"Nanoindentation-induced phase transformation in crystalline silicon and ..."

R. Rao et al. (2007)

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DOI: 10.1016/J.MEJO.2007.04.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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R. Rao, J. E. Bradby, S. Ruffell, J. S. Williams:
Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon. Microelectron. J. 38(6-7): 722-726 (2007)

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