11 mbar < 1·10-12 mbar
Upper limit of measuring range 1·10-2 mbar 1·10-4 mbar 1·10-2 mbar 1·10-4 mbar
Lower limit of measuring range 2·10-11 mbar 2·10-12 mbar 2·10-11 mbar 2·10-12 mbar
Operating characteristics when IM 520 IM 520 IM 510 IM 510
used with control unit
Collector potential 0V 0V 0V 0V
Cathode potential + 80 V + 100 V + 50 V +100 V
Anode potential + 220 V + 220 V + 180 V + 220 V
Reflector potential -- 205 V -- 205 V
Emission current range 0.06 - 0.6 mA 1.6 mA 0.005 - 20 mA 0.5 - 2 mA
Cathode heater current 1.5 A (typ.) 1.5 A (typ.) 1.4 A (typ.) 1.4 A (typ.)
Cathode heater voltage 3 V (typ.) 3.7 V (typ.) 2.7 V (typ.) 3.7 V (typ.)
Sensitivity for nitrogen 17 mbar-1 (typ.) 6.25 mbar-1 (typ.) 17 mbar-1 (typ.) 5 mbar-1 (typ.)
Max. power when baking out 90 mA / 480 V 45 mA / 480 V 90 mA / 480 V 30 mA / 700 V

* With an adapter (special part) bake-out is possible up to 400 °C at the flange.

GA 09.406/6.02 - 01/02 7

General gauge head data (Cat. No.) IE 414 (158 66) IE 514 (158 67) IE 413 (158 62) IE 511 (158 60)
GIass type of gauge head -- -- -- --
Material of lead-in pins NiFe NiFe NiFe NiFe
Material of insulator Al203-ceramic, glazed Al203-ceramic, glazed Al203-ceramic, glazed Al203-ceramic, glazed
Material of pin sealing plate NiFe NiFe NiFe NiFe
Material of flange stainless steel stainless steel stainless steel stainless steel
Material of cathode iridium with yttric oxide coating iridium with yttric oxide coating
Material of anode Pt/Ir 90/10 and Mo and CoNiCr Pt/Ir 90/10 and Mo and CoNiCr
Mo/Pt wrapped wire Mo/Pt wrapped wire
Material of collector tungsten tungsten tungsten tungsten
Material of grid -- -- -- --
Outside dia. of the connection tube -- -- -- --
Material of the reflector NiFe NiFe NiFe NiFe
Flange connection DN 40 CF DN 40 CF DN 40 CF DN 40 CF
Electrode system configuration Bayard-Alpert Extractor-System Bayard-Alpert Extractor-System
Max. ambient temperature
during operation 80 °C * (250 °C with 80 °C * (250 °C with 80 °C * 80 °C *
gauge head cable 158 44) gauge head cab. 158 44)
Max. bake-out temperature without plug 400 °C 400 °C 400 °C 400 °C
X-ray limit < 1·10-11 mbar < 1·10-12 mbar < 1·10-11 mbar < 1·10-12 mbar
Upper limit of measuring range 1·10-2 mbar 1·10-4 mbar 1·10-2 mbar 1·10-4 mbar
Lower limit of measuring range 2·10-11 mbar 2·10-12 mbar 2·10-11 mbar 2·10-12 mbar
Operating characteristics when IM 520 IM 520 IM 510 IM 510
used with control unit
Collector potential 0V 0V 0V 0V
Cathode potential + 80 V + 100 V + 50 V +100 V
Anode potential + 220 V + 220 V + 180 V + 220 V
Reflector potential -- 205 V -- 205 V
Emission current range 0.06 - 0.6 mA 1.6 mA 0.005 - 20 mA 0.5 - 2 mA
Cathode heater current 1.5 A (typ.) 1.5 A (typ.) 1.4 A (typ.) 1.4 A (typ.)
Cathode heater voltage 3 V (typ.) 3.7 V (typ.) 2.7 V (typ.) 3.7 V (typ.)
Sensitivity for nitrogen 17 mbar-1 (typ.) 6.25 mbar-1 (typ.) 17 mbar-1 (typ.) 5 mbar-1 (typ.)
Max. power when baking out 90 mA / 480 V 45 mA / 480 V 90 mA / 480 V 30 mA / 700 V

* With an adapter (special part) bake-out is possible up to 400 °C at the flange.

GA 09.406/6.02 - 01/02 7
1.3 Technical Description 1.3.2 Gauge Head IR 20 and Nude Gauge
Head IE 20 and IE 211
All newly introduced gauge heads over the last years
have been designed to meet the VDE regulations in In addition to the operating units given for these gauge
connection with the specified gauge head cable. The heads in the technical data they may also be operated in
gauge heads and the corresponding gauge head cables connection with the IONIVAC IM 220 / IM 221 and the
are given in Section 2.3. Other gauge head cables are COMBIVAC IT 251 and IT 252. Different gauge head
available to special order. cables as given in Section 2.3 have to be used.
The gauge head cable for the operating units IM 220 /
IM 221, IT 251 and IT 252 may be extended up to a
1.3.1 Gauge Head IR 10 and maximum length of 30 m using the extension cables
Nude Gauge Head IE 10 given in Secton 2.3. Note that with gauge heads having
Both gauge heads are almost identical. In the neck of only one cathode the „second“ cathode will be indicated
the IR 10 there is an additional wire mesh screen which as faulty by the IM 220 / IM 221.
is at ground potential. The net-like electrode (anode) of The cathode and the anode potential when operated
this nude gauge head has an oval shape for physical with the IM 220 / 221 is diffcrent from the operating units
reasons. IM 210 / 210 D, IT 230 / 230 DS and IT 251 / 252. Thus
No manipulations must be carried out on the anode. Any the nitrogen sensitivity is reduced to 3.3 mbar-1 when
change in the shape of the anode wiil produce inaccura- connecting the above gauge heads to the IM 220 / 221.
te measurements. A typical calibration value of „CAL 105“ must be set on
the IM 220 / 221.
The Schott glass 8250 used for the IR 10 gauge head
On request the gauge head IR 20 and the nude gauge
has a thermal expansion coefficient of 5.2·10-6 per °K
heads IE 20 and IE 211 can be supplied with tungsten
between 20 °C and 300 °C.
cathodes.

