MF Series

No.
99MBA091A2
SERIES No. 176
Measuring Microscope
MF series
Measuring Microscope
MF series
User’s Manual
(Hardware Guide)
Read this User’s Manual thoroughly
before operating the instrument. After reading,
retain it close at hand for future reference.
CONVENTIONS USED IN THIS MANUAL
Safety Precautions
To ensure that instruments are operated correctly and safely, Mitutoyo manuals use
various safety symbols (Signal Words and Safety Alert Symbols) to identify and warn
against hazards and potential accidents.
The following signs indicate general warnings:
Indicates an imminently hazardous situation which, if not avoided, will result in serious
injury or death.
DANGER
Indicates a potentially hazardous situation which, if not avoided, could result in serious
injury or death.
WARNING
Indicates a potentially hazardous situation which, if not avoided, may result in minor or
moderate injury or property damage.
CAUTION
The following signs indicate specific warnings or prohibited actions, or indicate a

mandatory action:
Alerts the user to a specific hazardous situation. The given example means “Caution,
risk of electric shock”.
Prohibits a specific action. The given example means “Do not disassemble”.
Specifies a required action. The given example means “Ground”.
No. 99MBA091A i
CONVENTIONS USED IN USER’S MANUAL
Various Types of Notes
The following types of notes are provided to help the operator obtain reliable
measurement data through correct system operation.
IMPORTANT • An important note is a type of note that provides information essential to the completion
of a task. You cannot disregard this note to complete the task.
• An important note is a type of precaution, which if neglected, could result in a loss of
data, decreased accuracy or instrument malfunction/failure.
NOTE A note emphasizes or supplements important points of the main text. A note supplies
information that may only apply in special cases (e.g., Memory limitations, equipment
configurations, or details that apply to specific versions of a program).
TIP A tip is a type of note that helps the user apply the techniques and procedures
described in the text to their specific needs.
It also provides reference information associated with the topic being discussed.
Mitutoyo assumes no liability to any party for any loss or damage, direct or indirect, caused by
use of this instrument not conforming to this manual.
Information in this document is subject to change without notice.
 2009 Mitutoyo Corporation. All rights reserved.
ii No. 99MBA091A
Notes on LED Safety
An LED is integrated into the illuminator in this measuring microscope, MF/MF-U series.
Please observe the following to use the product in a safe manner. Operations other than
described in the manual may result in dangerous radiant exposure.
1) The JIS (JIS C 6802, established in 2005) and the International Standard (IEC60825-1,
established in 2001) are the safety standards for LED devices.
CAUTION 2) The LED device is classified as “Class 1 LED product” in the JIS and IEC standards.
3) Do not look into LED light.
(Never look into LED light even when light is not emitted.)
4) Do not look at laser light directly with an optical instrument (light condensing device
such as a magnifying glass).
5) Skin exposure to LED light causes no problem.
No. 99MBA091A iii

Precautions for Use
● This instrument is a measuring machine.
Do not use this instrument for any purpose other than such measurement.
● This instrument is a precision machine.

Exercise great care when handling this machine. Never bump or apply excessive force
to any of the parts during operation.
● Rectify the installation environments.

(For detailed information, refer to “Installation Environments”.)
• Close to 20°C in ambient temperature.
• Free of extreme humidity.
• Free of dust and dirt.
• Free of vibration.
● Gently fix a workpiece on the stage.

If the stage glass or top face is subject to large impact, it could be damaged. Exercise
sufficient care in fixing a workpiece or a jig.
Particularly, pay attention so as not to apply an impact to the stage glass.
● Turn off the power during connection and maintenance.

To avoid accidents or electric shock due to malfunction of the machine under operation,
be sure to turn off the power before performing connection or maintenance.
● Please do not carry the measurement thing of 18kg or more alone.

Please do not carry the measurement thing to exceed 18kg alone for safety though
the maximum authorized freight mass of the stage is 20kg.
● Power supply
Observe the following precautions regarding the power supply.
• As a rule, the power distribution method should be a single-phase, two wire system
with one wire grounded. (Pay due attention to the polarity.)
• Be sure to ground the system. (Protective grounding) (Class D grounding) * Consult a
qualified electrician or someone with equivalent knowledge for the power supply
arrangement and construction.
● Turn the power switch ON or OFF along the order

The counter may display error messages (E51,E52,E53) by the order which turns the
power supply of the microscope main unit and the peripheral equipment such as
personal computer on or off in the connection with some peripheral equipment, when
the peripheral equipment is being connected with the counter unit at RS232C.
Be sure to perform at the following order, when turning the power switch ON or OFF.
・For ON ･･････ Peripheral equipment → Microscope main unit
・For OFF ･････ Microscope main unit → Peripheral equipment
iv No. 99MBA091A
● Power cord
Use only the power cord supplied with this product. Please contact us if an abnormality
is observed on the power cord or power connector.
● Removing the cover and disassembling the machine

This machine is precisely adjusted, and is comprised of high-voltage parts. In order to
prevent accident and to maintain the performance, do not absolutely remove the cover
on the machine.
● Danger prevention
In order to prevent danger, do not use the machine in locations where volatile gases
could be generated.
● Maintenance
Gently wipe off dirt from the machine using a lint-free and soft cloth. If the dirt is difficult
to remove, wipe it clean with a cloth soaked in neutral detergent, then wipe lightly with
a dry cloth or a cloth well-wrung after soaking in water. Do not use organic solvents
such as thinner or benzine.
● Take special shielding measures when using the machine in the following
locations:
• Where noise is generated due to static electricity
• Near strong electric fields
• Where power source lines pass nearby
• Where there is a risk of radioactivity
• Where the machine could be subject to corrosive gasses
No. 99MBA091A v
Installation Environments
Temperature
This measuring microscope has been assembled and adjusted in the
temperature-controlled room at 20°C. To use the microscope at the rated measuring
accuracy in the specification, the temperature at the installation site should be close to
20°C with minimum temperature fluctuation. (The ideal temperature is standard
temperature condition level 1, 20°C ± 1°C, that is specified as “Standard Condition of
Precision Measurement Environments” in JMAS5011.) Also, the temperature gradient
should be 2°C as reference for 8 hours. If this temperature environment is worse than the
above condition, the microscope may not meet the specified measuring accuracy. Even if
the specified accuracy is temporarily obtained by adjustment, uncertain measurements will
be displayed at 20°C.
Humidity
Humidity is not directly related to the measuring microscope accuracy. If the ambient
humidity is high, rust will easily form on important machined surfaces and may affect
electronic parts adversely. Efforts should be made to retain humidity between 55 and 65%.
Dust and dirt
The measuring microscope consists of high-precision parts such as guide ways, linear
scale units, and optical units that are apt to be easily damaged by dust and dirt. Use the
microscope at a site free of dust and dirt.
Grounding
To operate the measuring microscope properly, be sure to connect the GND terminal to
the earth terminal with a grounding resistance of 100Ω or less (conforming to Class 3
grounding construction). Also, if a system is to be configured along with other instruments,
make sure all the instruments are properly grounded at the power supply with a complete
ground terminal, and then connect the signal cables between them.
System Environments
Place The indoor use
Use altitude 2000m or less
Use temperature 5～40℃
Use humidity 80％or less（There must not be be dewy.）
Preservation environments
Preservation temperature -10～50℃
Preservation humidity 80％or less（There must not be be dewy.）
vi No. 99MBA091A
WARRANTY
This measuring microscope has been manufactured under Mitutoyo’s rigorous quality
control system. In the event that this instrument should fail within one year from the
original date of purchase through normal use, we will repair or replace it at our option, free
of charge, upon its prepaid return to Mitutoyo. Contact your dealer or the nearest Mitutoyo
Service Center.
However, the following failure or damage may be subject to a repair charge even within
the warranty period:
1 Unit failure or damage arising from improper handling, or unauthorized retrofit or

repair by the user.
2 Unit failure or damage as the result of moving, dropping, or transporting after

purchase.
3 Unit failure or damage due to fire, salt, gas, abnormal voltage, or natural catastrophe.
This Warranty is valid only in the country of original purchase.
Notes on Overseas Transfer

This product is controlled by the Export Control Regulations. Please contact Mitutoyo
before transferring it abroad.
Before exporting this product confirm the final purpose of use at the export destination to
prevent the product from being used for developing weapons of mass destruction or
military affairs.
Disposal of Old Electrical & Electronic Equipment

(Applicable in the European Union and other European
countries with separate collection systems)
This symbol on the product or on its packaging indicates that this product shall not be
treated as household waste. To reduce the environmental impact of WEEE (Waste
Electrical and Electronic Equipment) and minimize the volume of WEEE entering
landfills, please reuse and recycle.
For further information, please contact your local dealer or distributors.
No. 99MBA091A vii

CONTENTS
CONVENTIONS USED IN THIS MANUAL........................................................................................................ i
Notes on LED Safety ...................................................................................................................................... iii

Precautions for Use........................................................................................................................................ iv
Installation Environments .............................................................................................................................. vi

System Environments .................................................................................................................................... vi
Preservation environments ........................................................................................................................... vi
WARRANTY .................................................................................................................................................... vii

Notes on Overseas Transfer ......................................................................................................................... vii
Disposal of Old Electrical & Electronic Equipment
(Applicable in the European Union and other European countries with separate collection systems) .. vii
1 Overview ................................................................................................................................................ 1-1
1.1 Outline ............................................................................................................................................ 1-1
1.2 Name and Function of Each Part ................................................................................................. 1-2
1.2.1 Optical tube unit..................................................................................................................... 1-4
1.2.2 Cross-travel stage unit .......................................................................................................... 1-5
1.2.3 Illuminator unit ....................................................................................................................... 1-6
1.2.4 DRO counter unit ................................................................................................................... 1-8
1.2.5 Illuminator unit ..................................................................................................................... 1-15
2 Installation and Setup ........................................................................................................................... 2-1
2.1 Installation...................................................................................................................................... 2-1
2.2 Remove the Fixing Plate ............................................................................................................... 2-2
2.2.1 Removing the fixing plate for cross-travel stage ............................................................... 2-2
2.2.2 Removing the fixing plate for optical tube unit .................................................................. 2-3
2.3 Moving the Table on the Cross-Travel Stage .............................................................................. 2-4
2.3.1 When a great and quick travel of the table is required ...................................................... 2-4
2.3.2 When a fine travel of the table is required........................................................................... 2-4
2.4 Moving the Optical Tube Unit ....................................................................................................... 2-5
2.4.1 When a great and quick travel of the unit is required ........................................................ 2-5
2.4.2 When a fine travel of the unit is required ............................................................................ 2-5
2.5 Leveling the Main Unit .................................................................................................................. 2-6
2.6 Mounting (Replacing) the Eyepiece Unit..................................................................................... 2-7
2.6.1 Mounting the binocular unit.................................................................................................. 2-7
2.6.2 Mounting the monocular unit ............................................................................................... 2-7
2.6.3 Mounting other eyepiece unit (protractor eyepiece) .......................................................... 2-7
2.7 Mounting the Lenses..................................................................................................................... 2-8
2.7.1 Mounting the objective.......................................................................................................... 2-8
2.7.2 Mounting the eyepieces ........................................................................................................ 2-8
2.7.2.1 For the binocular unit..................................................................................................... 2-8
viii No. 99MBA091A

