Compressed Gas Systems: Ee-527: Microfabrication
Compressed Gas Systems: Ee-527: Microfabrication
Compressed Gas Systems: Ee-527: Microfabrication
Size refers to cylinder designation used by Air Products and Chemicals, Inc.
LB = Lecture Bottle; ME = Medical size E; BX, BY = very high pressure cylinders
Note: First digit and letters of DOT specification give the construction, e.g. 3AA = steel.
Note: Last 4 digits of DOT specification give the service or working pressure in psi.
Some vendors
refer to this as a
‘K’ size cylinder.
packing box
safety
overpressure
attached to gas cylinder
release
R. B. Darling / EE-527 / Winter 2013
CGA Outlet Fittings
C3H8 (propane)
O2
Note: flammable gases
usually have LH
N2, Ar, threads, indicated by
He, CF4 notches on their nuts.
The second
stage is
adjustable.
two-stage
regulator
Typical: Typical:
0 – 100 psi 0 – 3000 psi
low high
pressure pressure
side side
i ps
ps i
delivery cylinder
pressure pressure
gauge gauge
CGA fitting
i ps
ps i
cylinder
valve
delivery
poppet pressure
valve regulator
pig tail
gas cylinder
R. B. Darling / EE-527 / Winter 2013
Procedure to Connect a Cylinder to a Regulator
• Move the cylinder into position and secure it with a safety chain.
• Remove the cylinder cap and clean the CGA fitting.
• Attach either a regulator or a pigtail to the CGA fitting.
– Run the threads down all the way first by hand.
– Finally, tighten the connection with a wrench, but only snug is enough.
• Insure that the delivery poppet valve is closed and the regulator
adjustment knob is backed out and loose.
• Slowly open the cylinder valve.
– The cylinder pressure gauge should rise and show the cylinder pressure.
– Finally, open the cylinder valve all the way.
• Tighten the regulator adjustment knob to achieve the desired delivery
pressure.
• Open the delivery poppet valve to supply the gas to the system.
electronic
control &
interface
solenoid
differential
metering pressure
valve sensor
FLOW
Note:
The “fog” produced by evaporating liquid nitrogen is actually the condensation of water vapor
in the air which has been chilled, just like in a cloud. Nitrogen is itself colorless and odorless.