AWM40000 SERIES 008345

Issue 2

Airflow Sensors, Amplified, and Unamplified

DESCRIPTION The small size and thermal isolation of

The AWM40000 Series Airflow Sensors the microbridge mass airflow sensor
are based on proven microbridge are responsible for the extremely fast
technology and include both response and high sensitivity to flows.
unamplified sensor-only devices and Dual Wheatstone bridges control airflow
amplified signal conditioned devices. measurement–one provides closed loop
heater control, the other contains the
The microbridge mass airflow sensor
dual sensing elements.
operates on the theory of heat transfer.
Mass airflow is directed across the The heater circuit minimizes shift due
surface of the sensing elements. Output to ambient temperature changes by
voltage varies in proportion to the mass providing an output proportional to
air or other gas flow through the inlet mass flow. The circuit keeps the heater
and outlet ports of the package. temperature at a constant differential
(160°C) above ambient air temperature
This sensor has a unique silicon chip
which is sensed by a heat-sunk resistor
based on advanced microstructure
on the chip. The ratiometric voltage
technology. It consists of a thin film,
thermally-isolated bridge structure
output of the device corresponds to FEATURES
the differential voltage across the • Precision silicon micromachining
containing heater, and temperature
Wheatstone bridge circuit. • Sensitivity to low flows (0.1 SCCM to
sensing elements. The bridge structure
provides a sensitive and fast response to The unamplified versions require both 6 SLPM)
the flow of air or other gas over the chip. the heater control circuit (Fig. 2) and the • Adaptable for use with higher flows
Dual sensing elements positioned on sensing bridge supply circuit (Fig. 3) for • Low power consumption allows for
both sides of a central heating element operation per specification. These two use in portable devices and battery-
indicate flow direction as well as flow circuits are not on board the sensor and powered applications
rate. must be supplied in the application. The • Analog output
differential amplifier circuitry (Fig. 4) • Standard 2,54 mm [0.10 in] mounting
The specially-designed housing centers
may be useful in providing output gain
precisely directs and controls the airflow • Laser-trimmed interchangeability
and/or introducing voltage offsets to the
across the microstructure sensing • Accurate sensing of low pressure
sensor output (Fig. 5).
element. Mechanical design of the
package allows it to be easily mounted The amplified versions can be used
to printed circuit boards. to increase output gain and introduce
voltage offsets. The circuits shown in
Laser-trimmed, thick film and thin
Figs. 2, 3, and 4 are all provided onboard. To view the entire mass
film resistors provide consistent
airflow product portfolio,
interchangeability from one device to
POTENTIAL APPLICATIONS click here.
the next. The microbridge mass airflow
• Medical
sensor uses temperature sensitive
- Respirators and ventilators
resistors deposited within a thin film of
- Oxygen concentrators and
silicon nitride. They are suspended in
conservers
the form of two bridges over an etched - Anesthesia machines
cavity in the silicon. • Industrial
The chip is located in a precisely - HVAC damper control
dimensioned airflow channel to provide - Gas analyzers
a repeatable flow response. Highly - Low vacuum control
effective, thermal isolation for the heater - Process control
and sensing resistors is attained by - Leak detection equipment
etching the cavity space beneath the - Vent hoods
flow sensor bridges. - Gas metering
- Chromatography
AIRFLOW SENSORS, AMPLIFIED, AND UNAMPLIFIED
AWM40000 SERIES
TABLE 1. SPECIFICATIONS
UNAMPLIFIED AMPLIFIED
CHARACTERISTIC
AWM42150VH AWM42300V AWM43300V AWM43600V-2
Flow range (full scale) 1
±30 SCCM ±1000 SCCM +1000 SCCM 0 SLPM to 6 SLPM
Calibration gas ­— ­— nitrogen nitrogen
Recommended excitation voltage 10 ±0.01 Vdc 10 ±0.01 Vdc 10.000 ±0.010 Vdc 10.000 ±0.010 Vdc
Power supply:
minimum 8.0 Vdc 8.0 Vdc 8.000 Vdc 10.000 Vdc
maximum 15.0 Vdc 15.0 Vdc 15.000 Vdc 15.000 Vdc
Power consumption 30 mW typ. 30 mW typ. 60 mW max. 75 mW max.
8.5 Vdc ±1.5 mVdc at 55.2 Vdc ±2.0 mVdc at 5 Vdc ±0.15 Vdc at 5 Vdc ±0.15 Vdc at
Output at laser trim point
25 SCCM 1000 SCCM 1000 SCCM 6 SLPM
Null output 0 mV ±1 mV 0.0 mVdc ±1.5 mVdc 1.000 mVdc ±0.050 mVdc 1.000 Vdc ±0.050 Vdc
Null output shift (-25°C to 85°C) ­±0.20 mVdc ±0.20 mVdc ±0.025 Vdc max. ±50 mVdc max.
Output voltage shift:
25°C to -25°C +2.5% reading max. +2.5% reading,max. -5.0% reading max. -7.0% reading max.
25°C to 85°C -2.5% reading max. -2.5% reading max. +6.0% reading max. +7.0% reading max.
Repeatability and hysteresis1 ±0.35% FSO typ. ±0.50% reading typ. ±0.5% reading max. ±1.00% reading max.
Pressure drop at full scale 0.008 inH20 typ. 1.02 inH20 typ. 1.02 inH20 typ. 8 inH20 typ.
1.0 ms typ. 1.0 ms typ. 1.0 ms nom.
Response time2 1.0 ms nom.
3.0 ms max. 3.0 ms max. 3.0 ms max.
Overpressure 17.2 bar [250 psi] max. 10.3 bar [150 psi] 10.3 bar [150 psi] 1.7 bar [25 psi]
Maximum flow pulse to
5 SLPM/s 5 SLPM/s 5 SLPM/s 5 SLPM/s
prevent damage
Output load:
NPN (sinking) 10 mA 10 mA 10 mA 10 mA source, 20 mA typ.
PNP (sourcing) 20 mA 20 mA 20 mA
-25°C to 85°C -25°C to 85°C -25°C to 85°C -25°C to 85°C
Operating temperature range
[-13°F to 185°F] [-13°F to 185°F] [-13°F to 185°F] [-13°F to 185°F]
-40°C to 125°C -40°C to 125°C -40°C to 90°C -40°C to 125°C
Storage temperature range
[-40°F to 251°F] [-40°F to 251°F] [-40°F to 194°F] [-40°F to 251°F]
Ratiometricity error ±0.30% reading ±0.3% reading ±0.3% reading nom. ±0.8% reading max.
Shock (5 drops, 6 axes) 100 g peak 100 g peak 100 g peak 100 g peak
Weight 17.5 g [0.62 oz]3 ­— — 11 g [0.39 oz]
1
Output voltage is ratiometric to supply voltage.
2
Repeatability and hysteresis tolerances reflect inherent inaccuracies of the measurement equipment.
3
Includes 4.3 g for backing plate.