2.7.2.2 For the monocular unit .................................................................................................. 2-8
2.8 Installation of the Illuminators ..................................................................................................... 2-9
2.8.1 For LED illuminator ............................................................................................................... 2-9
2.8.2 For halogen illuminator....................................................................................................... 2-10
2.9 Changing the Counter Mounting Angle and Position...............................................................2-11
2.10 Connecting Each Part ................................................................................................................. 2-12
3 Measurement Setup.............................................................................................................................. 3-1
3.1 Connection Check......................................................................................................................... 3-1
3.2 Turning the Power Supply On ...................................................................................................... 3-1
3.3 Confirming the Filament Position of the Halogen Illuminator .................................................. 3-2
3.3.1 Confirming the filament position of the halogen vertical reflected illuminator .............. 3-2
3.3.2 Confirming the filament position of the halogen transmitted illuminator ....................... 3-2
3.4 Adjusting the Aperture for Transmitted Illumination................................................................. 3-3
3.5 Adjusting the Aperture for Reflected Illumination ..................................................................... 3-5
3.6 Setting Up a Workpiece ................................................................................................................ 3-6
3.7 Selecting the Illumination Method............................................................................................... 3-8
3.7.1 Transmitted illumination ....................................................................................................... 3-8
3.7.2 Vertical reflected illumination............................................................................................... 3-8
3.7.3 Simultaneous use of transmitted and vertical reflected illumination .............................. 3-8
3.7.4 Oblique reflected illumination（Optional oblique reflected illuminator is required） ... 3-9
3.8 Selecting a Filter.......................................................................................................................... 3-10
3.9 Adjusting the Pupil Distance （The case in which the binocular unit is mounted）...........3-11
3.10 Adjusting the Diopter of Eyepiece............................................................................................. 3-12
3.11 Replacing the Reticle .................................................................................................................. 3-12
3.12 Dimensional Measurement......................................................................................................... 3-13
4 Maintenance .......................................................................................................................................... 4-1
4.1 Cleaning External Parts ................................................................................................................ 4-1
4.2 Maintaining the Lens..................................................................................................................... 4-1
4.3 Replacing Consumables............................................................................................................... 4-2
4.3.1 Replacing halogen bulbs ...................................................................................................... 4-2
4.3.2 LED illuminator replacement ................................................................................................ 4-4
4.3.3 Replacing the stage glass..................................................................................................... 4-5
4.3.4 Replacement of conston spring........................................................................................... 4-6
5 Troubleshooting.................................................................................................................................... 5-1
5.1 Main Unit ........................................................................................................................................ 5-1
5.2 Counter Unit................................................................................................................................... 5-2
5.3 Illuminator and Concerned Matters............................................................................................. 5-3
5.4 Error Messages and Remedies.................................................................................................... 5-4
5.4.1 Counter and concerned matters .......................................................................................... 5-4
5.4.2 Illuminator and concerned matters...................................................................................... 5-5
6 Specifications........................................................................................................................................ 6-1
No. 99MBA091A ix
6.1 Common Specifications................................................................................................................ 6-1
6.2 Standard accessories.................................................................................................................... 6-2
6.2.1 Standard accessories for measuring microscope main unit ............................................ 6-2
6.2.2 Standard accessories for illuminator................................................................................... 6-2
6.3 List of Consumable ....................................................................................................................... 6-3
6.4 Optional accessories .................................................................................................................... 6-4
6.5 Objectives, Eyepieces Specification Table ................................................................................. 6-5
6.6 Layout of the Optical System ....................................................................................................... 6-6
6.7 Serial Data Output Specifications of the Counter ...................................................................... 6-7
6.7.1 Connector specifications ...................................................................................................... 6-7
6.7.2 Control signal ......................................................................................................................... 6-7
6.7.3 Data output operation............................................................................................................ 6-9
6.7.4 Connecting Micropak........................................................................................................... 6-11
6.7.5 Connecting DPU-414 (Printer) ............................................................................................ 6-12
6.7.6 Connecting QM-Data 200..................................................................................................... 6-14
6.8 External Dimensions ................................................................................................................... 6-15
6.8.1 Main unit ............................................................................................................................... 6-15
6.8.2 Control unit........................................................................................................................... 6-18
6.8.3 Cross-travel stage................................................................................................................ 6-19
SERVICE NETWORK
x No. 99MBA091A
1
1 Overview
This chapter describes the system configuration, and the name and
function of each part on the MF series Measuring Microscope.
1.1 Outline
The Mitutoyo MF series Measuring Microscope is a multi-purpose measuring microscope
for factory inspection use. It can perform precision measurement of workpiece dimensions,
contours and surface features. The MF series can be used in a wide range of applications
in combination with a variety of accessories. It is possible to improve the system according
to a specific purpose.
The MF series has the following features.
z Twisted roller is incorporated in the quick release mechanism. It allows smooth

operation and eliminates the impact when switching coarse / fine feed.
z The cross-travel stage with a maximum stroke of 400 X 200mm is available as an
option.
z Both right and left side of the optical tube unit is equipped with the coaxial fine / feed
focusing wheels. This makes focusing operation easy.
z High-resolution measurement is supported using the counter with a resolution of
0.1µm (selectable from 0.1/0.5/1µm).
z Select either the LED type or halogen type for the illuminator.
(Either of the illuminators is a requisite selection option.)
z The LED illuminator has a long operating life (approx. 30,000 hours) and provides
clear object views because lighting adjustment of the LED illuminator does not create
any change in color temperature.
NOTE To use the measuring microscope safely, read "Safety Precautions" in this
manual prior to use and observe the precautions.
No. 99MBA091A 1-1

1.2 Name and Function of Each Part
（3）Reflected illumination
aperture diaphragm knob
（Eyepiece）
（4）Reflected illumination
switching knob
（6）Coarse/fine focusing wheel
（18）Swivel clamp screw
（23）DRO counter
（12）X-axis coarse-feed wheel
（13）X-axis
zero-set switch
（17）Swivel knob
（16）Y-axis
zero-set switch
（11）X-axis fine feed wheel
（14）Y-axis fine feed wheel （19）Control panel
1-2 No. 99MBA091A

1. Overview
(24) LED control unit

or
(25) Halogen control unit
(Requisite selection option)
（Column）
（20）Vertical reflected illuminator

(Requisite selection option)
* This illustration represents
an LED illuminator.
（8）Z-axis zero-set switch
（5）Reticle
（7）TV port
（2）Binocular or monocular unit

（both are optional）
（Spare hole for

mounting the
（1）Objective counter）
（21）Transmitted
illumination device
(Requisite selection
option)
* This illustration
represents an LED
illuminator.
（15）Y-axis
coarse-feed wheel
（9）Cross-travel stage （10）Linear scale （22）Rear connector panel
No. 99MBA091A 1-3

1.2.1 Optical tube unit
1） Objective：A 3X lens is mounted as standard. Various types of lenses ranging from
1X to 100X are also available as options. Selects according to the application.
2） Binocular or monocular unit (both are optional)：A 10x eyepiece is mounted on

both units. A relay lens system is used in which a broken cross-hair reticle is installed
in optical tube. The cross-hair in the tube is not shifted even by the pupil distance
adjustment when using the binocular unit.
3） Reflected illumination aperture diaphragm knob：Adjusts the numerical aperture

of the illumination system by pulling or pushing the knob.
TIP What is Aperture diaphragm?･････A diaphragm for controlling the light beam of
an illumination system. The resolution, contrast, and depth of focus of an optical
system are dependent on this aperture diaphragm. Adjust the diaphragm to the
appropriate numerical aperture.
NOTE For information about adjusting the aperture diaphragm, refer to the instructions
given in "3.5 Adjusting the aperture for reflected illumination".
4） Reflected illumination switching knob：Switches the optical path from one of the
following sources ; the vertical reflected illuminator and the oblique illuminator
(option order No.176-351-6)
5） Reticle：Loosen the cross recessed truss-head screws and remove the cover. You
will see the broken cross-hair reticle with the standard line width of 5µm is mounted
inside.
6） Coarse/fine focusing wheel：This focusing wheel allows coarse or fine vertical
travels of the optical tube for focusing. The travel range and adjustments are given
below.
・Vertical travel range：150 mm（for MF-＊505C，MF-＊1010C and MF-＊2010C）
220 mm（for MF-＊2017C，MF-＊3017C and MF-＊4020C）
・Coarse adjustment：30 mm per knob rotation
・Fine adjustment：0.2 mm per knob rotation
7） TV port：Used for mounting optional accessories (e.g. TV camera or Focus Pilot).
8） Z-axis zero-set switch（only for three axes specification）
：A switch for zero-setting
a Z-axis display value on the counter.
IMPORTANT 1. When operating this switch, do not touch it with wet hand. A trouble may result.
This is true for the X-axis and Y-axis zero-set switches.
2. A magnet is attached to the bottom surface of the Z-axis zero-set switch. It is
possible to remount the switch with a single touch on a location where the
switch can be operated easily.
TIP A magnet is attached to the bottom surface of the Z-axis zero-set switch. Therefore,
the switch can be moved to an operator-friendly position with a single motion.
1-4 No. 99MBA091A

1. Overview
1.2.2 Cross-travel stage unit
IMPORTANT The stage glass is made of glass to transmit the transmitted illumination light.
Do not bump the stage glass when installing a workpiece on it. If placing a heavy
workpiece with protrusions on the stage glass, exercise attention so as not to
scratch the glass.
9） Cross-travel stage ： Mounts a workpiece on the XY stage; its stroke varies

depending on the MF model.
・MF-＊505C 50mmX 50mm
・MF-＊1010C 100mmX100mm
・MF-＊2010C 200mmX100mm
・MF-＊2017C 200mmX170mm（with swivel table）
TIP The MF-＊505C，MF-＊1010C，and MF-＊2010C models have no table rotating

mechanism on the cross-travel stage. If necessary, use the fine-feed rotary table
(A) (No.176-305) from the optional accessories. The fine-feed rotary table (B)
(No.176-306) is also available as an option accessory for the MF-＊2017C，MF-＊
3017C，and MF-＊4020C models.
10） Linear scale：Three pieces of Linear scale are mounted on each of the X- and
Y-axes of the XY stage and the Z-axis column.（The Linear scale may not be
mounted on the Z axis of some models.） The displacement of the stage and optical
tube unit is displayed on the DRO counter.
11） X-axis fine feed wheel：Used to finely move the cross-travel stage along the X-axis
direction.
12） X-axis coarse-feed wheel：Used to quickly move the cross-travel stage along the
X-axis direction.
13） X-axis zero-set switch：A switch for zero-setting a X-axis display value on the
counter.
14） Y-axis fine feed wheel：Used to finely move the cross-travel stage along the Y-axis
direction.
15） Y-axis coarse-feed wheel：Used to quickly move the cross-travel stage along the
Y-axis direction.
16） Y-axis zero-set switch：A switch for zero-setting a Y-axis display value on the
counter.
17） Swivel knob（for MF-＊2017C，MF-＊3017C and MF-＊4020C）：Used to swivel the

XY stage up to ±5° or ±3° .（This knob is not provided for the MF-＊505C，MF-
＊1010C and MF-＊2010C models.）
No. 99MBA091A 1-5

18） Swivel clamp screw（for MF-＊2017C，MF-＊3017C and MF-＊4020C）：Used to
fix the XY stage up swiveled. （This screw is not provided for the MF-＊505C，MF-
＊1010C and MF-＊2010C models.）
NOTE 1. Do not turn the swivel knob by force with the swivel clam screw tightened up.
A trouble may result.
2. If a workpiece and optional accessories are interfered with the swivel clamp
screw, replace the swivel clamp screw with the button head screw which is
the attachment.
1.2.3 Illuminator unit

19） Control panel: Consists of the switch to start the main unit and the knobs to control
illumination and the aperture of transmitted illumination.
Aperture diaphragm knob for transmitted illumination Auxiliary power switch
Transmitted illumination knob Vertical reflected illumination knob
TIP Aperture diaphragm: A pencil of rays in the light system is controlled, which is
associated with the resolving power, contrast, and focal depth of the optical
system. Adjust the diaphragm to the optimal numerical aperture.
NOTE 1. For information about adjusting the aperture diaphragm, refer to the
instructions given in "3.4 Adjusting the aperture for transmitted illumination".
2. Even when the auxiliary power switch is turned off, feeble power is
consumed.
If you do not use the product for a long time, please turn off the main power
of the control unit.
20） Vertical reflected illuminator (requisite selection option): Lighting device for
measurement of workpiece surface. According to your choice, either the LED
illuminator or halogen illuminator is placed.
・ For the LED illuminator, plug into the connector that indicates “SURFACE” on
the rear panel. Two filters can be attached to the illuminator.
1-6 No. 99MBA091A

1. Overview
・ For the halogen illuminator, plug into the connector that indicates “SURFACE”
of the illuminator (control unit). Two filters can be attached to the illuminator.
21） Transmitted illuminator (requisite selection option): Lighting device for

measurement of workpiece contour. According to your choice, either the LED
illuminator or halogen illuminator is placed.
・ For the LED illuminator, plug into the connector that indicates “CONTOUR” on
the rear panel. Two filters can be attached to the illuminator.
・ For the halogen illuminator, plug into the connector that indicates “CONTOUR”
of the illuminator (control unit). Two filters can be attached to the illuminator.
NOTE 1. For information about replacing halogen bulbs, refer to the instructions given
in "4.3.1 Replacing halogen bulbs".
2. For information about replacing LED bulbs, refer to the instructions given in
"4.3.2 Replacing LED bulbs".
22） Rear panel: Consists of the connectors to be connected to the control unit,
transmitted illuminator, and reflected illuminator.
b) Connector for vertical reflected c) Connector for transmitted a) Connector for control cable
illuminator (LED) illuminator (LED)
ａ）Connector for control cable

This connector is used to connect this unit and the cable connected to the control unit.
ｂ）Connector for vertical reflected illuminator (LED)

