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Non-destructive depth reconstruction of Al-Al$_2$Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
Authors:
Johann Jakob Abel,
Jonathan Apell,
Felix Wiesner,
Julius Reinhard,
Martin Wünsche,
Nadja Felde,
Gabriele Schmidl,
Jonathan Plentz,
Gerhard G. Paulus,
Stephanie Lippmann,
Silvio Fuchs
Abstract:
Non-destructive cross-sectional characterization of materials systems with a resolution in the nanometer range and the ability to allow for time-resolved in-situ studies is of great importance in material science. Here, we present such a measurements method, extreme ultraviolet coherence tomography (XCT). The method is non-destructive during sample preparation as well as during the measurement, wh…
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Non-destructive cross-sectional characterization of materials systems with a resolution in the nanometer range and the ability to allow for time-resolved in-situ studies is of great importance in material science. Here, we present such a measurements method, extreme ultraviolet coherence tomography (XCT). The method is non-destructive during sample preparation as well as during the measurement, which is distinguished by a negligible thermal load as compared to electron microscopy methods. Laser-generated radiation in the extreme ultraviolet (XUV) and soft x-ray range is used for characterization. The measurement principle is interferometric and the signal evaluation is performed via an iterative Fourier analysis. The method is demonstrated on the metallic material system Al-Al$_2$Cu and compared to electron and atomic force microscopy measurements. We also present advanced reconstruction methods for XCT which even allow for the determination of the roughness of outer and inner interfaces.
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Submitted 29 October, 2023;
originally announced November 2023.
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Atomically Thin Metal-Dielectric Heterostructures by Atomic Layer Deposition
Authors:
Pallabi Paul,
Paul Schmitt,
Vilborg Vala Sigurjonsdottir,
Kevin Hanemann,
Nadja Felde,
Sven Schroeder,
Felix Otto,
Marco Gruenewald,
Torsten Fritz,
Vladimir Roddatis,
Andreas Tuennermann,
Adriana Szeghalmi
Abstract:
Heterostructures increasingly attracted attention over the past several years to enable various optoelectronic and photonic applications. In this work, atomically thin interfaces of Ir/Al2O3 heterostructures compatible with micro-optoelectronic technologies are reported. Their structural and optical properties were determined by spectroscopic and microscopic techniques (XRR, XPS, HRTEM, spectrosco…
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Heterostructures increasingly attracted attention over the past several years to enable various optoelectronic and photonic applications. In this work, atomically thin interfaces of Ir/Al2O3 heterostructures compatible with micro-optoelectronic technologies are reported. Their structural and optical properties were determined by spectroscopic and microscopic techniques (XRR, XPS, HRTEM, spectroscopic ellipsometry, and UV/VIS/NIR spectrophotometry). The XRR and HRTEM analyses reveal a layer-by-layer growth mechanism of Ir in atomic scale heterostructures, which is different from the typical island-type growth of metals on dielectrics. Alongside, XPS investigations imply the formation of Ir-O-Al bonding at the interfaces for lower Ir concentrations, in contrast to the nanoparticle core-shell structure formation. Precisely tuning the ratio of the constituents ensures the control of the dispersion profile along with a transition from effective dielectric to metallic heterostructures. The Ir coating thickness was varied ranging from a few Å to films of about 7 nm in the heterostructures. The transition has been observed in the structures containing individual Ir coating thicknesses of about 2-4 nm. Following this, show epsilon-near-zero metamaterials with tunable dielectric constants by precisely varying the composition of such heterostructures. Overall, a comprehensive study on structural and optical properties of the metal-dielectric interface of Ir/Al2O3 heterostructures was addressed indicating an extension of the material portfolio available for optical system design.
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Submitted 16 December, 2022;
originally announced December 2022.
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Linear and Nonlinear Optical Properties of Iridium Nanoparticles by Atomic Layer deposition
Authors:
Paul Schmitt,
Pallabi Paul,
Weiwei Li,
Zilong Wang,
Christin David,
Navid Daryakar,
Kevin Hanemann,
Nadja Felde,
Anne-Sophie Munser,
Matthias F. Kling,
Sven Schroeder,
Andreas Tuennermann,
Adriana Szeghalmi
Abstract:
Nonlinear optical phenomena enable novel photonic and optoelectronic applications. Especially metallic nanoparticles and thin films with nonlinear optical properties offer the potential for micro-optical system integration. For this purpose, new nonlinear materials need to be continuously identified, investigated, and utilized for nonlinear optical applications. While noble metal nanoparticles, na…
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Nonlinear optical phenomena enable novel photonic and optoelectronic applications. Especially metallic nanoparticles and thin films with nonlinear optical properties offer the potential for micro-optical system integration. For this purpose, new nonlinear materials need to be continuously identified, investigated, and utilized for nonlinear optical applications. While noble metal nanoparticles, nanostructures, and thin films of Ag and Au were widely studied, iridium (Ir) nanoparticles and ultra-thin films have not been investigated yet. Here, we present a combined theoretical and experimental study on the linear and nonlinear optical properties of Ir nanoparticles deposited by atomic layer deposition (ALD). Linear optical constants, i.e., the effective refractive index n and extinction coefficient k, were evaluated at different growth stages of nanoparticle formation. Both linear and nonlinear optical properties of these Ir ALD coatings were calculated theoretically using Bruggeman and Maxwell-Garnett theories. The third-order susceptibility of Ir nanoparticle samples was experimentally investigated using the Z-scan technique. Overall, our studies demonstrate the potential of ultrathin Ir NPs as an alternative nonlinear optical material at an atomic scale.
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Submitted 11 October, 2022;
originally announced October 2022.
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Direct Growth of Monolayer MoS$_2$ on Nanostructured Silicon Waveguides
Authors:
Athira Kuppadakkath,
Emad Najafidehaghani,
Ziyang Gan,
Alessandro Tuniz,
Gia Quyet Ngo,
Heiko Knopf,
Franz J. F. Löchner,
Fatemeh Abtahi,
Tobias Bucher,
Sai Shradha,
Thomas Käsebier,
Stefano Palomba,
Nadja Felde,
Pallabi Paul,
Tobias Ullsperger,
Sven Schröder,
Adriana Szeghalmi,
Thomas Pertsch,
Isabelle Staude,
Uwe Zeitner,
Antony George,
Andrey Turchanin,
Falk Eilenberger
Abstract:
We report for the first time the direct growth of Molybdenum disulfide (MoS$_2$) monolayers on nanostructured silicon-on-insulator waveguides. Our results indicate the possibility of utilizing the Chemical Vapour Deposition (CVD) on nanostructured photonic devices in a scalable process. Direct growth of 2D material on nanostructures rectifies many drawbacks of the transfer-based approaches. We sho…
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We report for the first time the direct growth of Molybdenum disulfide (MoS$_2$) monolayers on nanostructured silicon-on-insulator waveguides. Our results indicate the possibility of utilizing the Chemical Vapour Deposition (CVD) on nanostructured photonic devices in a scalable process. Direct growth of 2D material on nanostructures rectifies many drawbacks of the transfer-based approaches. We show that the van der Waals materials grow conformally across the curves, edges, and the silicon-SiO$_2$ interface of the waveguide structure. Here, the waveguide structure used as a growth substrate is complex not just in terms of its geometry but also due to the two materials (Si and SiO$_2$) involved. A transfer-free method like this yields a novel approach for functionalizing nanostructured, integrated optical architectures with an optically active direct semiconductor.
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Submitted 27 May, 2022;
originally announced June 2022.
