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Mechanical characterization of aluminium nanofilms

Published: 01 May 2011 Publication History

Abstract

The mechanical properties (Young's modulus, hardness, wear resistance) of aluminium nanofilms on silicon substrate are studied. Size effect on these mechanical properties are exhibited. Young's modulus, hardness and wear resistance increases when the thickness is reduced. Experimental investigations have been led by atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and nanoindentation. Compared to the bulk values, hardness and wear resistance of one aluminium nanofilm (thickness=100nm) have increased by a factor ~7 whereas the Young's modulus only increased by a term ~15%. By comparing mechanical properties between high and low melting point materials, we conclude that high melting point materials have a decreasing behaviour of the Young's modulus with size whereas low melting point materials have an increasing one.

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  1. Mechanical characterization of aluminium nanofilms

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    Published In

    cover image Microelectronic Engineering
    Microelectronic Engineering  Volume 88, Issue 5
    May, 2011
    318 pages

    Publisher

    Elsevier Science Ltd.

    United Kingdom

    Publication History

    Published: 01 May 2011

    Author Tags

    1. Aluminium
    2. Hall-Petch
    3. Mechanics
    4. Nanofilm
    5. Nanoindentation

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