This connector is used to connect an LED type vertical reflected illuminator. (To
connect a halogen type vertical reflected illuminator, this connector is not used.)
ｃ）Connector for transmitted illuminator (LED)

This connector is used to connect an LED type transmitted illuminator. (To connect a
halogen type transmitted illuminator, this connector is not used.)
No. 99MBA091A 1-7

1.2.4 DRO counter unit
23） Counter ： The displacement of cross-travel stage and optical tube unit is displayed
on this counter.
①Front view of the counter
a）Display unit c）mm/E indicator LEDs
b）Zero-set button
ａ）Display unit
Displays the displacement of cross-travel stage and optical tube.
Resolution: 0.001/0.0005/0.0001mm (.0001/.00005/.00001”)（switchable）
ｂ）Zero-set button
Zeroes the display value at any position.
Pressing the button makes the buzzer sound.
ｃ）mm/E or indicator LEDs
Indicates the unit (mm or E) currently used.
A value in units of E is displayed by dividing a displacement in units of mm by 25.4.
1-8 No. 99MBA091A

1. Overview
②Rear view of the counter
ｄ) Serial output ｅ) Serial output ｆ )External illuminator ｇ) External load

connector（1） connector（2） connector connector
ｄ）Serial output connector（1）
Connects to data processing devices such as the vision unit or QM-Data200
ｅ）Serial output connector（2）
Connects to Vision unit
ｆ）External illumination connector
This connector is used to connect an external lighting source from the optional
accessories (LED ring illuminator/twin fiber illuminator/ring fiber illuminator).
ｇ）External load connector
Connects to external load switch
No. 99MBA091A 1-9

About parameters
To actually perform measurement, it is necessary to set up the count direction (count-up or

count-down direction), resolution, etc. This subsection describes the function and setting
procedure of each parameter.
（１）Function
Some parameters are effective for all axes and other parameters are necessary to be set
for each axis. All axes is described for the parameters that are effective for all axes and
Individual axis is described for the parameters to be set for each axis, respectively, in
the Setting column of the following table.
No. Parameter function Setting
Ｆ０１ Display unit [mm/E (inch)] setup All axes
Each time the Y-axis zero-set button on the
counter is pressed, the count unit display
LED [mm] or [E] is selected (lit) alternately.
Ｆ０２－１ Count direction of X-axis (count-up or Individual axis
count-down direction) setup Each time the Y-axis zero-set button on the
Ｆ０２－２ Count direction of Y-axis (count-up or counter is pressed, the display of [UP] or
count-down direction) setup [dn] is selected (displayed) alternately and
Ｆ０２－３ Count direction of Z-axis (count-up or the count direction is switched.
count-down direction) setup
Ｆ０３ Resolution setup All axes
０.１：Minimum readout of 0.1µm/0.00001”
０.５：Minimum readout of 0.5µm/0.00005”
１.０：Minimum readout of 1µm/0.0001”
Ｆ０５ Setup for the number of smoothing All axes
times １：One time of sampling
(Smoothing: Function to decrease the ８：8 times of sampling
flicker of the counter by averaging １６：16 times of sampling
detected values which is done
３２：32 times of sampling
sampling, if it is difficult to read the least
significant digit due to the flicker caused
by vibration of the installation site.)
NOTE No. F05 parameter has no function to keep measuring accuracy if vibration
occurred in the microscope installation site. It is able to decrease the flicker of
counter; however, the measuring accuracy of microscope fails according to the
volume of vibration in the installation site.
1-10 No. 99MBA091A

1. Overview
No. Parameter function Setting

Ｆ０７－１ RS-232C communication condition setup １２００ｂＰＳ： 1200 bps
[Baud rate] ２４００ｂＰＳ： 2400 bps
４８００ｂＰＳ： 4800 bps
９６００ｂＰＳ： 9600 bps
１９２００ｂＰＳ： 19200 bps
Ｆ０７－２ RS-232C communication condition setup ７ｂ：7 bits
[Data length] ８ｂ：8 bits
Ｆ０７－３ RS-232C communication condition setup ｎｏｎ：None
[Parity] Ｅｎ：Even
ｏｄｄ：Odd
Ｆ０７－４ RS-232C communication condition setup １ｂ：1 bit
[Stop bit] ２ｂ：2 bits
Ｆ０７－５ RS-232C communication condition setup ｏｎ：(Xon/Xoff) enabled
[Flow control (Xon/Xoff)] ＯＦＦ：(Xon/Xoff) disabled
Ｆ０８ Setup for the number of output axes ２ＡＳ：２axes
(Sets the serial output to either two-axis of ３ＡＳ：３axes
X and Y or three-axis of X, Y, and Z,
when the counter is three axes
specification.)
Ｆ０９ RS-232C output format setup １：Standard use
(Sets RS-232C data to the output format ２：Special use
of Mitutoyo Vision unit or QM-Data200)
Ｆ１０ Setup for the illumination energy saving 0：None
function 10：Automatically turn off the light 10
※Refer to NOTICE 2 minutes later
(Automatically turn off the illumination 30：Automatically turn off the light 30
while not operating the microscope.) minutes later
Ｆ１１ Setup for the volume of zero-set button 0：None
(Pressing the zero-set button makes the 1：Volume level 1（minimum）
buzzer sound.） 2：Volume level 2
3：Volume level 3
4：Volume level 4
5：Volume level 5（maximum）
NOTE １. Use the setting "1" at No. F09 parameter. The setting "2" is the special use.
２. Use No. F10 parameter with the setting “0”. This function works only when
the Vision Unit (option) is equipped. It does not work for the microscope
which is not equipped with the Vision Unit.
No. 99MBA091A 1-11

（２）Parameter setting procedure
Parameter starting and exiting procedure
Parameter display
Ｘ zero-set button
（X-axis display unit）
Parameter display
（Y-axis display unit）Ｙ zero-set button
Parameter Button
Counter display Operating procedure
setup example operation
①Starting the Ｘ＋Ｙ Turn on the power switch of
parameter setup microscope main unit while
＋ pressing the X-axis and Y-axis
mode
Power zero-set buttons at the same
switch time.
②Switching ＸＦ０１→Ｆ０２－１→・・・・ Each time the X-axis zero-set
parameters Ｆ１１→Ｆ０１→・・・・ button is pressed, the parameter
display changes to the next in
incremental order.
The parameters are looped.
③Switching Ｙ０.１→０.５→１.０→０.１・・・ Each time the Y-axis zero-set
parameter （For a resolution） button is pressed, the parameter
setting changes to the next. The
settings
parameter settings are looped.
④Exiting the Ｘ＋Ｙ Keep pressing the X-axis and
parameter setup Y-axis zero-set buttons at the
mode（Loading same time for more than 3
the set content） seconds.
1-12 No. 99MBA091A

1. Overview
（３）Parameter setting operation examples
Parameter Button
Setting the Ｘ 1.Press the X-axis zero-set
display unit button to select parameter
Ｙ
(Select “mm”) [F01].
2.Press the Y-axis zero-set
button to select [mm].
Setting the count Ｘ 1.Press the X-axis zero-set
direction button to select parameter
Ｙ
(Reverse the [F02-1].
count direction 2.Press the Y-axis zero-set
of X-axis) button to select the setting
(here [dn]) unlike the present
setting (here [UP]).

Ｙ
of Y-axis) button to select the setting
(here [UP]) unlike the present
setting (here [dn]).

Ｙ
of Z-axis) button to select the setting
(here [UP]) unlike the present
setting (here [dn]).
Setting a Ｘ 1.Press the X-axis zero-set

Resolution button to select parameter
Ｙ
(Select “0.1µm”) [F03].
2.Press the Y-axis zero-set
button to select [0.1].
No. 99MBA091A 1-13

Parameter Button
number of button to select parameter
smoothing times Ｙ
[F05].
(Select 8 times of
smoothing) 2.Press the Y-axis zero-set
button to select [8].
RS-232C button to select parameter
Communication Ｙ
[F07-1].
condition
(Select a baud 2.Press the Y-axis zero-set
rate of 9600bps) button to select [9600 bPS].
Ｙ
Communication [F07-2].
condition 2.Press the Y-axis zero-set
(Select a data button to select [7 b].
length of 7 bits)
Ｙ
communication [F07-3].
condition (Select 2.Press the Y-axis zero-set
the even parity) button to select [En].
Ｙ
one stop bit) button to select [1 b].
Ｙ
the flow control button to select [on].
of enabled
Xon/Xoff)
number of button to select parameter
Ｙ
output axes [F08].
(Select 3 axes) 2.Press the Y-axis zero-set
button to select [3 AS].
1-14 No. 99MBA091A

1. Overview
1.2.5 Illuminator unit

24） LED control unit: Controls the lighting of the LED illuminator.
25） Halogen control unit: Controls the lighting of the halogen illuminator.
① Front panel of control unit (common to LED/halogen
a) Main power switch
ａ）Main power switch
This switch is used to supply power to the whole system.
NOTE To shut off the power completely, turn off the main power switch.
② Rear panel of control unit

○ LED control unit
f) USB connector
c) DIN connector 1 for

external light
b) AC inlet
e) Connector for control
d) DIN connector 2 for external light cable
No. 99MBA091A 1-15

○ Halogen control unit
f) USB connector
g) Connector for vertical
reflected illuminator
(halogen)
c) DIN connector 1
for external light
h) Connector for
transmitted illuminator
(halogen)
b) AC inlet
d) DIN connector 2 for e) Connector for control
external light cable
ｂ）AC inlet
Connect the power cord.
ｃ）DIN connector 1 for external light
This connector is not used.
ｄ）DIN connector 2 for external light
ｅ）Connector for control cable
This connector is used to connect this unit and the cable connected to the control
unit.
ｆ）USB connector
ｇ）Connector for vertical reflected illuminator (halogen)
This connector is used to connect a halogen type transmitted illuminator.
ｈ）Connector for transmitted illuminator (halogen)
This connector is used to connect a halogen type transmitted illuminator.
1-16 No. 99MBA091A

2
2 Installation and Setup
This chapter describes the installation environments and connection
method of the MF series Measuring Microscope.
2.1 Installation
Although the weight varies depending on the models, this machine is quite heavy (approx.
65.5～140kg). Mitutoyo handles and sets up the machine, because it is necessary to
confirm and adjust the accuracy after installation.
NOTE On the Reinstallation･････The microscope main unit reinstallation performed on

the client's own may deteriorate the required accuracy due to vibrations and
shocks during transportation. Therefore, it is recommended that the main unit be
reinstalled by Mitutoyo. If the system is desired to be reinstalled, be sure to
contact the Mitutoyo sales office.
No. 99MBA091A 2-1

2.2 Remove the Fixing Plate
Remove the fixing plates for cross-travel stage and optical tube unit after installing the
main unit.
2.2.1 Removing the fixing plate for cross-travel stage

Remove eight pieces of fixing plate (one piece for MF-＊505C, MF-＊1010C, and MF-＊
2010C) from the XY stage.(Use a 3mm Allen wrench.)
① For MF-＊2017C, MF-＊3017C, and MF-＊4020C
Fixing plate Fixing plate

(same numbers in the opposite side) (same numbers in the opposite side)
② For MF-＊505C, MF-＊1010C, and MF-＊2010C
Fixing plate
2-2 No. 99MBA091A

2. Installation and setup
2.2.2 Removing the fixing plate for optical tube unit

Remove a fixing plate from the optical tube unit. (Use a 3mm Allen wrench.)
Fixing plate
No. 99MBA091A 2-3

2.3 Moving the Table on the Cross-Travel Stage
Check the operation of the table and optical tube unit (see the next section) according to
the following procedure. Moving the table and optical tube unit is the basic operation for
performing measurement. Sufficiently understand the operation of these units and
familiarize yourself with it.
2.3.1 When a great and quick travel of the table is required

This operation is required to roughly position a work piece or quickly escape it.
①Turn the coarse-feed wheel clockwise when viewed from the fine-feed wheel side to
unlock the table.
②Hold the coarse-feed wheel until the table moves to the required position.
③Turn the wheel counterclockwise to lock the table.
Lock
Unlock
Fine-feed wheel
Unlock
Lock
Coarse-feed wheel Fine-feed wheel
IMPORTANT When moving the table, do not make the impact on the stopper of stroke end. If
the stroke end stopper is hit, the accuracy may decrease.
2.3.2 When a fine travel of the table is required

Turn the fine-feed wheel until the table moves to the required position. The table moves
1mm per full rotation of the wheel.
This operation is necessary for final positioning of a work piece.
IMPORTANT When reached the stroke end, do not turn the fine-feed wheel any more. Turning
the wheel by force may prevent the smooth operation.
2-4 No. 99MBA091A

2.4 Moving the Optical Tube Unit

2.4.1 When a great and quick travel of the unit is required
Turn the coarse-feed wheel with a large diameter until the optical tube unit moves to the
required height. The unit moves 30mm per full rotation of the wheel. This operation is
required to roughly focus the optical tube or quickly escape it.
2.4.2 When a fine travel of the unit is required

Turn the fine-feed wheel with a small diameter until the optical tube unit moves to the
required height. The unit moves 0.2mm per full rotation of the wheel. This operation is
necessary for final focusing of the optical tube.
Coarse-feed wheel
Fine-feed wheel
NOTE 1. Exercise sufficient care when the optical tube unit descends so as not to hit a
work piece by lens or the optical tube unit.
2. Do not turn both coarse-feed wheels simultaneously in the reverse direction.
3. Do not turn the wheels any more when the tube unit has reached either stroke
end.
There is a risk of damage to the internal feed mechanism in either case of
above-mentioned 2 and 3.
No. 99MBA091A 2-5

2.5 Leveling the Main Unit
To level the main unit, perform the following procedure:
① Place the main unit on the dedicated table.
TIP Use a mounting stand（No.176-309）or a rigid stable stand.

