Technical Digest IEEE Solid-State Sensor and Actuator Workshop, 1990
The design and performance of a large-force, large-amplitude electrostatic actuator that exhibits... more The design and performance of a large-force, large-amplitude electrostatic actuator that exhibits the best features of previous electrostatic actuator designs are described. A tangential drive (T-drive) polysilicon, linear actuator is presented. It produces large-magnitude tangential motion by flexing a microstructure in an essentially straight line with moderate input voltage. These devices are designed, fabricated, and successfully tested to have substantial
Technical Digest IEEE Solid-State Sensor and Actuator Workshop, 1990
The design and performance of a large-force, large-amplitude electrostatic actuator that exhibits... more The design and performance of a large-force, large-amplitude electrostatic actuator that exhibits the best features of previous electrostatic actuator designs are described. A tangential drive (T-drive) polysilicon, linear actuator is presented. It produces large-magnitude tangential motion by flexing a microstructure in an essentially straight line with moderate input voltage. These devices are designed, fabricated, and successfully tested to have substantial
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Papers by Alan Chou