CMOS-MEMS
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Recent papers in CMOS-MEMS
Dissertation covering the design, fabrication and testing of arrays of large angle micromirror devices and their suitability for scaling from the millimeter range to the micrometer range.
Silicon-on-Insulator (SOI) technology, with unique properties such as harsh environment resistance and lower power consumption [1], is presented here as a platform for CMOS and MEMS co-integration. An original CMOS-compatible process has... more
ABSTRACT Low-power and high-temperature sensors and MEMS designs based on bulk, SOI and IC compatible materials and processes are presented here. Target markets are in general public sensors for UV, ozone, CO, liquids presence, eg in... more