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AlN contour-mode vibrating RF MEMS resonator technology is described as capable of low-loss filtering and frequency synthesis for next generation wireless devices. Contour-mode piezoelectric resonators can span frequencies from 10 MHz up... more
AlN contour-mode vibrating RF MEMS resonator technology is described as capable of low-loss filtering and frequency synthesis for next generation wireless devices. Contour-mode piezoelectric resonators can span frequencies from 10 MHz up to few GHz on the same silicon chip offering high quality factors in air (1,000-4,000) and low motional resistance (25-700 Omega). Low loss (<- 1.5 dB) electrically and mechanically coupled filters and low phase noise oscillators can be easily implemented using this resonator technology. Low power transceiver architectures based on frequency hopping, multi-band filtering and direct frequency synthesis are presented as next generation wireless solutions that will be enabled by this new class of AIN contour-mode resonators
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This paper reports experimental results on a new class of ring-shaped, contour-mode aluminum nitride piezoelectric resonators that span a frequency range from 223 MHz to 656 MHz showing high quality factors in air (Qmax=2,900 at 472.7... more
This paper reports experimental results on a new class of ring-shaped, contour-mode aluminum nitride piezoelectric resonators that span a frequency range from 223 MHz to 656 MHz showing high quality factors in air (Qmax=2,900 at 472.7 MHz), low motional resistance (ranging from 56 to 205 Ω), and center frequencies that can be lithographically tuned. These resonators achieve the lowest value
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... PJ Stephanou, G. Piazza, CD White, MBJ Wijesundara and AP Pisano Berkeley Sensors and Actuators Center, The University of California at Berkeley, USA ... electrical parallel resonators 3 branches of electrical parallel resonators 1... more
... PJ Stephanou, G. Piazza, CD White, MBJ Wijesundara and AP Pisano Berkeley Sensors and Actuators Center, The University of California at Berkeley, USA ... electrical parallel resonators 3 branches of electrical parallel resonators 1 branch of resonators T ra n sm issio n S 21 [d ...
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In this study we present an analytical model to characterize the thermo elastic damping (TED) for beams in piezoelectric and pyroelectric materials for Q optimization. The model is based on the Euler Bernoulli equation and considers the... more
In this study we present an analytical model to characterize the thermo elastic damping (TED) for beams in piezoelectric and pyroelectric materials for Q optimization. The model is based on the Euler Bernoulli equation and considers the constitutive equations for piezoelectric and pyroelectric materials. The analytical solution shows that due to the piezoelectric stiffening and the pyroelectric effect the Q-factor
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We have extended the K-model, a Green&#39;s function model previously developed for the precise simulation of surface acoustic wave (SAW) device at radio frequencies (RF), to the computation of Lamb wave resonators (LWR). The... more
We have extended the K-model, a Green&#39;s function model previously developed for the precise simulation of surface acoustic wave (SAW) device at radio frequencies (RF), to the computation of Lamb wave resonators (LWR). The effective permittivity for Lamb wave excitation on thin aluminum nitride plates with different electrode configurations is compared. The results of the electromechanical coupling coefficient k2 computed
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Research Interests: Lamb wave and Filter Bank
This work presents a project overview and recent research results for the MEMS Rotary Engine Power System project at the Berkeley Sensor &amp;amp;amp;amp;amp;amp; Actuator Center of the University of California at Berkeley. The... more
This work presents a project overview and recent research results for the MEMS Rotary Engine Power System project at the Berkeley Sensor &amp;amp;amp;amp;amp;amp; Actuator Center of the University of California at Berkeley. The research motivation for the project is the high specific energy density of ...
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Page 1. 1 Copyright © 2005 by ASME Proceedings of Insert IMECE 2005: 2005 ASME International Mechanical Engineering Congress &amp; Exposition November 5-11, 2005 Orlando, Florida IMECE2005-81679 PIEZOELECTRIC ...
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This paper reports experimental results on a new class of single-chip multiple-frequency (up to 236 MHz) filters that are based on low motional resistance contour-mode aluminum nitride piezoelectric micromechanical resonators. For the... more
This paper reports experimental results on a new class of single-chip multiple-frequency (up to 236 MHz) filters that are based on low motional resistance contour-mode aluminum nitride piezoelectric micromechanical resonators. For the first time, aluminum nitride rectangular plates and rings have been electrically cascaded to yield high performance, low insertion loss (as low as 4dB at 93 MHz) micromechanical band
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The following work presents the analytical, numerical and experimental characterization of a novel piezoelectric aluminum nitride MEMS bandpass filter. In contrast to multi-pole filters employing distinct mechanically or electrically... more
The following work presents the analytical, numerical and experimental characterization of a novel piezoelectric aluminum nitride MEMS bandpass filter. In contrast to multi-pole filters employing distinct mechanically or electrically coupled resonator building blocks, the passband of the device in the present work is defined by the proximity of two natural contour modes of vibration in a single annular resonator. The
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Two novel mechanical coupling methods for synthesizing highly-integrated contour mode piezoelectric aluminum nitride (AlN) filters are introduced. While the underlying resonator technology remains the most viable candidate for realizing... more
Two novel mechanical coupling methods for synthesizing highly-integrated contour mode piezoelectric aluminum nitride (AlN) filters are introduced. While the underlying resonator technology remains the most viable candidate for realizing arrays of post-CMOS compatible filters at arbitrary frequencies with on-chip matching to 50 Ω, previously demonstrated mechanical coupling topologies do not scale well beyond 100 MHz. The current work focuses on
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... RGAzevedo, DGJones, AVJog, B.Jamshidi, DRMyers, L.Chen, X.-a.Fu, M.Mehregany, MBJWijesundara, and APPisano, A SIC MEMS resonant strain sensor for harsh environment applications, IEEE Sens. J. 7(4), 568576 (2007). J.-H.Jeong,... more
... RGAzevedo, DGJones, AVJog, B.Jamshidi, DRMyers, L.Chen, X.-a.Fu, M.Mehregany, MBJWijesundara, and APPisano, A SIC MEMS resonant strain sensor for harsh environment applications, IEEE Sens. J. 7(4), 568576 (2007). J.-H.Jeong, S.-H.Chung, S.-H.Lee, and D ...
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... Muthu BJ Wijesundara, Gianluca Valente, William R. Ashurst, Roger T. Howe, Albert P. Pisano, Carlo Carraro, Roya Maboudian. ... hot-wall zone of 450 mm in length with temperature uniformity of ±1°C. The reactor base pressure is less... more
... Muthu BJ Wijesundara, Gianluca Valente, William R. Ashurst, Roger T. Howe, Albert P. Pisano, Carlo Carraro, Roya Maboudian. ... hot-wall zone of 450 mm in length with temperature uniformity of ±1°C. The reactor base pressure is less than Torr using 80 L/s turbomolecular pump ...
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... Using a new class of MEMS resonator technology based on the excita-tion of contour modes of vibration in AlN microstructures [17], bandpass filters at 93 and 236 MHz have been demonstrated by electrically cascading up to eight... more
... Using a new class of MEMS resonator technology based on the excita-tion of contour modes of vibration in AlN microstructures [17], bandpass filters at 93 and 236 MHz have been demonstrated by electrically cascading up to eight resonators in a ladder topology. ...