PSI Manual

WYKO NT9100 SURFACE PROFILER
SETUP AND OPERATION GUIDE
P/N 980-315
Revision A
©2008, Veeco Instruments Inc.
All rights reserved.
Printed in the United States of America.
Revision A
COPYRIGHT NOTICE:
This guide and the software (computer program) described in it are copyright © Veeco Instruments Inc.
They are protected by United States copyright laws and international treaty provisions. Under copyright
laws, this guide and the software program contained herein may not be copied, in whole or in part, without
prior written consent of Veeco Instruments Inc., except in the normal use of the software or to make a
backup copy. This exception does not allow copies to be made for others, whether or not sold, but all of
the material purchased (with all backup copies) may be sold, given, or loaned to another person. Under the
law, copying includes translating into another language or format.
Veeco Instruments Inc. retains all rights not otherwise expressly granted here. Nothing in this notice
constitutes a waiver of our rights under U.S. Copyright laws or any other federal or state law.
TRADEMARK NOTICE:
Wyko and Vision are registered trademarks of WYKO Corporation and Veeco Instruments Inc. Microsoft,
Windows and Microsoft Excel are trademarks or registered trademarks of Microsoft Corporation. Dell is
a registered trademark of Dell Computer Corporation. Intel, Pentium and Celeron are trademarks or
registered trademarks of Intel Corporation.
All other brand or product names are trademarks or registered trademarks of their respective holders.
Veeco Instruments Inc.

2650 East Elvira Road
Tucson, Arizona 85756
Phone: (800) 366-9956 or (520) 741-1044
Fax: (520) 294-1799
WARRANTY
Veeco Instruments Inc. Statement of Limited Warranty

This product is covered by the terms of the Veeco standard warranty as in effect on the date of
shipment and as reflected on Veeco's Order Acknowledgement and Quote. While a summary of the
warranty statement is provided below, please refer to the Order Acknowledgement or Quote for a
complete statement of the applicable warranty provisions. In addition, a copy of these warranty terms
may be obtained by contacting Veeco.
WARRANTY. Seller warrants to the original Buyer that new equipment will be free of defects in material and
workmanship for a period of one year commencing (a) on final acceptance or (b) 90 days from shipping,
whichever occurs first. This warranty covers the cost of parts and labor (including, where applicable, field
service labor and travel required to restore the equipment to normal operation).
Seller warrants to the original Buyer that replacement parts will be new or of equal functional quality and
warranted for the remaining portion of the original warranty or 90 days, whichever is longer.
Seller warrants to the original Buyer that software will perform in substantial compliance with the written
materials accompanying the software. Seller does not warrant uninterrupted or error-free operation.
Seller's obligation under these warranties is limited to repairing or replacing at Seller's option defective non-
expendable parts or software. These services will be performed, at Seller's option, at either Seller's facility or
Buyer's business location. For repairs performed at Seller's facility, Buyer must contact Seller in advance for
authorization to return equipment and must follow Seller's shipping instructions. Freight charges and shipments
to Seller are Buyer's responsibility. Seller will return the equipment to Buyer at Seller's expense. All parts used
in making warranty repairs will be new or of equal functional quality.
The warranty obligation of Seller shall not extend to defects that do not impair service or to provide warranty
service beyond normal business hours, Monday through Friday (excluding Seller holidays). No claim will be
allowed for any defect unless Seller shall have received notice of the defect within thirty days following its
discovery by Buyer. Also, no claim will be allowed for equipment damaged in shipment sold under standard
terms of F.O.B. factory. Within thirty days of Buyer's receipt of equipment, Seller must receive notice of any
defect that Buyer could have discovered by prompt inspection. Products shall be considered accepted 30 days
following (a) installation, if Seller performs installation, or (b) shipment; unless written notice of rejection is
provided to Seller within such 30-day period.
Expendable items, including, but not limited to, lamps, pilot lights, filaments, fuses, mechanical pump belts, V-
belts, wafer transport belts, pump fluids, O-rings and seals ARE SPECIFICALLY EXCLUDED FROM THE
FOREGOING WARRANTIES AND ARE NOT WARRANTED. All used equipment is sold 'AS IS, WHERE
IS,' WITHOUT ANY WARRANTY, EXPRESS OR IMPLIED.
Warranty i
Seller assumes no liability under the above warranties for equipment or system failures resulting from (1) abuse,
misuse, modification or mishandling; (2) damage due to forces external to the machine including, but not limited
to, acts of God, flooding, power surges, power failures, defective electrical work, transportation, foreign
equipment/attachments or Buyer-supplied replacement parts or utilities or services such as gas; (3) improper
operation or maintenance or (4) failure to perform preventive maintenance in accordance with Seller's
recommendations (including keeping an accurate log of preventive maintenance). In addition, this warranty does
not apply if any equipment or part has been modified without the written permission of Seller or if any Seller
serial number has been removed or defaced.
No one is authorized to extend or alter these warranties on Seller's behalf without the written authorization of
Seller.
THE ABOVE WARRANTIES ARE EXPRESSLY IN LIEU OF ANY OTHER

EXPRESS OR IMPLIED WARRANTIES (INCLUDING THE WARRANTY OF
MERCHANTABILITY), AND OF ANY OTHER OBLIGATION ON THE PART
OF SELLER. SELLER DOES NOT WARRANT THAT ANY EQUIPMENT OR
SYSTEM CAN BE USED FOR ANY PARTICULAR PURPOSE OR WITH ANY
PARTICULAR PROCESS OTHER THAN THAT COVERED BY THE
APPLICABLE PUBLISHED SPECIFICATIONS.
NO CONSEQUENTIAL DAMAGES. LIMITATION OF LIABILITY. Seller shall not be liable for

consequential damages, for anticipated or lost profits, incidental, indirect, special or punitive damages, loss of
time, loss of use, or other losses, even if advised of the possibility of such damages, incurred by Buyer or any
third party in connection with the equipment or services provided by Seller. In no event will Seller's liability in
connection with the equipment or services provided by Seller exceed the amounts paid to Seller by Buyer
hereunder.
Buyer is advised that, if the equipment is used in a manner not specified by the manufacturer, the protection
provided by the equipment may be impaired.
Notices: The information in this document is subject to change without notice. No Liability is assumed for errors
contained herein or of incidental or consequential damages in connection with the furnishing, performance, or
use of the material.
Safety Notices
POWER DISTRIBUTION UNIT (PDU)
WARNING
Dangerous voltages (up to 265 VAC) exist in this unit. To prevent electric
shock, do not open the box. There are no user serviceable parts inside.
Refer servicing to qualified personnel.
Specifications
Power Input: 85 to 264 VAC, 47 to 63 Hz, 3.8 A full-load current @ 100 VAC (PDU only), 6.0
A full-load current @ 100 VAC (normal system configuration)
Accessible Fuses: 6.3 A, 250 V, 5x20 mm, T type (auxiliary stage)
2.3 A, 250 V, 5x20 mm, F type (interface box
Power Demand: 300 W Max

Short Circuit Current 5000 A
Rating
ii Warranty
Outputs: * 24 VDC, 3.0 A peak for interface box
* 24 VDC @ 6.3 A peak for auxiliary stage
Inputs: * 24 VDC-compatible for Emergency Off, Power On, and Power Off switches.
Document Conventions
GENERAL CONVENTION S
• Your system hardware operates with the Wyko® Vision® software application under
Microsoft® Windows XP®. You can also run Vision independently of hardware under
Microsoft Windows XP.
Vision follows all Windows XP commands and conventions of use. If you need a refresher on
how to work in the Windows XP environment, refer to your Windows software guide.
• When the text says that you should enter a key combination (such as ALT-A), press and hold
down the appropriate command key (in this case ALT) and then press the other indicated key.
• You can perform three basic actions with the buttons on your mouse: clicking, double-clicking,
and dragging. To click, press and release the mouse button. To double-click, press and release
the mouse button twice in rapid succession. To drag, press and hold down the mouse button
while you move the mouse across your desktop.
• Menus are listings of commands or functions that are available to you at certain times. To open
a menu, position the mouse pointer over a menu bar title and click on it with the mouse. A menu
pops down from the menu bar. You can then select a command from the pop-down menu by
clicking on it.
• Shortcut menus are available by clicking with the right mouse button on a plot (such as the 3D
Contour or Profile plot). You can then select options from the shortcut menu that appears.
• In this manual, the commands you select from pop-down menus are displayed in the following
format: Hardware » Measurement Options. The double arrow symbol (») indicates menu
flow as it cascades down from the menu title.
T YPEFACE CONVENTIONS
This manual uses typeface conventions that provide visual cues to help you more easily locate and
identify information.
boldface Menu titles, commands, icons, and check box and button names are shown in
boldface type.
italic type Italic type indicates new terms and shows emphasis.
monospace type Code examples and commands that you must type in exactly as they appear are
shown in monospaced type.
SMALL CAPITALS Hardware placards and keyboard key labels are shown in SMALL CAPITALS—
for example, ESC, ENTER, ALT.
Warranty iii
CAUTION
Whenever you see a Caution, there is a possibility that data will be lost,
or there is some specific action that you must perform for the system to
work properly.
WARNING
Whenever you see a warning, there is the possibility of personal injury or
equipment damage.
iv Warranty
TABLE OF CONTENTS
Chapter 1. System Overview and Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
IMOA and Z-Axis Column . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-2
Sample Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
Objectives and Field-of-View Lenses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Computer and Operator Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-9
Standard Switch Panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Optional Joystick/Z-Control Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Electronics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
Optional Vibration Isolation Table . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
The Two Standard Measurement Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
VSI Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
PSI Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Safety Features . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Emergency Power Off Button (EPO) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Power On and Off Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Safety Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14
Safety and Health Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16
Electrical Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16
Mechanical Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16
Thermal Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
Pressure Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
Installation and Maintenance Safety Issues . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
General Lockout/Tagout Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17
Returning the System to Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-18
Electrical Task Classification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-19
Access to the Emergency Off Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-19
Chapter 2. Basic Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Turning On the Wyko NT9100 System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-1
Turning Off the Wyko NT9100 System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Re-powering after an Emergency Shutoff . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
v
Opening Vision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Closing Vision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
System Recovery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Using Vision Online Help. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Using the Intensity Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Controlling Light Intensity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Using the Intensity Window Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Controlling the Z-Axis Movement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Controlling Z-Axis Movement with the Mouse Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
Controllilng Z-Axis Movement with the Joystick/Z-Control Box. . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Controlling the X/Y Movement of the Manual Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Controlling the X/Y Movement of the Motorized Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Controlling X/Y Movement with the Mouse Cursor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Controlling X/Y Movement with the Joystick/Z-Control Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
Controlling the Tip/Tilt Movement of Either Stage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
Changing Objectives on the Motorized Turret . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
Working with the Single-Objective Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Installing the Single-Objective Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17
Removing the Single-Objective Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18
Changing an Objective in the Single-Objective Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19
Changing the FOV Lens . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21
Routine System Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22
Chapter 3. Configuration Files and Measurement Options. . . . . . . . . . . . . . . . . . . . 3-1

About Configuration Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Changing the Startup Configuration File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Opening an Existing Configuration File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Creating and Saving a New or Modified Configuration File. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Setting the Measurement Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
Settings on the Measurement Options Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Settings on the VSI Options Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
Settings on the PSI Options Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Settings on the Autofocus Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
Settings on the Prompts Tab. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
Settings on the Automation Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
Settings on the Wizard Setup Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
Chapter 4. Calibrating Your System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Verifying VSI Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Autocalibrating for VSI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Verifying PSI Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7
Autocalibrating for PSI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11
Solving Calibration Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Generating a Reference File for PSI and VSI Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
vi
Chapter 5. Measuring Samples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Basic Sample Measurement Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-1
Basic Measurement Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
Tips for Finding Focus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-8
Tips for Setting the Tip/Tilt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Tips for Setting the Intensity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Using the Auto Intensity Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-9
Making a VSI Measurement of a Step. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-10
Performing a Step Measurement Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-14
Making a PSI Measurement of a Mirror. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-16
Chapter 6. Processing Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

Applying Processed Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-1
Terms Removal Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Filtering Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Masking Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-7
Data Restore Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-8
General Tab Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-10
Masking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
Types of Masks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-11
Creating and Editing Dataset Masks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-13
Saving Dataset Masks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-15
Applying Dataset Masks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-16
Selecting Mask Views . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-17
Selecting Data Displays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-17
Creating and Editing Detector Masks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-17
Applying Detector Masks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-18
Chapter 7. Graphical Display Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

Standard Display Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
Contour Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-1
2D Analysis Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-2
3D Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4
Intensity Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-6
Modulation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-7
Custom Display Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-8
Loading a Custom Display File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-8
Creating a Custom Display File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9
Selecting a Default Output File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-12
Setting the Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-13
Setting Titles and User Notes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14
Setting User Notes and Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-14
vii
Chapter 8. Standard Analyses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
Analyzing Surface Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
Selecting an Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Standard Analyses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Raw Surface Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
Filtered Histogram. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Step Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3
Bearing Ratio . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4
S-Parameters Analyses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5
Other Analyses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6
Chapter 9. Datasets and Databases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1

Datasets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
Saving a Dataset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
Opening a Dataset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
Databases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-2
Defining a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Pass/Fail Criteria for Database Fields. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-4
Selecting and Activating a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
Logging Data to a Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
Using a Master Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-5
Viewing or Printing a Database File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-6
Chapter 10. Automation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1

Setting New Locations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Manually Setting New Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Setting New Locations by Moving the Stage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3
Using an Existing Stage File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
Setting Other Options in the XY - Stage Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
Sample X/Y Stage Coordinate File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Saving an X/Y Stage File. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Running an X/Y Stage File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Setting Up AUtomation in an XY Grid Stage File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
Defining a Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7
Creating an XY Grid Stage File. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-7
Running an XY Grid Stage File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8
Appendix A. Customizing the Vision Menus and Toolbars. . . . . . . . . . . . . . . . . . . . A-1

Lab Mode versus Production Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1
Customizing the Menus . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-3
Standard Toolbar Buttons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-4
Editing the Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-6
viii
Appendix B. S-Parameters Analyses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-1
The Z(x,y) Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-1
Categories of S-Parameters Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-2
S-Parameters Amplitude Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-2
Performing an S-Parameters Amplitude Analysis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-2
The Sa and Sq Amplitude Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-3
The Ssk and Sku Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-4
The Sz Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-5
S-Parameters Spatial Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-6
The Autocorrelation Function (ACF) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-6
Performing an S-Parameters Spatial Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-8
The Sds Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-8
The Str and Sal Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-9
The Std Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-10
S-Parameters Hybrid Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-14
Performing an S-Parameters Hybrid Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-14
The Sdq and Ssc Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-14
The Sdr Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-15
S-Parameters Functional Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-17
Performing an S-Parameters Functional Analysis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-17
The Sm, Sd and Sv Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-17
The Sbi, Sci, and Svi Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B-19
Appendix C. The Vision Stitching Package . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1

The Two Modes of Stitching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Automatic Stitching Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Manual Stitching Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Installing and Accessing Stitching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-2
Automatic Stitching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-2
The Size/Resolution Trade-off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-3
Automatic Stitching Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-5
The Rectangular Stitching Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-5
The Circular/Annular Stitching Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-10
The Rectangular Annulus Stitching Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-14
The Use Stage File Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-19
Optional Stitching Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-21
Performing a Test Run . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-27
Manual Stitching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-27
Two-File Limitation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-28
Manual Stitching Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-29
Manual Stitching Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-29
The Manual Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-30
The One Fiducial Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-33
ix
The Two Fiducials Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-35
The Stage Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-38
Optional Stitching Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-39
Appendix D. RoHS Compliance Environmental Datasheets . . . . . . . . . . . . . . . . . . . D-1
Glossary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . GL-1
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . IX-1
x
step 1
SYSTEM OVERVIEW AND SAFETY
FEATURES
SYSTEM COMPONENTS
The Wyko® NT9100 optical profiling system performs highly repeatable sub-nanometer surface
measurements for research and low-volume production. This small-footprint benchtop profiler,
which appears in Figure 1-1, includes key components that work together to provide detailed
information regarding the surface of a sample. The system includes:
• An Improved Modular Optics Assembly (IMOA) (see Figure 1-2) mounted on a plate attached
to an automated Z-axis column (see Figure 1-3)
• A standard manual tip/tilt X/Y sample stage (see Figure 1-4) or optional motorized stage (see
Figure 1-5)
• Up to four magnification objectives mounted on a standard motorized turret (see Figure 1-6) or
a single objective mounted on an optional single-objective adapter (see Figure 1-7)
• A Multiple Magnification Detector with up to three field of view (FOV) lenses (see Figure 1-2
and Figure 1-8)
• The latest Pentium® Processor-equipped computer (see Figure 1-9), preloaded with Microsoft®
Windows XP® and Wyko Vision software
• A standard Switch Panel, including an EMERGENCY OFF button (see Figure 1-12)
• An optional Joystick/Z-Control box with a Switch Panel that includes an EMERGENCY OFF
button (see Figure 1-12)
• An operator station, including a monitor, keyboard, and mouse (see Figure 1-10)
• Electronics, including a Power Distribution Unit (PDU) (see Figure 1-13) and Interface box (see
Figure 1-14)
• An optional Veeco-supplied vibration-isolation table (see Figure 1-15)
System Overview and Safety Features 1-1

Measurement
head cover
(encloses IMOA)
Turret
Objectives
Optional motorized
sample stage
Tip/Tilt knob (left
to right) Tip/Tilt Knob (front to
back)
System base and Z-axis

column
Figure 1-1: The Wyko NT9100 Surface Profiler
IMOA and Z-Axis Column

The measurement head (see Figure 1-2)—known as the IMOA—performs the optical measurements.
It also determines how each measurement is made by controlling magnification, scanning, and other
critical functions.
The IMOA is mounted on a plate attached to a motorized Z-axis column (see Figure 1-3). By raising
or lowering the Z-axis column, you can measure samples of many different sizes. You move the Z-
axis with the mouse via the Profiler Controls in the Intensity window or by using the wheel on the
optional Joystick/Z-Control box (see Figure 1-12).
IMPORTANT! The Z-axis column has an optical limit switch to prevent the IMOA and
objectives from crashing into the stage. You can adjust the limit switch with a thumb-wheel on
the left size of the Z-axis column.
1-2 System Overview and Safety Features

Camera
White LED
illuminator
Green LED illuminator FOV lenses
Multiple magnification
detector unit
Filter flipper
Scanner
Figure 1-2: Uncovered IMOA, Front View
Z-axis column
IMOA mounting plate
Z-axis limit
adjustment
Figure 1-3: Uncovered IMOA, Side View Showing Z-Axis Column

How the IMOA Takes a Measurement
The IMOA contains a CCD camera and a Multiple Magnification Detector (MMD) that holds Field
of View (FOV) lenses. It also contains a scanner assembly that allows for precise movement of the
measurement objectives, which are attached to the bottom of the IMOA on a turret or single-objective
adapter.
Dual LEDs with a filter flipper assembly provide white and/or green illumination to the IMOA. Light
from these LEDs travels through the IMOA and is reflected down to the objective by a beamsplitter.
After the light reaches the objective, another beamsplitter separates the light into two beams. One
beam (the reference beam) reflects from a super smooth reference mirror in the objective, while the
other (the test beam) reflects from the surface of the sample and back to the objective.
If the surface of the sample is in focus, the two light beams recombine and form an interference pattern
of light and dark bands called fringes. The number of fringes and their spacing depends upon the
relative tilt between the sample and the reference mirror. If the sample and the reference are parallel,
only one large fringe appears. In this case, the fringes are said to be nulled. The interference pattern is
imaged by the CCD camera, and the signal is transferred to the computer, where it is processed by the
Vision software. Vision then produces a graphical output display representing a contour map of the
sample’s surface.
Sample Stage
The Wyko NT9100 system comes with a standard manual X/Y stage (see Figure 1-4) that allows four
inches of X and Y movement and ±6° of tip and tilt. You control X/Y movement by turning fine-
positioning knobs and sliding coarse-positioning clips. You control tip/tilt by turning the knobs on
the profiler’s base (see Figure 1-1).
If your system is equipped with the optional X/Y motorized stage (see Figure 1-5) or Z motorized
stage, you control its movement by using the mouse via the Profiler Controls in the Intensity window
or through the optional Joystick/Z-Control box. As with the manual stage, you control tip/tilt by
turning the knobs on the profiler’s base (see Figure 1-1).
Fine-positioning
knobs
Quick-positioning
clips for for rapid,
coarse adjustments
Figure 1-4: Standard Manual X/Y Sample Stage

Y Motor
X Motor
Figure 1-5: Optional Motorized Sample Stage
Objectives and Field-of-View Lenses
WARNING
The objectives are very sensitive and fragile. Never allow an objective to
touch the sample or the stage, and never touch the bottom of an objective
with your fingers. The Z-axis optical limit switch is set to protect the system
only from crashing into the bare stage, so use extreme care to avoid
touching your sample with an objective.
The objectives are mounted to bottom of the IMOA. Up to four magnification objectives can be
mounted on the standard motorized turret, as shown in Figure 1-6. Alternatively, a single objective
can be individually mounted on an optional single-objective adapter, as shown in Figure 1-7.
Figure 1-6: Objectives Mounted on a Turret

Figure 1-7: Single-Objective Adapter
The working distance of each objective is the distance from the bottom of the objective to the top of
the sample at which the sample will be in focus. By keeping in mind the working distance, you can
reduce the possibility of damage to the sample and the objective when you are focusing the system.
The working distance, numerical aperture, optical resolution, and other specifications for the
objectives used with Wyko NT9100 optical profiling system appear in the charts on the next two pages.
By using a field-of-view (FOV) lens (see Figure 1-8) in combination with an objective, you can
increase or decrease the overall magnification of the system, as shown in the charts on the next two pages.
Up to three FOV lenses can be housed in the Multiple Magnification Detector (MMD) within the IMOA
(see Figure 1-2).
Figure 1-8: FOV Lens

Wyko NT9000 Series Optical Profiling Systems Objectives Chart
OBJECTIVE SPECIFICATIONS WITH STANDARD-RESOLUTION CAMERA
Parfocal Set A Objectives1 Parfocal Set B Objectives Non-Parfocal
Magnification2 2.5XL 5X 5XL 10XBF 10X 20X 50X 2XLWD 5XLWD 10XLWD 1.5XL
Interferometer Type Michelson Michelson Michelson Brightfield Mirau Mirau Mirau Michelson Michelson Michelson Michelson
non-interferometric
Numerical Aperture 0.07 0.12 0.13 0.25 0.3 0.4 0.55 0.06 0.14 0.17 0.04
Working Distance (mm) 3.5 6.7 9.4 10.6 7.4 4.7 3.4 22 22 22 9.6
3
Optical Resolution (μm) 3.82 2.23 2.06 1.07 0.89 0.67 0.49 4.86 1.91 1.57 6.52
4
Practical Maximum Slope (deg) 1.9 3.8 3.8 — 7.6 14.2 26.7 1.5 6.4 7.6 1.2
Turret Mountable Yes Yes Yes Yes Yes Yes Yes No No No No
Field of View, with magnification selector lens (mm x mm)5

0.55X 4.61 x 3.46 2.3 x 1.73 2.3 x 1.73 1.15 x 0.86 1.15 x 0.86 0.58 x 0.43 0.23 x 0.17 5.76 x 4.32 2.3 x 1.73 1.15 x 0.86 7.68 x 5.76
0.75X 3.38 x 2.53 1.69 x 1.27 1.69 x 1.27 0.84 x 0.63 0.84 x 0.63 0.42 x 0.32 0.17 x 0.13 4.22 x 3.17 1.69 x 1.27 0.84 x 0.63 5.63 x 4.22
1X 2.53 x 1.9 1.27 x 0.95 1.27 x 0.95 0.63 x 0.48 0.63 x 0.48 0.32 x 0.24 0.13 x 0.1 3.17 x 2.38 1.27 x 0.95 0.63 x 0.48 4.22 x 3.17
1.5X 1.69 x 1.27 0.84 x 0.63 0.84 x 0.63 0.42 x 0.32 0.42 x 0.32 0.21 x 0.16 0.08 x 0.06 2.11 x 1.58 0.84 x 0.63 0.42 x 0.32 2.82 x 2.11
2X 1.27 x 0.95 0.63 x 0.48 0.63 x 0.48 0.32 x 0.24 0.32 x 0.24 0.16 x 0.12 0.06 x 0.05 1.58 x 1.19 0.63 x 0.48 0.32 x 0.24 2.11 x 1.58
Spatial Sampling, with magnification selector lens (μm)5

0.55X 7.2 3.6 3.6 1.8 1.8 0.9 0.36 9 3.6 1.8 12
0.75X 5.28 2.64 2.64 1.32 1.32 0.66 0.26 6.6 2.64 1.32 8.8
1X 3.96 1.98 1.98 0.99 0.99 0.5 0.2 4.95 1.98 0.99 6.6
1.5X 2.64 1.32 1.32 0.66 0.66 0.33 0.13 3.3 1.32 0.66 4.4
2X 1.98 0.99 0.99 0.5 0.5 0.25 0.1 2.48 0.99 0.5 3.3
1
Objectives are parfocal within their respective set (i.e., set A objectives are parfocal only with other set A objectives).
2
Chart specifications are based on nominal magnifications. Actual magnification is calibrated to National Institute of Standards Technology (NIST) traceable calibration standards.
3
Optical resolution based on Sparrow Criteria at 535nm.
4
As measured on an optically smooth surface and 1X magnification selector lens. Practical slope limit for non-specular surfaces may be higher.
5
Field of view and spatial sampling are based on full resolution 640 x 480 pixels measurement array, 9.9μm x 9.9μm pixel size.
Wyko is a registered trademark of Veeco Instruments Inc. Specifications are subject to change without notice. Copyright © 2007 Veeco Instruments Inc. DS531, Rev A6.
Wyko NT9000 Series Optical Profiling Systems Objectives Chart
OBJECTIVE SPECIFICATIONS WITH HIGH-RESOLUTION CAMERA
Parfocal Set A Objectives1 Parfocal Set B Objectives Non-Parfocal
Magnification2 2.5XL 5X 5XL 10XBF 10X 20X 50X 2XLWD 5XLWD 10XLWD 1.5XL
Interferometer Type Michelson Michelson Michelson Brightfield Mirau Mirau Mirau Michelson Michelson Michelson Michelson
non-interferometric
Numerical Aperture 0.07 0.12 0.13 0.25 0.3 0.4 0.55 0.06 0.14 0.17 0.04
Working Distance (mm) 3.5 6.7 9.4 10.6 7.4 4.7 3.4 22 22 22 9.6
3
Optical Resolution (μm) 3.82 2.23 2.06 1.07 0.89 0.67 0.49 4.86 1.91 1.57 6.52
4
Practical Maximum Slope (deg) 3 5.5 5.9 — 11.3 18.9 26.7 2.4 5.9 7.8 1.8
Turret Mountable Yes Yes Yes Yes Yes Yes Yes No No No No
Field of View, with magnification selector lens (mm x mm)5

0.55X 6.42 x 4.8 3.21 x 2.4 3.21 x 2.4 1.6 x 1.2 1.6 x 1.2 0.8 x 0.6 0.32 x 0.24 — 3.21 x 2.4 1.6 x 1.2 —
0.75X 4.71 x 3.52 2.35 x 1.76 2.35 x 1.76 1.18 x 0.88 1.18 x 0.88 0.59 x 0.44 0.24 x 0.18 5.88 x 4.4 2.35 x 1.76 1.18 x 0.88 7.84 x 5.87
1X 3.53 x 2.64 1.76 x 1.32 1.76 x 1.32 0.88 x 0.68 0.88 x 0.66 0.44 x 0.33 0.18 x 0.13 4.41 x 3.3 1.76 x 1.32 0.88 x 0.66 5.88 x 4.4
1.5X 2.35 x 1.76 1.88 x 0.88 1.18 x 0.88 0.59 x 0.44 0.59 x 0.44 0.29 x 0.22 0.12 x 0.09 2.94 x 2.2 1.18 x 0.88 0.59 x 0.44 3.92 x 2.94
2X 1.76 x 1.32 0.88 x 0.66 0.88 x 0.66 0.44 x 0.33 0.44 x 0.33 0.22 x 0.17 0.09 x 0.07 2.21 x 1.65 0.88 x 0.66 0.44 x 0.33 2.94 x 2.2
Spatial Sampling, with magnification selector lens (μm)5

0.55X 4.69 2.35 2.35 1.17 1.17 0.59 0.23 — 2.35 1.17 —
0.75X 3.44 1.72 1.72 0.86 0.86 0.43 0.17 4.3 1.72 0.86 5.73
1X 2.58 1.29 1.29 0.65 0.65 0.32 0.13 3.23 1.29 0.65 4.3
1.5X 1.72 0.86 0.86 0.43 0.43 0.22 0.09 2.15 0.86 0.43 2.87
2X 1.29 0.65 0.65 0.32 0.32 0.16 0.06 1.61 0.65 0.32 2.15
1
Objectives are parfocal within their respective set (i.e., set A objectives are parfocal only with other set A objectives).
2
Chart specifications are based on nominal magnifications. Actual magnification is calibrated to National Institute of Standards Technology (NIST) traceable calibration standards.
3
Optical resolution based on Sparrow Criteria at 535nm.
4
As measured on an optically smooth surface and 1X magnification selector lens. Practical slope limit for non-specular surfaces may be higher.
5
Field of view and spatial sampling are based on full resolution 1368 x 1024 pixels measurement array, 6.45μm x 6.45μm pixel size.
Wyko is a registered trademark of Veeco Instruments Inc. Specifications are subject to change without notice. Copyright © 2007 Veeco Instruments Inc. DS531, Rev A6.
Computer and Operator Station
The Wyko NT9100 system includes latest Pentium® Processor-equipped computer (see Figure 1-9)
preloaded with Microsoft® Windows XP® and Wyko Vision software.
Figure 1-9: Computer
The operator station of the Wyko NT9100 system includes a keyboard, mouse, and monitor (see Figure
1-10), which can be placed in any convenient location near the profiler.
Figure 1-10: Monitor and Keyboard

Standard Switch Panel
The standard Switch Panel includes POWER OFF and POWER ON buttons, along with an EMERGENCY
OFF button (see Figure 1-11).
Emergency Off button
Power On button
Power Off button
Figure 1-11: Standard Switch Panel
Optional Joystick/Z-Control Box

The optional Joystick/Z-Control box (see Figure 1-12) provides the following controls:
• A joystick for controlling the X/Y movement of the stage
• A wheel for controlling the vertical movement of the Z-axis column
• A Switch Panel with a POWER ON, POWER OFF, and EMERGENCY OFF button

Power On
button Power Off button
Fast button
Stage Control
joystick
Z-Axis wheel
Figure 1-12: Optional Joystick/Z-Control Box

NOTE – As an alternative to the fully configured optional Joystick/Z-Control box, you can
obtain a box that includes only:
• The Z-Axis wheel and Switch Panel
• The Z-Axis wheel and Stage Control joystick
Electronics
The Wyko NT9100 system’s electronics include:
• A Power Distribution Unit (PDU) (see Figure 1-13) for sending power to the various
components. The PDU is an external unit that must be located on a stable surface near the Wyko
NT9100 optical profiler.
• An Interface box (see Figure 1-14) for monitoring and controlling the devices within the IMOA.
The Interface box is mounted on a plate attached to the Z-axis column.
Figure 1-13: Back of Power Distribution Unit (PDU)
Interface box
Figure 1-14: Interface Box Mounted on Plate Attached to Z-Axis Column

Optional Vibration Isolation Table
The Wyko NT91000 optical profiler must sit on a vibration isolation table. The vibration isolation
table supplied by Veeco appears in Figure 1-15. If your system does not include this vibration
isolation table, you must provide one yourself.
Figure 1-15: Optional Veeco-Provided Vibration Isolation Table
THE TWO STANDARD MEASUREMENT MODES

The Wyko NT9100 system supports two standard measurement modes—VSI and PSI. These two
measurement modes are described in the sections that follow.
NOTE – Instructions for calibrating your profiler for VSI and PSI modes appear in Chapter
4. Instructions for measuring samples using VSI and PSI modes appear in Chapter 5.
VSI Measurement Mode

In vertical scanning interferometry (VSI), an internal translator scans vertically during the
measurement as the camera periodically records frames. As each point on the surface comes into
focus, the modulation on that point reaches a maximum, then tapers off as the translator passes
through focus. By recording the height of the translator at maximum modulation, the system can
determine the height of each pixel. The maximum scan length for a VSI scan is 10 mm.

VSI, which uses a broadband light source, is effective for measuring objects with rough surfaces, and
those with adjacent pixel-height differences greater than λ/4. However, it yields precision in the
nanometer range, rather than in the subnanometer range, as does PSI.
PSI Measurement Mode

In phase-shifting interferometry (PSI), a mechanical translation system precisely alters the optical
path length of the test beam. Each optical path change causes a lateral shift in the fringe pattern. The
shifted fringes are periodically recorded by the camera, producing a series of interferograms.
Computerized calculations then combine these interferograms to determine the surface height profile.
PSI, which uses a narrowband light source, is typically used to test smooth surfaces (roughness less
than 30 nm), such as mirrors, optics, or other highly polished samples. It is very accurate, resulting in
vertical measurements with subnanometer resolution. However, PSI cannot obtain a correct profile
for objects that have large step-like height changes and thus becomes ineffective as height
discontinuities of adjacent pixels approach one quarter of the used wavelength (λ/4, or about 135 nm
when using a 535-nm filter).
SAFETY FEATURES
Several features of the Wyko NT9100 system ensure operator safety.
Emergency Power Off Button (EPO)

The Wyko NT9100 system is equipped with an EMERGENCY OFF button, located on either the
standard Switch Panel (see Figure 1-11) or on the Switch Panel that is included on the optional
Joystick/Z-Control box (see Figure 1-12). Either of these units may be placed in any convenient and
readily accessible location.
Pressing the EMERGENCY OFF button shuts off AC power to the system devices, excluding the
computer. However, the 24 VDC control circuit in the PDU remains energized.
To repower the system after using the EMERGENCY OFF button, follow the procedures listed under
Re-powering after an Emergency Shutoff on page 2-4.
CAUTION
Use the EMERGENCY OFF button only in case of an emergency.
Power On and Off Switches

The Wyko NT9100 system is equipped with a POWER ON switch and a POWER OFF switch. These
switches are located below and above the EMERGENCY OFF button on the standard Switch Panel
(see Figure 1-11) and to each side of the EMERGENCY OFF button on the Switch Panel that is
included on the optional Joystick/Z-Control box (see Figure 1-12).