2 Advanced Sensing Technologies

 AIRFLOW SENSORS, AMPLIFIED, AND UNAMPLIFIED
AWM40000 SERIES
TABLE 2. OUTPUT FLOW VS. INTERCHANGEABILITY (AT 10.0 ±0.01 VDC AT 25°C [77°F])1
AWM42150VH AWM42300V AWM43300V AWM43600V-2
Pressure Flow Nom. Tolerance Pressure Flow Nom. Tolerance Pressure Flow Nom. Tolerance Pressure Flow Nom. Tolerance
(ubar) (SCCM) (mV) (±mV) (mbar) (SCCM) (mVdc) (±mVdc) (mbar) (SCCM) (Vdc) (±Vdc) (mbar) (SLPM) (Vdc) (±Vdc)

20 30 9.9 1.5 —­ 1000 55.2 2.0 2.23 1000 5.000 0.15 20.0 6 5.00 0.15
17 25 8.5 1.5 — 800 53.0 2.0 1.87 900 4.970 0.16 14.7 5 4.89 0.20
14 20 6.8 1.5 — 600 49.3 2.5 1.52 800 4.885 0.17 9.07 4 4.65 0.25
10 15 5.2 1.0 — 400 42.5 3.5 1.16 700 4.775 0.18 6.40 3 4.35 0.40
7 10 3.5 1.0 —­ 200 29.8 4.0 0.94 600 4.630 0.19 3.35 2 3.75 0.55
3 5 1.7 1.0 — 0 0 1.5 0.71 500 4.430 0.20 11.7 1 2.90 0.50
0 0 0.0 1.0 — 200­ -29.8 4.0­­ -0.50 400 4.155 0.21 00.0 0 1.00 0.05

