Sensirion Humidity SHT20 Datasheet
Sensirion Humidity SHT20 Datasheet
Sensirion Humidity SHT20 Datasheet
Fully calibrated
Digital output, I2C interface
Low power consumption
Excellent long term stability
DFN type package – reflow solderable
Product Summary
SHT20, the new humidity and temperature sensor of Every sensor is individually calibrated and tested. Lot
Sensirion is about to set new standards in terms of size identification is printed on the sensor and an electronic
and intelligence: Embedded in a reflow solderable Dual identification code is stored on the chip – which can be
Flat No leads (DFN) package of 3 x 3mm foot print and read out by command. Furthermore, the resolution of
1.1mm height it provides calibrated, linearized signals in SHT20 can be changed by command (8/12bit up to
digital, I2C format. 12/14bit for RH/T), low battery can be detected and a
checksum helps to improve communication reliability.
With a completely new designed CMOSens® chip, a
reworked capacitive type humidity sensor and an With made improvements and the miniaturization of the
improved band gap temperature sensor the performance sensor the performance-to-price ratio has been improved
has been lifted even beyond the outstanding level of the – and eventually, any device should benefit from the
previous sensor generation (SHT1x and SHT7x). For cutting edge energy saving operation mode. For testing
example, measures have been taken to stabilize the SHT20 a new evaluation Kit EK-H4 is available.
behavior at high humidity levels.
3.0
processing unit.
0.8 typ
2.2 1.1 Material Contents
While the sensor itself is made of Silicon the sensors‟
0.2
0.4
DRH (%RH) DT ( C)
± 10 ± 2.0
maximal tolerance maximal tolerance
±8 typical tolerance typical tolerance
± 1.5
±6
± 1.0
±4
± 0.5
±2
±0 ± 0.0
0 10 20 30 40 50 60 70 80 90 100 -40 -20 0 20 40 60 80 100 120
Relative Humidity (%RH) Temperature (°C)
Figure 2 Typical and maximal tolerance at 25°C for relative Figure 3 Typical and maximal tolerance for temperature sensor
humidity. For extensive information see Users Guide, Sect. 1.2. in °C.
Electrical Specification
Packaging Information
Parameter Condition min typ max Units
Sensor Type Packaging Quantity Order Number
Supply Voltage, VDD 2.1 3.0 3.6 V
Tape & Reel 1500 1-100706-01
sleep mode 0.15 0.4 µA SHT20
Supply Current, IDD 6 Tape & Reel 5000 1-100704-01
measuring 200 300 330 µA
sleep mode 0.5 1.2 µW
Power Dissipation 6 measuring 0.6 0.9 1.0 mW
average 8bit 3.2 µW
Heater VDD = 3.0 V 5.5mW, T = + 0.5-1.5°C
Communication digital 2-wire interface, I2C protocol
Table 1 Electrical specification. For absolute maximum This datasheet is subject to change and may be amended
values see Section 4.1 of Users Guide. without prior notice.
4
80 3
2
60
Normal Max. 1
40 Range Range 0
0 20 40 60 80 100 120
20
Temperature (°C)
0
Figure 6 Typical dependency of supply current (sleep mode)
-40 -20 0 20 40 60 80 100 120 versus temperature at VDD = 3.0V. Please note that the
Temperature (°C)
variance of these data can be above ±25% of displayed value.
Figure 4 Operating Conditions
20
Supply Current IDD (nA)
±7 ±7
90 ±5 8
80 6
70 2.1 2.3 2.5 2.7 2.9 3.1 3.3 3.5
±8
60
±6 ±4.5 ±6
50 Supply Voltage (VDD)
40
30 Figure 7 Typical dependency of supply current (sleep mode)
20 versus supply voltage at 25°C. Please note that deviations may
10 ±7 ±5 ±7 be up to ±50% of displayed value. Values at 60°C scale with a
0 ±7 factor of about 15 (compare Table 1).
0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80
Temperature (°C)
Figure 5 Maximal tolerance of relative humidity measurements
given in %RH for temperatures 0 – 80°C.
2 Application Information centered on the thermal land area. It can also be split in
two openings.