Pressing the POWER ON switch provides AC power to all system devices but the computer. (If the
EMERGENCY OFF button is depressed, it must first be released.)
Pressing the POWER OFF switch shuts off AC power to all system devices but the computer.
However, the 24 VDC control circuit in the PDU remains energized.
NOTE – The EMERGENCY OFF button and POWER OFF switch do not turn off the
computer!
SAFETY PRECAUTIONS
IMPORTANT! Environmental data sheets regarding the RoHS compliancy of the Wyko
NT9100 system and the Dell computer that it uses appear in Appendix D of this guide.
The Wyko NT9100 system is designed to minimize potential health and safety hazards during normal
operation and routine maintenance activities. As with any mechanical system that uses electrical
energy and compressed air, it contains some physical and electrical hazards. There are also pinch
point hazards from some of the moving parts. You should be aware of these potential hazards and the
controls used to minimize them. Review this section and contact Veeco if you have any questions on
environmental, health, or safety-related issues associated with the system.
Potential safety hazards associated with the system are clearly identified in this guide. In addition, safety
labels have been placed on the system where there exists a potential for personal injury or damage to
the system. The following table illustrates each label and its text message, and indicates where the label
is used in the system.

Table 1-1: Warning and Safety Labels
Illustration Label Text Where Used

Hazardous PDU: enclosure cover
Voltage Enclosed
Voltage or
current hazard
sufficient to
cause shock,
burn or death.
Disconnect and
lockout power
before servicing.
HAZARDOUS PDU: inside enclosure on each

VOLTAGE DC power-supply cover
ENCLOSED
Voltage or
current hazard
sufficient to
cause shock.
Disconnect
power before
servicing.
Pinch point Standard manual stage and

hazard. Keep optional motorized stage: X
hands clear. platform and Y platform
ONLY authorized System casting: rear

personnel may
service this
equipment. See
manual for safety
information.
N/A. Graphic on System casting: rear

label warns
against non-
compliance with
safe waste
disposal
procedures for
electrical and
electronic
equipment.

SAFETY AND HEALTH HAZARDS
Although the Wyko NT9100 optical profiler has been designed with safety in mind, the system does
contain some inherent potential hazards. Physical hazards associated with operating the equipment
are discussed in this section.
Electrical Hazards
The system uses electrical power up to 600 volts (V) DC and 265 VAC. High voltage or amperage
(current) hazards are sufficient to cause death or serious injury to personnel. The primary hazard
associated with electricity is electrical shock, which occurs when electrical current flows through part
of the human body. Current levels as low as 5 milliamps can cause a painful shock, 10-16 milliamps
can cause loss of muscular control (preventing the victim from letting go of the source of shock), and
75 milliamps can cause heart fibrillation (which can be fatal). Therefore, higher voltage circuits pose
a greater risk of electrical shock because they have more potential energy to cause an electrical
current to flow. However, under the right conditions, even a 30-volt circuit has enough energy to
cause 75 milliamps of current to flow through a person's body, possibly causing heart fibrillation that
could result in death.
In order to minimize the risk of electrical shock, the system should be fully de-energized and locked
out when performing maintenance tasks (see General Lockout/Tagout Procedures on page 1-17).
These tasks may include such activities as replacing fuses or other electrical components. Extreme
caution should be used during troubleshooting operations of the electrical system, as live electrical
circuits are present. Work with live electrical circuits may include such activities as measuring
voltages and current flow during initial set-up or maintenance tasks. ONLY trained service personnel
should perform tasks that require work with live electrical equipment. Factory-authorized personnel
should service all internal electrical components of the system.
Other hazards associated with electricity include fire and arcs or flashes. Fires can be started from the
overheating of an improperly sized conductor or by electrical arcs or flashes, which occur when an
electrical circuit is suddenly short circuited (for example, when a metal screwdriver is accidentally
dropped across live electrical terminals). Arcs and flashes generate extreme amounts of heat and can
emit molten particles, potentially starting a fire or physically injuring persons in the vicinity. Eye
protection should be worn during testing or troubleshooting where live electrical circuits are
involved.
Mechanical Hazards
Mechanical hazards exist in the system wherever moving parts are located, such as slides. These
moving parts often create pinch points—areas where a person's hand or fingers could get caught or
crushed. Moving parts can also create an entanglement hazard if the parts are large enough for part of
a person's body to become entangled within them. Pinch-point injuries usually result in a cut or
crushed finger or hand, but can result in loss of a finger or hand. Entanglement hazards are usually
more serious and more likely to result in loss of a limb, or even death.

Protection against mechanical hazards in the Wyko NT9100 optical profiler is provided in the form
of the measurement head (IMOA) cover and system casting. With one exception, physical guards
have been placed around moving parts to prevent personnel from contacting them. The exception is
the area around and above the optional motorized stage. Mechanical motion in this area is slow
enough, however, to present only a minimal exposure to hazards.
Thermal Hazards
Unlike most other physical hazards, thermal hazards are not eliminated by removing power. Surfaces
may remain hot for up to 30 minutes after removing the heat source. Contact with potentially warm or
hot surfaces or components, such as lamps, motors, and heatsinks may cause skin burns. Allow the
system to cool to ambient temperatures before attempting to remove/service components.
Pressure Hazards
Pressure hazards exist due to the difference in kinetic energy of a gas within a container or piping
system and the surrounding environment. If a sudden breach of a gas line or a pressurized container
were to occur (for example, a gas delivery line bursts), the pressure differential between the gas in the
line and the surrounding atmosphere will cause the gas to be forcefully expelled into the surrounding
atmosphere. This can cause physical injuries due to particles flying outward with extremely high
speed.
The vibration isolation (air) table that is optionally provided with the Wyko NT9100 optical profiler
uses compressed clean dry air (CDA) . The system is designed to use CDA at the typical house-
supplied pressures of 80 psi. The CDA fittings or components of the pneumatic system should be
adjusted only after appropriate release of air-line pressure. As with electrical and mechanical tasks,
maintenance activities involving the air lines should occur only after appropriate pressure lockout
procedures have been implemented (see General Lockout/Tagout Procedures on page 1-17).
INSTALLATION AND MAINTENANCE SAFETY ISSUES

Certain installation activities require attention to special safety hazards in addition to the overall
system hazards discussed in Safety and Health Hazards on page 1-16. The installation of the Wyko
NT9100 system requires connection and adjustment of electricity. If the system includes the optional
vibration isolation table, installation also requires the connection of pressurized air lines. These types
of activities require knowledge and use of lockout/tagout procedures.
Maintenance procedures often present greater hazards to personnel than normal production activities
due to the need to defeat safety features in order to access the equipment. The following sections
present general information on some of the key safety-related procedures or actions that maintenance
personnel should follow when servicing the system.
General Lockout/Tagout Procedures

This section describes general lockout/tagout procedures for electrical systems and pressurized air
lines. Contact your internal safety and health representative for more detailed procedures for your
facility, as well as for training and authorization/certification requirements.

Lockout Procedure
1 Notify all affected and other persons of intended lockout.
2 Turn off the system following the normal shutdown procedure.
3 Open the disconnect switch for the electrical energy source.
NOTE – For the Wyko NT9100 system, removing the power cord from the PDU and from
the AC wall socket, and placing the cord in a secure location, is considered the equivalent of
opening and locking out a disconnect switch.
4 Close the main supply valve for the pressurized air source.
5 Lock and tag the electrical disconnect switch in the OPEN position, and the supply valve in the CLOSED
position, using appropriate lockout/tagout equipment.
6 Dissipate any hazardous stored electrical energy (for example, capacitors capable of holding a hazardous
charge) or residual pressure (for example, opening a bleed valve) following the appropriate dissipation
procedure.
7 Verify that all personnel are clear of the hazard zone.
8 Attempt to restart the equipment. If properly locked out the equipment should not be able to be started.
9 Use a voltmeter and make voltage measurements to verify that all electrical sources have been locked out.
If properly locked out, no voltage should be present. Check the reading on supply line pressure gauges to
verify that no pressure exists within the system. If properly locked out, no pressure should exist.
10 Perform maintenance work.
Returning the System to Operation

1 Verify that all personnel, materials, tools, and test equipment are clear of the hazard zone.
2 Remove the lock and tag from each electrical disconnect switch or air supply valve.
3 CLOSE the electrical disconnect switch to reenergize the equipment. OPEN the air supply valve to
repressurize the equipment.
NOTE – For the Wyko NT9100 system, retrieving the power cord from its secure location
and plugging it into the PDU and the AC wall socket is considered the equivalent of removing
a lockout and closing a disconnect switch.
4 Turn on the system following the normal startup procedure.

5 Notify all affected and other persons that the lockout has been cleared and the equipment is back in
operation.
Electrical Task Classification
Each task involving electrical operations is evaluated for severity and classified according to the
criteria outlined in Table 1-2. These criteria categorize electrical hazards into four types, ranging
from Type 1 (de-energized) to Type 4 (fully energized and exposure required). Lockout/tagout
requirements, including training requirements, are based on the type of hazard present.
• All operator tasks are classified as Type 1 or 2.
• Only qualified service personnel should perform Type 3 or 4 tasks, following established Veeco
service policies.
Table 1-2: Classification of Operator Tasks
Task Type Description

Type 1 Equipment is fully de-energized
Type 2 Equipment is energized. Energized circuits are covered or

insulated.
Type 3 Equipment is energized. Energized circuits are exposed, and

inadvertent contact with uninsulated energized parts is
possible. Potential exposures are no greater than 30 volts rms,
42.4 volts peak, 60 volts DC or 240 volt-amps in dry locations.
Type 4 Equipment is energized. Energized circuits are exposed and

inadvertent contact with uninsulated energized parts is possible.
Potential exposures are greater than 30 volts rms, 42.4 volts
peak, 60 volts DC, or 240 volt-amps in dry locations. Potential
exposures to radio-frequency currents, whether induced or via
contact, exceed certain limits.
NOTE – No routine tasks for the NT9100 optical profiler are classified as Type 4.
Access to the Emergency Off Button

During any troubleshooting or maintenance activities inside the casting or measurement head cover
while the system is operating, the technician should always be able to easily reach the EMERGENCY
OFF button shown in Figure 1-11 and Figure 1-12.
In case of an emergency, the technician can press the EMERGENCY OFF button to stop the system.In
some circumstances, it is advisable to have two service personnel working at the same time on a
system, in order for one person to have access to the EMERGENCY OFF button at all times.

2
BASIC OPERATIONS
This chapter explains the basic operations of your Wyko NT9100 optical profiler and the Wyko
Vision software. It concludes with a list of routine maintenance procedures.
TURNING ON THE WYKO NT9100 SYSTEM
NOTE – Keep the vibration isolation table supplied with compressed air at all times—even
when the Wyko NT9100 system is not in use.
To turn on the Wyko NT9100 system:

1 If the EMERGENCY OFF button on the Switch Panel (see Figure 2-1) or on the optional Joystick/Z-
Control box (see Figure 2-2) is depressed, turn its knob in the direction of the arrows until it pops out.
Power On button
Power Off button
Figure 2-1: Standard Switch Panel
Basic Operations 2-1

Power On
Power Off button
button
Figure 2-2: Switch Panel on the Optional Joystick/Z-Control Box
2 Flip the ON/OFF switch on the back of the PDU to the On position (see Figure 2-3).
On/Off switch
Figure 2-3: Power Switch on Back of PDU
NOTE – If the power to the system has just been turned off, wait several minutes before
turning the power back on to avoid tripping the circuit breaker.
3 Press the green POWER ON button located on the Switch Panel (see Figure 2-1) or on the optional
Joystick/Z-Control box (see Figure 2-2). This provides AC power to all of the components of the Wyko
NT9100 system.
4 Press the power switch on the front panel of the computer.
The computer boots up into Microsoft® Windows XP™. Log on.
IMPORTANT! Allow the system to warm up for 30 minutes before taking measurements.
2-2 Basic Operations

CAUTION
Login accounts to the system must have Windows XP Administrative
Privileges.
CAUTION
The Joystick/Z-Control box may cease to operate after exposure to excessive electrostatic
discharge (ESD). When an ESD strike occurs, the box does not reset itself but instead requires
operator intervention. In such a case, follow these steps:
• Disconnect the USB cable from the computer.

• Disconnect the power cable from the wall outlet.
• Wait five seconds, and then reconnect both cables.
Windows now auto-finds the device’s hardware, and the Joystick/Z-Control box resumes its
normal functioning.
TURNING OFF THE WYKO NT9100 SYSTEM

To turn off the Wyko NT9100 system:
1 Close Vision by selecting File » Exit.
2 Close Windows XP by selecting Start » Shut Down.
3 Press the black POWER OFF button on the Switch Panel (see Figure 2-1) or on the optional Joystick/Z-
Control box (see Figure 2-2). This shuts off power to all devices.
4 Flip the ON/OFF switch on the back of the PDU to the Off position (see Figure 2-3).
5 If there is risk of system damage or personal injury, press the EMERGENCY OFF button instead of the POWER
OFF button.
CAUTION
Because the EMERGENCY OFF button does not shut down the computer,
there is no risk of data loss or corruption. However, Veeco recommends that
you use the EMERGENCY OFF button ONLY when there is a risk of system
damage or personal injury.

RE-POWERING AFTER AN EMERGENCY SHUTOFF
To re-power the system after an emergency shutoff:
1 Release the EMERGENCY OFF button on the Switch Panel (see Figure 2-1) or on the optional Joystick/Z-
Control box (see Figure 2-2) by turning its knob in the direction of the arrows until it pops out.
2 Follow the procedures listed under Turning On the Wyko NT9100 System on page 2-1.
OPENING VISION
The Vision software is a menu-driven application with a customizable toolbar. To open the software,
double-click the Vision icon on the desktop. For instructions on customizing the menus and
toolbar, see Appendix A.
CLOSING VISION
CAUTION
It is very important to close both Vision and Windows XP before turning off
the computer. If the software is not shut down properly before the computer
is turned off, files and data may be corrupted or lost.
To close Vision, select File » Exit. The software prompts you to save any open datasets and then
exits.
SYSTEM RECOVERY
In the event that Vision or Microsoft Windows XP crashes, follow these standard guidelines for
Windows recovery:
• If Vision shuts itself down, restart Windows XP, and then reopen Vision.
• If Vision locks up but you still retain mouse control, select File » Exit to exit the program. Restart
Windows XP and then Vision.
• If the program locks up and mouse control is unavailable, reboot the computer using
CTRL+ALT+DEL, and then select Shutdown.
• If these options do not work, press the POWER button on the computer.
• As a last resort, turn off the system power and restart the computer.

USING VISION ONLINE HELP
Online assistance in using Vision with your profiler is immediately available through the Help menu,
or whenever a help button is available on a specific feature.
To display Help in the Vision software, select Help » Contents, or press the F1 key on the keyboard.
This opens the Help Finder, which contains three tabs:
• Contents lets you browse the Table of Contents. Double-click on a “book” (major heading) to
view its “pages” (individual topics). Double-click on a page to view the topic.
• Index lets you view search terms that can help you locate topics. Type in the first few letters of
the word or phrase you are looking for. The scrolling list displays that portion of the alphabetical
display. Double-click on a topic in the list to display it.
• Find lets you search for any word in the Help system. The first time you use the Find function
during each session, Help takes a few seconds to build a list of available words. Type the word
you want to find. Select words to refine your search from the middle pane. Then double-click
on a topic in the bottom pane to view the information.
USING THE INTENSITY WINDOW

Vision’s Intensity window allows you to set the light intensity to obtain proper focus and make
measurements. It also enables you to control the Z-axis movement of the measurement head (IMOA),
as well as the X/Y movement of the motorized stage. In addition, you can select different objectives,
FOV lenses, and filters from the Hardware menu in the Intensity window (see Figure 2-4). For more
information, see Controlling the Z-Axis Movement on page 2-8, Controlling the X/Y Movement of
the Motorized Stage on page 2-11, and Basic Sample Measurement Procedures on page 5-1.
Figure 2-4: Intensity Menu
Controlling Light Intensity

NOTE – If you want the Intensity window to remain visible (that is, on top of any other
windows you open in Vision), click the Pin button at the upper right corner of the
window. The symbol then changes to . Click the button again for normal window
behavior.

Open the Intensity window by clicking the Intensity button on the toolbar.
Figure 2-5: Default Intensity Window
You can control light intensity by:

• Moving the slider bar at the bottom of the Intensity window.
• Scrolling the mouse wheel.
• Pressing the PAGE UP or PAGE DOWN key.
• Press the HOME or END key to go to 0 or 100% respectively.
For more information, see Basic Sample Measurement Procedures on page 5-1.
Using the Intensity Window Menus

The following menus are available from the Intensity window menu:
View Menu
• Show Intensity Profiles Superimposes cross-sections of the intensity in the X and Y directions.
• Show Crosshairs Superimposes crosshairs for alignment purposes.
• Show Autofocus Position Shows the position in the field-of-view at which the system will
focus during an Autofocus operation. Right-click at a new location to change the position. A
thin line designates the Fine Camera Autofocus size, while a thick line designates the Coarse
Camera Autofocus size.
• Zero X/Y Axes Allows you to temporarily zero the X and Y axes to make the movement
positions appear relative to the current one. This zero adjustment does not affect actual stage
position, but only what is displayed in the Intensity window. Example: Zero the X and Y axes

to make it easy to move to a sample that is only 0.250 mm from the current sample in the field
of view.
• Zero Z Axis Allows you to temporarily zero the Z axis to make the movement position appear
relative to the current one. This zero adjustment does not affect actual position of the optical
assembly, but only what is displayed in the Intensity window. Example: Zero the Z axis to
make it easy to adjust the fringes for a sample that is only 0.150 mm from the current Z- location
in the field of view.
• Options Opens the Intensity Options dialog box (see Figure 2-6), which contains options for
determining:
• The size and brightness of the Intensity window
• The magnification objective that will use the corresponding stage speeds
• The speed and units of your adjustments to the positions of the profiler's stage, measurement
optics, and IMOA. This is the maximum speed as determined by the fifth speed button in the
upper right corner of the Intensity window. Speeds are objective-independent.
• The units in which the real-time positions of the stage, measurement optics, and IMOA are
displayed
• The size of the dead zone (the unresponsive area around the crosshairs)
• The color of Intensity window overlays such as the crosshairs
Figure 2-6: Intensity Window Options Dialog Box

Options Menu
• AutoIntensity Select this to direct the system to automatically set the best intensity level.
Hardware Menu
• Turret Select an objective The system moves to the selected objective.
• Filter Select a filter. The system switches to the selected filter.
• FOV Select a field-of-view lens. The system rotates to this optic.
NOTE – You can click the Keyboard button in the lower right corner of the Intensity
window to use the four arrow keys on the keyboard to control the X/Y movement of the
optional motorized stage. If your system is equipped with the optional Joystick/Z-Control box,
you can also control the X/Y movement of the stage by using the joystick.
CONTROLLING THE Z-AXIS MOVEMENT

You can control Z-axis movement by using the standard mouse cursor or by rotating the Z-axis wheel
on the optional Joystick/Z-Control box.
Controlling Z-Axis Movement with the Mouse Cursor

Z-axis height refers to the distance of the IMOA from the sample. The Profiler Controls at the bottom
of the Intensity window allow you to use the mouse cursor to adjust this distance by moving the
Z-axis column on which the IMOA is mounted (see Figure 1-3).
To set the Z-axis position of the IMOA using the mouse cursor:
1 Open the Intensity window by clicking the Intensity button on the toolbar
2 Click the Profiler Controls icon in the lower right corner of the Intensity window to display the
Profiler Controls at the bottom.
3 Click one of the five Speed buttons in the upper right corner of the Intensity window to select the relative
speed at which you want to move the IMOA.
WARNING
The faster the speed settings, the more easily the IMOA can be crashed into the sample.
Adjust the Z-axis position SLOWLY to avoid damage to the profiler or the sample.
4 Use the mouse to click and drag above (further from sample) and below (closer to sample) the horizontal
bar on the right-most edge of the Intensity window. A traveling red arrow, along with the real-time Z position
in the lower left corner, indicates the current height of the IMOA (see Figure 2-7).
5 When the IMOA is at the desired Z-axis position, release the mouse button to end the adjustment.

Figure 2-7: Intensity Window Showing Z-Axis Adjustment Cursor
Controlling Z-Axis Movement with the Joystick/Z-Control Box

You can use the Z-Axis wheel on the optional Joystick/Z-Control box to adjust the Z-axis height.
Press the FAST button above the wheel to obtain high-speed Z-axis focusing (see Figure 2-8).
WARNING
The faster the speed settings, the more easily the IMOA can be crashed into the sample.
Adjust the Z-axis position SLOWLY to avoid damage to the profiler or the sample.

Fast button
Z-axis wheel
Figure 2-8: Z-Axis Wheel on the Optional Joystick/Z-Axis Control Box
CONTROLLING THE X/Y MOVEMENT OF THE

MANUAL STAGE
After placing your sample on the manual stage, you may need to move the stage platform to bring
your feature of interest into the correct position under the objective. As shown in Figure 2-9, you take
the following actions to control the X/Y translation of the manual stage:
• Pinch and slide the coarse-positioning clip on the front of the platform for rapid X movement.
• Pinch and slide the coarse-positioning clip on the right side of the platform for rapid Y
movement.
• Turn the fine-positioning knob on the front of the platform for fine X movement.
• Turn the fine-positioning knob on the right side of the platform for fine Y movement.

Turn this knob
for fine Y
movement.
Pinch and slide

this clip for rapid
X movement. Pinch and slide
this clip for rapid Y
movement.
Turn this knob for fine X

movement.
Figure 2-9: Controls on the Manual Stage
CONTROLLING THE X/Y MOVEMENT OF THE

MOTORIZED STAGE
You can control the X/Y movement of the optional motorized stage by using the standard mouse
cursor or the optional Joystick/Z-Control box.
Controlling X/Y Movement with the Mouse Cursor

To position the motorized stage by moving the mouse cursor:
1 Open the Intensity window by clicking the Intensity button on the Vision toolbar.
2 Click the Profiler Controls icon in the lower right corner of the Intensity window to display the
Profiler Controls at the bottom.
3 Click the X-Y button in the lower right corner of the Intensity window to engage the mouse cursor
movement control for the stage.
4 Click one of the five Speed buttons at the bottom of the window to select the relative speed at which you
want to move the stage.
5 Place the cursor in the window, then click and drag the mouse in the direction you want to move the stage.
The farther you move the cursor from the center of the crosshairs, the faster the stage moves (within the

range determined by the Speed button that you clicked). A traveling red control arrow, along with the real-
time X/Y position indicates the current position of the stage (see Figure 2-10). Follow these positioning
guidelines:
• You can adjust the position of the stage in both the X and Y directions.
• The direction of movement depends on the area over which you are moving the mouse cursor.
• The velocity of movement depends on the distance of the cursor from the center of the Intensity window,
as well as on the selected speed button.
• As you make your adjustments, the location of the sample (stage) changes across the field of view.
6 When the stage is at the desired position, release the mouse button to end the adjustment.
Figure 2-10: Intensity Window Showing the X-Y Control Arrow
NOTE – The X and Y positions shown in the Intensity window are relative positions. That is,
when Vision is first opened, position 0, 0 is assigned to the current position of the device,
wherever that may be. Subsequent positions are shown as relative to the 0, 0 position.
A stage initialization homes the stage to its home limits in X and Y. This becomes the new
zero position. If you double-click in the field of view, that point becomes the new center of
focus.
TIP – You can double-click in the Intensity window to center a feature on the crosshairs.

Controlling X/Y Movement with the Joystick/Z-Control Box
You can use the joystick on the optional Joystick/Z-Control box to adjust the X/Y movement of the
motorized stage. Press the FAST button in the upper left corner to obtain high-speed stage movement
(see Figure 2-11).
Fast button
Stage Control
joystick
Figure 2-11: Stage Control Joystick on the Optional Joystick/Z-Control Box
CONTROLLING THE TIP/TILT MOVEMENT OF EITHER

STAGE
Tip/Tilt knob
(left to right)
Tip/Tilt knob
(front to back)
Figure 2-12: Profiler Base with Tip/Tilt Knobs

You turn the Tip and Tilt knobs on the profiler base (see Figure 2-12) to find alternating bands of
light called fringes (see Figure 2-13). You then use these Tip and Tilt knobs to finely adjust the
fringes until they are of the optimal size and position for your type of sample and measurement. Often
this means obtaining the “nulled” position—that is, reducing the fringe pattern to only a few fringes
(see Figure 2-13) or one single large fringe (see Figure 2-14).
NOTE – The Tip/Tilt button on the optional Joystick/Z-Control box does not operate with the
Wyko NT9100 system.
Figure 2-13: Approximately Three Fringes in Close-to-Nulled Position

Figure 2-14: Nulled Fringes on a Step
CHANGING OBJECTIVES ON THE MOTORIZED TURRET

The motorized turret, which attaches to the bottom of the IMOA, holds up to four objectives and
controls their positioning. Because all of your objectives are permanently installed on the turret,
changing them requires only a single software setting.
To change objectives on a system that includes the standard motorized turret:
1 In Vision, select Hardware » Measurement Options. The Measurement Options dialog box appears with
the Measurement Options tab displayed by default.

Select an
objective
here
Figure 2-15: Measurement Options Tab of the Measurement Options Dialog Box
2 In the Basic Setup section of the Measurement Options tab, select the objective that you want to use
from the Objective list. The turret automatically rotates to that objective.
3 Click OK.
NOTE – If you bump the turret off position by hand, you must re-initialize the turret by
clicking the Initialize Turret button on the toolbar.

WORKING WITH THE SINGLE-OBJECTIVE ADAPTER
If your system is equipped with the optional single-objective adapter (see Figure 2-16), you must
manually install and remove it. You also must manually install an objective in the adapter.
Figure 2-16: Single Objective Adapter
Installing the Single-Objective Adapter

To install the single-objective adapter on the bottom of the IMOA:
1 Use the Profiler Controls in the Intensity window or the Z-axis wheel on the optional
Joystick/Z- Control box to raise the Z-axis column to its highest point, as described in
Single Objective Adapter on page 2-17.
CAUTION
The objectives are very sensitive. Do not touch the optical surface on the
bottom of an objective.
2 Hold the bottom of the adapter securely. If the adapter contains an objective, be careful not to touch the
objective.
3 Line up the line on the bottom of the single-objective adapter with the one on the IMOA (see Figure 2-17).
4 Turn the adapter counterclockwise (as viewed from below).

Align these two lines,
and then turn the
adapter
counterclockwise.
Counterclockwise
Figure 2-17: Installing the Single-Objective Adapter
5 Continue turning until the line on the adapter is centered at the front of the IMOA.
6 If the adapter that you just installed contains an objective, select that objective in Vision by following step 6
through step 8 in Changing an Objective in the Single-Objective Adapter on page 2-19.
Figure 2-18: Single-Objective Adapter Installed on the IMOA
Removing the Single-Objective Adapter

To remove the single-objective adapter from the bottom of the IMOA:
1 Use the Profiler Controls in the Intensity window to raise the Z-axis column to its highest point, as
described in Controlling the Z-Axis Movement on page 2-8.

CAUTION
The objectives are very sensitive. Do not touch the optical surface on the
bottom of an objective.
2 Hold the bottom of the adapter securely. If the adapter contains an objective, be careful not to touch it.
3 Turn the adapter clockwise (as viewed from below) until the line on it is aligned with the line on the IMOA
(see Figure 2-17).
4 Carefully lower and remove the adapter.
5 Put the adapter in a safe place. If it contains objective, set it down with the objective projecting upward.
CAUTION
Never set the adapter down with the objective resting on a surface. This can
damage the delicate objective.
Changing an Objective in the Single-Objective Adapter

To change the objective in the single-objective adapter that is already installed on the bottom of the IMOA:
CAUTION
The objectives are very sensitive. Do not drop or hit them, or severe damage
could occur. Do not touch the optical surface on the bottom of an objective.
1 Use the Profiler Controls in the Intensity window to raise the Z-axis column to its highest point, as
described in Controlling the Z-Axis Movement on page 2-8.
2 If an objective is currently installed in the adapter, carefully unscrew and remove it.
3 Place the objective in its protective case for storage.
4 Remove the replacement objective from its protective case.
CAUTION
Do not overtighten the objective. This can cause the optics in the objective
to shift.
5 Insert the replacement objective into the single objective adapter and screw it in snugly.

Select an
objective
here
7 In the Basic Setup section of the Measurement Options tab, select the objective that you just installed in
the single-objective adapter from the Objective list.
8 Click OK.
IMPORTANT! Always check the objective value when using a single-objective adapter.

CHANGING THE FOV LENS
By using an FOV lens in combination with an objective, you can increase or decrease the overall
magnification of the system. Because the FOV lenses are mounted on a motorized carousel inside the
IMOA (see Figure 1-2), changing from one to another requires only a single software setting.
To change the FOV lens:
Select an
FOV lens
here
2 In the Basic Setup section of the Measurement Options tab, select the FOV lens that you want to use
from the FOV list. The carousel automatically rotates to that FOV lens.
3 Click OK.

ROUTINE SYSTEM MAINTENANCE
If properly maintained, your Wyko NT9100 system will seldom need repairs—especially if you
follow the procedures listed below.
• While you are operating the system, occasionally check all the cables to be sure that they are
firmly connected. Loose connections can result in anomalous performance.
• Handle the objectives with extreme care. When they are not in use, store them in their protective
cases.
• Be careful when cleaning the instrument housing and components. Unless otherwise instructed
by a Veeco Customer Service technician, limit your cleaning to dust removal with a lens tissue
or oil-free, clean, dry compressed air.
• When your system is not in use, protect the keyboard, monitor, and stage areas with plastic dust
covers.

3
CONFIGURATION FILES AND
MEASUREMENT OPTIONS
This chapter tells you how to work with configuration files and set the measurement options that they
contain. Other settings that are stored in configuration files—including processed options, analysis
settings, graphical display file preferences, and database specifications—are discussed elsewhere in
this guide.
ABOUT CONFIGURATION FILES

Configuration files, which have an .ini extension, tell Vision how to acquire, analyze, and display
data for a particular type of measurement. You can create a configuration file for any type of
measurement and recall it later to perform a similar measurement. By default, configuration files are
stored in C:\Program Files\Wyko\Vision\Config.
CHANGING THE STARTUP CONFIGURATION FILE
CAUTION
The Wyko.ini and Vision.ini files contain information about the calibration
numbers and hardware available for your system. These files should never
be deleted, altered, or overwritten.
When you open Vision, the software opens two configuration files: the Wyko.ini file and the startup
configuration file, which by default is Vision.ini.
To suit your particular measurement needs, you may want to change the default startup configuration
file to one that contains settings for the for the measurements that you most often make.
Configuration Files and Measurement Options 3-1

To change the startup configuration file:
1 Open Vision.
2 If you have already created the configuration file that you want to set as the default, select File » Set
Startup Configuration. In the Select a Startup Config File dialog box (see Figure 3-1), select the file you
want to use as the default, and then click Open.
3 If you have not already created the configuration file that you want to set as the default, follow the
instructions in Creating and Saving a New or Modified Configuration File on page 3-3. After you have saved
the file, select File » Set Startup Configuration. In the Select a Startup Config File dialog box (see
Figure 3-1), select the file that you just created, and then click Open.
Figure 3-1: Select a Startup Config File Dialog Box
OPENING AN EXISTING CONFIGURATION FILE

To open an existing configuration file other than the default startup file:
1 Open Vision.
2 Click the Open a configuration file button on the toolbar or select File » Open Configuration. The
Open a Config File dialog box appears (see Figure 3-2).
3-2 Configuration Files and Measurement Options

Figure 3-2: Open a Config File Dialog Box
3 Select the desired configuration file, and then click Open.
CREATING AND SAVING A NEW OR MODIFIED

CONFIGURATION FILE
To take a measurement for which you have no existing configuration file, you must manually set the
options that control the various aspects of that measurement, including the measurement options,
processing options, and display options.
To create and save a new or modified configuration file:
1 Open a configuration file that already contains many of the settings that you want to use for your new or
modified configuration file. For instructions, see Opening an Existing Configuration File on page 3-2.
2 Make your modifications in the Vision dialog boxes. For instructions on making the settings in the
Measurement Options Dialog box, see Setting the Measurement Options on page 3-4. For instructions
on making the other settings, see the Table of Contents or Index of this guide.
3 Click Save a configuration file on the toolbar or select File » Save Configuration. The Save as
dialog box appears (see Figure 3-3).

4 To create a new configuration file, enter a new name. To modify the existing configuration file, use the
existing name.
5 Click Open. Vision saves the file and automatically provides the .ini extension.
NOTE – For easy retrieval, store all your configuration files in one place. The C:\Program
Files\Wyko\Vision\Config directory is convenient, and it is the default location.
Figure 3-3: Save As Dialog Box for Configuration Files
SETTING THE MEASUREMENT OPTIONS

Most of the measurement parameters in a configuration file are set in the Measurement Options
dialog box, which you open by clicking the Measurement Options button on the toolbar or by
selecting Hardware » Measurement Options (see Figure 3-4).
As you make your selections in the Measurement Options dialog box, bear the following points in
mind:
• To display the Intensity window, click Intensity in the bottom left of the dialog box.

• To verify the calibration of your system or direct Vision to perform an autocalibration, click
Calibrate in the bottom left of the dialog box.
• After making all your selections on the various tabs, click OK in the bottom right of any tab to
accept the settings.
Settings on the Measurement Options Tab

The Measurement Options tab of the Measurement Options dialog box contains the basic
measurement information and controls the measurement hardware.
Figure 3-4: Measurement Options, Measurement Options Tab

NOTE – The tabs in your Measurement Options dialog box may not exactly match those
shown in this chapter, depending on your installed options.
Adjust the following on the Measurement Options tab:

1 Under Basic Setup, select a Measurement Type for your measurement:
• If your sample is rough or has large height variations (higher than wavelength divided by four), select VSI.
Typical VSI samples include paper, step heights, plastics, and metals. For more information, see VSI
Measurement Mode on page 1-12.
• If your sample is extremely smooth and has no large height variations, select PSI. Typical PSI samples
include optical glass, mirrors, and super-polished metals. For more information, see PSI Measurement
Mode on page 1-13.
• Select Intensity to acquire an instantaneous single frame, which is often used to quickly check uniformity
on the sample area.
2 Select a Resolution: Full array (every pixel), Half array (every other pixel), or Quarter array (every fourth
pixel). The resolution determines how many pixels in the array are used for measurement analysis. A
minimum resolution setting results in a faster analysis time but can also produce a less detailed
measurement. A higher resolution provides greater detail but may increase the analysis time.
3 Choose an Objective from the menu. Up to six objectives can be available. (Although only four objectives
fit on a turret, you can obtain single-objective adapters from your Veeco Customer Service representative.)
Base your choice of objective on the size of the area or feature you want to measure and the amount of
detail you want to see. Lower magnification objectives yield a larger measurement area with less detail;
higher magnification objectives provide a smaller measurement area with greater detail. After you select an
objective, the system automatically rotates to it.
NOTE – Be certain that the objective you select from the menu matches the objective in use
on your system. If not, the lateral dimensions of the measurement will be incorrect.
4 Choose an FOV (Field-of-View) lens from the menu. The FOV lenses give you a greater range of
magnification by increasing or decreasing the overall magnification of the system. After you select an FOV
lens, the system automatically rotates to it.
NOTE – The Effective Magnification and Effective Field of View fields show the values
based on the current objective and FOV lens chosen. The system automatically calculates
these values each time the objective or FOV lens is changed.
5 Under Options, select any or none of the following check boxes:

• Auto Focus (see Settings on the Autofocus Tab on page 3-16)
• Automation (see Settings on the Automation Tab on page 3-21)
• Any installed optional measurement packages, such as the Vision Stitching Package (see Appendix C).
You then can configure the settings for each of these options on its tab in the Measurement Options
dialog box.
6 Select the Detector Mask check box, and then click Edit Mask if you want to permanently eliminate
certain regions from the measurement of your sample (see Detector Mask on page 6-12).

