MODULAR LASER

PROCESSING
SYSТEMS

LASER
TRIMMING
SYSTEM

For volume production of top-quality laser ti·im quality. Yot1 can master Powerful Computer - А powerful
sensors and linear and mixed signal both constant speed tracking trims and Hewlett-Packard НР9000 Series
devices, you need ESI's Model 6100 measure/ predict trims for highe!' workstation with 32-Ьit controller
Laser Trimming System. The next­ Yesolution with more speed. di·ives the Model 6100. And ESI's revo­
generation ulti·a thin-film laser lutionaгy direct connection between
Faster, Easier Software - With menu­
ti·imme1· offers unprecedented spot size the НР digital multimeter and the
driven software and Interactive Set-up
fi·om 4 to 15 microns, plus gi·eater beam positioner lets you achieve even
vVindows, the Model 6100 is fast and
flexiЬility, quality, staЬility, ease of use higher levels of speed and accuracy.
easy to use. You can ргоgгаm even
and lo,ver o,vnei·ship costs.
complex circuits qt1ickly, displaying
Enhanced Beam Positioner - А new lineai­ the ti·im or measurement sequence in Electro Scientific lndustries, lnc.
13900 N.W. Science Pork Drive/ Portloпd, 0R 97229
beam positioner provides consistent 1·eal time and cutting set-up time f1·om Теlерlюпе (503)641·4141/ FAX (503)643·4873
hours to minutes.
Specifications Summary
Model 6100 Laser Trimming System

Laser Beam Positioning

Type: Recoilless X-Y linear motor
Field size: 19 mm by 19 mm
Accuracy: ± 1 µm (worst case deviation from
ideal coordinate system)
Resolution: 0.1 µm LASER
Speed range: 1.0 µm/s to 10,000 µm/s TRIMMING
SYSTEM
Laser
Type: Diode pumped Nd:YLF with air-cooled
power supply
Pump source lifetime: > 10,000 hours
typical
Wavelength: 1047 nm
Optics
Small spot package: 4 µm to 7µm
l/e 2 @ 1047 nm
Medium spot package: 6 µm to 9 µm
1/e 2 @ 1047 nm
Large spot package: 9 µm to 15 µm
1/e2 @ 1047 nm
Total spot size range: 4 µm to 15 µm 1/e 2
Energy Density Control
Type: Programmable liquid crystal attenuator
Laser power control range: l %to 100% of System Software Handler/Prober
loser output HP Pascal Workstation software operating system Stepping field: 6 in. by 6 in. (152.4 mm by
Automatic focus: Non-contact direct loser focus Model 6100 AutoTrim passive and
TM
152.4 mm)
functional trim program: XY Resolution: 1µm
Viewing Optics and Illumination Menu/form driven user interface XY Accuracy: 12.7 µm
CCTV with adjustable magnification, 125X to Interactive set-up windows Z-stage travel: 2.25 mm
lOOOX Standard trim database Z-stage resolution: 1µm
Software controlled illumination intensity and Standard data-logging routines Theta range: ± 4 degrees
on/off control (optional) Interactive IEEE instrument set-up forms Theta resolution: 0.0002 degrees approx.
IEEE instrument trim sensitivity curves SYSTEM OPTIONS
System Control Computer Menu control of digital I/O
Hewlett-Packard Model 9000-362 Automatic Pattern Recognition
Branching/binning Video Focus
4 Mbytes RAM
52 Mbyte Winchester Model 6100 MicroTask TM trim language: CCTV Motorized Zoom
3.5 in. flexible disk High level compiler-based trim language HP 3458A Trim Support
RS232 interface Automatic edit/ compile sequence Quick-change prober subsystem
IEEE-488 interface Model 6100 services software: Temperature Controlled Wafer Chuck
14 in. Colar VGA graphics display with keyboard Menu-based module level diagnostics Network software
System calibration checking routines
AutoTrim and MicroTask are trademarks of
Electro Scientific Industries, Inc.

ESI reserves the right to change specifications and other product information without notice. Printed in U.5.A.
===: 1
© 1992 Electro Scientific Industries, Inc.
Effective October 1992 S2488-l092-Kl 1,500
 Facility Specifications
Electrical Power Requirements
Diode-pumped Laser 120 volts AC± 10%
(any wavelength laser) Single-phase, 30 amperes
I power cable for 50-60 Hz
system & laser Hubbel 1\vist Lock
Optional: when Single-phase tapped between I90-480
transformer purchased Secondary voltage I I 5 volts AC
50-60 Hz
Example: 20 amps @ 220 volts

Your electrician must install wiring that meets local electrical

codes, between your power source and the system. For b_~st
system performance, use a dedicated line from the utility
source.

