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Surface modification tools in a virtual environment interface to a scanning probe microscope

Authors:

Mark Finch,

Vernon L. Chi,

Russell M. Taylor, II,

Mike Falvo,

Sean Washburn,

Richard SuperfineAuthors Info & Claims

I3D '95: Proceedings of the 1995 symposium on Interactive 3D graphics

Pages 13 - ff.

https://doi.org/10.1145/199404.199406

Published: 15 April 1995 Publication History

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Abstract

The NanoManipulator system has been expanded from a virtual-reality interface for a specific scanning tunneling microscope to include control of atomic force microscopes. The current state of the system is reviewed, and new tools extending the user's feel and control in manipulation and fabrication in the mesoscopic regime are detailed. Manipulations that could not be performed using the techniques available from commercial SPM systems are demonstrated, and the direction of ongoing research is outlined.

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Sánchez-Sánchez PDaniel Castro-Díaz JGutiérrez-Giles APliego-Jiménez J(2022)A Proposal of Haptic Technology to be Used in Medical SimulationHaptic Technology - Intelligent Approach to Future Man-Machine Interaction10.5772/intechopen.102508Online publication date: 17-Aug-2022
https://doi.org/10.5772/intechopen.102508
Ferguson R(2013)The Human Senses and VRA Hitchhiker's Guide to Virtual Reality10.1201/b10677-4(13-27)Online publication date: 12-Jun-2013
https://doi.org/10.1201/b10677-4
(2011)BibliographyHaptic Rendering10.1201/b10636-31(549-602)Online publication date: Mar-2011
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Surface modification tools in a virtual environment interface to a scanning probe microscope

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Characterization of post-copper CMP surface with scanning probe microscopy: Part II: Surface potential measurements with scanning Kelvin probe force microscopy

We demonstrate in this paper for the first time the use of Scanning Kelvin Probe Force Microscopy (KFM) to characterize post-CMP copper structures with varying line width and spacing. This work is in the continuity of previously published results ...

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I3D '95: Proceedings of the 1995 symposium on Interactive 3D graphics

April 1995

218 pages

ISBN:0897917367

DOI:10.1145/199404

Chairman:
Michael Zyda
Naval Postgraduate School, Monterey, CA

Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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Association for Computing Machinery

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Published: 15 April 1995

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SI3D95: 1995 Symposium on Interactive 3D Graphics

April 9 - 12, 1995

California, Monterey, USA

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Overall Acceptance Rate 148 of 485 submissions, 31%

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Sánchez-Sánchez PDaniel Castro-Díaz JGutiérrez-Giles APliego-Jiménez J(2022)A Proposal of Haptic Technology to be Used in Medical SimulationHaptic Technology - Intelligent Approach to Future Man-Machine Interaction10.5772/intechopen.102508Online publication date: 17-Aug-2022
https://doi.org/10.5772/intechopen.102508
Ferguson R(2013)The Human Senses and VRA Hitchhiker's Guide to Virtual Reality10.1201/b10677-4(13-27)Online publication date: 12-Jun-2013
https://doi.org/10.1201/b10677-4
(2011)BibliographyHaptic Rendering10.1201/b10636-31(549-602)Online publication date: Mar-2011
https://doi.org/10.1201/b10636-31
Requicha A(2010)Nanomanipulation with the Atomic Force MicroscopeNanotechnology10.1002/9783527628155.nanotech027(239-273)Online publication date: 15-Jul-2010
https://doi.org/10.1002/9783527628155.nanotech027
Ferreira AMavroidis C(2006)Virtual reality and haptics for nanoroboticsIEEE Robotics & Automation Magazine10.1109/MRA.2006.167814213:3(78-92)Online publication date: Sep-2006
https://doi.org/10.1109/MRA.2006.1678142
Taylor R(2005)Haptics for scientific visualizationACM SIGGRAPH 2005 Courses10.1145/1198555.1198617(174-es)Online publication date: 31-Jul-2005
https://dl.acm.org/doi/10.1145/1198555.1198617
Gregory ALin MGottschalk STaylor R(2005)A framework for fast and accurate collision detection for haptic interactionACM SIGGRAPH 2005 Courses10.1145/1198555.1198604(34-es)Online publication date: 31-Jul-2005
https://dl.acm.org/doi/10.1145/1198555.1198604
Sonnenwald DMaglaughlin KWhitton M(2004)Designing to support situation awareness across distancesInformation Processing and Management: an International Journal10.1016/j.ipm.2003.10.00240:6(989-1011)Online publication date: 1-Nov-2004
https://dl.acm.org/doi/10.1016/j.ipm.2003.10.002
Sonnenwald DSchmidt KPendergast MTremaine MSimone C(2003)Expectations for a scientific collaboratoryProceedings of the 2003 ACM International Conference on Supporting Group Work10.1145/958160.958171(68-74)Online publication date: 9-Nov-2003
https://dl.acm.org/doi/10.1145/958160.958171
Ehmann SGregory ALin M(2001)A touch‐enabled system for multi‐resolution modeling and 3D painting‡The Journal of Visualization and Computer Animation10.1002/vis.25212:3(145-157)Online publication date: 28-Sep-2001
https://doi.org/10.1002/vis.252
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The nanomanipulator: a virtual-reality interface for a scanning tunneling microscope

Pearls found on the way to the ideal interface for scanned-probe microscopes

Characterization of post-copper CMP surface with scanning probe microscopy: Part II: Surface potential measurements with scanning Kelvin probe force microscopy

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The nanomanipulator: a virtual-reality interface for a scanning tunneling microscope

Pearls found on the way to the ideal interface for scanned-probe microscopes

Characterization of post-copper CMP surface with scanning probe microscopy: Part II: Surface potential measurements with scanning Kelvin probe force microscopy

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