8 GA 09.406/6.02 - 01/02

1.3 Technical Description 1.3.2 Gauge Head IR 20 and Nude Gauge

Head IE 20 and IE 211
All newly introduced gauge heads over the last years
have been designed to meet the VDE regulations in In addition to the operating units given for these gauge
connection with the specified gauge head cable. The heads in the technical data they may also be operated in
gauge heads and the corresponding gauge head cables connection with the IONIVAC IM 220 / IM 221 and the
are given in Section 2.3. Other gauge head cables are COMBIVAC IT 251 and IT 252. Different gauge head
available to special order. cables as given in Section 2.3 have to be used.
The gauge head cable for the operating units IM 220 /
IM 221, IT 251 and IT 252 may be extended up to a
1.3.1 Gauge Head IR 10 and maximum length of 30 m using the extension cables
Nude Gauge Head IE 10 given in Secton 2.3. Note that with gauge heads having
Both gauge heads are almost identical. In the neck of only one cathode the „second“ cathode will be indicated
the IR 10 there is an additional wire mesh screen which as faulty by the IM 220 / IM 221.
is at ground potential. The net-like electrode (anode) of The cathode and the anode potential when operated
this nude gauge head has an oval shape for physical with the IM 220 / 221 is diffcrent from the operating units
reasons. IM 210 / 210 D, IT 230 / 230 DS and IT 251 / 252. Thus
No manipulations must be carried out on the anode. Any the nitrogen sensitivity is reduced to 3.3 mbar-1 when
change in the shape of the anode wiil produce inaccura- connecting the above gauge heads to the IM 220 / 221.
te measurements. A typical calibration value of „CAL 105“ must be set on
the IM 220 / 221.
The Schott glass 8250 used for the IR 10 gauge head
On request the gauge head IR 20 and the nude gauge
has a thermal expansion coefficient of 5.2·10-6 per °K
heads IE 20 and IE 211 can be supplied with tungsten
between 20 °C and 300 °C.
cathodes.

8 GA 09.406/6.02 - 01/02
Gauge head IR 20 The plug connections and the cables between the nude
The Schott glass 8250 used for the IR 20 has a thermal gauge heads IE 21 and IE 220 and the operating units
expansion coefficient of 5.2·10-6 per °K between 20 °C IM 220 / 221, IT 251 and IT 252 meet the applicableVDE
and 300 °C. regulations.
Nude gauge head IE 211 The cathode and the anode potential when operated
The nude gauge head IE 211 is equipped with inter- with the IM 220 / 221 is different from the operating units
changeable iridium cathodes of a low power rating. The IM 210 / 210 D, IT 230 / 230 DS and IT 251 / 252. Thus
process of exchangin the cathodes is described in Sec- the nitrogen sensitivity is increased to 6.2 mbar-1 when
tion 3.1. From series 3 the IE 211 can be equipped with connecting the above gauge heads to the IM 210 /
a second cathode (use repl. cathode). 210 D and IT 230 / 230 DS.
By using an adapter (special part) the IE 211 may be Nude gauge head IE 220
baked-out during operation up to a temperature of A special feature are the user-interchangeable electro-
400 °C at the flange. des (anode, cathode and ion collector), allowing rapid
and cheap servicing of the cathodes should they break
or become severely contaminated. The process of ex-
1.3.3 Nude Gauge Head IE 21 and IE 220 changing the electrodes is described in Section 3.2.

The nude gauge heads IE 21 and IE 220 may be con-

nected to the operating units IONIVAC IM 210, IM 210 D, 1.3.4 Nude Gauge Head IE 413 / IE 511
IT 230 and IT 230 DS. Different gauge head cables, as
given in Section 2.3, have to be used for connection. lf The extractor gauge head IE 511 and the Bayard-Alpert
both cathodes are to be used a special gauge head gauge head IE 413 may also be connected to the IONI-
cable is available on request. VAC IM 520. Other gauge head cables have to be used
as given in Section 2.3.
The gauge head cable for the operating units IM 220 /
IM 221, IT 251 and IT 252 may be extended up to a max. The gauge head cable for the IONIVAC IM 520 may be
Iength of 30 m using the extension cables given in Sec- extended up to a max. Iength of 180 m using the exten-
tion 2.3. sion cables.

GA 09.406/6.02 - 01/02 9

Gauge head IR 20 The plug connections and the cables between the nude
The Schott glass 8250 used for the IR 20 has a thermal gauge heads IE 21 and IE 220 and the operating units
expansion coefficient of 5.2·10-6 per °K between 20 °C IM 220 / 221, IT 251 and IT 252 meet the applicableVDE
and 300 °C. regulations.
Nude gauge head IE 211 The cathode and the anode potential when operated
The nude gauge head IE 211 is equipped with inter- with the IM 220 / 221 is different from the operating units
changeable iridium cathodes of a low power rating. The IM 210 / 210 D, IT 230 / 230 DS and IT 251 / 252. Thus
process of exchangin the cathodes is described in Sec- the nitrogen sensitivity is increased to 6.2 mbar-1 when
tion 3.1. From series 3 the IE 211 can be equipped with connecting the above gauge heads to the IM 210 /
a second cathode (use repl. cathode). 210 D and IT 230 / 230 DS.
By using an adapter (special part) the IE 211 may be Nude gauge head IE 220
baked-out during operation up to a temperature of A special feature are the user-interchangeable electro-
400 °C at the flange. des (anode, cathode and ion collector), allowing rapid
and cheap servicing of the cathodes should they break
or become severely contaminated. The process of ex-
1.3.3 Nude Gauge Head IE 21 and IE 220 changing the electrodes is described in Section 3.2.

The nude gauge heads IE 21 and IE 220 may be con-

nected to the operating units IONIVAC IM 210, IM 210 D, 1.3.4 Nude Gauge Head IE 413 / IE 511
IT 230 and IT 230 DS. Different gauge head cables, as
given in Section 2.3, have to be used for connection. lf The extractor gauge head IE 511 and the Bayard-Alpert
both cathodes are to be used a special gauge head gauge head IE 413 may also be connected to the IONI-
cable is available on request. VAC IM 520. Other gauge head cables have to be used
as given in Section 2.3.
The gauge head cable for the operating units IM 220 /
IM 221, IT 251 and IT 252 may be extended up to a max. The gauge head cable for the IONIVAC IM 520 may be
Iength of 30 m using the extension cables given in Sec- extended up to a max. Iength of 180 m using the exten-
tion 2.3. sion cables.

GA 09.406/6.02 - 01/02 9
Both gauge heads may be baked-out during operation 1.4 Equipment
up to a max. temperature of 350 °C at the flange with the
temperature resistant cable or otherwise only to 250 °C.
1.4.1 Scope of Delivery
In case of the extractor gauge heads ion source and ion
collector are separated by a diaphragm. The ring-shaped Gauge head resp. nude gauge head
anode emitts the electrons into the inside of the Operating Instructions GA 09.406
cage-shaped anode. The ions generated within the
anode space by electron impact are focussed via an
ion-optical system into the ion collector. Because of this 1.4.2 Accessories
arrangement a much lower X-ray and ion desorption 1.4.2.1 Nude Gauge Heads IE 10, IE 20, IE 21 and
effect is obtained compared to the Bayard-Alpert gauge Gauge Heads IR 10 / IR 20
heads. Thus pressure measurement is possible down to Cat. No.
10-12 mbar without modulation. Connection accessories
Centering ring DN 40 KF
with NBR gasket 183 28
1.3.5 Nude Gauge Head IE 414 / IE 514
As above but made of stainless steel
The nude gauge heads IE 414 / IE 514 may also be with FPM gasket 883 48
connected to the IM 510. As the nude gauge heads
IE 414 / IE 514 are almost identical to the nude gauge Adapting centering ring DN 32/40 KF
heads IE 413 / IE 51 1, a replacement is possible. Details with NBR gasket 183 58
on this are given in section 2.2. As above but made of stainless steel
with FPM gasket 883 58
Clamping ring DN 32/40 KF 183 43
Ultra high vac. gasket DN 32/40 KF 883 77
Supporting ring DN 32/40 KF 883 78
Clamping ring for Ultra hv.gasket 882 78
10 GA 09.406/6.02 - 01/02

