USOO93603.

19B2

(12) United States Patent (10) Patent No.: US 9,360,319 B2

Jia (45) Date of Patent: Jun. 7, 2016
(54) MULTIPLE SENSE AXIS MEMS GYROSCOPE 2012/0055248 A1 3/2012 Hammer
HAVING ASINGLE DRIVE MODE 2012/0060604 A1 3/2012 Neul .................... GO1C 19,574
T3,504.12
2012fO291548 A1* 11/2012 Kanemoto ........... GO1C 19,574
(71) Applicant: FREESCALE SEMICONDUCTOR, T3,504.12
INC., Austin, TX (US) 2013,0031977 A1 2/2013 Kempe
2013/0270659 A1* 10, 2013 Jomori ............... GO1C 19,5747
(72) Inventor: Kemiao Jia, Phoenix, AZ (US) 257/417
(73) Assignee: Freescale Semiconductor, Inc., Austin, FOREIGN PATENT DOCUMENTS
TX (US) EP 2339293 B1 6, 2011
JP 2005241500 9, 2005
(*) Notice: Subject to any disclaimer, the term of this
patent is extended or adjusted under 35 OTHER PUBLICATIONS
U.S.C. 154(b) by 358 days. Cui, et al. An Investigation of Decoupling Performance for a Novel
Lateral Axis Gyroscope With Varying Environmental Parameters,
(21) Appl. No.: 14/019,066 Jun. 21-25, 2009, pp. 292-295, IEEE, Transducers 2009, Denver, CO,
USA.
(22) Filed: Sep. 5, 2013 EP Application 14182582.8-1557. Extended European search report
dated Feb. 2, 2015.
(65) Prior Publication Data
k .
US 2015/0059473 A1 Mar. 5, 2015 cited by examiner
(51) Int. Cl Primary Examiner — John Chapman, Jr.
coic 1956 (2012.01) (74) Attorney, Agent, or Firm — Charlene R. Jacobsen
GOIC 19/5747 2012.O1
(52) U.S. Cl ( ) (57) ABSTRACT
CPC ....... G0IC 19/5747 (2013.01); Y10T 29/491 17 A gyroscope includes a first drive mass driven in a first drive
(2015.01) motion along a first axis, the first drive motion generating a
(58) Field of Classification Search firSt Sense mot1On
ion Ofa
of a fifirst Sense maSS 1n respOn
sp SetO rOtat1On
CPC ................................................... GO1C 1975747 of the gyroscope. The gyroscope further includes a second
USPC ....................................................... 73/504.12 drive mass driven in a second drive motion along a second
See application file for complete search history. axis that is transverse to the first axis. The second drive
motion generates a second sense motion of a second sense
(56) References Cited mass in response to rotation of the gyroscope. A drive spring
system interconnects the two drive masses to couple the first
U.S. PATENT DOCUMENTS and second drive motions so that a single drive mode can be
implemented. The sense motion of each sense mass is along a
8.459,110 B2 6/2013 Cazzaniga et al. third axis, where the third axis is transverse to the other axes
388853. A. 8388 t al The sense motion is translational motion Such the sense
2011/0154898 A1* 6/2011 Cazzaniga ......... GO1C 19,5747 masses remain parallel to the Surface of the Substrate.
T3,504.12
2011/0303007 A1 12, 2011 Rocchi 19 Claims, 6 Drawing Sheets

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U.S. Patent US 9,360,319 B2
U.S. Patent Jun. 7, 2016 Sheet 2 of 6 US 9,360,319 B2

FIG. 2

124

126

Šs 125 TN-32
U.S. Patent Jun. 7, 2016 Sheet 3 of 6 US 9,360,319 B2

S|s sS|
|S
U.S. Patent Jun. 7, 2016 Sheet 4 of 6 US 9,360,319 B2

118
102 100
X
ROLL, Oy 140 140

68 144
22 130 134 144-J 72 26

32- . . . .
30 114 114
20

FIG. 5

Z
118
100 102
Y
PITCH, 6-108 f f
146
24 70 132 146 74 28
136

30 110 110
20

FIG. 6
U.S. Patent Jun. 7, 2016 Sheet 5 of 6 US 9,360,319 B2

32 24 107

34

Zº,? N(Z|zD?ae)ETZ |Zo.z? a

L[×]I [X]i?)

