Mosfet
Mosfet
Mosfet
The basic principle of the field-effect transistor was first MOSFET showing gate (G), body (B), source (S) and drain
patented by Julius Edgar Lilienfeldin 1925.[1] (D) terminals. The gate is separated from the body by an
insulating layer (pink).
The main advantage of a MOSFET is that it requires almost
no input current to control the load current, when compared
with bipolar transistors. In an enhancement mode
MOSFET, voltage applied to the gate terminal increases the
conductivity of the device. In depletion mode transistors,
.[2]
voltage applied at the gate reduces the conductivity
Contents
History
Composition
Operation
Metal-oxide-semiconductor structure
MOS capacitors and band diagrams
Structure and channel formation
Modes of operation
Body effect
Circuit symbols
Applications
MOS integrated circuits
CMOS circuits
Digital
Analog
Analog switches
Single-type
Dual-type (CMOS)
In 1959, Dawon Kahng and Martin M. (John) Atalla at Bell Labs invented the metal-oxide-semiconductor field-effect transistor
(MOSFET) as an offshoot to the patented FET design.[3] Operationally and structurally different from the bipolar junction
transistor,[4] the MOSFET was made by putting an insulating layer on the surface of the semiconductor and then placing a metallic
gate electrode on that. It used crystalline silicon for the semiconductor and a thermally oxidized layer of silicon dioxide for the
insulator. The silicon MOSFET did not generate localized electron traps at the interface between the silicon and its native oxide layer,
and thus was inherently free from the trapping and scattering of carriers that had impeded the performance of earlier field-effect
transistors.
Composition
Usually the semiconductor of choice is silicon. Recently, some chip manufacturers, most notably IBM and Intel, have started using a
chemical compound of silicon and germanium (SiGe) in MOSFET channels. Unfortunately, many semiconductors with better
electrical properties than silicon, such as gallium arsenide, do not form good semiconductor-to-insulator interfaces, and thus are not
suitable for MOSFETs. Research continues on creating insulators with acceptable electrical characteristics on other semiconductor
materials.
To overcome the increase in power consumption due to gate current leakage,
a high-κ dielectric is used instead of silicon dioxide for the gate insulator,
[5] ).
while polysilicon is replaced by metal gates (see Intel announcement
When a voltage is applied between the gate and body terminals, the electric
Photomicrograph of two metal-gate
field generated penetrates through the oxide and creates an inversion layer or MOSFETs in a test pattern. Probe pads for
channel at the semiconductor-insulator interface. The inversion layer two gates and three source/drain nodes are
provides a channel through which current can pass between source and drain labeled.
terminals. Varying the voltage between the gate and body modulates the
conductivity of this layer and thereby controls the current flow between drain
and source. This is known as enhancement mode.
Operation
Metal-oxide-semiconductor structure
The traditional metal-oxide-semiconductor (MOS) structure is obtained by
growing a layer of silicon dioxide (SiO2) on top of a silicon substrate and
depositing a layer of metal or polycrystalline silicon (the latter is commonly
used). As the silicon dioxide is a dielectric material, its structure is
Metal-oxide-semiconductor structure on p-
equivalent to a planar capacitor, with one of the electrodes replaced by a
type silicon
semiconductor.
Conventionally, the gate voltage at which the volume density of electrons in the inversion layer is the same as the volume density of
holes in the body is called the threshold voltage. When the voltage between transistor gate and source (VGS ) exceeds the threshold
voltage (Vth), the difference is known as overdrive voltage.
This structure with p-type body is the basis of the n-type MOSFET
, which requires the addition of n-type source and drain regions.