Both gauge heads may be baked-out during operation 1.4 Equipment

up to a max. temperature of 350 °C at the flange with the
temperature resistant cable or otherwise only to 250 °C.
1.4.1 Scope of Delivery
In case of the extractor gauge heads ion source and ion
collector are separated by a diaphragm. The ring-sha- Gauge head resp. nude gauge head
ped anode emitts the electrons into the inside of the Operating Instructions GA 09.406
cage-shaped anode. The ions generated within the
anode space by electron impact are focussed via an
ion-optical system into the ion collector. Because of this 1.4.2 Accessories
arrangement a much lower X-ray and ion desorption 1.4.2.1 Nude Gauge Heads IE 10, IE 20, IE 21 and
effect is obtained compared to the Bayard-Alpert gauge Gauge Heads IR 10 / IR 20
heads. Thus pressure measurement is possible down to Cat. No.
10-12 mbar without modulation. Connection accessories
Centering ring DN 40 KF
with NBR gasket 183 28
1.3.5 Nude Gauge Head IE 414 / IE 514
As above but made of stainless steel
The nude gauge heads IE 414 / IE 514 may also be with FPM gasket 883 48
connected to the IM 510. As the nude gauge heads
IE 414 / IE 514 are almost identical to the nude gauge Adapting centering ring DN 32/40 KF
heads IE 413 / IE 51 1, a replacement is possible. with NBR gasket 183 58
Details on this are given in section 2.2. As above but made of stainless steel
with FPM gasket 883 58
Clamping ring DN 32/40 KF 183 43
Ultra high vac. gasket DN 32/40 KF 883 77
Supporting ring DN 32/40 KF 883 78
Clamping ring for Ultra hv.gasket 882 78
10 GA 09.406/6.02 - 01/02
Compression fitting DN 40 KF for Replacement Cathodes
glass tube Ø 25 mm 184 66 Replacem. cathode IE 211 / IE 220 158 58
Replacem. cathode IE 511 / IE 514 158 61
Gauge head and extension cables
Replacem. cathode IE 413 / IE 414 158 63
IE 10 / IR 10
Gauge head cable 3 m 158 41 Replacement Electrodes for IE 220
(Anode filament and two
IE 20 / lR 20 / lE 21
ion collectors) 158 19
In connection with the operating units IM 210;
IM 210 D; IT 230; IT 230 DS Gauge head and extension cables IE 211 and IE 220
Gauge head cable 2 m 158 43 In connection with the operating units IM 210;
In connection with the operating units IM 210 D; IT 230; IT 230 DS
IM 220 / 221; IT 251; IT 252 Gauge head cable 5 m 158 46
Gauge head cable 5 m 158 22 In connection with the operating units
Extension cable 5 m 158 27 IM 220 / 221; IT 251; IT 252
Extension cable 15 m 158 28 Gauge head cable 5 m 158 21
Extension cable 25 m 158 29 Extension cable 5 m 158 27
Extension cable 15 m 158 28
Extension cableg 25 m 158 29
1.4.2.2 Nude Gauge Heads IE 211, IE 220, Temperature resistant gauge
IE 413 / IE 511 and IE 414 / IE 514 head cable (150 °C) 3 m 158 23
Connection Accessories IE 413 / IE 511 and IE 414 / IE 514
Copper gasket In connection with the IM 510
(set of 10) DN 40 CF 839 43 Gauge head cable 5 m 158 45
In connection with the IM 520
Welding flange, fixed DN 40 CF 835 43
Gauge head cable 5 m, 158 68
Welding flange, rot. DN 40 CF 835 63 Extension cable 20 m, 158 69
Gauge head cable, 5 m,
Screws, nuts (set of 25)
temperature resistant up to 250 °C 158 44
and accessories for CF flanges 839 01

GA 09.406/6.02 - 01/02 11

Compression fitting DN 40 KF for Replacement Cathodes

glass tube Ø 25 mm 184 66 Replacem. cathode IE 211 / IE 220 158 58
Replacem. cathode IE 511 / IE 514 158 61
Gauge head and extension cables
Replacem. cathode IE 413 / IE 414 158 63
IE 10 / IR 10
Gauge head cable 3 m 158 41 Replacement Electrodes for IE 220
(Anode filament and two
IE 20 / lR 20 / lE 21
ion collectors) 158 19
In connection with the operating units IM 210;
IM 210 D; IT 230; IT 230 DS Gauge head and extension cables IE 211 and IE 220
Gauge head cable 2 m 158 43 In connection with the operating units IM 210;
In connection with the operating units IM 210 D; IT 230; IT 230 DS
IM 220 / 221; IT 251; IT 252 Gauge head cable 5 m 158 46
Gauge head cable 5 m 158 22 In connection with the operating units
Extension cable 5 m 158 27 IM 220 / 221; IT 251; IT 252
Extension cable 15 m 158 28 Gauge head cable 5 m 158 21
Extension cable 25 m 158 29 Extension cable 5 m 158 27
Extension cable 15 m 158 28
Extension cableg 25 m 158 29
1.4.2.2 Nude Gauge Heads IE 211, IE 220, Temperature resistant gauge
IE 413 / IE 511 and IE 414 / IE 514 head cable (150 °C) 3 m 158 23
Connection Accessories IE 413 / IE 511 and IE 414 / IE 514
Copper gasket In connection with the IM 510
(set of 10) DN 40 CF 839 43 Gauge head cable 5 m 158 45
In connection with the IM 520
Welding flange, fixed DN 40 CF 835 43
Gauge head cable 5 m, 158 68
Welding flange, rot. DN 40 CF 835 63 Extension cable 20 m, 158 69
Gauge head cable, 5 m,
Screws, nuts (set of 25)
temperature resistant up to 250 °C 158 44
and accessories for CF flanges 839 01

GA 09.406/6.02 - 01/02 11
2 Operation
Caution As a rule all ionization gauges must be ple) an optical separation is required. The gauge heads
operated only in connection with a pro- may not directly „see“ each other. Interactions may
perly earthed pump system. cause incorrect measurements.

2.1.1 Nude Gauge Head IE 10

2.1 Connection to the Vacuum The net-like electrode (anode) of this nude gauge head
System has an oval shape for physical reasons. No manipulati-
ons must be carried out on the anode. Any change in the
Note shape of the anode will produce inaccurate measure-
Installation and mounting may only be carried ments.
out with the operating unit switched off.