107 28 148

20
102
118 100

YAW, Oz N-116 FIG. 7

U.S. Patent Jun. 7, 2016 Sheet 6 of 6 US 9,360,319 B2

20
 US 9,360,319 B2
1. 2
MULTIPLE SENSE AXIS MEMS GYROSCOPE Velocity and in a direction perpendicular to the axis about
HAVING ASINGLE DRIVE MODE which the rotation occurs. The displacement is proportional
to the angular velocity of the rotation which may be detected
TECHNICAL FIELD OF THE INVENTION as a change in capacitance.
MEMS gyroscopes include a drive system in order to
The present invention relates generally to microelectrome impart a drive velocity upon the sense mass along a particular
chanical systems (MEMS) devices. More specifically, the drive axis. In some configurations, drive electrodes, associ
present invention relates to a multiple sense axis MEMS ated with a drive mass for the MEMS gyroscope, receive drive
gyroscope that is actuated using a single drive mode. signals from an electronic drive circuit. The drive signals
10 cause the drive mass to oscillate along the particular drive
BACKGROUND OF THE INVENTION axis, which in turn causes the associated sense mass to oscil
late. The sense mass will move in the sense direction when
Microelectromechanical systems (MEMS) technology has there is an angular rate stimulus, while continuing to oscillate
achieved wide popularity in recent years, as it provides away along the drive axis.
to make very Small mechanical structures and integrate these 15 The design and implementation of a MEMS gyroscope
structures with electrical devices on a single Substrate using having multiple sense axis capability is particularly complex
conventional batch semiconductor processing techniques. with regard to the micromechanical elements as well as the
One common application of MEMS is the design and manu associated drive system. In particular, three drive systems
facture of sensor devices. MEMS sensor devices are widely and/or control loops may be needed to drive the drive masses
used in applications such as automotive, inertial guidance of a three-axis (triaxial) sensing gyroscope. Unfortunately,
systems, household appliances, game devices, protection sys the individual drive signals can result in movements of the
tems for a variety of devices, and many other industrial, individual elements of the MEMS gyroscope that mutually
Scientific, and engineering systems. One example of a MEMS influence one another so that sense measurements of the
sensor is a MEMS gyroscope, also known as an angular rate gyroscope are not accurate. Furthermore, multiple control
sensor. A gyroscope senses angular speed or Velocity around 25 loops (one for each driving direction) entails a high occupa
Ole O OaxeS. tion of area in an integrated, multiple sense axis configura
tion.
BRIEF DESCRIPTION OF THE DRAWINGS Embodiments entail a microelectromechanical systems
(MEMS) gyroscope having a single drive mode design in a
A more complete understanding of the present invention 30 multiple sense axis configuration and a method for fabricat
may be derived by referring to the detailed description and ing the MEMS gyroscope. The single drive mode can reduce
claims when considered in connection with the Figures, the footprint for a multiple sense axis gyroscope. Addition
wherein like reference numbers refer to similar items ally, the single drive mode can reduce the complexity of the
throughout the Figures, the Figures are not necessarily drawn associated application specific integrated circuit (ASIC) con
to scale, and: 35 taining the electronic drive circuit to yield a lower power
FIG. 1 shows a top view of a multiple sense axis micro consumption and Smaller ASIC design. Furthermore, the
electromechanical systems (MEMS) gyroscope in accor single drive mode design has intrinsically less damping which
dance with an embodiment; can yield high device performance with lower requirements
FIG. 2 shows a perspective view of a beam spring imple on vacuum levels (lower bonding requirement, no getter, and
mented in the MEMS gyroscope; 40 so forth), therefore simplifying fabrication. The MEMS gyro
FIG. 3 shows a partial perspective view of the MEMS Scope implements the single drive mode combined with a
gyroscope including the beam spring; drive spring system that reduces motion coupling between the
FIG. 4 shows a top view of the MEMS gyroscope exem functional elements to achieve a robust device that is less
plifying a drive mode of the device; susceptible to external perturbations. The MEMS gyroscope
FIG. 5 shows a simplified side view of the MEMS gyro 45 also has more efficient sense capability which can increase
scope across section line 5-5 of FIG. 4 demonstrating roll the sensitivity of the device without increasing the device
sensing: S17C.
FIG. 6 shows a simplified side view of the MEMS gyro FIG. 1 shows a top view of a multiple sense axis micro
Scope across section line 6-6 of FIG. 4 demonstrating pitch electromechanical systems (MEMS) gyroscope 20 in accor
sensing: 50 dance with an embodiment. MEMS gyroscope 20 includes a
FIG. 7 shows a simplified top view of the MEMS gyro structural configuration that enables a single drive mode and
Scope demonstrating yaw sensing; and a number of elements enabling sensing of angular Velocity
FIG. 8 shows a simplified block diagram of an electronic about three mutually orthogonal axes.
device that includes the MEMS gyroscope. MEMS gyroscope 20 includes drive frame that includes
55 multiple drive masses 22, 24, 26, and 28 suspended above a
DETAILED DESCRIPTION surface 30 of a substrate 32 and uniformly arranged about a
central region34. MEMS gyroscope 20 further includes mul
MEMS gyroscopes that are capable of sensing angular tiple drive spring systems 36, 38, 40, 42 interconnecting
speed or velocity about multiple axes are highly desirable for adjacent drive masses 22, 24, 26, and 28. More specifically,
implementation in a multiplicity of devices. MEMS gyro 60 drive spring system 36 interconnects drive mass 22 with drive
Scopes typically exploita Coriolis acceleration. That is, when mass 24, drive spring system 38 interconnects drive mass 24
rotation at an angular velocity (the value of which is to be with drive mass 26, drive spring system 40 interconnects
sensed) is applied to a mobile sense mass that is being driven drive mass 26 with drive mass 28, and drive spring system 42
at a known drive Velocity, the sense mass “feels an apparent interconnects drive mass 28 with drive mass 22.
force, called the “Coriolis force.” A Coriolis force of suffi 65 In an embodiment, each of drive spring systems 36,38, 40,
cient magnitude causes displacement of the mobile sense 42 includes a spring element 44 coupled to adjacent drive
mass in a direction perpendicular to the direction of the drive masses 22, 24, 26, and 28. By way of example, spring element
 US 9,360,319 B2
3 4
44 of drive spring system 36 is coupled to each of drive mass substantially rigid beam 96 interconnects sense mass 70 with
22 and 24. Each of drive spring systems 36, 38, 40, and 42 sense mass 74 via compliant members 90 and 94. That is,
further includes an anchorelement 46 coupled to substrate 32, compliant member 90 is interconnected between sense mass
a spring element 48 interconnected between one of drive 70 and one end of beam 96 and compliant member 94 is
masses 22, 24, 26, and 28 and anchorelement 46, and another 5 interconnected between sense mass 74 and the opposing end
spring element 50 interconnected between the adjacent one of of beam 96. However, compliant members 90 and 94 are also
drive masses 22, 24, 26, and 28 and anchorelement 46. Again indirectly interconnected to anchor system 86 via a hinge
with regard to drive spring system 36, spring element 48 is system (discussed in connection with FIG. 7).
interconnected between drive mass 22 and anchor element
46, and spring element 50 is interconnected between drive 10
MEMS gyroscope 20 further includes drive assemblies 98