If any annoying image waving is caused under high-magnification observation,
use the vibration isolating stand (No.176-308).
② Turn five leveling screws (two pieces on both sides of the front bottom, two pieces on
both sides of the rear bottom, one piece on rear center) to the direction that they are
tightened up using a screwdriver, etc.. Especially tighten the two pieces on both sides of
the rear bottom almost fully so that they may not interfere with the installation surface.
③ Place a level on the stage glass to level the main unit by three leveling screws (front two
pieces, rear center one piece).
④ After leveling, turn the right and left screws of rear side until they touch the dedicated
table slightly.
Leveling screws of
front two pieces
Leveling screws of
rear center one piece
Level
Leveling screws
2-6 No. 99MBA091A
2.6 Mounting (Replacing) the Eyepiece Unit

Mount the eyepiece unit (a generic name for binocular or monocular unit, protractor
eyepiece, etc.) selected from the optional accessories on the optical tube unit according to
the following procedure:
2.6.1 Mounting the binocular unit

① Loosen the optical tube clamp screw while holding the eyepiece unit by hand, then
dismount the eyepiece unit.
(This procedure is not required when setting up the main unit due the eyepiece unit is
not mounted.)
② Loosen the optical tube clamp screw sufficiently to mount the binocular unit.
③ Mount the binocular unit on the optical tube unit, then tighten the optical tube clamp
screw to secure the binocular unit.
Binocular unit
Optical tube clamp screw
NOTE When attaching or detaching the eyepiece unit, be sure to tighten or loosen the
clamp screw while holding the unit by hand.
If not, the unit may drop, possibly damaging the instrument, or a work piece.
2.6.2 Mounting the monocular unit

① Loosen the optical tube clamp screw while holding the eyepiece unit by hand, then
dismount the eyepiece unit.
(This procedure is not required when setting up the main unit due the eyepiece unit is
not mounted.)
② Loosen the optical tube clamp screw sufficiently to mount the monocular unit.
③ Mount the monocular unit on the optical tube unit, then tighten the optical tube clamp
screw to secure the monocular unit.
2.6.3 Mounting other eyepiece unit (protractor eyepiece)

Mount the eyepiece unit following the same procedure as that for mounting the monocular
unit.
No. 99MBA091A 2-7

2.7 Mounting the Lenses
Mount the objective and eyepieces according to the following procedure:
2.7.1 Mounting the objective

① Turn the coarse/fine focusing wheel to move the optical tube unit to a position where
the objective can be easily mounted.
② Turn the objective clockwise (as viewed from the bottom) to fix it to the objective
mount.
2.7.2 Mounting the eyepieces

2.7.2.1 For the binocular unit
Remove the cap from the eyepiece mount to mount the eyepieces.
Coarse/fine
focusing wheel
Eyepiece
Eyepiece mount
Objective
Loosen Tighten
2.7.2.2 For the monocular unit
① Remove the cap from the eyepiece mount to loosen the eyepiece clamp screw.
② Insert the eyepiece and fix it by the clamp screw.
TIP Some optional eyepieces are supplied with a monocular optical tube (such as
Protractor eyepiece, etc.). In this case, loosen the monocular tube clamp screw to
remove the standard monocular tube and mount the optional eyepiece.
IMPORTANT 1. Do not touch the lens surface with fingers.

2. Be careful not to drop the lens.
2-8 No. 99MBA091A

2.8 Installation of the Illuminators

Insert a transmitted illuminator and a vertical reflected illuminator into their respective
mounts in the main unit to fix them with clamp screws according to the following figure.
Set the cables so as not to touch the illuminators.
2.8.1 For LED illuminator
Vertical reflected illuminator
Transmitted illuminator
Connector for vertical Connector for

reflected illuminator transmitted illuminator
IMPORTANT 1. Do not turn on the light when the transmitted illuminator and vertical reflected
illuminator are removed from the main unit. After turning on the illuminator, it
becomes very hot. Do not illuminate upward, otherwise the cable will be
deformed by the heat.
2. Do not place anything on the illuminator ant its peripheral part. The efficiency
of the air-cooling fan decreases and a trouble will result.
No. 99MBA091A 2-9

2.8.2 For halogen illuminator
Vertical reflected illuminator
Transmitted illuminator Connector for vertical Connector for

reflected illuminator transmitted illuminator
IMPORTANT 1. Do not turn on the light when the transmitted illuminator and vertical reflected
illuminator are removed from the main unit. After turning on the illuminator, it
becomes very hot. Do not illuminate upward, otherwise the cable will be
deformed by the heat.
2. Do not place anything on the illuminator ant its peripheral part. The efficiency
of the air-cooling fan decreases and a trouble will result.
2-10 No. 99MBA091A

2.9 Changing the Counter Mounting Angle and Position

This measuring microscope is packed with the counter mounted on the left side of the
column as shown in the figure in "1.2 Name and Function of Each Part".
The counter rotates vertically in order to remove the adverse condition such that the
counter display is difficult to view or the keys are not easy to operate. Loosen the clamp
screw on the flange located between the counter and the column, rotate the counter to a
desired angle, and then tighten the clamp screw.
Clamp screw
Also, the counter of this microscope is able to be mounted on the right side of the column
to meet the client's needs for operability. If the client needs to change the counter
mounting position to the right side of the column, contact the nearest Mitutoyo sales office.
No. 99MBA091A 2-11

2.10 Connecting Each Part
Connect the cables of each part according to the following figure:
① Connect the microscope main unit and control unit with the control cable.
② Plug the power cord into the control unit, then plug the power plug into the power
outlet.
Control cable
Power plug
(to the power outlet)
2-12 No. 99MBA091A

3
3 Measurement Setup
This chapter explains the setup for measurement including the
optical system installation and workpiece set-up.
3.1 Connection Check

Check that all connecting cables have been connected properly as specified.
3.2 Turning the Power Supply On

Turn the power supply on according to the following procedure:
① Before turning the power switch on, turn the transmitted and vertical reflected illumination
knobs on the control panel fully counterclockwise to minimize the light intensity.
② Turn on the power switch of control unit.（Switch to ”Ｉ” position ）
③ Turn the transmitted and vertical reflected illumination knobs clockwise to confirm that
both illuminators light up.
④ Turn the transmitted and vertical reflected illumination knobs clockwise to confirm that
both illuminators light up.
Main power switch Vertical reflected illumination

Transmitted illumination knob Auxiliary power switch
knob
Control unit Control panel
IMPORTANT The counter may display error messages (E51, E52, E53) due to the procedure for
turning ON/OFF the power supply of the microscope main unit and the peripheral
equipment such as PC in the connection with some peripheral equipment when
the peripheral equipment is being connected with the counter unit at RS232C.
Be sure to perform at the following order when turning the power switch ON/OFF
・For ON ･････ Peripheral equipment → Microscope main unit
・For OFF ･････ Microscope main unit → Peripheral equipment
No. 99MBA091A 3-1

3.3 Confirming the Filament Position of the Halogen
Illuminator
No centering a bulb is needed after replacing it. Confirm that the bulb is installed to the
socket correctly.
(For information about replacing the bulb, refer to 4.3.1 “Replacing halogen bulbs”)
3.3.1 Confirming the filament position of the halogen vertical reflected illuminator
① Mount a low-magnification objective.
② Place a white paper on the stage.
③ Turn the light on by turning the vertical reflected illumination knob.
④ Bring the eyepiece into focus
⑤ Confirm that the illumination on the white paper is circle.
⑥ If the illuminated circle is not round or uniform intensity, the bulb is not installed
correctly. Turn the power switch off, and insert the bulb all the way until it reaches the
end of the socket after the bulb becomes cool.
White paper
Illuminated circle
3.3.2 Confirming the filament position of the halogen transmitted illuminator

① Mount a low-magnification objective.
② Turn the light on by turning the transmitted illumination knob.
③ Fully open the aperture diaphragm for transmitted illumination.
④ Remove the eyepiece to look into the objective from the optical tube.
⑤ Confirm that the illumination projected on the objective is circle.
⑥ If the illuminated circle is not round or uniform intensity, the bulb is not installed
correctly. Turn the power switch off, and insert the bulb all the way until it reaches the
end of the socket after the bulb becomes cool.
Right after the light is turned off, the bulb and its peripheral part are very hot.
When cool enough to handle, replace the bulb carefully. (Wait for about 30 minutes
as a guide.)
CAUTION
3-2 No. 99MBA091A

3. Measurement setup
3.4 Adjusting the Aperture for Transmitted Illumination

The aperture diaphragm for transmitted illumination is used to adjust the Numerical
Aperture (N.A) of transmitted illumination system. It controls the resolution, contrast, and
depth of focus of the optical system.
Aperture diaphragm knob for transmitted illumination
The diaphragm blades can be seen by removing the eyepiece and looking into the optical
tube with an appropriate light intensity. Adjust the required aperture.
Exit pupil of objective
Aperture setting for obtaining a

good contrast and image clarity
for ordinary applications:
Aperture diaphragm blades
70 to 80％ of radius
NOTE Do not set the aperture diaphragm less than 60％ of the radius except for special
types of workpieces. It reduces the resolution. To avoid diffraction, set the
aperture diaphragm more than 15 except for special types of workpieces.
No. 99MBA091A 3-3

When measuring cylindrical workpieces or screw threads, the numerical aperture affects
measurement accuracy. The appropriate optical aperture is shown as below:
（１） For cylindrical measurement
3
1
Aperture D＝0.18F F；Focal distance of condenser lens (mm)
d
3
1
＝19.224
d
（２） For screw thread measurement
3
α
sin
Aperture D＝19.224 2
d2
D：Corresponds to the aperture setting 1 to 25 indicated on the aperture diaphragm

knob on the control panel of the measuring unit.
d：Workpiece diameter
d2：Pitch diameter of screw thread
α：Screw thread angle
The following graph shows the correlation between the workpiece diameter d and the optimal
aperture setting D. Adjust the aperture diaphragm knob to the optimal position by referring to
this graph.
Aperture D (mm)
Workpiece diameter d (mm)
3-4 No. 99MBA091A

3.5 Adjusting the Aperture for Reflected Illumination

The aperture diaphragm for vertical reflected illumination is used to adjust the Numerical
Aperture (N.A) of vertical reflected illumination system. It controls the resolution, contrast,
and depth of focus of the optical system.
Exit pupil of objective Iris
Aperture setting for obtaining a

good contrast and image clarity
for ordinary applications:
70 to 80％ of radius Aperture diaphragm
Confirm that the exit pupil of objective as above can be seen by removing the eyepiece
and looking into the optical tube with an appropriate light intensity. Push and pull a knob of
aperture diaphragm to adjust the numerical aperture.
Reflected illumination
aperture diaphragm knob
NOTE Do not set the aperture diaphragm less than 60% of the exit pupil radius except
for special types of workpieces. This will reduce the resolution.
No. 99MBA091A 3-5