When connecting the vacuum gauges to the vacuum 2.1.2 Gauge Head IR 10 and IR 20
system it must be strictly observed that during operation
the gauges are not subjected to mechanical oscillations, The Schott glass 8250 used for the bulb of the IR 10
impact or vibrations. gauge head has a thermal expansion coefficient of
5.2·10-6 per °K betwean 20 °C and 300 °C. It can be
The mounting positon of the gauge heads has no influ- fused directly to the same type of glass. Graded seal
ence on proper operation but it is recommended to tubulation fittings can be used for connection to systems
mount them vertically. It is not permissible to install a made of JENAer ® GLAS DURAN, Pyrex or Solidex.
venting valve in the immediate vicinity. The then sud-
denly occuring air flow may result in mechanical dama- The gauge head may be connected to metal systems
ge of the sensitive cathode. only via a compression fitting (see Section 1.4.2.1).

When installing (see Section 2.2) several gauge heads

at one common component (T-piece or cross for exam-

12 GA 09.406/6.02 - 01/02

2 Operation
Caution As a rule all ionization gauges must be ple) an optical separation is required. The gauge heads
operated only in connection with a pro- may not directly „see“ each other. Interactions may
perly earthed pump system. cause incorrect measurements.

2.1.1 Nude Gauge Head IE 10

2.1 Connection to the Vacuum The net-like electrode (anode) of this nude gauge head
System has an oval shape for physical reasons. No manipulati-
ons must be carried out on the anode. Any change in the
Note shape of the anode will produce inaccurate measure-
Installation and mounting may only be carried ments.
out with the operating unit switched off.

When connecting the vacuum gauges to the vacuum

system it must be strictly observed that during operation
2.1.2 Gauge Head IR 10 and IR 20
the gauges are not subjected to mechanical oscillations, The Schott glass 8250 used for the bulb of the IR 10
impact or vibrations. gauge head has a thermal expansion coefficient of
5.2·10-6 per °K betwean 20 °C and 300 °C. It can be
The mounting positon of the gauge heads has no influ-
fused directly to the same type of glass. Graded seal
ence on proper operation but it is recommended to
tubulation fittings can be used for connection to systems
mount them vertically. It is not permissible to install a
made of JENAer ® GLAS DURAN, Pyrex or Solidex.
venting valve in the immediate vicinity. The then sud-
denly occuring air flow may result in mechanical dama- The gauge head may be connected to metal systems
ge of the sensitive cathode. only via a compression fitting (see Section 1.4.2.1).

When installing (see Section 2.2) several gauge heads

at one common component (T-piece or cross for exam-

12 GA 09.406/6.02 - 01/02
2.1.3 Nude Gauge Heads
The nude gauge heads are based on small flange resp.
UHV-flanges and may therefore be directly mounted to a
vacuum system.
For dimensional diagrams see Section 2.2.

GA 09.406/6.02 - 01/02 13

2.1.3 Nude Gauge Heads

The nude gauge heads are based on small flange resp.
UHV-flanges and may therefore be directly mounted to a
vacuum system.
For dimensional diagrams see Section 2.2.

GA 09.406/6.02 - 01/02 13
2.2 Dimensional Drawings
+ 0,3
40 25 -
23 26,5

25
32
130

50 64
DN 40 KF DN 40 KF
144
38 55
32 60

23 60
40

+0,3
25 -

Fig. 1 Nude gauge head IE 10 (left); Fig. 2 Nude gauge head IE 20 (left);
Gauge head IR 10 (right) Gauge head IR 20 (right)

28 33
69,4

48
64

124 12,8

DN 40 CF
58
DN 40 KF
90
60

Fig. 3 Nude gauge head IE 21 Fig. 4 Nude gauge head IE 220

14 GA 09.406/6.02 - 01/02

2.2 Dimensional Drawings

+ 0,3
40 25 -
23 26,5

25
32
130

50 64
DN 40 KF DN 40 KF
144
38 55
32 60

23 60
40

+0,3
25 -

Fig. 1 Nude gauge head IE 10 (left); Fig. 2 Nude gauge head IE 20 (left);
Gauge head IR 10 (right) Gauge head IR 20 (right)

28 33
69,4

48
64

124 12,8

DN 40 CF
58
DN 40 KF
90
60

Fig. 3 Nude gauge head IE 21 Fig. 4 Nude gauge head IE 220

14 GA 09.406/6.02 - 01/02
 33 33
69,4 69,4

48
55

12,8
12,8

DN 40 CF
DN 40 CF
58
58

90 90

Fig. 5 Nude gauge head IE 211 Fig. 6 Nude gauge head IE 413 / IE 414

33 33
69,4 69,4

25 25

12,8 12,8

DN 40 CF DN 40 CF
58 66

90
98

Fig. 7 Nude gauge head IE 511 Fig. 8 Nude gauge head IE 514

GA 09.406/6.02 - 01/02 15

33 33
69,4 69,4

48
55

12,8
12,8

DN 40 CF
DN 40 CF
58
58

90 90

Fig. 5 Nude gauge head IE 211 Fig. 6 Nude gauge head IE 413 / IE 414

33 33
69,4 69,4

25 25

12,8 12,8

DN 40 CF DN 40 CF
58 66

90
98

Fig. 7 Nude gauge head IE 511 Fig. 8 Nude gauge head IE 514

GA 09.406/6.02 - 01/02 15
2.3 Connection of the Gauge Head-
and Extension Cable
Do not use any force when inserting the plug. Maske otherwise the current leadthrough may be damaged.
sure at first thal all pins are in parallel and straight as

Operating IM 110 D IM 210 / IM 210 D IM 220 / IM 221 IM 510 IM 520

Gauge unit IT 230 / IT 230 DS IT 251/ IT 252
head
————————————————————————————————————————————————————————————————
IE 10 / IR 10 Gauge head cable --- --- --- ---
3 m Cat. No. 158 41
————————————————————————————————————————————————————————————————
IE 20 / IR 20 --- Gauge head cable --- ---
5 m Cat. No. 158 22
Gauge head cable Extension cable
2 m Cat. No. 158 43 5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
————————————————————————————————————————————————————————————————
IE 211 --- Gauge head cable Gauge head cableg --- ---
5 m Cat. No. 158 46 5 m Cat. No. 158 21
Plug is not secured.
Plug is secured. No leading earth pin.
Extension cable
No leading earth pin. 5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
————————————————————————————————————————————————————————————————
IE 21 --- Gauge head cable Gauge head cable --- ---
2 m Cat. No. 158 43 5 m Cat. No. 158 22
Extension cable
5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
VDE

