2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2007
This paper reports a novel technological approach for three-dimensional (3D) assembly of gold nan... more This paper reports a novel technological approach for three-dimensional (3D) assembly of gold nanoparticles with an average diameter of 52 nm using dielectrophoresis (DEP). To realize the 3D assembly, the authors have designed and fabricated a versatile self-aligned micromachined platform which is applicable for assembling metallic nanoparticles and nanostructures. The assembly process is achieved at room temperature and is compatible
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), 2007
Abstract In this paper, we report a novel technological approach for three dimensional (3D) assem... more Abstract In this paper, we report a novel technological approach for three dimensional (3D) assembly of single-walled carbon nanotubes (SWNTs) using dielectrophoresis (DEP). The two terminal resistance of the assembled SWNTs is~ 545 Ohms. Encapsulation of the 3D ...
We present the design, fabrication and testing of a novel three dimensional (3D) Field Effect Tra... more We present the design, fabrication and testing of a novel three dimensional (3D) Field Effect Transistor based on Single-Walled Carbon Nanotubes (SWNTs). Three Dimensional SWNT transistors are realized utilizing low temperature Dielectrophoretic (DEP) assembly. A 1mum thick conformal Parylene-C (poly-para-xylylene) layer is utilized as the gate dielectric with a non-local top gate electrode around the conducting channel. The preliminary results
Abstract: In this paper, we present a flexible parylene-C shadow mask technology for creating mic... more Abstract: In this paper, we present a flexible parylene-C shadow mask technology for creating microscale patterns on flat and curved surfaces. The smallest feature size of 4 µm is demonstrated and the technology is scalable up to full wafer size. With the addition of SU-8 pillars, we also demonstrate multi mask processing with an alignment accuracy of about 5-6 µm. To achieve the smallest features, a low temperature and high aspect ratio (>8:1) parylene etch process is also developed. Utilizing this shadow mask, we successfully patterned proteins and cells on various surfaces (glass, PDMS, methacrylate) up to 9 times. This technology has potential applications for patterning proteins, cells and organic transistors on conventional and/or unconventional substrates.
In this paper, we present a directed assembly technique for controlled micro-patterning of Single... more In this paper, we present a directed assembly technique for controlled micro-patterning of Single-Walled Carbon Nanotubes (SWNTs) on a flexible parylene-C substrate for electronic applications. The presented large scale fabrication of ordered carbon nanotube arrays and networks is achieved by performing site-selective fluidic assembly of SWNTs on a plasma treated parylene-C substrate. Parylene-C, which is lightweight, mechanically strong and stress-free material deposited at room temperature, is an emerging substrate material for flexible devices. The uniformly deposited nanotube lateral structures are formed directly on the parylene-C substrate without utilizing printing or transfer techniques. Both electrical and structural characterizations are performed on the SWNT-based devices on the flexible substrate. The developed nanotube patterning on polymeric substrates has immediate applications in wearable electronics and sensors, flexible field effect transistors (FETs) and lateral i...
In this paper, we present a directed assembly technique for controlled micro-patterning of Single... more In this paper, we present a directed assembly technique for controlled micro-patterning of Single-Walled Carbon Nanotubes (SWNTs) on a flexible parylene-C substrate for electronic applications. The presented large scale fabrication of ordered carbon nanotube arrays and networks is achieved by performing site-selective fluidic assembly of SWNTs on a plasma treated parylene-C substrate. Parylene-C, which is lightweight, mechanically strong and stress-free material deposited at room temperature, is an emerging substrate material for flexible devices. The uniformly deposited nanotube lateral structures are formed directly on the parylene-C substrate without utilizing printing or transfer techniques. Both electrical and structural characterizations are performed on the SWNTbased devices on the flexible substrate. The developed nanotube patterning on polymeric substrates has immediate applications in wearable electronics and sensors, flexible field effect transistors (FETs) and lateral in...
The use of sonic energy in the 0.8 to 1.0 MHz range, commonly known as megasonic cleaning, has be... more The use of sonic energy in the 0.8 to 1.0 MHz range, commonly known as megasonic cleaning, has been shown to beeffective in the removal of particles from silicon wafers in aqueous baths. Megasonic cleaning at a nominal frequency of862 kHz is investigated ...
Numerical simulations of particle deposition from a point source in turbulent flow. Salem Abuzeid... more Numerical simulations of particle deposition from a point source in turbulent flow. Salem Abuzeid,Ahmed A Busnaina, Goodarz Ahmadi the 36 th Annual Technical Meeting of the Institute of Environmental Sciences, New Orleans, LA, USA, 04/23-27/90, 295-302, 1990. ...
A numerical simulation of the flow field of the jet induced by an axial-flow propeller pump is pe... more A numerical simulation of the flow field of the jet induced by an axial-flow propeller pump is performed by solving the governing equations of the flow field. The two-dimensional Los Alamos SOLA prediction technique has been expanded to include diffusion as well as ...
