Pressure

Freescale Semiconductor
+

MPX10 Rev 14, 10/2008

10 kPa Uncompensated Silicon Pressure Sensors

The MPX10 series silicon piezoresistive pressure sensors provide a very accurate and linear voltage output, directly proportional to the applied pressure. These standard, low cost, uncompensated sensors permit manufacturers to design and add their own external temperature compensation and signal conditioning networks. Compensation techniques are simplified because of the predictability of Freescale's single element strain gauge design.

MPX10 Series
0 to 10 kPa (0 to 1.45 psi) 35 mV Full Scale Span (Typical)

Application Examples
Air Movement Control Environmental Control Systems Level Indicators Leak Detection Medical Instrumentation Industrial Controls Pneumatic Control Systems Robotics

Features
Low Cost Patented Silicon Shear Stress Strain Gauge Design Ratiometric to Supply Voltage Differential and Gauge Options Durable Epoxy Unibody Element or Thermoplastic (PPS) Surface Mount Package ORDERING INFORMATION
Package Case Device Name Options No. None Unibody Package (MPX10 Series) MPX10D Tray 344 MPX10DP Tray 344C MPX10GP Tray 344B Small Outline Package (MPXV10G Series) MPXV10GC6U Rail 482A MPXV10GC7U Rail 482C # of Ports Single Dual Gauge

Pressure Type Differential

Absolute

Device Marking MPX10D MPX10DP MPX10GP MPXV10G MPXV10G

SMALL OUTLINE PACKAGE

UNIBODY PACKAGE

MPXV10GC6U CASE 482A-01

MPXV10GC7U CASE 482C-03

MPX10D CASE 344-15

MPX10GP CASE 344B-01

MPX10DP CASE 344C-01

Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 3.0 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Differential Pressure Range Supply Voltage(2)
(1)

Symbol POP VS IO VFSS VOFF V/ TCVFSS TCVOFF TCR ZIN ZOUT tR

Min 0 20 0 1.0 0.22 0.21 400 750

Typ 3.0 6.0 35 20 3.5 0.1 0.5 15 1.0 20 0.5

Max 10 6.0 50 35 1.0 0.16 0.27 550 1250

Units kPa VDC mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS/C V/C %ZIN/C ms ms %VFSS

Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity Pressure Hysteresis (0 to 10 kPa) Temperature Hysteresis Temperature Coefficient of Full Scale Span Temperature Coefficient of Offset Temperature Coefficient of Resistance Input Impedance Output Impedance Response Time(5) (10% to 90%) Warm-Up Time(6) Offset Stability(7)

1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (VOFF) is defined as the output voltage at the minimum rated pressure. 5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized. 7. Offset stability is the products output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

MPX10 Sensors 2

Pressure
Maximum Ratings
Table 2. Maximum Ratings(1)
Rating Maximum Pressure (P1 > P2) Burst Pressure (P1 > P2) Storage Temperature Operating Temperature Symbol PMAX PBURST TSTG TA Value 75 100 40 to +125 40 to +125 Unit kPa kPa C C

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

Figure 1 shows a schematic of the internal circuitry on the stand-alone pressure sensor chip.

+VS 2 Sensing Element 4 +VOUT

VOUT

1 GND

Figure 1. Uncompensated Pressure Sensor Schematic

Voltage Output versus Applied Differential Pressure

The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1).

MPX10 Sensors 3

Pressure
Temperature Compensation
Figure 2 shows the typical output characteristics of the MPX10 series over temperature. Because this strain gauge is an integral part of the silicon diaphragm, there are no temperature effects due to differences in the thermal expansion of the strain gauge and the diaphragm, as are often encountered in bonded strain gauge pressure sensors. However, the properties of the strain gauge itself are temperature dependent, requiring that the device be temperature compensated if it is to be used over an extensive temperature range. Temperature compensation and offset calibration can be achieved rather simply with additional resistive components, or by designing your system using the MPX2010D series sensor. LINEARITY Linearity refers to how well a transducers output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range (Figure 3). There are two basic methods for calculating nonlinearity: 1) end point straight line fit or 2) a least squares best line fit. While a least squares fit gives the
80 70 60 Output (mVdc) 50 40 30 20 10 0 PSI 0 kPa 0.3 2.0 0.6 4.0 0.9 6.0 1.2 8.0 10 1.5 Offset (Typ) +125C Span Range (Typ) MPX10 VS = 3 VDC P1 > P2 +25C

best case linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the worst case error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescales specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. Figure 4 illustrates the differential or gauge configuration in the basic chip carrier (Case 344). A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MPX10 series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long term reliability. Contact the factory for information regarding media compatibility in your application.Refer to application note AN3728, for more information regarding media compatibility.