In the case of a p-type bulk, inversion happens when the intrinsic energy level at the surface becomes smaller than the Fermi level at
the surface. One can see this from a band diagram. Remember that the Fermi level defines the type of semiconductor in discussion. If
the Fermi level is equal to the Intrinsic level, the semiconductor is of intrinsic, or pure type. If the Fermi level lies closer to the
conduction band (valence band) then the semiconductor type will be of n-type (p-type). Therefore, when the gate voltage is increased
in a positive sense (for the given example), this will "bend" the intrinsic energy level band so that it will curve downwards towards
the valence band. If the Fermi level lies closer to the valence band (for p-type), there will be a point when the Intrinsic level will start
to cross the Fermi level and when the voltage reaches the threshold voltage, the intrinsic level does cross the Fermi level, and that is
what is known as inversion. At that point, the surface of the semiconductor is inverted from p-type into n-type. Remember that as
said above, if the Fermi level lies above the Intrinsic level, the semiconductor is of n-type, therefore at Inversion, when the Intrinsic
level reaches and crosses the Fermi level (which lies closer to the valence band), the semiconductor type changes at the surface as
dictated by the relative positions of the Fermi and Intrinsic ener
gy levels.
The occupancy of the energy bands in a semiconductor is set by the position of the Fermi level relative to the semiconductor energy-
band edges.
With sufficient gate voltage, the valence band edge is driven far from the Fermi level, and holes from the body are driven away from
the gate.
At larger gate bias still, near the semiconductor surface the conduction band edge is brought close to the Fermi level, populating the
surface with electrons in aninversion layer or n-channel at the interface between the p region and the oxide. This conducting channel
extends between the source and the drain, and current is conducted through it when a voltage is applied between the two electrodes.
Increasing the voltage on the gate leads to a higher electron density in the inversion layer and therefore increases the current flow
between the source and drain. For gate voltages below the
threshold value, the channel is lightly populated, and only a very
small subthreshold leakage current can flow between the source
and the drain.
s[6]
Comparison of n- and p-type MOSFET
Parameter nMOSFET pMOSFET
Source/drain type n-type p-type
Channel type
n-type p-type
(MOS capacitor)
Gate Polysilicon n+ p+
type Metal φm ~ Si conduction band φm ~ Si valence band
Modes of operation
The operation of a MOSFET can be separated into three different modes, depending on the voltages at the terminals. In the following
discussion, a simplified algebraic model is used.[8] Modern MOSFET characteristics are more complex than the algebraic model
presented here.[9]
with = capacitance of the depletion layer and = capacitance of the oxide layer. In a long-channel device, there is no drain
voltage dependence of the current once , but as channel length is reduced drain-induced barrier loweringintroduces drain
voltage dependence that depends in a complex way upon the device geometry (for example, the channel doping, the junction doping
and so on). Frequently, threshold voltage Vth for this mode is defined as the gate voltage at which a selected value of current ID0
occurs, for example, ID0 = 1 μA, which may not be the sameVth-value used in the equations for the following modes.
Some micropower analog circuits are designed to take advantage of subthreshold conduction.[14][15][16] By working in the weak-
inversion region, the MOSFETs in these circuits deliver the highest possible transconductance-to-current ratio, namely:
, almost that of a bipolar transistor.[17]
The subthreshold I–V curve depends exponentially upon threshold voltage, introducing a strong dependence on any manufacturing
variation that affects threshold voltage; for example: variations in oxide thickness, junction depth, or body doping that change the
degree of drain-induced barrier lowering. The resulting sensitivity to fabricational variations complicates optimization for leakage
and performance.[18][19]
The transistor is turned on, and a channel has been created which allows
current between the drain and the source. The MOSFET operates like a
resistor, controlled by the gate voltage relative to both the source and drain
voltages. The current from drain to source is modeled as:
The switch is turned on, and a channel has been created, which allows
current between the drain and source. Since the drain voltage is higher than Cross section of a MOSFET operating in the
the source voltage, the electrons spread out, and conduction is not through a linear (Ohmic) region; strong inversion
narrow channel but through a broader, two- or three-dimensional current region present even near drain
distribution extending away from the interface and deeper in the substrate.
The onset of this region is also known as pinch-off to indicate the lack of
channel region near the drain. Although the channel does not extend the full
length of the device, the electric field between the drain and the channel is
very high, and conduction continues. The drain current is now weakly
dependent upon drain voltage and controlled primarily by the gate-source
voltage, and modeled approximately as:
The additional factor involving λ, the channel-length modulation parameter, models current dependence on drain voltage due to the
Early effect, or channel length modulation. According to this equation, a key design parameter
, the MOSFET transconductance is:
where the combination Vov = VGS − Vth is called the overdrive voltage,[24] and where VDSsat = VGS − Vth accounts for a small
discontinuity in which would otherwise appear at the transition between the triode and saturation regions.