3.6 Setting Up a Workpiece
Place a workpiece as its surface to be measured (on the objective side) become at right
angles to the optical axis of objective. The stage glass surface is at right angles to the
optical axis of objective. If the workpiece surfaces are parallel, place the workpiece directly
on the stage glass. If the surfaces are not parallel, adjust the measured surface to become
at right angles to the optical axis with an appropriate fixture. Unless the measured surface
is at right angles to the optical axis, it is impossible to focus the objective on the surface
over the entire field of view.
Objective
Square
Workpiece
Optical axis Stage glass
NOTE 1. A shock while setting up a workpiece may break the stage glass, resulting in
damage and personal injury. Exercise care so as not to bump the measuring
unit during setup.
2. A workpiece that extends over the end of the XY stage can interfere with the
main unit when the stage moves. Carefully mount the fixture on the stage.
3. If a large size of cross-travel stage such as MF-＊2017C, MF-＊3017C, and MF-
＊4020C is moved particularly rearward on the Y axis (toward the column),
exercise care so that a workpiece or a fixture will not interfere with the main
unit.
IMPORTANT Since the clamp is used only to prevent the workpiece from moving during
measurement, there is no need for extensive joint strength. An excessive
clamping force will deform a workpiece if it is made of thin or soft material, and a
correct measurement result may not be obtained. Use a clamping method that will
not deform the workpiece.
3-6 No. 99MBA091A

TIP 1. The swivel center support (No.172-197), V-block with clamp (No.172-378), and
holder with clamp (No.176-107) are also available optionally to fix a
workpiece.
2. To secure a workpiece and fixture to the XY stage, use the tapped holes on the
stage. The stage adapter (B)(No.176-310) is used for MF-＊2010C and the
stage adapter (No.176-304) is used for MF-＊2017C，MF-＊3017C，and MF-＊
4020C to be secured on the stage with tapped holes as shown below. The
fixture is secured using T-groove of the adapter.
Stage adapter T-groove dimension figure
Stage adapter
2-φ6.6 hole
2-φ6.6 hole
φ11 counter sink
φ11 counter sink
Stage adapter
Stage adapter（B）
Stage adapter dimension figure
3. For information about the dimensions of stages, refer to the XY stage in "6.8
External Dimensions".
No. 99MBA091A 3-7

3.7 Selecting the Illumination Method
Select the appropriate illumination method depending on the type of workpiece.
3.7.1 Transmitted illumination

Used for the contour measurement and inspection. A telecentric system（＊1）is employed.
The aperture diaphragm knob for transmitted illumination enables to adjust the brightness
and obtain the optimal aperture when measuring cylindrical workpieces. There are
continuous illumination intensity settings available. A maximum of two filters can be
mounted.
TIP (*1) What is telecentric system?････Illumination which placed the optical system so that
the image center size may not change by the image growing faint, even if the focus
deviates in the optic axis direction. The magnification error by the focusing does not
occur.
3.7.2 Vertical reflected illumination

Used for surface measurement and inspection. (The surface should not be excessively
rough). A Koehler system（＊2） is employed and its advantages are fully utilized when
measuring the surface of mirror finish workpiece.
TIP (*2) What is Koehler system?････Illumination which placed the optical system so
that the illumination light (image) is not directly imaged on the observation plane
and the whole observation range is evenly irradiated by the uniform parallel light
with high brightness.
3.7.3 Simultaneous use of transmitted and vertical reflected illumination

The transmitted and vertical reflected illumination modes or the transmitted and oblique
reflected illumination modes can be used simultaneously. This enables to measure the
contour and surface feature of workpiece at the same time.
3-8 No. 99MBA091A

3.7.4 Oblique reflected illumination（Optional oblique reflected illuminator is

required）
Used for for measurement and inspection of workpiece surfaces which are not smooth.
Since this method forms a stereoscopic image of the workpiece, it is also used for
inspecting surface conditions (scratches). Adjust the angle of light so that the brightest
image is obtained in the field of view.
Draw out the reflected illumination switching knob as shown below when using this
illumination.
Reflected illumination
switching knob
No. 99MBA091A 3-9

3.8 Selecting a Filter
Filters are attached to the transmitted illuminator and vertical reflected illuminator. Select
those filters according to the usage.
Symbol Filter type Function and usage

Referred to as a light balance filter (LB filter). When the voltage of the
ＬＢ８０ Color temperature conversion
halogen lamp is lowered to reduce the light intensity, the entire light of
filter the lamp becomes red due to decrease in short-wavelength light. This
filter converts the color temperature of the lamp to that of near natural
light by reducing the transmission of long-wavelength light.
This filter has an advantage in observation and capture of color images
under the reflected illumination environment.
Referred to as a neutral density filter. This filter is intended to reduce
ＮＤ２ Neutral filter (light)
light in the visible region with no wavelength sensitivity. It is used for
reducing the light intensity without lowering the color temperature of a
light source. The ND2 filter will reduce the light intensity to 1/2 and the
ＮＤ８ Neutral filter (dark) ND8 will reduce it to 1/8.
This filter is effective in observation and capture of color images under
the reflected illumination environment.
One of interference filters with multi-layer films evaporated. This filter
ＧＩＦ Green interference filter
transmits only green spectral wavelength light with a central wavelength
(※) of 540nm and a half-width of 70nm. The filter provides a bright
illumination with its greater half-width and transmittance, compared with
a glass green filter.
Particularly, this filter is used for increasing the resolution and contrast of
images under the transmitted illumination environment.
(※) Standard accessories
Label
Filter
Label
Filter
LED illuminator Halogen illuminator
NOTE The illuminator housing is very hot. Be careful when installing the filter.
TIP Color temperature denotes the temperature of the complete black body that
produces the same chromaticity as that of a light source under consideration.
Turning a light source red refers to lowering the color temperature and turning it
blue refers to raising the color temperature.
3-10 No. 99MBA091A

3.9 Adjusting the Pupil Distance

（The case in which the binocular unit is mounted）
Look through the eyepieces at the correct viewing angle and hold the binocular tubes with
both hands. Adjust the angle between the tubes to your eyes by moving them in the
directions shown below.
・Adjustable range of pupil distance：51～76mm
NOTE 1. The eyepieces employ a high-eye-point system with rubber eye cups
attached. Turn the rims outward, as shown in the below figure, if you wear
eyeglasses.
Rubber eye cup
2. The binocular unit is supplied with polyethylene caps to shut off the light
from the eyepieces during use of the TV port and for dust-preventive
purpose during storage. (The cap is also supplied for the monocular unit.)
Cover each polyethylene cap over the eye shade on individual eyepieces. If
the eye shade is removed from the eyepiece, a play will be generated
between the cap and eyepiece. Exercise a great care.
No. 99MBA091A 3-11

3.10 Adjusting the Diopter of Eyepiece
Adjust the diopter following below procedure.
① Hold the root of eyepiece by the hand to prevent the whole eyepiece from rotating during
adjustment.
② Turn the diopter adjustment ring of eyepiece with the other hand to bring the cross-hair
line into sharp focus.
Diopter adjustment ring
“ 0 ” index (white line)
3.11 Replacing the Reticle

Insert the reticle unit into the slot on the side of optical tube unit to project the chart on the
real image.
Insert the unit all the way into the slot with the fingertip hooking groove on the reticle unit
orienting upward.
Loosen the reticle cover clamping screws slightly and slide the cover upward to remove
the reticle.
Reticle cover clamping screw
Reticle cover
NOTE 1. The reticle unit should always be inserted in the slot. If the reticle unit is not
inserted, an error may occur in the diopter.
2. If the reticle unit is not completely inserted all the way into the slot, the
shading may occur.
3. The reticle cover should always be equipped. The dust may come inside of
the optical tube if leave the reticle unit without the cover
3-12 No. 99MBA091A

3.12 Dimensional Measurement

The dimension of a workpiece is determined from the displacement of the XY stage .
The basic measuring procedure is as follows.
① Move the XY stage as one edge of workpiece meets the cross-hair.
Dimension to be measured
② Press the zero button of the X-axis to set the counter zero.
Zero setting
③ Move the XY stage as the other edge of workpiece meets the cross-hair.
④ Take a reading from the counter.
Dimension is displayed.
No. 99MBA091A 3-13

MEMO
3-14 No. 99MBA091A

4
4 Maintenance
This chapter explains the daily maintenance that must be performed
on the Measuring Microscope MF series , including cleaning and the
replacement of consumables.
4.1 Cleaning External Parts

Gently wipe the contaminations from the main unit and stage glass with a soft cloth. If the
contaminations are persistent, wipe them carefully with a cloth soaked in a diluted neutral
detergent and tightly squeezed, then wipe dry with another cloth.
IMPORTANT Do not use benzene, thinner, or chemically treated cloth for cleaning since the
surface may discolor and the paint may peel.
4.2 Maintaining the Lens

Always keep the lens clean and free of dust, oil, and fingerprints. If the lens got
contaminated, wipe them according to the following procedure:
・ Dust : Gently wipe it with a clean lens brush, soft brush, or gauze.
・ Oil, fingerprints: Gently wipe with tissue paper for the lens or a gauze dampened with a
small amount of absolute alcohol (ethanol, methanol).
IMPORTANT To maintain optimal Measuring Microscope performance over an extended

period, it should be periodically inspected by a Mitutoyo service engineer. For
detailed information, contact your dealer or the nearest Mitutoyo service center.
No. 99MBA091A 4-1

4.3 Replacing Consumables
The halogen bulb and stage glass are consumables and need to be replaced. Follow the
replacement procedure described in the instructions in safety.
4.3.1 Replacing halogen bulbs

(1) Turn off the power to the system.
(2) Allow a sufficient period of time for the bulb to cool.
IMPORTANT The bulbs and the peripherals stay hot for a period after use. Be sure to perform
the above procedures and check that the bulbs have cooled, then proceed to the
next step.
(3) Turn off the power switch and pull out the power cord.
IMPORTANT Serious injury and risk of electrocution will result if cover is opened while power
is on.
(4) Loosen and remove two fixing screws for the head cover of illuminator (cross
recessed pan head screws) by a supplied Philips screw driver.
Fixing screws for Head cover

head cover
4-2 No. 99MBA091A

4. Maintenance
(5) Pull straight the old bulb, and then insert the new one into the socket. Do not touch the
bulb directly with the bare hand, otherwise the glass surface is contaminated with the
oil etc., resulting in the short life of the bulb.
Insert the bulb all the way until it reaches the end of the socket. If not inserted well
enough, uniform illumination can not be obtained.
IMPORTANT Use only the specified halogen bulbs.

Unspecified halogen bulb may prevent the machine from performing efficiently.
TIP For information about the halogen bulbs type, refer to "6.3 List of Consumable".
No. 99MBA091A 4-3

4.3.2 LED illuminator replacement
The operating life of the LED illuminator is approximately 30,000 hours. If the illuminator is
darker or not lighted, replace the LED illuminator assembly.
(1) Set the light quantity of each bulb to 0%, and cool down the illuminator in the
power-on state for approximately 10 minutes.
IMPORTANT Use of the illuminator may cause high temperatures. Be sure to perform the
procedure below after turning off the power and confirming that the bulb is cooled.
(2) Turn off the main power switch and pull out the power cord.
IMPORTANT Replacement operation in the power-on state may cause trouble resulting in harm
to the operator.
(3) Remove the connector of the LED illuminator from the rear of the main unit base.
(4) Remove the illuminator unit from the microscope main unit.
(5) Connect the connector of a new LED illuminator to the main unit base and the LED
illuminator unit to the microscope main unit.
[LED reflected illuminator] [LED transmitted illuminator]
TIP For information about the LED illuminator, refer to "6.3 Consumables".
4-4 No. 99MBA091A

4. Maintenance
4.3.3 Replacing the stage glass

① Loosen the fixing screws (4 pieces) to remove them along with each glass retainer.
② Remove the stage glass from the cross-travel stage.
③ Gently fit a new stage glass in the frame of the stage.
④ Carefully tighten the fixing screws so the stage glass will not move.
Stage glass
･Glass retainer
･Glass fixing screw
NOTE 1. If replacing the stage glass, be careful so as not to break it.