associated with drive masses 22 and 26. As will be discussed
mass 24 and anchor element 46.
MEMS gyroscope 20 further includes spring anchorages in significantly greater detail below, drive assemblies 98 are
52, 54,56, and 58. One each of spring anchorages 52,54,56, configured to cause a drive motion along an X-axis 100 of a
and 58 is coupled to a corresponding one each of drive masses three-dimensional Cartesian coordinate system Substantially
22, 24, 26, 28. Thus, each of drive masses 22, 24, 26, and 28 15 parallel to surface 30 of substrate 32. Alternatively, similar
is spaced apart from, i.e., Suspended above, Surface 30 of drive assemblies (not shown) may be associated with drive
Substrate 32 by associated anchors. In an example, drive mass masses 24 and 28 to cause the drive motion substantially
22 is anchored to substrate 32 by anchor elements 46 of drive parallel to surface 30 of substrate 32 along a Y-axis 102 of the
spring systems 36 and 42 and by spring anchorage 52. Like Cartesian coordinate system.
wise, drive mass 24 is anchored to substrate 32 by anchor Each drive assembly 98 includes fixed drive electrodes 104
elements 46 of drive spring systems 36 and 38 and by spring that are fixed with respect to, i.e., coupled to, surface 30 of
anchorage 54. Drive mass 26 is anchored to substrate 32 by substrate 32, and movable drive electrodes 106 that are fixed
anchor elements 46 of drive spring systems 38 and 40 and by with respect to, i.e. formed in, drive masses 22 and 26. The
spring anchorage 56, and drive mass 28 is anchored to Sub fixed and movable drive electrodes 104 and 106 may be
strate 32 by anchor elements 46 of drive spring systems 40 25 arranged in a comb finger configuration and may be capaci
and 42 and by spring anchorage 58. Drive masses 22, 24, 26. tively coupled to one another so as to generate a mutual
28 are suspended via drive spring systems 36, 38, 40, 42 and attraction/repulsion to cause oscillatory drive motion of drive
spring anchorages 52,54, 56.58 to enable in-plane movement masses 22 and 26 along X-axis 100. Fixed drive electrodes
of drive masses 22, 24, 26, 28 and very little out-of-plane 104 are shown with rightwardly and downwardly directed
movement of drive masses 22, 24, 26, 28. The anchors of 30 hatching to distinguish them from the Surrounding elements
MEMS gyroscope 20 are represented herein by an “X” of MEMS gyroscope 20. Additional sets of electrodes 107
enclosed by a box to represent the physical attachment of a may beformed in association with, for example drive masses
particular element to surface 30 of substrate 32. 24 and 28 to provide feedback control for the drive motion. In
As illustrated in FIG. 1, each of drive masses 22, 24, 26, alternative configurations, drive electrodes 104 may be asso
and 28 is approximately shaped like a “U” or like a “U” turned 35 ciated with drive masses 24, 28 and feedback electrodes 107
over or upside down, and thus having openings 60, 62, 64, and may be associated with drive masses 22, 26. And in still other
66 that open toward central region 34. Sense masses 68, 70. configurations, electrodes 104 and/or 107 may be evenly
72, and 74 are arranged in openings 60, 62, 64, and 66, distributed among drive masses 22, 24, 26, 28.
respectively, for sensing angular velocities when MEMS MEMS gyroscope 20 additionally includes a plurality of
gyroscope is set in motion. Multiple beam springs 76, 77 40 sense electrodes. As mentioned above, MEMS gyroscope 20
couple sense masses 68, 70, 72, and 74 with their associated is a triaxial gyroscope capable of sensing rotations around
drive masses 22, 24, 26, and 28. In an embodiment, sense three axes. In an embodiment, MEMS gyroscope 20 is
mass 68 is mechanically interconnected with drive mass 22 capable of sensing pitch angular velocity 108 (labeled G2 in
via a pair 78 of beam springs 76. Sense mass 70 is mechani FIG. 1), i.e., the rotation of MEMS gyroscope 20 about
cally interconnected with drive mass 24 via a pair 80 of beam 45 X-axis 100, via pitch sense electrodes 110. Pitch sense elec
springs 77. Sense mass 72 is mechanically interconnected trodes 110 can be plate electrodes formed on substrate 32
with drive mass 26 via a pair 82 ofbeam springs 76, and sense underlying sense masses 70 and 74. Pitch sense electrodes are
mass 74 is mechanically interconnected with drive mass 28 obscured by sense masses 70 and 74 in FIG. 1 and are thus
via a pair 84 of beam springs 77. represented by dashed lines. MEMS gyroscope 20 is also
In general, pairs 78, 82 of beam springs 76 provide com 50 capable of sensing roll angular Velocity 112 (labeled G2 in
pliance for sense masses 68,72 in the z-direction, i.e., parallel FIG. 1), i.e., the rotation of MEMS gyroscope 20 aboutY-axis
to Z-axis 118. Pairs 80, 84 of beam springs 77 provide com 102, via roll sense electrodes 114. Roll sense electrodes 114
pliance for sense masses 70, 74 in both the z-direction and in can be plate electrodes formed on substrate 32 underlying
the X-direction, i.e., parallel to X-axis 100. However, beam sense masses 68 and 72. Roll sense electrodes 114 are
springs 76, 77 differ from drive spring systems 36,38, 40, 42 55 obscured by sense masses 68 and 72 in FIG. 1 and are thus
in that beam springs 76, 77 provide rigid in-plane coupling represented by dashed lines.
between drive masses 22, 24, 26, 28 and their associated sense Furthermore, MEMS gyroscope 20 is capable of sensing
masses 68, 70, 72, 74. Conversely, drive spring systems 36, yaw angular velocity 116 (labeled S2 in FIG. 1), i.e., the
38, 40, 42 are rigid in the out-of-plane direction, i.e., z-direc rotation of MEMS gyroscope 20 about a Z-axis 118 perpen
tion. 60 dicular to surface 30 of substrate 32. In an embodiment, sense
Ananchor System 86 is located in central region 34 coupled masses 70 and 74 are utilized to sense yaw angular velocity
to substrate 32 with sense masses 68, 70, 72, and 74 being 116. As such, each of sense masses 70 and 74 includes mov
arranged around anchor system 86. Compliant members 88. able yaw sense electrodes 120 which are capacitively coupled
90.92, and 94 are also located in central region34. Compliant to respective fixed yaw sense electrodes 122. Fixed yaw sense
member 88 is interconnected between sense mass 68 and 65 electrodes 122 are shown with rightwardly and upwardly
anchor system.86 and compliant member 92 is interconnected directed hatching to distinguish them from the Surrounding
between sense mass 72 and anchor system 86. Additionally, a elements of MEMS gyroscope 20.
 US 9,360,319 B2
5 6
The operation of MEMS gyroscope 20 including imposed It should be recalled that pitch sense electrodes 110 under
drive motion and resulting sense motion in response to rota lie sense masses 70 and 74. Accordingly, as each of sense
tions of MEMS gyroscope 20 will be described below in masses 70 and 74 undergoes translational sense motion along
connection with FIGS. 5-8. Z-axis 118, the displacement of sense masses 70 and 74 may
Referring now to FIGS. 2 and 3, FIG.2 shows a perspective be detected as a change in capacitance at pitch sense elec
view of one of beam springs 76 implemented in MEMS trodes 110. Additionally, roll sense electrodes 114 underlie
gyroscope 20 (FIG. 1), and FIG. 3 shows an enlarged partial sense masses 68 and 72. Accordingly, as each of sense masses
perspective view of MEMS gyroscope 20 including actuation 68 and 72 undergoes translational sense motion along Z-axis
of beam spring 76. In this example, beam spring 76 will be 118, the displacement of sense masses 68 and 72 may be
discussed in connection with the interconnection of sense 10 detected as a change in capacitance at roll sense electrodes
114.
mass 68 to drive mass 22. However, the following description FIG. 4 shows a top view of MEMS gyroscope 20 exempli
applies equivalently to any of beam springs 76, arranged as fying a drive mode 138 of MEMS gyroscope 20. In an
