Maintenance Manual: Fanuc Ac Servo Motor #+ Series Fanuc Ac Spindle Motor #+ Series Fanuc Servo Amplifier #+ Series

FANUC AC SERVO MOTOR #+ series
FANUC AC SPINDLE MOTOR #+ series

FANUC SERVO AMPLIFIER #+ series
MAINTENANCE MANUAL
B-65325EN/02
• No part of this manual may be reproduced in any form.
• All specifications and designs are subject to change without notice.
The products in this manual are controlled based on Japan’s “Foreign Exchange and
Foreign Trade Law”. The export from Japan may be subject to an export license by the
government of Japan.
Further, re-export to another country may be subject to the license of the government of
the country from where the product is re-exported. Furthermore, the product may also be
controlled by re-export regulations of the United States government.
Should you wish to export or re-export these products, please contact FANUC for advice.
In this manual we have tried as much as possible to describe all the various matters.
However, we cannot describe all the matters which must not be done, or which cannot be
done, because there are so many possibilities.
Therefore, matters which are not especially described as possible in this manual should be
regarded as ”impossible”.
• If operation is abnormal, for example, when an alarm is issued or a hardware failure

occurs, the operation described in this manual is not guaranteed unless otherwise
specifically noted. If operation is abnormal, take action according to the instructions
specifically described in this manual if any or contact FANUC when the instructions are
not described.
• Generally, a "safety function" means a function that protects the operators from danger
posed by the machine.
The signals and functions described in this manual cannot be used separately for any
"safety function" unless otherwise described as being [usable for the safety function].
Their specifications are not assumed to be used as the [safety function] in this case,
unexpected danger may be caused. If you have any questions, contact FANUC.
• A device connection error or setting error can lead to unpredictable operation. When
starting to operate the machine for the first time after assembling the machine, replacing
parts, or changing parameter settings, exercise extreme care.
B-65325EN/02 SAFETY PRECAUTIONS
SAFETY PRECAUTIONS
The "Safety Precautions" section describes the safety precautions relating to the use of FANUC servo
motors, spindle motors, and servo amplifiers (βi SV βi SVSP). Users of any servo motor or amplifier model
are requested to read the "Safety Precautions" carefully before using the servo motor or amplifier.
The users are also requested to read an applicable specification manual carefully and understand each
function of the motor or amplifier for correct use.
The users are basically forbidden to do any behavior or action not mentioned in the "Safety Precautions."
They are invited to ask FANUC previously about what behavior or action is prohibited.
Contents
DEFINITION OF WARNING, CAUTION, AND NOTE.........................................................................s-2

FANUC AC SERVO MOTOR βi series, FANUC AC SPINDLE MOTOR βi series ...............................s-3
Warning..............................................................................................................................................s-3
Caution ...............................................................................................................................................s-5
Note....................................................................................................................................................s-6
FANUC SERVO AMPLIFIER βi series ....................................................................................................s-8
Warnings and Cautions Relating to Mounting...................................................................................s-8
Warning .....................................................................................................................................s-8
Caution.......................................................................................................................................s-9
Note..........................................................................................................................................s-10
Warnings and Cautions Relating to a Pilot Run...............................................................................s-10
Warning ...................................................................................................................................s-10
Caution.....................................................................................................................................s-11
Warnings and Cautions Relating to Maintenance ............................................................................s-12
Warning ...................................................................................................................................s-12
Caution.....................................................................................................................................s-13
Note..........................................................................................................................................s-13
s-1
SAFETY PRECAUTIONS B-65325EN/02
DEFINITION OF WARNING, CAUTION, AND NOTE

This manual includes safety precautions for protecting the user and preventing damage to the machine.
Precautions are classified into Warning and Caution according to their bearing on safety. Also,
supplementary information is described as a Note. Read the Warning, Caution, and Note thoroughly before
attempting to use the machine.
WARNING
Applied when there is a danger of the user being injured or when there is a
damage of both the user being injured and the equipment being damaged if the
approved procedure is not observed.
CAUTION
Applied when there is a danger of the equipment being damaged, if the approved
procedure is not observed.
NOTE
The Note is used to indicate supplementary information other than Warning and
Caution.
If a precaution described even as "CAUTION" is not followed, a serious result may be caused depending on
the status. Be sure to follow the precautions described as "WARNING" and "CAUTION" since they give
important information.
* Read this manual carefully, and store it in a safe place.
s-2
FANUC AC SERVO MOTOR βi series, FANUC AC SPINDLE MOTOR

βi series
Warning
WARNING
- Be sure to ground a motor frame.
To avoid electric shocks, be sure to connect the grounding terminal in the terminal box to the grounding
terminal of the machine.
- Before starting to connect a motor to electric wires, make sure they are
isolated from an electric power source.
A failure to observe this caution is vary dangerous because you may get electric shocks.
- Do not ground a motor power wire terminal or short-circuit it to another power

wire terminal.
A failure to observe this caution may cause electric shocks or a burned wiring.
- When connecting a cord such as a power line to the terminal block, use
specified tightening torque to firmly connect the cord.
If operation is performed with a loose terminal, the terminal block can overheat, resulting in a fire.
Moreover, a terminal can be detached, resulting in a ground fault, short circuit, or electric shock.
- Do not apply current when a terminal of the terminal block or the crimp
terminal of a power line is exposed.
If the hand or a conductive object touches a terminal of the terminal block or the crimp terminal of a power
line, you may get electric shocks. Attach an insulation cover (accessory) onto the terminal block. Moreover,
cover the crimp terminal at the tip of a power line with an insulation tube.
- Assemble and install a power connector securely.

If a power line is detached due to a failure in crimping or soldering, or a conductive area is exposed due to
a failure in shell assembly, you may get electric shocks.
- Do not touch a motor with a wet hand.

A failure to observe this caution is vary dangerous because you may get electric shocks.
- Before touching a motor, shut off the power to it.

Even if a motor is not rotating, there may be a voltage across the terminals of the motor.
Especially before touching a power supply connection, take sufficient precautions.
Otherwise you may get electric shocks.
- Do not touch any terminal of a motor for a while (at least 20 minutes) after the
power to the motor is shut off.
High voltage remains across power line terminals of a motor for a while after the power to the motor is shut
off. So, do not touch any terminal or connect it to any other equipment. Otherwise, you may get electric
shocks or the motor and/or equipment may get damaged.
- On the machine, install a stop device for securing safety.

The brake built into the servo motor is not a stop device for securing safety. The machine may not be held if
a failure occurs.
s-3
WARNING
- Do not enter the area under the vertical axis without securing safety.
If a vertical axis drop occurs unexpectedly, you may be injured.
- Fasten a motor firmly before driving the motor.

If a motor is driven when the motor is not fastened firmly or is fastened insufficiently, the motor can tumble
or is removed, resulting in a danger. If the motor mounting section is not sufficiently strong, the machine
may be damaged or the user may be injured.
- Do not get close to a rotary section of a motor when it is rotating.

When a motor is rotating, clothes or fingers can be caught, resulting in an injury.
- Do not drive a motor with an object such as a key exposed.

An object such as a key can be thrown away, resulting in an injury. Before rotating a motor, check that there
is no object that is thrown away by motor rotation.
- Do not apply a radial load exceeding the "allowable radial load".

The shaft can break, and components can be thrown away. When the vertical axis is involved, a vertical axis
drop can occur.
- To drive a motor, use a specified amplifier and parameters.

An incorrect combination of a motor, amplifier, and parameters may cause the motor to behave
unexpectedly. This is dangerous, and the motor may get damaged.
- Do not bring any dangerous stuff near a motor.

Motors are connected to a power line, and may get hot. If a flammable is placed near a motor, it may be
ignited, catch fire, or explode.
- Be safely dressed when handling a motor.

Wear safety shoes or gloves when handling a motor as you may get hurt on any edge or protrusion on it or
electric shocks.
- Use a crane or lift to move a motor from one place to another.

A motor is heavy, so that if you lift a motor by hand, you may be exposed to various risks. For example, the
waist can be damaged, and the motor can drop to injure you. Use equipment such as a crane as needed. (For
the weight of a motor, see Descriptions.)
- Do not touch a motor when it is running or immediately after it stops.

