C227-E024B

Dynamic Ultra Micro Hardness Testers

DUH-211/211S
System for Evaluating Thin Films, Surface-Treated Layers,
and Microelectronic Parts
Dynamic Ultra Micro Hardness Testers

DUH-211/211S
 Building on our experience with hardness evaluation
technology for the micro range, we have taken our quest
for greater precision and ease of use to the next level.
Our hardness tester can measure the strength
properties of material surfaces and microscopic materials
u s i n g n e w e v a l u a t i o n m e t h o d s s p e c i fi e d i n I S O s t a n d a r d s .

Perform evaluation using the hardness and materials

parameters specified in ISO 14577-1 (Annex A) *1) .

Evaluates hardness of a wide range of materials

T h i n fi l m s
Plastics
Rubbers and elastomers
Metallic materials
Fibers
Brittle materials
Microscopic electronic components

Test the surface strength of thin films, surface-treated layers such as ion-implanted layers
and nitride layers, as well as nonmetallic materials such as plastics, rubbers, and ceramics.

*1 ISO 14577-1 Metallic materials - Instrumented indentation test for hardness and materials parameters Part1: Test method
Annex A Materials parameters determined from the force/indentation depth date set
Standard used for new evaluation methods that continuously measure changes in test force and indentation depth which occur when an indenter is pressed into a
material, and for the evaluation of material hardness and strength properties such as Young's modulus and creep deformation

Materials and Applications P. 4 · 5 ISO 14577-1 (Annex A) P. 9

Features · Measurement Principle P. 6 Specifications P. 10

Contents
Functions P. 7 Optional Accessories P. 11

Data Processing P. 8 Related Product P. 12

 Materials and Applications

Thin Films Such as Vapor-Deposited Films and SiO2 (1 µm)

Test force: 1 mN
Semiconductor Materials, and Surface-Treated
Layers Such as Ion-Implanted Layers and Nitride
Layers
As film production technology improves and diversifies, it is becoming increasingly
important to evaluate the hardness of thin films and coatings on the surface of
materials. These include ion-implanted layers, DLC (diamond-like carbon) films, and
vapor-deposited films produced by CVD (chemical vapor deposition) and PVD Plating layer on metal
plate (Plating layer:
(physical vapor deposition). By using an ultra micro test force to measure depths of Approx. 10 µm)
less than one tenth of a film's thickness, the DUH tester makes it easy to evaluate
the hardness of only the film, without influence from underlying materials.

DLC Films
DLC films offer properties such as high hardness, low friction coefficients, wear
resistance, electrical insulation, chemical resistance, and infrared light permeability,
and are widely used in tools, automotive parts, semiconductor manufacturing
equipment parts, and household goods. Measuring the hardness of such films is
necessary for determining the optimal film manufacturing parameters and for
monitoring their quality, but creating large indentations is not possible. The DUH is
perfect for these types of application, because it can evaluate hardness based on
DLC Films Test force: 50 mN
the indentation depth using only a small test force.

Plastics
An important feature of engineering plastics is hardness. The DUH can measure the
hardness of even highly light-absorbent materials, which are difficult to measure
using conventional testers.
Engineering plastics offer high strength, heat resistance, and other properties while
still providing the advantages of plastics in general such as superior plasticity and
ease of processing. As a result, they are commonly used for internal mechanical
parts (such as gears and bearings) in consumer electronic products. They provide
Thin film (30 µm) Test force: 5 mN
higher wear resistance, lighter weight, and lower cost than metal parts, and can be
mass produced, where hardness is used to improve performance and control
quality. However, the low reflectivity of plastics makes it difficult to measure the size
of indentations when using conventional hardness testers. In contrast, the DUH is
perfect for these applications, because it evaluates hardness based on the test force
applied and the resulting indentation depth.