pairs 78, 82 (FIG. 1) of beam springs 76, that interconnect embodiment, drive masses 22 and 26 are configured to be
each of sense masses 68,72 with its associated drive mass 22 15 driven to have a drive motion, represented by arrows 140,
and 26. Similarly, the following description applies equiva along X-axis 100. That is, drive masses 22 and 26 are suitably
lently to any of beam springs 77 arranged as pairs 80, 84 of elastically anchored to substrate 32 to move with translational
beam springs 77 that interconnected each of sense masses 70. linear drive motion 140 along X-axis 100. Sense masses 68
74 with its associated drive mass 24, 28. and 72 are mechanically coupled to respective drive masses
Beam spring 76 includes compliant ends 123 and 124, and 22 and 26 so as to be rigid with regard to the drive motion.
a beam section 125 spanning between compliant ends 123 Thus, sense masses 68 and 72 are carried along with drive
and 124. In the illustrated exemplary configuration shown in masses 22 and 26 and are thus driven so as to have transla
FIG. 3, compliant end 123 may be coupled to drive mass 22 tional linear drive motion 140 along X-axis 100. Additionally,
and compliant end 124 may be coupled to sense mass 68. drive masses 22 and 26, together with sense masses 68 and 72,
Each of compliant ends 123 and 124 is configured to deform, 25 are driven to move in phase opposition with respect to one
twist, or otherwise tilt, out of a plane 126 (represented in FIG. another. As will be discussed in connection with FIG. 5, sense
2 by dashed lines) perpendicular to surface 30 of substrate 32, masses 68 and 72 are used to sense roll angular velocity 112
and beam section 125 is rigid relative to compliant ends 123 of MEMS gyroscope 20 aboutY-axis 102. Thus, each of sense
and 124. The tilt deformation of compliant ends 123 and 124 masses 68 and 72 is labeled ROLL in FIG. 4 to emphasize
is represented in FIG. 2 by bi-directional arrows 127, and the 30 their capability for sensing roll angular Velocity 112.
tilt deformation of compliant ends 123 and 124 is visible in Drive masses 24 and 28 are configured to be driven to have
the enlarged partial perspective view of MEMS gyroscope 20 a drive motion, represented by arrows 142, along Y-axis 102.
in FIG.3. This tilt deformation of compliant ends 123 and 124 That is, drive masses 24 and 28 are suitably elastically
allows sense mass 68 to move relative to drive mass 22. anchored to substrate 32 to move with translational linear
Referring back to FIG. 1 in connection with FIGS. 2 and 3. 35 drive motion 142 along Y-axis 102. Sense masses 70 and 74
in an embodiment each of beam springs 76 of pair 78 are are mechanically coupled to respective drive masses 24 and
located on opposing edges 128 of sense mass 68 Such that 28 so as to be rigid with regard to the drive motion. Thus,
longitudinal axes 129 of beam sections 125 of pair 78 are sense masses 70 and 74 are carried along with drive masses 24
aligned with one another. Likewise, each of beam springs 76 and 28 so as to have translational linear drive motion 142
of pairs 80, 82, and 84 are located on opposing edges 128 of 40 along Y-axis 102. Additionally, drive masses 24 and 28,
their corresponding sense masses 70, 72, and 74 such that together with sense masses 70 and 74, are driven to move in
longitudinal axes 129 of beam sections 125 of each pair 80, phase opposition with respect to one another. As will be
82, and 84 of beam springs 76 are also aligned with one discussed in connection with FIG. 6, sense masses 70 and 74
another. are used to sense pitch angular velocity 108 of MEMS gyro
The alignment and interconnection of pair 78 of beam 45 scope 20 about X-axis 100. Furthermore, sense masses 70 and
springs 76 and compliant member 88 are balanced in accor 74 are used to sense yaw angular velocity 116 of MEMS
dance with the center of gravity of sense mass 68 such that a gyroscope 20 about Z-axis 116, as will be discussed in con
force (represented by an arrow 131 in FIG. 2) aligned with nection with FIG. 7. Thus, each of sense masses 70 and 74 is
Z-axis 118 will cause sense mass 68 to move, or translate, labeled PITCH/YAW in FIG. 4 to emphasize their capability
along Z-axis 118 while remaining Substantially parallel to 50 for sensing pitch angular Velocity 108 and yaw angular Veloc
surface 30 of substrate 32. That is, force 131 results in trans ity 116.
lational sense motion of sense mass 68 Such that as sense mass In accordance with an embodiment, the configuration of
68 moves along Z-axis 118, while a planar surface 130 of spring elements 44, 48,50 of drive spring systems 36,38, 40.
sense mass 68 remains Substantially parallel to the underlying 42 results in drive movement in which when drive masses 22,
surface 20. Similarly, pair 80 of beam springs 76 and com 55 26 (and correspondingly sense masses 68, 72) are driven to
pliant member 90 are balanced in accordance with the center move along X-axis 100 toward central region 34, and hence
of gravity of sense mass 70 such that a force aligned with toward one another in phase opposition, drive masses 24, 28
Z-axis 118 will cause sense mass 70 to undergo translational (and correspondingly sense masses 70, 74) are concurrently
sense motion, with its planar Surface 132 remaining Substan driven to move along Y-axis 102 away from central region34,
tially parallel to surface 30 of substrate 32. Likewise, pair 82 60 and hence away from one another in phase opposition. Of
ofbeam springs 76 and compliant member 92 are balanced to course, due to the oscillatory nature of the drive movement
cause sense mass 72 to undergo translational sense motion when drive masses 22, 26 (and correspondingly sense masses
with its planar surface 134 remaining substantially parallel to 68, 72) are driven to move along X-axis 100 away from
surface 30 of substrate 32, and pair 84 of beam springs 76 and central region 34, and hence away from one another in phase
compliant member 96 are balanced to cause sense mass 74 to 65 opposition, drive masses 24, 28 (and correspondingly sense
undergo translational sense motion with its planar Surface 136 masses 70, 74) are concurrently driven to move along Y-axis
remaining substantially parallel to surface 30 of substrate 32. 102 toward central region34, and hence toward one another in
 US 9,360,319 B2
7 8
phase opposition. Thus drive masses 22, 26 move inward as parallel to surface 30 of substrate 32. The displacement of
drive masses 24, 28 move outward and vice versa. sense masses 68 and 72 may be detected as a change in
Some prior art gyroscope designs call for drive movement capacitance at roll sense electrodes 114.
in which the two pairs of drive masses move inwardly To summarize, when sense masses 68,72 are being driven
together and then outwardly together. These gyroscope 5 in phase opposition along X-axis 100, and MEMS gyroscope
designs can Suffer from Squeeze film damping. When two 20 experiences roll angular velocity 112 about Y-axis 102,
similar-shaped surfaces are close to each other and moving drive motion 140 generates a “Coriolis force, i.e., sense
closer, and there is a gas or liquid between them, that gas or motion 144. Sense motion 144 of sufficient magnitude causes
liquid has to flow out. Associated with that flow is viscosity, displacement of sense masses 68 and 72 in a direction trans
which means that some of the kinetic energy of the moving 10 verse to the direction of drive motion 140 (e.g., transverse to
Surfaces gets dissipated. This viscosity and the Subsequent X-axis 100) and transverse to the axis about which the rota
dissipation of kinetic energy is referred to as 'damping. The tion occurs (e.g., transverse to Y-axis 102). The displacement
term "squeeze film damping” refers to the damping effect of sense masses 68 and 72 is proportional to roll angular
