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    3.1 Assignments - Design of Vacuum System

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    Mehreen Akmal
    The document describes the design of a vacuum system with the following key components: 1. A 100 liter stainless steel chamber connected to a diffusion pump with 1500 liters/sec pumping speed and 2.5 Torr-liters/sec throughput via conductances needing calculation. 2. Problems to solve include calculating pump requirements, conductances, pumping speeds, and time to reach 1x10^-6 Torr pressure with 50x10^-3 Torr operating pressure for sputtering with argon gas. 3. A schematic shows the chamber connected to a diffusion pump, rotary pump, pressure gauges, and liquid nitrogen trap. Dimensions and materials are provided.

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    3.1 Assignments - Design of Vacuum System

    Uploaded by

    Mehreen Akmal
    55 views2 pages
    The document describes the design of a vacuum system with the following key components: 1. A 100 liter stainless steel chamber connected to a diffusion pump with 1500 liters/sec pumping speed and 2.5 Torr-liters/sec throughput via conductances needing calculation. 2. Problems to solve include calculating pump requirements, conductances, pumping speeds, and time to reach 1x10^-6 Torr pressure with 50x10^-3 Torr operating pressure for sputtering with argon gas. 3. A schematic shows the chamber connected to a diffusion pump, rotary pump, pressure gauges, and liquid nitrogen trap. Dimensions and materials are provided.

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    3.1 Assignments -Design of Vacuum System

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    The document describes the design of a vacuum system with the following key components: 1. A 100 liter stainless steel chamber connected to a diffusion pump with 1500 liters/sec pumping speed and 2.5 Torr-liters/sec throughput via conductances needing calculation. 2. Problems to solve include calculating pump requirements, conductances, pumping speeds, and time to reach 1x10^-6 Torr pressure with 50x10^-3 Torr operating pressure for sputtering with argon gas. 3. A schematic shows the chamber connected to a diffusion pump, rotary pump, pressure gauges, and liquid nitrogen trap. Dimensions and materials are provided.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    55 views2 pages

    3.1 Assignments - Design of Vacuum System

    Uploaded by

    Mehreen Akmal
    The document describes the design of a vacuum system with the following key components: 1. A 100 liter stainless steel chamber connected to a diffusion pump with 1500 liters/sec pumping speed and 2.5 Torr-liters/sec throughput via conductances needing calculation. 2. Problems to solve include calculating pump requirements, conductances, pumping speeds, and time to reach 1x10^-6 Torr pressure with 50x10^-3 Torr operating pressure for sputtering with argon gas. 3. A schematic shows the chamber connected to a diffusion pump, rotary pump, pressure gauges, and liquid nitrogen trap. Dimensions and materials are provided.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 2

    Design of a Vacuum System

    Problems:

    1. A chamber of 100 liters volume is pumped by a rotary pump of 250 liters / minute
    through a conductance of 0.75 liters / second. Calculate the time required to pump
    down to a pressure 1 x 10-3 torr.

    2. The diffusion pump has a maximum throughput of 2.5 torr-liter/second at


    maximum allowable fore pressure of 0.5 torr, Calculate the speed of the rotary
    pump required.

    3. The schematic of vacuum system is shown in the attached sketch

    • Chamber Material : s.s. 304


    • Chamber Size 100 cm dia. x 100 cm height
    • Top and bottom flanges sealed with viton “O” ring (diameter of viton O ring is 120
    cm, thickness 10 mm).
    • Chamber is having view ports (9 Nos) having viton “O” ring seals of 2.54 cm dia. on
    the ports.
    • The chamber has a front door with an opening sealed with a viton O ring having 20
    cm diameter.
    Diffusion pump that is connected is having a diameter of 15 cm with a pumping speed of
    1500 liters / sec and has a maximum throughput of 2.5 Torr liters / sec at an inlet pressure
    of 1 x 10-3 Torr.

    • What is the rotary pump speed requirement?


    • Calculate conductance of various parts in the pumping line
    • Calculate effective pumping speed of the pumps used
    • Calculate the time required to attain a base pressure of 1 x 10-6 Torr in the
    chamber
    • Design this system for thin film deposition (sputtering application) at an operating
    pressure of 50 x 10-3 torr with Argon gas flow in the chamber.
    Hint: insert variable conductance between Chamber and Diffusion pump

    Note: While calculating the surface area of the “O” rings that is exposed in the chamber,
    assume that a nearly flat surface of 3 mm height of the O ring is exposed to the chamber.
    Chamber with 9 ports of 2.54 cm dia.

    Penning gauge
    50 cm
    ф 25 cm

    60 cm

    ф 2.54 cm
    100 cm Pirani gauge
    Liquid N2
    Front view
    20 cm
    port
    20 cm
    N Exhaust
    2 20 cm
    50 cm
    N2 Trap Pirani gauge

    50 cm
    Rotary pump
    Water cooling

    Oil
    Heater

    Fig: Typical Vacuum system

    Diffusion pump internal diameter: 15 cm


    Liquid Nitrogen trap diameter: 10 cm

    Schematic of a Vacuum System

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