Nylon Test force: 20 mN

Rubbers and Elastomers

Because indentation depth is used to determine hardness, hardness can be
measured using a variety of test forces and the tester can even be used to evaluate Acrylic Test force: 20 mN
deterioration in material surfaces of materials.
Rubber provides a low elastic modulus, high elongation in response to small forces,
and high repulsion. Consequently, its raw materials are often mixed with various
chemical ingredients to make a variety of products, such as tires, vibration
absorbing rubber, and O-rings. Due to the harsh environments where such
products are typically used, in addition to evaluating durability, hardness is used to
also evaluate surface deterioration. However, conventional hardness testers cannot
evaluate the elastic characteristics of rubber because of the indentation after
testing. In contrast, the DUH measures both the test force and indentation depth, Due to elastic recovery, Silicone rubber Test force: 2 mN
which makes it the perfect method for evaluating rubber, including its elasticity. no indentation remains

4
Metallic Materials
Perform micro-region hardness measurement, which
has become increasingly difficult as feature sizes have
become ever smaller.

Semiconductor pattern Test force: 100 mN Gold stud bump

Brittle Materials Such as Glass and Ceramics

Use a small test force to evaluate the hardness of brittle materials without
generating cracks. Measure the test force required to generate cracks.
Because glass is clear, hard, highly resistant to thermal deformation, and a good
electrical insulator, it is used for a wide range of applications, from window glazing
and display screens to various substrate materials, such as for CDs. On the other
hand, glass also tends to be brittle and thus requires various material and
processing method modifications for it to be used in, for example, large thin display Optical glass Test force: 2 mN
applications. Hardness is used to evaluate glass, but large test forces cause cracks
and the indentations are not clearly visible. Therefore, the DUH is ideal for
evaluating glass, because it determines hardness based on the indentation depth
using a small test force.

Ultra-Fine Fibers Such as Optical Fibers and

Carbon Fibers
Evaluate the strength of specimens taken from composite fiber materials and obtain
important information. Measure the hardness of fibers.

Carbon fiber Test force: 50 mN

Metal wire Test force: 100 mN

Micro Powders
Advances are being made to create ever finer micro powders in an effort to
increase their surface area-to-volume ratios. The strength of powders is evaluated
using compression testing, but due to the size of the particles, the DUH is ideal for
measuring their hardness in more detail.

Zirconia particles (30 µm) Example of measuring zirconia particles

Test force: 50 mN

DUH-211/211S
Dynamic Ultra Micro Hardness Testers 5
 Features

1. Evaluation of Hardness and Material Parameters 5. High-Precision Measurement of Indentation Depth

in Accordance with Standards (ISO 14577-1 Annex A) No need to measure the actual indentation.
Measure the behavior of a specimen as an indenter is pressed into it and evaluate the Specimen indentation depth can be measured in units of 0.0001 µm for depths up
hardness, elastic modulus, and amount of work done during indentation, in compliance to 10 µm.
with and ISO 14577-1 (instrumented indentation test for hardness) Annex A.
6. Supports a Wide Range of Testing Methods
2. Highly Precise Evaluation of Elastic Modulus Record the relationship between the test force and the indentation depth. Test both
Perform highly precise evaluation of the elastic modulus, using correction based on the unload and load processes. Use the DUH-211S to perform cyclic load-unload
instrument rigidity and the shape of the intender tip*1. tests and step load-unload tests.

3. Low Test Force with Measurement Resolution 7. Supports Vickers Hardness Test
of 0.196 µN
A function to measure the length of diagonals is provided as a standard feature. This
Control the test force using a high resolution of 0.196 µN. This allows measurement
function allows you to measure the hardness that corresponds only to plastic
of material strength properties in micro regions and in the outermost surfaces of
deformation, Vickers hardness, and Knoop hardness. (A Vickers indenter and Knoop
specimens.
indenter are available as options.) Maximum microscope magnification is 500×

4. Ultra-Wide Test Force Range of 0.1 to 1,961 mN (1000× is available as an option).

Use a wide test range of 0.1 to 1,961 mN for measurement, and test a variety of *1 Indenter tip shape correction is only available for the 115-degree triangular pyramid indenter.
industrial materials, including rubber, plastics, and ceramics. Shape correction is not available for other indenters.

Measurement Principle

Electromagnetic force is used to press an indenter (standard type: 115° triangular pyramid) against a specimen. Pressing force is increased at a constant
rate, from 0 to the preset test force. Indentation depth is automatically measured as the indenter is pressed against the specimen. This allows dynamic
measurement of changes that occur in the specimen's resistance to deformation during the indentation process, and obtains a wide variety of data. During
indentation the DUH-211/211S measures dynamic hardness and evaluates the hardness that corresponds to both plastic and elastic deformation. Also, if
the indentation size is large enough to be observed with a microscope, hardness can be calculated using just the plastic deformation, by measuring the
diagonal length of the indentation.