A motor may get hot when it is running. Do not touch the motor before it gets cool enough. Otherwise, you
may get burned.
- Be careful not get your hair or cloths caught in a fan.

Be careful especially for a fan used to generate an inward air flow.
Be careful also for a fan even when the motor is stopped, because it continues to rotate while the amplifier
is turned on.
- Install the components around a motor securely.

If a component is displaced or removed during motor rotation, a danger can result.
s-4
Caution
CAUTION
- Use the eyebolt of a motor to move the motor only.
When a motor is installed on a machine, do not move the machine by using the eyebolt of the motor.
Otherwise, the eyebolt and motor can be damaged.
- Do not disassemble a motor.

Disassembling a motor may cause a failure or trouble in it.
If disassembly is in need because of maintenance or repair, please contact a service representative of
FANUC.
For pulse coder replacement, refer to the Subsection, “Maintenance of a Detector”.
- Do not machine and modify a motor.

Do not machine and modify a motor in any case except when motor machining or modification is specified
by FANUC. Modifying a motor may cause a failure or trouble in it.
- Do not conduct dielectric strength or insulation test for a sensor.

Such a test can damage elements in the sensor.
- Be sure to connect motor cables correctly.

An incorrect connection of a cable cause abnormal heat generation, equipment malfunction, or failure.
Always use a cable with an appropriate current carrying capacity (or thickness). Refer to the Specification
manual of each motor for details of the connection method etc.
- Do not apply shocks to a motor or cause scratches to it.

If a motor is subjected to shocks or is scratched, its components may be adversely affected, resulting in
normal operation being impaired. Plastic components and sensors can be damaged easily. So, handle those
components very carefully. In particular, do not lift a motor by using a plastic component, connector,
terminal block, and so forth.
- Do not step or sit on a motor, and do not put a heavy object on a motor.
If you step or sit on a motor, it may get deformed or broken. Do not put a motor on another unless they are
in packages.
- When attaching a component having inertia, such as a pulley, to a motor,

ensure that any imbalance between the motor and component is minimized.
If there is a large imbalance, the motor may vibrates abnormally, resulting in the motor being broken.
- Be sure to attach a key to a motor with a keyed shaft.

If a motor with a keyed shaft runs with no key attached, it may impair torque transmission or cause
imbalance, resulting in the motor being broken.
- Use a motor under an appropriate environmental condition.

Using a motor in an adverse environment may cause a failure or trouble in it. Refer to Descriptions for
details of the operating and environmental conditions for motors.
- Do not apply a commercial power source voltage directly to a motor.

Applying a commercial power source voltage directly to a motor may result in its windings being burned.
Be sure to use a specified amplifier for supplying voltage to the motor.
s-5
CAUTION
- Do not use the brake built into a motor for braking.

The brake built into a servo motor is designed for holding. If the brake is used for braking, a failure can
occur.
- Ensure that motors are cooled if they are those that require forcible cooling.
If a motor that requires forcible cooling is not cooled normally, it may cause a failure or trouble. For a
fan-cooled motor, ensure that it is not clogged or blocked with dust and dirt. For a liquid-cooled motor,
ensure that the amount of the liquid is appropriate and that the liquid piping is not clogged. For both types,
perform regular cleaning and inspection.
- When storing a motor, put it in a dry (non-condensing) place at room

temperature (0 to 40 °C).
If a motor is stored in a humid or hot place, its components may get damaged or deteriorated. In addition,
keep a motor in such a position that its shaft is held horizontal and its terminal box is at the top.
- FANUC motors are designed for use with machines. Do not use them for any
other purpose.
If a FANUC motor is used for an unintended purpose, it may cause an unexpected symptom or trouble. If
you want to use a motor for an unintended purpose, previously consult with FANUC.
Note
NOTE
- Ensure that a base or frame on which a motor is mounted is strong enough.

Motors are heavy. If a base or frame on which a motor is mounted is not strong enough, it is impossible to
achieve the required precision.
- Do not remove a nameplate from a motor.

If a nameplate comes off, be careful not to lose it. If the nameplate is lost, the motor becomes unidentifiable,
resulting in maintenance becoming impossible.
- When testing the winding or insulation resistance of a motor, satisfy the

conditions stipulated in IEC60034.
Testing a motor under a condition severer than those specified in IEC60034 may damage the motor.
- For a motor with a terminal box, make a conduit hole for the terminal box in a
specified position.
When making a conduit hole, be careful not to break or damage unspecified portions. Refer to the
Descriptions.
- Before using a motor, measure its winding and insulation resistances, and
make sure they are normal.
Especially for a motor that has been stored for a prolonged period of time, conduct these checks. A motor
may deteriorate depending on the condition under which it is stored or the time during which it is stored. For
the winding resistances of motors, refer to the Descriptions, or ask FANUC. For insulation resistances, see
the following table.
s-6
NOTE
- To use a motor as long as possible, perform periodic maintenance and

inspection for it, and check its winding and insulation resistances.
Note that extremely severe inspections (such as dielectric strength tests) of a motor may damage its
windings. For the winding resistances of motors, refer to the Descriptions, or ask FANUC. For insulation
resistances, see the following table.
MOTOR INSULATION RESISTANCE MEASUREMENT

Measure an insulation resistance between each winding and motor frame using an insulation resistance
meter (500 VDC). Judge the measurements according to the following table. Make an insulation
resistance measurement on a single motor unit after detaching cords such as a power line.
Insulation resistance Judgment

100 MΩ or higher Acceptable
The winding has begun deteriorating. There is no problem with the performance at
10 to 100 MΩ
present. Be sure to perform periodic inspection.
The winding has considerably deteriorated. Special care is in need. Be sure to
1 to 10 MΩ
perform periodic inspection.
Lower than 1 MΩ Unacceptable. Replace the motor.
s-7
FANUC SERVO AMPLIFIER βi series

Warnings and Cautions Relating to Mounting
Warning
WARNING
- Check the specification code of the amplifier.
Check that the delivered amplifier is as originally ordered.
- Mount a ground fault interrupter.

To guard against fire and electric shock, fit the factory power supply or machine with a ground fault
interrupter (designed for use with an inverter).
- Securely ground the amplifier.

Securely connect the ground terminal and metal frame of the amplifier and motor to a common ground
plate of the power magnetics cabinet.
- Be aware of the weight of the amplifier and other components.

Control motor amplifiers and AC reactors are heavy. When transporting them or mounting them in the
cabinet, therefore, be careful not to injured yourself or damage the equipment. Be particularly carefull
not to jam your fingers between the cabinet and amplifier.
- Never ground or short-circuit either the power supply lines or power lines.
Protect the lines from any stress such as bending. Handle the ends appropriately.
- Ensure that the power supply lines, power lines, and signal lines are securely connected.
A loose screw, loose connection, or the like will cause a motor malfunction or overheating, or a ground
fault.
Be extremely careful with power supply lines, motor power lines, and DC link connections through
which a large amount of current passes, because a loose screw (or poor contact in a connector or poor
connection between a connector terminal and a cable) may cause a fire.
- Insulate all exposed parts that are charged.
- Never touch the regenerative discharge resistor or radiator directly.

The surface of the radiator and regenerative discharge unit become extremely hot. Never touch them
directly. An appropriate structure should also be considered.
- Close the amplifier cover after completing the wiring.

Leaving the cover open presents a danger of electric shock.
- Do not disassemble the amplifier.
- Ensure that the cables used for the power supply lines and power lines are of the appropriate
diameter and temperature ratings.
- Do not apply an excessively large force to plastic parts.

If a plastic section breaks, it may cause internal damage, thus interfering with normal operation. The
edge of a broken section is likely to be sharp and, therefore, presents a risk of injury.
s-8
Caution
CAUTION
- Do not step or sit on the amplifier.

Also, do not stack unpacked amplifiers on top of each other.
- Use the amplifier in an appropriate environment.

See the allowable ambient temperatures and other requirements, given in the corresponding
descriptions.
- Protect the amplifier from corrosive or conductive mist or drops of water.

Use a filter if necessary.
- Protect the amplifier from impact.