Settings on the VSI Options Tab
The VSI Options tab (see Figure 3-5) contains the information that Vision requires to perform a VSI
measurement (see VSI Measurement Mode on page 1-12). This tab is available only when VSI (Infinite
Scan) is selected as the Measurement Type on the Measurement Options tab (see Settings on the
Measurement Options Tab on page 3-5).
Figure 3-5: Measurement Options, VSI Options Tab with Dual Scan Selected

Adjust any or all of the following on the VSI Options tab:
1 From the scan speed list in the Scan Options section, select the desired scan speed for your VSI
measurement.
ABOUT THE SCAN SPEED — Your selection in the scan speed list determines the speed-
to-resolution ratio of the system. The longest measurement time, which is 1X, provides the
highest resolution. In contrast, a measurement time of 3X provides less vertical resolution
(approximately three times less, although this depends on the sample) but faster
measurements.
2 Do one of the following:

• Click the Single Scan button to direct the system to make a single scan for the measurement. Then adjust
the various settings in the Scan Options section to determine the scan parameters.
• Click the Dual Scan button to divide the measurement scan into two sections (see Figure 3-6). After you
click the Dual Scan button, the Secondary Scan section appears on the VSI Options tab, allowing you
to adjust your settings for the secondary scan.
ABOUT THE DUAL SCAN OPTION — When the Dual Scan option is used, the Primary Scan
is the first of the two scans, while the Secondary Scan is the second part of the vertical
movement. Typically, this option is used to eliminate the measurement a middle height zone,
where information is not needed. For example, when measuring a solder bump, you may want
to measure near the base to find its diameter and near the peak to find the height. Because
the information in between is unnecessary, skipping the unneeded zone shortens the overall
scan time.
Figure 3-6: VSI Dual Scan Diagram

3 Click the Ramp Intensity button to gradually change the light intensity for a single-scan measurement. In
the Ramp Intensity dialog box that appears, enter the ramp start and stop, along with the beginning and
ending intensity percentages.
ABOUT THE RAMP INTENSITY OPTION — The Ramp Intensity option is typically used to
change light intensity throughout a scan to compensate for darker areas in the sample—for
example, when scanning an object with a deep trough.

4 Select the Return Scanner Position check box to cause the scanner return to a given location (which is
different from the start of the scan) at the completion of the current scan. After you make this selection, do
the following:
a. In the Based on % of pixels field, enter the percentage of pixels to be used to calculate the height to
which the system will return the scanner. For example, a 50% setting returns the scanner to the position
at which half the pixels have reached their maximum modulation. A 70% value returns the scanner to a
lower position, where more pixels have reached their maximum modulation.
b. Click the From Top or From Button button to direct the system to return to the fringe position relative to
the top or bottom of the previous scan.
ABOUT THE RETURN SCANNER POSITION OPTION — This option is most useful in
helping minimize the required scan length in automation or stitching when the shape of the
sample is known. For example, if you know that a sloped or curved surface will always be
lower as the stage moves to the right, you can select the Return Scanner Position check
box to minimize both the backscan and scan length. Based on a detailed pixel histogram, this
option returns the scanner to a height that is determined from the modulation envelope. The
scanner height is set as a pixel percentage from either the bottom or top of the feature of
interest.
5 In the Averaging section, do the following:

• Select the On check box to take multiple, same-parameter scans or measurements of the same object and
average them together to produce one representative dataset.
• In the Number field, enter the number of measurements to be performed and averaged at each
measurement location.
ABOUT THE AVERAGING OPTION — When this option is selected, the system combines
several consecutive surface measurements from one location to obtain a final single result.
Such averaging helps lower the noise in the measurement. If the noise that is present is
random (as is often the case in stable environments), the noise level goes down by the square
root of the number of averages. Typically , averaging 4 - 9 measurements produces noticeably
better results on smooth surfaces. Averaging beyond this number often ceases to produce
benefit because minor environmental shifts create non-random noise over those time scales,
reducing any overall benefit. To determine the best number of measurements to average for
a given environment, measure the SiC super-smooth reference mirror; log the Ra, Rq, and Rz
for various averages; and then determine where the minimum occurs.
6 In the Reference section, do the following:

• Select the Subtract check box to use a reference file to map slight imperfections in your scan and subtract
them from the final measurement.
• Click Generate to open a dialog box that allows you to enter number of Locations for the system to
average and the Num Averages for the system to perform at each location when it generates the
reference file (see Figure 3-7).
• Select the Autofocus check box if you want the system to automatically set best focus before generating
the reference file.

Figure 3-7: Reference File Dialog Box
7 In the Primary Scan section, do the following:
• Enter a value in the Backscan field. The backscan is distance that the system moves backward before
beginning a measurement scan. The backscan should be large enough to account for the greatest
possible variation in feature height, thus ensuring that even the tallest features will be scanned. The larger
the backscan, however, the longer the scan time.
• Enter a value in the Length field to specify the vertical length that the system will scan during a
measurement. For example, with the settings in Figure 3-5, the translator will move up 15 µm (without
measuring), and then measure during the downward 40 µm scan (15 µm from the Backscan setting and
25 µm from the Length setting) during the primary scan portion of the measurement. To select the length
value, estimate the peak-to-valley height of the feature that you are measuring, and then set the length
10% to 20% higher to ensure that the fringes are completely gone from the Intensity window at the
conclusion of the scan.
• Enter a percentage value in the Modulation Threshold field to determine the acceptable signal-to-noise
level for which a given pixel is considered valid. Data points that do not meet the modulation threshold are
marked as invalid and are not considered for analysis. Follow these guidelines:
• If you lower the modulation threshold too much, poor-quality data points will be considered.
• If you raise the modulation threshold too much, high-quality data points will be eliminated.
• If you are measuring an exceptionally rough sample, decrease the minimum modulation threshold to
avoid having too many data points excluded from the analysis.
• If you are measuring an exceptionally smooth, reflective sample, increase the modulation threshold to
10%.
ABOUT THE MODULATION THRESHOLD — This parameter is a signal-to-noise

discriminator that determines whether the data of a pixel is considered valid or not according
to its fringe modulation level. When the maximum modulation level of a correlogram is higher
than this threshold, the data of that pixel is considered valid. If the peak modulation level is
less than this threshold, the data of that pixel is marked invalid. Data points that are marked
as invalid are not considered during the VSI map analyses and are not displayed. For a
mirrored surface, the modulation threshold can be as high as 35%. For rough surfaces with
Ra values less than 500nm, however, modulation thresholds on the order of 2% are
necessary to measure a majority of the data. In summary, higher values lead to more
repeatable measurements on complex or rough surfaces but at the cost of the number of
points where the surface is calculated.
• Select the Force Intensity check box to direct the system to force the intensity to the exact value that you
enter. When this check box is cleared, the measurement is taken with the intensity level that is currently
set in the Intensity window.

• Select a filter to be used in the primary scan from the Primary Filter list. Follow these selection guidelines:
• The VSI filter uses a combination of green and white LED illumination. It provides the most intensity
and is suitable for most VSI measurements. The fringe envelope produced with this light is the
narrowest.
• The PSI High Mag filter is a 40-nm band-pass green LED centered near 535 nm. Less light is passed
with this filter, but the fringe envelope is larger. Although it is normally used for PSI measurements,
you can use it for VSI measurements of greater than 3X speed.
• The PSI Low Mag filter is a 10-nm band-pass green LED centered near 535 nm. This filter passes the
least light, but produces the largest fringe envelope. Use this filter for extremely rough or nonreflective
surfaces.
• Default automatically applies the filter most commonly used with the current settings. By not using the
default setting, you can apply a filter in a “nonstandard” mode for customized results—for example,
VSI with a red filter on a rough sample. (You can set custom defaults by selecting Hardware »
Hardware Setup from the menu.)
8 If you clicked the Dual Scan button, make your settings in the Secondary Scan section. These settings
are identical to those in the Primary Scan section with these exceptions:
• There is no backscan associated with the secondary scan. Instead, you designate the distance below the
“zero” point (the location the translator begins when the measurement is initiated) at which the secondary
scan will begin.
• The Start setting determines where the translator will begin the secondary scan. This setting should be at
least 10 µm greater than the Length setting on the primary scan.
9 In the Autoscan section, use the following settings to direct the system to shorten the measurement time
by stopping the measurement after a specified number of pixels:
• Select the Enabled check box.
• In the Percent Modulated field, enter the desired percentage of pixels that must modulate before the
scan ends.
• In the Post-scan Length field, enter the length that the scan should continue after the specified
percentage of pixels have modulated.
ABOUT THE AUTOSCAN OPTIONS — If 0 (zero) is entered in the Post-scan Length field,
the scan stops when the percentage of pixels specified in the Percent Modulated field is met
or when the end of the normal VSI scan length is reached, whichever occurs first. If a length
value is entered in the Post-scan Length field, the scan stops when that length is reached.
Any unmodulated pixels appear black in the output display (assuming that black was selected
as the background color).

Settings on the PSI Options Tab
The PSI Options tab contains the information that Vision requires to perform a PSI measurement
(see Figure 3-8). This tab is available only when PSI is selected as the Measurement Type on the
Measurement Options tab (see Settings on the Measurement Options Tab on page 3-5).
Figure 3-8: Measurement Options, PSI Options Tab

Adjust any or all of the following settings on the PSI Options tab:
1 In the Averaging section, select the On check box to average several data readings in the same location
to obtain a single final result. The Number box allows you to specify how many readings Vision makes to
calculate the final averaged measurement.
ABOUT THE AVERAGING OPTION — When this option is selected, the system combines
several consecutive surface measurements from one location to obtain a final single result.
Such averaging helps lower the noise in the measurement. If the noise that is present is
random (as is often the case in stable environments), the noise level goes down by the square
root of the number of averages. Typically , averaging 4 - 9 measurements produces noticeably
better results on smooth surfaces. Averaging beyond this number often ceases to produce
benefit because minor environmental shifts create non-random noise over those time scales,
reducing any overall benefit. To determine the best number of measurements to average for
a given environment, measure the SiC super-smooth reference mirror; log the Ra, Rq, and Rz
for various averages; and then determine where the minimum occurs.
2 Enter a value in the Modulation Threshold field to determine the acceptable signal-to-noise level for
which a given pixel is considered valid. Data points that do not meet the modulation threshold are marked
as invalid and are not considered for analysis. Follow these guidelines:
• For most PSI measurements, a modulation threshold value of 7% or higher is recommended.
• If you lower the modulation threshold too much, poor-quality data points will be considered.
• If you raise the modulation threshold too much, high-quality data points will be eliminated.
• If you are measuring an exceptionally rough or poorly reflective sample, decrease the minimum
modulation threshold to avoid having too many data points excluded from the analysis.
• If you are measuring an exceptionally smooth, reflective sample, increase the modulation threshold to from
10 to 35%.
ABOUT THE MODULATION THRESHOLD — This parameter is a signal-to-noise

discriminator that determines whether the data of a pixel is considered valid or not according
to its fringe modulation level. When the maximum modulation level of a correlogram is higher
than this threshold, the data of that pixel is considered valid. If the peak modulation level is
less than this threshold, the data of that pixel is marked invalid. Data points that are marked
as invalid are not considered during PSI map analyses and are not displayed. For a mirrored
surface, the modulation threshold can be as high as 35%.
3 In the Vibration Detection section, select the On check box and enter a Threshold value to direct Vision
to automatically invalidate measurements that are subjected to excessive vibration. If the vibration exceeds
the Threshold value, the test will be invalidated. The threshold value is usually between 25 and 40; higher
numbers allow for greater amounts of vibration. Note that you can turn on the Vibration Detection function
and set a low value (such as 1.0) to assess the system’s ambient vibration.
4 In the Intensity section, select one of the options listed below. If both boxes are cleared, Vision uses the
intensity this is currently set in the Intensity window.
• Select the Check check box to direct Vision to verify that the intensity value is correct before each
measurement. If there is any saturation present when the measurement is taken, Vision will lower the
intensity and repeat the measurement. This process will be repeated until no saturation is present in the
measurement. (Vision will not increase the intensity if the light level is too low.)

• Select the Force check box to direct Vision to use the intensity value you specify. When the Force check
box is selected, the % field appears. Enter the desired intensity setting in the % field.
5 In the Phase UnWrapping section, select the integration algorithm to be used to eliminate phase step
errors produced in the phase-calculation algorithm. The algorithm options are described after the note and
illustration.
NOTE – Since the optical path difference between two fringes is equivalent to 2π in phase,
or one wavelength, the maximum vertical distance the software can resolve between adjacent
pixels is 1/4 wavelength (approximately 135 nm). If a surface has shape larger than 135 nm,
integration errors (2π jumps) in the reconstructed surface plot may occur (see Figure 3-9).
Integration Errors (2π jumps) on a spherical surface
Figure 3-9: Profile of a Spherical Surface with Integration Errors

Chose from the following Phase UnWrapping options to remove the 2π jumps from the measurement:
• Standard is the default method. It produces reliable data for most surfaces. With this method, Vision
integrates the data by area. If a surface cannot be integrated between two discontinuous data points, such
as spikes, integration errors may occur and propagate from the discontinuity to other regions. Use this
method on samples that are very smooth and reflective, or that do not exhibit any data dropout.
• Enhanced is similar to the Standard method, but pixels that might give rise to integration errors are
discarded from the calculation. This helps minimize integration errors at the expense of including fewer
valid data points. Use this method for samples with small regions of data dropout.
• Roughness Filtered identifies regions of data that might give rise to integration errors and eliminates
them from the calculation according to the slope of the region in question. This is the most robust
algorithm, but requires the most calculation time. This method should be used for “noisy” measurements
or rough samples.
• Planar Surface corrects the height of individual pixels based on the average height of the entire surface.
This approach is very different from that of the other integration algorithms, which correct the height of a
given pixel with respect to the height of its neighbors. The planar surface integration is intended for use on
surfaces that have shape less than ¼ lambda, or have multiple discontinuous surfaces that have shape
less than ¼ lambda and in which the height difference between the surfaces is unimportant.
• Enhanced2 is more sophisticated and more computationally intensive than the Standard and Enhanced
algorithms. Standard and Enhanced operate on the data in a raster fashion, whereas Enhanced2 finds
a “best path” along which to unwrap, based on first identifying and then avoiding transitions at which
integration errors are most likely to occur.
Alternatively, you can use the customized phase-calculation algorithms outlined in step 8.

6 Select a filter to be used in the primary scan from the Measurement Filter list. After you do so, the system
rotates to the selected filter. Follow these filter-selection guidelines:
• The VSI filter uses a combination of green and white LED illumination. It provides the most intensity
and is mainly suitable for VSI measurements. The fringe envelope produced with this light is the
narrowest, so it is ideal for rough steps.
• The PSI High Mag filter is a 40-nm band-pass green LED centered near 535 nm. Less light is passed
with this filter, but the fringe envelope is larger. Use it for objectives of 10X or greater magnification.
• The PSI Low Mag filter is a 10-nm band-pass green LED centered near 535 nm. This filter passes the
least light, but produces the largest fringe envelope. Use this filter with objectives up to and including
5X.
• Default automatically applies the filter most commonly used with the current settings. By not using the
default setting, you can apply a filter in a “nonstandard” mode for customized results—for example,
VSI with a red filter on a rough sample. (You can set custom defaults by selecting Hardware »
Hardware Setup from the Vision menu.)
7 In the Reference section, do the following:
• Select the Subtract check box to use a reference file to map slight imperfections in your scan and subtract
them from the final measurement.
• Click Generate to open a dialog box that allows you to enter number of Locations for the system to
average and the Num Averages for the system to perform at each location when it generates the
reference file (see Figure 3-10). Click Autofocus if you want the system to automatically set best focus
before generating the reference file.
Figure 3-10: Reference File Dialog Box

8 In the Advanced Options section, do the following:
• Select the Read Frames check box to direct the system to use frame data from a file instead of live frame
data taken from the camera. To create this file, you must make a separate PSI measurement taken with
a special White Intensity Frames option set. To set this option, use the DebugSettings.exe file.
• Select one of the following phase-calculation algorithms:
• Standard to use the standard Vision algorithm.
• Custom to browse to a text file that dictates how the algorithm will be calculated.

Settings on the Autofocus Tab
The Autofocus tab includes the settings necessary to the use of autofocus during your measurement.
Autofocus is generally used to increase PSI measurement accuracy and repeatability, but it can be
used with VSI measurements as well.
The autofocus algorithm quickly scans through a specified range to find fringes. Once fringes are
found, the IMOA scanner moves to the calculated focus position before executing a measurement.
After you click the Autofocus tab of the Measurement Options dialog box, the basic options shown
in Figure 3-11 appear.
Figure 3-11: Autofocus Tab Basic Options
After you select an autofocus type from the list, the setup options for that type appear, as shown in
Figure 3-12. That figure also shows the Advanced Options Setup dialog box, which you open by
clicking Advanced Setup.

Figure 3-12: Autofocus Tab Showing Autofocus Setup, Intensity Window, and Advanced Setup Dialog Box
Basic Autofocus Settings

To make the basic Autofocus settings:
1 Select one of the following autofocus types:
• Autofocus, which is the standard option on all Wyko NT systems. Typically, the maximum speed of
standard autofocus is the system camera frame rate (~4um/sec for 640x480 CCD, ~1um/sec for
1000x1000 CCD). Standard autofocus allows you to select one autofocus location with a variable pixel
size window for both fine and coarse focus.
• High Speed Autofocus, which is an optional software capability that can be added to most NT systems.
Typically, the maximum speed of high speed autofocus is 8x the system camera frame rate (~32um/sec
for 640x480 CCD, ~8um/sec for 1000x1000 CCD). High speed autofocus allows you to select up to five
autofocus locations with variable pixel size windows for both fine and coarse focus.
2 To always use Autofocus before each measurement, select the Enable Autofocus for Measurements
check box.
3 Select the Prompt for manual focus upon failure check box to direct the system to pause in the
measurement process and prompt you to manually focus the system if autofocus fails.
4 Select the Cycle through all detectors until successful check box to direct the system to check multiple
detector locations if the first location fails. This option is available only for systems that include the optional
High Speed Autofocus function.

Standard Autofocus Settings
1 Select Enable automatic setting of autofocus offsets to direct Vision to set the best fringe focus position
when configuring Autofocus. It is recommended that you enable this function.
2 Adjust the settings in the Fine Focus and Coarse Focus sections by following these guidelines:
• Fine focus and coarse autofocus allow you to set a short and long autofocus scan range. Fine is used for
short ranges, while coarse is used for longer ranges.
• Backscan specifies how far back the translator will scan while looking for focus.
• Range specifies how far forward the translator will scan while looking for focus.
• Filter specifies the filter used for the autofocus algorithm. The DEFAULT (VSI) filter is recommended.
• The Test buttons are used to test the current settings for fine and coarse autofocus. When the test is
engaged, the system attempts to perform an autofocus. If the test is successful, you should see fringes in
the Intensity window. If the test fails, the system notifies you with the message "Unable to focus with these
settings." Click OK, adjust the settings, and try the test again. If your system is unable to find focus, try the
following options:
• Increase the range and backscan.
• Click the Setup Fringe Autofocus button to adjust the autofocus intensity. The system runs through
an automated routine to calculate the correct autofocus intensities and offsets.
• Manually adjust focus closer to the best focus position.
NOTE – When a new sample is to be measured or when the autofocus settings are
changed, click Setup Fringe Autofocus. Vision then resets the intensity and focus position
according to the settings that you defined.
Autofocus Advanced Setup Settings

1 Click the Advanced Setup button to open the Autofocus Advanced Setup dialog box.
Figure 3-13: Autofocus Advanced Setup Dialog Box

2 Choose from the following settings:
• Retry With Coarse Autofocus if Fine Autofocus Fails: Select this check box to run coarse focus if fine
focus fails.
• Do Not Use White LED: Select this check box to turn off the white LED when doing autofocus.
• Do Fine Fringe Autofocus for Measurements: Click this button to direct the system to always run fine
focus (using a shorter scan range) instead of coarse focus.
• Do Coarse Fringe Autofocus for Measurements: Click this button to direct the system to always run
coarse focus (using a longer scan range) instead of fine focus.
• Invert Scan: Select this check box to direct the scanner to move downward when doing backscan and
upward when doing autofocus.
• Sampled Width: Enter the width of the autofocus sensor location. Units are in pixels.
• Sampled Height: Enter the height of autofocus sensor location. Units are in pixels.
• Time Delay: Delay time between autofocus and a measurement. Units in milliseconds.
• Offset: Enter the Scanner moves to Autofocus position plus Autofocus offset.
3 If your system includes the optional High Speed Autofocus function, click the Advanced Setup button to
open the High Speed Autofocus Advanced Setup dialog box. In addition to the options listed above for
standard autofocus, this dialog box includes the Do Secondary Autofocus check box. Select that check
box to perform a secondary autofocus at slow speed and short scan range after the first autofocus is
successful.
Figure 3-14: High Speed Autofocus Advanced Setup Dialog Box
TIP – Use large sample width and height values on irregular and/or rough surfaces.

Settings on the Prompts Tab
The Prompts tab of the Measurement Options dialog box allows you to direct Vision to prompt for
information before each measurement or automated run (see Figure 3-15). When a prompt is
selected, the measurement will not begin until the prompt request is satisfied. The prompt options are
listed after the figure.
Figure 3-15: Measurement Options, Prompts Tab
Choose from the following prompt options in the Setup section:

• Prompt with Message displays the message entered in the field to the right of the check box at
the beginning of each measurement.
• Prompt for Title prompts the operator to enter a title for the dataset at the beginning of each
measurement (see Units Dialog Box on page 7-13).

• Prompt for Analysis Options prompts the operator to set the Processed (analysis) Options at
the beginning of each measurement (see Applying Processed Options on page 7-1).
• Prompt for User Notes prompts the operator to enter user notes at the start of each
measurement (see Units Dialog Box on page 7-13).
• Prompt for Focus prompts the operator to focus the system before each measurement.
• Display Prompts at the Start of Run Only displays any and all prompts you have selected
before only the first measurement of an automated series.
If your system includes the optional automated stage, choose from the following prompts in the Stage
section. Each of these parameters applies only to the first measurement in an automated series.
• Prompt for Stage Skew Correction at Start of Run prompts the operator to apply a skew
correction at the beginning of your automated run.
• Prompt for Grid Mode Rows prompts the operator to specify the number of rows in a grid that
should be measured when you have parts or measurement stops arranged in a grid pattern.
• Prompt for Origin asks the operator to set the stage origin at the beginning of the automated
run.
Settings on the Automation Tab

If your system includes the optional motorized stage, you can set up Vision to make measurements
automatically, based on the settings on the Automation tab (see Figure 3-16).
NOTE – For instructions on setting up an X/Y Stage File for Vision to use in determining the
locations for an automated measurement, see Chapter 10.
CAUTION
If you want to make more than ten measurements in an automated run, you
must either select the Auto Close Data Window check box or select
Options » Screen Mode » Lab (measurement window reused). Optimum
performance occurs when fewer than ten measurement windows are open.
simultaneously.

Figure 3-16: Automation Tab, Default Options Tab
The Automation tab contains five tabs of its own. Use them to adjust the following:
1 Click the Options tab (see Figure 3-16) to adjust the basic automation settings:
a. Select the Automation On check box to enable automated measurements.

b.Enter the number of Measurement Cycles that should be performed during this measurement run. A
single measurement cycle is either a single measurement , a stitched measurement, or an X/Y or X/Y
Grid automation run.
c. In the Sequence Number field, enter the sequence number that should be given to the first measurement
in the next batch. For example, if you enter 8, then the next measurements will be numbered 08, 09, 10,
11, and so forth.
d. Enter the Time Between Measurements in seconds if you want the system to pause between automated
measurements.
e. Select the Auto Close Data Window check box to automatically close each dataset after it is taken. This
is best used when a Vision database has been activated and the individual datasets are not needed or if
Auto Save Data Set has been selected on the Saving Data tab.
f. Select the Reset Sequence Number at Start of Run check box to make the sequence number for each
measurement run start at 1. Otherwise, the sequence numbers for subsequent tests will simply increase
sequentially.
g. Select the Update Master Database at End of Run check box to write the data from subsequent
measurements to the master database. For more information, see Using a Master Database on page 9-5.

h. Select the Use Stage Movement check box to direct the system to follow an X/Y Stage File for a series
of different measurement locations. It will measure each stop indicated in the X/Y Stage File for the
number of cycles indicated in the Measurement Cycles field.
i. Select the Rotate Measurement by Stage Skew check box to rotate measured data by the measured
skew value.
j. Leave the Use Wafer Alignment check box cleared. This check box cannot be used on a Wyko NT9100
system.
2 Click the Data Titles tab (see Figure 3-17) to adjust the following:
a. Select the Auto Generate Title check box to automatically provide titles for datasets.
b.Enter the Base Title upon which the titles will be based. For example, if the base title is “Mirror %S,” the
datasets from the next measurements will be called “Mirror 01,” “Mirror 02,” etc. Be sure to include any
variable tags (listed below the title box) to differentiate your datasets.
Figure 3-17: Automation Tab, Data Titles Tab

3 Click the Saving Data tab (see Figure 3-18) to adjust the following:
a. Select the Auto Save Data Set check box to automatically save the results from each measurement into
its own dataset.
b. Enter the Base Auto Save File Name to be given to the datasets. For example, if the base name is “Mirror
%S,” the datasets from the next measurements will be saved as “Mirror 01,” “Mirror 02,” and so forth. You
must also include the .opd extension in the base title.

NOTE – By increasing the number of digits in the variable tags, you may increase the
sequence number of your title or filename. For example, “Mirror %SSSS.opd” results in a
series of titles beginning with “Mirror 00001.opd”. It is especially important to do this when
performing automated measurements with more than 99 repetitions.
c. Select the Save Data Other Than Raw check box to save your data as the type that you select in the
Analysis type list.
d. Select the Save Raw Data As Well check box to save the raw data along with data in the selected
analysis type.
Figure 3-18: Automation Tab, Saving Data Tab

4 Click the Error Handling tab (see Figure 3-19) to adjust the following:
a. Select the Show Error Message check box to direct Vision to display an explanatory message box if a
measurement must be aborted.
b.Select whether Vision should Abort, Continue, or Prompt you to choose one or the other after the error
message has been shown.
c. Select the Beep check box if you want the computer to audibly warn you when an error has occurred.

Figure 3-19: Automation Tab, Error Handling Tab
NOTE – The Custom tab is not used with the Wyko NT9100 system.
5 Select the Multiple Config tab to apply several measurement configurations sequentially. (This tab is
available only if the Show Multi Configurations check box has been selected on the Menu tab in the
Debug Settings application.)
6 When you are finished adjusting your settings, click OK.
Settings on the Wizard Setup Tab

If you plan to change several options between measurements, use the Measurement Wizard to select
the desired Measurement Options tabs to be displayed in advance of each measurement.
To adjust the settings on the Wizard Setup tab:
1 Click the Wizard Setup tab (see Figure 3-20).

Figure 3-20: Measurement Options, Wizard Setup Tab
2 Select the check box for each tab that you want to appear prior to a measurement in the Pages to Appear
in Measurement Wizard section.
3 If desired, select the Begin Measurement at end of Wizard check box.
4 To make a measurement, select Hardware » Measurement Wizard from the menu. The Measurement
Options tabs that you selected in the Wizard Setup appear sequentially. If you chose to begin a
measurement after the Wizard has finished, the measurement takes place after you click the Finish button
on the last tab.

4
CALIBRATING YOUR SYSTEM
This chapter tells you how to make VSI and PSI calibration measurements to verify that your system
is performing to factory specifications. It concludes with instructions for generating a reference file,
which can be subtracted from a measurement to eliminate system aberrations, thus providing highly
accurate results.
IMPORTANT! Veeco recommends that you autocalibrate for VSI and/or PSI every week.
VERIFYING VSI CALIBRATION
NOTE – The procedure for verifying calibration is faster than the one for autocalibrating the
system because it does not require iterative measurements.
VSI calibration uses the 10µm step height standard that came with your system. By taking a
measurement of the step height standard and comparing the results to the standard’s nominal value,
you can determine if the system is calibrated correctly.
Figure 4-1: 10 µm Step Height Standard
Calibrating Your System 4-1

To verify the VSI calibration of your Wyko NT9100 system:
1 Position the 10µm step height standard that came with your system on the stage.
2 Open the Measurement Options dialog box by clicking the button on the toolbar or by selecting
Hardware » Measurement Options from the menu.
3 Select the following on the Measurement Options tab (see Figure 4-2):
• VSI measurement
• Full resolution
• Objective
• FOV lens
NOTE – Any magnification can be used to calibrate the system. However, Veeco
recommends that you use the same magnification and step location for each calibration.
Figure 4-2: Measurement Options Tab, VSI Selected
4-2 Calibrating Your System

4 Click the Calibrate button at the bottom of the Measurement Options dialog box, click the Calibrate
button on the toolbar , or select Hardware » Calibration from the menu to open the Calibration
dialog box (see Figure 4-3).
Figure 4-3: VSI Calibration Dialog Box, Verify Selected
5 In the Perform section, click Verify (see Figure 4-3).
6 If the correct step height value does not already appear, enter it in the Step Height Value field. This value
appears on the step height standard.
7 Do not change the value in the Initial Calibration field. If this value is missing, you must autocalibrate for
VSI as described in Autocalibrating for VSI on page 3-5.
WARNING
Adjust the Z-axis SLOWLY. Once the objective is near the sample, be
particularly observant. If the objective contacts the sample at all, severe
damage could result to the objective, the sample, and the IMOA scanner.
8 Focus on the 10µm step height standard and adjust tip/tilt to obtain three fringes perpendicular to the step
direction (typically horizontal fringes across a vertical step, as shown in Figure 4-4). For help in obtaining
this outcome, see Tips for Finding Focus on page 5-8 and Tips for Setting the Tip/Tilt on page 5-9. For
detailed instructions on focusing on the step height standard, see Performing a Step Measurement
Analysis on page 5-14.

Figure 4-4: Three Fringes on the Top Surface of a Step, Oriented for VSI Calibration
9 Click OK. The system performs a VSI measurement and displays the results in the VSI Calibration
Results window (see Figure 4-5).
Figure 4-5: VSI Calibration Results Window
10 Evaluate the results. The % Error should be less than ±0.5° of the nominal value of the step height
standard.

a. Click OK to accept the results of the calibration verification.

b. If the results are unsatisfactory, autocalibrate for VSI as described in the section that follows.
AUTOCALIBRATING FOR VSI

If the VSI calibration verification fails, you must autocalibrate your system.
To autocalibrate your Wyko NT9100 system for VSI measurements:
1 Position the 10µm step height standard that came with your system on the stage.
Hardware » Measurement Options from the menu bar.
• VSI measurement
• Full resolution
• Objective
• FOV lens
recommends that you use the same magnification and location for each calibration.
4 Click Calibrate to open the Calibration dialog box (see Figure 4-3).
5 In the Perform section, click Auto Calibrate (see Figure 4-6).
Figure 4-6:VSI Calibration Dialog Box, Auto Calibrate Selected

6 If the correct step height value does not already appear, enter it in the Step Height Value field. This value
appears on the step height standard.
7 Do not change the value in the Initial Calibration field.
WARNING
8 Focus on the step height standard and adjust tip/tilt to obtain three fringes perpendicular to the step
direction (typically horizontal fringes across a vertical step, as shown in Figure 4-4). For help in obtaining
this outcome, see Tips for Finding Focus on page 5-8 and Tips for Setting the Tip/Tilt on page 5-9. For
detailed instructions on focusing on the step height standard, see Making a VSI Measurement of a Step on
page 5-10.
9 Click OK. The system performs iterative measurements and displays the results in the VSI Calibration
Figure 4-7: VSI Calibration Results Window
10 Evaluate the results. The % Error should be less than ±1/2° of the nominal value of the step height
standard.
a. Click OK to accept the calibration number.

b. If the system is unable to achieve a good calibration result, repeat the calibration procedure. If the results
are still unsatisfactory, contact Veeco Customer Service for assistance.
12 Save the calibration factors by selecting File » Save Configuration.

VERIFYING PSI CALIBRATION
NOTE – The procedure for verifying calibration is faster than the one for autocalibrating
because it does not require iterative measurements.
PSI calibration uses a super-smooth mirror as a sample. By taking measurements on a super-smooth

surface, Vision can make adjustments that ensure that the fringes shift in the correct manner.
To verify the PSI calibration of your Wyko NT9100 system:
1 Position the super-smooth calibration mirror that came with your system on the stage.
• PSI measurement
• Full resolution
• Objective
• FOV lens
recommends that you use the same magnification and step location on each calibration.

Figure 4-8: Measurement Options Tab, PSI Selected

Figure 4-9: PSI Calibration Dialog Box, Verify Selected
5 In the Perform section, click Verify (see Figure 4-9).
6 Do not change the value in the Initial Calibration field. If this value is missing, you must autocalibrate for
PSI as described in Autocalibrating for PSI on page 3-11.
WARNING
7 Focus on the mirror and adjust tilt to obtain three to five fringes at a 45° angle (see Figure 4-10). For help in
obtaining this outcome, see Tips for Finding Focus on page 5-8 and Tips for Setting the Tip/Tilt on page 5-
9. For detailed instructions on measuring the mirror, see Making a PSI Measurement of a Mirror on page 5-
16.