associated with "squeezing of the fluid (gas or liquid) layer. Velocity 112 which may be detected as a change in capaci
Ofcourse, when the two surfaces move farther apart, the fluid 15 tance at sense electrodes 114.
has to rush into the expanding space between the Surfaces. FIG. 6 shows a simplified side view of MEMS gyroscope
Squeeze film damping is highly nonlinear since the damping 20 across section line 6-6 of FIG. 4 demonstrating pitch
coefficient changes depending on how close the Surfaces are sensing. When drive motion 142 is applied to drive masses 24,
and depending upon the compressibility of the gas. Accord 28 and sense masses 70, 74, drive motion 142 generates a
ingly, Squeeze film damping can lead to sensor inaccuracy in 20 sense motion 146 of sense masses 70, 74 along Z-axis 118 in
gyroscope designs that call for drive movement in which the response to rotation of MEMS gyroscope 20 about X-axis
two pairs of drive masses move inwardly together and then 100. Since sense masses 70, 74 are being driven in phase
outwardly together. opposition, the resulting sense motion 146 of sense masses
The drive movement of drive masses 22, 26 in opposition to 70, 74 will also be in phase opposition. Sense motion 146 is
drive masses 24, 28 results in significantly less Squeeze film 25 transverse to surface 30 of substrate 32 and is translational
damping since as drive masses 22, 26 move outwardly, drive such that planar surfaces 132 and 136 remain substantially
masses 24, 28 move inwardly and vice versa. Therefore, the parallel to surface 30 of substrate 32. The displacement of
gaps between drive masses 22, 24, 26, 28 remain generally the sense masses 70 and 74 may be detected as a change in
same, as does the fluid (e.g., gas) between them. A reduction capacitance at pitch sense electrodes 110.
in the damping source, i.e., Squeeze film damping, can help 30 To summarize, when sense masses 70, 74 are being driven
MEMS gyroscope 20 achieve high performance with less in phase opposition along Y-axis 100, and MEMS gyroscope
requirements on vacuum level (e.g., lower bonding require 20 experiences pitch angular velocity 108 about X-axis 100,
ments, no getter, and so forth) which decreases complexity drive motion 142 generates a Coriolis force, i.e., sense motion
and cost of fabrication of MEMS gyroscope 20. 146. Sense motion 146 of sufficient magnitude causes dis
Furthermore, the drive movement of drive masses 22, 26 in 35 placement of sense masses 70 and 74 in a direction transverse
opposition to drive masses 24, 28 can result in less potential to the direction of drive motion 142 (e.g., transverse to Y-axis
energy conversion and therefore an intrinsically stable drive 102) and transverse to the axis about which the rotation
mode for MEMS gyroscope 20. In addition, implementation occurs (e.g., transverse to X-axis 100). The displacement of
of a decoupling frame that includes drive masses 22, 24, 26. sense masses 70 and 74 is proportional to pitch angular Veloc
28 interconnected via drive spring systems 36, 38, 40, 42 40 ity 108 which may be detected as a change in capacitance at
reduces mechanical coupling between functional elements of sense electrodes 110.
MEMS gyroscope 20, which achieves a cleaner mode spec In prior art gyroscope designs, the sense mass or sense
trum. Consequently, a reduction of motion coupling between masses typically tilt or tip about an axis of rotation in a
functional elements can result in a more robust MEMS gyro teeter-totter fashion. A tilting sense mass gyroscope design
Scope design that is less Susceptible to external perturbations. 45 can be less efficient compared to a gyroscope design having
Due to the presence of drive spring systems 36, 38, 40, 42 parallel plate movement. To achieve similar sensitivity in the
interconnecting drive masses 22, 24, 26, 28, a single driving tilting sense mass gyroscope to a parallel plate gyroscope
movement is Sufficient to set in motion all of drive masses 22, calls for either lowering the operating frequency, a smaller
24, 26, 28, and the associated sense masses 68, 70, 72, and 74. sense gap, a smaller drive-sense frequency gap, a larger sense
A single drive mode can achieve Savings in size and complex- 50 area, or some combination thereof. Unfortunately, lowering
ity for a multiple axis, and particularly a triaxial, MEMS the device operating frequency increases device Susceptibil
gyroscope design. That is, it may be sufficient to couple fixed ity to external disturbances Such as acoustic noise, and limits
and movable drive electrodes 104,106 to only one of the pairs the degree of miniaturization of the device since a smaller
of drive masses 22, 24, 26, 28, since the other pair of drive design tends to increase the operating frequency. A Smaller
masses 22, 24, 26, 28 are set in motion due to the compliant 55 sense gap can cause problems during processing because the
drive spring systems 36, 38, 40, 42. tilting sense mass structure may repeatedly strike the under
FIG. 5 shows a simplified side view of MEMS gyroscope lying electrode during processing. This can result in abrasions
20 across section line 5-5 of FIG. 4 demonstrating roll sens to the electrode and/or the tilting sense mass structure which
ing. When drive motion 140 is applied to drive masses 22, 26 can therefore produce yield loss. Additionally, a relatively
and sense masses 68,72, drive motion 140 generates a sense 60 large electrostatic force may be generated with a tilting sense
motion 144 of sense masses 68, 72 along Z-axis 118 in mass structure due to the Small sense gap. A relatively large
response to rotation of MEMS gyroscope 20 about Y-axis electrostatic force can result in a more severe frequency tun
102. Since sense masses 68, 72 are being driven in phase ing effect which can, in turn, result in sensitivity shifting. A
opposition, the resulting sense motion 144 of sense masses Smaller drive-sense frequency gap can add to process diffi
68, 72 will also be in phase opposition. Sense motion 144 is 65 culties and to other ASIC related issues, and a larger sense
transverse to surface 30 of substrate 32 and is translational area can lead to a larger design which is counter to efforts at
such that planar surfaces 130 and 134 remain substantially miniaturization.
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In MEMS gyroscope 20, due to implementation of beam circuit 154 configured to impart the drive motion on drive
springs 76 (FIG. 1), parallel plate motion is produced in masses 22, 24, 26, 28. For example, a drive signal 156 may be
which sense masses 68, 70, 72, 74 remain substantially par supplied to fixed drive electrodes 104 by drive circuit 154 in
allel to surface 32 of substrate 30 as they displace along a known manner to cause drive motion 140 of drive masses
Z-axis 118. Such a configuration advantageously produces 22, 26 and drive motion 142 of drive masses 24, 28 as dis
improvements in sensitivity relative to a tilting sense mass cussed above. Electronic device may further include a detec
structure, without the need for the Small gap and the commen tion circuit 158 operatively coupled to sense electrodes 110.
Surate problems associated with a small sense gap. Accord 114, 122 (FIG.1) associated with sense masses 68.70, 72.74.
ingly, more efficient sensing can increase the sensitivity of Detection circuit 158 may be configured to detect the magni
MEMS gyroscope over prior art tilt motion structures without 10 tude of displacement of sense masses 68, 70, 72, 74, and
increasing the size of MEMS gyroscope. Furthermore, a determine pitch, roll, and yaw angular velocities 108, 112,
reduction in yield loss during processing can be achieved. 116, and Subsequently output pitch, roll, and yaw angular
FIG.7 shows a simplified top view of MEMS gyroscope 20 velocities 108, 112, 116.
demonstrating yaw sensing. When drive motion 142 is Accordingly as described in detail above, an embodiment