-40C

Pressure Differential

Figure 2. Output vs. Pressure Differential

70 60 50 Output (mVdc) 40 30 20 10 0 0 Offset (VOFF) Pressure (kPa) Max POP Lead Frame P2 RTV Die Bond Theoretical Actual Linearity Silicone Die Coat Wire Bond Stainless Steel Metal Cover P1 Epoxy Case

Span (VFSS)

Die

Figure 3. Linearity Specification Comparison

Figure 4. Unibody Package Cross-Sectional Diagram (Not to Scale)

MPX10 Sensors 4

Pressure
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing silicone gel which isolates the die from the environment. The pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the following table.
Part Number MPX10D MPX10DP MPX10GP MPXV10GC6U MPXV10GC7U Case Type 344 344C 344B 482A 482C Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Side with Port Attached Side with Port Attached

MPX10 Sensors 5

Pressure
PACKAGE DIMENSIONS
C R M
1

-AN
PIN 1
1 2 3 4

NOTES: 1. DIMENSIONING AND TOLERANCING PER ASME Y14.5M, 1994. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630).
DIM A B C D F G J L M N R Y Z INCHES MILLIMETERS MIN MAX MIN MAX 0.595 0.630 15.11 16.00 0.514 0.534 13.06 13.56 0.200 0.220 5.08 5.59 0.016 0.020 0.41 0.51 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.014 0.016 0.36 0.40 0.695 0.725 17.65 18.42 30 NOM 30 NOM 0.475 0.495 12.07 12.57 0.430 0.450 10.92 11.43 0.048 0.052 1.22 1.32 0.106 0.118 2.68 3.00

-TJ
SEATING PLANE

G F
M

F Y

D 4 PL 0.136 (0.005)

T A

DAMBAR TRIM ZONE: THIS IS INCLUDED WITHIN DIM. "F" 8 PL

STYLE 1: PIN 1. 2. 3. 4.

GROUND + OUTPUT + SUPPLY - OUTPUT

STYLE 2: PIN 1. 2. 3. 4.

VCC - SUPPLY + SUPPLY GROUND

STYLE 3: PIN 1. 2. 3. 4.

GND -VOUT VS +VOUT

CASE 344-15 ISSUE AA UNIBODY PACKAGE

SEATING PLANE

-TR H N
PORT #1 POSITIVE PRESSURE (P1)

-AU L

NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH.
DIM A B C D F G H J K L N P Q R S U INCHES MILLIMETERS MIN MAX MIN MAX 1.145 1.175 29.08 29.85 0.685 0.715 17.40 18.16 0.305 0.325 7.75 8.26 0.016 0.020 0.41 0.51 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.182 0.194 4.62 4.93 0.014 0.016 0.36 0.41 0.695 0.725 17.65 18.42 0.290 0.300 7.37 7.62 0.420 0.440 10.67 11.18 0.153 0.159 3.89 4.04 0.153 0.159 3.89 4.04 0.230 0.250 5.84 6.35 0.220 0.240 5.59 6.10 0.910 BSC 23.11 BSC

-Q-

B
1 2 3 4

PIN 1

K
S

-P0.25 (0.010) J C
M

T Q

F G D 4 PL 0.13 (0.005)

T S

STYLE 1: PIN 1. GROUND 2. + OUTPUT 3. + SUPPLY 4. - OUTPUT

CASE 344B-01 ISSUE B UNIBODY PACKAGE

MPX10 Sensors 6

Pressure
PACKAGE DIMENSIONS
V R
PORT #2 PORT #1

-AU W H N
PORT #2 VACUUM (P2)

NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH.
DIM A B C D F G H J K L N P Q R S U V W INCHES MILLIMETERS MIN MAX MIN MAX 1.145 1.175 29.08 29.85 0.685 0.715 17.40 18.16 0.405 0.435 10.29 11.05 0.016 0.020 0.41 0.51 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.182 0.194 4.62 4.93 0.014 0.016 0.36 0.41 0.695 0.725 17.65 18.42 0.290 0.300 7.37 7.62 0.420 0.440 10.67 11.18 0.153 0.159 3.89 4.04 0.153 0.159 3.89 4.04 0.063 0.083 1.60 2.11 0.220 0.240 5.59 6.10 0.910 BSC 23.11 BSC 0.248 0.278 6.30 7.06 0.310 0.330 7.87 8.38

PORT #1 POSITIVE PRESSURE (P1)

-QSEATING PLANE

SEATING PLANE

PIN 1

1 2 3 4

-P-TJ C -T0.25 (0.010)

M

K S

T Q

F G D 4 PL

0.13 (0.005)

T S

STYLE 1: PIN 1. 2. 3. 4.

GROUND + OUTPUT + SUPPLY - OUTPUT

CASE 344C-01 ISSUE B UNIBODY PACKAGE

CASE 482A-01 ISSUE A SMALL OUTLINE PACKAGE

MPX10 Sensors 7

Pressure
PACKAGE DIMENSIONS

CASE 482C-03 ISSUE B SMALL OUTLINE PACKAGE

MPX10 Sensors 8