16 GA 09.406/6.02 - 01/02

2.3 Connection of the Gauge Head-

and Extension Cable
Do not use any force when inserting the plug. Maske otherwise the current leadthrough may be damaged.
sure at first thal all pins are in parallel and straight as
Operating IM 110 D IM 210 / IM 210 D IM 220 / IM 221 IM 510 IM 520
Gauge unit IT 230 / IT 230 DS IT 251/ IT 252
head
————————————————————————————————————————————————————————————————
IE 10 / IR 10 Gauge head cable --- --- --- ---
3 m Cat. No. 158 41
————————————————————————————————————————————————————————————————
IE 20 / IR 20 --- Gauge head cable --- ---
5 m Cat. No. 158 22
Gauge head cable Extension cable
2 m Cat. No. 158 43 5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
————————————————————————————————————————————————————————————————
IE 211 --- Gauge head cable Gauge head cableg --- ---
5 m Cat. No. 158 46 5 m Cat. No. 158 21
Plug is not secured.
Plug is secured. No leading earth pin.
Extension cable
No leading earth pin. 5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
————————————————————————————————————————————————————————————————
IE 21 --- Gauge head cable Gauge head cable --- ---
2 m Cat. No. 158 43 5 m Cat. No. 158 22
Extension cable
5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
VDE

16 GA 09.406/6.02 - 01/02
 Operating IM 110 D IM 210 / IM 210 D IM 220 / IM 221 IM 510 IM 520
Gauge unit IT 230 / IT 230 DS IT 251/ IT 252
head
————————————————————————————————————————————————————————————————
IR 26 / IR 27 --- --- Gauge head cable --- ---
3 m Cat. No. 896 29
Extension cable
5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
————————————————————————————————————————————————————————————————
IE 220 --- Gauge head cable --- ---
Gauge head cable 5 m Cat. No. 158 21
5 m Cat. No. 158 46 Extension cable
5 m Cat. No. 158 27
Plug is secured. 15 m Cat. No. 158 28
25 m Cat. No. 158 29
No touch protect. Temp. res. gauge head cable
3 m Cat. No. 158 23
VDE
————————————————————————————————————————————————————————————————
IE 413 --- --- --- Gauge head cable Gauge head cable
IE 511 5 m Cat. No. 158 45 5 m Cat. No. 158 68
Plug is secured. Extension cable
20 m Cat. No. 158 69
No leading earth pin Bakeable gauge head cable
5 m Cat. No. 158 44
Plug is not secured.
————————————————————————————————————————————————————————————————
IE 414 --- --- --- Gauge head cable Gauge head cable
IE 514 5 m Cat. No. 158 45 5 m Cat. No. 158 68
Extension cable
Plug is secured. 20 m Cat. No. 158 69
Bakeable gauge head cable
5 m Cat. No. 158 44
Plug is secured.
VDE

GA 09.406/6.02 - 01/02 17

Operating IM 110 D IM 210 / IM 210 D IM 220 / IM 221 IM 510 IM 520

Gauge unit IT 230 / IT 230 DS IT 251/ IT 252
head
————————————————————————————————————————————————————————————————
IR 26 / IR 27 --- --- Gauge head cable --- ---
3 m Cat. No. 896 29
Extension cable
5 m Cat. No. 158 27
15 m Cat. No. 158 28
25 m Cat. No. 158 29
————————————————————————————————————————————————————————————————
IE 220 --- Gauge head cable --- ---
Gauge head cable 5 m Cat. No. 158 21
5 m Cat. No. 158 46 Extension cable
5 m Cat. No. 158 27
Plug is secured. 15 m Cat. No. 158 28
25 m Cat. No. 158 29
No touch protect. Temp. res. gauge head cable
3 m Cat. No. 158 23
VDE
————————————————————————————————————————————————————————————————
IE 413 --- --- --- Gauge head cable Gauge head cable
IE 511 5 m Cat. No. 158 45 5 m Cat. No. 158 68
Plug is secured. Extension cable
20 m Cat. No. 158 69
No leading earth pin Bakeable gauge head cable
5 m Cat. No. 158 44
Plug is not secured.
————————————————————————————————————————————————————————————————
IE 414 --- --- --- Gauge head cable Gauge head cable
IE 514 5 m Cat. No. 158 45 5 m Cat. No. 158 68
Extension cable
Plug is secured. 20 m Cat. No. 158 69
Bakeable gauge head cable
5 m Cat. No. 158 44
Plug is secured.
VDE

GA 09.406/6.02 - 01/02 17
2.3.1 Nude Gauge Head IE 21 and IE 220 Fig. 9), it must be removed.
Open the plug cover and drive out the
Correct operation is maintained up to a cable length of coding pin from inside using a drift
30 m. The required extension cables are given in the punch. This is necessary as otherwise
Section 1.4.2 Accessories resp. Section 2.3 (longer the nude gauge head may be damaged.
extension cables are available on request).
The gauge head cable will withstand temperatures up to The new series enables the installation of two cathodes
100 °C. Cat. No. 158 58. But in that case a special gauge head
cable must be used.
Nude gauge head IE 220
The plug of the gauge head cable Cat. No. 158 46 will Gauge head cable Cat. No. 158 21
lock itself on the gauge head side to provide a secure Because of VDE-regulations the plug used here is longer
connection, but the ground pin will not make the first and is therefore not secured by the socket. There is no
connection (no leading ground pin). leading ground pin.
The plug may be secured, if three spacers
(Ref. No. 200 27 883) are installed between flange and
2.3.2 Nude Gauge Head IE 211 socket (use longer screws).
The nude gauge head IE 211 can be connected to
gauge head cables Cat. No. 158 46 and 158 21, but
especially note the following: 2.3.3 Nude Gauge Head IE 413 and IE 511
Gauge head cable Cat. No. 158 46 Both nude gauge heads can be connected to gauge
The plug is sesured, but is not provided with a leading head cables Cat No. 158 45 and 158 68, but especially
ground pin. note the following:
Important From senes 3, the IE 211 gauge head Gauge head cable Cat. No. 158 45 for IM 510
must only be connected by means of the The plug is secured but is not provided with a leading
cable Cat No.158 46, without coding ground pin.
pin. If there is still a coding pin „A“ (see

18 GA 09.406/6.02 - 01/02

2.3.1 Nude Gauge Head IE 21 and IE 220 Fig. 9), it must be removed.
Open the plug cover and drive out the
Correct operation is maintained up to a cable length of coding pin from inside using a drift
30 m. The required extension cables are given in the punch. This is necessary as otherwise
Section 1.4.2 Accessories resp. Section 2.3 (longer the nude gauge head may be damaged.
extension cables are available on request).
The gauge head cable will withstand temperatures up to The new series enables the installation of two cathodes
100 °C. Cat. No. 158 58. But in that case a special gauge head
cable must be used.
Nude gauge head IE 220
The plug of the gauge head cable Cat. No. 158 46 will Gauge head cable Cat. No. 158 21
lock itself on the gauge head side to provide a secure Because of VDE-regulations the plug used here is longer
connection, but the ground pin will not make the first and is therefore not secured by the socket. There is no
connection (no leading ground pin). leading ground pin.
The plug may be secured, if three spacers
(Ref. No. 200 27 883) are installed between flange and
2.3.2 Nude Gauge Head IE 211 socket (use longer screws).
The nude gauge head IE 211 can be connected to
gauge head cables Cat. No. 158 46 and 158 21, but
especially note the following: 2.3.3 Nude Gauge Head IE 413 and IE 511
Gauge head cable Cat. No. 158 46 Both nude gauge heads can be connected to gauge
The plug is sesured, but is not provided with a leading head cables Cat No. 158 45 and 158 68, but especially
ground pin. note the following:
Important From senes 3, the IE 211 gauge head Gauge head cable Cat. No. 158 45 for IM 510
must only be connected by means of the The plug is secured but is not provided with a leading
cable Cat No.158 46, without coding ground pin.
pin. If there is still a coding pin „A“ (see