2.1 Soldering Instructions
Due to the low mounted height of the DFN, “no clean”
The DFN’s die pad (centre pad) and perimeter I/O pads
type 3 solder paste10 is recommended as well as Nitrogen
are fabricated from a planar copper lead-frame by over-
purge during reflow.
molding leaving the die pad and I/O pads exposed for
mechanical and electrical connection. Both the I/O pads TP tP
and die pad should be soldered to the PCB. In order to
prevent oxidation and optimize soldering, the bottom side
Temperature
TL tL
of the sensor pads is plated with Ni/Pd/Au.
TS (max)
On the PCB the I/O lands8 should be 0.2mm longer than
the package I/O pads. Inward corners may be rounded to
match the I/O pad shape. The I/O land width should match
the DFN-package I/O-pads width 1:1 and the land for the
die pad should match 1:1 with the DFN package – see preheating critical zone
Figure 8. Time
The solder mask9 design for the land pattern preferably is Figure 9 Soldering profile according to JEDEC standard. TP <=
260°C and tP < 30sec for Pb-free assembly. TL < 220°C and tL <
of type Non-Solder Mask Defined (NSMD) with solder
150sec. Ramp-up/down speeds shall be < 5°C/sec.
mask openings larger than metal pads. For NSMD pads,
the solder mask opening should be about 120μm to It is important to note that the diced edge or side faces of
150μm larger than the pad size, providing a 60μm to 75μm the I/O pads may oxidise over time, therefore a solder fillet
design clearance between the copper pad and solder may or may not form. Hence there is no guarantee for
mask. Rounded portions of package pads should have a solder joint fillet heights of any kind.
matching rounded solder mask-opening shape to minimize
For soldering SHT2x, standard reflow soldering ovens may
the risk of solder bridging. For the actual pad dimensions,
be used. The sensor is qualified to withstand soldering
each pad on the PCB should have its own solder mask
opening with a web of solder mask between adjacent profile according to IPC/JEDEC J-STD-020 with peak
temperatures at 260°C during up to 30sec for Pb-free
pads.
assembly in IR/Convection reflow ovens (see Figure 9).
0.4 0.3
0.2
recommended to further process the sensors within 1 year 10% of the time – e.g. maximum two measurements per
after date of delivery. second at 12bit accuracy shall be made.
It is of great importance to understand that a humidity
sensor is not a normal electronic component and needs to
be handled with care. Chemical vapors at high
concentration in combination with long exposure times
may offset the sensor reading.
For this reason it is recommended to store the sensors in
original packaging including the sealed ESD bag at
following conditions: Temperature shall be in the range of
10°C – 50°C and humidity at 20 – 60%RH (sensors that
are not stored in ESD bags). For sensors that have been
Figure 10 Top view of example of mounted SHT2x with slits
removed from the original packaging we recommend to
milled into PCB to minimize heat transfer.
store them in ESD bags made of metal-in PE-HD11.
In manufacturing and transport the sensors shall be 2.5 Light
prevented of high concentration of chemical solvents and The SHT2x is not light sensitive. Prolonged direct
long exposure times. Out-gassing of glues, adhesive tapes exposure to sunshine or strong UV radiation may age the
and stickers or out-gassing packaging material such as sensor.
bubble foils, foams, etc. shall be avoided. Manufacturing
area shall be well ventilated. 2.6 Materials Used for Sealing / Mounting
For more detailed information please consult the Many materials absorb humidity and will act as a buffer
document “Handling Instructions” or contact Sensirion. increasing response times and hysteresis. Materials in the
vicinity of the sensor must therefore be carefully chosen.