Another key design parameter is the MOSFET output resistancerout given by:
If λ is taken as zero, an infinite output resistance of the device results that leads to unrealistic circuit predictions, particularly in
analog circuits.
As the channel length becomes very short, these equations become quite inaccurate. New physical effects arise. For example, carrier
transport in the active mode may become limited by velocity saturation. When velocity saturation dominates, the saturation drain
current is more nearly linear than quadratic in VGS . At even shorter lengths, carriers transport with near zero scattering, known as
quasi-ballistic transport. In the ballistic regime, the carriers travel at an injection velocity that may exceed the saturation velocity and
approaches the Fermi velocity at high inversion charge density. In addition, drain-induced barrier lowering increases off-state (cutoff)
current and requires an increase in threshold voltage to compensate, which in turn reduces the saturation current.
Body effect
The occupancy of the energy bands in a semiconductor is set by the position
of the Fermi level relative to the semiconductor energy-band edges.
Application of a source-to-substrate reverse bias of the source-body pn-
junction introduces a split between the Fermi levels for electrons and holes,
moving the Fermi level for the channel further from the band edge, lowering
the occupancy of the channel. The effect is to increase the gate voltage
necessary to establish the channel, as seen in the figure. This change in
channel strength by application of reverse bias is called the 'body ef
fect'.
Simply put, using an nMOS example, the gate-to-body bias VGB positions
the conduction-band energy levels, while the source-to-body bias VSB
positions the electron Fermi level near the interface, deciding occupancy of
these levels near the interface, and hence the strength of the inversion layer
or channel.
The body effect upon the channel can be described using a modification of
the threshold voltage, approximated by the following equation:
Band diagram showing body effect. VSB
splits Fermi levels Fn for electrons and Fp
for holes, requiring largerVGB to populate
the conduction band in an nMOS MOSFET
where VTB is the threshold voltage with substrate bias present, andVT0 is the
zero-VSB value of threshold voltage, is the body effect parameter, and 2φB
is the approximate potential drop between surface and bulk across the depletion layer when VSB = 0 and gate bias is sufficient to
ensure that a channel is present.[25] As this equation shows, a reverse bias VSB > 0 causes an increase in threshold voltage VTB and
therefore demands a larger gate voltage before thechannel populates.
The body can be operated as a second gate, and is sometimes referred to as the "back gate"; the body effect is sometimes called the
"back-gate effect".[26]
Circuit symbols
A variety of symbols are used for the MOSFET. The basic design is generally a line for the channel with the source and drain leaving
it at right angles and then bending back at right angles into the same direction as the channel. Sometimes three line segments are used
for enhancement mode and a solid line for depletion mode (see depletion and enhancement modes). Another line is drawn parallel to
the channel for the gate.
The bulk or body connection, if shown, is shown connected to the back of the channel with an arrow indicating pMOS or nMOS.
Arrows always point from P to N, so an NMOS (N-channel in P-well or P-substrate) has the arrow pointing in (from the bulk to the
channel). If the bulk is connected to the source (as is generally the case with discrete devices) it is sometimes angled to meet up with
the source leaving the transistor. If the bulk is not shown (as is often the case in IC design as they are generally common bulk) an
inversion symbol is sometimes used to indicate PMOS, alternatively an arrow on the source may be used in the same way as for
bipolar transistors (out for nMOS, in for pMOS).
Comparison of enhancement-mode and depletion-mode MOSFET symbols, along with JFET symbols. The orientation of the
symbols, (most significantly the position of source relative to drain) is such that more positive voltages appear higher on the page
[27][28][29]
than less positive voltages, implying current flowing "down" the page:
P-channel
N-channel
In schematics where G, S, D are not labeled, the detailed features of the symbol indicate which terminal is source and which is drain.
For enhancement-mode and depletion-mode MOSFET symbols (in columns two and five), the source terminal is the one connected
to the triangle. Additionally, in this diagram, the gate is shown as an "L" shape, whose input leg is closer to S than D, also indicating
which is which. However, these symbols are often drawn with a "T" shaped gate (as elsewhere on this page), so it is the triangle
which must be relied upon to indicate the source terminal.
