Non-destructive depth reconstruction of Al-Al$_2$Cu layer structure with nanometer resolution using extreme ultraviolet coherence tomography
Authors:
Johann Jakob Abel,
Jonathan Apell,
Felix Wiesner,
Julius Reinhard,
Martin Wünsche,
Nadja Felde,
Gabriele Schmidl,
Jonathan Plentz,
Gerhard G. Paulus,
Stephanie Lippmann,
Silvio Fuchs
Abstract:
Non-destructive cross-sectional characterization of materials systems with a resolution in the nanometer range and the ability to allow for time-resolved in-situ studies is of great importance in material science. Here, we present such a measurements method, extreme ultraviolet coherence tomography (XCT). The method is non-destructive during sample preparation as well as during the measurement, wh…
▽ More
Non-destructive cross-sectional characterization of materials systems with a resolution in the nanometer range and the ability to allow for time-resolved in-situ studies is of great importance in material science. Here, we present such a measurements method, extreme ultraviolet coherence tomography (XCT). The method is non-destructive during sample preparation as well as during the measurement, which is distinguished by a negligible thermal load as compared to electron microscopy methods. Laser-generated radiation in the extreme ultraviolet (XUV) and soft x-ray range is used for characterization. The measurement principle is interferometric and the signal evaluation is performed via an iterative Fourier analysis. The method is demonstrated on the metallic material system Al-Al$_2$Cu and compared to electron and atomic force microscopy measurements. We also present advanced reconstruction methods for XCT which even allow for the determination of the roughness of outer and inner interfaces.
△ Less
Submitted 29 October, 2023;
originally announced November 2023.
Laboratory-Based Correlative Soft X-ray and Fluorescence Microscopy in an Integrated Setup
Authors:
Julius Reinhard,
Sophia Kaleta,
Johann Jakob Abel,
Felix Wiesner,
Martin Wünsche,
Eric Seemann,
Martin Westermann,
Thomas Weber,
Jan Nathanael,
Alexander Iliou,
Henryk Fiedorowicz,
Falk Hillmann,
Christian Eggeling,
Gerhard G. Paulus,
Silvio Fuchs
Abstract:
Correlative microscopy is a powerful technique that combines the advantages of multiple imaging modalities to achieve a comprehensive understanding of investigated samples. For example, fluorescence microscopy provides unique functional contrast by imaging only specifically labeled components, especially in biological samples. However, the achievable structural information on the sample in its ful…
▽ More
Correlative microscopy is a powerful technique that combines the advantages of multiple imaging modalities to achieve a comprehensive understanding of investigated samples. For example, fluorescence microscopy provides unique functional contrast by imaging only specifically labeled components, especially in biological samples. However, the achievable structural information on the sample in its full complexity is limited. Here, the intrinsic label-free carbon contrast of water window soft X-ray microscopy can complement fluorescence images in a correlative approach ultimately combining nanoscale structural resolution with functional contrast. However, soft X-ray microscopes are complex and elaborate, and typically require a large-scale synchrotron radiation source due to the demanding photon flux requirements. Yet, with modern high-power lasers it has become possible to generate sufficient photon flux from laser-produced plasmas, thus enabling laboratory-based setups. Here, we present a compact table-top soft X-ray microscope with an integrated epifluorescence modality for 'in-situ' correlative imaging. Samples remain in place when switching between modalities, ensuring identical measurement conditions and avoiding sample alteration or destruction. We demonstrate our new method by multimodal images of several exemplary samples ranging from nanoparticles to various multicolor labeled cell types. A structural resolution of down to 50 nm was reached.
△ Less
Submitted 2 October, 2023; v1 submitted 19 April, 2023;
originally announced April 2023.