2. Do not touch directly the stage glass with your bare hands due it is easy to get
contaminated by fingerprints etc. Wear gloves.
No. 99MBA091A 4-5

4.3.4 Replacement of conston spring
(1) Move the optical tube upward, place an appropriate spacer under the optical tube for fall
prevention.
(2) Remove the rear cover from the column.
(3) Insert a driver into the work hole of the spring bracket, pull the conston spring upward, and
disengage the wire from the pulley.
(4) Move back the conston spring to the position where the spring is shortest.
(5) Loosen the cross recessed truss-head screw and disengage the wire. (Pay attention not to
lose the collar.)
(6) Loosen the hexagon nut (M6) and remove the spring bracket and conston spring.
(7) Loosen the hexagon socket head cap screws (2 pieces, M3), remove the shaft from the
column, and replace the conston spring.
(8) Put back the shaft to the column.
(9) Put the spring bracket and conston spring together with a gap maintained using the hexagon
socket head cap screws (2 pieces) and hexagon nuts (2 pieces). (If there is no gap, the wire
cannot be evenly pulled.)
(10) Engage the wire with the spring bracket using the cross recessed truss-head screw and collar.
(11) Insert a driver into the work hole of the spring bracket, pull the conston spring upward, and
engage the wire with the pulley.
(12) Put back the rear cover to the column.
Pulley
Wire
Work hole
Spring bracket
Conston spring
Shaft
Hexagon socket head
cap screw M3 (2 pieces)
Wire Collar
Cross recessed trust-head screw

Hexagon socket head cap
screw M6
Spring bracket Hexagon nut M6
Conston spring
IMPORTANT Use caution not to hurt your fingers with the edge of the conston spring.
NOTE Prepare a hexagon wrench (nominal size 5) and a spanner (nominal size 10) for
putting hexagon socket head cap screws and hexagon nuts in addition to the
standard tools (accessories).
4-6 No. 99MBA091A

5
5 Troubleshooting
This chapter describes the check points and remedies if a symptom
of trouble in the Measuring Microscope system is encountered.
5.1 Main Unit

Symptom Check point Remedy
1) Nothing is 1) Is the power cord securely 1) Connect the power cord
displayed on the connected? securely.
counter when the 2) Is the cable connected correctly 2) Disconnect the cable once and
power switch is on. between the microscope main unit re-connect it securely.
and controller?
3) Is the main power switch turned on? 3) Turn on the main power switch.
4) Is the auxiliary power switch turned 4) Turn on the auxiliary power
on? switch.
2） The image is 1)Check if the lens and workpiece are 1) Clean the lens and workpiece.
unclear. stained.
2)Check if the light intensity of the 2)Adjust the light intensity.
illumination is improper.
3)Check if the lens is loosened. 3)Tighten the lens.
4)Check the environments for 4)Optimize the environmental
vibration and electric noise. conditions.
3) Abnormal sound 1)Check if the legs on the main 1)Tighten the legs on the main
and vibration are unit/installation stand are loose. unit/installation stand correctly.
generated. 2)Check if the main unit/installation 2)Perform leveling of the main
stand is not level. unit/installation stand.
4) The measurement 1)Check if the stage glass is fixed. 1)Fix the stage glass.
data will not be 2)Check if the lens is loosened. 2)Tighten the lens.
steady. 3)Check if the workpiece is fixed 3) Fix the workpiece properly.
properly.
4)Check if the lens and glass are 4) Clean the lens and glass.
contaminated.
5)Check if the environmental conditions 5)Optimize the environmental
such as the temperature and vibration conditions.
are within the tolerance range.
5) The optical tube 1)Remove the rear cover on the column 1)If the Conston spring (constant
unit is stiff in the and check the Conston spring force spring) is proved to reach
vertical motion. (constant force spring) for the end of its life, contact your
abnormality such as broken wire. dealer or the nearest Mitutoyo
sales office.
6) The buzzer keeps 1) The buzzer keeps sounding from the 1) Refer to “5.4 Error Messages and
sounding. controller. Remedies” – “5.4.2 Illuminator
and concerned matters”.
No. 99MBA091A 5-1

5.2 Counter Unit
1） Nothing is 1) Is the power cord securely 1) Connect the power cord
connected? securely.
displayed on the 2) Is the cable connected correctly 2) Disconnect the cable once and
counter when the between the microscope main unit re-connect it securely.
power switch is and controller?
3) Is the main power switch turned 3) Turn on the main power switch.
on. on?
on? switch.
2） Counter display 1) Turn the power switch off, then turn 1) Try a few times. If the counter
it on after at least 5 seconds. still dose not count, contact your
is locked (no dealer or the nearest Mitutoyo
counting.) sales office.
3） Miscounting 1) Is the main unit GND terminal 1) Securely ground the wire from
grounded securely with the power the main unit GND terminal.
cord?
2) Is there any noise source nearby? 2) The counter should be
separated by at least 0.5m
from high-voltage or
large-current sources and
high-capacity relays.
3) See “Counter display is locked” 3) If the counter or any Linear
category in Malfunction column. Scale is found to be damaged,
contact your dealer or the
nearest Mitutoyo sales office.
4） Count value 1) Are vibrations affecting the Linear 1)Take countermeasures to
fluctuates Scales? minimize the effects of the
vibration.
2)Is the mounting stand strong 2)Confirm the strength of the
enough? 2)mounting stand on which the
2)microscope is installed.
5） Errors of "E20" 1)Refer to “5.4 Error Messages and Remedies”.
and "F30" are
displayed.
6） Errors of "E51" 1)Refer to “5.4 Error Messages and 1)Refer to “5.4 Error Messages
Remedies”. and Remedies”.
and "E52" and 2)Have the power switches been 2)Turn the power switches on or
"E53" are turned on or off according to the off in the following order.
displayed. note of "3.2 Turning the Power ･For ON Peripheral equipment →
Supply On"? Microscope main unit
･For OFF Microscope main unit →
Peripheral equipment
5-2 No. 99MBA091A

5. Troubleshooting
5.3 Illuminator and Concerned Matters

1) Dark or unlighted [LED illuminator]
Transmitted 1) The illuminator is dark or unlighted. 1) If the symptom is not solved
illuminator/vertical after disconnecting the
reflected illuminator once and
illuminator reconnecting it, replace
the LED illuminator. (Contact
your dealer or the nearest
Mitutoyo sales office.)
[Halogen illuminator]
1) Is the halogen bulb OK? 1) Replace the halogen bulb.
2) Does the halogen bulb meet the 2) Replace the bulb with new bulb
specification? with the same rating.
[Common to LED / Halogen illuminator]

1) Is the power cord disconnected? 1) Disconnect the illuminator once
and re-connect it securely.
2) Is the main unit connected to the 2) Disconnect the illuminator once
illuminator properly? and re-connect it securely.
3) Is the main power switch turned on? 3) Turn on the main power switch.
on? switch.
5) Is the cable for each illuminator 5) Disconnect the cable once and
properly connected? re-connect it securely.
6) Is the cooling fan of each illuminator 6) Restart the power of the
working? microscope. If the same
symptom occurs, contact
Mitutoyo Service Center.
7) Is the installation environment of the 7) Turn off the power of the
microscope kept at a proper microscope, then turn it on
temperature? again at least 10 minutes later.
8) Is the illuminator energy saving 8) Set the “ F10 ” counter
activated? parameter to “ 0:None ”.
(Refer to “ About parameters ”
explained in selection 1.2.4
“ DRO Counter Unit ”,Section
1.2 “ Name and Function of
Each Unit”.)
2） Disabled optional 1) The optional illuminator does not 1) Check whether the control
illuminator at use work with QSPAK VUE appropriately. cable of the external illuminator
of vision unit is connected to the counter unit.
(Refer to “1.2 Name and
Function of Each Part” - “1.2.4
Counter unit”.)
3) Ceaseless buzzer 1) The buzzer keeps sounding from the 1) Refer to “5.4 Error Messages
controller. and Remedies” – “5.4.2
Illuminator and concerned
matters”.
No. 99MBA091A 5-3

5.4 Error Messages and Remedies
5.4.1 Counter and concerned matters
LED display Meaning and remedy
Overspeed arising；Traverse speed of the axis which displayed the error is
too fast.
･･･Press the zero-set button of the axis which displayed the error or restart
the microscope main unit.
Overcount arising；The scale of the axis which displayed the error exceeds
the possible counting range.
･･･Return the scale of the axis which displayed the error to the possible
counting range or restart the microscope main unit.
RS232C parity error
･･･Press the X-axis zero-set button or send C0 (zero) command by RS-232C
from peripheral devices such as PC. Restart both of the peripheral devices
and the microscope main unit when the communication is not resumed.
RS232C over-run error
RS232C framing error
TIP When an error code has been cleared (power is turned on), the counter displays
all zeros. Perform measurement from the start.
5-4 No. 99MBA091A

5. Troubleshooting
5.4.2 Illuminator and concernded matters

An error detected in the illuminator section is observed with the LED blinking (green) of
“the auxiliary power switch” on the control panel with buzzers generated from the
controller.
When an error is detected, the LED of the auxiliary power switch blinks after a buzzer.
Buzzers and blinking repeat at intervals of 20 seconds.
Auxiliary power
Buzzer count LED blink count
switch
・The overcurrent protection circuit of the fan integrated into the
transmitted illuminator or reflected illuminator functions.
2 – off – 2 ･･･Turn off the main power and start the system after a while.
If the same error is detected again, contact your dealer or the
・The fan integrated into the reflected illuminator is restrained or the
connector of the fan is not connected.
･･･Turn off the main power and check whether a foreign object
2 – off – 3 interferes with the fan, or disconnect the connector of the illuminator
2 times
and connect it again.
(beep)
・The fan integrated into the transmitted illuminator is restrained or the
connector of the fan is not connected.
･･･Turn off the main power and check whether a foreign object
2 – off – 4 interferes with the fan, or disconnect the connector of the illuminator
and connect it again.
・The LED reflected illuminator is not connected correctly.
3 – off – 2 ･･･Turn off the main power, disconnect the connector of the LED
reflected illuminator, and connect it again.
・The LED transmitted illuminator is not connected correctly.
3 times
3 – off – 3 ･･･Turn off the main power, disconnect the connector of the LED
(beep)
transmitted illuminator, and connect it again.
・The cable inside the control panel breaks.
3 – off – 7 ･･･If the same error is detected again after turning off the main power,
contact your dealer or the nearest Mitutoyo sales office.
IMPORTANT To cancel an error, be sure to turn off the main power switch first and treat the
matter.
No. 99MBA091A 5-5

MEMO
5-6 No. 99MBA091A

6
6 Specifications
This chapter describes the specifications, standard accessories, and
optional accessories of the Measuring Microscope.
6.1 Common Specifications

Model 2 Axes type MF-A505C MF-A1010C MF-A2010C MF-A2017C MF-A3017C MF-A4020C
No. 3 Axes type MF-B505C MF-B1010C MF-B2010C MF-B2017C MF-B3017C MF-B4020C
Optical tube ・Reticle projection type ・Erect image ・with TV port
・Optical path fixed type: Observation/TV=50/50
・Vertical tilt angle: 25 degrees ・Reticle: 90° broken-cross line (line width 5µm)
Eyepiece unit (option) ・Monocular unit (with a 10X eyepiece) ・Binocular unit (with two 10X eyepieces)
Objective (standard) ・3X (standard accessory)
Objective (option) ・1X,5X,10X,20X,50X,100X
Transmission:・Telecentric system ・Built-in aperture diaphragm ・White LED light source
・Non-step light intensity control ・with Air-cooling fan
LED
Reflection: ・Koehler illumination ・with Adjustable aperture diaphragm ・White LED light source
Illuminator illuminator
・Non-step light intensity control
unit
・Control unit: Main power ON/OFF switch (main switch) ・AC power inlet connector 100-240V
(Option:
requisite Transmission:・Telecentric system ・Built-in aperture diaphragm ・Halogen bulb 12V, 50W
selection) ・Non-step light intensity control ・with Air-cooling fan
Halogen Reflection:・Koehler illumination ・with Adjustable aperture diaphragm ・Halogen bulb 12V, 50W
・Non-step light intensity control ・with Air-cooling fan
・Control unit: Main power ON/OFF switch (main switch) ・AC power inlet connector 100-240V
・Detachable/attachable green filter : 1 piece supplied
Illumination filter
(detachable/attachable for both reflected and transmitted illuminators)
・Power switch (accessible sub switch for operation)
・Adjustable aperture diaphragm (Transmitted)
Control panel
・Transmitted illuminator: OFF～Non-step
・Reflected illuminator: OFF～Non-step
Traverse range 150 mm（5.9”） 220 mm（8.7”）
Z-axis Feeding ・1-axis coarse / fine feed
mechanism ・Both left / right wheel (coarse: 30 mm(1.18”) / full-turn, fine: 0.2 mm(0.008”) / full-turn)
50×50mm 100×100mm 200×100mm 200×170mm 300×170mm 400×200mm
Traverse range
(2.0” X 2.0”) (3.9” X 3.9”) (7.9” X 3.9”) (7.9” X 6.7”) (11.8” X 6.7”) (15.7” X 7.9”)
Stage surface 280×280mm 280×280mm 350×280mm 410×342mm 510×342mm 610×342mm
dimensions (11.0” X 11.0”) (11.0” X 11.0”) (13.8” X11.0”) (16.1” X 13.5”) (20.1” X 13.5”) (24.0” X 13.5”)
Stage glass 180×180mm 180×180mm 250×150mm 270×240mm 370×240mm 440×240mm
Cross dimensions (7.1” X 7.1”) (7.1” X 7.1”) (9.8” X 5.9”) (10.6” X 9.4”) (14.6” X 9.4”) (17.3” X 9.4”)
-travelQuick release
stage Built-in at both X-axis and Y-axis
mechanism
Indication
(2.2+0.02L) µm Ｌ: Measuring length (mm): Compliant with the measuring method of JIS B 7153
Accuracy
Table rotating
None with Swivel mechanism ±5° ±3°
function
Maximum load 10kg (22.1 lb) 10kg (22.1 lb) 10kg (22.1 lb) 20kg (44.1 lb) 20kg (44.1 lb) 15kg (33.1 lb)
Number of axes 3 axes or 2 axes
Counter Resolution 0.001 / 0.0005 / 0.0001mm (0.0001 / 0.00005 / 0.00001”) switchable
Function Zero setting / Direction mode selection / RS-232C output
Dimensions 562x730x667 562x730x667 624x745x667 632x892x782 682x892x782 757x907x782
22.1”x 28.7”x 26.2” 22.1”x28.7”x26.2” 24.6”x29.3”x26.2” 24.8”x35.1”x30.8” 26.9”x35.1”x30.8” 29.8”x35.7”x30.8”
No. 99MBA091A 6-1