Either orientation is acceptable for PSI calibration.
Figure 4-10: Fringes on a Smooth Mirror, Oriented for PSI Calibration
8 Click OK. The system performs a PSI measurement and displays the results in the PSI Calibration
Figure 4-11: PSI Calibration Results Window
9 Evaluate the results. The average shift should be 90° ± 0.5°.

a. Click OK to accept the results of the calibration verification.

b. If the results are unsatisfactory, autocalibrate for PSI as described in the section that follows.

AUTOCALIBRATING FOR PSI
If the PSI calibration verification fails, you must autocalibrate your system.
To autocalibrate your NT9100 system for PSI measurements:
• VSI measurement
• Full resolution
• Objective
• FOV lens
recommends that you use the same magnification and mirror location on each calibration.
5 In the Perform section, click Auto Calibrate.
Figure 4-12: PSI Calibration Dialog Box, Auto Calibrate Selected

6 Do not change the value in the Initial Calibration Value field.
WARNING
7 Focus on the mirror and adjust tip/tilt to obtain three to five fringes at a 45° angle (see Figure 4-10). For
help in obtaining this outcome, see Tips for Finding Focus on page 5-8 and Tips for Setting the Tip/Tilt on
page 5-9. For detailed instructions on measuring the mirror, see Making a PSI Measurement of a Mirror on
page 5-16.
8 Click OK. The system performs iterative measurements and displays the results in the PSI Calibration
Figure 4-13: PSI Calibration Results Window
9 Evaluate the results. The average shift should be 90° ± 0.5.
a. To accept the new calibration number, click OK.

b. If the system is unable to achieve a good calibration result, repeat the calibration procedure. If the results
are still unsatisfactory, contact Veeco Customer Service for assistance.
11 Save the calibration factors by selecting File » Save Configuration.

SOLVING CALIBRATION PROBLEMS
If you are unable to obtain acceptable VSI or PSI calibration results, try the following:
• Check to make sure that the air table is floating.
• Remove all sources of mechanical and acoustical vibration, as well as air turbulence.
• Make sure that the fringes are stable and not vibrating.
• Use the recommended number of fringes to make the calibration measurement.
• Make sure that the intensity is set correctly.
GENERATING A REFERENCE FILE FOR PSI AND VSI

MEASUREMENTS
A reference file contains the profile of the system optics, which can then be subtracted from a PSI or
VSI measurement. This enables the removal of any effects of aberrations, which provides an
extremely accurate measurement of your sample.
NOTE – Since the reference file is a profile of the system optics, it is different for each
combination of objective and FOV lens. You must create a reference file using the same
optics that will be used in your measurements. The reference file is subtracted only from
measurements taken with the same objective and FOV lens used in generating the reference
file. If you change the objective or FOV lens, you must regenerate the reference file.
To generate a reference file for VSI or PSI measurements:

1 Verify calibration according to the instructions in Verifying VSI Calibration on page 3-1 and Verifying PSI
Calibration on page 3-7.
2 Choose the objective and FOV lens to be used for your future measurements.
4 Select the following on the Measurement Options tab:

• PSI or VSI measurement mode
• Full resolution
• The magnification objective that you want to measure with
• The FOV lens that you want to measure with
6 Click the PSI Options or VSI Options tab.
7 In the Reference section, select the Subtract check box, and then click the Generate button.The following
dialog box appears.

Figure 4-14: Subtract Reference File Dialog Box
8 Do the following in the Subtract Reference File dialog box:
a. Enter the number of Locations for Vision to measure on the sample. More measurement locations
produce a more accurate reference file.
b. Enter a Num Averages value to indicate the number of measurements that you want the system to
perform and then average at each location.
c. Select the Autofocus check box if you want the system to autofocus during the reference generation
procedure.
9 Click OK, and then do the following:
a. When Vision prompts you to align the system and focus on the sample, place the reference mirror on the
stage and focus to null the fringes. For help in nulling the fringes, see Basic Sample Measurement
Procedures on page 5-1. When you are finished, click OK.
b. The system performs the number of measurements that you entered in the Num Averages field at the
first mirror location and averages them. It then prompts you to move to the next measurement location.
Relocate the mirror and click OK.
c. Measurements are taken and averaged for each of the locations that you specified. When all of the
locations have been measured, the results are averaged and saved.
The system will now subtract the reference file from all of your measurements.

5
MEASURING SAMPLES
This chapter begins with an outline of basic sample measurement procedures. It then provides
specific instructions for making a VSI measurement of the 10µm calibration step height standard and
a PSI measurement of the super-smooth calibration mirror. Both the step height standard and the
mirror are included with your Wyko NT9100 system.
BASIC SAMPLE MEASUREMENT PROCEDURES
WARNING
The objectives are very sensitive. Do not drop or hit them, or severe damage could occur.
If you think that an objective may be damaged, call Veeco Customer Support . If you are
dialing in the U.S., call Veeco Customer Service at (800) 366-9956. If you are dialing
internationally, call (520) 741-1297.
1 In Vision, use the currently active configuration file or select another configuration file that you want to use
for this measurement. For more information, see About Configuration Files on page 3-1.
2 Set any software options that are not in the configuration file but will be unique to this measurement. For
more information, see Setting the Measurement Options on page 3-4.
3 Open the Measurement Options dialog box by clicking the Measurement Options button on the
toolbar or by selecting Hardware » Measurement Options from the menu bar. Click the Measurement
Options tab and then select the desired objective and FOV lens. For instructions, see Changing Objectives
on the Motorized Turret on page 2-15 and Changing the FOV Lens on page 2-21.
4 Place your sample on the stage under the objective.
5 Open the Intensity window by clicking the Intensity button on the toolbar or by selecting Hardware »
Intensity from the menu bar.
6 Using the slider bar at the bottom of the Intensity window, adjust the light intensity to be as bright as
possible to make focusing easier. If the Intensity window shows red (saturated) pixels (see Figure 5-1), use
the slider bar to lower the intensity until the image appears just below saturation (see Figure 5-2).
Measuring Samples 5-1

Figure 5-1: Intensity Window Showing Saturation (Red Pixels)
Figure 5-2: Intensity Window Just Below Saturation Level
5-2 Measuring Samples

7 If your Wyko NT9100 system is equipped with the standard manual stage, use the coarse-positioning clips
and fine-positioning knobs to place the feature that you want to measure in the desired location. For full
instructions, see Controlling the X/Y Movement of the Manual Stage on page 2-10.
8 Enable the Profiler Controls by clicking the Profiler Controls icon in the lower right corner of the
Intensity window (see Figure 5-3).
9 If your Wyko NT9100 system is equipped with the optional motorized stage, click the X/Y button at
the bottom of the Intensity window, and then click a speed button to select the speed at which you want to
move the motorized stage. A traveling red control arrow, along with the real-time X and Y positions in the
lower left corner, indicates the current position of the stage (see Figure 5-3). While holding down the left
mouse button, move the cursor over the Intensity window until the feature that you want to measure is
located in the desired position. For full instructions, see Controlling the X/Y Movement of the Motorized
Stage on page 2-11.
.
Figure 5-3: Intensity Window with X/Y Control Arrow

.
WARNING
10 Use the mouse to click and drag below the horizontal bar on the right side of the Intensity window to move
the objective down toward the sample. A traveling red control arrow, along with the real-time Z position in
the lower left corner, indicates the current height of the IMOA (see Figure 5-4). Veeco recommends that
you first move the objective down slightly below its working distance (see Objectives and Field-of-View
Lenses on page 1-5) and then raise it to find focus. This ensures that the objective will not crash into the
sample as you adjust for focus. When the IMOA is at the desired Z-axis position, release the mouse button
to end the adjustment. For full instructions, see Controlling the Z-Axis Movement on page 2-8.

Figure 5-4: Intensity Window with Z-Axis Control Arrow
11 Slowly adjust the Z-axis position until you see contrasting bands called fringes in the Intensity window (see
Figure 5-5).
).
Figure 5-5: Intensity Window Showing High-Contrast Fringes with a Large Amount of Tilt

12 Use the Y Tilt and X Tilt knobs on the system base to adjust tip/tilt. Continue making small adjustments until
you have obtained three or fewer high-contrast fringes in any orientation. For full information, see
Controlling The Tip/Tilt Movement of Either Stage on page 2-13.
NOTE – It may be necessary to adjust the Z-axis focus slightly as you tip and tilt the fringes.
Figure 5-6: Intensity Window with Fringes in Almost-Nulled Position

Figure 5-7: Nulled Fringes on a Step
NOTE – A nulled position for tilt indicates that the optical axis is optimally perpendicular to
the sample. This is generally the best position of tilt to produce good measurements. On a flat,
reflective, smooth sample, you will typically see this position when the fringes are spread as
far as possible. In Figure 5-6, the fringes are very close to the optimal tip/tilt position, and in
Figure 5-7 they are at the optimal position. Both fringe patterns will produce an accurate
measurement.
13 If the image includes any saturated (red) pixels (see Figure 5-8), use the slider bar at the bottom of the
window to raise or lower the intensity until it is just below the saturation level (with no red pixels) (see
Figure 5-7).

Figure 5-8: Intensity Window with Saturated Pixels
14 When the fringes are stationary and no vibration is present, click the New button on the toolbar or
select File » New Measurement to initiate the measurement sequence. The system takes the
measurement and displays the results as a graphical output file (by default, the contour plot, as shown in
Figure 5-9). You can now use Vision to perform numerous types of analyses of the surface data.
15 Click the Save button on the the toolbar or select File » Save Dataset to save the dataset.

Figure 5-9: Contour Plot
BASIC MEASUREMENT TIPS

This section provides tips for finding focus, setting the tip/tilt, and setting the measurement intensity.
Tips for Finding Focus

Here are some tips to make finding focus easier:
• If the stage is visibly tilted, the fringes will be very compact and difficult to see. Adjust the tip
and tilt of the stage by turning the appropriate knob.
• Focus on a feature on the sample or on the edge of a mirror. Watch the image of the feature in
the Intensity window. As the image becomes sharper, the system is closer to focus. Focus slowly
until fringes appear.
• Try a different FOV lens. If you are using a low-powered objective, change to a higher-powered
FOV to increase the viewing magnification. If you are using a high-powered objective, change
to a lower-powered FOV to increase the size of the field of view. Find focus, then return to the
desired FOV for the measurement.
• If your system includes the optional 10X BF (bright field) objective, switch to it in the
Measurement Options dialog box and on the Hardware menu in the Intensity window.
Although this objective does not work for making measurements, it can help you focus.

• Try a smaller bandwidth filter. In the Intensity window, click Hardware » Filter and select the
desired bandwidth filter.
NOTE – A narrower bandwidth produces a larger fringe envelope, so using a smaller

bandwidth filter increases the number of fringes you see. This may make the fringes easier to
find. The filters, ranked according to bandwidth from wide to narrow, are the VSI, the PSI High
Mag (40 nm), and the PSI Low Mag (10 nm). When you change the filter in the Intensity
window for focusing purposes, the filter reverts to the one designated in the configuration file
when the measurement is initiated. To learn how to select a different filter for use in the
measurement configuration, see Settings on the VSI Options Tab on page 3-7 or Settings on
the PSI Options Tab on page 3-12.
If you are still having difficulty finding fringes, follow the instructions in the next three sections, and
then try focusing again.
Tips for Setting the Tip/Tilt

• Adjust the fringes slowly if you are near the correct fringe orientation.
NOTE – If the fringes are very compact, or if the stage is severely tilted, you may adjust the
tip/tilt quickly. However, once you near the appropriate orientation, adjust the tip/tilt slowly, or
you may pass the correct orientation and introduce undesired tip/tilt in the opposite direction.
• If your sample is very rough and you are unable to see discrete fringes, nulling the fringes may
be difficult. To determine if your fringes are nulled, use the Z-Axis Profiler Control in the
Intensity window to travel slowly back and forth through focus. If the fringes appear to travel
across the screen in an obvious direction, the system is still tilted. If the fringes appear across
the sample simultaneously, the tip/tilt of your system is correct. For more information, see
Controlling Z-Axis Movement with the Mouse Cursor on page 2-8.
Tips for Setting the Intensity

• The best way to set the intensity is to increase the light level until some red pixels appear in the
Intensity window, indicating saturation. Then slowly decrease the intensity just until all the red
pixels disappear. For examples, see Figure 5-1, Figure 5-2, and Figure 5-8.
• Check the intensity after you focus. The fringe contrast is greatest at the location of best focus,
so if the intensity is set when the system is out of focus, saturation may still appear at the
position of best focus.
Using the Auto Intensity Function

As an alternative to setting the intensity with the slider bar, you can use the Auto Intensity function in
the Intensity window to direct the system to find the best intensity for you. Select Options » Auto
Intensity from the toolbar in the Intensity window and follow the on-screen instructions:
• Vision determines the best intensity for both VSI and PSI measurements, according to the filter
settings in the measurement configuration. After the intensity is set, Vision displays the values

of the intensity that it determined for VSI or PSI.
• To accept the auto intensity settings, click Accept. (If you are using the Force Intensity option,
you must enter the intensity level manually.) For a description of the Force Intensity option,
see Settings on the VSI Options Tab on page 3-7.
• To manually change the Auto Intensity settings, click Change and enter the the intensity
value(s) in the dialog box that appears.
• To reject the Auto Intensity settings and return to the Intensity window, click Cancel.
MAKING A VSI MEASUREMENT OF A STEP

As outlined in Chapter 1, vertical scanning interferometry (VSI) uses the interference of light to map
the surface of your sample. VSI is used for relatively rough surfaces (Ra greater than 0.1µm) or
surfaces with discontinuities or steps greater than 135nm (λ/4). In VSI, the optics physically scan
through the focus of the objective while obtaining “snapshots,” called frames, from the camera in the
IMOA. These frames are used to reconstruct a map of the surface of the sample.
To make a VSI measurement of the 10 µm step height standard (see Figure 5-10) that is included with your
system:
1 Open Vision by double clicking its icon on the desktop.
2 Check to ensure that the step height standard is clean and free of dust. If necessary, gently clean it with
compressed, clean, dry air.
Figure 5-10: 10 µm Step Height Standard

3 Place the step height standard on the stage, making certain the measurement objective is well above the
surface.
4 Center the step in the spot of light under the objective.
5 Set up the measurement configuration:
a. Open the Measurement Options dialog box by clicking the button on the toolbar or by selecting
b. Select the following on the Measurement Options tab:
• VSI measurement
• Full resolution
• Objective and FOV lens

Figure 5-11: Measurement Options Tab, VSI Selected
NOTE – For descriptions of all available measurement options, see Chapter 3.
c. Click the VSI Options tab and enter the following:

• Single Scan
• 3X measurement speed
• Backscan of 15µm
• Length of 15µm
• Modulation Threshold of 5%
• Force Intensity off

• Primary Filter Default
• Autoscan Disabled
d. Click OK.
Figure 5-12: Measurement Options, VSI Options Tab

e. Close the Measurement Options dialog box.
f. Select File » Save Configuration As, enter “Sample Step” as the file name, and then click OK.
WARNING

6 Focus on the step height standard, set the tip/tilt, and set the intensity according to the instructions in Basic
Sample Measurement Procedures on page 5-1. As you do so, follow these guidelines:
• Adjust the Z-axis height until the objective is within about 2 mm of the step height standard, and below the
working distance of the objective. Then slowly raise the Z-axis until fringes appear in the Intensity window.
• As you focus, move the stage so at least one edge of the step is visible in the field of view.
Figure 5-13: Intensity Window Showing One Edge of the Step

• Make certain that the fringes are focused on the top of the step (see Figure 5-13). If you cannot see both
sides of the step, determine whether the fringes are on the top surface or the bottom by slowly raising the
Z-axis. The first set of fringes will disappear.
• If a second set of fringes appears, you were focused on the bottom of the step. Stop on the top set of
fringes.
• If a second set of fringes does not appear, you were focused on the top of the step. Return to that set
of fringes by slowly lowering the Z-axis until the fringes reappear on the surface of the step.
• You may need to adjust intensity after you have found focus.
• You may need to adjust the tip/tilt after you have adjusted the focus.
• After you have made your final adjustments, allow the system to stabilize for a moment before making your
measurement.
7 Click the New Measurement button on the toolbar or select File » New Measurement to initiate the
measurement.
Both sets of fringes should travel across the Intensity window during the course of the measurement. If this
does not occur, refocus the system, making certain the fringes are focused on the top surface of the step,
and remeasure the sample. When the measurement is complete, Vision displays the results as a graphical
output file (by default, the contour plot).

Figure 5-14: VSI Measurement of the 10 µm Step
PERFORMING A STEP MEASUREMENT ANALYSIS

To analyze and display a stored dataset that includes a step:
1 Select Analysis » Step Measurement » Options. The Step Height Analysis dialog box appears (see
Figure 5-15).
2 In the Step Height Analysis dialog box, select the following:
• Type of Step: Regular
• Regular Step Description: Automatic Selection

Figure 5-15: Step Height Analysis Dialog Box
3 Click Calculate. Vision calculates the average height of the step and reports the calculated value with a
two dimensional contour plot of the step measurement (see Figure 5-16).
NOTE – The calculated value of your step height should differ from the nominal height of
your step by less than 1%. If the error is greater than 1%, calibrate your system as described
in Chapter 4.
Figure 5-16: Step Measurement Analysis of the 10 µm Step Height Standard

MAKING A PSI MEASUREMENT OF A MIRROR
As outlined in Chapter 1, phase shifting interferometry (PSI) uses the interference of light to produce
information regarding the surface of a sample. PSI is used measuring for extremely smooth samples
like mirrors or optics. In PSI, a scanner motor within the IMOA precisely shifts the interference
pattern multiple times; each shift is captured to produce one frame of data. The frames are then
reconstructed to form a topographical map of the measured surface.
To make a PSI measurement of the super-smooth calibration mirror that is included with your system:
1 Open Vision by double clicking its icon on the desktop.
2 Check to ensure the mirror is clean and free of dust. If necessary, gently clean it with clean, dry,
compressed air followed by a lens tissue.
3 Place the mirror on the stage, making sure the objective is well above the surface.
4 Set up the measurement configuration:
a. Open Measurement Options by clicking the button on the toolbar.
b. Select the following on the Measurement Options tab:
• Full resolution
• PSI measurement
• Objective and FOV lens

Figure 5-17: Measurement Options Tab, PSI Selected
c. Click the PSI Options tab (see Figure 5-18) and enter the following:
• Averaging off
• Modulation Threshold at 15%
• Vibration Detection off
• Intensity Options off
• Standard Phase Unwrapping Standard
• Measurement Filter Default
• Reference off
• Algorithm Standard
d. Click OK.

Figure 5-18: Measurement Options , PSI Options Tab
e. Select File » Save Configuration As, enter “Sample Mirror” as the file name, and then click OK.
WARNING

5 Focus on the mirror, set the tip/tilt, and set the intensity according to the instructions in Basic Sample
Measurement Procedures on page 5-1. As you do so, follow these guidelines.
• Adjust the Z-axis height until the objective is within about 2 mm of the mirror, and below the working
distance of the objective (see Objectives and Field-of-View Lenses on page 1-5). Then slowly raise the
Z-axis until fringes appear in the Intensity window.
• As you focus, adjust the fringes so that the fringe with the highest contrast is centered in the field of
view.
• Adjust the tip/tilt until only one large fringe appear in the Intensity window.
• You may need to adjust intensity after you have found focus.
• You may need to adjust the tip/tilt after you have adjusted the focus.
• After you have made your final adjustments, allow the system to stabilize for a moment before making
your measurement.
6 When the fringes are stationary and no vibration is present, click the New button on the toolbar or
select File » New Measurement to initiate the measurement sequence. During the course of the
measurement, fringes should shift in the Intensity window. If this does not occur, refocus the system,
making certain that the highest contrast fringe appears on the screen. When the measurement is complete,
Vision displays the results as a graphical output file (by default, the contour plot).The contour plot should be
relatively uniform, with a random distribution of colors, and should not display any distinguishable features
(see Figure 5-19).
NOTE – If the measurement looks different than the sample measurement shown, calibrate
the system for PSI according to the instructions in Chapter 4. Check for sources of vibration,
and then remeasure.
Figure 5-19: PSI Measurement of a Mirror

6
PROCESSING DATA
After you have taken a measurement, you can use a number of options and analyses to produce a vast
array of information about your sample data. In Vision, the Processed Options are applied directly to
the data and are independent of the display or of any further analysis applied to the dataset.
APPLYING PROCESSED OPTIONS

Processed Options allow you to remove terms, apply filtering, and perform other operations to
enhance the measurement data. These options can be applied to only the current dataset or can be set
as the measurement default and saved in the configuration file.
To access the Processed Options dialog box, click the Processed Options button on the
toolbar, or select Analysis » Processed » Options from the menu.
.
Figure 6-1: Processed Options Dialog Box, Terms Removal Tab
Processing Data 6-1

The Processed Options dialog box contains several tabs with options that allow you to enhance the
data from a new or stored dataset.
NOTE – When you change options in this dialog box and click OK, the changes immediately
become effective in the currently open dataset. By saving your configuration, you can ensure
that your settings will be used each time you open your configuration file.
Terms Removal Tab

Click the Terms Removal tab to remove tilt, curvature, sphere, or cylindrical characteristics inherent
to your sample (see Figure 6-1).
Terms Removal
Do one of the following:
• Click None to remove no terms from the dataset.
• Click Tilt Only (Plane Fit) to remove linear tilt from surface measurements. (Removes fit of
form ax + by + c = z.) Since samples will usually have some inherent tilt, this term is almost
always removed when new data is taken.
• Click Modal Tilt Only to adjust your results by removing the most common or most
representative tilt throughout the entire measurement, calculated by comparing each point with
its neighbor.
• Click Sphere and Tilt to apply a “true” sphere fit to your results, enabling you to observe the
surface features instead of the spherical shape. Tilt is also removed.
• Click Curvature and Tilt to make spherical samples appear flat, but with an approximated
spherical fit. Tilt is also removed. (Removes fit of form ax2y2 + bx + cy + d = z.)
• Click Cylinder and Tilt to cause a cylindrical or other quadratic surface to appear flat, allowing
you to see the surface features, not the cylindrical shape. Tilt is also removed. (Removes fit of
form ax2 + bxy + cy2 + dx + ey + f = z.)
• Click User-Defined Curvature to specify your own parameters.
Apply Terms to Subregions

Select the Apply Terms to Subregions check box to apply the chosen terms removal to a subregion.
Filtering Tab
Click the Filtering tab to apply various types of filters to the dataset in order to emphasize certain
features (see Figure 6-2).
6-2 Processing Data

Figure 6-2: Processed Options Dialog Box, Filtering Tab
Window Filtering
Click a Window Filtering option listed on the left to to produce one of the following effects on the
current dataset.
NOTE – Window size can be 3 x 3, 5 x 5, 7 x 7, or 9 x 9.
NONE
This option applies no window filtering.
LOW PASS
The Low Pass smoothing filter removes the effects of high spatial frequency roughness,
smoothing over features that are smaller than the window. The program eliminates small-
scale roughness, making the most significant features of the dataset easier to distinguish.
Processing Data 6-3

For a low-pass smoothing filter, the height values in the window are averaged, and the
average is stored as the new center height. The average is based only on valid data points.
(The denominator in the equation below is always the number of valid data points.) The
window then moves to the next location to perform the same calculation. The array and
center height calculation for a 3x3 window are as follows:
A low-pass filter can provide information about waviness, the more widely spaced
irregularities on your sample’s surface. A low-pass filter can be helpful if you want to
examine the general characteristics of a surface that are not associated with a machining tool.
MEDIAN
The Median smoothing filter uses the median of the valid points in each window as the data
element in the new, smoother array. (In other words, it filters out noisy and “spiky” data.)
The height values in the window are sorted in ascending order, and the median of this bubble
sort is stored as the new center height.
The median is the value of the middle point when the points are sorted from smallest to
largest. (If there is an even number of valid data points, the median is the second number of
the two middle points.) The window then moves to the next location to perform the same
calculation.
For the 3x3 window shown below, the number 12 is the median value when the numbers are
sorted in ascending order.
A median filter is particularly effective for preserving edges and steps in the data.
6-4 Processing Data

HIGH PASS
The High Pass smoothing filter emphasizes high spatial frequencies. This filter removes
major undulations and large-scale waviness, making small-scale roughness easier to
distinguish. For a high-pass smoothing filter, a weighted average of the height values in the
window is subtracted from the center height, and this value is stored as the new center height.
The average is based only on valid data points. (The denominator in the equation below is
always one less than the number of valid data points.) The window then moves to the next
location to perform the same calculation.
The array and calculation for a 3x3 window are:
FOURIER FILTERING
Click Fourier Filtering to activate the options in the Fourier Filtering section of the
Filtering tab.
WINDOW SIZE
If you selected the Low Pass or Median window filtering option above, enter the number of
pixels that you want the smoothing window to include in the Window Size field. For
example, enter 3 to specify a smoothing window of 3 x 3 pixels. Note that this option does
not apply to the High Pass Window filter.
Fourier Filtering
Click one of the Fourier Filtering options to produce one of the following effects on the dataset:
• The Low Pass (waviness) filter eliminates any frequency components in the dataset above the
value that you enter in the Low Cut Off Frequency field.
• The High Pass (roughness) filter eliminates any frequency components in the dataset below the
value that you enter in the High Cut Off Frequency field.
• The Band Pass filter passes spatial frequencies below the High Cut Off and above the Low
Cut Off frequency values.
• The Notch filter passes spatial frequencies above the High Cut Off and below the Low Cut
Off frequencies.
Processing Data 6-5

Window
Select the shape of the Fourier filtering window to apply—Rectangle, Butterworth (default is 3rd
Order), Gaussian, or Exponential (the default is standard deviation = 0.2).
Advanced Setup
If desired, click Advanced Setup to access more options for digital filtering.
Figure 6-3: Digital Filtering Advanced Setup Options
• In the Far Field Filtering section, select the shape of the window to apply: Rectangle,
Butterworth (the default is 3rd Order), Gaussian, or Exponential (the default is standard
deviation = 0.2).
• In the Data Interpolation and Extrapolation section:
• Select the User Data Inter/Extrapolation check box to perform a data restore operation on
the data prior to filtering.
• Enter a number in the Number of Iterations field to indicate the number of pixels that you
want the system to restore.
• Select one of the following check boxes to reduce “ringing,” or edge distortion:
• Use Data Unfolding to duplicate the data into a larger array as shown in Figure 6-4.
• Use Rim Leveling to adjust the data so that the average of the data around the edge is equal
to zero.
6-6 Processing Data

Figure 6-4: Principle of Data Unfolding
Masking Tab
Click the Masking tab to specify areas to be excluded from analysis (see Figure 6-5). Masks
are covered in greater detail in Masking on page 6-11.
Figure 6-5: Processed Options Dialog Box, Masking Tab
Processing Data 6-7

Masks
In the Masks section, do one of the following:
• Select Use Analysis Mask if you want to apply an analysis mask to your dataset. You must
create the analysis mask separately in the Mask Editor (see Masking on page 6-11).
• Select Use Terms Mask if you want to apply a terms mask to your dataset. You must create the
terms mask separately in the Mask Editor (see Masking on page 6-11).
Edge Masking
The Edge Masking options specify how the edges of the sample should be masked.
• Select the Sigma Masking check box to calculate the RMS roughness (σ), and then discard any
data points that fall beyond ± n σ, where n is the masking value that you specify in the Sigma
Masking field.
• Enter a value in the Trim Pixels field to trim the specified number of pixels from around the
edges of the dataset and any areas of bad data.
• Enter a value in the Pupil Reduction field to reduce the diameter of the dataset by the
percentage you specify.
Periodic Array Segmentation

Select the Use Periodic Array Segmentation check box to create separators on datasets representing
samples such as arrays of rectangular micro mirrors.
Data Restore Tab

Select the Data Restore tab to fill in small areas of bad pixels using the height data surrounding the
drop-out area (see Figure 6-6).
NOTE – The options on the Data Restore tab should not be used to replace large areas of
bad data. Results based on such data may be misleading or meaningless.
6-8 Processing Data

Figure 6-6: Processed Options Dialog Box, Data Restore Tab
NOTE – If you use the Data Restore function to restore data points that were included in
the raw data but considered invalid for analysis purposes, Vision will also attempt to restore
the data points that were permanently blocked with the detector mask. This will result in areas
of false data where no data should exist.
Data Restore
Select the Use Data Restore check box, and then click Restore Only Interior Points or Restore
Interior and Exterior Points. If you click the latter, specify the number of Data Restore Pixels.
(The default number is 10.)
Data Fill
Select the Use Data Fill check box, and then click either:
Fill with High Data to fill all bad pixels with high data. High data is 50% higher than the highest
point in the dataset.
Processing Data 6-9

Fill with Low Data to fill all bad pixels with low data. Low data is 50% lower than the lowest point
in the dataset.
You can then select any or all of the following:
• Use min region size. Select this check box to fill only those regions of bad data whose area is
greater than the minimum region size that you enter in the field to the right. The list to the right
of this field allows you to select one of three units in which to display the mini region size—
either pixels, μm2, or mm2.
• Exclude edge regions. Select this check box to fill only those regions of bad pixels that are
NOT adjacent to the edge of the dataset.
• Mask off valid pixels. Select this check box to mask all regions of good pixels and display all
regions of bad ones.
General Tab Options

Select the General tab to center, flip, or invert the data.
Figure 6-7: Processed Options Dialog Box, General Tab
Centering Method
In the Centering Method section, do one of the following:
• Select None as a Centering Method if you do not want the data to be centered.
6-10 Processing Data

• Select Center of Mass of Valid Pixels to center the data around a point that is at the center of
most of the valid pixels.
• Select Fit Circle to Outside Valid Pixels to center the data around a point that is at the center
of a circle that lies outside the valid pixels.
Data Flip
In the Data Flip section, do one of the following:
• Select Flip About X to flip the pixels across the X axis, allowing you to see a horizontally
reversed representation of your data.
• Select Flip About Y to flip the pixels across the Y axis, allowing you to see a vertically reversed
representation of your data.
Data Invert
In the Data Invert section, select the Invert Data check box to mathematically invert the data— that
is, to swap highs for lows and lows for highs about the mean data height.
MASKING
With a mask, you can temporarily or permanently eliminate areas of information from the contour
plot and from inclusion in the analysis. This enables you to focus on specific regions of interest for
your analyses and to perform data modifications on specific portions of your data. You can also
create a detector mask to mask detector pixels during a measurement. Once you have defined a mask,
you can store it to disk for future use.
Masks have a number of uses, including:
• Eliminating a bad spot from the sample surface (seen after data is taken)
• Isolating a single area of the sample surface for repeated analyses
• Showing only those data points within a certain height range
• Fitting tilt, curvature, or cylinder terms to a region that you specify
• Creating separators on datasets from samples such as arrays of rectangular micro mirrors
• Eliminating detector pixel elements (while data is collected)
Types of Masks
Vision allows you to create and use two types of dataset masks—analysis and terms masks— as well
as a raw detector mask. A detector mask can be created more quickly, but it requires more precise,
individual part positioning. and the masked portions are permanently removed from the measured
data. Analysis and terms masks, which block data only while they are applied, provide more post-
analysis options.
Processing Data 6-11

Analysis Mask
An analysis mask enables you to view or analyze only specified portions of a dataset. When the
analysis mask is applied, Vision eliminates the blocked data from the analysis, and the surface
statistics change to depict the masked dataset. You can retrieve data that was blocked by turning off
the mask and reanalyzing the data.
Terms Mask
A terms mask acts like a filter, enabling you to specify an area that more accurately defines a surface
for terms analysis. You can use a terms mask to perform a tilt, curvature, or cylinder terms fit. The fit
that is performed on the masked area is then applied to the entire dataset.
A terms mask is particularly useful when you want to fit terms to a surface that has an abrupt
change, such as a step (see Figure 6-8). If you were to select tilt for terms removal based on the
entire surface (A), the resulting dataset would resemble a sawtooth (B). This sawtooth occurs
because the plane that best represents the data must take into account both planes forming the step.
This “best fit” plane is approximately the average of the two plane surfaces; subtracting it produces
the sawtooth.
If you define a terms mask that covers only one side of the step (C), the terms fit will then be based
on the best fit plane over the flat part of the sample only, resulting in a more accurate step (D).
A B
C D
Figure 6-8: Removing Tilt from a Step Height Measurement
Detector Mask
A detector mask blocks detector pixel elements during a measurement (see Settings on the
Measurement Options Tab on page 3-5). This mask is useful for eliminating regions of the surface,
such as irrelevant background features, from the analysis.
Unlike an analysis mask, a detector mask permanently eliminates data points from the raw data. The
only way to “retrieve” these lost data points is to disable the detector mask and make another
measurement of the same surface.

Creating and Editing Dataset Masks
To create and edit an analysis or terms mask:
1 Open a dataset.
2 Click the Mask Editor button , or select Edit » Edit Masks from the menu to open the Mask Editor
3 Select Analysis or Terms from the Current Mask section.
4 Use the Mask Editor tools to create or edit the mask ( see Using the Mask Editor Tools on page 6-13).
5 Click the Save button in the Current Mask section to save the mask to memory. (This does not save the
mask to disk.)
6 Click the On button in the bottom right of the Mask Editor tab.
Figure 6-9: Mask Editor Dialog Box
Using the Mask Editor Tools
NOTE – By right-clicking in the mask viewing region, you can select the size and the location
of the mask to be displayed in pixels or in mm.
To use the tools in the Mask Editor dialog box:

1 Select a cursor type from the Cursor menu. Move your cursor to the mask viewing region on the left half of
the Mask Editor dialog box.