For the symbols in which the bulk, or body, terminal is shown, it is here shown internally connected to the source (i.e., the black
triangles in the diagrams in columns 2 and 5). This is a typical configuration, but by no means the only important configuration. In
general, the MOSFET is a four-terminal device, and in integrated circuits many of the MOSFETs share a body connection, not
necessarily connected to the source terminals of all the transistors.
Applications
Digital integrated circuits such as microprocessors and memory devices contain thousands to millions of integrated MOSFET
transistors on each device, providing the basic switching functions required to implement logic gates and data storage. Discrete
devices are widely used in applications such as switch mode power supplies, variable-frequency drives and other power electronics
applications where each device may be switching thousands of watts. Radio-frequency amplifiers up to the UHF spectrum use
MOSFET transistors as analog signal and power amplifiers. Radio systems also use MOSFETs as oscillators, or mixers to convert
frequencies. MOSFET devices are also applied in audio-frequency power amplifiers for public address systems, sound reinforcement
and home and automobile sound systems
[31]
General Microelectronics introduced the first commercial MOS integrated circuit in 1964.
Additionally, the method of coupling two complementary MOSFETS (P-channel and N-channel) into one high/low switch, known as
CMOS, means that digital circuits dissipate very little power except when actually switched.
The earliest microprocessors starting in 1970 were all MOS microprocessors; i.e., fabricated entirely from PMOS logic or fabricated
entirely from NMOS logic. In the 1970s, MOS microprocessors were often contrasted with CMOS microprocessors and bipolar bit-
slice processors.[32]
CMOS circuits
The MOSFET is used in digital complementary metal-oxide-semiconductor (CMOS) logic,[33] which uses p- and n-channel
MOSFETs as building blocks. Overheating is a major concern in integrated circuits since ever more transistors are packed into ever
smaller chips. CMOS logic reduces power consumption because no current flows (ideally), and thus no power is consumed, except
when the inputs to logic gates are being switched. CMOS accomplishes this current reduction by complementing every nMOSFET
with a pMOSFET and connecting both gates and both drains together. A high voltage on the gates will cause the nMOSFET to
conduct and the pMOSFET not to conduct and a low voltage on the gates causes the reverse. During the switching time as the voltage
goes from one state to another, both MOSFETs will conduct briefly. This arrangement greatly reduces power consumption and heat
generation.
Digital
The growth of digital technologies like the microprocessor has provided the motivation to advance MOSFET technology faster than
any other type of silicon-based transistor.[34] A big advantage of MOSFETs for digital switching is that the oxide layer between the
gate and the channel prevents DC current from flowing through the gate, further reducing power consumption and giving a very large
input impedance. The insulating oxide between the gate and channel effectively isolates a MOSFET in one logic stage from earlier
and later stages, which allows a single MOSFET output to drive a considerable number of MOSFET inputs. Bipolar transistor-based
logic (such as TTL) does not have such a high fanout capacity. This isolation also makes it easier for the designers to ignore to some
extent loading effects between logic stages independently. That extent is defined by the operating frequency: as frequencies increase,
the input impedance of the MOSFETs decreases.
Analog
The MOSFET's advantages in digital circuits do not translate into supremacy in all analog circuits. The two types of circuit draw
upon different features of transistor behavior. Digital circuits switch, spending most of their time either fully on or fully off. The
transition from one to the other is only of concern with regards to speed and charge required. Analog circuits depend on operation in
the transition region where small changes to Vgs can modulate the output (drain) current. The JFET and bipolar junction transistor
(BJT) is preferred for accurate matching (of adjacent devices in integrated circuits), higher transconductance and certain temperature
characteristics which simplify keeping performance predictable as circuit temperature varies.
