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October 2024
A Defect Detection Method of Mixed Wafer Map Using Neighborhood Path Filtering Clustering Algorithm
Journal of Electronic Testing: Theory and Applications (JELT), Volume 40, Issue 4Pages 419–433https://doi.org/10.1007/s10836-024-06132-8
Abstract
As the wafer process becomes more complex, the probability of mixed-type defective wafer maps is constantly increasing. Therefore, it is necessary to perform effective filtering and denoising processing on the mixed-type defective wafer map to ...
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