applied to drive masses 24, 28 and sense masses 70, 74, drive 15 of a MEMS gyroscope includes a first drive mass configured
motion 142 generates a sense motion 148 of sense masses 70. to be driven in a first drive motion along a first axis and a
74 along X-axis 100 in response to rotation of MEMS gyro second drive mass configured to be driven in a second drive
scope 20 about Z-axis 118. Since sense masses 70, 74 are motion along a second axis that is transverse to the first axis,
being driven in phase opposition, the resulting sense motion each of the first and second axes being parallel to a Surface of
148 of sense masses 70, 74 will also be in phase opposition. a Substrate. A drive spring system interconnects the first drive
Sense motion 148 is generally parallel to surface 30 of sub mass with the second drive mass to couple the first drive
strate 32 and is translational. The displacement of sense motion to the second drive motion. A first sense mass is
masses 70 and 74 may be detected as a change in capacitance coupled to the first drive mass such that the first drive motion
between movable and fixed yaw sense electrodes 120 and generates first sense motion of the first sense mass along a
122. 25 third axis in response to rotation of the MEMS gyroscope.
Central region 34 includes anchor System 86, compliant The third axis is transverse to each of the first and second
members 88,90,92,94, and rigid beam 96 that allow move axes, and the first sense motion is translational motion Such
ments in phase opposition and inhibit in phase movements of that a first planar Surface of the first sense mass remains
pairs of sense masses, where sense masses 68, 72 form one substantially parallel to the surface of the substrate. A second
pair and sense masses 70, 74 form the other pair. As men 30 sense mass is coupled to the second drive mass Such that the
tioned briefly above, an end of rigid beam 96 is coupled to second drive motion generates second sense motion of the
sense mass 70 via compliant member 90 and the opposingend second sense mass along the third axis in response to rotation
of rigid beam 96 is coupled to sense mass 74 via compliant of the MEMS gyroscope. The second sense motion is trans
member 94. Rigid beam 96 is “hinged to anchor system 86, lational motion Such that a second planar Surface of the sec
and therefore to substrate 32, via hinge elements 150. Due to 35 ond sense mass remains Substantially parallel to the Surface of
a suitable configuration of hinge elements 150, rigid beam 96 the substrate.
can rotate about a central point of constraint, i.e. approxi In addition, an embodiment of a method of forming a
mately central to rigid beam 96, in an X-Y plane defined by MEMS gyroscope includes forming a first drive mass and a
X-axis 100 and Y-axis 102 in response to yaw angular velocity first sense mass coupled to the first drive mass, the first drive
116 about Z-axis 118. Accordingly, sense masses 70, 74 can 40 mass configured to be driven in a first drive motion along a
translate in phase opposition along X-axis 100. first axis. The method further includes forming a second drive
To summarize, when sense masses 70, 74 are being driven mass and a second sense mass coupled to the second drive
in phase opposition along Y-axis 100, and MEMS gyroscope mass, the second drive mass configured to be driven in a
20 experiences yaw angular velocity 116 about Z-axis 118, second drive motion along a second axis that is transverse to
drive motion 142 generates a Coriolis force, i.e., sense motion 45 the first axis, the first and second axes being parallel to a
148. Sense motion 148 of sufficient magnitude causes dis Surface of a Substrate. A drive spring system is formed inter
placement of sense masses 70 and 74 in a direction transverse connecting the first drive mass with the second drive mass to
to the direction of drive motion 142 (e.g., transverse to Y-axis couple the first drive motion to the second drive motion. The
102) and transverse to the axis about which the rotation first drive motion generates first sense motion of the first
occurs (e.g., transverse to Z-axis 118). The displacement of 50 sense mass along a third axis in response to rotation of the
sense masses 70 and 74 is proportional to yaw angular veloc MEMS gyroscope, the third axis being transverse to each of
ity 116 which may be detected as a change in capacitance the first and second axes, and the first sense motion being
between movable and fixed yaw sense electrodes 120 and translational motion such that a first planar Surface of the first
122. sense mass remains substantially parallel to the Surface of the
Thus, as demonstrated in connection with FIGS. 5-7, 55 Substrate. The second drive motion generates second sense
MEMS gyroscope 20 is capable of sensing angular velocities motion of the second sense mass along the third axis in
about three axes of a Cartesian reference system that is fixed response to rotation of the MEMS gyroscope, the second
with respect to MEMS gyroscope 20. sense motion being translational motion Such that a second
FIG. 8 shows a simplified block diagram of an electronic planar Surface of the second sense mass remains substantially
device 152 that includes MEMS gyroscope 20. Electronic 60 parallel to the surface of the substrate.
device 152 may be implemented in a plurality of electronic Embodiments described herein entail a microelectrome
systems such as inertial navigation systems, automotive sys chanical systems (MEMS) gyroscope having a single drive
tems, or portable devices Such as game controllers, cell mode design in a multiple sense axis configuration and a
phones, portable computers, digital audio players, cameras, method for fabricating the MEMS gyroscope. The single
and so forth. Electronic device 152 may be able to process, 65 drive mode can reduce the footprint for a multiple sense axis
store, transmit, and receive signals and information. In the gyroscope. Additionally, the single drive mode can reduce the
illustrative embodiment, electronic device includes a drive complexity of the associated application specific integrated
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11 12
circuit (ASIC) containing the electronic drive circuit to yield axis in response to rotation of said MEMS gyroscope,
a lower power consumption and Smaller ASIC design. Fur said second sense motion being translational motion
thermore, the single drive mode design has intrinsically less Such that a second planar Surface of said second sense
damping which can yield high device performance with lower mass remains Substantially parallel to said surface of
requirements on vacuum levels (lower bonding requirement, said Substrate.
no getter, and so forth), therefore simplifying fabrication. The 2. A MEMS gyroscope as claimed in claim 1 wherein said
MEMS gyroscope implements the single drive mode com drive spring system is a first drive spring system, and said
bined with a drive spring system that reduces motion coupling MEMS gyroscope further comprises:
between the functional elements to achieve a robust device a third drive mass configured to be driven in said first drive
that is less susceptible to external perturbations. Furthermore, 10 motion along said first axis;
the MEMS gyroscope has more efficient sense capability a fourth drive mass configured to be driven in said second
which can increase the sensitivity of the device without drive motion along said second axis;
increasing the device size. The MEMS gyroscope also has a second drive spring system interconnecting said second
more efficient sense capability which can increase the sensi drive mass with said third drive mass;
tivity of the device without increasing the device size. 15 a third drive spring system interconnecting said third drive
The foregoing description of specific embodiments reveals mass with said fourth drive mass; and