—­ —­ —­ —­­ —­ -400­­ -42.5­­ 5.0­­ -0.33 300 3.760 0.19 —­ —­­ —­­ —­
—­ —­ —­ —­­ —­ -600­ -49.3­­ 6.0­­ 0.19 200 3.225 0.17 —­ —­ —­ —­­
—­ — —­ —­­ —­ -800­­ -53.0­­ 6.0­­­ 0.08 100 2.485 0.14 —­ —­ —­­ —­
— — — —­­ —­ -1000­­ -55.2­ 6.0­­­­ 0.00 0 1.000 0.05 —­­ —­ —­­ —­
1
Numbers in bold type indicate calibration type, mass flow, or differential pressure. Tolerance values apply to calibration type only.

FIGURE 1. PERFORMANCE CURVES

15 60
AWM42150VH AWM42300V
10 40
15 15 60 60
Output (mV)

Output (mV)

5 20
10 10 40 40
0 0
Output (mV)

Output (mV)
Output (mV)

Output (mV)

5 5 20 20
-5 -20
0 0 0 0
-10 -40
-5 -5 -20 -20
-15 -60
-30 -10
-10 -20 -10 0 10 20 30 -40 -40-750
-1000 -500 -250 0 250 500 750 1000

-15 -15 Mass Flow (SCCM) -60 -60 Mass Flow (SCCM)
-30 -30 -20 -20 -10 -10
Nominal 0 0 10 20 20
10 Min./Max. 30 30 -1000
-1000 -750-750
-500-500
-250-2500
Nominal 0250 250
500 750 750
500
Min./Max. 10001000
Mass
Mass Flow
Flow (SCCM)
(SCCM) Mass
Mass Flow
Flow (SCCM)
(SCCM)
Nominal
Nominal Min./Max.
Min./Max. Nominal
Nominal Min./Max.
Min./Max.

AWM43300V AWM43600V-2

15 60
6 6
10 40
5 5
Output (mV)

(mV) (mV)

6 56 6
Output (mV)

Output (mV)

6
20
4 4
5 05 50 5
OutputOutput
Output (mV)

Output (mV)
Output (mV)

3 -5 4 3-20
4 4 4
2 -10 2-40
3 3 3 3
1 -15 1-60
2 2 20 2 -750
1 2 -250 3 0 4 750 61000
0 -30 200-20 -10
400 0600 10 800 20 30
1000 -1000 -500 250 5005

1 1 Mass
Mass Flow
Flow (SCCM)
(SCCM) 1 1 Mass
MassFlow (SCCM)
Flow (SCCM)
0 0 200 200 400 400 800 800 10001000
600 600Min./Max. 0 0 1 1 2 2 3 3 4 4 5 5 6 6
Nominal
Nominal Min./Max. Nominal
Nominal Min./Max.
Min./Max.
Mass
Mass Flow
Flow (SCCM)
(SCCM) Mass
Mass Flow
Flow (SCCM)
(SCCM)
Nominal
Nominal Min./Max.
Min./Max. Nominal
Nominal Min./Max.
Min./Max.
Advanced Sensing Technologies 3
Pin 2 + R3 R4 VS (10 Vdc)
 10 Pin 2 + R3 R4 VS (10 Vdc)
40
5 1)
(V LM2902

Output (mV)

Output (mV)
-

Output (mV)
5 20 5 kOhm
4 R2
Pin 4
AIRFLOW
0
3
SENSORS, AMPLIFIED,6 AND UNAMPLIFIED
0
1.82 kOhm
6

AWM40000
-5
SERIES - 5 -20 - Pin 3 5
R1

Output (mV)

