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    MIRA Guide - Pv2

    Uploaded by

    stefaneduard
    This document provides instructions for getting started with a TESCAN MIRA3 SEM-EBL microscope. It details steps for logging in, venting the chamber, loading a sample, adjusting microscope settings like magnification and focus, and saving alignments before using lithography software to expose a sample.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd

    MIRA Guide - Pv2

    Uploaded by

    stefaneduard
    7 views2 pages
    This document provides instructions for getting started with a TESCAN MIRA3 SEM-EBL microscope. It details steps for logging in, venting the chamber, loading a sample, adjusting microscope settings like magnification and focus, and saving alignments before using lithography software to expose a sample.

    Original Description:

    SEM guide

    Original Title

    MIRA guide_Pv2

    Copyright

    © © All Rights Reserved

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    PDF, TXT or read online from Scribd

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    This document provides instructions for getting started with a TESCAN MIRA3 SEM-EBL microscope. It details steps for logging in, venting the chamber, loading a sample, adjusting microscope settings like magnification and focus, and saving alignments before using lithography software to expose a sample.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    7 views2 pages

    MIRA Guide - Pv2

    Uploaded by

    stefaneduard
    This document provides instructions for getting started with a TESCAN MIRA3 SEM-EBL microscope. It details steps for logging in, venting the chamber, loading a sample, adjusting microscope settings like magnification and focus, and saving alignments before using lithography software to expose a sample.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 2

    This guide obtains just brief information.

    In case you need detailed instructions, read chapter “Getting Started” in the
    TESCAN MIRA3 manual. It is recommended to read the Safety Instructions and Basic Troubleshooting manual before your
    work.

    TESCAN/RAITH MIRA3 SEM-EBL


    Tescan - Getting Started
    1. Read the Safety instruction and Basic Troubleshooting manual first.
    2. Type your username and password in MIRATC - Log in screen. Wait till the software fully starts.
    3. Type your username and password in ELPHY - Log in screen.
    4. Move the stage in MiraTC software and watch the Chamber View whether the stage is moving.
    5. Vent the microscope by using the VENT button on the Vacuum panel. Wait until the pressure is at the
    atmospheric level.
    6. Click on any red number button on the carousel in the Tescan Stage Contor panel to park the stage in a safe
    position for uploading your sample
    7. Open the chamber door by pulling it. Load your sample. Do not remove the Au/C resolution test sample.
    DON’T TOUCH THE MIRRORS!
    8. Close the chamber door by pushing It slowly with care to avoid hitting the SEM chamber. Press PUMP button
    on the Vacuum panel. Wait until the pressure indicator bar turns from red to green.
    9. Load the actual SEM configuration file via “Options” in the main menu Configurations ► Load from “NEW
    PRESETS” folder placed on the desktop (There usually are two config files for 20kV and 30kV).
    10. Click on the appropriate button on the Raith LIS carousel in the Stage Control panel where you have placed
    your sample to move it under the SEM objective (Or use Left Ctrl + Right mouse click in Elphy to move your
    stage).
    11. Click on the BEAM ON button on the Electron Beam panel to turn on the electron beam.
    12. Magnify and focus appropriately on your specimen in RESOLUTION mode. Use Degauss function to be sure
    you stay in focus. If not, repeat the procedure. Magnify at least to 40kx and repeat the focusing process.
    13. Go to WD 9 mm using WD&Z function in the Stage Control panel. We recommend moving in two or three
    steps when the change in WD is significant. Place the cursor over the Stop button and watch Chamber View
    when the stage is moving. Hit the Stop button immediately when it seems there might be a collision!
    14. Choose HV you will use: click HV: in Info Panel and type desired value of the accelerating voltage (e.g., 30 kV)
    to Pad panel.
    15. Working in RESOLUTION mode with InBeam detector is recommended for most lithographical applications.
    For specific requirements, consider using FIELD (massive structures) or DEPTH modes.
    16. Choose the specific current (related to the lithography process) in the Absorb current panel in the Info Panel.
    17. To measure the current in the Faraday cup, be sure that the whole view field is inside the Faraday cup. (black
    image)
    18. Open the Beam Blanker panel from the SEM menu and check that you set the Electrostatic Blanker control
    to the Enable beam on Acquisition.
    19. Placing the cursor over the SEM Scanning window and clicking the mouse wheel move area for electron beam
    alignment (Au grains, marks, dust particles, scratch…) into the center of the image.

    Version 2.1, Created/Updated: 14.07.2021 by Vojtěch Švarc, Vojtech.Svarc@ceitec.vutbr.cz


    Co-authors:Tomáš Šamořil, Jakub Sadílek
    Approved: 15.07.2021 by Jiří Zita, Jiri.Zita@ceitec.vutbr.cz
    20. Set the desired view field and focus the image. In the case that the image is moving during focusing, it is
    necessary to check the centering of the objective. Go for Adjustment >>> and Manual Column Centering.
    (Hold down the F12 key to change only X movement at the Trackball, and the F11 key to change only Y
    movement).
    21. Correct astigmatism. If the image is moving when stigmatizing, click on SEM in the main menu and choose
    Stigmators A/B centering. Follow the procedure.
    22. You can check your electron beam settings by burning the contamination spot in your resist (works only on
    resist). Magnify to at least 80kx, open the Analysis & Measurement panel from Tools in the main menu, check
    that New Point/Line button is on, and click on the SEM Scanning window and press button. You should
    observe the increase in the intensity on the graph. To stop – press again button. If the spot has not
    round shape, slightly defocus the beam, adjust stigmators and focus the spot again. Repeat the whole
    procedure until the spot is perfect if you need that.
    23. Save the alignment to the preset via SEM menu and Presets.
    24. Continue with an exposition of your project using DrawBeam in MIRA TC or Elphy Plus.
    When finished:
    1. Once finished, set the HV to 5 kV, withdraw samples, and evacuate the chamber. In case you are the last user
    today, put the SEM to standby mode (click on the STANDBY button on the Vacuum panel). Log off and close
    MiraTC - Log in screen on. Exit Elphy software. Start the Mira TC software and leave MiraTC – Log in screen
    on. Switch off all the monitors.

    Version 2.1, Created/Updated: 14.07.2021 by Vojtěch Švarc, Vojtech.Svarc@ceitec.vutbr.cz


    Co-authors:Tomáš Šamořil, Jakub Sadílek
    Approved: 15.07.2021 by Jiří Zita, Jiri.Zita@ceitec.vutbr.cz

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