the general nature of the inventive subject matter sufficiently a fourth drive spring system interconnecting said fourth
so that others can, by applying current knowledge, readily drive mass with said first drive mass.
modify and/or adapt it for various applications without 3. A MEMS gyroscope as claimed in claim 2 wherein:
departing from the general concept. Therefore. Such adapta said first, second, third, and fourth drive masses are uni
tions and modifications are within the meaning and range of formly arranged about a central region; and
equivalents of the disclosed embodiments. The inventive sub said MEMS gyroscope further comprises a drive assembly
ject matter embraces all such alternatives, modifications, configured to impart said first drive motion on said first
equivalents, and variations as fall within the spirit and broad drive mass such that when said first and third drive
Scope of the appended claims. For example, the drive mass 25 masses are driven to move along said first axis toward
and/or sense mass can have different shapes, such as circular said central region, said second and fourth drive masses
rings, disks, rectangles, and the like. In addition, the drive concurrently move along said second axis away from
mass and sense mass may be arranged differently from that said central region.
which is shown. Additionally, drive electrodes may be asso 4. A MEMS gyroscope as claimed in claim 2 further com
ciated with both pairs of drive masses and/or fixed sense 30 prising:
electrodes for yaw angular Velocity sensing may be associ a third sense mass coupled to said third drive mass Such that
ated with both pairs of drive masses. Accordingly, it should be said first drive motion generates said first sense motion
appreciated that the exemplary embodiments are only of said third sense mass along said third axis in response
examples, and are not intended to limit the scope, applicabil to rotation of said MEMS gyroscope;
ity, or configuration of the invention. 35 a fourth sense mass coupled to said fourth drive mass such
What is claimed is: that said second drive motion generates said second
1. A MEMS gyroscope comprising: sense motion of said fourth sense mass along said third
a first drive mass configured to be driven in a first drive axis in response to rotation of said MEMS gyroscope:
motion along a first axis; an anchor System coupled to said Substrate with said first,
a second drive mass configured to be driven in a second 40 second, third, and fourth sense masses being arranged
drive motion alonga secondaxis that is transverse to said around said anchor System; and
first axis, each of said first and secondaxes being parallel compliant members, wherein each of said first, second,
to a surface of a Substrate; third, and fourth sense masses are coupled to said anchor
a drive spring system interconnecting said first drive mass system via said compliant members.
with said second drive mass to couple said first drive 45 5. A MEMS gyroscope as claimed in claim 4 wherein:
motion to said second drive motion, said drive spring first ones of said compliant members are interconnected
system including a first spring element coupled to each between each of said first and third sense masses and
of said first drive mass and said second drive mass, an said anchor system, said first ones of said compliant
anchor element coupled to said Substrate, a second members enabling said first sense motion of said first
spring element interconnected between said first drive 50 and third sense masses in phase opposition; and
mass and said anchorelement, and a third spring element secondones of said compliant members are interconnected
interconnected between said second drive mass and said between each of said second and fourth sense masses
anchor element, wherein said first spring element is and said anchor system, said second ones of said com
directly physically coupled to each of said first and sec pliant members enabling said second sense motion of
ond drive masses without an intervening interconnec 55 said second and fourth sense masses in said phase oppo
tion to either of said second and third spring elements; sition.
a first sense mass coupled to said first drive mass such that 6. A MEMS gyroscope as claimed in claim 1 further com
said first drive motion generates first sense motion of prising multiple beam springs, wherein a first pair of said
said first sense mass along a third axis in response to beam springs interconnects said first sense mass with said
rotation of said MEMS gyroscope, said third axis being 60 first drive mass and a second pair of said beam springs inter
transverse to each of said first and second axes, said first connects said second sense mass with said second drive mass.
sense motion being translational motion Such that a first 7. A MEMS gyroscope as claimed in claim 6 wherein each
planar Surface of said first sense mass remains Substan of said multiple beam springs comprises:
tially parallel to said surface of said substrate; and a first compliant end;
a second sense mass coupled to said second drive mass 65 a second compliant end, each of said first and second
Such that said second drive motion generates second compliant ends being configured to tilt out of a plane
sense motion of said second sense mass along said third perpendicular to said Surface of said Substrate; and
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13 14
a beam section spanning between said first and second interconnected between said second drive mass and said
compliant ends, said beam section being rigid relative to anchor element, wherein said first spring element is
said first and second compliant ends. directly physically coupled to each of said first and Sec
8. A MEMS gyroscope as claimed in claim 6 wherein: ond drive masses without an intervening interconnec
each of said beam springs includes a beam section having tion to either of said second and third spring elements;
a longitudinal axis; a first sense mass;
said beam springs of said first pair of said beam springs are a second sense mass;
located on opposing edges of said first sense mass with a first pair of beam springs coupling said first sense mass to
said longitudinal axis of each said beam section of said said second drive mass Such that said first drive motion
each beam spring of said first pair being aligned with one 10
generates first sense motion of said first sense mass
another, and along a third axis in response to rotation of said MEMS
said beam springs of said second pair of said beam springs gyroscope, said third axis being transverse to each of
are located on opposing edges of said second sense mass
with said longitudinal axis of each said beam section of said first and second axes, said first sense motion being
said each beam spring of said second pair being aligned 15 translational motion Such that a first planar Surface of
with one another. said first sense mass remains Substantially parallel to
9. A MEMS gyroscope as claimed in claim 6 wherein: said Surface of said Substrate; and
said beam springs of said first pair of said beam springs are a second pair of beam springs coupling said second sense
positioned to cooperatively retain said first sense mass in mass to said second drive mass such that such that said
balance at a first center of gravity of said first sense mass; second drive motion generates second sense motion of
and said second sense mass along said third axis in response
said beam springs of said second pair of said beam springs to rotation of said MEMS gyroscope, said second sense
are positioned to cooperatively retain said second sense motion being translational motion Such that a second
mass in balance at a second center of gravity of said planar Surface of said second sense mass remains Sub
second sense mass. 25 stantially parallel to said surface of said Substrate.