Output (mV)
2LM2902 V O LM124
-10 + -40 + Pin 5
V4S 4
-15 NOTICE
1 -60 Pin 1
1 -10 R Circuit
2 0 (Fig. 3 2) R535 30Bridge 3
6 Supply Circuit (Fig 3.) are required for operation per specification
000 -30 the0Heater
Both -20 Control2 10and 4
the
20Sensing -1000 -750 -500 -250 0 250 500 750 1000
when using the-unamplified
Mass R
devices.
Flow
3 R
These two
(SCCM)
4 circuits are not onboard the sensor and must be Flow
supplied in the applications.
Mass Flow (SCCM) 2 Mass (SCCM) 2
LM2902 VOFFSET
Pin 6 +
FIGURE 2. HEATER Nominal Min./Max.
CONTROL CIRCUIT Min./Max.
Nominal FIGURE 3. SENSINGNominal
BRIDGE SUPPLY CIRCUIT
Min./Max. 1
(V2) 1
R6 0 200 400 600 800 1000 0 1
Mass Flow (SCCM)
VS (10 Vdc) 24.9 kOhm
Nominal Min./Max.
Pin 2

( )( )
VS (10 Vdc)
5 kOhm 2R2 + R1 R4
VO = (V - V1) + VOFFSET 500 Ohm
R1 R3 4 2
Pin
Pin 6

( )
6 1.82 kOhm Pin 2 + 6 R3 R4 VS (
R 24.9 kOhm
-
where VOFFSET = VSPin 3 6 (V1) LM2902
VO 5 LM124 R5 + R6 - 5 5k
+ Pin 5
Output (mV)

Output (mV)
R2
4 4
Pin 1
3 3
R1
-
LM2902 VO
2 2 +
VS
NOTICE
1 1 R5
The 2 R
0 differential
200 amplifier
400circuitry 600
in Fig. 4 may
800be useful1000
in providing output
- 0 gain and/or
R13 introducing
2 R4 voltage
3 offsets
4 to 5the 6
sensor output (see Fig. 5) when
Mass Flow using
24.9 (SCCM)
kOhm the unamplified devices. LM2902 Mass Flow VOFFSET
(SCCM)
Pin 2
Pin 6 +
FIGURE Vdc) Nominal INSTRUMENTATION
4. DIFFERENTIAL
VS (10 Min./Max. (V2) FIGURE 5. EQUATION Nominal Min./Max.
R6
AMPLIFIER
) + VOFFSET CIRCUIT 500 Ohm
Pin 6
+ R3 kOhmR4
24.9 VS (10 Vdc)

( )( )
Pin 2 VS (10 Vdc)
(V1) LM2902 2R2 + R1 R4
- VO = 5 kOhm (V2 - V1) + VOFFSET
R1 R3
R2

( )
Pin 4
R6
where VOFFSET = VS1.82 kOhm
- - R5 + R6 Pin 3
R1 LM2902 VO LM124
+ + Pin 5
VS
Pin 1
R2 R5
- R3 R4
LM2902 VOFFSET
Pin 6 +
(V2)
R6

24.9 kOhm
Pin 2

( )( )
VS (10 Vdc)
2R2 + R1 R4
VO = (V2 - V1) + VOFFSET 500 Ohm
R1 R3
Pin 6

( )
where VOFFSET = VS
R6
R5 + R6
24.9 kOhm

4 Advanced Sensing Technologies

AIRFLOW SENSORS, AMPLIFIED, AND UNAMPLIFIED
AWM40000 SERIES

CAUTION NOTICE
PRODUCT DAMAGE The effects of dust contamination, which may result from
Do not use the AWM40000 Series to sense liquid flow. some applications, can be minimized. By design, dust
Failure to comply with these instructions may result in particles that may be present in the air stream will flow
product damage. past the chip parallel to the chip surface. In addition, the
microstructure chip produces a thermophoretic effect, which
NOTICE repels micrometer sized dust particles away from the bridge
Positive flow direction is defined as proceeding from Port 1 structure. A simple filter will prevent dust adherence to chip
(P1) to Port 2 (P2) and results in positive output. edges and channel surfaces. Adequate filtering in most
applications can be achieved with a disposable five-micron
filter used in series on the upstream side of the airflow device.

FIGURE 6. MOUNTING DIMENSIONS (FOR REFERENCE ONLY, MM/[IN])

Pinout for amplified versions Pinout for unamplified versions

1 = Output See Figures 2, 3, and 4
2 = Supply
3 = Ground

Advanced Sensing Technologies 5

ADDITIONAL MATERIALS WARRANTY/REMEDY
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Advanced Sensing Technologies
830 East Arapaho Road
Richardson, TX 75081
008345-2-EN | 2 | 05/2021
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