2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2007
This paper reports a novel technological approach for three-dimensional (3D) assembly of gold nan... more This paper reports a novel technological approach for three-dimensional (3D) assembly of gold nanoparticles with an average diameter of 52 nm using dielectrophoresis (DEP). To realize the 3D assembly, the authors have designed and fabricated a versatile self-aligned micromachined platform which is applicable for assembling metallic nanoparticles and nanostructures. The assembly process is achieved at room temperature and is compatible
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), 2007
Abstract In this paper, we report a novel technological approach for three dimensional (3D) assem... more Abstract In this paper, we report a novel technological approach for three dimensional (3D) assembly of single-walled carbon nanotubes (SWNTs) using dielectrophoresis (DEP). The two terminal resistance of the assembled SWNTs is~ 545 Ohms. Encapsulation of the 3D ...
We present the design, fabrication and testing of a novel three dimensional (3D) Field Effect Tra... more We present the design, fabrication and testing of a novel three dimensional (3D) Field Effect Transistor based on Single-Walled Carbon Nanotubes (SWNTs). Three Dimensional SWNT transistors are realized utilizing low temperature Dielectrophoretic (DEP) assembly. A 1mum thick conformal Parylene-C (poly-para-xylylene) layer is utilized as the gate dielectric with a non-local top gate electrode around the conducting channel. The preliminary results
Abstract: In this paper, we present a flexible parylene-C shadow mask technology for creating mic... more Abstract: In this paper, we present a flexible parylene-C shadow mask technology for creating microscale patterns on flat and curved surfaces. The smallest feature size of 4 µm is demonstrated and the technology is scalable up to full wafer size. With the addition of SU-8 pillars, we also demonstrate multi mask processing with an alignment accuracy of about 5-6 µm. To achieve the smallest features, a low temperature and high aspect ratio (>8:1) parylene etch process is also developed. Utilizing this shadow mask, we successfully patterned proteins and cells on various surfaces (glass, PDMS, methacrylate) up to 9 times. This technology has potential applications for patterning proteins, cells and organic transistors on conventional and/or unconventional substrates.
In this paper, we present a directed assembly technique for controlled micro-patterning of Single... more In this paper, we present a directed assembly technique for controlled micro-patterning of Single-Walled Carbon Nanotubes (SWNTs) on a flexible parylene-C substrate for electronic applications. The presented large scale fabrication of ordered carbon nanotube arrays and networks is achieved by performing site-selective fluidic assembly of SWNTs on a plasma treated parylene-C substrate. Parylene-C, which is lightweight, mechanically strong and stress-free material deposited at room temperature, is an emerging substrate material for flexible devices. The uniformly deposited nanotube lateral structures are formed directly on the parylene-C substrate without utilizing printing or transfer techniques. Both electrical and structural characterizations are performed on the SWNT-based devices on the flexible substrate. The developed nanotube patterning on polymeric substrates has immediate applications in wearable electronics and sensors, flexible field effect transistors (FETs) and lateral i...
In this paper, we present a directed assembly technique for controlled micro-patterning of Single... more In this paper, we present a directed assembly technique for controlled micro-patterning of Single-Walled Carbon Nanotubes (SWNTs) on a flexible parylene-C substrate for electronic applications. The presented large scale fabrication of ordered carbon nanotube arrays and networks is achieved by performing site-selective fluidic assembly of SWNTs on a plasma treated parylene-C substrate. Parylene-C, which is lightweight, mechanically strong and stress-free material deposited at room temperature, is an emerging substrate material for flexible devices. The uniformly deposited nanotube lateral structures are formed directly on the parylene-C substrate without utilizing printing or transfer techniques. Both electrical and structural characterizations are performed on the SWNTbased devices on the flexible substrate. The developed nanotube patterning on polymeric substrates has immediate applications in wearable electronics and sensors, flexible field effect transistors (FETs) and lateral in...
The use of sonic energy in the 0.8 to 1.0 MHz range, commonly known as megasonic cleaning, has be... more The use of sonic energy in the 0.8 to 1.0 MHz range, commonly known as megasonic cleaning, has been shown to beeffective in the removal of particles from silicon wafers in aqueous baths. Megasonic cleaning at a nominal frequency of862 kHz is investigated ...
Numerical simulations of particle deposition from a point source in turbulent flow. Salem Abuzeid... more Numerical simulations of particle deposition from a point source in turbulent flow. Salem Abuzeid,Ahmed A Busnaina, Goodarz Ahmadi the 36 th Annual Technical Meeting of the Institute of Environmental Sciences, New Orleans, LA, USA, 04/23-27/90, 295-302, 1990. ...
A numerical simulation of the flow field of the jet induced by an axial-flow propeller pump is pe... more A numerical simulation of the flow field of the jet induced by an axial-flow propeller pump is performed by solving the governing equations of the flow field. The two-dimensional Los Alamos SOLA prediction technique has been expanded to include diffusion as well as ...
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