• Select the Crosshair tool to set an insertion point wherever you click on your plot. You can also drag the
cursor point. Once you have an insertion point, you can choose to perform functions to the selected Point
of data, to data Above or Below the cursor, or to data to the Left or Right of the cursor, by clicking their
respective buttons.
• Select the Rectangle area tool to create a rectangular area by holding down the left mouse button and
dragging in the plot.
• Select the Circle area tool to drag and create a circular area.
• Select the Ellipse area tool to drag and create an elliptical area.
• Select the Polygon area tool to create a polygon with up to 50 sides. Place the mouse pointer over the
location of one point on the polygon. Click to set your starting point, position the cursor and click once for
each side you want to create, then double-click to set the shape in place.
2 If desired, move the defined area by holding down the Shift key while clicking and dragging it with the left
mouse button.
3 If desired, perform the following operations on the defined area:

• Click the Block button to block out sections of data. For example, if you are working with a circular cursor
tool, you select Block, and then click the Inside button; Vision then defines a mask that blocks all the data
inside the circle.
• Click Pass to allow data to pass through area(s) that may have been previously blocked. For example, if
you create a blocked inner circle, select Pass, and then click the Inside button, Vision defines a mask that
passes the data within the circle.
• Click Invert to invert the selected mask area (Inside, Outside, etc). Exposed portions of your plot are
masked, and previously masked portions are exposed.
• Click Inside to apply a selected function (Block, Pass, or Invert) to the inside of the area.
• Click Outside to apply a selected function (Block, Pass, or Invert) to the outside of the area.
• Click Entire to apply a selected function (Block, Pass, etc.) to the entire mask. This function can be used
at any time as long as a cursor tool is not in the process of being created.
• Click Undo to undo the most recent change made to the current mask.
• Click Invert Entire to invert the masked and unmasked areas for the entire image in the viewing region of
the Mask Editor dialog box.
• Click Pass Entire to erase the current mask.
4 If desired, create an outline of the mask on the dataset, and then modify the outlined mask while viewing the
data. With a mask visible in the viewing region of the Mask Editor dialog box, select Mask Outline from the
Cursor menu .This is useful when you are making measurements of samples in which similar features vary
slightly in size or position from sample to sample.
Using Height Threshold (Histogram) Masking

A height threshold mask can be used as either an analysis or terms mask by blocking data points of a
specified height or range of heights. This can be useful for looking at surfaces with features of
distinctive heights. You can also use a height threshold mask to mask spikes that are not in the normal
distribution of heights. When you create a height threshold mask, you examine a histogram of height
data to determine which heights to mask.
To mask by height threshold:
1 Click the Edit masks for this dataset button , or select Edit » Edit Masks from the Vision menu to
open the Mask Editor dialog box (see Figure 6-9).
2 Click the Hist button to display the Histogram dialog box (see Figure 6-10). This dialog box displays a
histogram of the height distribution for your measured sample. You have the option to create a high-pass,
low-pass, or range-pass mask.

Figure 6-10: Histogram Dialog Box for Height Threshold Masking
3 Select the number of cursors you want to use—one cursor for a high- or low-pass mask, and two cursors
for a selected range.
• If using one cursor, place your cursor at the cutoff point, then select Left (to mask all data left of the
cursor—lower than the cutoff) or Right (to mask all data right of the cursor—higher than the cutoff).
• If using two cursors, place the two cursors at the cutoff points and select Outside (to mask all data to the
left and right of the two cursors) or Inside (to mask all data in the range between the cursors).
4 Press Mask. The Mask Editor masks the selected region(s) and adjusts the histogram accordingly.
You can repeat this process as many times as desired on the same histogram.
Saving Dataset Masks

NOTE – Analysis and terms masks can be automatically saved with the dataset. Datasets
are stored as either raw data or processed data. If a mask is applied during analysis, the mask
is stored with the processed data. When you reopen the dataset, the mask can be reapplied
to the dataset by turning on the mask.
You can save dataset masks in a number of different ways.
Saving a Mask for Only the Current Dataset

When you click Save in the Mask Editor dialog box and then click On, your mask is used for only
the open dataset. This mask will not be applied to subsequent measurements, and if you close the
dataset without saving the mask to the configuration file, it will not be automatically applied the next
time you open the dataset. Rather, you must reapply the mask by turning it on again.

Permanently Applying a Mask to a Dataset
You can save a terms or analysis mask with a particular dataset’s configuration file. From then on,
every time you open that dataset, the mask will be present. It will not be applied to subsequent
measurements.
To permanently apply a mask to a dataset:
1 Create the mask.
2 Select On in the Current Mask section of the Mask Editor dialog box, and click Save (see Figure 6-9).
3 Select File » Save Dataset from the Vision menu to save the mask to the current dataset file.
Saving a Mask File to Apply to Any Dataset

Terms, analysis, and detector masks can all be saved independently of a dataset. By saving a mask
separately from the a specific set of data, you can apply it to different datasets.
To save a mask file:
1 Open the Mask Editor dialog box.
2 Select To/From Disk from the Current Mask menu.
3 Click Save and enter a file name for the mask. The mask is saved into the specified directory with a .msk
extension.
Applying Dataset Masks

After a mask has been created and saved, you can use the mask for both data analysis and
measurements.
Applying a Mask to a Saved Dataset

To apply a saved analysis or terms mask to an existing (unmasked) dataset:
1 Select Edit » Edit Masks from the Vision menu.
2 From the Current Mask menu of the Mask Editor dialog box, select To/From Disk.
3 Click Load and select your .msk file.

4 Select Terms or Analysis from the Current Mask menu of the Mask Editor dialog box, and then click
Save.
5 Click the On button.
6 Select your mask and press OK. The selected mask is applied to the current dataset only.
Applying a Mask to a New Measurement

To apply a saved analysis or terms mask to a new measurement:
1 Select Edit » Set New Measurement Mask from the Vision menu.
2 Enter the path and the file name of your saved mask in the Terms Mask or Analysis Mask field. You may
use the Browse button to determine the location of your mask.
• Select the Apply to Stored Data check box in the new Measurement Masks dialog box, and then click
OK.

• Select Analysis » Processed Options to access the Processed Options dialog box, and then proceed
as follows:
a. Click the Masking tab (see Figure 6-5).
b. Select either the Use Analysis Mask or Use Terms Mask check box.
c. Click other tabs in the Processed Options dialog box to select any terms to be removed, or to apply
filtering, data invert, and data restore options (see Applying Processed Options on page 6-1).
d. Click OK.
The selected mask now will be applied to the data from all new measurements.
Selecting Mask Views

To select a mask viewing option:
1 Open the Mask Editor dialog box (see Figure 6-9).
2 In the View section, click one of the following:
• Data to see data wherever the mask is set to Pass.

• Data & Mask to view the data and mask in four color sets. Data appears as either present or missing, as
follows:
• White indicates that data is present and unmasked.
• Green indicates that data is present and masked.
• Black indicates that data is missing and unmasked if a detector mask is not applied. If a detector mask
is applied, black can indicate missing and masked data.
• Red indicates that data is missing and masked.
• Mask to view the mask itself.
Selecting Data Displays

In the Data section of the Mask Editor dialog box, you can choose to display data before or after
processing:
• Select Raw to see the data in its unprocessed state, without any terms applied. When making
changes to a mask that has already been applied, raw data is sometimes better to use because
the analysis mask has not been applied to it.
• Select Processed to see the data with any masks, terms, or other options that have been applied
to it.
• Select Intensity to see the data as it appears in the Intensity window.
Creating and Editing Detector Masks

Before you create a detector mask, make sure that your sample be in proper focus in the Intensity
window. When a detector mask is used, it appears as a green overlay in the Intensity window.
To create or edit a detector mask:
1 Open the Measurement Options dialog box by clicking the Measurement Options button on the
toolbar or selecting Hardware » Measurement Options from the menu.
2 Select the On check box in the Detector Mask section (see Figure 6-11).

Figure 6-11: Measurement Options Tab with Detector Mask Selected
3 Click the Edit button to open the Mask Editor dialog box, where Detector is automatically selected in the
Current Mask section.
4 Use one or several of the mask editor tools to create and edit your detector mask (see Using the Mask
Editor Tools on page 6-13).
Applying Detector Masks

Detector masks can be saved and viewed in the same manner as dataset masks.
To apply a detector mask:
1 Select Edit » Set New Measurement Masks from the menu.
2 Enter the path and file name of your saved detector mask in the Detector Mask field or click Browse to
determine the location of your mask.
3 Click OK.
4 Select Hardware » Measurement Options from the menu.
5 On the Measurement Options tab, select the On check box in the Detector Mask section
(see Figure 6-11).

7
GRAPHICAL DISPLAY FILES
Vision provides a large number of graphical output display files that allow you to produce
meaningful data from test results. These files either have a .wdf (Wyko Display File) extension or a
.cdf (Custom Display File) extension. You can create and edit custom display files to fit your
specifications.
STANDARD DISPLAY FILES

Several standard plots enable you to display and analyze the raw and filtered data from your
measurements.
Contour Plot
The default .wdf display file is the contour plot, a color-coded topographical map of the surface that
includes the basic measurement statistics and a contour plot of the surface features (see Figure 7-1).
NOTE – To change your default display file to something other than the Contour Plot,
see Selecting a Default Output File on page 7-12.
Graphical Display Files 7-1

.
Figure 7-1: Contour Plot
To display the contour plot of your dataset:

• Click the Contour Plot button on the toolbar.
• Select Analysis » Processed » Contour from the menu.
• Click the Custom Analysis Options button , select Contour Plot, and then click
Calculate.
2D Analysis Plot
The 2D Analysis Plot displays histograms taken from the surface height data (see Figure 7-2). You
can use cursors to adjust the locations and size of the region from which the histograms are taken.
7-2 Graphical Display Files

Figure 7-2: 2D Analysis Plot
To display a 2D Analysis Plot of your dataset, do one of the following:

• Click the 2D Analysis button on the toolbar.
• Select Analysis » Processed » 2D Profile on the menu.
• Click the Custom Analysis Options button , select 2D Analysis, and then click Calculate.
You can right-click on the plot and select Plot Properties to open the the 2D Plot Properties dialog
box, where you can remove terms, change the Z-axis limits, change the cursor width, and show or
hide informational balloons.
Right-clicking on the plot also provides an option for exporting the data as a .csv file.
Figure 7-3: 2D Plot Properties Dialog Box

3D Plot
The 3D Plot provides a three-dimensional rendering of the surface data.
Figure 7-4: 3D Plot
To display the 3D plot, do one of the following:

• Click the 3D Plot button on the toolbar.
• Select Analysis » Processed » 3D from the menu.
• Click the Custom Analysis Options button , select 3D Plot, and then click Calculate.
Right-click on the 3D plot, and do one of the following:
• Click Plot Options to open the Plot Options dialog box. This dialog box allows you to change
the viewing angle of the plot, add highlights or shading, or add perspective to the plot.
• Click Color, Background Color, or Max Contrast to change the colors in which the plot is
displayed.
3D Interactive Plot
Like the 3D plot, the 3D Interactive Plot presents a three-dimensional contour map of the surface.
However, it allows more options for customization of the data.

Figure 7-5: 3D Interactive Plot
To display the 3D Interactive Plot, do one of the following:

• Click the 3D Interactive Plot button on the toolbar.
• Select Analysis » Processed » 3D Interactive Plot and click OK.
• Click the Custom Analysis Options button , select 3D InteractivePlot, and click
Calculate.
Click on the contour map and drag the cursor to rotate the plot and view it from different angles.
Right-click on the contour map and select Plot Options. The 3Di Settings dialog box appears.

Figure 7-6: 3Di Settings Dialog Box
Use the options in the 3Di Settings dialog box to:

• Customize the highlighting and shading by selecting any combination of lighting angle
selectors.
• Add a Base, Axes, Floor, or Legend.
• View the plot as a series of stylus-type traces with a Line Plot.
• Adjust the Zoom, Scale, or the “shininess” of the plot.
• Enhance the imagine rendering.
• Drag a cursor to change the perspective of the plot.
Intensity Plot
Intensity data is stored with most datasets. The Intensity plot shows the raw intensity from one frame
at every point in the dataset. It includes a contour plot and 2D profile plots in the X and Y directions,
which show the intensity along the crosshairs on the contour plot.

Figure 7-7: Intensity Plot
To see the intensity plot for your measurement, click the Custom Analysis Options button ,
select Intensity Plot, and then click the Calculate button.
You can right-click on the plot and select Plot Properties to open the the 2D Plot Properties dialog
box (see Figure 7-3) or export the data as a .csv file.
Modulation
The modulation plot maps the change in fringe intensity that occurs as the phase is shifted during a
measurement, or the amount of intensity variation that occurs during phase-shifting. To see the
intensity plot for your measurement, click the Custom Analysis Options button , select
Modulation Plot, and then click the Calculate button.
Figure 7-8: Modulation Plot

To display the Modulation Plot for your measurement, click the Custom Analysis Options button
, select Modulation Plot, and then click the Calculate button.
You can right-click on the plot and select Plot Options to change the lighting settings.
CUSTOM DISPLAY FILES

Your customer representative may provide you with one or more custom display (.cdf) files designed
for your particular application. You can choose to use one of those output files, or you can create
your o your own custom display files (.cdf) to display new types of information. They are stored in
c:\Program Files\WYKO\Vision\WDF.
You can use .cdf files in the following ways:
• Open a .cdf file for viewing.

• Link your .cdf file to an analysis. The system will then always use it when you perform
that analysis.
• Set the default display to use your .cdf file. The system will then always use it
whenever you open a dataset or make a measurement. This is especially suitable for
automation.
NOTE – You can also select Edit » Open Custom Display to view and edit an existing
custom display file. It is often easier to alter an existing file than to create one from scratch.
You may also edit standard display files (.wdf files). However, if you choose to edit a standard
file, be certain to save it with a different name, or you will lose the standard file.
Loading a Custom Display File

1 Click the Custom Analysis Display button on the toolbar or select Analysis » Custom Display
from the menu.
2 Locate the desired .cdf file in the Select Custom Plot File dialog box (see Figure 7-9).
3 After selecting the appropriate .cdf file, click Open to load the custom display.

Figure 7-9: Custom Plot File Search Box
Creating a Custom Display File

1 Select Edit » Create Custom Display from the Vision menu. This opens the CDF Editor, which contains a
blank display file for editing. Select Edit to open the Edit menu.
Figure 7-10: Custom Display Edit Menu

2 Do one or more of the following:
• To add a rectangle to the display, select Edit » New Rectangle. Select the Filled Rectangle check
box to add a filled rectangle, and then select the fill color. Click OK to add the rectangle to the display
file, and then size it and position it in the window.
• To add headings or other text, select Edit » New Static Text. Enter the text string, its size and
typeface, and then click OK. Position the text in the window.
• To add an analysis result field, select Edit » New Analysis Result. Select the result from the list,
define its text characteristics on the left, then click OK. Position the field in the window.
• To add an analysis results table, select Edit » New Results Table. In the Results Table dialog box,
specify a label for the new table, and click the Add button to select which analysis results you would
like the table to contain (see Figure 7-11). When finished, click OK. Position the table in the window.
.
Figure 7-11: Results Table Dialog Box

3 To insert a graphic, figure, or logo in the display, select Edit » New Metafile.
Figure 7-12: New Metafile Dialog Box

In the Metafile Item dialog box:
• Type the metafile name or or click Choose Metafile to locate the desired file. Note that metafiles use a file
extension of .wmf.
• Select the Maintain 1:1 Aspect Ratio check box to ensure that your metafile will not distort when the
window is resized.
• Click OK.

NOTE – One use of a metafile is to display a "golden" part against which all other parts will
be compared. To do so, take a measurement of a "perfect" (golden) part, then perform the
pertinent Analysis on the dataset. Select Edit » Copy to Metafile, and save your data as a
.wmf file. You can then add it to your display.
4 To add a database chart, select Edit » New DB Chart.
Figure 7-13: DB Chart Item Dialog Box

In the DB Chart Item dialog box:
• Select an item from the X Axis list (for example, via mean depth) and then select an item from the Y Axis
list (for example, via top diameter). The result is a database chart scatter plot.
• Click OK.
5 To add a plot, select Edit » New Plot Item. Select the desired type of plot from the list, choose the required
calculation, then click OK. Position the plot in the window.
Figure 7-14: Plot Object Item Dialog Box

6 Select Save Custom File As from the menu. Specify a name and save the custom display file for future
use. As you do so, bear these factors in mind:
• Saving your display as a .cdf file ensures that the .wdf files are preserved.
• You may, however, overwrite a .wdf file with your modified file.
• Vision automatically installs a \wdf subdirectory as a convenience.
7 Exit the CDF Editor to return to Vision.
SELECTING A DEFAULT OUTPUT FILE

The Default Output File is the display file that appears each time you click the New button to
take a measurement. Initially, this is the contour plot (see Figure 7-1).
To change the default output display:
1 In Vision, close all plots and analyses.
2 Select Output » Default Output from the menu. The Default Output dialog box appears (see Figure 7-
15).
3 Select the default output display format to use. If you want to use a custom display file (.cdf), click Browse
to select the path to the file.
4 Click OK to accept the new default display.
Figure 7-15: Default Output Dialog Box

SETTING THE UNITS
You may want to display your data in specific units or in a common unit system. To do this, click the
Units Options button on the toolbar, or select Options » Units to open a dialog box that allows
you to choose the units (English or metric) and magnitude you prefer (see Figure 7-16).
This option can be set before the measurement and saved in the configuration file, or it can be
changed at any time after the measurement. In addition, you can set the selected units as the default
for future measurements by selecting the Set as Default check box.
Figure 7-16: Units Dialog Box

SETTING TITLES AND USER NOTES
Vision offers two customizable fields on most display files: Title and Note. The title and note are
displayed on any of the standard display files. You may also add them to any custom display files.
These fields can also be added to a database, where they appear under the “Raw Data” analysis in the
list of available fields. For more information, see Chapter 8.
If you selected the Prompt for Title check box in the Hardware » Measurement Options »
Prompts dialog box, you will be presented with the Set Title and Note dialog box before each
measurement. It will contain the current title, which you can use or change.
NOTE – Vision does not automatically save the titles or notes that you add to the
dataset. To save the changes to your dataset, select File » Save Dataset from the Vision
menu. (See Chapter 8 for more information on saving datasets.)
To set the Title and Notes:

1 Select Options » Set Title/Note from the menu.
2 Enter the title/note text in the appropriate fields in the Title/Note dialog box (see Figure 7-17).
3 Select the Bar Code Reader check box if you are using a reader with your system. Be sure to select the
Prompt for Title check box in the Hardware » Measurement Options » Prompts dialog box when using
this option.
4 Click OK. The active dataset is automatically updated.
Figure 7-17: Title/Note Dialog Box
SETTING USER NOTES AND LABELS

Vision allows you to set various User Notes, which are saved with the file but do not appear on the
display file. They may be viewed when the file is open. These parameters are optional; they will
remain blank if you do not set them.

User Notes are text fields that can be filled in by an operator at the time of a measurement. The
information can appear in display files or be saved to a database.
If Prompt for User Notes is selected on the Prompts tab of the Measurement Options dialog box,
users will be prompted to enter notes during each measurement. Notes can also be appended to a
dataset after the measurement by selecting Options » Set User Notes.
User Labels are the names that identify user note fields. The default labels are "UserNote1,"
"UserNote2," etc. You may change the labels to include such identifiers as Operator, Shift, and Lot
Number.
To set the labels:
1 Select Options » Edit User Labels, then enter the text to appear for each note.
2 Enter text in the appropriate fields.
3 Click OK. The notes are appended to the active dataset. They are not visible on the display file.
After you have defined user note labels, they appear in the Results list. You can then select
them for use in databases and custom displays. Select Options » Set User Notes from the menu.
Figure 7-18: User Notes Dialog Box

8
STANDARD ANALYSES
Analyses are the specific calculations performed on measurement data to return particular results
about the test part. Vision can perform many analyses on data. You can even open several windows
simultaneously to compare various analyses of the same measurement data.
This chapter describes some of the surface parameters that a variety of analyses calculate, as well as
some of the standard analyses you can use on data acquired with your Wyko NT9100 profiler. Other
analyses, such as those in the Advanced Analysis Package, are covered in separate documentation.
NOTE – For instructions on stitching datasets, see Appendix C.
ANALYZING SURFACE PARAMETERS

The NT9100 profiler and Vision measure and analyze a wide variety of surface parameters associated
with roughness, peaks, valleys, profile symmetry, spatial frequency, and randomness. Typically, a
number of these parameters are required to accurately define a surface or process. There are three
general types of parameters for evaluating roughness, peak, and valley numbers:
• Averaging parameters specify the average of all heights in a defined length or area. Ra (average
roughness) and Rq (root mean square roughness) are two of the common averaging calculations
that Vision performs.
• Extreme value parameters specify only the greatest height (in terms of peaks and valleys). Rp,
Rv, and Rt calculations fall into this category.
• Averaged extreme value parameters specify the average of a defined and limited set of extreme
values within a defined length (for example, Rpm, Rvm, and Rz calculations).
Vision uses these basic calculations, as well as variations and extensions of them, to allow you to
perform many detailed analyses of your measurement data.
Standard Analyses 8-1

SELECTING AN ANALYSIS
Typically, each analysis includes its own output display that shows the relevant statistics and plots for
that analysis.
To run an analysis and display the results:
1 Select Analysis from the Vision menu
2 Select the desired analysis from the list.
This list contains only a few of the more common analyses that you will use. Other analyses are available
as individual icons on the Vision toolbar. You can view a full list of standard and custom analyses by
clicking the Custom Analysis Options button .
3 Click Calculate to perform the selected analysis and display the output.
STANDARD ANALYSES
The following analyses are standard on your Wyko NT9100 profiler.
Raw Surface Analysis

The Raw Surface Analysis displays the unfiltered surface statistics (Ra, Rq, Rt, and raw average) of
your measurement (see Figure 8-1).
To perform a raw surface analysis, click the Custom Analysis Options button , select RawStats
Analysis, and then click the Calculate button.
Figure 8-1: Raw Surface Analysis
8-2 Standard Analyses

Filtered Histogram
The Filtered Histogram analysis shows the distribution of individual surface height values in histogram
form, indicating how often various heights occur in the data array (see Figure 8-2). The horizontal axis
indicates the individual height values, while the vertical axis shows the number of data points contained
within equally spaced intervals (bins).
To perform a filtered histogram analysis:
• Select Analysis » Filtered Histogram » Calculate; or
• Click the Custom Analysis Options button , select Filtered Histogram Options, and
click the Calculate button; or
• Click the Filtered Histogram Analysis button on the toolbar.
Figure 8-2: Filtered Histogram Analysis
Right-click on the plot and select Histogram Options to change and customize the histogram
settings.
Step Measurement
The step height calculation allows you to measure both regular and irregular steps of your part (see
Figure 8-3). A step is a surface structure characterized by a large height change that occurs over a
short distance. An ideal step has infinite slope between adjacent pixels. A regular step is defined as a
single- or double-sided step in the field of view. An irregular step is defined as several steps within
the field of view, all of roughly the same height but having varying widths.

NOTE – Step boundaries between dissimilar materials can affect the measurement results
by several nanometers. Ask your applications engineer for suggestions on making accurate
step measurements of this type.
To open and set up a step analysis, select Analysis » Step Measurement » Calculate from the
Vision menu; or click the Custom Analysis Options button on the toolbar, select Step
Measurement Options, and then click the Calculate button.
Figure 8-3: Step Measurement
Bearing Ratio
Bearing area is defined as the area of a surface intercepted by a plane parallel to the mean plane of the
surface. The bearing area ratio, also known as the material ratio, is the ratio of the bearing area to
the total evaluation area (tp).
The bearing ratio curve, also known as the material ratio curve, is a graphical representation of the tp
parameter in relation to the surface level. The bearing ratio curve shows how the bearing ratio varies
with level.
The bearing ratio curve is the curve generated by running a plane, extending parallel to the mean
surface plane, down through the surface, and is defined as the percentage of the plane that intercepts
material, versus the depth of the plane into the surface. This curve contains all of the amplitude
information of a surface (see Figure 8-4).

Figure 8-4: Bearing Ratio Analysis
To perform a bearing ratio analysis, click the Custom Analysis Options button on the toolbar,
select Filtered Bearing Ratio Options, and then click the Calculate button; or simply click the
Filtered Bearing Ratio Analysis button on the toolbar.
You can right-click on the resulting plot and select Bearing Options to set the Number of Bins,
Bearing Ratio Offsets, and Bearing Ratio Heights.
S-PARAMETERS ANALYSES
The S-parameter calculations focus on the three-dimensional nature of the surface texture. When you
perform an S-Parameter Analysis in Vision, the system calculates and displays the analysis results in
terms of S-parameters instead of the usual surface statistics.
Vision calculates the following categories of 3D surface texture S-parameters:
• S-Parameters Amplitude Analysis
• S-Parameters Spatial Analysis
• S-Parameters Hybrid Analysis
• S-Parameters Functional Analysis
Appendix B tells you how to perform an analysis for each category of S-parameters. Each set of
instructions is followed by definitions of the S-parameters that appear on the output display.

OTHER ANALYSES
Many other analyses are available for your NT9100 system, depending upon the optional software
packages that you have purchased (for example, the Stitching Package described in Appendix C ).
To access your other analyses options, click their respective icons on the Vision toolbar, or click the
Custom Analysis Options button and then choose the desired analysis.
For more information on the these analyses, see the separate documentation that came with your
purchased option or refer to your Vision Help.

9
DATASETS AND DATABASES
When you make a measurement, your NT9100 system determines the height of every point on the
sample. This data is the height profile, also known as the raw data. As discussed in the previous
chapter, Vision analyzes this raw data to determine the pertinent parameters.
You can store data and parameters in two forms: datasets and databases.
• Datasets allow you to view snapshots of your process.
• Databases allow you to store data over time and to view trends in your process.
DATASETS
A dataset contains raw data and parameters for a single measured part. Dataset files have an .opd
extension, which designates a binary format specific to Vision datasets. Dataset contents are shown
on-screen in a display file (see Chapter 6), which typically shows a plot of the data and a list of the
parameters.
Saving a Dataset
If you want to store the dataset, select Save Dataset from the File menu , and then provide a path and
file name for the .opd file. If you are in Lab Mode and using the same window for each new
measurement (see Appendix A), you must save your dataset, or it will be replaced by the next
measurement taken.
Opening a Dataset
Once you have stored a dataset, you can open it again at any time. To open a dataset, click the Open
button on the toolbar or select File » Open Stored Dataset from the menu, and then select the
.opd file to open. The data appears in the currently selected display file format.
If you change the way the data is displayed and save the dataset again, then the next time you open
the dataset, the new viewing options will be used.
Datasets and Databases 9-1

Current data can be from a just-completed measurement, or it can be from an existing dataset that you
have just opened.
DATABASES
A database stores analysis parameters from one measurement or from many measurements. Database
files are comma-separated-variable files with .csv extensions. Raw data are not recorded in a
database, so the plots of these files cannot be recreated.
Once you have made a measurement, you can store the results to a database.
Here are the basic steps for working with a database:
1 Define a database and the fields within it.
2 Select and activate the database for logging.
3 Select whether to log data automatically or manually.

4 Decide whether to add the contents of the current database to a master database.
5 View or print the results of the database file.
When you click the Database Options button on the toolbar, the Database Options dialog box
appears (see Figure 9-1).
Figure 9-1: Database Options Dialog Box
From the Database Options dialog box, you can access most of the database functions.
9-2 Datasets and Databases

Defining a Database
To work with a database you must first define the database file to use. If no database file exists, or if
you need parameters that differ from those in existing databases, you will need to define a new
database.
To define a database:
1 Select Database » Database Options from the menu or click the Database Options button on the
toolbar.
2 Click the Define button in the Database Options dialog box (see Figure 9-1) to open the Define Database
The fields available for use in the database are listed in the left-hand column. The right-hand column
displays the fields in the new database.
Figure 9-2: Define Database Dialog Box
3 Select a field in the Available Entries column, and then use the Add button to move it to the Selected
Entries column. You can also double-click a field to move it to the Selected Entries list.
NOTE – The Available Entries column displays the entries either alphabetically or by the
analyses that create them. Click Display All Entries to switch between the two views.
The Selected Entries column displays in the sequence selected.
4 To add fields from an existing database, click the Template button, then select an existing database file. All
fields in that database are added to the Selected Entries column for your new database. The template
option is particularly useful when you are creating a master database file.

5 To remove a field from the database, select the field in the right-hand list and click Delete. You can also
remove a field by double-clicking on it, or remove all fields by clicking Delete All.
6 Click the Units button to open the Database Units dialog box. Here you can set database values for
default, metric, or English units. Results logged to the database will appear in the units you select. Once
these units have been selected and saved to the database, they cannot be changed.
NOTE – If you do not select the units, Vision automatically selects the most appropriate
units for your data.
7 Once you have defined the database, click OK, and then specify a name for the file.
Pass/Fail Criteria for Database Fields

You can enter pass/fail criteria for each field in the database.
NOTE – When one or more data sets are open, the Options menu contains the Log to
Database Now command. If a database has been activated and the current dataset has not
been logged, this command is available for use. Select this option to add the current dataset
to the database.
To enter pass/fail criteria:

1 Click Pass/Fail in the Database Options dialog box (see Figure 9-1) to open the Define PassFail dialog
box (see Figure 9-3).
Figure 9-3: Define PassFail Dialog Box
2 From the Parameter list, select the field for which you want to set pass/fail criteria.

3 In the Pass Criteria section, enter the Tolerance for the Upper and/or Lower limits boxes.
4 From the Pass menus, select when the part should be passed or failed. The options are as follows:
• Always Select this to always pass the part (that is, use no pass/fail criteria).
• < Select this to pass if the measurement is less than the tolerance
• <= Select this pass if the measurement is less than or equal to the tolerance
• = Select this to pass if the measurement equals the tolerance
• > Select this to pass if the measurement is greater than the tolerance
• >= Select this to pass if the measurement is greater than or equal to the tolerance
5 Repeat the selection process for each field that requires pass/fail criteria.
6 Click OK. Pass/fail criteria are stored with the database.
Selecting and Activating a Database

Once you have defined a database, you must select it for use and activate it.
To select and activate a database:
1 Click the Database Options button on the toolbar.
2 In the Database Options dialog box (see Figure 9-1), enter the database path and name under Current
Database, or click Set to locate the database file.
3 Click Open to select the database.
4 Check the Database Active box to activate the database.
5 To deactivate the database, clear the Database Active check box.
Logging Data to a Database

When you are making measurements from within Vision, you can decide to store measurement
results automatically, semi-automatically, or manually:
• Automatic Logging automatically stores the results to a database when you close a dataset.
This is the default mode.
• Semi-Automatic Logging asks you, when you close a dataset, whether you want to store
results. To enable this mode, select the Prompt to Save check box in the Database Options
• Manual Logging stores results to a database only when you specifically request it. To manually
log to a database, first make sure the dataset from which you want to log data is open as the
active window. Then select Options » Log to Database Now from the menu. Statistics and
other information for the active data set are logged to the database.
Using a Master Database

A Master Database collects data from one or more databases. As discussed earlier, Vision can gather
per-part measurement results into a database that can be used for statistical process control. You can
also create and use master databases when you make measurements from within Vision.

Master Database files and current database files should use the same template to ensure consistency.
To make sure that the files are consistent, use the Template button to copy the template of the current
database to the new Master Database whenever you define a new Master Database file.
NOTE – To automatically display database results in List View when you open a
configuration (.ini) file, select the Display List View w/Open Configuration check box in the
Database Options dialog box. Save your configuration file.
To work with a Master Database:

1 Click the Database Options button on the toolbar to access the Database Options dialog box (see
Figure 9-1).
2 Select and activate the Current Database file that you want to add to the Master Database file.
NOTE – All database files used to update the master database must have the same fields
as the master database.
3 Either type in a Master Database path and file name, or click the Set button to locate a Master Database
file.
4 If you want the contents of the current database to be automatically printed after the Master Database is
appended, select the Auto Print check box.
5 If you want the contents of the current database to be automatically erased after the master database is
appended, select the Auto Clear check box.
CAUTION
The Auto Clear option erases logged data, so use it carefully.
6 Click the Update button to append the Master Database with the contents of the current database. The
current database values are appended to the end of the Master Database.
Viewing or Printing a Database File

You can view a database file on your monitor, or you can print a hard copy of your database file using
two different formats.
Viewing a Database File

Figure 9-1).
2 Click the List View button to select a database to view.
3 Make your selection and click Open. Vision displays a Database List View of the selected file. List View
includes the name of the database file, logged parameters, statistics, and pass/fail information (see Figure
9-4).

Figure 9-4: Database List View
You can also choose to view one or more of the fields as a graph or histogram. These options are
available from the View menu in the Database List View.
For information on using the List View options, see your Vision Help.
Printing a Database File

Figure 9-1).
2 Click the List View button to select a database file for viewing.
3 Make your selection and click Open. Vision displays a List View of the selected file.
4 From the database List View menus, select either File » Print All or File » Print Stats. If you choose Print
All, all logged parameters and their statistics will be included. If you choose Print Stats, only the overall
statistics will be included.