Do not place anything on the amplifier.
- Do not block the air inlet to the radiator.

A deposit of coolant, oil mist, or chips on the air inlet will result in a reduction in the cooling efficiency.
In some cases, the required efficiency cannot be achieved. The deposit may also lead to a reduction in
the useful life of the semiconductors. Especially, when outside air is drawn in, mount filters on both
the air inlet and outlet. These filters must be replaced regularly.
So, an easy-to-replace type of filter should be used.
- Connect the power supply lines and power lines to the appropriate terminals and connectors.
- Connect the signal lines to the appropriate connectors.
- Before connecting the power supply wiring, check the supply voltage.
Check that the supply voltage is within the range specified in this manual, then connect the power
supply lines.
- Ensure that the combination of motor and amplifier is appropriate.
- Ensure that valid parameters are specified.

Specifying an invalid parameter for the combination of motor and amplifier may not only prevent
normal operation of the motor but also result in damage to the amplifier.
- Ensure that the amplifier and peripheral equipment are securely connected.
Check that the magnetic contactor, circuit breaker, and other devices mounted outside the amplifier are
securely connected to each other and that those devices are securely connected to the amplifier.
- Check that the amplifier is securely mounted in the power magnetics cabinet.
If any clearance is left between the power magnetics cabinet and the surface on which the amplifier is
mounted, dust entering the gap may build up and prevent the normal operation of the amplifier.
- Apply appropriate countermeasures against noise.

Adequate countermeasures against noise are required to maintain normal operation of the amplifier.
For example, signal lines must be routed away from power supply lines and power lines.
s-9
Note
NOTE
- Keep the nameplate clearly visible.
- Keep the legend on the nameplate clearly visible.
- After unpacking the amplifier, carefully check for any damage.
- Mount the amplifier in a location where it can be easily accessed periodic inspection and daily
maintenance.
- Leave sufficient space around the machine to enable maintenance to be performed easily.
Do not place any heavy objects such that they would interfere with the opening of the doors.
- Keep the parameter table and spare parts at hand.

Also, keep the specifications at hand. These items must be stored in a location where they can be
retrieved immediately.
- Provide adequate shielding.

A cable to be shielded must be securely connected to the ground plate, using a cable clamp or the like.
Warnings and Cautions Relating to a Pilot Run

Warning
WARNING
- Before turning on the power, check that the cables connected to the power magnetics cabinet
and amplifier, as well as the power lines and power supply lines, are securely connected. Also,
check that no lines are slack.
A loose screw, loose connection, or the like will cause a motor malfunction or overheating, or a ground
fault. Be extremely careful with power supply lines, motor power lines, and DC link connections
through which a large amount of current passes, because a loose screw (or poor contact in a connector
or poor connection between a connector terminal and a cable) may cause a fire.
- Before turning on the power, ensure that the power magnetics cabinet is securely grounded.
- Before turning on the power, check that the door of the power magnetics cabinet and all other
doors are closed.
Ensure that the door of the power magnetics cabinet containing the amplifier, and all other doors, are
securely closed. During operation, all doors must be closed and locked.
- Apply extreme caution if the door of the power magnetics cabinet or another door must be
opened.
Only a person trained in the maintenance of the corresponding machine or equipment should open the
door, and only after shutting off the power supply to the power magnetics cabinet (by opening both the
input circuit breaker of the power magnetics cabinet and the factory switch used to supply power to the
cabinet). If the machine must be operated with the door open to enable adjustment or for some other
purpose, the operator must keep his or her hands and tools well away from any dangerous voltages.
Such work must be done only by a person trained in the maintenance of the machine or equipment.
s-10
WARNING
- When operating the machine for the first time, check that the machine operates as instructed.
To check whether the machine operates as instructed, first specify a small value for the motor, then
increase the value gradually. If the motor operates abnormally, perform an emergency stop
immediately.
- After turning on the power, check the operation of the emergency stop circuit.
Press the emergency stop button to check that the motor stops immediately, and that the power being
supplied to the amplifier is shut off by the magnetic contactor.
- Before opening a door or protective cover of a machine to enable adjustment of the machine,
first place the machine in the emergency stop state and check that the motor has stopped.
Caution
CAUTION
- Note whether an alarm status relative to the amplifier is displayed at power-up or during
operation.
If an alarm is displayed, take appropriate action as explained in the maintenance manual. If the work to
be done requires that the door of the power magnetics cabinet be left open, the work must be carried
out by a person trained in the maintenance of the machine or equipment. Note that if some alarms are
forcibly reset to enable operation to continue, the amplifier may be damaged. Take appropriate action
according to the contents of the alarm.
- Before operating the motor for the first time, mount and adjust the position and speed sensors.
Following the instructions given in the maintenance manual, adjust the position and speed sensors for
the spindle so that an appropriate waveform is obtained.
If the sensors are not properly adjusted, the motor may not rotate normally or the spindle may fail to
stop as desired.
- If the motor makes any abnormal noise or vibration while operating, stop it immediately.
Note that if operation is continued in spite of there being some abnormal noise or vibration, the
amplifier may be damaged. Take appropriate corrective action, then resume operation.
- Observe the ambient temperature and output rating requirements.

The continuous output rating or continuous operation period of some amplifiers may fall as the
ambient temperature increases. If the amplifier is used continuously with an excessive load applied,
the amplifier may be damaged.
- Unless otherwise specified, do not insert or remove any connector while the power is turned on.
Otherwise, the amplifier may fail.
s-11
Warnings and Cautions Relating to Maintenance

Warning
WARNING
- Read the maintenance manual carefully and ensure that you are totally familiar with its
contents.
The maintenance manual describes daily maintenance and the procedures to be followed in the event
of an alarm being issued. The operator must be familiar with these descriptions.
- Notes on replacing a fuse or PC board

1) Before starting the replacement work, ensure that the circuit breaker protecting the power
magnetics cabinet is open.
2) Check that the red LED that indicates that charging is in progress is not lit.
The position of the charging LED on each model of amplifier is given in this manual. While the
LED is lit, hazardous voltages are present inside the unit, and thus there is a danger of electric
shock.
3) Some PC board components become extremely hot. Be careful not to touch these components.
4) Ensure that a fuse having an appropriate rating is used.
5) Check the specification code of a PC board to be replaced. If a modification drawing number is
indicated, contact FANUC before replacing the PC board.
Also, before and after replacing a PC board, check its pin settings.
6) After replacing the fuse, ensure that the screws are firmly tightened. For a socket-type fuse,
ensure that the fuse is inserted correctly.
7) After replacing the PC board, ensure that it is securely connected.
8) Ensure that all power lines, power supply lines, and connectors are securely connected.
- Take care not to lose any screws.

When removing the case or PC board, take care not to lose any screws. If a screw is lost inside the nit
and the power is turned on, the machine may be damaged.
- Notes on replacing the battery of the absolute pulse coder

Replace the battery only while the power is on. If the battery is replaced while the power is turned off,
the stored absolute positioning data will be lost. If the battery is installed in the βi series servo
amplifier, open the door of the power magnetics cabinet and enter the emergency stop state without
turning off the control power. Interrupt the input of the power system of the amplifier and then replace
the battery. Replacement work should be done only by a person who is trained in the related
maintenance and safety requirements. The power magnetics cabinet in which the servo amplifier is
mounted has a high-voltage section. This section presents a severe risk of electric shock.
- Check the number of any alarm.

If the machine stops upon an alarm being issued, check the alarm number. Some alarms indicate that a
component must be replaced. If the power is reconnected without first replacing the failed component,
another component may be damaged, making it difficult to locate the original cause of the alarm.
- Before resetting an alarm, ensure that the original cause of the alarm has been removed.
- Contact FANUC whenever a question relating to maintenance arises.
- Notes on removing the amplifier

Before removing the amplifier, first ensure that the power is shut off. Be careful not to jam your fingers
between the power magnetics cabinet and amplifier.
s-12
Caution
CAUTION
- Tighten all screws firmly.
- Check the specification code of the fuse, PC board, and other components.
When replacing a fuse or PC board, first check the specification code of the fuse or PC board, then
mount it in the correct position. The machine will not operate normally if a fuse or PC board having
other than the correct specification code is mounted, or if a fuse or PC board is mounted in the wrong
position.
- Mount the correct cover.

