MSC Chemistry PSCT Unit 7.1
MSC Chemistry PSCT Unit 7.1
MSC Chemistry PSCT Unit 7.1
The scanning electron microscope (SEM) uses a focused beam of high-energy electrons
to generate a variety of signals at the surface of solid specimens. The signals that derive
from electron-sample interactions reveal information about the sample including
external morphology (texture), chemical composition, and crystalline structure and
orientation of materials making up the sample. In most applications, data are collected
over a selected area of the surface of the sample, and a 2-dimensional image is
generated that displays spatial variations in these properties. Areas ranging from
approximately 1 cm to 5 microns in width can be imaged in a scanning mode using
conventional SEM techniques (magnification ranging from 20X to approximately
30,000X, spatial resolution of 50 to 100 nm). The SEM is also capable of performing
analyses of selected point locations on the sample; this approach is especially useful in
qualitatively or semi-quantitatively determining chemical compositions (using EDS),
crystalline structure, and crystal orientations (using EBSD). The design and function of
the SEM is very similar to the EPMA and considerable overlap in capabilities exists
between the two instruments.
Electron Lenses
Sample Stage
Infrastructure Requirements:
o Power Supply
o Vacuum System
o Cooling system
o Vibration-free floor
Applications
The SEM is routinely used to generate high-resolution images of shapes of objects (SEI)
and to show spatial variations in chemical compositions: 1) acquiring elemental maps or
spot chemical analyses using EDS, 2)discrimination of phases based on mean atomic
number (commonly related to relative density) using BSE, and 3) compositional maps
based on differences in trace element "activitors" (typically transition metal and Rare
Earth elements) using CL. The SEM is also widely used to identify phases based on
qualitative chemical analysis and/or crystalline structure. Precise measurement of very
small features and objects down to 50 nm in size is also accomplished using the SEM.
Backscattered electron images (BSE) can be used for rapid discrimination of phases in
multiphase samples. SEMs equipped with diffracted backscattered electron detectors
(EBSD) can be used to examine micro fabric and crystallographic orientation in many
materials.