2.3 Reconditioning Procedure Recommended materials are: Any metals, LCP, POM
As stated above extreme conditions or exposure to solvent (Delrin), PTFE (Teflon), PEEK, PP, PB, PPS, PSU, PVDF,
vapors may offset the sensor. The following reconditioning PVF.
procedure may bring the sensor back to calibration state: For sealing and gluing (use sparingly): Use high filled
Baking: 100 – 105°C at < 5%RH for 10h epoxy for electronic packaging (e.g. glob top, underfill),
Re-Hydration: 20 – 30°C at ~ 75%RH for 12h 12. and Silicone. Out-gassing of these materials may also
contaminate the sensor (see Section 2.2). Therefore try to
2.4 Temperature Effects add the sensor as a last manufacturing step to the
assembly, store the assembly well ventilated after
Relative humidity reading strongly depends on
manufacturing or bake at >50°C for 24h to outgas
temperature. Therefore, it is essential to keep humidity
contaminants before packing.
sensors at the same temperature as the air of which the
relative humidity is to be measured. In case of testing or
2.7 Wiring Considerations and Signal Integrity
qualification the reference sensor and test sensor must
show equal temperature to allow for comparing humidity Carrying the SCL and SDA signal parallel and in close
readings. proximity (e.g. in wires) for more than 10cm may result in
cross talk and loss of communication. This may be
If the sensor shares a PCB with electronic components resolved by routing VDD and/or VSS between the two
that produce heat it should be mounted in a way that SDA signals and/or using shielded cables. Furthermore,
prevents heat transfer or keeps it as low as possible. slowing down SCL frequency will possibly improve signal
Measures to reduce heat transfer can be ventilation, integrity. Power supply pins (VDD, VSS) must be
reduction of copper layers between the sensor and the decoupled with a 100nF capacitor – see next Section.
rest of the PCB or milling a slit into the PCB around the
sensor – see Figure 10.
Furthermore, there are self-heating effects in case the
measurement frequency is too high. To keep self heating
below 0.1°C, SHT2x should not be active for more than
13 For sensors with alternative I2C address please contact Sensirion via
info@sensirion.com.
Command Comment Code header (1000‟0001) as shown in Figure 16. If the internal
Trigger T measurement hold master 1110‟0011 processing is finished, the sensor acknowledges the poll of
Trigger RH measurement hold master 1110‟0101
the MCU and data can be read by the MCU. If the
measurement processing is not finished the sensor
Trigger T measurement no hold master 1111‟0011
answers no ACK bit and the Start condition must be
Trigger RH measurement no hold master 1111‟0101 issued once more.
Write user register 1110‟0110
For both modes, since the maximum resolution of a
Read user register 1110‟0111 measurement is 14 bit, the two last least significant bits
Soft reset 1111‟1110 (LSBs, bits 43 and 44) are used for transmitting status
Table 6 Basic command set, RH stands for relative humidity, information. Bit 1 of the two LSBs indicates the
and T stands for temperature measurement type („0‟: temperature, „1‟ humidity). Bit 0 is
currently not assigned.
Hold master or no hold master modes are explained in
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18
next Section.
ACK
ACK
S 1 0 0 0 0 0 0 0 1 1 1 1 0 1 0 1
5.4 Hold / No Hold Master Mode I2C address + write Command (see Table 6)
There are two different operation modes to communicate 19 20 21 22 23 24 25 26 27
with the sensor: Hold Master mode or No Hold Master
NACK
mode. In the first case the SCL line is blocked (controlled Measurement S 1 0 0 0 0 0 0 1
by sensor) during measurement process while in the latter measuring I2C address + read
case the SCL line remains open for other communication
19 20 21 22 23 24 25 26 27
while the sensor is processing the measurement. No hold
ACK
master mode allows for processing other I2C Measurement S 1 0 0 0 0 0 0 1
communication tasks on a bus while the sensor is continue measuring I2C address + read
measuring. A communication sequence of the two modes
is displayed in Figure 15 and Figure 16, respectively. 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45
ACK
ACK
In the hold master mode, the SHT2x pulls down the SCL 0 1 1 0 0 0 1 1 0 1 0 1 0 0 1 0
line while measuring to force the master into a wait state. Data (MSB) Data (LSB) Stat.
By releasing the SCL line the sensor indicates that internal 46 47 48 49 50 51 52 53 54
processing is terminated and that transmission may be
NACK
continued. 0 1 1 0 0 1 0 0 P
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Checksum
ACK
ACK
28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45
In the examples given in Figure 15 and Figure 16 the
sensor output is SRH = „0110‟0011‟0101‟0000‟. For the
ACK
ACK
0 1 1 0 0 1 0 0 P
displayed in Table 7. Maximum values shall be chosen for
Checksum the communication planning of the MCU.