Weight of main unit 65.5kg (144 lb) 65.5kg (144 lb) 69.5kg (153 lb) 130kg (286 lb) 138kg (304 lb) 144kg (317 lb)
Weight of control unit 2.0 kg (4.4lb)
Max. power LED 45 W
consumption Halogen 160 W
6.2 Standard Accessories

6.2.1 Standard accessories for measuring microscope main unit
Order No. Item name Quantity
375-037-1 Objective 3X 1
12AAA645 GIF filter 1
99MBA091J User's Manual (Japanese)
1
99MBA091A User's Manual (English)
(select any one kind)
99MBA091C User's Manual (simplified Chinese)
472730 Warranty 1
382951 Dust cover 1
12BAD595 Magnet plate 3 (only for 3 axes type)
380597 Setting screw 2
12BAH619 Swivel clamp screw 1
12BAH612 Hexagon socket button head screw M6x20 1
512926 Cap (2010 less) 4
12BAC490 Cap (2017 over) (select any one kind)
12BAD487 Hanger bolt (2010 less) 4
12BAG808 Hanger bolt (L) (2017 over) (select any one kind)
12BAG897 Setting piece (2017 over) 5
538615 Allen wrench (nominal 2.5) 1
538616 Allen wrench (nominal 3) 1
353491 Philips screwdriver 1
6.2.2 Standard accessories for illuminator

Order No. Item name Quantity
02ZAA000 Power cord (home)
02ZAA010 Power cord (UL, CSA)
1
02ZAA020 Power cord (CEE)
(select any one kind)
02ZAA030 Power cord (BS)
02ZAA040 Power cord for CCC
02ZAA050 Power cord SP-023+IS14 (for KOREA)
513667 Halogen bulb (12V, 50W) ※1 3 (only for halogen type)
Extension cable for halogen power supply
12AAJ770 1 (only for halogen type)
(transmitted)
12AAJ771 Extension cable for halogen power supply (reflected) 1 (only for halogen type)
2 (only for halogen type)
1126-0105 Ferritic core (mounted on
12AAJ770 / 12AAJ771)
※1:The lamp used for this instrument is designed for special purpose, and not suitable for household room
illumination.
6-2 No. 99MBA091A

6. Specifications
6.3 List of Consumable

Part name Product No. Remark
Common use for transmitted and
Halogen bulb (12V, 50W) ※1
513667 vertical reflected illumination
(High-bright type) (Made by NARVA Co. 57901)
Common use for transmitted and
Halogen bulb (12V, 50W) ※1
12BAB345 vertical reflected illumination
(Long life type) (Made by OSRAM Co. 64602)
Stage glass 12BAD381 For MF-＊505C
Stage glass 12BAH968 For MF-＊4020C
Conston spring 12BAD284
For transmitted illumination
LED transmitted illuminator 12AAJ720
(cooling fan equipped)
LED reflected illuminator 12AAJ721 For vertical reflected illumination
※1:The lamp used for this instrument is designed for special purpose, and not suitable for household room
illumination.
No. 99MBA091A 6-3

6.4 Optional accessories
○: applicable, －: not applicable
No. Part name MF-*505C MF-*1010C MF-*2010C MF-*2017C MF-*3017C MF-*4020C
176-392 Monocular tube ○ ○ ○ ○ ○ ○
176-393 Binocular tube ○ ○ ○ ○ ○ ○
378-857 Eyepiece 15× ○ ○ ○ ○ ○ ○
378-858 Eyepiece 20× ○ ○ ○ ○ ○ ○
375-043 Protractor eyepiece 10× ○ ○ ○ ○ ○ ○
176-313 ※1 Digital protractor eyepiece 10× ○ ○ ○ ○ ○ ○
－ Objective ○ ○ ○ ○ ○ ○
176-314-1 ＃ Slide type nosepiece ○ ○ ○ ○ ○ ○
176-314-2 ＃ Slide type nosepiece ○ ○ ○ ○ ○ ○
176-351-6 Oblique surface illuminator ○ ○ ○ ○ ○ ○
176-367-2 ※1 ▽ LED ring optics illuminator ○ ○ ○ ○ ○ ○
375-057 ※1 Focus pilot FP-05 ○ ○ ○ ○ ○ ○
12AAA165 Lens cleaning set ○ ○ ○ ○ ○ ○
375-056 Objective micrometer ○ ○ ○ ○ ○ ○
176-107 Holder with clamp ○ ○ ○ ○ ○ ○
172-378 V-block & clamp ○ ○ ○ ○ ○ ○
176-305 Rotary stage with fine feed knob (A) ○ ○ ○ －－－
176-306 Rotary stage with fine feed knob (B) －－－ ○ ○ ○
176-308 Vibration damping stand ○ ○ ○ ○ ○ ○
176-309 Mounting stand ○ ○ ○ ○ ○ ○
－ Various reticles ○ ○ ○ ○ ○ ○
★ 0.5× camera adapter unit (C-mount
375-054 ○ ○ ○ ○ ○ ○
adapter equipped)
970441 ★ C-mount adapter ○ ○ ○ ○ ○ ○
176-343 ※1 ● Twin fiber-optic illuminator ○ ○ ○ ○ ○ ○
176-366 ※1 ● Ring fiber-optic illuminator ○ ○ ○ ○ ○ ○
12AAG806 ○ GIF filter (for 100W illumination) ○ ○ ○ ○ ○ ○
12AAG807 ○ LB80 filter (for 100W illumination) ○ ○ ○ ○ ○ ○
172-197 ◇ Swivel center support ○ ○ ○ ○ ○ ○
176-304 ◆ Stage adapter －－－ ○ ○ ○
176-310 ◆ Stage adapter (B) －－ ○ －－－
264-145 ※1 △ QM-Data200 ○ ○ ○ ○ ○ ○
12AAA807 ▲ RS-232C cable ○ ○ ○ ○ ○ ○
359-737 Vision unit 9B (export) ○ ○ ○ ○ ○ ○
■ External light source control cable
12AAD128 ○ ○ ○ ○ ○ ○
(for 100W light source)
▼ External light source control cable
12AAG888 ○ ○ ○ ○ ○ ○
(for 150W light source)
176-345 LED illuminator (MF) ○ ○ ○ ○ ○ ○
176-347 Halogen illuminator (MF) ○ ○ ○ ○ ○ ○
12AAA643 ND2 filter ※2 (light quantity: 50%) ○ ○ ○ ○ ○ ○
12AAA644 ND8 filter ※2 (light quantity: 13%) ○ ○ ○ ○ ○ ○
12AAA646 LB80 filter ※2 ○ ○ ○ ○ ○ ○
When ☆ is used, use together ★ C-mount or 0.5x adapter unit.
○ is dedicated option for ● illuminator.
To control ● Illuminator from the vision unit, ■ External light source control cable is required.
To control ▽ Illuminator from the vision unit, ▼ External light source control cable is required.
When ◇ is used, use together ◆ Stage adapter (only 200x100, 200x170, 300x170, 400x170).
When △ is used, also use ▲RS-232C cable.
Hold with clamp, V-block & clamp, Swivel center support can be attached on Rotary stage with fine feed knob (A).
6-4 No. 99MBA091A

6. Specifications
＃ mark is factory set option.

※1:Order No. is different by using line voltage.
※2 is for halogen illuminator.
6.5 Objectives, Eyepieces Specification Table
Eyepiece WF, wide field of view

Bright-field objective
WF10 x／24 WF15 x／16 WF20 x／12
M N.A. W.D. R T.M. φ F.D. T.M. φ F.D. T.M. φ F.D.
(µm) (µm) (µm) (µm)
1x 0.03 59 9.2 10× 24 782 15 x 16 623 20 x 12 544

3x 0.09 77 3.1 30× 8 86.9 45 x 5.3 69.2 60 x 4 60.4
5x 0.13 61 2.1 50× 4.8 38.3 75 x 3.2 30.9 100 x 2.4 27.3
10 x 0.21 51 1.3 100× 2.4 13 150 x 1.6 10.8 200 x 1.2 9.6
20 x 0.42 20 0.7 200× 1.2 3.3 300 x 0.8 2.7 400 x 0.6 2.4
50 x 0.55 13 0.5 500× 0.48 1.4 750 x 0.32 1.3 1000 x 0.24 1.2
100 x 0.70 6 0.4 1000× 0.24 0.8 1500 x 0.16 0.7 2000 x 0.12 0.7
Note）M ：Magnification
N.A. ：Numerical aperture
W.D. ：Working distance (mm)
R ：Resolution(µm)
T.M. ：Total magnification
φ ：Field of view（φmm）
F.D. ：Focal depth（µm）
Assuming that the resolution of human eye is 2’

λ
R＝ 2 × N.A.
λ＝0.55 µm（Standard wavelength）
λ 1000
F.D.＝ 2 + 7 × N.A. × T.M.
2（N.A.）
No. 99MBA091A 6-5

6.6 Layout of the Optical System
Filament
Intermediate
image
Intermediate Reticle
image
Aperture
diaphragm
Objective position
Workpiece surface
Aperture Filament
diaphragm
6-6 No. 99MBA091A

6. Specifications
6.7 Serial Data Output Specifications of the Counter

The measured date of the counter unit is output via the serial output connector to a peripheral,
such as two-dimensional data processing unit Micropak 9/7 or two-dimensional data
processing program QSPAK.
Communication Specifications
・ Transmission method：Half duplex
・ Transmission control：Asynchronous (Start-stop transmission)
・ Baud rate：1200bps／2400bps／4800bps／9600bps(※1)／19200bps
・ Data bit：7 bits(※1)／8 bits ASCII
・ Parity bit：Even(※1)／Odd／None
・ Stop bit：1 bit(※1)／2 bits
・ Flow control：Enabled／Disabled (※1)
（※1）Default setting at the shipment
6.7.1 Connector specifications
I/O
Pin
Connector shape Signal direction Description
number
※2
1
2 RD IN Accept the command
3 TD OUT Measured data
4 DTR OUT Counter is ready
5 SG － Signal ground
6 DSR IN Peripheral is ready
7 －－
D-sub, 9 pins,
male, inch thread 8 －－
9
FG －－ Frame ground
（※2）In/Out direction OUT：counter → Peripheral
The input/output circuits used are equivalent to MAX232 (MAXIM Corporation).
6.7.2 Control signal

A data request from a peripheral is accepted only if the DTR signal is “H” (space).
“H” has a +9V level.
The counter unit can transfer only if the DSR signal is “H” (space).
No. 99MBA091A 6-7

Example of cable that can be used
The following illustrates two types of reference cables which are used to connect the counter
to a DOS/V PC. One of the cables does not use control lines and other uses control lines.
Cable 1 (Control lines are not used)
Pin number Signal name Pin number Signal name

1 N．C 1 DCD
2 RD 2 RXD
3 TD 3 TXD
4 DTR 4 DTR
5 SG 5 GND
6 DSR 6 DSR
7 N．C 7 RTS
8 N．C 8 CTS
9 N．C 9 RI
[Counter unit] [DOS／V]
Cable 2 (Control lines are used)
Pin number Signal name Pin number Signal name

1 N．C 1 DCD
2 RD 2 RXD
3 TD 3 TXD
4 DTR 4 DTR
5 SG 5 GND
6 DSR 6 DSR
7 N．C 7 RTS
8 N．C 8 CTS
9 N．C 9 RI
[Counter unit] [DOS／V]
6-8 No. 99MBA091A