The cover on the front of the amplifier carries a label indicating a specification code. When mounting
a previously removed front cover, take care to mount it on the unit from which it was removed.
- Notes on cleaning the heat sink and fan

1) A dirty heat sink or fan results in reduced semiconductor cooling efficiency, which degrades
reliability. Periodic cleaning is necessary.
2) Using compressed air for cleaning scatters the dust. A deposit of conductive dust on the amplifier
or peripheral equipment will result in a failure.
3) To clean the heat sink, do so only after turning the power off and ensuring that the heat sink has
cooled to room temperature. The heat sink becomes extremely hot, such that touching it during
operation or immediately after power-off is likely to cause a burn. Be extremely careful when
touching the heat sink.
Note
NOTE
- Ensure that the battery connector is correctly inserted.

If the power is shut off while the battery connector is not connected correctly, the absolute position
data for the machine will be lost.
- Store the manuals in a safe place.

The manuals should be stored in a location where they can be accessed immediately it so required
during maintenance work.
- Notes on contacting FANUC

Inform FANUC of the details of an alarm and the specification code of the amplifier so that any
components required for maintenance can be quickly secured, and any other necessary action can be
taken without delay.
s-13
B-65325EN/02 PREFACE
PREFACE
Organization of this manual
This manual describes information necessary to maintain FANUC SERVO AMPLIFIER βi series products,
such as a βiSV and βiSVSP and FANUC SERVO MOTOR βi series and FANUC SPINDLE MOTOR βi
series products.
Parts I and II explain the start-up procedure and troubleshooting for the βi series βiSV.
Parts III and IV explain the start-up procedure and troubleshooting for the βi series βiSVSP.
Parts V and VI explain the maintenance for servo motor βi series and spindle motor βi series.
The abbreviations listed below are used in this manual.

Product name Abbreviations
FANUC Series 30i-MODEL B FS 30i-B
FANUC Series Power Motion i-MODEL A FS PMi-A
FANUC Series 30i-MODEL A FS 30i-A
FANUC Series 0i/0i Mate-MODEL D FS 0i/0i Mate-D
FANUC Series 0i/0i Mate-MODEL C FS 0i/0i Mate-C
FANUC Series 0i/0i Mate-MODEL B FS 0i/0i Mate-B
FANUC Series 15i FS15i
FANUC Power Mate i–MODEL D
PMi
FANUC Power Mate i–MODEL H
FANUC SERVO AMPLIFIER βi series βiSV βi SV
FANUC SERVO AMPLIFIER βi series βiSVSP βi SVSP
* In this manual, the parameter numbers of servo parameters are sometimes indicated without CNC
product names as follows:
Servo parameter function name or bit
Series 15i
No. 1877 (FS15i) Overload protection coefficient (OVC1)
No. 2062 (FS16i)
Series 16i, 18i, 21i, 0i, PMi
* The manuals shown below provide information related to this manual. This manual may refer you to
these manuals.
1) FANUC SERVO AMPLFIER βi series DESCRIPTIONS B-65322EN

2) FANUC AC SERVO MOTOR βi series DESCRIPTIONS B-65302EN
3) FANUC AC SPINDLE MOTOR βi series DESCRIPTIONS B-65312EN
4) FANUC AC SERVO MOTOR αi series/FANUC AC SERVO MOTOR βi series,
FANUC LINEAR MOTOR LiS series, FANUC SYNCHRONOUS BUILT-IN SERVO
MOTOR DiS series PARAMETER MANUAL B-65270EN
5) FANUC AC SPINDLE MOTOR αi/βi series, BUILT-IN SPINDLE MOTOR Bi series
PARAMETER MANUAL B-65280EN
p-1
B-65325EN/02 TABLE OF CONTENTS
TABLE OF CONTENTS
SAFETY PRECAUTIONS............................................................................s-1
DEFINITION OF WARNING, CAUTION, AND NOTE ............................................. s-2
FANUC AC SERVO MOTOR βi series, FANUC AC SPINDLE MOTOR βi series .. s-3
Warning ................................................................................................................................s-3
Caution..................................................................................................................................s-5
Note.......................................................................................................................................s-6
FANUC SERVO AMPLIFIER βi series .................................................................... s-8
Warnings and Cautions Relating to Mounting .....................................................................s-8
Warning ............................................................................................................................. s-8
Caution .............................................................................................................................. s-9
Note ................................................................................................................................. s-10
Warnings and Cautions Relating to a Pilot Run .................................................................s-10
Warning ........................................................................................................................... s-10
Caution ............................................................................................................................ s-11
Warnings and Cautions Relating to Maintenance...............................................................s-12
Warning ........................................................................................................................... s-12
Caution ............................................................................................................................ s-13
Note ................................................................................................................................. s-13
PREFACE ....................................................................................................p-1
I. START-UP PROCEDURE FOR βiSV

1 OVERVIEW ............................................................................................. 3
2 CONFIGURATIONS ................................................................................ 4
2.1 CONFIGURATIONS ...................................................................................... 4
2.2 MAJOR COMPONENTS ............................................................................... 5
2.2.1 Servo Amplifier........................................................................................................5
3 START-UP PROCEDURE....................................................................... 6
3.1 START-UP PROCEDURE (OVERVIEW) ...................................................... 6
3.2 CONNECTING THE POWER ........................................................................ 7
3.2.1 Checking the Voltage and Capacity of the Power....................................................7
3.2.2 Connecting a Protective Ground ..............................................................................8
3.2.3 Selecting the Ground Fault Interrupter That Matches the Leakage Current ............8
3.3 INITIALIZING PARAMETERS (SWITCHES AND DUMMY CONNECTORS) 9
3.4 INITIALIZING SETTINGS .............................................................................. 9
4 CONFIRMATION OF THE OPERATION .............................................. 10
4.1 SERVO AMPLIFIER MODULE .................................................................... 10
4.1.1 Check Procedure.....................................................................................................10
4.1.2 VRDY-OFF Alarm Indicated on the CNC Screen .................................................12
4.1.3 Method for Observing Motor Current ....................................................................14
II. TROUBLESHOOTING FOR βiSV

1 OVERVIEW ........................................................................................... 19
2 ALARM NUMBERS AND BRIEF DESCRIPTIONS .............................. 20
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TABLE OF CONTENTS B-65325EN/02
2.1 FOR Series 30i/31i/32i/35i-B, Power Motion i-A ......................................... 20

2.1.1 Servo Alarm ...........................................................................................................20
2.2 FOR Series 30i/31i/32i-A ............................................................................ 20
2.2.1 Servo Alarm ...........................................................................................................20
2.3 FOR Series 0i/0i Mate-D ............................................................................. 21
2.3.1 Servo Alarm ...........................................................................................................21
2.4 FOR Series 15i ............................................................................................ 22
2.4.1 Servo Alarm ...........................................................................................................22
2.5 FOR Series 16i, 18i, 20i, 21i, 0i, AND Power Mate i .................................. 23
2.5.1 Servo Alarm ...........................................................................................................23
3 TROUBLESHOOTING AND ACTION................................................... 24

3.1 SERVO AMPLIFIER MODULE .................................................................... 24
3.1.1 Converter: DC Link Undervoltage .........................................................................24
3.1.2 Converter: DC Link Overvoltage ...........................................................................25
3.1.3 Converter: Excessive Deceleration Power .............................................................25
3.1.4 Converter: Control Power Supply Undervoltage ...................................................26
3.1.5 Inverter: Internal Cooling Fan Stopped..................................................................26
3.1.6 Inverter: Cooling Fan Stopped of the Radiator ......................................................26
3.1.7 Inverter: IPM Alarm ...............................................................................................26
3.1.8 Inverter: IPM Alarm (OH)......................................................................................27
3.1.9 Inverter: Motor Current Alarm...............................................................................27
3.1.10 FSSB Communication Error...................................................................................28
3.2 SERVO SOFTWARE................................................................................... 28
3.2.1 Servo Adjustment Screen .......................................................................................28
3.2.2 Diagnosis Screen ....................................................................................................30
3.2.3 Overload Alarm (Soft Thermal, OVC)...................................................................30
3.2.4 Feedback Disconnected Alarm...............................................................................31
3.2.5 Overheat Alarm ......................................................................................................32
3.2.6 Invalid Servo Parameter Setting Alarm..................................................................32
3.2.7 Alarms Related to Pulsecoder and Separate Serial Detector ..................................33
3.2.8 Other Alarms ..........................................................................................................34
4 REPLACING SERVO AMPLIFIER COMPONENTS ............................. 36