Load F (mN)
Expressions for Dynamic Hardness

① 115° triangular pyramid indenter (standard) ③ Vickers indenter (option)

DHT115 = 3.8584 × F / h2 DHV = 3.8584 × F / h2

② 100° triangular pyramid indenter (option) ④ Knoop indenter (option)

DHT100 = 15.018 × F / h2 DHK = 1.5583 × F / h2 Indentation depth h (µm)
Specimen
Even though the theoretical unit for these hardness expressions is kgf/mm2, it is normally not used. h

Expressions for Martens Hardness (ISO 14577-1 Annex A)

d1
Diagonal lengths
① 115° triangular pyramid indenter (standard) ② Vickers indenter (option) d1 and d2 (µm)
HMV = 1000 F / 26.43 × h2 [N/mm2] d2 (Used with Vickers indenter)
HM115 = 1000 F / 26.43 × h2 [N/mm2]

Hardness Expressions Based on Diagonal Length

① 115° triangular pyramid indenter (standard) ② 100° triangular pyramid indenter (option) ③ Vickers indenter (option) ④ Knoop indenter (option)
HT115 = 160.07 × F / d2 HT100 = 121.53 × F / d2 HV = 189.10 × F / d2 HK = 1451.1 × F / d2

d d2

d1
d: average

6
Functions

Combines Easy Operability and High-Level Data Processing Functions

Model used to perform three basic tests: DUH-211

Advanced model provides seven test modes: DUH-211S

Parameters required for each type of test can be viewed at a glance.

Test Types
Item DUH-211 DUH-211S
1. Load–Hold Test ○ ○
2. Load–Unload Test ○ ○
3. Cyclic Test ○ ○
4. Depth Setting Test — ○
5. Depth Setting Load–Unload Test — ○
6. Step Load Test — ○
Indentation size can be measured
7. Step Load–Unload Test — ○ in tests 1, 2, 4, and 5.

Test force Test force Test force

Maximum
test force

Fmax Fn1
Fmax

Minimum
0 test force 0
Indentation depth 0 hp hn2
hmax Fmin Indentation Fn2 Indentation
hmax depth hn1 depth

1. Load–Hold Test 2. Load–Unload Test

3. Cyclic Test
4. Depth Setting Test 5. Depth Setting Load–Unload Test

Test force Test force

Hold time
Maximum Unload
test force Maximum hold time
test force

Minimum
0 test force 0
Time Time
6. Step Load Test 7. Step Load–Unload Test

DUH-211/211S
Dynamic Ultra Micro Hardness Testers 7
 Data Processing

Simply set the required items to obtain the desired information.

Data Processing Items

· Results display
· Data output for test force and depth
· Graph output for test force and depth
· Graph output for hardness and depth
· Graph output for hardness between 2 points and depth
· Graph output for depth and time
· Graph output for hardness and test force
· Graph output for depth squared and test force
· Hardness calculation based on preliminary test force
· Graph output for hardness and parameters
· Calculation of converted hardness values
· Repeated changes of surface detection points
· Calculation of elastic modulus
· ASCII file output

Example of test results display (load–unload test)

Graph of depth squared against test force

Calculation of elastic modulus

8
ISO 14577-1 (Annex A) Compliant Evaluation
(I n stru m e n te d In d en tatio n T e st for Hardness)

Relationship between test force and indentation depth during indentation process can,
in accordance with ISO 14577-1 (Annex A), be used to evaluate hardness, elastic modulus,
and amount of work done.
HM : Martens hardness Cit : Indentation creep
HMs : Martens hardness obtained from gradient of graph of test force ηit : Indentation work rate
versus depth HV* : Vickers hardness obtained by converting Hit
Hit : Indentation hardness
Eit : Indentation elastic modulus

1. Indentation Elastic Modulus (Eit) Force

Here,
Definition of indentation elastic modulus (Eit) states Fmax
Er : Converted elastic modulus based on indentation contact Load–unload
that Eit is obtained from the inclination of the tangent curve
Ei : Young's modulus for indenter (1.14 × 1012 N/m2)
used to calculate the indentation hardness (Hit), and is νi : Poisson's ratio for indenter (0.07)
equivalent to Young's modulus. Eit : Indentation elastic modulus Depth
νs : Poisson's ratio for specimen
1 1−νs 1−νi 2 2 hr hmax

