In this paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave ... more In this paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave imaging, to characterize the formation of titanium disilicide on narrow lines. The observation of thermal-wave signals and images allows us to distinguish the formation and structure of the metastable, high-resistivity, C49 phase and the equilibrium, low-resistivity C54 phase of the disilicide. Patterned wafers, having linewidths in
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, 1996
ABSTRACT In this paper we demonstrate the feasibility of an in-line, non-destructive method, ther... more ABSTRACT In this paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave imaging, to characterize the formation of titanium disilicide on narrow lines. The observation of thermal-wave signals and images allows us to distinguish the formation and structure of the metastable, high-resistivity, C49 phase and the equilibrium, low-resistivity C54 phase of the disilicide. Patterned wafers, having linewidths in the range of 1.5 to 0.4 micrometer were used to study the effect of rapid thermal anneal conditions and linewidth on disilicide formation. The transformation temperature of C49 to paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave imaging, to characterize C54 disilicide during a 20 second isothermal anneal was found to increase by more than 50 degrees Celsius when decreasing the linewidth to 0.4 micrometer.
The ternary bonds Ho12Mo6S8 (1), ErRh4Sn3,6 (2), and ErRh4B4 (3), were prepared and investigated,... more The ternary bonds Ho12Mo6S8 (1), ErRh4Sn3,6 (2), and ErRh4B4 (3), were prepared and investigated, using a 3He-4He mix-cooling machine to create a 100 mK temperature area in which superconductivity and ferromagnetic order can coexist. Direct Current Magnetization (DCMM's) and Resistance Measurements (RM's), were carried out using a SQUID. Crystals of (2) were prepared from Er:Rh melt ratios of 1:1 (a), and 1:2 (b). The DCMM's show ferromagnetic order at temperatures Tc2 of 0,75 K, and 0.52 K. The RM's show superconductivity for only a small part of the (a)-crystals at a temperature Tc1=0.5 K, but a complete superconductivity for the (b)-crystals at Tc1=1.07 K. Temperatures for which the crystals become normal again are 0.66 K (a), and 0.38 K (RM) and 0.52 K (DCMM) for (b). A method to reduce magnetization changes to absolute values for susceptibility was determined. For preparation (3) a Tc1=8.7 K is found.
In this paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave ... more In this paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave imaging, to characterize the formation of titanium disilicide on narrow lines. The observation of thermal-wave signals and images allows us to distinguish the formation and structure of the metastable, high-resistivity, C49 phase and the equilibrium, low-resistivity C54 phase of the disilicide. Patterned wafers, having linewidths in
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, 1996
ABSTRACT In this paper we demonstrate the feasibility of an in-line, non-destructive method, ther... more ABSTRACT In this paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave imaging, to characterize the formation of titanium disilicide on narrow lines. The observation of thermal-wave signals and images allows us to distinguish the formation and structure of the metastable, high-resistivity, C49 phase and the equilibrium, low-resistivity C54 phase of the disilicide. Patterned wafers, having linewidths in the range of 1.5 to 0.4 micrometer were used to study the effect of rapid thermal anneal conditions and linewidth on disilicide formation. The transformation temperature of C49 to paper we demonstrate the feasibility of an in-line, non-destructive method, thermal wave imaging, to characterize C54 disilicide during a 20 second isothermal anneal was found to increase by more than 50 degrees Celsius when decreasing the linewidth to 0.4 micrometer.
The ternary bonds Ho12Mo6S8 (1), ErRh4Sn3,6 (2), and ErRh4B4 (3), were prepared and investigated,... more The ternary bonds Ho12Mo6S8 (1), ErRh4Sn3,6 (2), and ErRh4B4 (3), were prepared and investigated, using a 3He-4He mix-cooling machine to create a 100 mK temperature area in which superconductivity and ferromagnetic order can coexist. Direct Current Magnetization (DCMM's) and Resistance Measurements (RM's), were carried out using a SQUID. Crystals of (2) were prepared from Er:Rh melt ratios of 1:1 (a), and 1:2 (b). The DCMM's show ferromagnetic order at temperatures Tc2 of 0,75 K, and 0.52 K. The RM's show superconductivity for only a small part of the (a)-crystals at a temperature Tc1=0.5 K, but a complete superconductivity for the (b)-crystals at Tc1=1.07 K. Temperatures for which the crystals become normal again are 0.66 K (a), and 0.38 K (RM) and 0.52 K (DCMM) for (b). A method to reduce magnetization changes to absolute values for susceptibility was determined. For preparation (3) a Tc1=8.7 K is found.
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