4.1 REPLACEMENT OF A FAN MOTOR .......................................................... 36
4.1.1 For the Internal Cooling Fan Motor: βiSV4, βiSV20 ............................................36
4.1.2 For the Internal Cooling Fan Motor: βiSV40, βiSV80, βiSV10HV, βiSV20HV,
βiSV40HV..............................................................................................................37
4.1.3 For the Internal Cooling Fan Motor: βiSV20/20, βiSV40/40 ................................38
4.1.4 For the Radiator Cooling Fan Motor: βiSV40, βiSV80, βiSV10HV, βiSV20HV,
βiSV40HV..............................................................................................................39
4.2 REPLACING BATTERY FOR ABSOLUTE PULSECODERS ...................... 40
4.2.1 Overview ................................................................................................................40
4.2.2 Replacing Batteries.................................................................................................40
4.2.3 Replacing the Batteries in a Separate Battery Case................................................41
4.2.4 Replacing the Battery Built into the Servo Amplifier ............................................41
4.2.5 Notes on Replacing a Battery (Supplementary Explanation).................................43
4.2.5.1 Battery connection modes.................................................................................. 43
4.2.5.2 Connecting the battery for the β series motor.................................................... 45
4.2.5.3 Notes on attaching connectors ........................................................................... 45
4.3 HOW TO REPLACE THE FUSES AND PRINTED CIRCUIT BOARDS....... 47
4.3.1 How to Replace the Fuses and Printed Circuit Boards...........................................47
4.3.2 Fuse Locations........................................................................................................50
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III. START-UP PROCEDURE FOR βiSVSP

1 OVERVIEW ........................................................................................... 53
2 CONFIGURATIONS .............................................................................. 54
2.1 CONFIGURATIONS .................................................................................... 54
2.2 MAJOR COMPONENTS ............................................................................. 55
2.2.1 βiSVSP ...................................................................................................................55
2.2.2 βiSVSPc .................................................................................................................56
3 START-UP PROCEDURE..................................................................... 57
3.1 START-UP PROCEDURE (OVERVIEW) .................................................... 57
3.2 CONNECTING THE POWER ...................................................................... 58
3.2.1 Checking the Voltage and Capacity of the Power..................................................58
3.2.2 Connecting a Protective Ground ............................................................................60
3.2.3 Selecting the Ground Fault Interrupter That Matches the Leakage Current ..........60
3.3 INITIALIZING PARAMETERS ..................................................................... 61
4 CONFIRMATION OF THE OPERATION .............................................. 62
4.1 OUTLINE OF βiSVSP.................................................................................. 62
4.1.1 Connector and STATUS LED Locations ...............................................................62
4.1.2 Start-up Procedure..................................................................................................65
4.2 βiSVSP COMMON POWER SUPPLY UNIT................................................ 66
4.2.1 The LED (STATUS Indicator) Is Off. ...................................................................66
4.2.2 Checking Method when Magnetic Contactor Is not Switched On .........................66
4.2.3 Check Terminal on the Printed-circuit Board.........................................................67
4.3 βiSVSP SPINDLE UNIT .............................................................................. 68
4.3.1 STATUS 1 Indicator ..............................................................................................68
4.3.2 Troubleshooting at Startup .....................................................................................69
4.3.2.1 The STATUS 1 indicator is blinking with "--."................................................. 69
4.3.2.2 The motor does not turn..................................................................................... 69
4.3.2.3 A specified speed cannot be obtained................................................................ 69
4.3.2.4 When cutting is not performed, the spindle vibrates, making noise. ................. 70
4.3.2.5 An overshoot or hunting occurs......................................................................... 70
4.3.2.6 Cutting power weakens or acceleration/deceleration slows down..................... 70
4.3.3 Status Error Indication Function ............................................................................71
4.3.4 Observing Data Using the SERVO GUIDE ...........................................................74
4.3.4.1 Overview ........................................................................................................... 74
4.3.4.2 Usable series and editions.................................................................................. 74
4.3.4.3 List of spindle data that can be observed using the SERVO GUIDE ................ 75
4.3.4.4 About the spindle control and spindle status signals ......................................... 76
4.3.4.5 Example of observing data ................................................................................ 77
4.3.5 Spindle Check Board..............................................................................................78
4.3.5.1 Spindle check board specifications.................................................................... 78
4.3.5.2 Spindle check board connection ........................................................................ 78
4.3.5.3 Check terminal output signals............................................................................ 78
4.3.6 Checking the Feedback Signal Waveform .............................................................80
4.3.6.1 αi M sensor, αi MZ sensor, and αi BZ sensor .................................................. 80
4.3.6.2 αi CZ sensor ...................................................................................................... 81
4.3.6.3 α position coder S.............................................................................................. 81
4.4 βiSVSP SERVO UNIT ................................................................................. 82
4.4.1 Checking the STATUS 2 Indicator ........................................................................82
4.4.2 VRDY-OFF Alarm Indicated on the CNC Screen .................................................82
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4.4.3 Method for Observing Motor Current ....................................................................84
IV. TROUBLESHOOTING FOR βiSVSP

1 OVERVIEW ........................................................................................... 89
2 ALARM NUMBERS AND BRIEF DESCRIPTIONS .............................. 90
2.1 For Series 0i/0i Mate-D ............................................................................... 90
2.1.1 Servo Alarm ...........................................................................................................90
2.1.2 Spindle Alarm.........................................................................................................91
2.2 For Series 0i/0i Mate-B,C ............................................................................ 93
2.2.1 Servo Alarm ...........................................................................................................93
2.2.2 Spindle Alarm.........................................................................................................94
3 TROUBLESHOOTING AND ACTION................................................... 96

