MEMS Technology
102 Followers
Recent papers in MEMS Technology
MEMS on Moon! : MEMS Based Lunar Seismometer to primarily detect Moon quakes . Designed and fabricated at LEOS, Indian Space Research Organisation (ISRO) for Chandrayan 2 lunar Mission. The micro-seismometer is configured to pick low... more
This paper presents the design and optimisation of a very high quality (Q) factor inductor using MEMS technology for 10 GHz to 20 GHz frequency band. The effects of various parameters of a symmetric inductor structure on the Q-factor and... more
Great advancements in the broad field of the seismic monitoring have been achieved in the last decades mainly because of the technical advancement of the instrumentation. Also the seismic monitoring applications greatly developed, mainly... more
MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications: among others, the use of MEMS accelerometers for seismology related applications has been emerging considerably in the last decade. In this paper, we... more
In a technological spin-off, initial and further business development is a two-stage challenge of survival and growth. Spin-offs’ business development relies on the design and renewal of an adequate business model, effective open... more
Abstract: SAW devices have become increasingly important in implementing sensors, chemical and biological warfare agent detectors, resonators and wireless applications as a filter. These types of device can be implemented with... more
This paper investigates the design and modelling of an integrated device for acoustic resonance spectroscopy (ARS). Miniaturisation of such platforms can be achieved using MEMS technology thereby enabling scaling of device dimensions to... more
The patent summarizes results of investigation of high-sensitivity MEMS pressure sensor based on a circuit containing both active and passive stress-sensitive elements: a differential amplifier utilizing two n-p-n piezotransistors and for... more
In the fast growth context of micro-electromechanical systems (MEMS) applications, an important improvement of power supplies... more
Research of a highly sensitive MEMS pressure based on the operation of differential amplifier electrical circuit with pressure sensitive active (BJT n-p-n transistor) and passive (p-type resistor) elements are carried out. A comparative... more
We propose the active control of effective stiffness, damping, and mass of MEMS by applying feedback forces that are proportional to displacement, velocity, and acceleration of its proof mass. Such control in performance is important due... more
For small pressure transducer into an electrical signal. Summary of the utility model is that the integral element is formed on a chip having an epitaxial layer made of silicon n-type conductivity, and a substrate made of silicon p +... more
Polymers, such as polymethyl methacrylate PMMA, are important structural materials for microsystems because of their excellent mechanical properties; however, they suffer from severe problems of adhesion, friction, and wear B.... more
Pressure Sensors are one among the widely used micro sensors. The application of MEMS to the measurement of pressure is a mature application of micro machined silicon mechanical sensors. To it advancements, the self powered sensor is more... more
The article translated from Russian to English on pp. 373-376 (please, look down). The paper presents the design of a silicon pressure sensitive elements (SEP) with stops. Stops are providing resistance of overload pressure. The advantage... more
Abstract Fuel cells have potentially higher energy density than batteries and promise a significant increase in power availability for portable electronics. However, developing a fuel cell system for portable electronics presents several... more
The report presents the results of modeling a highly sensitive element of the pressure sensor, which made in the form of a MEMS silicon chip. The circuitry and technological aspects of building a thermally stable system based on the... more
The paper describes modeling of high-sensitivity MEMS pressure sensor based on a circuit containing both active and passive stress-sensitive elements: a differential amplifier utilizing two n-p-n transistors and four p-type... more
... 8. ACKNOWLEDGEMENTS This research has been made possible by the interest and support provided by the Gennum Corporation of Burlington, Ontario. ... 89, No. 5, May 2001, pp. 586-601. [4] Sazzadur Chowdhury, M. Ahmadi, WC Miller, A ...... more
Conference paper presents first steps of investigation for high-sensitivity MEMS pressure sensor based on vertical bipolar NPN transistor. The report is written in Russian in 2014
We propose the active control of effective stiffness, damping, and mass of MEMS by applying feedback forces that are proportional to displacement, velocity, and acceleration of its proof mass. Such control in performance is important due... more