- =- +- S : Inclination at start of unloading (inclination of straight-line approximation)

Er Eit Ei Ap : Projected contact area (23.96 is a constant that applies when using a 115° triangular pyramid indenter.)
hc : Depth of the contact of the indenter with the test piece at Fmax
S = dP/dh = 2 · Er · Ap0.5/π0.5
hr : Point of intersection of the tangent to curve b at Fmax with the indentation depth-axis
Ap = 23.96 · hc2
hc = hmax − 0.75(hmax − hr)
If Poisson's ratio for the specimen is set in the test parameters, the DUH-211/211S calculates Eit.
Otherwise, the DUH-211/211S calculates (1− ν S2)/E it.
Test
2. Plastic and Elastic Portions of Indentation Work (ηit) force Wplast

A portion of the total mechanical work performed by indentation, Wtotal, is Welast

ηit =-
Welast

consumed due to plastic deformation, Wplast. The remaining portion of the (%)
total mechanical work corresponds to elastic deformation, Welast, which is
Wtotal
released when the test force is unloaded. This work is defined by W = ∫ Fdh. Wtotal = Welast + Wplast 0 Depth

Test Examples

Specimen: Fused silica

Test force: 1 mN

Specimen: Copper alloy

Test force: 1 mN

DUH-211/211S
Dynamic Ultra Micro Hardness Testers 9
 Specifications

Model DUH-211 DUH-211S

Loading Unit Loading Method Electromagnetic coil
Test Force Range Full scale of 0.1 to 1,961 mN
Test Force Accuracy ±19.6 µN or ±1% of displayed test force, whichever is greater
Minimum Measurement Increment 0.196 µN (for a test force not exceeding 1.96 mN)
Displacement Measurement Method Differential transformer
Measurement Unit Measurement Range 0 to 10 µm
Minimum Measurement Increment 0.0001 µm
Linearity ±2% of full scale (20 µm)
Indenter Type Triangular pyramid indenter with tip angle of 115° (Vickers indenter and Knoop indenter are available as options.)
Tip Radius 0.1 µm max.
Optical Monitor Total Magnification (microscope) ×500
Objective Lens ×50 (Up to 2 lenses can be attached.)
Eyepiece ×10
Lighting Method Reflected illumination
Light Source (lamp) LED: 3 W, 3 V
Light-Path Switching Observation or photograph (selectable)
Micrometer Collimation Method Direct connection between encoder and control handle; synchronized movement of two indexes
Detector Optical encoder
Effective Measurement Range 200 µm (with ×50 objective lens)
Minimum Measurement Increment 0.01 µm/pulse
Specimen Stage Vertical Distance Approx. 60 mm
Area Approx. 125 (W) × 125 (L) mm
Stage Movement Range 25 mm in both X and Y directions
Specimen Holder Specimen dimensions (i.e., 8 (thickness) × 30 (width) mm) when thin-type attachment (type 3) is used
Test Modes Load–Hold Test
Load–Unload Test
Cyclic Test
Depth Setting Test
Depth Setting Load–Unload Test
Step Load Test
Step Load-Unload Test
Required PC OS Windows ® 7 (32/64 bit edition)
Specifications CPU 1 GHz min.
Disk Drives CD-ROM drive
Display Resolution 1024 × 768 min.
Expansion Bus PCI Express ×1, 2 slots min. more than one ×1 slot is reguired (or slot size ×2 or more)
Utilities Power Supply Single phase, AC 100–115 V ± 10%, AC 230 V ± 10% (Ground resistance 100 Ω max.)
Power Consumption Approx. 100 W (not including power consumption of PC)
Grounding The ground terminal on 3 -prong connectors must be properly grounded with grounding resistance at 100 Ω or less.
Temperature Recommended temperature: 23±1°C
Allowable range: 10°C to 35°C
Vibration Horizontal vibration: 0.017 Gal max. (at 10 Hz or more)
0.01 µm max. (at less than 10 Hz)
Vertical vibration: 0.010 Gal max. (at 10 Hz or more)
0.005 µm max. (at less than 10 Hz)
Humidity 80% max. (no condensation)
Dimensions and External Dimensions Tester: Approx. 355 (W) × 405 (D) × 530 (H) mm
Weight Control unit: Approx. 315 (W) × 375 (D) × 110 (H) mm
Weight Tester: Approx. 60 kg
Control unit: Approx. 5 kg
*Windows 7 is registered trademark of Microsoft Corporation in the US and other countries.