10
AUTOMATION
IMPORTANT! The automation function described in this chapter apply only to systems
that include the optional motorized X/Y stage.
When you want to automatically measure various points on a surface without measuring the entire
sample, you can define a set of locations and save them in an X/Y Stage File. Vision then uses this
file to program the movement of the motorized stage during a measurement. This option is especially
appropriate for measuring samples or locations that are not in a regularly spaced array.
To open the XY - Stage dialog box, select Hardware » Stage Control » X/Y (see Figure 10-1).
Figure 10-1: XY - Stage Dialog Box
Automation 10-1
When you open this dialog box, the Intensity window appears above it. This allows you to adjust
intensity and move the stage position with the mouse.
Figure 10-2: Intensity Window
There are three ways to set the locations at which automated measurements will be taken:
• Use the Location controls to place the markers manually.
• Use the stage movement control in the Intensity window to move the stage to each location and
mark it.
• Load an existing Stage File and define new fiducials.
These procedures are described in the sections that follow.
SETTING NEW LOCATIONS

You can use the Location controls in the XY - Stage dialog box to manually place new location
markers. Alternatively, you can set your new locations by using the Profiler Controls in the Intensity
window, along with a command in the XY- Stage dialog box.
Manually Setting New Locations

A marker identifies your chosen location in the XY - Stage Locations section of the XY - Stage
dialog box that corresponds to a physical measurement location on the stage.
10-2 Automation
The Location controls allow you to place markers manually, as well as to alter, move, or delete
markers already in place. In all cases, you must select the feature you want to use, then click in the
Stage Position window (see Figure 10-1) to place or modify the marker. You can choose from the
following Location controls:
Add Abs Allows you to place a marker on the Stage Position window by clicking the mouse
once on the desired location.
Ins Abs Allows you to insert an absolute marker into the current sequence by clicking the
mouse once on the desired location.
Add Rel Allows you to specify a marker location relative to an existing marker.
Ins Rel Allows you to insert a marker into the current measurement sequence relative to the
location of an existing marker in the sequence.
Move Allows you to click and drag an existing marker to a new location within the Stage
Position window.
AttributesGives the coordinate location of an existing marker when you click on the marker
in the Stage Position window.
Go To Allows you to click on an existing marker to automatically move the stage to the
location of that marker.
Delete Allows you to click on an existing marker to delete that marker from the
measurement sequence.
Del All Deletes all the markers in the stage file.
Tell Shows the current XY position of each of the markers.
Mark Places a marker in the Stage Position window corresponding to the current location
of the stage.
Set Order Allows you to specify the measurement order of the markers in the Stage Position
window. The default is the order the markers were created.
Defaults Sets the default pre- and post-delay times.
Setting New Locations by Moving the Stage

To move the stage to the desired location and then select that location for measurement:
1 Click the X-Y button in the lower right corner of the Intensity window to engage mouse-cursor control
for the stage.
2 Use the mouse to move the stage to the first measurement location (see Controlling the X/Y Movement of
the Motorized Stage on page 2-11).
3 Click the Mark button in the Location section of the XY - Stage dialog box (see Figure 10-1). A marker
corresponding to the current stage location is placed in the Stage Position window.
4 When you have placed all of your markers, click Save and enter a descriptive name. Your file is saved with
an .stg extension.
NOTE – You can save your file as a an X/Y Stage Coordinate file by using a .txt extension.
For a sample file, see Sample X/Y Stage Coordinate File on page 10-5.
You can place as many markers as you like with this method. As with the Location controls, the
default measurement order is the order in which you created the markers. You can view the order of
the markers, or you can change the order by clicking Set Order.
Automation 10-3
Using an Existing Stage File
To open a previously created X/Y Stage File, click Open and select the name of the file. The file will
have an .stg extension.
Alternatively, you can load a set of saved coordinates with fiducials or define a new set of fiducials.
By specifying the location of the fiducials prior to the measurement, you can direct the system to
compensate for spacing and skew differences between parts.
Fiducials define specific locations on a part to be used for aligning similar measurement parts to the
same stage sequence without having to remark each part location or recreate the Stage File each time.
The Stage Position window allows you to easily set the fiducials.
You can define two fiducials for the part. These fiducials will appear as yellow markers in the gray
Stage Position window.
Define Fiducials Click to mark the positions for the two fiducials on the part. Vision prompts
you to move to the first fiducial, and then to the second one. Click Add ABS
in the Location section to mark each fiducial.
Align Fiducials Click to align the fiducials on the current measurement part. Open the Stage
File containing the previously defined fiducials. Vision then prompts you to
align the first fiducial. Click OK when you have found the first fiducial, and
then locate the second one.
Delete Fiducials Click to delete the fiducial markers from the Stage Position window.
SETTING OTHER OPTIONS IN THE XY - STAGE DIALOG

BOX
The following options in the XY - Stage dialog box can help you create your Stage File:
• Display Allows you to choose which units (inches or millimeters) to use when displaying the
Stage Position window. In addition, you can view the stage position block at 1X or 2X.
• Options Click to display the following buttons:
• Test Moves the stage to each marker location in the measurement sequence, allowing you to
verify that each marker is in the correct location.
• Halt Stops the Test run.
• Init Stage Initializes the stage.
• Set Zero Sets the current location of the stage to the zero position.
• Clear Zero Clears the current zero location and initializes the stage. The zero location
returns to the default location (the location at which the stage stops after initializing).
• Other Allows you to set the stage to unload upon completion of the measurement sequence.
10-4 Automation
SAMPLE X/Y STAGE COORDINATE FILE
The following is a sample XY Stage Coordinate file, which you should save with a .txt extension.
mm Specifies that the coordinates are in millimeters. If this line is not present, the
measurement units default to inches.
3 Specifies the number of measurements.
1.320 2.003 Specifies the coordinates of the first fiducial, separated by white space.
4.050 -4.621 Specifies the coordinates of the second fiducial, separated by white space.
2.227 -0.760 Specifies the coordinates of Measurement Marker #1.
1.437 -3.094 Specifies the coordinates of Measurement Marker #2.
2.980 3.086 Specifies the coordinates of Measurement Marker #3.
SAVING AN X/Y STAGE FILE

To save the stage file that you have created, click Save and enter a descriptive name. Your file is
saved with an .stg extension.
NOTE – When backing up a configuration file that includes a stage or mask file, you must
also back up the .stg and .msk files to save them as part of the configuration file.
RUNNING AN X/Y STAGE FILE

To make a series of automated measurements by running an X/Y Stage File:
1 Select Hardware » Stage Control » X/Y to open the XY - Stage dialog box (see Figure 10-1).
2 Click Open and select your X/Y Stage File.
3 Click the Measurement Options button on the toolbar (or select Hardware » Measurement
Options on the menu) to open the Measurement Options dialog box.
4 Click the Automation tab, and make these settings:
• Select the Use Stage Movement check box.

• Select the Automation check box.
• Enter 1 in the Measurement Cycles field.
5 Set the other options on the tabs associated with the Automation tab according to the instructions in
Settings on the Automation Tab on page 3-21.
6 Take the series of automated measurements by clicking the New button on the toolbar.
Automation 10-5
NOTE – If you will be measuring more than ten locations, you can direct Vision to
automatically save and close each dataset on the Automation tab of the Measurement
Options dialog box. Be sure to use the variable tags when assigning sequential file names to
your measurements (see Settings on the Automation Tab on page 3-21).
SETTING UP AUTOMATION IN AN XY GRID STAGE FILE

7An XY Grid Stage file is used when parts or measurement locations are in a regular array of rows
and columns. Before creating this file, you must first define a grid in the Setup Grid dialog box (see
Figure 10-3).
Figure 10-3: Setup Grid Dialog Box
10-6 Automation
Defining a Grid
To define a grid:
1 Select Hardware » Stage Control » X/Y - Grid to open the Setup Grid dialog box (see Figure 10-3).
NOTE – When the stage options are selected for the first time, the system automatically
initializes the stage.
2 Click New in the Grid section.
3 Enter the number of rows and columns, along with the dimensions of each cell.
4 Click OK. The grid that you defined now appears in the Grid section.
5 To modify this grid, click Modify while the grid is open. Then do one or more of the following:
• To activate a cell location for measurement, click on the cell. It appears indented, indicating that it is “set.”
• To activate all the cells, click Set All in the Cells section.
• To clear all the cells so none are set for measurement, click Clear All.
• To select or clear an individual cell, row, or column, right-click on it. A menu appears, allowing you to
choose Set, Clear, Hide, or Unhide cells, rows, or columns.
• To teach Vision the dimensions of your cells, set all the cells in the grid, then click Teach Row or Teach
Column. Follow the instructions that appear on the screen.
• Select the units to display your grid in by choosing either in or mm in the Units section.
6 When the grid setup is complete, click OK. Keep the Setup Grid dialog box open, so you can create an XY
Grid Stage file.
Creating an XY Grid Stage File

Before you begin a stage measurement, you must specify a reference cell that Vision will use to
determine position and distance. The reference cell can be any active cell; however, the upper left cell
on the grid is usually selected.
NOTE – Each time the stage is initialized or a new stage file is opened, the reference cell
must be reset.
To select the top left cell of the grid as the reference cell:
1 Move the stage to the top left corner of your measurement area.
2 With the grid that you just created open in the Setup Grid dialog box, right-click on the top left cell in the
grid, and then select Set Reference. The top left cell appears outlined in yellow to indicate its status the
reference cell.
3 If you want to begin your measurements at a location other than the top left cell, right-click on that location
and select Set Start Cell. The new start cell is indicated with a green outline.
4 Move to any location in the measurement grid by right-clicking on an active cell in the grid and selecting
Move Stage Here. Normally, the stage moves from top left to bottom right, measuring all the locations in
one row before moving to the next.
5 After you have chosen the locations you want to measure, click the Test button to verify that your settings
are correct. Vision moves from active cell to active cell. Watch the sample in the Stage Position window to
Automation 10-7
verify that the entire area to be measured is covered by the test pattern. If this is not the case, reteach or
reenter the dimensions of your cells.
6 If the test pattern starts in the wrong location, reset the Reference and/or Start Cell locations.
7 If you want to remove the part, click Unload. The stage moves to its unload position (forward and left) to allow
you easy access to the part without interference from the objectives.
8 If your sample is skewed slightly from the axes of the stage, correct the problem by clicking Skew in the
Configure section. From the following three types of skew correction, choose the one that best
accommodates your sample:
• Rectangle: Use for samples that are rectangular but slightly angled on the stage. This type of correction
uses two fiducials to calculate the required correction.
• Rhombus: Use for samples that are not in a perfectly rectangular grid, but are still in straight rows and
columns. This type of correction requires three fiducials to calculate the necessary correction.
• Quadratic Use for samples on which the rows or columns of the array are slightly curved. This type of
correction requires four fiducials to calculate the correction.
9 Follow the on-screen instructions to mark fiducials on your sample. Vision uses the locations of the
fiducials to calculate the necessary correction. Based on the locations you set, Vision will automatically
calculate the skew and correct for it in the motion of the stage.
10 Clicking Save in the Script section. The file is saved with a .stg extension.
Running an XY Grid Stage File

After you have created an XY Grid Stage File, you can run it to make a series of automated
measurements.
To make a series of automated measurements using an XY Grid Stage file:
1 Select Hardware » Stage Control » X/Y - Grid to open the Setup Grid dialog box (see Figure 10-3).
2 Click Open and select your XY Grid Stage File.
3 Click the Measurement Options button on the toolbar (or select Hardware » Measurement
Options on the menu) to open the Measurement Options dialog box.
4 Click the Automation tab, and then select the Use Stage Movement check box.
5 Set the other options on the tabs associated with the Automation tab according to the instructions in
Settings on the Automation Tab on page 3-21.
6 Take the series of automated measurements by clicking the New button on the toolbar.
NOTE – If you will be measuring more than ten locations, you can direct Vision to
automatically save and close each dataset on the Automation tab of the Measurement
Options dialog box. Be sure to use the variable tags when assigning sequential file names to
your measurements (see Settings on the Automation Tab on page 3-21).
10-8 Automation
A
CUSTOMIZING THE VISION
MENUS AND TOOLBARS
Wyko Vision works with your profiler to provide powerful measurement and analysis capabilities.
The menu-driven, customizable software allows you to:
• Toggle Vision between Lab (full access) or Production (limited access) Modes.
• Use menus to access the software control options.
• Use toolbar buttons as shortcuts to the most frequently used options. You can customize these
buttons to display the options you work with most often.
LAB MODE VERSUS PRODUCTION MODE

Vision contains two screen modes that give you different access privileges.
• Lab Mode provides access to all analyses and configuration options, as shown in Figure A-1.
• Production Mode is limited to only the basic options required to take measurements according
to a preset configuration file, as shown in Figure A-2.
Figure A-1: Standard Vision Toolbar (Lab Mode)
Customizing the Vision Menus and Toolbars A-1

Figure A-2: Standard Vision Toolbar (Production Mode)
To switch from Lab Mode to Production Mode, click the Screen Mode button on the toolbar, or
select Options » Screen Mode.
NOTE – Always set a password that the user must enter when returning to Lab Mode from
Production Mode. In Lab Mode, select Options » Password to open the Password Edit
dialog box. Enter the old password, and then enter your new password. Click OK to accept
the change.
To switch from Production Mode to Lab Mode, click the Lab Mode button on the
toolbar, and then enter the password.
When switching in either direction, you are prompted to select one of the following screen mode
options (see Figure A-3).
• Lab (new window each measurement), which allows full access to all Vision options and
creates a new window for each new measurement.
• Lab (measurement window reused), which allows full access to all Vision options but uses
the same window for each new measurement.
• Production (limits user access), which allows access to Production Mode toolbar functions
and some additional Vision functions.
• Production w/Full Lockout, which allows access to production mode toolbar functions only.
Select the mode you want, and then click OK. If you want Vision to use your selection as the default
screen mode, select the Set as Default check box.
Figure A-3: Screen Mode Options
A-2 Customizing the Vision Menus and Toolbars

CUSTOMIZING THE MENUS
Vision menus give you full access to all the standard and any optional functions that you have
purchased for your NT9100 profiler. In addition to editing the icons that appear on your toolbar (see
Editing the Toolbar on page A-6), you can customize some of your menu options.
To customize the options that appear on the Analysis menu:
1 Select Edit » Edit Menu to open the Customize Menu dialog box (see Figure A-4). The Unused Menu
Entries list contains analyses that are not currently included on the Analysis menu but are available for
use. The Active Menu Entries list contains the analyses that are currently available on the Analysis
menu.
2 Do one or more of the following:

• To add an analysis to the menu, select it in the Unused Menu Entries list, and then click Add. Your
selection is placed beneath the currently highlighted option in the Active Menu Entries list.
• To add a separator between analysis options on the menu, select an analysis option in the Active Menu
Entries list. Click Separator to place a separator line beneath the selected analysis.
• To remove an analysis option or separator from the menu, select the analysis or separator line in the
Active Menu Entries list, and then click Remove. If you have selected an analysis option, it is moved to
the Unused Menu Entries list. If you selected a separator line, it is removed.
Figure A-4: Customize Menu Dialog Box
3 Select any other options that may be applicable:
• Click Load Default Menu to load the Vision default Analysis menu options.

• Select the Save as Default for All Configuration Files check box to save your customized menu options
as the default for your current work session, as well as for all configuration files. When this check box is
cleared, Vision applies your most recent changes only to the current work session.
4 Click OK to accept your changes.
NOTE – See the your Vision Help or the separate documentation that came with any
purchased software options to learn about other menu changes you can make.
STANDARD TOOLBAR BUTTONS

Toolbar buttons provide shortcuts to the most frequently used options. Although you can customize
the toolbar, you should first understand the functionality of the most commonly used buttons.
NOTE – Additional buttons may be present on your toolbar, depending upon the software
package and options that you have purchased. For additional information, see your Vision
Help, or the separate documentation that came with your purchased analyses package.
New (Lab Mode) or (Production Mode). Click this button to make a measurement
using the current configuration file. When the system completes the measurement, your results appear.
Open (Lab Mode). Click this button to open a dataset for viewing and analysis.
Save (Lab Mode). Click this button to save the current dataset.
Open a configuration file (Lab Mode) or (Production Mode). Click this button to
access the Open a config file dialog box. From this dialog box, you can select a configuration file for
measuring features.
Save a configuration file (Lab Mode). Click this button to save the current configuration file settings.
Print (Lab Mode). Click this button to print the current dataset.
Measurement Options (Lab Mode). Click this button to open the Measurement Options dialog box,
where you can customize measurement and analysis parameters.

Set the Intensity (Lab Mode) or (Production Mode). Click this button to open the
Intensity window, where you can adjust intensity for manual measurements.
Processed Options (Lab Mode). Click this button to open the Processed Options dialog box, where
you can set various data-processing parameters.
Edit Masks for this dataset (Lab Mode). Click this button to open the Mask Editor dialog box, where
you can create and edit masks.
Custom Analysis Options (Lab Mode). Click this button to open the Custom Analysis dialog box,
where you can create custom display files.
Custom Analysis Display (Lab Mode). Click this button to select a custom display file for your data.
Units Options (Lab Mode). Click this button to open the Units dialog box, which allows you to change
between English and metric display units.
Database Options (Lab Mode) or (Production Mode). Click this button to open the
Database Options dialog box. Here you can perform most database-related functions, such as defining
a database, updating a master database, or viewing the contents of a database file.
Contour Plot (Lab Mode). Click this button to view the current dataset as a contour plot display.
2D Analysis (Lab Mode). Click this button to view the current dataset as a 2D plot display.
3D Interactive Plot (Lab Mode). Click this button view the current dataset as a 3D plot display. You
can rotate this display with the mouse.
3D Plot (Lab Mode). Click this button to view the current dataset as a 3D plot display.
Filtered Histogram Analysis (Lab Mode). Click this button to perform a filtered histogram analysis of
the current dataset.
Filtered Bearing Ratio Analysis (Lab Mode). Click this button to perform a bearing ratio analysis of
the current dataset.
Show Current Stage Dialog (Lab Mode). Click this button to open the XY - Stage dialog box.

Cancel Measurement/Run (Lab Mode). Click this button to end the current measurement sequence.
Calibrate the Instrument (Lab Mode) or (Production Mode). Click this button to
verify calibration or to calibrate the system.
Edit Toolbar (Lab Mode) or (Production Mode). Click this button to edit the
buttons that are displayed on the toolbar.
Set Lab/Production Mode (Lab Mode) or (Production Mode). Click this button to
switch between Lab Mode and Production Mode.
Initialize Turret (Lab Mode). Click this button to initialize the motorized turret.
Initialize Multiple Magnification Detector (MMD) (Lab Mode). Click this button to initialize the
MMD.
Initialize Tip/Tilt (Lab Mode). This button does not work with the Wyko NT9100 system.
Initialize Filter Flipper (Lab Mode). Click this button to initialize the filter flipper.
Help (Lab Mode). Click this button to open the Vision Help system.
EDITING THE TOOLBAR

You can customize the toolbar in both Lab and Production modes to include only those operational
and analysis buttons that you use regularly. Production Mode, however, requires that you supply a
password before you can customize the toolbar.
To edit the toolbar:
• In Lab Mode, click the Edit Toolbar button or choose Edit » Edit Toolbar.
• In Production Mode, click , and then enter your password.
Either action opens the Customize Toolbar dialog box (see Figure A-5).

Figure A-5: Customize Toolbar Dialog Box
2 The Unused Toolbar Buttons list contains buttons that are not on the toolbar but are available for use. The
Active Toolbar Buttons list contains the buttons on the current toolbar. Do one or more of the following:
• To add a button to the toolbar, select a button in the Unused Toolbar Buttons list, and then click Add.
Your selection appears beneath the currently highlighted option in the Active Toolbar Buttons list. It will
appear to the right of that button on the toolbar.
• To add a separator between tool bar buttons, select a button in the Active Toolbar Buttons list. Click
Separator to place a separator line beneath the selected button.
• To remove a button or separator from the toolbar, select the button or separator line in the Active Toolbar
Buttons list, and then click Remove. If you have selected a button, it appears in the Unused Toolbar
Buttons list. If you selected a separator line, it is removed.
3 Select any of the following options that may be applicable:
• Load Default Toolbar. Click this button to load the Vision default toolbar options.
• Save as Default for All Configuration Files. Select this check box to save your most recent toolbar
changes as the default for your current work session, as well as for all configuration files. When this check
box is cleared, the program applies your most recent toolbar changes only to the current work session.
4 Click OK to accept your changes.

B
S-PARAMETERS ANALYSES
The S-parameter calculations focus on the three-dimensional nature of the surface texture. When you
perform an S-Parameter Analysis in Vision, the system calculates and displays the analysis results in
terms of S-parameters instead of the usual surface statistics.
Figure B-1 indicates the typical orientation of the images, as well as the X and Y axial directions for
the various calculations. The three dimensional calculations for the S-parameters are performed over
the complete dataset.
Figure B-1: The X and Y Directions for the S-Parameters Analyses
THE Z(X,Y) FUNCTION

In this appendix, Z(x,y) is identified as the function representing the height of the surface relative to
the best fitting plane, cylinder or sphere. The “a” used in the integral expressions implies that the
integration is performed over the area of measurement and then normalized by the cross-sectional
area of the measurement. Because the calculations are done digitally, the integral equations are
S-Parameters Analyses B-1

implemented as discrete summations over the measurement area. The Z(xy) function is depicted
below.
CATEGORIES OF S-PARAMETERS ANALYSIS

Vision calculates the following categories of 3D surface texture S-parameters:
• S-Parameters Amplitude Analysis
• S-Parameters Spatial Analysis
• S-Parameters Hybrid Analysis
• S-Parameters Functional Analysis
The following sections tell you how to perform an analysis in each category of S-parameters. Each
set of instructions is followed by definitions of the S-parameters that appear on the output display.
S-PARAMETERS AMPLITUDE ANALYSIS

The S-Parameters Amplitude Analysis calculates Sa, Sq, Ssk, Sku, and Sz.
Performing an S-Parameters Amplitude Analysis

To perform an S-Parameters Amplitude Analysis:
1 Open the dataset that you want to analyze.

• Click SParameters Amplitude Analysis on the toolbar.
• Click Custom Analysis Options , select SParameters Amplitude Analysis, and then click the
Calculate button.
• Select Analysis » Custom Options » SParameters Amplitude Analysis, and then click the
Calculate button.
The S-Parameters Amplitude Analysis output display appears.
B-2 S-Parameters Analyses

S-Parameter Amplitude
Parameters
Figure B-2: S-Parameters Amplitude Output Display
The Sa and Sq Amplitude Parameters

Sa and Sq are the Mean Roughness and Root Mean Square (RMS) Roughness evaluated over the
complete 3D surface respectively. Mathematically, the Sa and Sq can be evaluated as follows:
In Figure B-3, the plateau-like surface (A) and the peaked surface (B) both have Sa = 16.03nm and
Sq= 25.4nm , thus demonstrating the inability of Sa and Sq to differentiate the various texture
characteristics.
Figure B-3: SSK and SKU for Sloped and Peaked Surfaces

Applications of Sa and Sq
The Sa and Sq parameters represent an overall measure of the texture comprising the surface.
Figure B-3 shows two very different surfaces with identical Sa and Sq values. This indicates
the insensitivity of the Sa and Sq parameters for differentiating peaks, valleys, and the
spacing of various texture features.
Nonetheless, once a surface type has been established, the Sa and Sq parameters can be used
to indicate significant deviations in the texture characteristics. Sq is typically used to specify
optical surfaces, while Sa is used for machined surfaces.
The Ssk and Sku Parameters

Ssk and Sku are the Skewness and Kurtosis of the 3D surface texture respectively. A histogram of the
heights from an ideal Normal (that is, bell curve) distribution is represented by Ssk and Sku.
Mathematically, the Ssk and Sku can be evaluated as follows:
Figure B-4 and Figure B-5 show analyses with their SSK and SKU results.
Figure B-4: Surface Peaks with Ssk=3.20 and Sku=18.71

Figure B-5: Periodic Texture with SSK=0.16 and SKU=1.63
Applications of Ssk and Sku

Ssk represents the degree of symmetry of the surface heights about the mean plane. The sign
of Ssk indicates the preponderance of peaks (that is, Ssk>0) or valley structures (Ssk<0)
comprising the surface. Ssk is useful in specifying honed surfaces and wear measurements.
Sku indicates the nature of the height distribution. Therefore it is useful for indicating the
presence of either peak or valley defects such as scratches.
If the surface heights are Normally distributed (that is, a bell curve) then Sku is 3.00.
Surfaces composed of inordinately high peaks/ deep valleys have Sku>3.00. Sku<3.00
indicates gradually varying surfaces.
The Sz Parameter
Sz is the Ten Point Height over the complete 3D surface. It represents the average difference between
the five highest peaks and five lowest valleys.
A peak is defined as any point above all eight nearest neighbors, while a valley is any point that is
below all eight nearest neighbors. Peaks and valleys are constrained to be laterally separated by at
least 1% of the minimum X and Y dimension comprising the 3D measurement area.
Figure B-6 shows a predominantly low roughness (Sa= 0.12 m) surface with deep valleys detected by
Sz of 2.36 m.

Figure B-6: Valleys Detected by Sz of 2.36 m
Applications of Sz
Sz characterizes the average peak to valley magnitude, which contains most of the surface
heights. The texture of sheet steel is typically specified with Sz, as are shaft surfaces when
sealing applications are under consideration. When a surface is modified by different
production processes or wear mechanisms, Sz may show a change sooner than Sa or Sq.
S-PARAMETERS SPATIAL ANALYSIS

The S-Parameters Spatial Analysis calculates Sds, Str, Sal, and Std.
The Autocorrelation Function (ACF)

The S-parameters spacial parameters were developed using the advanced mathematical technique of
the autocorrelation function (ACF). Therefore, in order to correctly interpret the various spatial
parameters, you must understand the ACF.
The ACF is found by:
• Taking a duplicate surface (Z(x- x,y- y)) of the measured surface ((Z (x, y)).
• Mathematically multiplying the two surfaces together, with a relative lateral displacement (
x, y) between them.
• Integrating the resulting function normalizing to Sq to yield a measure of the area of overlap
between the two functions.
If the shifted version of the surface is identical to the original surface, then the ACF is 1.00. If the
shifted surface is such that all peaks align with corresponding valleys, then the ACF approaches
-1.00. Thus the ACF is a measure of how similar the texture is at a given distance from the original
location.

Here are some guidelines for interpreting the ACF:
• When the ACF stays near 1.00 for a given amount of shift, the texture is similar along that
direction.
• When the ACF falls rapidly to zero along a given direction, the surface is different and thus
“uncorrelated' with the original measurement location.
For the turned surface shown in Figure B-7 and Figure B-8, the ACF in the X direction falls to zero
quickly as the peaks of the shifted surface align with the mean plane. The ACF along X becomes
negative as the peaks of the surface align with the valleys of the shifted surface. Shifting along the Y
direction, the surface is near identical to the original, which causes the ACF in the Y direction to
remain near 1.00.
Figure B-7: Turned Surface
Figure B-8: ACF of Turned Surface in X and Y Directions

Performing an S-Parameters Spatial Analysis
To perform an S-Parameters Spatial Analysis:

• Click SParameters Spatial Analysis on the toolbar.
• Click Custom Analysis Options , select SParameters Spatial Analysis, and then click the
Calculate button.
• Select Analysis » Custom Options » SParameters Spatial Analysis, and then click the Calculate
button.
The S-Parameters Spatial Analysis output display appears.
S-Parameter Spatial
Parameters
Figure B-9: S-Parameters Spatial Output Display
The Sds Parameter

The Summit Density (Sds) is the number of summits per unit area that make up the surface. Summits
are derived from peaks.
A peak is defined as any point that is above all eight nearest neighbors. Peaks are constrained to be
separated by at least 1% of the minimum X and Y dimension comprising the 3D measurement area.
Furthermore, summits are found only above a threshold that is 5% of Sz above the mean plane.
Figure B-10 shows a plot with and SDA of 2600 summits/mm2. Figure B-11 shows a 2D profile of
the same dataset. Note that the same criteria is applied to the 3D features of the surface.

Figure B-10: Surface with Sds ~ 2600 summits/mm2
Figure B-11: 2D Profile of Surface shown in Figure B-10
Applications of Sds
Sds is a key parameter for consideration of surfaces used in applications such as bearings,
seals, and electronic contacts. The manner in which the summits elastically and plastically
deform under load is related to the Sds parameter.
Depending on the application, a low Sds may result in high localized contact stresses, which
can produce pitting and debris generation. In applications involving sliding components, a
number of summits are needed to prevent optical contacting while maintaining a reasonable
load distribution.
Summit density may also be related to the cosmetic appearance of a painted surface.
The Str and Sal Parameters

Str is the texture aspect ratio, which is a measure of the spatial isotropy or directionality of the surface
texture.
Sal is the fastest decay autocorrelation length. Thus it serves as a measure of the distance over the
surface in an optimum direction such that the new location has minimal correlation with the original
location.

Figure B-12 shows a highly directitonal surface with an Str of 0.11 and a Sal of 37. Figure B-13
shows a highly isotropic surface with Str of 0.88 and an Sal of 21.
Figure B-12: Directional Surface with Str of 0.11 and Sal of 37
Figure B-13: isotropic surface with Str of 0.88 and Sal of 21 m
Applications of Str and Sal

Str helps determine the presence of lay in any direction. For a surface with a dominant lay,
the Str parameter tends toward 0.00, whereas a spatially isotropic texture results in a Str of
1.00. For applications in which a surface is produced by multiple processes, Str can be used
to detect the presence of underlying surface modifications.
Sal is a quantitative measure of the distance along the surface by which you would find a
texture that is statistically different from the original location. Sal helps establish the distance
between multiple measurements made on the surface to adequately determine its general
texture specification.
The Std Parameter

The S-Parameter spatial parameters were developed using the advanced mathematical technique of
the Angular Power Spectral Density Function (APSDF). Therefore, in order to correctly interpret the
Texture Direction (Std) parameter, you must understand the APSDF.

The APSDF
When based on Fourier analysis, the surface texture is composed of a series of sine waves in
all directions with different frequencies and amplitudes. The power spectral density function
(PSDF) is a measure of the amplitude of each sine wave for a particular frequency, along a
given direction. Thus, for a 3D surface:
• The PSDF appears as a 3D function in which the X and Y axes represent the various spatial
frequencies for a given direction.
• The amplitude of the PSDF (displayed on the Z axis) represents the amplitude of the sine
wave at a particular spatial frequency direction.
The APSPDF is found by integrating the amplitudes of each component sine wave as a function of
angle. The figures below demonstrate a cross-hatched surface, the PSDF of that surface, and the
APSDF.
Figure B-14: Cross-Hatched Surface
Figure B-15: PSDF of the Cross-Hatched Surface

Figure B-16: APSDF of the Cross-Hatched Surface
The bright regions of the PSDF for the crosshatched surface correspond to higher amplitude sine
waves at a given combination of spatial frequencies along the X / Y directions. The two dominant
bright lines therefore appear along a direction perpendicular to the two lay patterns of the cross-
hatched surface.
The APSDF is found by integrating the power spectrum from the center out, radially, and displaying
the relative magnitude versus angle. The two peaks in the APSDF correspond to the large sine wave
amplitudes found along directions perpendicular to the two lay patterns of the crosshatched surface.
How the Std Parameter Is Determined

As explained The APSDF, the Std parameter is determined by the APSDF. It is a measure of
the angular direction of the dominant lay comprising a surface.
Std is defined relative to the Y axis. Thus, a surface with a lay along the Y axis returns an Std
of 0 deg (see Figure B-17).
Figure B-17: Surface with Lay along the Y Axis

Figure B-18: Directional Surface
Figure B-19: Spatially Isotrophic Surface
Because the surface shown in Figure B-19 is spatially isotropic, there is no lay, and therefore the Std
is indeterminate.
Applications of Std
Std is useful in determining the lay direction of a surface relative to a datum by positioning
the part in the instrument in a known orientation. In some applications such as sealing, a
subtle change in the surface texture direction can lead to adverse conditions.
You can also use Std to detect the presence of a preliminary surface modification process
such as turning that is to be removed by a subsequent operation such as grinding.

S-PARAMETERS HYBRID ANALYSIS
The S-Parameters Hybrid Analysis calculates Sdq, SSc, and Sdr.
Performing an S-Parameters Hybrid Analysis

To perform an S-Parameters Hybrid Analysis:
• Click SParameters Hybrid Analysis on the toolbar.

• Click Custom Analysis Options , select SParameters Hybrid Analysis,
and then click the Calculate button.
• Select Analysis » Custom Options » SParameters Hybrid Analysis, and then click the
Calculate button.
The S-Parameters Hybrid Analysis output display appears.
S-Parameter Hybrid
Parameters
Figure B-20: S-Parameters Hybrid Output Display
The Sdq and Ssc Parameters

Sdq is the Root Mean Square (RMS) Surface Slope comprising the surface. When evaluated over the
measured area, the Sdq can be represented as follows:

Ssc is the Mean Summit Curvature comprising the summits found for the Sds calculations. When
evaluated only over the summit features, the Ssc can be represented as:
Sa = 17mm, Sdq = 0.2 deg. Sa = 16nm, Sdq = 0.6 deg.
Figure B-21: SDQ Over Measured Area and only Summit Features
Figure B-22: Clutch Surface for which SSc + 37 mm-1
For the clutch surface shown in Figure B-22, the mean radius of curvature is 27 μm.
Applications of Sdq and Ssc

Sdq is a general measurement of the slopes that comprise the surface. As such, it can be used
to differentiate surface features with similar average roughness Sa, as shown in Figure B-21.
Sdq can help you measure sealing applications, as well as surface cosmetic appearance.
Ssc can help you predict the degree of elastic and plastic deformation of a surface under
different loading conditions. Therefore, it is useful for predicting the friction and wear
characteristics of a system.
The Sdr Parameter

The Developed Interfacial Area Ratio (Sdr) is expressed as the percentage of additional surface area
contributed by the texture as compared to an ideal plane the size of the measurement region.

Figure B-23: Surface Area
As shown in Figure B-23 and Figure B-24, surface area is the total area of all triangles formed over
the texture at the resolution of the measurement.
Sa = 994nm, Sdr = 1.6% Sa = 1173mm, Sdr = 0.5%
Figure B-24: Sdr Plots
Applications of Sdr
Sdr differentiates surfaces of similar amplitudes and average roughness. As indicated in
(Figure 24), two surfaces with a difference of only 10% in Sa have difference of more than
200% in Sdr. Typically, Sdr increases with the spatial intricacy of the texture, whether or not
Sa changes.
Sdr is useful in applications involving surface coatings and adhesion. You may also find it
helpful when considering surfaces used with lubricants and other fluids.
Sdr may be related to the surface slopes, and thus can also be used to determine the manner in
which light is scattered from a surface.

S-PARAMETERS FUNCTIONAL ANALYSIS
The S-Parameters Functional Analysis calculates Sm, Sc, and Sv in the functional volume family and
Sbi, Sci ,and Svi in the functional index family.
Performing an S-Parameters Functional Analysis

To perform an S-Parameters Functional Analysis:
• Click SParameters Functional Analysis on the toolbar.

• Click Custom Analysis Options , select SParameters Functional
Analysis, and then click the Calculate button.
• Select Analysis » Custom Options » SParameters Functional Analysis, and then click the
Calculate button.
The S-Parameters Functional Analysis output display appears.
S-Parameters Functional
S-Parameter Hybrid
Parameters
Figure B-25: S-Parameters Functional Output Display
The Sm, Sd and Sv Parameters

The Sm, Sc and Sv parameters are in the functional volume family. Because they represent the
volume of material or space provided by the surface relative to the cross sectional area of the
measurement, they have units of mm3/mm2.
The volume parameters are derived from the bearing area analysis of the complete 3D surface. The
bearing area curve is formed by establishing the amount of material a plane would rest on relative to
the complete cross section of the surface for each height from the highest to the lowest point of the
surface.

Sm, the Surface Material Volume, is the amount of material contained in the surface peaks from 0%
to 10% of the bearing area ratio
Sc, the Core Void Volume, is the volume (for example, of a fluid filling the core surface) that the
surface would support from 10% - 80% of the bearing ratio.
Sv, the Surface Void Volume, is the volume (for example, of a fluid filling the valleys) that the
surface would support from 80% -100% of the bearing ratio.
Figure B-26: Bearing Area (%) of Sm, Sv and Sc
Sm = 1.2E-5, Sc = 2.8c-4, Sv = 7.0E-5, all

units mm3/mm2
Figure B-27: Plateau Hone Surface with Sm, Sc, and Sv Values

Applications of Sm, Sc and Sv
The Sm, Sc and Sv parameters are used in tribology applications in the following ways:
• Sm relates to the amount of material available for initial running-in or supporting of a load.
• Sc relates to the lubricant carrying and supporting properties of the core surface under load.
• Sv relates to the void volume available for lubricant retention and debris entrapment.
The Sbi, Sci, and Svi Parameters

The Sbi, Sci, and Svi parameters are in the functional index family. They are all unitless parameters
designed to allow comparisons between surfaces of different average roughness.
The functional index parameters are derived from the bearing area analysis of the complete 3D
surface. The bearing area curve is formed by establishing the amount of material a plane would rest
on relative to the complete cross section of the surface for each height from the highest to the lowest
point of the surface.
Sbi, the Surface Bearing Index, is a measure, relative to Sq, of the surface height at the 5% bearing
area ratio. Sbi is typically 0 ~3 with a larger Sbi indicating a larger relative load bearing area.
Sci, the Core Fluid Retention Index, is a measure, relative to Sq, of the volume (for example, of a
fluid filling the core surface) that the surface would support from 5% - 80% of the bearing ratio.
Svi, the Valley Fluid Retention Index, is a measure relative to Sq of the volume (for example, of a
fluid filling the valleys) that the surface would support from 80% to 100% of the bearing ratio.
Figure B-28: Bearing Area (%) of Smi, Svi, and Sci

Sbi = 0.991, Sci = 0.817, Svi = 0.187, all
unitless
Figure B-29: Plateau Hone Surface with SBi, Sci, and Svi Values
Applications of Sbi, Sci, and Svi

Sbi, Sci, and Svi are used to compare the tribological properties of a surface with different
average roughness. Sbi is related to the material available for initial load support, while Sci
and Svi relate to the relative retention of fluid the core and deep valley structures provide.

