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"Micro-Raman spectroscopy measurement of stress in silicon."

Xiaoming Wu et al. (2007)

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DOI: 10.1016/J.MEJO.2006.09.007

access: closed

type: Journal Article

metadata version: 2022-01-10

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Xiaoming Wu, Jianyuan Yu, Tianling Ren, Litian Liu:
Micro-Raman spectroscopy measurement of stress in silicon. Microelectron. J. 38(1): 87-90 (2007)

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