St andard C o n fi g u rat io n E x t e r n a l D im e n s i ons

Name Quantity Unit: mm
Hardness Tester (main unit) 1
Objective Lens (×50) P/N 344-89964-40 1
Triangular Pyramid Indenter (tip angle: 115°) P/N 340-47013 1
Specimen Stage (XY stage)
Micrometer Head ) P/N 347-24205-41
1
2 530
PC
Specimen Holder P/N 344-17737-40 1
Control Unit 1
Accessories (Cords, AC adapters, tools, instruction manual,
1 set
installation disk)
110
PC and Printer are not included.
355 315

Hardness tester (main unit) Control unit

10
Optional Accessories

Length Measurement Kit BK7 (Glass Test Piece) Slender Specimen Holder
(Color or Monochrome) P/N 339-89207-14 P/N 344-82943-40
Used to obtain the correction factors required for the This attachment is used to firmly hold thin specimens
Length measurement kit, color: P/N 347-24778-44
Length measurement kit, monochrome: P/N 347-24778-43 indenter when measuring the elastic modulus. with an outer diameter of 0.15 mm to 1.6 mm, such as
Microscope images of the specimen surface can be sewing machine needles, watch shafts, thin-shaped
displayed on the PC screen. Measure the size of medical equipment, wires, sintered wires, and nonferrous
indentations on the screen and save the images. Triangular Pyramid Indenter wires.
Maximum magnification factor is ×2400 (when using a with 100° Tip Angle
17ґ monitor and an objective lens with a magnification P/N 340-47011
factor of 50). This accessory can be used with computers This indenter, with a tip
angle of 100°, has a Shape of indenter tip
designated by Shimadzu.
smaller tip radius and
γ
makes smaller indentations α β
than an indenter with a tip
α = β = γ = 100°
angle of 115°. Used for
testing small-size
specimens.

Measurement Kit for Vickers Hardness

P/N 347-24449-01
The verification in accordance with standard (ISO Disk-Type Vacuum Suction Unit
P/N 344-86201-42
6507-2) is done at the factory.
Used for 5ґ, 6ґ, and 8ґ wafers.
Factory verified for compliance with Vickers hardness
Objective Lens test standards.
(Air supply for suction must be separately prepared.)
×100 objective lens P/N 344-89977-40
Please order simultaneously with the DUH.
×40 objective lens P/N 347-25400
×20 objective lens P/N 344-89924-40 Micrometer Head (Digital Display)
×10 objective lens P/N 344-89941-40 P/N 347-25447-12 (2 unit)
Measurement Kit for Knoop Hardness Used to digitally display the amount of stage movement
×40 objective lens with ultra-long operating distance P/N 347-24449-11
P/N 344-89300-41 (up to a maximum of 25 mm) in the front/back or
The verification in accordance with standard (ISO
40× objective lens with ultra-long operating distance. left/right directions in 1 µm increments. (Photo shows
4545-2) is done at the factory.
Improves contrast in the field-of-view. this head attached to a stage.)
Factory verified for compliance with Vickers hardness
test standards.
Please order simultaneously with the DUH.
Windbreak
P/N 347-24400-01
This case minimizes the influence of air disturbances,
Desk-Type Vibration Absorbing Bench
such as due to DUH tester exposure to air flow or sound. P/N 344-04193-06
W700 × D650 × H750 (mm) This bench with desk-type coil springs is recommended
if the DUH-211/211S tester is used in areas that are
subject to strong vibrations.
Windbreak (Large type)
P/N 347-24400-02
In the case that Active Vibration-Absorbing Bench is used Active Vibration-Absorbing Bench Rotation Stage
this is select. P/N 344-04211-11: AC 120 V P/N 344-82857-01
W700 × D650 × H950 (mm) P/N 344-04211-12: AC 230 V This stage has a diameter of 125 mm and can rotate in
This bench is used together with a special mount and the range ±5°.
performs active vibration absorption over a wide range,
Vickers Hardness Standard Block from 0.7 Hz to 100 Hz.
P/N 340-06619-07 Objective Micrometer
Used for measuring hardness with the 700HMV micro P/N 046-60201-02
Vickers. Used as a rough guide for Vickers hardness Used to adjust the microscope's magnification factor.
measurement. Marked with scale graduations at 10 µm intervals.