10. A MEMS gyroscope as claimed in claim 9 further 13. A MEMS gyroscope as claimed in claim 12 wherein
comprising: each of said beam springs of said first and second pairs of
an anchor system coupled to said Surface of said Substrate; beam springs comprises:
a first compliant member interconnected between said first a first compliant end;
sense mass and said anchor system, wherein said first 30 a second compliant end, each of said first and second
compliant member along with said beam springs of said compliant ends being configured to tilt out of a plane
first pair of said beam springs are positioned to retain perpendicular to said surface of said substrate; and
said first sense mass in said balance at said first center of a beam section spanning between said first and second
gravity; and compliant ends, said beam section being rigid relative to
a second compliant member interconnected between said 35 said first and second compliant ends.
second sense mass and said anchor system, wherein said 14. A MEMS gyroscope as claimed in claim 12 wherein
second compliant member along with said beam springs said beam springs of said first pair of said beam springs are
of said second pair of said beam springs are positioned to positioned to cooperatively retain said first sense mass in
retain said second sense mass in said balance at said balance at a first center of gravity of said first sense mass;
second center of gravity. 40 and
11. A MEMS gyroscope as claimed in claim 1 wherein: said beam springs of said second pair of said beam springs
said first drive motion is configured to generate said first are positioned to cooperatively retain said second sense
sense motion along said third axis in response to rotation mass in balance at a second center of gravity of said
of said MEMS gyroscope about said second axis; second sense mass.
said second drive motion is configured to generate said 45 15. A MEMS gyroscope as claimed in claim 12 wherein
second sense motion along said third axis in response to said drive spring system is a first drive spring system, and said
rotation of said MEMS gyroscope about said first axis; MEMS gyroscope further comprises:
and a third drive mass configured to be driven in said first drive
said first drive motion is configured to generate a third motion along said first axis;
sense motion of one of said first and second sense masses 50 a fourth drive mass configured to be driven in said second
in response to rotation of said MEMS gyroscope about drive motion along said second axis;
said third axis. a second drive spring system interconnecting said second
12. A MEMS gyroscope comprising: drive mass with said third drive mass;
a first drive mass configured to be driven in a first drive a third drive spring system interconnecting said third drive
motion along a first axis; 55 mass with said fourth drive mass; and
a second drive mass configured to be driven in a second a fourth drive spring system interconnecting said fourth
drive motion alonga secondaxis that is transverse to said drive mass with said first drive mass.
first axis, each of said first and secondaxes being parallel 16. A method of forming a MEMS gyroscope comprising:
to a surface of a Substrate; forming a first drive mass and a first sense mass coupled to
a drive spring system interconnecting said first drive mass 60 said first drive mass, said first drive mass configured to
with said second drive mass to couple said first drive be driven in a first drive motion along a first axis;
motion to said second drive motion, said drive spring forming a second drive mass and a second sense mass
system including a first spring element coupled to each coupled to said second drive mass, said second drive
of said first drive mass and said second drive mass, an mass configured to be driven in a second drive motion
anchor element coupled to said Substrate, a second 65 along a second axis that is transverse to said first axis,
spring element interconnected between said first drive said first and second axes being parallel to a surface of a
mass and said anchorelement, and a third spring element Substrate;
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15 16
forming a drive spring system interconnecting said first forming a second drive spring system interconnecting said
drive mass with said second drive mass to couple said second drive mass with said third drive mass;
first drive motion to said second drive motion, said drive forming a third drive spring system interconnecting said
spring system including a first spring element coupled to third drive mass with said fourth drive mass; and
each of said first drive mass and said second drive mass, forming a fourth drive spring system interconnecting said
an anchor element coupled to said substrate, a second fourth drive mass with said first drive mass, wherein:
spring element interconnected between said first drive said first drive motion additionally generates said first
mass and said anchorelement, and a third spring element
interconnected between said second drive mass and said sense motion of said third sense mass along said third
anchor element, wherein said first spring element is 10
axis in response to rotation of said MEMS gyroscope;
directly physically coupled to each of said first and sec and
ond drive masses without an intervening interconnec said second drive motion additionally generates said
tion to either of said second and third spring elements, second sense motion of said fourth sense mass along
wherein: said third axis in response to rotation of said MEMS
said first drive motion generates first sense motion of gyroscope.
said first sense mass along a third axis in response to 18. A method as claimed in claim 17 further comprising:
rotation of said MEMS gyroscope, said third axis uniformly arranging said first, second, third, and fourth
being transverse to each of said first and second axes,
said first sense motion being translational motion drive masses about a central region; and
Such that a first planar Surface of said first sense mass forming a drive assembly configured to impart said first
remains Substantially parallel to said surface of said drive motion on said first drive mass such that when said
Substrate; and first and third drive masses are driven to move along said
said second drive motion generates second sense motion first axis toward said central region, said second and
of said second sense mass along said third axis in fourth drive masses concurrently move along said sec
response to rotation of said MEMS gyroscope, said ond axis away from said central region.
second sense motion being translational motion Such 25 19. A method as claimed in claim 16 wherein:
that a second planar Surface of said second sense mass said first drive motion is configured to generate said first
remains Substantially parallel to said surface of said sense motion along said third axis in response to rotation
substrate.
17. A method as claimed in claim 16 wherein said drive of said MEMS gyroscope about said second axis;
spring system is a first drive spring system, and said method 30
said second drive motion is configured to generate said
further comprises: second sense motion along said third axis in response to
forming a third drive mass and a third sense mass coupled rotation of said MEMS gyroscope about said first axis;
and
to said third drive mass, said third drive mass configured said first drive motion is configured to generate a third
to be driven in said first drive motion along said first axis; sense motion of one of said first and second sense masses
forming a fourth drive mass and a fourth sense mass 35
in response to rotation of said MEMS gyroscope about
coupled to said fourth drive mass, said fourth drive mass said third axis.
configured to be driven in said second drive motion
along said second axis;