18 GA 09.406/6.02 - 01/02
 15846
Here knock out the coding pin
from inside using an ejector drift.

J A
I B
H C
G D
E F

Fig. 9 Plug, gauge head side

Gauge head cable Cat. No. 158 68 for IM 520 pin at this position.
Because of VDE-regulations the plug used here is longer
The required modification is the same as described in
and is therefore not secured by the socket.
Section 2.3.2.

2.3.4 Nude Gauge Head IE 414 / IE 514

Both nude gauge heads can be connected to gauge
head cables Cat. No. 158 45 and 158 68.
For the gauge head cable Cat. No. 158 45 for the IM 510
note the following:
The coding pin in the plug must be removed as the
gauge heads IE 414 and IE 514 have a leading ground

GA 09.406/6.02 - 01/02 19
15846

Here knock out the coding pin

from inside using an ejector drift.

J A
I B
H C
G D
E F

Fig. 9 Plug, gauge head side

Gauge head cable Cat. No. 158 68 for IM 520 pin at this position.
Because of VDE-regulations the plug used here is longer
The required modification is the same as described in
and is therefore not secured by the socket.
Section 2.3.2.

2.3.4 Nude Gauge Head IE 414 / IE 514

Both nude gauge heads can be connected to gauge
head cables Cat. No. 158 45 and 158 68.
For the gauge head cable Cat. No. 158 45 for the IM 510
note the following:
The coding pin in the plug must be removed as the
gauge heads IE 414 and IE 514 have a leading ground

GA 09.406/6.02 - 01/02 19
2.4 Adjustment of Calibration Instructions GA 666 resp. GA 09.411.
Values on Operating Units Note
The calibrabon factors „J1“ / „J2“ and „E1“/ „E2“ are
2.4.1 Adjustments for given by the label on page 2.
Nude Gauge Heads lE 21 / lE 220
The nude gauge head IE 21 and IE 220 was individually 2.4.2 Adjustments for Nude Gauge Heads
calibrated during the final test. This allows for a more IE 413 / IE 511
accurate pressure measurement.
The nude gauge head IE 511 and IE 413 was individual-
When applying the voltages as supplied by the IM 210, ly calibrated during the final test This allows for a more
IM 210 D, IT 230 and IT 230 DS the sensitivities „E1“ for accurate pressure measurement
cathode 1 and „E2“ for cathode 2 are obtained.
Instead of the emission current of 1.85 mA given in Ope-
If the calibration value should deviate by more than 10 % rating Instructions GA 656 (GA 09.405) resp. GA 663
from the nominal value of 5 mbar-1 the potentiometer on (GA 09.406) an emission current of „ie“ must be set on
the rear of the IM 210 / 210 D can be used to correct the
the operating unit IM 510.
sensitivity.
With the operating units IT 230 / IT 230 DS the required This calibration process is described in Operating
correction is introduced by adjusting the emission cur- Instructions GA 656 resp. GA 09.405.
rent according to the following equation: Note
5 mbar-1 The emission current „ie“ is given by the label on page 2.
ie = x mA
E1 or E2
for IT 230 → x = 0.2 ; for IT 230 DS → x = 1.5
2.4.3 Adjustments for Nude Gauge Heads
For the IM 220 / IM 221 the calibration factor (CAL) „J1“
for cathode 1 and „J2“ for cathode 2 has to be entered.
IE 414 and IE 514
This calibration process is described in Operating The nude gauge head IE 414 / IE 514 was individually

20 GA 09.406/6.02 - 01/02

2.4 Adjustment of Calibration Instructions GA 666 resp. GA 09.411.

Values on Operating Units Note
The calibrabon factors „J1“ / „J2“ and „E1“/ „E2“ are
2.4.1 Adjustments for given by the label on page 2.
Nude Gauge Heads lE 21 / lE 220
The nude gauge head IE 21 and IE 220 was individual- 2.4.2 Adjustments for Nude Gauge Heads
ly calibrated during the final test. This allows for a more IE 413 / IE 511
accurate pressure measurement.
The nude gauge head IE 511 and IE 413 was individual-
When applying the voltages as supplied by the IM 210, ly calibrated during the final test This allows for a more
IM 210 D, IT 230 and IT 230 DS the sensitivities „E1“ for accurate pressure measurement
cathode 1 and „E2“ for cathode 2 are obtained.
Instead of the emission current of 1.85 mA given in Ope-
If the calibration value should deviate by more than 10 % rating Instructions GA 656 (GA 09.405) resp. GA 663
from the nominal value of 5 mbar-1 the potentiometer on (GA 09.406) an emission current of „ie“ must be set on
the rear of the IM 210 / 210 D can be used to correct the
the operating unit IM 510.
sensitivity.
With the operating units IT 230 / IT 230 DS the required This calibration process is described in Operating
correction is introduced by adjusting the emission cur- Instructions GA 656 resp. GA 09.405.
rent according to the following equation: Note
5 mbar-1 The emission current „ie“ is given by the label on page 2.
ie = x mA
E1 or E2
for IT 230 → x = 0.2 ; for IT 230 DS → x = 1.5
2.4.3 Adjustments for Nude Gauge Heads
For the IM 220 / IM 221 the calibration factor (CAL) „J1“
for cathode 1 and „J2“ for cathode 2 has to be entered.
IE 414 and IE 514
This calibration process is described in Operating The nude gauge head IE 414 / IE 514 was individually

20 GA 09.406/6.02 - 01/02
calibrated during the final test This allows for a more a T-piece DN 40 KF which provides an addifonal optical
accurate pressure measurement. screening (observe installabon depth).
- An emission current of „ie“ must be set on the opera-
The additional installation of sintered filters is not per-
ting unit IM 510. This is described in Operating Instruc-
missible in the case of the IONIVAC gauge heads as this
tions GA 656 resp. GA 09.405.
may lead to increased measurement errors.
- A calibration factor „CAL“ must be set on the operating
unit IM 520. This is described in Operating Instructions
GA 09.408.
Note
2.6 Operation
The emission cunrent „ie“ and the calibrabon fætor „CAL“ The presence of halogenes such as fluorine, chlorine,
are given by the label on page 2. bromine and iodine or their compounds will erode the
yttric oxide layer of the iridium cathode within a very
short period of time. Because of this the cathodes will
2.5 Protective Measures burnout. For such applications the gauge heads (except
IR 10 / lE 10) are available with tungsten cathodes.
IONIVAC gauge heads and nude gauge heads can be
protected against contamination or evaporation deposits
(especially in sputtering systems) by installation of a baf-
fle (Ref. No. 411 78 105). This bafffle consists of several
stainless steel plates and fits into any DN 40 KF small
flange, whereby fixing is by the centering ring.
The bafffle can be directly inserted in the case of glass
gauge heads which are installed by means of a com-
pression fitting.
The nude gauge heads IE 10 and IE 20 on a DN 40 KF
small flange must be mounted into a small flange com-
ponent before fitting the baffle. It is recommended to use