Installation Precautions Consider the following points when deciding on the installation location of the tester.
1. To min imize v ib ration: 2. To minim iz e air d r af t s an d s o u n d s : 3. To ensure testing accuracy:
1) Install the tester in a location where floor 1) Do not install the tester in locations that are Be especially careful when performing the following
vibration is minimal. Normally, place the tester on directly or indirectly subject to streams of air from types of tests:
a vibration-absorbing bench. air-conditioning equipment. • Tests involving test forces of 1 mN or less
2) Do not install the tester in a location where 2) Use a windbreak during testing. • Tests involving the measurement of changes for
people requently walk by. 3) Do not open or close nearby doors during testing. indentation depths of 0.05 µm or less
3) Do not install the tester near equipment that 4) Do not install the tester near sound-generating In these cases, be sure to maintain the following
generates vibrations. equipment (e.g., telephones). conditions:
4) If possible, install the tester on the first floor of a • Temperature: No fluctuations greater than ±1°C.
building. • Vibration: Refer to specification table.
5) Install the tester as far away as possible from
streets, roads and railway tracks.
6) Do not perform testing if vibration-generating
equipment (e.g., a crane) is being used nearby.

DUH-211/211S
Dynamic Ultra Micro Hardness Testers 11
 DUH-211/211S
Example of Dynamic Ultra Micro Handness Tester DUH-211/211S Systems

Electric X–Y High-Temperature P/N 347-24700-41 (50 Hz)

Stage System P/N 347-24625-41 Unit System 347-24700-42 (60 Hz)

• Stroke X-axis, Y-axis ±25 mm • Temperature From 30°C above room temperature to 250°C
(There is the function that the slides 50 mm toward the X-axis. Setting Range (temperature control is possible at 50°C or higher)
All stroke of X-axis are 100 mm) • Accuracy Within ±2°C of set temperature
• Resolution 0.001 mm • Total Magnification ×400 (objective lens: ×40; eyepiece: ×10)
• Drive method Ball screw actuated by stepping motor of Microscope
• Utilities 100V 50/60 Hz
* Compatible to electric Z system.
* High-temperature systems are only available when ordering the main unit.

Micro Compression Testing Machine Micro Hardness Tester Fully Automatic Micro Hardness Tester
MCT Series HMV-G21 HMV-G-FA

This machine is used to measure the compressive This type of hardness tester automatically By including an automatic measurement function,
strength of single particles (of diameter 1 µm or measures length using a built-in CCD camera. The an electric XYZ stage function, and an auto-focus
greater). The compressive strength of ceramics, automatic measurement function provides easy function to a micro Vickers hardness tester used
plastics, pigments, food products, and and worry-free measurements without human for evaluating the hardness of paint or plating
pharmaceuticals can be measured at a particulate error. The innovative G-frame provides a broad coatings or surface-hardened layers, this automatic
matter stage, providing data that is closely related work area, dramatically improves operability, and hardness tester is able to perform a continuous
to the final application of these substances. easily accommodates long samples or other series of highly precise measurements
samples with a large area. automatically.
• Loading Electromagnetic force The automatic lens switching function
Method 9.807 mN to 1.961 N or automatically switches to the magnification • Test Force Range 98.07 mN to 19.61 N
9.807 mN to 4.903 N appropriate for the given indentation size, which (Optionally from 9.807 m)
• Indenter Diamond, cone-shaped, means anyone can operate the system accurately. • Electric XY Stage Stroke: ±25 mm
50-µmø diameter Resolution: 0.001 mm
• Displacement Differential transformer • Test Force Range 98.07 mN to 19.61 N • Autofocus Approx. 3 sec.
Measurement 0 µm to 10 µm or 0 µm to 100 µm (Optionally from 9.807 m)
• Optical Monitor Equipped with ×500 microscope • Indentation Approx. 0.3 sec.
Measurement Time
• Equipped with revolving electric turret (HMV-G21T)

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