Nevertheless, MOSFETs are widely used in many types of analog circuits because of their own advantages (zero gate current, high
and adjustable output impedance and improved robustness vs. BJTs which can be permanently degraded by even lightly breaking
down the emitter-base). The characteristics and performance of many analog circuits can be scaled up or down by changing the sizes
(length and width) of the MOSFETs used. By comparison, in bipolar transistors the size of the device does not significantly affect its
performance. MOSFETs' ideal characteristics regarding gate current (zero) and drain-source offset voltage (zero) also make them
nearly ideal switch elements, and also makeswitched capacitor analog circuits practical. In their linear region, MOSFETs can be used
as precision resistors, which can have a much higher controlled resistance than BJTs. In high power circuits, MOSFETs sometimes
have the advantage of not suffering from thermal runaway as BJTs do. Also, MOSFETs can be configured to perform as capacitors
and gyrator circuits which allow op-amps made from them to appear as inductors, thereby allowing all of the normal analog devices
on a chip (except for diodes, which can be made smaller than a MOSFET anyway) to be built entirely out of MOSFETs. This means
that complete analog circuits can be made on a silicon chip in a much smaller space and with simpler fabrication techniques.
MOSFETS are ideally suited to switch inductive loads because of tolerance to inductive kickback.
Some ICs combine analog and digital MOSFET circuitry on a single mixed-signal integrated circuit, making the needed board space
even smaller. This creates a need to isolate the analog circuits from the digital circuits on a chip level, leading to the use of isolation
rings and silicon on insulator (SOI). Since MOSFETs require more space to handle a given amount of power than a BJT, fabrication
processes can incorporate BJTs and MOSFETs into a single device. Mixed-transistor devices are called bi-FET
s (bipolar FETs) if they
contain just one BJT-FET and BiCMOS (bipolar-CMOS) if they contain complementary BJT-FETs. Such devices have the
advantages of both insulated gates and higher current density
.
Analog switches
MOSFET analog switches use the MOSFET to pass analog signals when on, and as a high impedance when off. Signals flow in both
directions across a MOSFET switch. In this application, the drain and source of a MOSFET exchange places depending on the
relative voltages of the source/drain electrodes. The source is the more negative side for an N-MOS or the more positive side for a P-
MOS. All of these switches are limited on what signals they can pass or stop by their gate-source, gate-drain and source–drain
voltages; exceeding the voltage, current, or power limits will potentially damage the switch.
Single-type
This analog switch uses a four-terminal simple MOSFET of either P or N type.
In the case of an n-type switch, the body is connected to the most negative supply (usually GND) and the gate is used as the switch
control. Whenever the gate voltage exceeds the source voltage by at least a threshold voltage, the MOSFET conducts. The higher the
voltage, the more the MOSFET can conduct. An N-MOS switch passes all voltages less than Vgate − Vtn. When the switch is
conducting, it typically operates in the linear (or ohmic) mode of operation, since the source and drain voltages will typically be
nearly equal.
In the case of a P-MOS, the body is connected to the most positive voltage, and the gate is brought to a lower potential to turn the
switch on. The P-MOS switch passes all voltages higher than Vgate − Vtp (threshold voltage Vtp is negative in the case of
enhancement-mode P-MOS).
Dual-type (CMOS)
This "complementary" or CMOS type of switch uses one P-MOS and one N-MOS FET to counteract the limitations of the single-
type switch. The FETs have their drains and sources connected in parallel, the body of the P-MOS is connected to the high potential
(VDD ) and the body of the N-MOS is connected to the low potential (gnd). To turn the switch on, the gate of the P-MOS is driven to
the low potential and the gate of the N-MOS is driven to the high potential. For voltages between VDD − Vtn and gnd − Vtp, both
FETs conduct the signal; for voltages less than gnd − Vtp, the N-MOS conducts alone; and for voltages greater than VDD − Vtn, the P-
MOS conducts alone.
The voltage limits for this switch are the gate-source, gate-drain and source-drain voltage limits for both FETs. Also, the P-MOS is
typically two to three times wider than the N-MOS, so the switch will be balanced for speed in the two directions.
Tri-state circuitry sometimes incorporates a CMOS MOSFET switch on its output to provide for a low-ohmic, full-range output when
on, and a high-ohmic, mid-level signal when off.
Construction
Gate material
The primary criterion for the gate material is that it is a good conductor. Highly doped polycrystalline silicon is an acceptable but
certainly not ideal conductor, and also suffers from some more technical deficiencies in its role as the standard gate material.