GA 09.406/6.02 - 01/02 21

calibrated during the final test This allows for a more a T-piece DN 40 KF which provides an addifonal optical
accurate pressure measurement. screening (observe installabon depth).
- An emission current of „ie“ must be set on the opera-
The additional installation of sintered filters is not per-
ting unit IM 510. This is described in Operating Instruc-
missible in the case of the IONIVAC gauge heads as this
tions GA 656 resp. GA 09.405.
may lead to increased measurement errors.
- A calibration factor „CAL“ must be set on the operating
unit IM 520. This is described in Operating Instructions
GA 09.408.
Note
2.6 Operation
The emission cunrent „ie“ and the calibrabon fætor „CAL“ The presence of halogenes such as fluorine, chlorine,
are given by the label on page 2. bromine and iodine or their compounds will erode the
yttric oxide layer of the iridium cathode within a very
short period of time. Because of this the cathodes will
2.5 Protective Measures burnout. For such applications the gauge heads (except
IR 10 / lE 10) are available with tungsten cathodes.
IONIVAC gauge heads and nude gauge heads can be
protected against contamination or evaporation deposits
(especially in sputtering systems) by installation of a baf-
fle (Ref. No. 411 78 105). This bafffle consists of several
stainless steel plates and fits into any DN 40 KF small
flange, whereby fixing is by the centering ring.
The bafffle can be directly inserted in the case of glass
gauge heads which are installed by means of a com-
pression fitting.
The nude gauge heads IE 10 and IE 20 on a DN 40 KF
small flange must be mounted into a small flange com-
ponent before fitting the baffle. It is recommended to use

GA 09.406/6.02 - 01/02 21
3 Maintenance
The cathode, the ion collector or the anode 3.2 Exchanging the
filament are supplied mounted to a plate
under a cover. Installation may only be car- Anode Filament
ried out in a dust-free room, and the use of - First carefully loosen the lower hex screws (10/5) at
gloves is essential. both terminals and then pull the faulty anode filament
(10/1) upwards.
Preparation
- Switch off the operating unit. Important Do not damage the cathode(s) and ion
- Detach the gauge head cable from the gauge head. collector.
- Remove the gauge head from the vacuum system.
Note
The replacement anode is provided with a transportation
link which may only be removed after installation.
3.1 Exchanging the Cathode
- After loosening the lower hex screw (10/4) at both ter- - Open the packaging container, carefully loosen the
minals (10/3) remove the faulty cathode (10/2). lower hex screw (10/5) at both terminals and then
Note remove the anode from the holder.
The required 0.89 mm screwdriver is included with the - Insert the anode into the pins on the gauge head and
replacement cathode. tighten the screws.
- Open the transport packaging, remove the replacement - Sever the transport. Iink at the terminals and complete-
cathode in the same way and install it in the place of the ly remove it from the gauge head.
old cathode. Note
Note The initially applicable calibration values do not apply
The cathode should be positioned as parallel as possible any longer after exchanging the anode. Deviations up to
to the anode. The initially applicable calibration values 15 % may occur.
do not apply any longer after exchanging the cathode.
Deviations up to 15 % may occur.
22 GA 09.406/6.02 - 01/02

3 Maintenance
The cathode, the ion collector or the anode 3.2 Exchanging the
filament are supplied mounted to a plate
under a cover. Installation may only be car- Anode Filament
ried out in a dust-free room, and the use of - First carefully loosen the lower hex screws (10/5) at
gloves is essential. both terminals and then pull the faulty anode filament
(10/1) upwards.
Preparation
- Switch off the operating unit. Important Do not damage the cathode(s) and ion
- Detach the gauge head cable from the gauge head. collector.
- Remove the gauge head from the vacuum system.
Note
The replacement anode is provided with a transportation
link which may only be removed after installation.
3.1 Exchanging the Cathode
- After loosening the lower hex screw (10/4) at both ter- - Open the packaging container, carefully loosen the
minals (10/3) remove the faulty cathode (10/2). lower hex screw (10/5) at both terminals and then
Note remove the anode from the holder.
The required 0.89 mm screwdriver is included with the - Insert the anode into the pins on the gauge head and
replacement cathode. tighten the screws.
- Open the transport packaging, remove the replace- - Sever the transport. Iink at the terminals and complete-
ment cathode in the same way and install it in the place ly remove it from the gauge head.
of the old cathode. Note
Note The initially applicable calibration values do not apply
The cathode should be positioned as parallel as possi- any longer after exchanging the anode. Deviations up to
ble to the anode. The initially applicable calibration 15 % may occur.
values do not apply any longer after exchanging the
cathode. Deviations up to 15 % may occur.
22 GA 09.406/6.02 - 01/02
 Key to Flg. 10 1
1 Anode filament
2 Cathode
3 Terminal
4 Hex screw 2
5 Hex screw
6 Slotted screw 7
7 Cap 3
6
4

Fig. 10 Nude gauge head IE 220

3.3 Exchanging the lon Collector

- Remove the anode as described in Section 3.2.
- Loosen the three slotted screws (10/6) offset by 120°
and remove them.
- Carefully remove the cap (10/7) upwards over the ion
collector.
- Remove the old ion collector from the gauge head by
loosening the lower hex screw.
- Remove the replacement ion collector in the same way
and install it in the gauge head.
The rest of the installation process is per formed as befo-
re, but in the reverse order.

GA 09.406/6.02 - 01/02 23

Key to Flg. 10 1
1 Anode filament
2 Cathode
3 Terminal
4 Hex screw 2
5 Hex screw
6 Slotted screw 7
7 Cap 3
6
4

Fig. 10 Nude gauge head IE 220

3.3 Exchanging the lon Collector

- Remove the anode as described in Section 3.2.
- Loosen the three slotted screws (10/6) offset by 120°
and remove them.
- Carefully remove the cap (10/7) upwards over the ion
collector.
- Remove the old ion collector from the gauge head by
loosening the lower hex screw.
- Remove the replacement ion collector in the same way
and install it in the gauge head.
The rest of the installation process is per formed as befo-
re, but in the reverse order.

