Structured illumination microscopy with extreme ultraviolet pulses
Authors:
R. Mincigrucci,
E. Paltanin,
J. -S. Pelli-Cresi,
F. Gala,
E. Pontecorvo,
L. Foglia,
D. De Angelis,
D. Fainozzi,
A. Gessini,
D. S. P. Molina,
O. Stranik,
F. Wechsler,
R. Heintzmann,
G. Ruocco,
F. Bencivenga,
C. Masciovecchio
Abstract:
The relentless pursuit of understanding matter at ever-finer scales has pushed optical microscopy to surpass the diffraction limit and produced the super-resolution microscopy which enables visualizing structures shorter than the wavelength of light. In the present work, we harnessed extreme ultraviolet beams to create a sub-μm grating structure, which was revealed by extreme ultraviolet structure…
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The relentless pursuit of understanding matter at ever-finer scales has pushed optical microscopy to surpass the diffraction limit and produced the super-resolution microscopy which enables visualizing structures shorter than the wavelength of light. In the present work, we harnessed extreme ultraviolet beams to create a sub-μm grating structure, which was revealed by extreme ultraviolet structured illumination microscopy. This achievement marks the first step toward extending such a super-resolution technique into the X-ray regime, where achieving atomic-scale resolution becomes a charming possibility.
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Submitted 28 March, 2024;
originally announced March 2024.