3.1 COMMON TO SERVO AND SPINDLE UNITS ............................................ 96
3.1.1 STATUS2 Alarm Code - STATUS1 Alarm Code 04 (SP9004) ............................96
3.1.8 STATUS2 Alarm Code - STATUS1 Alarm Code b1 (SP9111) ............................98
3.2 SERVO UNIT............................................................................................... 98
3.2.1 STATUS2 Alarm Code 1 (SV0444).......................................................................99
3.2.5 STATUS2 Alarm Code P (SV0604) ....................................................................100
3.2.6 STATUS2 Alarm Code 8. , 9. , A. (SV0449).......................................................100
3.2.7 STATUS2 Alarm Code 8. , 9. , A. (SV0603).......................................................100
3.2.8 STATUS2 Alarm Code b , c , d (SV0438)...........................................................100
3.2.9 Alarm Code "-" Flashing ......................................................................................101
3.2.10 STATUS2 Alarm Code U ....................................................................................102
3.2.11 Alarm Code L.......................................................................................................103
3.3 SERVO SOFTWARE................................................................................. 103
3.3.1 Servo Tuning Screen ............................................................................................103
3.3.2 Diagnosis Screen ..................................................................................................104
3.3.3 Overload Alarm (Soft Thermal, OVC).................................................................105
3.3.4 Feedback Disconnected Alarm.............................................................................106
3.3.5 Overheat Alarm ....................................................................................................106
3.3.6 Invalid Servo Parameter Setting Alarm................................................................107
3.3.7 Alarms Related to Pulsecoder and Separate Serial Detector ................................107
3.3.8 Other Alarms ........................................................................................................109
3.4 SPINDLE UNIT .......................................................................................... 110
3.4.1 Alarm Code 01 (SP9001) .....................................................................................110
3.4.2 Alarm Code 02 (SP9002) .....................................................................................111
3.4.3 Alarm Code 03 (SP9003) .....................................................................................111
3.4.4 Alarm Code 06 (SP9006) .....................................................................................112
3.4.5 Alarm Code 07 (SP9007) .....................................................................................112
3.4.6 Alarm Code 09 (SP9009) .....................................................................................112
3.4.7 Alarm Code 10 (SP9010) .....................................................................................113
3.4.8 Alarm Code 12 (SP9012) .....................................................................................113
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3.4.9 Alarm Code 13 (SP9013) .....................................................................................114
3.4.10 Alarm Code 14 (SP9014) .....................................................................................114
3.4.11 Alarm Code 15 (SP9015) .....................................................................................114
3.4.12 Alarm Code 16 (SP9016) .....................................................................................114
3.4.13 Alarm Code 17 (SP9017) .....................................................................................115
3.4.14 Alarm Code 18 (SP9018) .....................................................................................115
3.4.15 Alarm Codes 19 and 20 (SP9019, SP9020)..........................................................115
3.4.16 Alarm Code 21 (SP9021) .....................................................................................115
3.4.17 Alarm Code 22 (SP9022) .....................................................................................115
3.4.18 Alarm Code 24 (SP9024) .....................................................................................115
3.4.19 Alarm Code 27 (SP9027) .....................................................................................116
3.4.20 Alarm Code 29 (SP9029) .....................................................................................117
3.4.21 Alarm Code 31 (SP9031) .....................................................................................118
3.4.22 Alarm Code 32 (SP9032) .....................................................................................118
3.4.23 Alarm Code 34 (SP9034) .....................................................................................118
3.4.24 Alarm Code 35 (SP9035) .....................................................................................119
3.4.25 Alarm Code 36 (SP9036) .....................................................................................119
3.4.26 Alarm Code 37 (SP9037) .....................................................................................120
3.4.27 Alarm Code 41 (SP9041) .....................................................................................120
3.4.28 Alarm Code 42 (SP9042) .....................................................................................121
3.4.29 Alarm Code 43 (SP9043) .....................................................................................121
3.4.30 Alarm Code 46 (SP9046) .....................................................................................121
3.4.31 Alarm Code 47 (SP9047) .....................................................................................121
3.4.32 Alarm Code 49 (SP9049) .....................................................................................122
3.4.33 Alarm Code 50 (SP9050) .....................................................................................122
3.4.34 Alarm Codes 52 and 53 (SP9052, SP9053)..........................................................122
3.4.35 Alarm Code 54 (SP9054) .....................................................................................122
3.4.36 Alarm Code 55 (SP9055) .....................................................................................123
3.4.37 Alarm Code 56 (SP9056) .....................................................................................123
3.4.38 Alarm Code 61 (SP9061) .....................................................................................123
3.4.39 Alarm Code 66 (SP9066) .....................................................................................124
3.4.40 Alarm Code 67 (SP9067) .....................................................................................124
3.4.41 Alarm Code 68 (SP9068) .....................................................................................124
3.4.42 Alarm Code 69 (SP9069) .....................................................................................124
3.4.43 Alarm Code 70 (SP9070) .....................................................................................124
3.4.44 Alarm Code 71 (SP9071) .....................................................................................124
3.4.45 Alarm Code 72 (SP9072) .....................................................................................125
3.4.46 Alarm Code 73 (SP9073) .....................................................................................125
3.4.47 Alarm Code 74 (SP9074) .....................................................................................126
3.4.48 Alarm Code 75 (SP9075) .....................................................................................126
3.4.49 Alarm Code 76 (SP9076) .....................................................................................126
3.4.50 Alarm Code 77 (SP9077) .....................................................................................126
3.4.51 Alarm Code 78 (SP9078) .....................................................................................126
3.4.52 Alarm Code 79 (SP9079) .....................................................................................126
3.4.53 Alarm Code 81 (SP9081) .....................................................................................126
3.4.54 Alarm Code 82 (SP9082) .....................................................................................127
3.4.55 Alarm Code 83 (SP9083) .....................................................................................128
3.4.56 Alarm Code 84 (SP9084) .....................................................................................128
3.4.57 Alarm Code 85 (SP9085) .....................................................................................129
3.4.58 Alarm Code 86 (SP9086) .....................................................................................129
3.4.59 Alarm Code 87 (SP9087) .....................................................................................129
3.4.60 Alarm Code 88 (SP9088) .....................................................................................129
3.4.61 Alarm Code 92 (SP9092) .....................................................................................129
3.4.62 Alarm Codes A, A1,A2 ........................................................................................130
3.4.63 Alarm Code b0 (SP9110) .....................................................................................130
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3.4.64 Alarm Codes C0, C1, and C2 (SP9120, SP9121, and SP9122) ...........................130
3.4.65 Alarm Code C3 (SP9123).....................................................................................130
3.4.66 Alarm Code C8 (SP9128).....................................................................................131
3.4.67 Alarm Code C9 (SP9129).....................................................................................131
3.4.68 Alarm Code d1 (SP9131) .....................................................................................131
3.4.69 Alarm Code d2 (SP9132) .....................................................................................131
3.4.70 Alarm Code d3 (SP9133) .....................................................................................131
3.4.71 Alarm Code d4 (SP9134) .....................................................................................132
3.4.72 Alarm Code d6 (SP9136) .....................................................................................132
3.4.73 Alarm Code d7 (SP9137) .....................................................................................132
3.4.74 Alarm Code d8 (SP9138) .....................................................................................132
3.4.75 Alarm Code d9 (SP9139) .....................................................................................132
3.4.76 Alarm Code E0 (SP9140).....................................................................................132
3.4.77 Alarm Code E1 (SP9141).....................................................................................133
3.4.78 Alarm Code E2 (SP9142).....................................................................................133
3.4.79 Alarm Code F8 (SP9158) .....................................................................................133
3.4.80 Alarm Code G6 (SP9166) ....................................................................................133
3.4.81 Alarm Code G7 (SP9167) ....................................................................................133
3.4.82 Other Alarms ........................................................................................................134
4 REPLACING SERVO AMPLIFIER COMPONENTS ........................... 135

4.1 REPLACEMENT OF A FAN MOTOR ........................................................ 135
4.1.1 For the Internal Cooling Fan Motor: Model βiSVSP*-18 Only...........................135
4.1.2 External Cooling Fan Motor.................................................................................136
4.2 REPLACING BATTERY FOR ABSOLUTE PULSECODERS .................... 137
4.2.1 Overview ..............................................................................................................137
4.2.2 Replacing Batteries...............................................................................................137
4.2.3 Replacing the Batteries in a Separate Battery Case..............................................138
4.2.4 Replacing the Battery Built into the Servo Amplifier ..........................................138
4.2.5 Notes on Replacing a Battery (Supplementary Explanation)...............................140
4.2.5.1 Battery connection modes................................................................................ 140
4.2.6 Notes on Attaching Connectors............................................................................142
4.3 HOW TO REPLACE THE FUSES AND PRINTED CIRCUIT BOARDS..... 143
4.3.1 How to Replace the Fuses and Printed Circuit Boards.........................................143
4.3.2 Fuse Locations......................................................................................................144
V. MOTOR/DETECTOR/AMPLIFIER PREVENTIVE MAINTENANCE