Nevertheless, there are several reasons favoring use of polysilicon:
1. The threshold voltage (and consequently the drain to source on-current) is modified by thework function difference
between the gate material and channel material. Because polysilicon is a semiconductor , its work function can be
modulated by adjusting the type and level of doping. Furthermore, because polysilicon has the same bandgap as the
underlying silicon channel, it is quite straightforward to tune the work function to achieve low threshold voltages for
both NMOS and PMOS devices. By contrast, the work functions of metals are not easily modulated, so tuning the
work function to obtain low threshold voltages (LVT) becomes a significant challenge. Additionally, obtaining low-
threshold devices on both PMOS and NMOS devices sometimes requires the use of dif ferent metals for each device
type. While bimetallic integrated circuits (i.e., one type of metal for gate electrodes of NFETS and a second type of
metal for gate electrodes of PFETS) are not common, they are known in patent literature and provide some benefit in
terms of tuning electrical circuits' overall electrical performance.
2. The silicon-SiO2 interface has been well studied and is known to have relatively few defects. By contrast many
metal-insulator interfaces contain significant levels of defects which can lead to Fermi level pinning, charging, or
other phenomena that ultimately degrade device performance.
3. In the MOSFET IC fabrication process, it is preferable to deposit the gate material prior to certain high-temperature
steps in order to make better-performing transistors. Such high temperature steps would melt some metals, limiting
the types of metal that can be used in a metal-gate-based process.
While polysilicon gates have been the de facto standard for the last twenty years, they do have some disadvantages which have led to
their likely future replacement by metal gates. These disadvantages include:
Polysilicon is not a great conductor (approximately 1000 times more resistive than metals) which reduces the signal
propagation speed through the material. The resistivity can be lowered by increasing the level of doping, but even
highly doped polysilicon is not as conductive as most metals. oT improve conductivity further, sometimes a high-
temperature metal such astungsten, titanium, cobalt, and more recently nickel is alloyed with the top layers of the
polysilicon. Such a blended material is calledsilicide. The silicide-polysilicon combination has better electrical
properties than polysilicon alone and still does not melt in subsequent processing. Also the threshold voltage is not
significantly higher than with polysilicon alone, because the silicide material is not near the channel. The process in
which silicide is formed on both the gate electrode and the source and drain regions is sometimes called salicide,
self-aligned silicide.
When the transistors are extremely scaled down, it is necessary to make the gate dielectric layer very thin, around
1 nm in state-of-the-art technologies. A phenomenon observed here is the so-called poly depletion, where a
depletion layer is formed in the gate polysilicon layer next to the gate dielectric when the transistor is in the inversion.
To avoid this problem, a metal gate is desired. A variety of metal gates such astantalum, tungsten, tantalum nitride,
and titanium nitride are used, usually in conjunction withhigh-κ dielectrics. An alternative is to use fully silicided
polysilicon gates, a process known asFUSI.
Present high performance CPUs use metal gate technology, together with high-κ dielectrics, a combination known as high-κ, metal
[35]
gate (HKMG). The disadvantages of metal gates are overcome by a few techniques:
1. The threshold voltage is tuned by including a thin "work function metal" layer between the high-κ dielectric and the
main metal. This layer is thin enough that the total work function of the gate is influenced by both the main metal and
thin metal work functions (either due to alloying during annealing, or simply due to the incomplete screening by the
thin metal). The threshold voltage thus can be tuned by the thickness of the thin metal layer.
2. High-κ dielectrics are now well studied, and their defects are understood.
3. HKMG processes exist that do not require the metals to experience high temperature anneals; other processes
select metals that can survive the annealing step.
Insulator
As devices are made smaller, insulating layers are made thinner, often through steps of thermal oxidation or localised oxidation of
silicon (LOCOS). For nano-scaled devices, at some point tunneling of carriers through the insulator from the channel to the gate
electrode takes place. To reduce the resulting leakage current, the insulator can be made thinner by choosing a material with a higher
dielectric constant. To see how thickness and dielectric constant are related, note thatGauss's law connects field to charge as:
with Q = charge density, κ = dielectric constant, ε0 = permittivity of empty space and E = electric field. From this law it appears the
same charge can be maintained in the channel at alower field provided κ is increased. The voltage on the gate is given by:
with VG = gate voltage, Vch = voltage at channel side of insulator, and tins = insulator thickness. This equation shows the gate voltage
will not increase when the insulator thickness increases, provided κ increases to keep tins / κ = constant (see the article on high-κ
dielectrics for more detail, and the section in this article ongate-oxide leakage).