Pneumatics
Cdmpressed Air Continuous and filtered compressed air at 551 kPa (80 psi).
ES! supplies a 2.7-meter hose (approximately 9 fee t); see
Figure 13.
Pressu_rized Air (Applies only to systems with a step-and-repeat parts handler.)
Flow rate: 0.3 cubic meters per minute ( lO cubic feet per minute).
Hose receptacle: 9.5 mm (3/8 inch), male, with an NPT-type
fitting; see Figure 13.

Figure 13. Hoses and fittings

Free-air Vacuum for Chuck

Flow at 0 in. Hg: (max) 0.12 cubic meters per minute (4.2 cfm)
Flow at 20 in. Hg: 0.04 cubic meters per minute (1.4 cfm)
ESI supplies a 2.7-meter hose (approximately 9 feet).
Hose receptacle: use a 9.5 mm (3/8 inch) 18 NPT-type fitting. (See Figure 13.)

Vapor Removal Vacuum

Vacuum is recommended to remove the ablation vapor created during laser processing.
The system includes a vapor pickup at the work surface and a vapor exhaust port on the
right side of the system.

A flexible hose with a 50.8mm (2 inch) inside diameter is required to fit over the plastic
pipe. Connect your vacuum to the port with a flexible hose secured with a hose clamp.
The minimum flow is 2830 liters/min (J00cfm) at JOkPa (40in water column).

Ambient Room Temperature

15° C to 25° C (59° F to 77° F).

Relative Humidity
10% to 80% noncondensing.

System Weight
The floor must support 8 16 kg (1 800 pounds).
 Facility Specifications
Electrical Power Requirements
Diode-pumped Laser 120 volts AC ± 10%
(any wavelength laser) Single-phase, 30 amperes
I power cable for 50-60Hz
system & laser Hubbel Twist Lock
Optional: when Single-phase tapped between 190-480
transformer purchased Secondary voltage ll 5 volts AC
50-60Hz
Example: 20 amps @ 220 volts

Yo ur electrician must install wiring that meets local electrical

codes, between your power source and the system. For b_~st
system performance, use a dedicated line from the utility
source.

Pneumatics
Cdmpressed Air Continuous and filtered compressed air at 551 kPa (80 psi).
ESI supplies a 2.7-meter hose (approximately 9 feet); see
Figure 13.
Pressu_rized Air (Applies only to systems with a step-and-repeat parts handler.)
Flow rate: 0.3 cubic meters per minute (10 cubic fee t per minute).
Hose receptacle: 9.5 mm (3/8 inch), male, with an NPT-type
fitting; see Figure 13.

Provided by the
~ / c ustomer

'""'" "' " ~

Figure 13. Hoses and fittings

Free-air Vacuum for Chuck

Flow at 0 in. Hg: (max) 0.12 cubic meters per minute (4.2 cfm)
Flow at 20 in. Hg: 0.04 cubic meters per minute (1.4 cfm)
ESI supplies a 2.7-meter hose (approximately 9 feet).
Hose receptacle: use a 9.5 mm (3/8 inch) 18 NPT-type fitting. (See Figure 13.)

Vapor Removal Vacuum

Vacuum is recommended to remove the ablation vapor created during laser processing.
The system includes a vapor pickup at the work surface and a vapor exhaust port on the
right side of the system.

A flexible hose with a 50.8mm (2 inch) inside diameter is required to fit over the plastic
pipe. Connect your vacuum to the port with a flexible hose secured with a hose clamp.
The minimum flow is 2830 liters/min (I00cfm) at I0kPa (40in water column).

Ambient Room Temperature

15° C to 25° C (59° F to 77° F).

Relative Humidity
I 0% to 80% noncondensing.

System Weight
The floor must support 816 kg (1800 pounds).
System Footprint
(top view) t
.51 m (20 in.)

.51m (20 in.)

System

7--_-_,,/'\_\---,,--_J ·., ·-,, \ ,991 (39 ;,,)

.91m (36 in.)

r
.74m (29 in.)
__,,./ ··.... ,,. .51m (20 in.)

~ ~

Vertical Dimensions
(side view)

t-----__J @J
1.78m (70.1 in.)