GA 09.406/6.02 - 01/02 23
3.4 Service at LEYBOLD’s
If you send a gauge head to LEYBOLD indicate whether
the gauge head is free of substances damaging to
health or whether it is contaminated. If it is contaminated
also indicate the nature of hazard. To do so, you must
use a preprinted form which we shall send to you upon
request.
A copy of this form is printed at the end of the Operating
Instructions: „Declaration of Contaminabon of Vacuum
Equipment and Components“.
Either fasten this form at the gauge head or simply
enclose it to the gauge head.
This declaration of contaminabon is necessary to comp-
ly with legal requirements and to protect our staff.
LEYBOLD must retum any gauge head without a decla-
ration of contamination to the sender’s adress.

24 GA 09.406/6.02 - 01/02

3.4 Service at LEYBOLD’s

If you send a gauge head to LEYBOLD indicate whether
the gauge head is free of substances damaging to
health or whether it is contaminated. If it is contaminated
also indicate the nature of hazard. To do so, you must
use a preprinted form which we shall send to you upon
request.
A copy of this form is printed at the end of the Operating
Instructions: „Declaration of Contaminabon of Vacuum
Equipment and Components“.
Either fasten this form at the gauge head or simply
enclose it to the gauge head.
This declaration of contaminabon is necessary to comp-
ly with legal requirements and to protect our staff.
LEYBOLD must retum any gauge head without a decla-
ration of contamination to the sender’s adress.

24 GA 09.406/6.02 - 01/02
 Declaration of Contamination of Vacuum Equipment and Components Declaration of Contamination of Vacuum Equipment and Components
The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara- been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara-
tion. tion.
This declaration can only be completed and signed by authorized and qualified staff. This declaration can only be completed and signed by authorized and qualified staff.

GA 09.406/6.02 - 01/02
GA 09.406/6.02 - 01/02
1. Description of Vacuum Equipment and Com- 2. Reason for Return 1. Description of Vacuum Equipment and Com- 2. Reason for Return
ponents ____________________________________________ ponents ____________________________________________
____________________________________________ ____________________________________________
- Equipment type/model: _________________________________ - Equipment type/model: _________________________________
____________________________________________ ____________________________________________
- Code No.: _________________________________ - Code No.: _________________________________
- Serial No.: _________________________________
____________________________________________ - Serial No.: _________________________________
____________________________________________
- Invoice No.: _________________________________ ____________________________________________ - Invoice No.: _________________________________ ____________________________________________
- Delivery date: __________________________ ____________________________________________ - Delivery date: __________________________ ____________________________________________

3. Condition of the Vacuum Equipment and Com- 4. Process related Contamination of Vacuum 3. Condition of the Vacuum Equipment and Com- 4. Process related Contamination of Vacuum
ponents ponents
- Has the equipment been used?
Equipment and Components:
- toxic L E yes ❒ no ❒ - Has the equipment been used?
Equipment and Components:
- toxic L E yes ❒ no ❒
yes ❒ no ❒ - corrosive yes ❒ no ❒ yes ❒ no ❒ - corrosive yes ❒ no ❒
- What type of pump oil/liquid was used? _________ - explosive*) yes ❒ no ❒ - What type of pump oil/liquid was used? _________ - explosive*) yes ❒ no ❒
- Is the equipment free from potentially - Is the equipment free from potentially
harmful substances? - biological hazard*) yes ❒ no ❒ harmful substances? - biological hazard*) yes ❒ no ❒
yes ❒
no ❒
(go to Section 5)
(go to Section 4)
P
- radioactive*)
- other harmful substances
yes ❒
yes ❒
no
no
❒
❒
yes ❒
no ❒
(go to Section 5)
(go to Section 4)
P
- radioactive*)
- other harmful substances
yes ❒
yes ❒
no
no
❒
❒
M
*) Vacuum equipment and components which have been contaminated by biological explosive or radioactive substances,
will not accepted without written evidence of decontamination!
A M
*) Vacuum equipment and components which have been contaminated by biological explosive or radioactive substances,
will not accepted without written evidence of decontamination!
A
Please list all substances, gases and by-products which may have come into contact with the equipment: Please list all substances, gases and by-products which may have come into contact with the equipment:

Trade name
Product name
Manufacturer
S Chemical name
(or Symbol)
Dangerous
material class
Measures
if spillage
First aid in case of
human contact
Trade name
Product name
Manufacturer
S Chemical name
(or Symbol)
Dangerous
material class
Measures
if spillage
First aid in case of
human contact

1. 1.
2. 2.
3. 3.
4. 4.
5. 5.

5. Legally Binding Declaration 5. Legally Binding Declaration

I hereby declare that the information supplied on this form is complete and accurate. The despatch of the contaminated I hereby declare that the information supplied on this form is complete and accurate. The despatch of the contaminated
vacuum equipment and components will be in accordance with the appropriate regulations covering Packaging, Transpor- vacuum equipment and components will be in accordance with the appropriate regulations covering Packaging, Transpor-
tation and Labelling of Dangerous Substances. tation and Labelling of Dangerous Substances.
Name of organisation or company:_____________________________________________________________________ Name of organisation or company:_____________________________________________________________________
Address: _____________________________ Post code:______________________________________ Address: _____________________________ Post code:______________________________________
Tel.: ______________________________________________________________________________ Tel.: ______________________________________________________________________________
Fax: _____________________________ Telex: _________________________________________ Fax: _____________________________ Telex: _________________________________________

Copies: Page 1 (white) to manufacturer or representative - Page 2 (yellow) attach to consignment packaging securety - Page 3 (blue) copy for file of sender
Copies: Page 1 (white) to manufacturer or representative - Page 2 (yellow) attach to consignment packaging securety - Page 3 (blue) copy for file of sender

Name: ______________________________________________________________________________ Name: ______________________________________________________________________________

Job title: ______________________________________________________________________________ Job title: ______________________________________________________________________________
Date: _____________________________ Company stamp: Date: _____________________________ Company stamp:

Legally binding signature:____________________________________________________________________________ Legally binding signature:____________________________________________________________________________

Copyright © 1991 by MaschinenbauVerlag GmbH, Lyoner Straße 18, 6000 Frankfurt/M. 71 Order No.: 2121 Copyright © 1991 by MaschinenbauVerlag GmbH, Lyoner Straße 18, 6000 Frankfurt/M. 71 Order No.: 2121

25
25
 Printed in Germany on chlorine-free bleached paper
01.02
PG / RSP
LISS_04489_2002
LEYBOLD VAKUUM GmbH
Bonner Strasse 498 (Bayenthal)
D-50968 Cologne
Phone: (0221) 347-0
Fax: (0221) 347-1250
http://www.leyboldvac.de
e-mail:documentation@leyboldvac.de

GA 09.406/6.02 - 01/02

Printed in Germany on chlorine-free bleached paper

01.02
PG / RSP
LISS_04489_2002

LEYBOLD VAKUUM GmbH

Bonner Strasse 498 (Bayenthal)
D-50968 Cologne
Phone: (0221) 347-0
Fax: (0221) 347-1250
http://www.leyboldvac.de
e-mail:documentation@leyboldvac.de

26 GA 09.406/6.02 - 01/02