Massachusetts Institute of Technology (MIT)
Chemical Engineering Department
Significance Vaccine kinetics, the timing of antigen and/or adjuvant delivery to lymphoid organs, have recently been shown to substantially influence immune responses to subunit vaccines, but strategies to control vaccine kinetics in a... more
Hydrogenated and fluorinated silicon nitride films are obtained in a novel resonant plasma-chemical reactor, operated at 18MHz and modulated in the audiofrequency field. This modulation influences both deposition rate and film properties.