C
THE VISION STITCHING PACKAGE
As an optional add-on to Vision, the Vision Stitching Package gives you the ability to stitch large-
area measurements.
THE TWO MODES OF STITCHING

Automatic Stitching Mode
Automatic Stitching mode can be used only on Wyko NT9100 systems that include the optional
motorized X/Y stage. The system takes multiple partially overlapping scans within a user-defined
measurement area or at overlapping locations contained in an X/Y Stage file. When the last scan is
complete, it registers and matches the overlapped scans to form a single new dataset.
Automatic Stitching provides four options: Rectangular, Circular/Annular, Rectangular Annulus, and
Use Stage File. Instructions for using these options appear in Automatic Stitching on page C-2.
Manual Stitching Mode

In Manual Stitching mode, you open two saved datasets and specify how the system should overlap
them to create a single stitched dataset. Manual Stitching provides four options: Stage, Manual, One
Fiducial, and Two Fiducials. Instructions for using these options appear in Manual Stitching on page
C-27.
Figure C-1 shows a stitched dataset representing the tails side of an American fifty-cent coin.
Figure C-1: Stitched Dataset from a Fifty-Cent Coin
The Vision Stitching Package C-1

INSTALLING AND ACCESSING STITCHING
If you purchased the Vision Stitching Package as part of a new Wyko NT9100 profiler system, the
software is already installed. This means that you can immediately begin stitching files as described
in this appendix.
If you purchased the Vision Stitching Package as an add-on upgrade, you must insert the installation
CD and follow the on-screen installation instructions.
As shown in Figure C-2, you access the functions in the Vision Stitching Package from the Vision
menu and toolbar.
To access Manual To access Automatic Stitching,

Stitching, click File click Hardware » Measurement
» Stitch Files. Options » Stitching.
Figure C-2: Vision Menu Bar and Toolbar
AUTOMATIC STITCHING
IMPORTANT! To use Automatic Stitching, your Wyko NT9100 system must include the
optional motorized X/Y stage. When using your motorized stage, be sure to:
• Attach the sample firmly to the platform. This prevents movement during stitching.
• Ensure that the camera is correctly aligned to the stage. If the alignment is incorrect,
artifacts will be evident in your stitched datasets. Call Veeco Customer Service to request
camera realignment.
When you use Automatic Stitching, the system:

• Takes multiple partially overlapping scans within a measurement area that you define or at the
overlapping locations contained in an X/Y Stage File.
• Overlaps the scans by the specified percentage of the measurement area. (The default is 20%.)
• Spaces the scans evenly within the measurement area.
• Registers and matches the overlapped scans to form a single dataset that has both a large field
of view and high lateral resolution.
Figure C-3 illustrates the procedures described above.
C-2 The Vision Stitching Package

Figure C-3: Principle of Stitching
NOTE – The number of scans taken during a stitching operation depends on the percentage
of overlap and the range of movement of the motorized X/Y stage. The system saves each
scan in a Stitch folder in the Vision directory. This folder is cleared whenever you perform a
new stitching operation.
The Size/Resolution Trade-off

As shown in Table C-1, without stitching, you must make a significant trade-off between the size of
the measurement area and lateral resolution. The improvement gained by stitching multiple files is
shown in Table C-2.
Table C-1: Unstitched Measurements
Magnification Lateral Measurement

Resolution Area
5x 3.0 μm 2.0 mm2
10x 1.5 μm 0.25 mm2
Table C-2: Stitched Measurements with 20% Overlap
Magnification Lateral Measurement

Resolution Area
10x (2 x 2 stitch) 1.5 μm .81 mm2
10x (4 x 4 stitch) 1.5 μm 2.88 mm2
The advantages of stitching are further illustrated in the figures that follow. The six overlapping scans
shown in Figure C-4 are stitched together to form the new measurement shown in Figure C-5. The
new measurement has an area that has both large field of view and high lateral resolution.

Figure C-4: Six overlapping Scans
Figure C-5: Six Stitched Scans
As outlined in Table C-3, Vision offers four Automatic Stitching options: Rectangular,
Circular/Annular, Rectangular Annulus, and Use Stage File.
Table C-3: Automatic Stitching Options
Stitching How It Works

Option
Rectangular You first define a rectangular measurement area.
When you take a measurement, the system evenly
spaces a series of overlapped scans and stitches
them into a single dataset.
Circular/Annular You first define a circular or annular (ring-shaped)

measurement area. When you take a
measurement, the system evenly spaces a series of
overlapped scans and stitches them into a single
dataset.
Rectangular You first define a rectangular annulus (frame-

Annulus shaped) measurement area. When you take a
measurement, the system evenly spaces a series of
overlapped scans and stitches them into a single
dataset.
Use Stage File You first open an X/Y Stage File whose locations
include areas of overlap. When you take a
measurement, the system spaces a series of
overlapped scans according to the locations defined
in the X/Y Stage File. It then stitches them into a
single dataset.

Automatic Stitching Tips
When using Automatic Stitching, it is important to:
• Decide on an appropriate level of stitching resolution. The higher the resolution, the longer the
stitching time and the larger the size of the .opd file.
• Decide on an appropriate measurement area and an optimal number of scans. A large area with
many scans can consume major amounts of computer memory, disk space, and clock time.
• Remember these guidelines:
• The greater the overlap, the more meaningful the stitched file.
• Fewer scans are generally better than many.
The Rectangular Stitching Option

Before you begin the steps in this section, do the following:
• Position your sample on the motorized X/Y stage.
• Set your options on the Measurement Options tab.
• Adjust the intensity in the Intensity window.
To create a stitched file using the Rectangular option:
1 Click Measurement Options or select Hardware » Measurement Options.
2 Click the Stitching tab (see Figure C-6).

.
Figure C-6: Stitching Tab, Rectangular Option
3 Select the Enable Stitching check box.
4 In the Stitching Options section, click Rectangular.
5 If you know the dimensions of your sample, enter the dimensions in the Outer X and Outer Y fields.
6 If you do not know the dimensions of your sample, click the Teach button and follow the instructions in The
Rectangular Teach Function on page C-8.

Figure C-7: Rectangular Dimensions Section
7 To adjust any optional settings and perform a test run, follow the instructions in Optional Stitching Settings
on page C-21 and Performing a Test Run on page C-27.
8 Click OK on the Stitching tab.
9 Click New Measurement on the toolbar. After the system takes the measurement, a contour plot of
the stitched dataset appears (see Figure C-9).
10 To change the name of the dataset from the default name Stitch Files, select File » Save Dataset as.
Figure C-8: Four Rectangular Measurements
Figure C-9: Stitched Rectangular File

The Rectangular Teach Function
The Rectangular Teach function makes it easy to define the outer corners for a rectangular sample.
When you use the Rectangular Teach function, you define two diagonal corners to indicate the outer
border. Vision then sets the remaining corners. In Figure C-10, X’s designate the corners that you
define, while O’s define the ones that Vision sets.
O X
X O
Figure C-10: Corner Definition, Rectangular
To define the measurement area using the Rectangular Teach function:

1 Click the Teach button. The first teaching prompt appears (see Figure C-11).
Figure C-11: First teaching Prompt, Rectangular
2 Click Intensity. The live Intensity window appears (see Figure C-12).

Figure C-12: Intensity Window, Rectangular Definition
3 Move the stage to the outer left bottom corner of the sample, and then click Next. The second teaching
prompt appears (see Figure C-13).
Figure C-13: Second Teaching Prompt, Rectangular
4 Move the stage to the opposite corner of the sample, and then click Finish. The dimensions that you set
with the stage now appear in the X and Y fields in the Rectangular Dimensions section.

The Circular/Annular Stitching Option
• Adjust the intensity (focus) and tip/tilt in the Intensity window.
To create a stitched file using the Circular/Annular option:
2 Click the Stitching tab.
Figure C-14: Stitching Tab, Circular/Annular Option

4 In the Stitching Options section, click Circular/Annular.
5 If you know the diameter(s) of your sample, do one of the following to define the measurement area:
• For a circular sample, enter the diameter in the Outer D field.

• For an annular (ring-shaped) sample, enter the outer diameter in the Outer D field, and enter the inner
diameter in the Inner D field.
Figure C-15: Diameters Section
6 If you do not know the diameter(s) of your sample, click the Teach button and follow the instructions in The
Circular/Annular Teach Function on page C-11.
7 To adjust any optional settings and perform a test run, refer to Optional Stitching Settings on page C-21 and
Performing a Test Run on page C-27.
the stitched dataset appears.
The Circular/Annular Teach Function

The Circular/Annular Teach function makes it easy to define:
• An outer diameter for a circular sample.
• An outer and inner diameter for an annular (ring-shaped) sample.
Figure C-16: Circular and Annular Diameters
To define the measurement area using the Circular/Annular Teach function:

1 Click the Teach button . The first teaching prompt appears.

Figure C-17: First Teaching Prompt, Circular/Annular
2 Click Intensity. The live Intensity window appears.
Figure C-18: Intensity Window, Circular/Annular Definition
3 Move the crosshairs to the outer left edge of the sample, and then click Next. The second teaching prompt
appears.

Figure C-19: Second Teaching Prompt, Circular/Annular
4 Move the crosshairs to the outer top edge of the sample, and then click Next. The third teaching prompt
appears.
Figure C-20: Third Teaching Prompt, Circular/Annular
5 Move the crosshairs to the outer bottom edge of the sample and do one of the following:
• If your sample is circular, click Finish.
• If your sample is annular (ring-shaped), click Next. The fourth teaching prompt appears (see Figure C-21).
Move the crosshairs to the inner bottom edge of the sample and click Finish.

Figure C-21: Fourth Teaching Prompt, Circular/Annular
The diameter(s) that you set with the stage now appear in one or both of the Diameters fields (see
Figure C-15).
The Rectangular Annulus Stitching Option

To create a stitched file using the Rectangular Annulus option:

Figure C-22: Stitching Tab, Rectangular Annulus Option
3 In the Stitching Options section, click Rectangular Annulus.
4 If you know the dimensions of your sample, enter the outer dimensions in the Outer X and Outer Y fields,
and then enter the inner dimensions in the Inner X and Inner Y fields.
Figure C-23: Rectangular Annulus Dimensions Section

5 If you do not know the dimensions of your sample, click the Teach button and follow the instructions in The
Rectangular Annulus Teach Function on page C-16.
6 To adjust any optional settings and perform a test run, follow the instructions in Performing a Test Run on
page C-27.
The Rectangular Annulus Teach Function

The Rectangular Annulus Teach function makes it easy to define the outer corners and an inner
corner for a rectangular annulus (frame-shaped) sample.
When you use the Rectangular Annulus Teach function, you first define two diagonal corners to
indicate the outer border. You next define another corner to indicate the inner border. Vision then sets
the remaining corners. In Figure C-24, X’s designate the corners that you define, while O’s define the
ones that Vision sets.
O X
o x
X o
X O
Figure C-24: Corner Definition, Rectangular Annulus
To define the measurement area using the Rectangular/Annulus Teach function:

1 Click the Teach button. The first teaching prompt appears.

Figure C-25: First Teaching Prompt, Rectangular Annulus
2 Click Intensity. The Intensity window appears.
Figure C-26: Intensity Display, Rectangular Annulus Definition
3 Move the crosshairs to the outer left bottom corner of the sample, and then click Next. The second
teaching prompt appears.

Figure C-27: Second Teaching Prompt, Rectangular Annulus
4 Move the crosshairs to the inner left bottom corner of the sample, and then click Next. The third teaching
prompt appears.
Figure C-28: Third Teaching Prompt, Rectangular Annulus
5 Move the crosshairs to the inner top right corner of the sample, and then click Next. The fourth teaching
prompt appears.
Figure C-29: Fourth Teaching Prompt, Rectangular Annulus

6 Move the crosshairs to the outer top right corner of the sample, and then click Finish.
The dimensions that you set with the stage now appear in the X and Y fields and Inner X and Y fields the
Rectangular Annular Dimensions section (see Figure C-30).
Figure C-30: Rectangular Annulus Dimensions Section
The Use Stage File Option

This option saves you time by eliminating the need to define the measurement area.
Using X/Y Stage Files

When you stitch with this option, the system uses the measurement locations contained in an X/Y
Stage File. Each of these locations must include an area of overlap.
If you do not already have such an X/Y Stage File, you must create a new one or modify an existing
one using the XY - Stage dialog box. For instructions, see Chapter 10.
Figure C-31: XY - Stage Dialog Box

Creating the Stitched File
To create a stitched file using the Use Stage File option:
Figure C-32: Stitching Tab, Use Stage File Option

4 In the Stitching Options section, click Use Stage File.
5 Click Browse and navigate to the location of the X/Y Stage File that you want to use. Click Open to open
the file in Vision.
Figure C-33: Open File Dialog Box
6 To adjust any optional settings and perform a test run, refer to Optional Stitching Settings on page C-21 and
Performing a Test Run on page C-27.
9 If you want to change the name of the dataset from the default name Stitch Files, select File » Save
Dataset as.
Optional Stitching Settings

This section supplements the basic steps outlined in the previous sections. It tells you how to adjust
optional settings on the Stitching tab and in the Advanced Options dialog box.
Settings on the Stitching Tab

To adjust optional settings on the Stitching tab:

Figure C-34: Stitching Tab
4 In the Starting Options section (see Figure C-35), do one of the following:
• Click Use Current Location to direct the system to start the stitching area at the point at which the stage
is currently located. This is the most commonly used option.
• Click Use Fixed Location to direct the system to always go to the same stage location before initiating a
stitching operation. After you click this button:
5 Click Set Start. The Set Start Location dialog box appears (see Figure C-36).

6 Move the stage to the desired fixed start position, and then click OK in the Set Start Location dialog box.
Figure C-35: Starting Options Section
Figure C-36: Set Start Location Dialog Box
7 In the Completion Options section (see Figure C-37), select or clear the Unload on Completion check
box. When this check box is selected, the stage moves toward you, making it easy to remove the sample.
Figure C-37: Completion Options Section
Settings in the Advanced Stitching Dialog Box

To adjust optional settings in the Advanced Stitching dialog box:

3 Click the Advanced button to open the Advanced Stitching Options dialog box (see Figure C-38). The
Advanced Stitching Options dialog box appears (see Figure C-39).
Figure C-38: Advanced Button on the Stitching Tab
Figure C-39: Advanced Stitching Options Dialog Box
4 In the Calculate Best Fit section, click the type of data to be used for calculating best fit. If you click Flat
data in overlap region, enter the percent of data that you want the system to use in the % to use field. For
details about the Calculate Best Fit options, see Table C-4.

Table C-4: Calculate Best Fit Options
Option Type of Data Used to Calculate Best Fit

All data in The system uses every datapoint in the area of overlap
overlap region with the measurement that is being added. It then uses
the accumulated data to calculate best fit. Although this
option provides the best resolution, it can introduce error
in measurements of surfaces with artifacts.
Low data in The system uses only data that is below the average in
overlap region the area of overlap with the measurement that is being
added. It then uses the accumulated below-average data
to calculate best fit. This option minimizes error in
measurements of surfaces with discrete steps.
High data in The system uses only data that is above the average in
overlap region the area of overlap with of the measurement that is being
added. It then uses the accumulated above-average data
to calculate best fit. This option minimizes error in
Flat data in The system uses only the flattest data in the area of
overlap region overlap with the measurement that is being added. The
average slope in all four directions is first calculated for
each point, and then the user-specified percent of the
data with the smallest slope is used to calculate best
fit.This option minimizes error in measurements or edges
by using only the smoothest or flattest areas.
5 Enter a percentage value in the Overlap field (see Figure C-40). This setting defines the region to be
shared by the files to be stitched. Follow these guidelines:
• A higher overlap percentage produces a better fit but requires more scans.
• Vision spaces the scans evenly, so the actual overlap may be higher than the percentage that you set.
• To return to the default overlap percentage value of 20%, click Reset.
6 Enter a value in the Pixels to Trim field (see Figure C-40). This value indicates the number of pixels that
you want the system trim from the overlapped regions.
Figure C-40: Best Fit, Pixels, and Overlap Sections

NOTE – Stitching resolution is not the same as measurement resolution. The system first
stitches the scans together using measurement resolution, and then sub-samples them to
achieve stitching resolution.
7 In the Stitching Resolution list (see Figure C-41), select the desired level of stitching resolution. Follow
these guidelines:
• Select Full for most stitching operations. With this setting, the output image includes every measured
pixel. This setting provides the best resolution, including high lateral resolution.
• Select Half or Quarter only when you want a smaller output image. With half resolution, the output image
includes every other pixel; with quarter resolution, the output image includes every fourth pixel. This setting
is useful for showing waviness and shape in very large stitched areas while minimizing the memory size
of the final dataset.
Figure C-41: Stitching Resolution List
8 In the Stage section (see Figure C-42), click XY Stage or Radial Stage, depending on your hardware
setup.
Figure C-42: Stage Section, XY Stage
9 Select or clear the Autofocus only on first measurement check box (see Figure C-43) to set the focus
only once for all stitched scans.
10 If you are using the Circular/Annular stitching option, select or clear the Don’t show prompt before run
check box (see Figure C-43) to direct the system not to display a prompt to target the Intensity window
crosshairs at the beginning of the first circular or annular measurement:
Figure C-43: Advanced Stitching Check Boxes
NOTE – The Don’t show prompt before run check box does not apply to the Rectangular
or Use Stage File options.
11 Click OK in the Advanced Stitching Options dialog box.

Performing a Test Run
At any time during your stitching setup, you can click Test on the Stitching tab to initiate a test run
(see Figure C-44). Use the resulting dataset to check your measurement area and settings. After
making appropriate adjustments, perform another test run.
Figure C-44: Test Button
MANUAL STITCHING
IMPORTANT! To use the Stage File option, your system must include the optional
motorized X/Y stage. To use the other three Manual Stitching options, your system can
include either the standard manual X/Y stage or the optional motorized X/Y stage.
During a Manual Stitching operation, you open two saved files that have partially overlapping areas
and specify the manner in which you want to combine them. The system then registers and matches
the files to form a single dataset.
Manual Stitching works best with datasets taken from samples that have a distinct surface structure—
for example, MEMS devices or machined metal parts. This is because you can easily identify an
identical feature or area without data in each file and align those features or areas to obtain matching
regions of overlap.
In contrast, datasets taken from super-smooth and polished surfaces can be difficult or impossible to
align. This is because it is hard to identify distinctive features that can be used to obtain matching
regions of overlap.

Two-File Limitation
Although each Manual Stitching operation allows the stitching of only two files, you can stitch files
that have already been stitched to achieve a larger measurement area with higher resolution. For
example, you can:
• Stitch File 1 and File 2 to produce File 3.
• Stitch File 4 and File 5 to produce File 6.
• Stitch File 3 and File 6 to produce File 7, and so on.
Figure C-45 shows two files with overlapping regions. Figure C-46 shows these files after they have
been stitched using the Manual Stitching mode.
Figure C-45: Two Datasets to Be Stitched
Figure C-46: Stitched Files
NOTE – Although you can stitch only two datasets with the Stage File option, each dataset
is the result of multiple measurements contained in an X/Y Stage File. For more information,
see Chapter 10.

Manual Stitching Tips
When using the Manual stitching mode, it is important to:
• Chose two datasets that include identical distinct features or areas without data that you can
align to obtain matching overlap regions.
• Achieve a larger measurement area with higher resolution by stitching a series of previously
stitched files.
• To minimize error when stitching rough or stepped surfaces:
• For rough surfaces, specify the use of flat data in the overlap region. For more information,
see Table C-5.
• For surfaces with discrete steps in the overlap region, specify the use of high or low data in
the overlap region. For more information, see Table C-5.
Manual Stitching Options

As indicated in Table C-5, Vision offers four Manual Stitching options: Stage, Manual, One Fiducial,
and Two Fiducials.
Table C-5: Manual Stitching Options

Option
Manual You open two saved datasets. You then drag one
dataset over the other to set the overlap area for
stitching.
One You open two saved datasets. You then specify a

Fiducial fiducial point on each one. During the stitching
process, the system overlaps the fiducials as shown
below.
Fiducials
x
x
Two datasets with single
fiducials marked
x
Stitched data set with
fiducials overlapped

Option
Two You open two saved datasets. You then define two
Fiducials fiducial points on each one. During the stitching
process, the system stretches, rotates, and skews
one dataset as necessary to align the two fiducials,
as shown below.
A B
1
1 2
2
Datasets with two fiducials marked
B
A
11
22
Stitched dataset, with dataset B stretched

and rotated to align the fiducials
Stage You open two saved datasets that were created

using an X/Y stage file containing locations with
identical areas of overlap. During the stitching
process, the system uses the coordinates stored in
these files to align the areas of overlap.
The Manual Option

To stitch two files using the Manual option:
1 Select File » Stitch Files to open the Stitch Options dialog box (see Figure C-47).

Figure C-47: Stitch Options Dialog Box, Manual
2 In the Stitch Options section, click Manual.
3 To adjust any optional settings, refer to Optional Stitching Settings on page C-39.
4 Open two saved files that include overlapping regions.
a. Navigate to the directory containing the files.
b. Hold down the CTRL key and click the two file names.
c. Click Open. The Manual Stitching dialog box appears with two partially superimposed contour plots
displayed (see Figure C-49).
5 In the Manual Stitching dialog box, click one of the plots and drag it to define the area of overlap
(see Figure C-50).
6 To adjust any optional settings, refer to Optional Stitching Settings on page C-39.
7 Click OK. A contour plot of the stitched dataset appears (see Figure C-51).To change the name of the
dataset from the default name Stitch Files, select File » Save Dataset as.
Figure C-48: Two Datasets to Be Stitched

Figure C-49: Manual Stitching Dialog Box
Figure C-50: Superimposed Areas for Manipulation
Figure C-51: Files Stitched with the Manual Option

The One Fiducial Option
To stitch two files using the One Fiducial option:
1 Select File » Stitch Files to open the Stitch Options dialog box
Figure C-52: Stitch Options Dialog Box, One fiDucial
2 In the Stitch Options section, click One Fiducial.
3 To adjust any optional settings for this stitching operation, refer to Optional Stitching Settings on page C-39.

c. Click Open.
The Set Fiducial dialog box appears with two red cursors over the first dataset (see Figure C-53).
5 In the Set Fiducial dialog box:
a. Move the cursors to mark a fiducial on the first dataset.

b. When the intersection point is set to your satisfaction, right-click and select Set Fiducial.
c. Click OK.
The Set Fiducial dialog box appears with two red cursors over the second dataset (see Figure C-53).
a. Move the cursors to mark a fiducial on the second dataset.

c. Click OK.
A contour plot of the stitched dataset appears.

Figure C-53: Set Fiducials Dialog Box, First Dataset - One Fiducial

Figure C-54: Set Fiducials Dialog Box, Second Dataset - One Fiducial
The Two Fiducials Option

To stitch two files using the Two Fiducials option:

Figure C-55: Stitch Options Dialog Box, Two Fiducials
1 In the Stitch Options section, click Two Fiducials.

c. Click Open.
The Set Fiducial dialog box appears with two red and two blue cursors over the first dataset (see Set
Fiducials Dialog Box, First Dataset - Two Fiducials on page C-37).
4 In the Set Fiducial dialog box:
a. Move the red cursors to mark a fiducial on the first dataset.

c. Click OK.
The Set Fiducial dialog box appears with two red and two blue cursors over the second dataset (see
Figure C-57).
a. Move blue cursors to mark a fiducial on the second dataset.


c. Click OK.
A contour plot of the stitched dataset appears.
NOTE – Vision designates the datasets according to the order in which they were opened.
If you prefer that dataset “B” remain stationary and dataset “A” be rotated and skewed, dataset
“B” must be first on the list of datasets to open in the Stitch Options dialog box.
Figure C-56: Set Fiducials Dialog Box, First Dataset - Two Fiducials

Figure C-57: Set Fiducials Dialog Box, second Dataset - Two Fiducials
The Stage Option

IMPORTANT! In order to use this option, your system include the optional motorized X/Y
stage.

To stitch a series of measurements using the Stage option:
Figure C-58: Stitch Options Dialog Box, Stage
1 In the Stitch Options section, click Stage.
3 Open two saved files that were created using an X/Y stage file whose locations include overlapping
regions.

c. Click Open.
4 Click OK. A contour plot of the stitched dataset appears (see Figure C-51).
Optional Stitching Settings

This section supplements the basic steps outlined in The Manual Option, The One Fiducial
Option, and The Two Fiducials Option. It tells you how to adjust optional settings on the
Stitching tab and in the Advanced Options dialog box.

Settings in the Stitching Options Dialog Box
To adjust optional Settings in the Stitching Options dialog box:
Figure C-59: Stitch Options Dialog Box
2 In the Sampling Rate list, select a sampling rate to indicate the number of pixels that you want Vision to
save when creating the stitched dataset. Follow these guidelines:
• Select 1 for most stitching operations. With this setting, the stitched file includes every measured pixel,
which provides the best resolution.
• Select 2 or 4 only when you want a smaller stitched file. With a sampling rate of 2, the stitched file includes
every other pixel; with a sampling rate of 4, it includes every fourth pixel. These settings are useful for
showing waviness and shape in very large datasets while minimizing the memory size of the stitched file.
Advanced Stitching Settings

2 Click Advanced to open the Advanced Stitching Options dialog box.

Figure C-60: Advanced Stitching Options Dialog Box
3 In the Calculate Best Fit section (see Figure C-60), click the type of data to be used for calculating best fit.
If you click Flat data in overlap region, enter the percent of data that you want the system to use in the %
to use field. For definitions of the Calculate Best Fit options, see Table C-6.
Table C-6: Calculate Best Fit Options
Option Type of Data Used to Calculate Best Fit

All data in overlap region The system uses every datapoint in the area of overlap with
the measurement that is being added. It then uses the
accumulated data to calculate best fit. This option provides
the best resolution by using all points. It can, however,
introduce error in measurements of surfaces with artifacts.
Low data in overlap region The system uses only data that is below the average in the
area of overlap with the measurement that is being added.
It then uses the accumulated below-average data to
calculate best fit. This option minimizes error in
High data in overlap region The system uses only data that is above the average in the
area of overlap with of the measurement that is being
added. It then uses the accumulated above-average data to
calculate best fit. This option minimizes error in
Flat data in overlap region The system uses only the flattest data in the area of overlap
with the measurement that is being added. The average
slope in all four directions is first calculated for each point,
and then the user-specified percent of the data with the
smallest slope is used to calculate best fit. This option
minimizes error in measurements or edges by using only
the smoothest or flattest areas of data.
4 In the Pixels to Trim field, enter the number of pixels that you want to system to trim from the overlapped
regions.

D
ROHS COMPLIANCY
ENVIRONMENTAL DATA SHEETS
This appendix provides the following two documents:
• An environmental data sheet from Veeco Process Metrology (in Chinese) regarding the China
RoHS compliancy of the Wyko NT9100 system.
• An environmental data sheet from Dell®, Inc. (in English) regarding the EU RoHS compliancy
of the Precision™ 390 computer. That computer or an equivalent is used in the Wyko
NT9100 optical profiling system.
RoHS Compliancy Environmental Data Sheets D-1

ENVIRONMENTAL DATA SHEET Dell Inc.
PRODUCT: Precision™ 390 www.dell.com
Effective Date: 7/1/2006
SYSTEM DIMENSION AND WEIGHT

Depth, cm Width, cm Height, cm Weight, kg
17.1 44.8 46.7 19.5 depending on options installed
DECLARATIONS AND CERTIFICATIONS

This system received the following approvals and may be labeled with one or more of these marks depending on point of purchase:
Approvals Certificate # Yes / No / N/A
• USA: Energy Star capable N/A Yes
• USA: EPEAT registered N/A Silver
Through internal design controls and supply chain declarations, this system1 has been verified to comply with the EU RoHS Directive2.
One or more components in this system may be available as factory installed options that do not meet EU RoHS requirements. For
details, please see www.dell.com/rohsinfo.
PERFORMANCE DATA
System Configuration
The Energy Consumption and Declared Noise Emissions data is based on a configuration including an Intel® Pentium® 631 processor,
1024 MB of memory, 80 GB hard drive, a CD, and floppy drive.
Energy Consumption3
Energy
Service Level Consumption Description of Service Level
(Wattage)
*Maximum 137.88 The data provided is the highest wattage reading while
running the complete 3DMark 2003 Pro (Benchmark)
suite of tests.
Idle 99.65 As specified by the EPA Computer spec 4.0 or system
is sitting at the main Windows screen.
ACPI-S3 “Standby” mode 2.05 Suspend-to-RAM (low power mode)
ACPI-S4 “Hibernate” mode 1.05 Suspend-to-Disk (a lower power mode)
Off Low Power Mode disabled 2.29 The system is turned off with the Low power Mode
feature disabled via the BIOS
Off Low Power Mode enabled 0.99 The system is turned off with the Low power Mode
feature enabled via the BIOS.
Energy consumption is tested at 230 Volts / 50 Hz. When applicable, Dell product information related to US Executive Order 13221 may
be obtained at: http://oahu.lbl.gov/index.html.
*Maximum Energy Consumption results are based solely upon the laboratory testing of the System Configuration listed above.
1
Options from Dell Custom Factory Integration (CFI), Software and Peripherals (S&P) and Customer Kits may not be RoHS compliant.
2
EU Directive on the Restriction of the use of certain Hazardous Substances in electrical and electronic equipment (2002/95/EC) dated January 27,
2003.
3
This document is informational only and reflects laboratory performance. Your product may perform differently, depending on the software, components
and peripherals you ordered. Accordingly, the customer should not rely upon this information in making decisions about electrical tolerances or
otherwise. No warranty as to accuracy or completeness is expressed or implied. The information in this document may change without notice; please
note the revision number on the last page.
Environmental Data Sheet
Page 1
Declared Noise Emissions in accordance with ISO 9296
Sound Power Sound Pressure Operator Sound Pressure Bystander
Service Level (LWAd, bels) (1 bel=10 decibels, re 10-12 Position Position
Watts) (LpAm, decibels) (re 2x10-5 Pa) (LpAm, decibels) (re 2x10-5 Pa)
Floppy Drive 4.4 36 30
Accessing
Hard Drive Accessing 4 32 27
CD Drive Accessing 5.4 45 38
Idle 4 31 26
PRODUCT MATERIALS INFORMATION4

Restricted Substances
This Dell product does NOT contain any of the following substances (in concentrations exceeding legal threshold limits):
• Asbestos
• Azo dyes/colorants in components that come into direct contact with human skin
• Cadmium and its compounds (except for use in applications exempted by the EU RoHS Directive)
• Class I and Class II CFCs (chlorofluorocarbons) and HCFCs (hydrofluorocarbons)
• Chloroparaffins, short chained (10-13 carbon chain)
• Chromium VI and its compounds (except for use in applications exempted by the EU RoHS Directive)
• Halogenated dioxins or furans (i.e. polychlorinated dibenzodioxines, polychlorinated dibenzofurans)
• Lead and its compounds (except for use in applications exempted by the EU RoHS Directive)
• Mercury (except for use in applications exempted by the EU RoHS Directive)
• Nickel and its compounds in components that are likely to result in prolonged skin exposure
• PCBs (polychlorobiphenyls) or PCTs (polychloroterphenyls)
• PBBs (polybromobiphenyls) or PBDEs (polybrominated diphenylethers)
• PVC (polyvinyl chloride) in plastic parts greater than 25 grams
• Polychlorinated naphthalenes (PCNs)
• Tributyl tin (TBT) and triphenyl tin (TPT) compounds
For information on Japan RoHS (J-MOSS) chemical disclosures: www.dell.com/japan_rohs.
Additional Materials Information

• The cables may use PVC as an insulating material to ensure product safety
• The case material is sheet metal, PC-ABS
• Product may contain post-industrial recycled content (plastics, metal, glass)
Flame Retardants Used in Mechanical Plastic Parts > 25 grams, Keycaps, and Motherboards
Part Flame Retardant ISO 1043-4
Motherboard TBBPA FR(16)
Mechanical Plastic Parts > 25 grams PC+ABS Triaryl Phosphate Ester FR(40)
Mechanical Plastic Parts > 25 grams ABS N/A
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No CFCs (chlorofluorocarbons), HCFCs (hydrofluorocarbons) or other ozone depleting substances are used in packaging material.
Chromium, lead, mercury, or cadmium are not intentionally added to packaging materials and are not present in a cumulative
concentration greater than 100 ppm as incidental impurities. No halogenated plastics or polymers are used for packaging material.
Dell complies with the EU Directive 94/62/EEC.
4
Waste Handling. Local regulations should be observed when disposing of this product due to the presence of the materials and substances as listed above.
Page 2
Packaging Materials Weight, kg
PE 0.32
Corrugated Cardboard 1.91
Printed user documentation is bleached in a chlorine-free process. (Europe Only)
Batteries
Batteries in this product are not based on mercury, lead or cadmium technologies. The batteries used in this product are in
compliance with EU Directive 91/ 157/ EEC, EU Directive 93/ 86/ EEC and EU Directive 98/ 101/ EEC.
The product documentation includes instructional information on the proper removal and disposal of the batteries used in this product.
Below is a listing of batteries present in the product:
Battery Description – Internal Batteries Battery Type
3-V CR2032 coin cell Lithium
DESIGN FOR ENVIRONMENT