The insulator in a MOSFET is a dielectric which can in any event be silicon oxide, formed by LOCOS but many other dielectric
materials are employed. The generic term for the dielectric is gate dielectric since the dielectric lies directly below the gate electrode
and above the channel of the MOSFET.
Junction design
The source-to-body and drain-to-body junctions are the object of much attention because of three major factors: their design affects
the current-voltage (I-V) characteristics of the device, lowering output resistance, and also the speed of the device through the loading
effect of the junction capacitances, and finally, the component of stand-by power dissipation due to junction leakage.
The drain induced barrier lowering of the threshold voltage and channel
length modulation effects upon I-V curves are reduced by using shallow
junction extensions. In addition, halo doping can be used, that is, the
addition of very thin heavily doped regions of the same doping type as the
body tight against the junction walls to limit the extent of depletion
regions.[36]
The capacitive effects are limited by using raised source and drain
geometries that make most of the contact area border thick dielectric instead MOSFET showing shallow junction
extensions, raised source and drain and
of silicon.[37]
halo implant. Raised source and drain
These various features of junction design are shown (with artistic license) in separated from gate by oxide spacers
the figure.
Scaling
Over the past decades, the MOSFET (as used for digital logic) has
continually been scaled down in size; typical MOSFET channel lengths were
once several micrometres, but modern integrated circuits are incorporating
MOSFETs with channel lengths of tens of nanometers. Robert Dennard's
work on scaling theory was pivotal in recognising that this ongoing reduction
was possible. Intel began production of a process featuring a 32 nm feature
size (with the channel being even shorter) in late 2009. The semiconductor
industry maintains a "roadmap", the ITRS,[38] which sets the pace for
MOSFET development. Historically, the difficulties with decreasing the size Trend of Intel CPU transistor gate length
of the MOSFET have been associated with the semiconductor device
fabrication process, the need to use very low voltages, and with poorer
electrical performance necessitating circuit redesign and innovation (small MOSFETs exhibit higher leakage currents and lower
output resistance).
Smaller MOSFETs are desirable for several reasons. The main reason to
make transistors smaller is to pack more and more devices in a given chip
area. This results in a chip with the same functionality in a smaller area, or
chips with more functionality in the same area. Since fabrication costs for a
semiconductor wafer are relatively fixed, the cost per integrated circuits is
mainly related to the number of chips that can be produced per wafer. Hence,
smaller ICs allow more chips per wafer, reducing the price per chip. In fact,
over the past 30 years the number of transistors per chip has been doubled
every 2–3 years once a new technology node is introduced. For example, the
MOSFET version of gain-boostedcurrent
number of MOSFETs in a microprocessor fabricated in a 45 nm technology
mirror; M1 and M2 are in active mode, while
can well be twice as many as in a 65 nm chip. This doubling of transistor M3 and M4 are in Ohmic mode, and act like
density was first observed by Gordon Moore in 1965 and is commonly resistors. The operational amplifier provides
referred to as Moore's law.[39] It is also expected that smaller transistors feedback that maintains a high output
switch faster. For example, one approach to size reduction is a scaling of the resistance.
MOSFET that requires all device dimensions to reduce proportionally. The
main device dimensions are the channel length, channel width, and oxide
thickness. When they are scaled down by equal factors, the transistor channel resistance does not change, while gate capacitance is
cut by that factor. Hence, the RC delay of the transistor scales with a similar factor. While this has been traditionally the case for the
older technologies, for the state-of-the-art MOSFETs reduction of the transistor dimensions does not necessarily translate to higher
chip speed because the delay due to interconnections is more significant.