Figure 15 Hold master communication sequence – grey blocks
are controlled by SHT2x. Bit 45 may be changed to NACK
followed by Stop condition (P) to omit checksum transmission.
Resolution RH typ RH max T typ T max Units default and is not recommended for use. Please use Soft
14 bit 66 85 ms Reset instead – it contains OTP Reload.
13 bit 33 43 ms
12 Bit 22 29 17 22 ms
Bit # Bits Description / Coding Default
11 bit 12 15 9 11 ms
7, 0 2 Measurement resolution „00‟
10 bit 7 9 ms
RH T
8 bit 3 4 ms
„00‟ 12 bit 14 bit
Table 7 Measurement times for RH and T measurements at „01‟ 8 bit 12 bit
different resolutions. Typical values are recommended for „10‟ 10 bit 13 bit
calculating energy consumption while maximum values shall be „11‟ 11 bit 11 bit
applied for calculating waiting times in communication.
6 1 Status: End of battery14 „0‟
Please note: I2C communication allows for repeated Start „0‟: VDD > 2.25V
„1‟: VDD < 2.25V
conditions (S) without closing prior sequence with Stop
condition (P) – compare Figures 15, 16 and 18. Still, any 3, 4, 5 3 Reserved
sequence with adjacent Start condition may alternatively 2 1 Enable on-chip heater „0‟
be closed with a Stop condition. 1 1 Disable OTP Reload „1‟
5.5 Soft Reset Table 8 User Register. Cut-off value for End of Battery signal
may vary by ±0.1V. Reserved bits must not be changed. “OTP
This command (see Table 6) is used for rebooting the reload” = „0‟ loads default settings after each time a
sensor system without switching the power off and on measurement command is issued.
again. Upon reception of this command, the sensor
system reinitializes and starts operation according to the An example for I2C communication reading and writing the
default settings – with the exception of the heater bit in the User Register is given in Figure 18.
user register (see Sect. 5.6). The soft reset takes less than
15ms. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18
ACK
ACK
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 S 1 0 0 0 0 0 0 0 1 1 1 0 0 1 1 1
ACK
ACK
NACK
ACK
ACK
S 1 0 0 0 0 0 0 0 1 1 1 0 0 1 1 0
Please note that reserved bits must not be changed and
default values of respective reserved bits may change I2C address + write Write Register
over time without prior notice. Therefore, for any writing to 55 56 57 58 59 60 61 62 63
the User Register, default values of reserved bits must be
ACK
0 0 0 0 0 0 1 1 P
read first. Thereafter, the full User Register string is
composed of respective default values of reserved bits Register content to be written
and the remainder of accessible bits optionally with default Figure 18 Read and write register sequence – grey blocks are
or non-default values. controlled by SHT2x. In this example, the resolution is set to 8bit
The end of battery alert is activated when the battery / 12bit.
power falls below 2.25V.
5.7 CRC Checksum
The heater is intended to be used for functionality SHT21 provides a CRC-8 checksum for error detection.
diagnosis – relative humidity drops upon rising The polynomial used is x8 + x5 + x4 +1. For more details
temperature. The heater consumes about 5.5mW and and implementation please refer to the application note
provides a temperature increase of about 0.5 – 1.5°C. “CRC Checksum Calculation for SHT2x”.
OTP Reload is a safety feature and loads the entire OTP
settings to the register, with the exception of the heater bit,
before every measurement. This feature is disabled per
14 This status bit is updated after each measurement
5.8 Serial Number The SHT2x sensor series were tested based on AEC-
SHT20 provides an electronic identification code. For Q100 Rev. G qualification test method where applicable.
instructions on how to read the identification code please Sensor specifications are tested to prevail under the AEC-
refer to the Application Note “Electronic Identification Q100 temperature grade 2 test conditions listed in Table
Code” – to be downloaded from the web page 915.