Longevity and Upgrading
Dell systems are, when applicable, designed for easy assembly, disassembly, and servicing. To extend the life of your system, you can
install or upgrade certain system components (e.g., microprocessor, memory, expansion cards, and storage devices). Spare parts are
available after the end of production for up to five years, or otherwise through the warranty period.
Recyclability
For recyclability, this system incorporates the following design guidelines:
• EU WEEE mark is applied to products sold in Europe, EU recycling information can be found at
www.euro.dell.com/recycling
• Minimal use of non-separable connections, such as gluing and welding between different materials.
• Minimal use of composite structure materials.
• Mechanical plastic parts greater than 100 grams consist of one material or of easily separable materials.
RECYCLING/ END-OF-LIFE SERVICE INFORMATION

Take back and recycling services are offered for this product in certain countries. If you want to dispose of system components,
contact Dell for instructions by emailing recycling_emea@dell.com or visit www.dell.com/recyclingworldwide and select the relevant
country.
DELL CORPORATE ENVIRONMENTAL INFORMATION

Information on Dell’s Environmental initiatives, policies, programs and goals can be found at www.dell.com/environment.
Document Version 2..0 posted 9/5/06 4.4 (7/31/2006)

Page 3
GLOSSARY
Aberration
The deviation of a wavefront from a perfect reference surface, usually a sphere or a plane.
Accuracy
The measure of how close a measurement compares to that of a known value.
Analysis
The performance of calculations on a set of data. You can analyze and temporarily change current data in a
variety of ways by applying the various Wyko Vision analyses found on the Analysis menu and via the
Custom Analysis Options toolbar button.
Analysis Mask
A mask that blocks designated areas of the data array. An analysis mask can be used to view or analyze only
specified portions of the raw dataset. Unlike a detector mask, an analysis mask does not permanently affect the
raw data.
Array Size
The number of pixels in the detector array located inside the interferometer's camera.
Aspect Ratio
The ratio of the real X dimension pixel to the real Y dimension pixel. The aspect ratio number only affects the
appearance of the plots on the computer monitor and is usually set at the factory, depending on the detector
and frame grabber array size.
Autocovariance
A measure of the correlation properties of the surface roughness.
Average Roughness
See Ra.
Bearing Area
The area of the surface cut by a plane at the depth specified for the bearing length.
Bearing Length
The length of the bearing surface at a specified depth below the highest peak.
Bearing Ratio (tp)

The ratio of the bearing length to the sampling length.
Glossary GL-1
Coherence Length
The Optical Path Distance (OPD) between two wavefronts for which the phase remains correlated. Also a
measure of the range of heights over which the instrument will be able to obtain measureable interference
fringes. See Dynamic Range.
Configuration File
A file used to store default values for measurement parameters, analysis specifications, and calibration values.
Curvature
Proportional to the second derivative of the surface data, or the rate of change of the slope data. Also a
detrending shape that distracts from the surface features of a sample. Removing curvature causes spherical
samples to appear flat.
Cylinder
A detrending shape that distracts from the surface features of a sample. Removing cylinder causes cylindrical
samples to appear flat. Cylinder is inherent to the sample.
Database
A file containing the calculated statistics from a number of related measurements. Database files use .csv
extensions.
Dataset
A file containing the height data from a single measurement. The file also includes the date and time of the
measurement, any masks stored with the data, and other measurement information. The format of a dataset file
is a proprietary binary format, saved with an .opd extension.
Detector
Device used to record the fringe pattern in the interferometer system.
Detector Mask
A mask that blocks designated areas of the data array immediately after new data are taken. The area marked
off by a detector mask is permanently marked as invalid.
Digital Filtering
Filtering algorithms that perform filtering in the spatial frequency space (usually pass data above or below a
specified spatial frequency). Used to examine microroughness or waviness components of a surface.
Dynamic Range
The vertical range of heights that an instrument can accurately measure. Also called Range. See Coherence
Length.
Evaluation Length/Area
The length or area over which surface parameters are evaluated.
Filtered Data
Data that has been smoothed or digitally filtered; data from which terms have been removed and/or a reference
file has been subtracted.
GL-2 Glossary
Frame Data
Data as seen during collection in the form of a phase-shifted intensity display frame.
Frame Delay
A control value that specifies the pause to be taken between acquisition of each phase-shifted frame of data.
Fringe
A dark or light band in the intensity pattern formed by the interference of two or more beams of light.
Gaussian Curve
The bell-shaped, symmetrical curve of a normal distribution.
Height Cutoff
Determines which summits to use for the statistics and for the plots. All summits with a height above this cutoff
are used in calculations. The user has the choice between this type of cutoff and the percentage cutoff.
Height Threshold
The height difference that a region must be above each of its four nearest neighbors to be considered a summit.
Height Threshold Mask

A type of analysis mask that allows you to block or pass data based on height thresholds. You can pass data
above or below a threshold height or pass or block data between two threshold heights.
Histogram
A plot that shows the distribution of individual surface parameters.
Htp
Height between bearing ratios H1 and H2.
IMOA
The Improved Modular Optics Assembly (IMOA), which is mounted on a Z-axis and automated tip/tilt cradle
on the Wyko NT9100 suface profiler. The IMOA contains a CCD camera and a Multiple Magnification
Detector (MMD) with Field of View (FOV) lenses. It also contains a scanner assembly that allows for precise
movement of the measurement activities. Objectives are attached to the bottom of the IMOA on a turret or a
single-objective adapter.
Integration
The process of wavefront or surface reconstruction from the analysis of phase-shifted interferograms. See
Phase Unwrapping.
Integration Error
Incorrect surface reconstruction due to factors such as noise, tight fringe spacing, and high sampling frequency.
Integration Time
The length of time that the detector takes to collect intensity data for a measurement.
Glossary GL-3
Intensity (Irradiance)
The amount of radiation power per unit area (W/m2).
Intensity Display
A display that shows real-time images and intensity as acquired from the camera.
Interference
Physical phenomenon that takes place when two or more beams of light reinforce or cancel each other,
resulting in dark and light bands called fringes.
Interferogram
The pattern of dark and light fringes produced by two or more overlapping wavefronts.
Interferometer
An instrument that employs the interference of light waves to measure the accuracy of an optical surface or
wavefront.
Invalid Pixel
A data element that's not included in the analysis because it represents a saturated detector element, has been
selected by the operator to be excluded, or whose modulation value falls below the set threshold value.
Irregularity
The irregularity of a nominal spherical surface is a measure of its departure from sphericity. The irregularity
of an optical surgace is equal to the peak-to-valley difference between the optical surface under test and the
approximating spherical surface. The theoretical surface defined by the difference between these two surfaces
is referred to as the irregularity function.
List View
A window in Wyko Vision that lets you view the contents of a database.
Magnitude Slope
A plot of the magnitude of the first derivative of the surface. Magnitude slope fits a reference plane of user-
specified dimensions to the data at each point and calculates the slope of that reference plane.
Mask
An overlay that is applied to the data to block certain regions so that you can view, analyze, or process just
those portions that you specify. Wyko Vision includes terms, analysis, and detector masks.
Masked Data
Data in which an overlay is applied to block or pass user-specified regions of the wavefront during analysis.
Mean Line/Surface
A straight line or plane running centrally through the peaks and valleys that divides the profile equally above
and below the line.
GL-4 Glossary
Modulation
The change in fringe intensity that occurs as the phase is shifted during a measurement, or the amount of
intensity variation that occurs during phase-shifting, divided by 2x the mean intensity.
Modulation Threshold
The value that specifies the lowest acceptable modulation for valid data. Data points with modulation below
the threshold are identified as invalid data.
Modulation Transfer Function (MTF)

A mathematical representation showing the amount of attenuation each spatial frequency undergoes as it
propagates through the system.
Multiple Magnification Detector (MMD)

A device in the optical path that changes the magnification factor of the magnification objective in use.
Multiple Region Analysis

A type of software analysis that calculates surface parameters for individual regions (islands) of data.
Noise
The statistical variation of a measured value that decreases repeatability; data that provide no information
about the sample being measured.
Null
To reduce the number of fringes to a minimum.
Numerical Aperture (NA)

The sine of half the angular aperture, multiplied by the fractive index of the media. Used as a measure of the
resolution of an objective.
OPD Plots
The optical path difference (OPD) plots represent wavefront height deviations as determined by the differences
between the optical paths of the test and reference beams of the interferometer. Deviations of the wavefront
are related to surface height deviations by the wedge factor.
Optical Path Difference

The optical path difference (OPD) is the difference between the optical path length of the test and reference
beams. The OPD is positive if the test beam path length is shorter than the reference beam path length. The
program uses the OPD to determine surface height or wavefront deviations.
Parcentricity
For systems with multiple objectives, the state in which an object that is centered in the field-of-view of one
objective is still centered when another objective is employed.
Parfocality
For systems with multiple objectives, the state in which an object in focus with one objective is still in focus
when another objective is employed.
Glossary GL-5
Patch Size
A value denoting the plot limits on the PSF contour and 3D plots.
Peak
The highest point in a dataset.
Peak OPD Value

The largest OPD value in the data set.
Peak-to-Valley (p-v) Value

The difference between the peak OPD value and the valley OPD value; the phase of the highest point minus
the phase of the lowest point.
Percentage Cutoff
Determines which summits to use for the statistics and for the plots. All summits that are higher than a height
that is this percentage of the height difference between the lowest and highest summit are used. The user has
the choice between this type of cutoff and the height cutoff.
Phase
The fractional part of a cycle through which a periodic wave of light has advanced at any instant measured
from a defined starting point.
Phase Calculation
The process of converting several detector measurements of fringe intensity to a phase at each pixel. The
output of this calculation is then integrated to produce the raw phase data.
Phase Change
A change in the phase of light reflected from a surface. Phase change errors can occur between boundaries of
dissimilar materials, causing incorrect reconstruction of the surface.
Phase Data
Data describing the wavefront phase at the entrance pupil of the interferometer. Measurement is based on the
difference between the paths of the test and the reference beams of the interferometer.
Phase Shifting Interferometry

The process by which a digital interferometer alters the optical path length of the test and reference beams in
a series of shifts. This optical path change causes a shift in the fringes of the interferogram. The fringes are
recorded by a detector in the interferometer, producing a series of interferograms that are transferred to the
system’s computer. Computerized calculations then combine the interferograms to determine the optical path
difference (OPD).
Phase Unwrapping (Integration)

The mathematical technique used to convert phase data to wavefront or surface data.
Point Spread Function (PSF)

A mathematical representation of the far-field intensity distribution of the wavefront.
GL-6 Glossary
Power Spectral Density
The Fourier decomposition of the measured surface into its component spatial frequencies. The PSD plot
shows power vs. spatial frequency.
Precision
The degree of refinement with which a measurement is stated.
Profile
A two-dimensional slice of a surface.
PSF Encircled Energy

The distribution of energy within the point spread function, obtained from a diffraction calculation.
Pupil Diameter
The diameter of the sample as imaged on the detector.
PV
See PVt.
Pva
Peak-to-Valley Asymmetry. This is the peak-to-valley of the data with the aspheric surface function subtracted
from the irregularity.
Pvi
Peak-to-Valley Irregularity. This is the peak-to-valley value of the irregularity.
PVt
Peak-to-Valley Total Deviation. This is the peak-to-valley value of the total interferometric error.
Q% Statistics
The peak-to-valley values corresponding to 80%, 85%, 90%, and 95% of the total number of data points. Q%
statistics are useful for examining how the p-v changes with the number of data points.
Ra
3-D calculation: The average roughness calculated over the entire measured array.
Radius
The number of pixels from the center to the data array to the edge of the data array.
Raw Data
Integrated phase data with no terms removed or reference subtracted. Raw data can be input from new data
that have just been taken, or it can be copied and loaded from a file that has been stored to disk.
Reference File
A file generated by measuring the variations in smoothness and shape of the reference surface inside the
interferometer. When the reference file is subtracted from the sample surface or wavefront, errors associated
with minute reference surface irregularities are removed from the measurement results.
Glossary GL-7
Refractive Index
The ratio of the velocity of light in a vacuum to the velocity of light in a refractive sample.
Repeatability
A measure of the capability of a system to produce consistent results. The repeatability of an interferometer
can be determined by taking two measurements, subtracting them, and looking at the rms of the wavefront
error.
Resolution
The number of pixels sampled by the detector.
Rku
Kurtosis, used with Stylus analysis. A measure of the sharpness of the two-dimensional profile about the mean
line. It provides information about the distribution of spikes above and below the mean line. Spiky surfaces
have a high kurtosis value (Rku > 3); bumpy surfaces have a low kurtosis (Rku < 3); and perfectly random
surfaces have a kurtosis of 3.
Rmax
The maximum roughness depth measured over the evaluation length. It is the largest of the successive Rti
values. Rmax is also called Rymax in ISO documents.
Root Mean Square Roughness

The root-mean-squared roughness calculated over the entire measured array. See Rq.
Rotationally Symmetric Irregularity

Surfaces that are rotationally symmetric, but do not have the desired shape, are said to have rotationally
symmetric irregularity. This error is the rotationally symmetric part of the irregularity function.
Roughness
A measure of the closely spaced irregularities or texture of a surface. See also Ra; Rq.
Rp
Maximum Peak Height. The distance between the plane of zero mean and the highest point over the evaluation
area.
Rp is also used in stylus analysis, defined as the distance between the mean line and the highest point in the
profile over the evaluation length.
Rpi
Regional Peak Height. The distance between the plane of zero mean and the highest point over the sampling
area.
In stylus analysis, the distance between the mean line and the highest point over the sampling length of a two-
dimensional profile.
Rpk
Reduced Peak Height. The top portion of the surface that will be worn away during the run-in period.
GL-8 Glossary
Rpm
Average Maximum Profile Peak Height. The average of successive Rpi values over the evaluation length.
Rq
The root-mean-squared roughness calculated over the entire measured array.
Rsk
Skewness. A measure of the symmetry of the profile about the mean line. It provides information about
asymmetrical profiles for surfaces with the same values for Ra, Rq, Rt, etc. Negative skew indicates a
predominance of valleys, while positive skew is seen on surfaces with peaks.
Rt
The peak-to-valley difference calculated over the entire measured array.
Rti
Regional Peak-to-Valley Height. The distance between the highest point and the lowest point in the sampling
area.
In stylus analysis, the distance between the highest point and the lowest point over the sampling length of a
two-dimensional profile.
Rtm
Average Maximum Profile Height. The average of successive values of Rti over the evaluation length.
Runout
The surface of a disk after the inner and outer diameter masks have been applied.
Rv
Minimum Valley Height. The lowest value calculated over the entire data array.
In stylus analysis, the lowest value calculated over the evaluation length.
Rvi
Regional Minimum Valley Height. The distance between the plane of zero mean and the lowest valley over
the sampling area.
For stylus analysis, the distance between the mean line and the lowest valley over the two-dimensional
sampling length.
Rvk
Reduced Valley Depth. The lowest portion of the surface that will retain lubricant.
Rvm
Average Maximum Profile Valley Depth. The average of successive Rvi values over the evaluation length.
Rz
The Ten-Point Height. The average of the ten greatest peak-to-valley separations on the evaluation area.
Glossary GL-9
S
Mean Local Peak Spacing. The mean spacing between adjacent local peaks, as measured over the evaluation
length. A local peak in the highest part of the profile measured between two adjacent minima, and is included
only if the distance between the peak and its preceding minima is at least 1% of the profile Rt.
Sagitta Error
Results from the test surface having a different radius of curvature from the specified radius. The peak-to-
valley difference between the desired theoretical surface and the approximating spherical surface.
Sampling Length/Area
The interval or area within which a single value of a surface parameter is determined. Several sampling lengths
make up an evaluation length, and several sampling areas make up an evaluation area.
Saturation
The condition when the illumination exceeds the maximum light intensity that the system’s detector/camera
can measure. Wyko Vision displays saturated pixels in red.
Seidel Aberrations
The five primary optical aberrations: Spherical Aberration, Coma, Astigmatism, Field Curvature, and
Distortion.
Signal-to-Noise Ratio
The ratio of the power in a given signal to the power of the noise present in the absence of a signal.
Slope
The first derivative of the surface data, or the rate of change of the sample surface. Slope plots show the
steepness of the surface or wavefront. The program calculates X slopes by comparing the height of one point
with the height of the next point, in the X direction. It calculates Y slopes similarly for points in the Y direction.
Sm
Mean Peak Spacing. The mean spacing between profile peaks at the mean line, measured over the evaluation
length. A profile peak is the highest point of the profile between an upward and a downward crossing of the
profile of the mean line.
Smoothing
Filtering algorithms that modify the data to reduce noise, typically by removing high-frequency data.
Spot Diagram
The far-field energy density of the wavefront, derived from the OPD slope data through geometrical ray
tracing. The density of the points on the diagram indicates the energy density of the wavefront. The spot
diagram is produced by dividing the detector array into radial zones and tracing a number of rays through each
zone. The intersections of each ray with the image plane is plotted on the spot diagram.
Summit
A data point that is higher than its four nearest neighbors by a user-specified height and exists on a three-
dimensional surface. See Peak.
GL-10 Glossary
Surface
A three-dimensional measurement of test sample heights.
Surface Area
The total, exposed area on the surface, including peaks and valleys.
Surface Form Deviation

The difference between the optical surface under test and a nominal theoretical surface. The deviation is
measured perpendicular to the theoretical surface, which is nominally parallel to the surface under test.
Swedish Height (H)

A height calculated as part of the bearing ratio.
Terms
Characteristics that are either inherent in a sample or that occur due to the way a measurement is taken. These
functions allow you to suppress unwanted aspects of the data in favor of those you wish to study (e.g.,
suppressing the overall curvature of a cylinder wall so you may view the small-scale surface roughness
present).
Terms Mask
A mask that performs a terms fit to one region of the surface then adjusts the rest of the surface accordingly.
Tilt
A detrending alignment resulting from a slope or slant. Removing tilt compensates for residual tilt, causing
slanted surfaces to appear flat. Tilt is inherent in the interferometer configuration.
Toric Lens
A lens having a maximum radius of curvature in one meridian and a minimum radius of curvature
perpendicular to it.
Tp
The ratio of the bearing length to the sampling length. See Bearing Ratio.
Transition Zone
The region of a step between the base and the top where the slope is not zero.
Valley
The lowest point in the evaluation area.
Valley OPD Value

The smallest OPD value in the dataset. See Peak OPD Value.
Vertical Scanning Interferometry

The process of measurement whereby a digital interferometer vertically scans through focus. The fringe
modulation corresponding to each plane of focus is recorded by the detector and transferred to the system's
computer. Computerized calculations demodulate the peak interference signals to determine the optical path
difference (OPD), and subsequently, surface heights.
Glossary GL-11
Volume
The volume the surface would hold if it were covered just to the surface of the highest peak.
Volume, Normalized
The ratio of the volume to the lateral area, measured in billions of cubic microns (BCM) per square inch.
Wavefront
A light wave radiating from a point source.
Wavelength
A control value that specifies the wavelength of the light source used by the system to produce the test and
reference beams.
Waves
A unit of measure for OPD; one wave is equal to the system wavelength. To convert a variable from units of
waves to units of micrometers, multiply the number of waves by the wavelength of the system used to measure
the test part. For example, the number of waves times the laser wavelength in micrometers equals the value in
micrometers.
Waves/Radius
A unit used for measuring wavefront slope. The unit of waves/radius in millimeters corresponds to the number
of waves of height change that would occur across the radius of the dataset if the slope were constant. The basic
units of wave/radius can be combined with the known wavelength, exit pupil radius, and focal length of the
system to calculate the tranverse displacement of each ray from the ideal image point. This can be achieved by
multiplying the slope (in waves/radius) by the factor (λf)/r, where λ is the system wavelength, f is the system
focal length, and r is the dataset radius.
Waviness
A measure of the widely spaced irregularities or general feature of a surface.
Wedge
A scaling factor that converts fringes into waves that represent surface height differences or wavefront
distortions. For surface height measurement, a typical wedge factor is 0.5; other measurements require
different wedge factors.
X Crossing
A measure of the number of times data crosses zero when it is scanned in the X direction.
X PSD
The Power Spectral Density (PSD) function for the horizontal lines of data. See Power Spectral Density.
X Slope
The rate of change of the surface in the X direction. See Slope.
Y Crossing
A measure of the number of times data crosses zero when it is scanned in the Y direction.
GL-12 Glossary
Y PSD
The Power Spectral Density (PSD) function for the vertical lines of data. See Power Spectral Density.
Y Slope
The rate of change of the surface in the Y direction. See Slope.
Zernike Polynomials
A set of orthogonal-circular functions that can be fitted to wavefront data to provide a mathematical
representation of the sample surface.
Zero Crossing
A point where a profile crosses the zero height plane, which is usually also the mean plane.
Zero Mean
An adjustment to a dataset such that the mean of the dataset becomes the “zero height” value from which all
other heights are measured. After zero mean is removed, the average (or mean) of the data is zero.
Zero Order Fringe

The interference fringe for which the optical path difference is zero. For VSI measurements, it is the highest-
contrast fringe.
Glossary GL-13
INDEX
Symbols C
.cdf files 7-8 calibration 4-1
.opd file 9-1 generating a reference 4-13
.stg files 10-4 PSI autocalibration 4-11
verifying PSI calibration 4-1, 4-7
Numerics verifying VSI calibration 4-1
2D display 7-2
VSI autocalibration 4-5
3D display 7-4
Circular/Annular stitching option
3D interactive display 7-4
instructions C-10 to C-11
A overview C-4
air table. See vibration isolation table components
analysis mask 6-8 computer 1-9
Auto Intensity 5-9 filter 3-11, 3-15
autocalibration 4-11 FOV lenses 1-6
Autofocus 3-15 IMOA 1-4
Automatic Stitching objectives 1-5
described C-1 stage 1-4
instructions C-2 Z-axis and tip/tilt cradle 1-2
principles of operation C-1, C-2 configuration files
three options described C-4 creating 3-3
See also Rectangular, Circular/Annular, existing 3-2
Rectangular Annulus and Use Stage startup 3-1
File contour plot 7-1
automation 3-21, 10-1 coordinate files 10-4
measurement cycles 3-22 custom display files 7-8
variable tags 3-24
autosave D
data averaging 3-13
variable tags 3-24
database 9-2
averaging 3-13, 8-1
activating 9-5
B defining 9-3
backscan 3-10 logging data 9-5
Bearing Ratio 8-4 master database 9-5, 9-6
in S-Parameters Analyses B-19 options 9-2
pass/fail criteria 9-4
IX-1
database - cont. filtering 6-2
printing 9-6, 9-7 digital high pass 6-5
template 9-3 digital low pass 6-5
units 9-4 high pass 6-5
viewing 9-6 low pass 6-3
dataset 9-1 median smoothing 6-4
opening 9-1 focus
saving 9-1 fringes 5-8
dataset masks tips 5-8
applying 6-16 FOV lenses 1-6
creating and editing 6-13 changing 2-21
saving 6-15 specifications 1-6
default output file 7-12 fringes 1-4
detector mask 6-12 nulled 1-4, 2-15, 5-6
display file obtaining in Intensity window 5-4
2D 7-2
3D 7-4 G
generating a reference 4-13
3D interactive 7-4
graphical display file
analysis 8-2
2D 7-2
contour plot 7-1
3D 7-4
custom 7-8
3D interactive 7-4
default output 7-12
analysis 8-2
intensity plot 7-6
custom 7-8
modulation 7-7
standard 7-1
standard 7-1
graphical output display 1-4
E
electrical task classification 1-19 H
Hazards
electronics 1-11
Electrical 1-16
Emergency Off button 1-13, 2-3
Mechanical 1-16
access to 1-19
Pressure 1-17
repowering after a shutoff 2-3
Thermal 1-17
F height threshold mask 6-14
fiducials help, Vision 2-4
setting for One Fiducial stitching option C-29 histogram mask 6-14
setting for Two Fiducials stitching option C-30
setting for X/Y Stage File 10-4 I
illuminators in IMOA 1-4
field-of-view lenses. See FOV lenses
IMOA 1-1, 1-4, 1-3
filter 3-11, 3-15
controlling Z-axis movement 2-8
Filtered Histogram 8-3
described 1-1
illustrated 1-3
IX-2 Index
intensity masking - cont.
Auto Intensity 5-9 creating and editing dataset masks 6-13
saturation 5-1, 5-3, 5-7 data display 6-17
tips 5-9 dataset mask
intensity plot 7-6 applying 6-16
Intensity window 2-5, 2-8, 2-11, 5-1 saving 6-15
controlling light intensity 2-5 detector mask 6-12
controlling movement of motorized stage 2-11 height threshold mask 6-14
controlling Z-axis movement 2-8 histogram mask 6-14
menus 2-6 Mask Editor dialog box 6-13
obtaining fringes 5-4 Mask Editor tools 6-13
setting stage locations 10-2 mask views 6-17
Interface box 1-11 saving masks 6-15
interference pattern 1-4 selecting mask views 6-17
terms mask 6-8, 6-12
J
types of masks 6-11
Joystick/Z-Control box 1-10, 2-7
measurement
adjusting stage movement 2-13
basic sample measurement procedures 5-1
adjusting Z-axis movement 2-9
calibration 4-1
resetting after ESD strike 2-3
PSI mode described 1-13
L selecting configuration file 3-1
lab mode A-1 tips 5-8
Lockout procedure 1-18 VSI mode described 1-12
M measurement area size for stitching
maintenance, routine system 2-22 setting circular/annular diameters C-11
Manual Stitching setting rectangular dimensions C-6
best types of datasets to use C-27 setting with XY Stage File C-19
four options described C-29 tradeoff with lateral resolution C-3
instructions C-2 measurement options 5-1
principles of operation C-1, C-27 Autofocus 3-15
two-file limitation C-28 Automation tab 3-21
Manual Stitching dialog box Measurement Options tab 3-5
defining overlap C-31 Prompts tab 3-20
Manual stitching option PSI Options tab 3-12
instructions C-30 to C-33 VSI Options tab 3-7
overview C-29 Wizard Setup tab 3-25
Mask Editor tools 6-13 Measurement Wizard
mask views setup 3-25
selecting 6-17 mechanical hazards 1-16
masking 6-11 menus, customizing A-3
analysis mask 6-8, 6-12 mirror
area functions 6-14 making a PSI measurement 5-16
area tools 6-14 measuring for PSI calibration 4-7
Index IX-3
modulation plot 7-7 PSI - cont.
Modulation Threshold 3-10, 3-13 measuring a mirror 5-16
Multiple Magnification Detector 1-6 options 3-12
verifying calibration 4-1, 4-7
O
objectives 1-5 R
changing in single-objective adapter 2-19 Raw Surface Analysis 8-2
changing on motorized turret 2-15 Rectangular Annulus stitching option
working distance 1-6 instructions C-14 to C-16
One Fiducial stitching option overview C-4
instructions C-33 to C-35 Rectangular stitching option
overview C-29 instructions C-5 to C-7
online help, Vision 2-4 overview C-4
overlap area for stitching reference file, generating 4-13
setting in Manual Stitching dialog box C-32 RoHS Compliancy D-1
setting with one fiducial C-34, C-36
S
setting with two fiducials C-33 Safety features
specifying percentage in Automatic Emergency Off button 1-13
Stitching C-25 Power On and Off switches 1-13
specifying type of data in Automatic Safety labels 1-15
Stitching C-24, C-41
Safety precautions 1-14
P saturation 5-1
PDU. See Power Distribution Unit scan length 3-10
Phase Unwrapping screen mode, Vision A-1
Enhanced 3-14 password A-2
Roughness Filtered 3-14 secondary scan 3-11
Standard 3-14 length 3-11
Power 1-13 start 3-11
Power Distribution Unit (PDU) 1-11 Set Fiducials dialog box
Power On and Off switches 1-13 illustrated C-37, C-38
powering up the system 2-1 setting one fiducial C-36
Pressure hazards 1-17 setting two fiducials C-36
primary scan 3-8 setting the units 7-13
backscan 3-10 shutting down the system 2-3
length 3-10 single-objective adapter 2-17
Processed Options 6-1 changing objective in 2-19
production mode A-1 installing 2-17
Prompts options 3-20 removing 2-18
PSI S-Parameters Analyses
autocalibrating 4-11 Amplitude Analysis B-2
calibration 4-3, 4-6, 4-9, 4-12 performing B-2
described 1-13 Sa and Sq applications B-4
generating a reference file 4-13 Sa and Sq parameters described B-3
Ssk and Sku applications B-5
IX-4 Index
S-Parameters Amplitude Analysis - cont. standard toolbar A-1
Ssk and Sku parameters described B-4 buttons A-4
Sz parameter applications B-6 step height standard
Sz parameter described B-5 measuring 5-10
Functional Analysis measuring for VSI calibration 4-2
performing B-17 Step Measurement Analysis 5-14, 8-3
Sbi, Sci and Svi applications B-20 stitched dataset
Sbi, Sci and Svi described B-19 illustration of principle C-3
Sm, Sc and Sv applications B-19 illustration of rectangular C-7, C-11, C-16
Sm, Sc and Sv described B-17
illustration of two files stitched with Manual
Hybrid Analysis
mode C-28
performing B-14
renaming C-7, C-11, C-16
Sdq and Ssc applications B-15
stitching
Sdq and Ssc described B-14
two modes described C-1
Sdr applications B-16
Sdr described B-15 See also Automatic Stitching and Manual
Spatial Analysis Stitching
autocorrelation function (ACF) B-6
system maintenance 2-22
performing B-8 system recovery 2-4
Sds applications B-9 system shutdown 2-3
Sds described B-8
T
Std applications B-13
teach function for stitching
Std as related to APSDF B-11
Circular/Annular C-11
Std derivation B-12
Std described B-10 Rectangular C-8
Str and Sal applications B-10 Rectangular Annulus C-16
Str and Sal described B-9 terms
stage 1-4 curvature 6-2
controlling movement of manual 2-10 cylinder 6-2
controlling movement of motorized 2-11 removing 6-2
controlling tip/tilt movement 2-14 tilt 6-2
manual 1-4 terms mask 6-8, 6-12
motorized 1-5 thermal hazards 1-17
movement controls 2-11 tip/tilt
stage files adjusting prior to measurement 5-4
X/Y Stage 10-4 adjusting with knobs on profiler base 2-14
XY Grid 10-6 tips 5-9
Stage stitching option titles 7-14
instructions C-39 setting 7-14
overview C-30 toolbar A-1
standard analyses 8-2 editing A-6
Bearing Ratio 8-4 options A-4
Filtered Histogram 8-3 Troubleshooting
Raw Surface Analysis 8-2 Contacting Veeco Customer Service 5-1
Step Measurement 8-3 turning off the system 2-3
Index IX-5
turning on the system 2-1 XY Grid stage files
repowering after Emergency shutoff 2-3 creating 10-7
Two Fiducials stitching option defining a grid 10-7
instructions C-35 XY stage files C-19
overview C-30 location controls 10-2
saving 10-5
U
units 7-13 Z
Use Stage File stitching option Z-axis 1-2
instructions C-19 to C-21 controlling movement in Intensity window 2-8
overview C-4 controlling movement with Joystick/Z-Control
user notes 7-14 box 2-9
setting 7-14 Z-axis optical limit switch 1-2
V
variable tags
autosave 3-24
Veeco Customer Service 5-1
vibration detection 3-13
vibration isolation table 1-12
Vision 2-3, C-2
accessing stitching functions C-2
closing 2-4
configuration files 3-1
creating or revising configuration files 3-1
customizing menu A-1, A-3
customizing toolbar A-1
online help 2-4
opening 2-3
restarting after system crash 2-4
VSI 1-12, 5-10
calibration 4-3, 4-6, 4-9, 4-12
described 1-12
generating a reference file 4-13
measuring a step 5-10
options 3-7
verifying calibration 4-2
W
Wyko.ini files 3-1
X
XY - Stage dialog box 10-1
IX-6 Index

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WYKO NT9100 SURFACE PROFILER

SETUP AND OPERATION GUIDE

Veeco Instruments Inc.

Veeco Instruments Inc. Statement of Limited Warranty

THE ABOVE WARRANTIES ARE EXPRESSLY IN LIEU OF ANY OTHER

NO CONSEQUENTIAL DAMAGES. LIMITATION OF LIABILITY. Seller shall not be liable for

Power Demand: 300 W Max

Chapter 2. Basic Operations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

Chapter 3. Configuration Files and Measurement Options. . . . . . . . . . . . . . . . . . . . 3-1

Chapter 4. Calibrating Your System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1

Chapter 6. Processing Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

Chapter 7. Graphical Display Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1

Chapter 9. Datasets and Databases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1

Chapter 10. Automation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1

Appendix A. Customizing the Vision Menus and Toolbars. . . . . . . . . . . . . . . . . . . . A-1

Appendix C. The Vision Stitching Package . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1

Appendix D. RoHS Compliance Environmental Datasheets . . . . . . . . . . . . . . . . . . . D-1

System Overview and Safety Features 1-1

System base and Z-axis

Figure 1-1: The Wyko NT9100 Surface Profiler

IMOA and Z-Axis Column

1-2 System Overview and Safety Features

Green LED illuminator FOV lenses

Figure 1-2: Uncovered IMOA, Front View

IMOA mounting plate

Figure 1-3: Uncovered IMOA, Side View Showing Z-Axis Column

System Overview and Safety Features 1-3

Figure 1-4: Standard Manual X/Y Sample Stage

1-4 System Overview and Safety Features

Figure 1-5: Optional Motorized Sample Stage

Objectives and Field-of-View Lenses

Figure 1-6: Objectives Mounted on a Turret

System Overview and Safety Features 1-5

Figure 1-8: FOV Lens

1-6 System Overview and Safety Features

Turret Mountable Yes Yes Yes Yes Yes Yes Yes No No No No

Field of View, with magnification selector lens (mm x mm)5

Spatial Sampling, with magnification selector lens (μm)5

Turret Mountable Yes Yes Yes Yes Yes Yes Yes No No No No

Field of View, with magnification selector lens (mm x mm)5

Spatial Sampling, with magnification selector lens (μm)5

Figure 1-9: Computer

Figure 1-10: Monitor and Keyboard

System Overview and Safety Features 1-9

Emergency Off button

Power Off button

Figure 1-11: Standard Switch Panel

Optional Joystick/Z-Control Box

Emergency Off button

Figure 1-12: Optional Joystick/Z-Control Box

1-10 System Overview and Safety Features

Figure 1-13: Back of Power Distribution Unit (PDU)

Figure 1-14: Interface Box Mounted on Plate Attached to Z-Axis Column

System Overview and Safety Features 1-11

Figure 1-15: Optional Veeco-Provided Vibration Isolation Table

THE TWO STANDARD MEASUREMENT MODES

VSI Measurement Mode

1-12 System Overview and Safety Features

PSI Measurement Mode