Producing MOSFETs with channel lengths much smaller than a micrometre is a challenge, and the difficulties of semiconductor
device fabrication are always a limiting factor in advancing integrated circuit technology. Though processes such as ALD have
improved fabrication for small components, the small size of the MOSFET (less than a few tens of nanometers) has created
operational problems:
Other types
Dual-gate
The dual-gate MOSFET has a tetrode configuration, where both gates
control the current in the device. It is commonly used for small-signal
devices in radio frequency applications where biasing the drain-side gate at
constant potential reduces the gain loss caused by Miller effect, replacing
two separate transistors in cascode configuration. Other common uses in RF
circuits include gain control and mixing (frequency conversion). The tetrode
description, though accurate, does not replicate the vacuum-tube tetrode.
Vacuum-tube tetrodes, using a screen grid, exhibit much lower grid-plate
capacitance and much higher output impedance and voltage gains than triode
vacuum tubes. These improvements are commonly an order of magnitude
(10 times) or considerably more. Tetrode transistors (whether bipolar
junction or field-effect) do not exhibit improvements of such a great degree.
A FinFET
The FinFET is a double-gate silicon-on-insulator device, one of a number of
geometries being introduced to mitigate the effects of short channels and
reduce drain-induced barrier lowering. The fin refers to the narrow channel between source and drain. A thin insulating oxide layer
on either side of the fin separates it from the gate. SOI FinFETs with a thick oxide on top of the fin are called double-gate and those
with a thin oxide on top as well as on the sides are calledtriple-gate FinFETs.[48][49]
Depletion-mode
There are depletion-mode MOSFET devices, which are less commonly used than the standard enhancement-mode devices already
described. These are MOSFET devices that are doped so that a channel exists even with zero voltage from gate to source. To control
the channel, a negative voltage is applied to the gate (for an n-channel device), depleting the channel, which reduces the current flow
through the device. In essence, the depletion-mode device is equivalent to a normally closed (on) switch, while the enhancement-
mode device is equivalent to anormally open (off) switch.[50]
Due to their low noise figure in the RF region, and better gain, these devices are often preferred to bipolars in RF front-ends such as
in TV sets.
Depletion-mode MOSFET families include BF960 by Siemens and Telefunken, and the BF980 in the 1980s by Philips (later to
become NXP Semiconductors), whose derivatives are still used inAGC and RF mixer front-ends.
The gate dielectric insulator in a MISFET is silicon dioxide in a MOSFET, but other materials can also be employed. The gate
dielectric lies directly below the gate electrode and above the channel of the MISFET. The term metal is historically used for the gate
material, even though now it is usuallyhighly doped polysilicon or some other non-metal.
NMOS logic
For devices of equal current driving capability, n-channel MOSFETs can be made smaller than p-channel MOSFETs, due to p-
channel charge carriers (holes) having lower mobility than do n-channel charge carriers (electrons), and producing only one type of
MOSFET on a silicon substrate is cheaper and technically simpler. These were the driving principles in the design of NMOS logic
which uses n-channel MOSFETs exclusively. However, neglecting leakage current, unlike CMOS logic, NMOS logic consumes
power even when no switching is taking place. W
ith advances in technology, CMOS logic displaced NMOS logic in the mid-1980s to
become the preferred process for digital chips.
Power MOSFET
Power MOSFETs have a different structure.[55] As with most power devices,
the structure is vertical and not planar. Using a vertical structure, it is
possible for the transistor to sustain both high blocking voltage and high
current. The voltage rating of the transistor is a function of the doping and
thickness of the N-epitaxial layer (see cross section), while the current rating
is a function of the channel width (the wider the channel, the higher the
current). In a planar structure, the current and breakdown voltage ratings are
both a function of the channel dimensions (respectively width and length of
the channel), resulting in inefficient use of the "silicon estate". With the
vertical structure, the component area is roughly proportional to the current it Cross section of a power MOSFET, with
can sustain, and the component thickness (actually the N-epitaxial layer square cells. A typical transistor is
[56]
thickness) is proportional to the breakdown voltage. constituted of several thousand cells
Power MOSFETs with lateral structure are mainly used in high-end audio
amplifiers and high-power PA systems. Their advantage is a better behaviour in the saturated region (corresponding to the linear
s. Vertical MOSFETs are designed for switching applications.[57]
region of a bipolar transistor) than the vertical MOSFET
See also
Floating-gate MOSFET
BSIM
ggNMOS
High electron mobility transistor
Polysilicon depletion effect
Transistor model
Intrinsic diode
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