... Zurich by Hans Muster from Lake Lucerne, Switzerland Accepted on the recommendation of Prof. Dr. Fritz Muster, University of Lake Lucerne Prof. Dr. MayaMuster, University of Lake Lucerne 2010 Page 2. Page 3. Abstract Lorem ...
Tin oxide based microsensors with integrated polysilicon heaters were fabricated on thin silicon membranes generated by anisotropic wet chemical etching using ethylene diamine pyrocatechol as the etchant. Good thermal isolation and lower... more
Tin oxide based microsensors with integrated polysilicon heaters were fabricated on thin silicon membranes generated by anisotropic wet chemical etching using ethylene diamine pyrocatechol as the etchant. Good thermal isolation and lower power consumption were achieved. The sensing elements, tin oxide thin films, were prepared either by sputter deposition or by metallo-organic deposition. The completed microsensors showed good response to
