A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and develo... more A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1 mm square microlens-array it deflects 40 um in-plane at 60 V and 95 um out-of-plane at 100 V.
A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and develo... more A novel MEMS stage using one set of comb fingers, capable of 2-axis motion is designed and developed. With an integrated 1.1 mm square microlens-array it deflects 40 um in-plane at 60 V and 95 um out-of-plane at 100 V.
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Papers by Cyrille Hibert