6. Specifications
6.7.3 Data output operation

A displayed value on the counter unit can be output by inputting an external load signal or
commands from a peripheral, such as a personal computer.
(1)Data output
A) For the external load signal
Only the data on the axis on which the external load box switch is pressed is output to
a peripheral.
B) For the command from peripheral
Data is output to a peripheral by inputting the following character strings (commands)
from the peripheral, such as a personal computer.
List of command from peripheral

Input command Output data
X CR LF X-axis data
Y CR LF Y-axis data
Z CR LF Z-axis data
A CR LF Three-axes data
(2) Output format

The Output data is output in the specified format.
Below are given output examples of various kinds of data for a signal-axis counter and
multi-axes counter.
１)Single-axis counter output
A) If “123.4567” is displayed on the X-axis counter
X ＋ 1 2 3 ． 4 5 6 7 CR LF
B) If “0.0000” is displayed on the Y-axis counter
Y ＋ 0 0 0 ． 0 0 0 0 CR LF
２)Multi-axes counter output

A coordinate data of each axis is the same as the output format of a single-axis counter.
For two-axes）
X-axis data ， Y-axis data CR LF
For three-axes）
X-axis data ， Y-axis data ， Z-axis data CR LF
No. 99MBA091A 6-9

３)Summary of external device data and output data
By pressing the switch on the external load box or upon reception of commands from the
peripheral, the counter unit outputs the following data.
External
Commands from the Output data
load box
peripheral
switch
X X CR LF X-axis data CR LF
Y Y CR LF Y-axis data CR LF
Z Z CR LF Z-axis data CR LF
A A CR LF X-axis data ， Y-axis data ， Z-axis data CR LF
４）Error
Next error code is output, when the error arises in the counter.
RS232C error code Display Error cause Remedy（method of return）
Parity error 1)Press the X-axis zero-set
N G 0 5 CR L F E51 arising button.
Over-run error 2)Transmit C0 (zero) command
N G 0 7 CR L F E52 arising from the peripheral equipment
Framing error arising at RS232C.
N G 0 8 CR L F E53
Receiving the un- Correspond by the normal
N G 0 9 CR L F － defined command command.
X-axis overspeed 1)Press the X-axis zero-set
X E 2 0 CR LF
E20 arising button.
2)Transmit C0 (zero) command.
Y-axis overspeed 1)Press the Y-axis zero-set
Y E 2 0 CR LF
E20 arising button.
Z-axis overspeed 1)Press the Z-axis zero-set
Z E 2 0 CR LF
E20 arising button.
X-axis overcount Return to the range in which the
X F 3 0 CR LF F30 arising counting is possible.
Y-axis overcount
Y F 3 0 CR LF F30 arising
Z-axis overcount
Z F 3 0 CR LF F30 arising
TIP The error with high priority is displayed, when the multiple error phenomena
arises simultaneously. If the error is canceled by C0 (zero) command, etc., the
error with next high priority is displayed.
6-10 No. 99MBA091A

6. Specifications
6.7.4 Connecting Micropak

It is necessary to perform the Micropak 9 / 7 / 5 setting when connecting the Micropak to the
counter unit.
For information about setting up Micropak 9 / 7 / 5, refer to the Micropak user’s manual.
（１） Connection
Order No.937998
Counter unit MPK-9／7／5 mkⅡ
External load cable
EXT．LOAD EXT．LOAD
Order No.12AAA202
Connecting cable
SERIAL INPUT
（Set No.12AAA500 for two pieces of above mentioned cable）
（２） Micropak 9 setup
① Set Equipment--＞Counter--＞Baud Rate--＞9600 bps
② Set Equipment--＞Counter--＞X-axis Counter--＞RS-232C Connection
Y-axis Counter--＞RS-232C Connection
Z-axis Counter--＞RS-232C Connection
③ Set Equipment--＞Counter--＞Counter connected--＞MF
④ Set Conditions--＞Measuring Rang--＞X Y Z
（３） Micropak 7 setup

① Set Equipment--＞Counter--＞Baud Rate--＞9600 bps
② Set Equipment--＞Counter--＞X-axis Counter--＞RS-232C Connection
Y-axis Counter--＞RS-232C Connection
Z-axis Counter--＞RS-232C Connection
③ Set Equipment--＞Counter--＞Counter connected--＞Others--＞Counter(100ms)
④ Set Conditions--＞Measuring Rang--＞X Y Z
（４） Micropak 5 setup

Set the Dip switch DPS1 and DPS2 according to the following.
① DPS1 No.1：ON，No.2：OFF，No.3：OFF，No.4：OFF 4800 bps
② DPS2 No.5：ON，No.6：OFF
Modify also the parameter setup of the counter simultaneously.（Set "4800bPS" at the
parameter number F07-1 according to "1.2.4.1 About parameters".）
NOTE To connect the counter to Micropak 5, unless the default setting are modified, the
counter cannot be connected to Micropak 5. （Because MPK-5 does not accept the
Z-axis data.）Modify also the parameter setup of the counter so that Z-axis output may
not be performed.（Set "2 AS" at the parameter number F08 according to "1.2.4.1
About parameters".）
No. 99MBA091A 6-11

6.7.5 Connecting DPU-414 (Printer)
（1）Software DIP SW 1-3 setting
Notice：Do not turn off power while during start up setting. (The procedure cannot be skipped.)
Remark：Set the [FEED] key off, and the [ON LINE] key on.
Key operation Contents of printout Remarks
Turn the power switch “ON” pressing Automatically print the present Start startup setting
the [ON LINE] key DPU-414 setting. At the last
line, the prompts are printed as
below:
Continue ? :Push ‘On-line SW’
Write ?:Push ‘Paper feed SW’
[ON LINE] Dip SW-1 Setting of SW1
[FEED] [ON LINE] [ON LINE] [FEED] (off)(on)(on)(off) Input method: Serial
[ON LINE] [FEED] [ON LINE] [ON (on)(off)(on)(on) CR＝CR
LINE] Continue ? :Push ‘On-line SW’ Printing density
Write ?:Push ‘Paper feed SW’ ＝100％
[ON LINE] [ON LINE] [ON LINE] [ON (on)(on)(on)(on) Normal printing
LINE] (on)(on)(on)(on) (40 columns)
[ON LINE] [ON LINE] [ON LINE] [ON Continue ? :Push ‘On-line SW’ Japanese
LINE] Write ?:Push ‘Paper feed SW’
[FEED] [FEED] [FEED] [FEED] (off)(off)(off)(off) Data bit length: 7 bits
[FEED] [ON LINE] [ON LINE] [ON (off)(on)(on)(on) Parity permission:
LINE] Continue ? :Push ‘On-line SW’ Even number
Write ?:Push ‘Paper feed SW’ Baud rate: 9600 bps
[FEED] Dip SW setting complete!! Complete setting
（2）Printing operation
1) Turn on the “ON LINE” lamp by pressing the [ON LINE] key, then start printing with the MF foot
switch (option).
2) Turn off the “ON LINE” lamp by pressing the [ON LINE] key, then press the [FEED] key to feed
paper.
3) Turn the power switch “ON” pressing the [FEED] key to start test printing.
6-12 No. 99MBA091A

6. Specifications
（3）Connection
Connect each cable as figure below. Be sure that all power sources of each equipment are OFF
when connecting cables.
Attached connecting cable (02AGD620A)
SERIAL SERIAL
Foot switch (option)

(12AAA846)
EXT.LOAD
MF (Counter) DPU-414 (Printer)
（4）Setting and operation of MF counter
①Setting
Default setting up of MF counter at shipment has no need to be changed, however, confirm
the communication condition setting of MF counter if printing does not start.
②Printing operation
Pressing the foot switch (option) enables to print the value of the axis on which is set up output
by MF counter.
No. 99MBA091A 6-13

6.7.6 Connecting QM-Data 200
It is necessary to perform the QM-Data 200 setting when connecting it to the counter unit.
For information about setting up QM-Dada 200, refer to its user’s manual.
（１） Connection
Connecting cable
（ No.12AAA807 ）
Counter QM-Data200
unit
SERIAL(1) RS232C(2)
（２） QM-Data 200 setting

① Select the “SYSTEM” key of operation panel.
② 5: Measuring Instrument Setting--＞ 1: Counter Type--＞ MF-A/MF-UA
After the selection, the external counter setting of QM-Data 200 becomes the following
communication condition:
● Baud Rate: 9600 bps
● Communication Condition: EVEN, 7, 1
● Flow Control: DTR/DSR
● Terminator: CR+LF
③ 2: Axis Configuration--＞ 1：X, Y or 2：X, Y, Z, (depending on the axis configuration of the

microscope)
NOTE When QM-Data 200 starts, the counter display of microscope goes off and LED of
mm/E display at the counter blinks on and off. The switches on the microscope
counter become ineffective.
TIP A value in units of “E” is displayed by dividing a displacement in units of “mm” by

25.4.
6-14 No. 99MBA091A

6. Specifications
6.8 External Dimensions

6.8.1 Main unit
（Unit：mm）
a） MF-＊505C
b） MF-＊1010C
No. 99MBA091A 6-15

c）MF-＊2010C
（Unit：mm）
d) MF-＊2017C
6-16 No. 99MBA091A

6. Specifications
e) MF-＊3017C （Unit：mm）
f) MF-＊4020C
No. 99MBA091A 6-17

6.8.2 Control unit (Unit: mm)
a) LED illuminator
b) Halogen illuminator
6-18 No. 99MBA091A

6. Specifications
6.8.3 Cross-travel stage （Unit：mm）
a）MF-＊505C
b）MF-＊1010C
c）MF-＊2010C
No. 99MBA091A 6-19

d）MF-＊2017C （Unit：mm）
e）MF-＊3017C
6-20 No. 99MBA091A

6. Specifications
（Unit：mm）
f）MF-＊4020C
No. 99MBA091A 6-21

MEMO
6-22 No. 99MBA091A

MF Series

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No.

The following signs indicate general warnings:

The following signs indicate specific warnings or prohibited actions, or indicate a

Specifies a required action. The given example means “Ground”.

Information in this document is subject to change without notice.

 2009 Mitutoyo Corporation. All rights reserved.

No. 99MBA091A iii

● This instrument is a precision machine.

● Rectify the installation environments.

● Gently fix a workpiece on the stage.

● Turn off the power during connection and maintenance.

● Please do not carry the measurement thing of 18kg or more alone.

● Turn the power switch ON or OFF along the order

● Removing the cover and disassembling the machine

1 Unit failure or damage arising from improper handling, or unauthorized retrofit or

2 Unit failure or damage as the result of moving, dropping, or transporting after

This Warranty is valid only in the country of original purchase.

Notes on Overseas Transfer

Disposal of Old Electrical & Electronic Equipment

No. 99MBA091A vii

Notes on LED Safety ...................................................................................................................................... iii

Installation Environments .............................................................................................................................. vi

WARRANTY .................................................................................................................................................... vii

viii No. 99MBA091A

The MF series has the following features.

z Twisted roller is incorporated in the quick release mechanism. It allows smooth

No. 99MBA091A 1-1

（6）Coarse/fine focusing wheel

（18）Swivel clamp screw

（12）X-axis coarse-feed wheel

（11）X-axis fine feed wheel

（14）Y-axis fine feed wheel （19）Control panel

1-2 No. 99MBA091A

(24) LED control unit

（20）Vertical reflected illuminator

（8）Z-axis zero-set switch

（2）Binocular or monocular unit

（Spare hole for

No. 99MBA091A 1-3

2） Binocular or monocular unit (both are optional)：A 10x eyepiece is mounted on

3） Reflected illumination aperture diaphragm knob：Adjusts the numerical aperture

1-4 No. 99MBA091A

1.2.2 Cross-travel stage unit

9） Cross-travel stage ： Mounts a workpiece on the XY stage; its stroke varies

TIP The MF-＊505C，MF-＊1010C，and MF-＊2010C models have no table rotating

17） Swivel knob（for MF-＊2017C，MF-＊3017C and MF-＊4020C） ：Used to swivel the

No. 99MBA091A 1-5

1.2.3 Illuminator unit

Transmitted illumination knob Vertical reflected illumination knob

1-6 No. 99MBA091A

21） Transmitted illuminator (requisite selection option): Lighting device for

ａ）Connector for control cable

ｂ）Connector for vertical reflected illuminator (LED)

ｃ）Connector for transmitted illuminator (LED)

No. 99MBA091A 1-7

①Front view of the counter

a）Display unit c）mm/E indicator LEDs

Displays the displacement of cross-travel stage and optical tube.

Resolution: 0.001/0.0005/0.0001mm (.0001/.00005/.00001”)（switchable）

17） Swivel knob（for MF-＊2017C，MF-＊3017C and MF-＊4020C）：Used to swivel the