1 MOTOR/DETECTOR/AMPLIFIER PREVENTIVE MAINTENANCE ... 147
1.1 LIST OF MANUALS RELATED TO MOTORS AND AMPLIFIERS ............ 148
1.2 PREVENTIVE MAINTENANCE OF MOTORS AND DETECTORS........... 149
1.2.1 Warnings, Cautions, and Notes on Preventive Maintenance of Motors and
Detectors...............................................................................................................149
1.2.2 Preventive Maintenance of a Motor (Common to All Models)............................151
1.2.2.1 Main inspection items...................................................................................... 151
1.2.2.2 Periodic cleaning of a motor............................................................................ 154
1.2.2.3 Notes on motor cleaning.................................................................................. 154
1.2.2.4 Notes on the cutting fluid (informational) ....................................................... 154
1.2.3 Preventive Maintenance of a Linear Motor..........................................................155
1.2.3.1 Appearance inspection of the linear motor (magnet plate) .............................. 155
1.2.4 Maintenance of a Detector....................................................................................155
1.2.4.1 Alarms for built-in detectors (αi and βi Pulsecoders) and troubleshooting
actions.............................................................................................................. 156
1.2.4.2 Alarms for separate detectors and troubleshooting actions ............................. 156
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1.2.4.3 Detailed troubleshooting methods ................................................................... 158
1.2.4.4 Maintenance of βiS servo motor ( 40 and 60) Pulsecoders ....................... 159
1.3 PREVENTIVE MAINTENANCE OF SERVO AMPLIFIERS ....................... 160
1.3.1 Warnings, Cautions, and Notes on Operation of Servo Amplifiers .....................160
1.3.2 Preventive Maintenance of a Servo Amplifier .....................................................163
1.3.3 Maintenance of a Servo Amplifier .......................................................................164
1.3.3.1 Display of the servo amplifier operation status ............................................... 164
1.3.3.2 Replacement of a fan motor............................................................................. 164
1.4 REPLACING BATTERY FOR ABSOLUTE PULSECODERS .................... 164
VI. MOTOR MAINTENANCE

1 SERVO MOTOR MAINTENANCE ...................................................... 167
1.1 SERVO MOTOR MAINTENANCE PARTS ................................................ 167
1.1.1 Pulsecoder ............................................................................................................167
2 SPINDLE MOTOR MAINTENANCE PARTS ...................................... 168

2.1 SPINDLE MOTOR MAINTENANCE PARTS ............................................. 168
APPENDIX
A MEASURING SERVO MOTOR WAVEFORMS (TCMD, VCMD) ........ 171
B USING THE SPINDLE CHECK BOARD............................................. 173
B.1 OBSERVING DATA USING THE SPINDLE CHECK BOARD ................... 173
B.1.1 Overview ..............................................................................................................173
B.1.2 Main Characteristics.............................................................................................173
B.1.3 Observation Method .............................................................................................173
B.1.4 Setting Data to Be Observed ................................................................................173
B.1.5 Descriptions and Initial Values of Addresses.......................................................174
B.1.6 Principles in Outputting the Internal Data of the Spindle ....................................174
B.1.7 Data Numbers.......................................................................................................177
B.1.8 Examples of Observing Data................................................................................178
B.2 CHECKING PARAMETERS USING THE SPINDLE CHECK BOARD ...... 179
B.2.1 Overview ..............................................................................................................179
B.2.1.1 Checking parameters ....................................................................................... 179
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I. START-UP PROCEDURE FOR βiSV
B-65325EN/02 START-UP PROCEDURE FOR βiSV 1.OVERVIEW
1 OVERVIEW
This part describes the units and components of the servo amplifiers. It also explains the following
information necessary to start up the servo amplifier:
• Configurations
• Start-up procedure
• Confirmation of the operation
• Periodic maintenance of servo amplifier
-3-
2.CONFIGURATIONS START-UP PROCEDURE FOR βiSV B-65325EN/02
2 CONFIGURATIONS
2.1 CONFIGURATIONS
The servo amplifier βi SV consists of the units and components listed below:
(1) Servo amplifier module (βi SV) (basic)
(2) AC line filter (basic)
(3) Connectors (for connecting cables) (basic)
(4) Fuses (option)
(5) Power transformer (option)
Constituent (example)
Control power
supply
24VDC ± 10%
βiSV βiSV
3φ
200 to 240 VAC Circ uit Magnetic AC line
breker contactor filter
or
1φ
220 to 240 VAC Servo Servo
(4A or 20 A mod els motor motor
only)
: Basic
: Option
: Units prepared by the machine tool builder
NOTE
1 Be sure to use a stabilized power supply as the 24VDC amplifier power supply. Do
not use the 24VDC motor brake power supply as the 24VDC amplifier power
supply.
2 A circuit breakers , magnetic contactor, and AC line filter are always required.
3 To protect the unit from surge currents caused by lightning, connect surge
absorbers between lines, and between the lines and ground, at the power inlet of
the power magnetics cabinet.
WARNING
Take great care to prevent incorrect operation of the motor or a ground fault
caused by looseness of a screw, incorrect insertion of a connector, etc.
Take great care to prevent fire caused by looseness of a screw (or incorrect
contact with a connector or incorrect connection between a connector terminal
and a cable) in a power line or motor power line through which large current flows.
-4-
B-65325EN/02 START-UP PROCEDURE FOR βiSV 2.CONFIGURATIONS
2.2 MAJOR COMPONENTS
2.2.1 Servo Amplifier

(1) 1-axis βiSV series (200-V type)
Wiring board Printed circuit board
Model Order specification Unit specification
specification specification
βiSV4 A06B-6130-H001 A06B-6130-C001 A20B-2101-0090
A20B-2101-0050
βiSV20 A06B-6130-H002 A06B-6130-C002 A20B-2101-0091
βiSV40 A06B-6130-H003 A06B-6130-C003 A16B-3200-0512
A20B-2101-0051
βiSV80 A06B-6130-H004 A06B-6130-C004 A16B-3200-0513
(2) 1-axis βiSV series for 30i-B series CNC (200-V type)
βiSV4 A06B-6160-H001 A06B-6160-C001 A20B-2101-0090
βiSV20 A06B-6160-H002 A06B-6160-C002 A20B-2101-0091
A20B-2102-0081
βiSV40 A06B-6160-H003 A06B-6160-C003 A16B-3200-0512
βiSV80 A06B-6160-H004 A06B-6160-C004 A16B-3200-0513

βiSV10HV A06B-6131-H001 A06B-6131-C001 A16B-3200-0515
βiSV20HV A06B-6131-H002 A06B-6131-C002 A16B-3200-0516 A20B-2101-0051
βiSV40HV A06B-6131-H003 A06B-6131-C003 A16B-3200-0517
βiSV10HV A06B-6161-H001 A06B-6161-C001 A16B-3200-0515
βiSV20HV A06B-6161-H002 A06B-6161-C002 A16B-3200-0516 A20B-2102-0081
βiSV40HV A06B-6161-H003 A06B-6161-C003 A16B-3200-0517

βiSV20/20 A06B-6136-H201 A06B-6136-C201 A16B-3200-0642
A20B-2101-0290
βiSV40/40 A06B-6136-H203 A06B-6136-C203 A16B-3200-0643
βiSV20/20 A06B-6166-H201 A06B-6166-C201 A16B-3200-0642
A20B-2101-0881
βiSV40/40 A06B-6166-H203 A06B-6166-C203 A16B-3200-0643
-5-
3.START-UP PROCEDURE START-UP PROCEDURE FOR βiSV B-65325EN/02
3 START-UP PROCEDURE
3.1 START-UP PROCEDURE (OVERVIEW)
Make sure that the specifications of the CNC, servo motors, servo amplifiers, and other units you received
are exactly what you ordered, and these units are connected correctly. Then, turn on the power.
The items to be checked are described below.
No. Description Check method