www.sensirion.com/SHT20. Environment Standard Results16
HTOL 125°C, 408 hours Within
specifications
6 Conversion of Signal Output TC -50°C - 125°C, 1000 cycles Within
Default resolution is set to 12 bit relative humidity and 14 specifications
bit temperature reading. Measured data are transferred in UHST 130°C / 85%RH / ≈2.3bar, 96h Within
two byte packages, i.e. in frames of 8 bit length where the specifications
most significant bit (MSB) is transferred first (left aligned). THB 85°C / 85%RH, 1000h Within
Each byte is followed by an acknowledge bit. The two specifications
status bits, the last bits of LSB, must be set to „0‟ before ESD immunity HBM 4kV, MM 200V, CDM Qualified
calculating physical values. In the example of Figure 15 750V/500V (corner/other pins)
and Figure 16, the transferred 16 bit relative humidity data Latch-up force current of ±100mA with Qualified
is „0110‟0011‟0101‟0000‟ = 25424. Tamb = 125°C
6.1 Relative Humidity Conversion Table 9: Performed qualification test series. HTOL = High
Temperature Operating Lifetime, TC = Temperature Cycles,
With the relative humidity signal output SRH the relative UHST = Unbiased Highly accelerated Stress Test, THB =
humidity RH is obtained by the following formula (result in Temperature Humidity Biased. For details on ESD see Sect. 4.1.
%RH), no matter which resolution is chosen:
Sensor performance under other test conditions cannot be
S guaranteed and is not part of the sensor specifications.
RH 6 125 RH
216 Especially, no guarantee can be given for sensor
In the example given in Figure 15 and Figure 16 the performance in the field or for customer‟s specific
relative humidity results to be 42.5%RH. application.
The physical value RH given above corresponds to the If sensors are qualified for reliability and behavior in
relative humidity above liquid water according to World extreme conditions, please make sure that they
Meteorological Organization (WMO). For relative humidity experience same conditions as the reference sensor. It
above ice RHi the values need to be transformed from should be taken into account that response times in
relative humidity above water RHw at temperature t. The assemblies may be longer, hence enough dwell time for
equation is given in the following, compare also the measurement shall be granted. For detailed
Application Note “Introduction to Humidity”: information please consult Application Note “Testing
Guide”.
βw t βi t
RH i RHw exp exp
λw t λi t 8 Packaging
Units are %RH for relative humidity and °C for 8.1 Packaging Type
temperature. The corresponding coefficients are defined
as follows: βw = 17.62, λw = 243.12°C, βi = 22.46, λi = SHT2x sensors are provided in DFN packaging (in
272.62°C. analogy with QFN packaging). DFN stands for Dual Flat
No leads.
6.2 Temperature Conversion The sensor chip is mounted to a lead frame made of Cu
The temperature T is calculated by inserting temperature and plated with Ni/Pd/Au. Chip and lead frame are over
signal output ST into the following formula (result in °C), no molded by green epoxy-based mold compound. Please
matter which resolution is chosen: note that side walls of sensors are diced and hence lead
ST frame at diced edge is not covered with respective
T 46.85 175.72 protective coating. The total weight of the sensor is 25mg.
216
7 Environmental Stability
15 Temperature range is -40 to 105°C (AEC-Q100 temperature grade 2).
16 According to accuracy and long term drift specification given on Page 2.
1.75
Figure 19 Laser marking on SHT20. For details see text. 0.3 4.0 Ø0.15 MIN
5.5
12.0
3.3
alternative to OTP Reload the soft reset may be used. and for temperature T
Please note that even if SHT1x/7x protocol is applied the
timing values of Table 5 and Table 7 in this SHT2x ST
T 46.85 175.72
datasheet apply. 2 RES
For the calculation of physical values the following RES is the chosen respective resolution, e.g. 12 (12bit) for
equation must be applied: relative humidity and 14 (14bit) for temperature.
For relative humidity RH
SRH
RH 6 125
2 RES
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fax: +41 44 306 40 30 phone: +81 3 3444 4940 phone: +86 755 8252 1501
info@sensirion.com info@sensirion.co.jp info@sensirion.com.cn
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Sensirion AG (Germany)
phone: +41 44 927 11 66
info@sensirion.com
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