Checking the installation of the servo amplifier
1 Specification of the servo Check the combination of the servo amplifier and the servo motor is correct.
amplifier and servo motor Refer to the Servo Amplifier βi series Descriptions (B-65322EN).
2 Packing of the flange Check the supplied packing is attached properly and that there is no gap
between the control panel and the amplifier flange.
3 Keeping maintenance Keep maintenance areas above and below the amplifier.
areas For details, refer to the Servo Amplifier βi series Descriptions (B-65322EN).
4 Prevention of contact Check a protective plate is attached to the DC link terminal board.
with conductive section For details, refer to the Servo Amplifier βi series Descriptions (B-65322EN).
5 Measure against entry of Take a measure to prevent electroconductive, flammable, and corrosive material
coolant as well as mist and water drop from getting in the unit. For keeping of the
effective closeness of the control panel, refer to Appendix G "EXAMPLES OF
RECOMMENDED POWER MAGNETICS CABINETS FOR SERVO AMPLIFIER
INSTALLATION" in the αi series Servo Amplifier Descriptions” (B-65412EN).
Checking the wiring for the servo amplifier
6 Screwing to the terminal When connecting wires to the servo amplifier terminal board, be sure to tighten
block the screws with a proper torque. For the detail of the tightening torque for the
terminal board screws, refer to the Servo Amplifier βi series Descriptions
(B-65322EN).
7 Connecting protective Use a proper cable for grounding in order to prevent electrical shocks at a ground
ground fault. For details, refer to Subsection 9.3.1.7 of the Servo Amplifier βi series
Descriptions” (B-65322EN).
8 Installing the lightning In order to prevent damage due to a surge voltage applied to the input power
serge protector supply, install a lightning surge protector. For details, refer to the Servo Amplifier
βi series Descriptions” (B-65322EN).
9 Measure against noise Check that ground wires, including feedback cable shielding clamps, are
connected to proper places to maintain a stable operation of the machine. For
details, refer to the Servo Amplifier βi series Descriptions” (B-65322EN).
10 Phase order of motor If the phase order of motor power lines is incorrect, the motor may operate
power lines unexpectedly. Make sure that the motor power lines are connected correctly.
11 Checking the axis to If the axis to which the motor feedback wire and power wire are connected is
which the motor feedback incorrect, the motor may operate unexpectedly. So, make sure that the
wire and power wire are connection is correct.
connected
12 Connection of batteries Do not connect the built-in batteries in parallel. Please make sure, if the built-in
batteries are used with an amp-to-amp battery connection cable (CXA19A/B or
BATL (B3)) attached, they may be connected in parallel. For details, refer to the
Servo Amplifier βi series Descriptions” (B-65322EN).
Check during startup of operation
13 Checking the power Before turning on the power, check that the power supply voltage is in its proper
supply voltage range. For details of the power supply voltage specification, refer to the Servo
Amplifier βi series Descriptions” (B-65322EN).
14 Checking the ground The 400 V servo amplifier supports only neutral grounding. For details, refer to
potential the Servo Amplifier βi series Descriptions” (B-65322EN).
-6-
B-65325EN/02 START-UP PROCEDURE FOR βiSV 3.START-UP PROCEDURE

15 Setting the ground fault Use a ground fault interrupter that supports inverters. For information about
breaker leakage current, refer to the Servo Amplifier βi series Descriptions (B-65322EN).
16 Checking the control Check that the voltage of the 24 V power supply for amplifiers is in its proper
power range and the selected current capacity is proper. For details, refer to the Servo
Amplifier βi series Descriptions (B-65322EN).
17 Setting parameters Set initial parameters with reference to Section 3.4.
18 Handling early failures To solve start-up problems, such as being impossible to turn on the power, motor
failing to rotate, and occurrence of an alarm, see Chapter 5 of this document.
3.2 CONNECTING THE POWER
3.2.1 Checking the Voltage and Capacity of the Power

Before connecting the power, you should measure the AC power voltage.
(1) 1-axis βiSV series (200-V type), 2-axis βiSV series (200-V type)
Table 3.2.1 (a) Action for the AC power (200-V input type)
Permissible voltage
Nominal voltage Action
fluctuation width
βiSV4, βiSV 20, βiSV 40, βiSV 80, βiSV 20/20, βiSV 40/40
3-phase 200 to Permitted.
-15%+10%
240VAC Note) If the voltage is below the rated value, the rated output
may not be obtained.
βiSV4, βiSV 20
1-phase 220 to
-15%+10% Single-phase input is permitted when the power supply is 380 to
240VAC
415 VAC to neutral grounding.
βiSV4, βiSV 20, βiSV 40, βiSV 80, βiSV 20/20, βiSV 40/40
Other than the above Not permitted.
Use an insulating transformer to adjust the input voltage.
Table 3.2.1 (b) list the input power specification. Use a power source with sufficient capacity so that
the system will not malfunction due to a voltage drop even at a time of peak load.
Table 3.2.1 (b) AC power voltage specifications (200-V input type)

Model βiSV4 βiSV20 βiSV40 βiSV80 βiSV20/20 βiSV40/40
Nominal voltage rating 200 to 240VAC -15%,+10%
Power source frequency 50/60Hz ±1Hz
Power source capacity (for the 2.7 4.8
0.2 2.8 4.7 6.5
main circuit) [kVA]
Power source capacity (for the 24
22
control circuit) [kVA]
-7-
3.START-UP PROCEDURE START-UP PROCEDURE FOR βiSV B-65325EN/02
Table 3.2.2 (a) Action for the AC power (200-V input type)
Permissible voltage
fluctuation width
1-axis βiSV series (A06B-6131-H***)
3-phase 400 to 480
-15%+10% (βiSV10HV, βiSV 20HV, βiSV 40HV)
VAC
Permitted.
1-axis βiSV series for 30i-B series CNC (A06B-6161-H***)
3-phase 380 to 480
-10%+10% (βiSV10HV, βiSV 20HV, βiSV 40HV)
VAC
Permitted.
1-phase 220 to
-15%+10% Not permitted.
240VAC
Other than the above Not permitted.
Table 3.2.2 (b) list the input power specification. Use a power source with sufficient capacity so that
the system will not malfunction due to a voltage drop even at a time of peak load.
Table 3.2.2 (b) AC power voltage specifications (200-V input type)

1-axis βiSV series 1-axis βiSV series for 30i-B series CNC
Series
(A06B-6131-H***) (A06B-6161-H***)
Model βiSV10HV βiSV20HV βiSV40HV βiSV10HV βiSV20HV βiSV40HV
Nominal voltage rating 400 to 480VAC -15%,+10% 380 to 480VAC -10%,+10%
Power source capacity
(for the main circuit) 1.6 2.5 6.2 1.9 3.9 6.2
[kVA]
Power source capacity
(for the control circuit) 22
[kVA]
3.2.2 Connecting a Protective Ground

Check that a protective ground is connected correctly with reference to individual items in Chapter 6
"INSTALLATION" in the FANUC SERVO AMPLIFIER βi series Descriptions (B-65322EN).
3.2.3 Selecting the Ground Fault Interrupter That Matches the

Leakage Current
Check that a ground fault breaker is selected correctly with reference to individual items in Chapter 6
-8-
B-65325EN/02 START-UP PROCEDURE FOR βiSV 3.START-UP PROCEDURE
3.3 INITIALIZING PARAMETERS (SWITCHES AND DUMMY

CONNECTORS)
(1) βiSV4, βiSV20
• When no regenerative resistor is used
Connect connector CXA20 by using a dummy connector.
See FANUC SERVO AMPLIFIER βi series DESCRIPTIONS B-65322EN.
(2) βiSV40, βiSV80

• Switch (SW) setting
The regenerative resistor alarm level is set. The setting condition varies depending on the regenerative
resistor used (the built-in regenerative resistor or separate regenerative resistor). Perform the setting
properly.
WARNING
Incorrect setting can damage the regenerative resistor.
• When the built-in regenerative resistor is used

Connect connector CZ6 by using a dummy connector.
(3) βiSV20/20, βiSV40/40

• Switch (SW) setting
The regenerative resistor alarm level is set. The setting condition varies depending on the regenerative
resistor used (when the regenerative resistor is not used or a separate regenerative resistor is used).
Perform the setting properly.
WARNING
Incorrect setting can damage the regenerative resistor.

3.4 INITIALIZING SETTINGS

For the initialization of servo amplifiers or servo motors, refer to the following manual:
FANUC AC SERVO MOTOR αi series / FANUC AC SERVO MOTOR βi series/ FANUC LINEAR LiS
series / FANUC BUILT-IN SERVO MOTOR DiS series Parameter Manual (B-65270EN)
-9-
4. CONFIRMATION OF THE
OPERATION START-UP PROCEDURE FOR βiSV B-65325EN/02
4 CONFIRMATION OF THE OPERATION

4.1 SERVO AMPLIFIER MODULE
4.1.1 Check Procedure

1. Turn on power.
ALM LED goes on.
See servo adjustment screen of host (CNC and so on).
2. ALM LED does not go on.
3. Check CNC parameters, then release emergency stop state.

READY LED does not go on.
See servo adjustment screen of host (CNC and so on).
4. READY LED goes on.
5. Check servo motor operation.

Alarm
See Part II “Troubleshooting”.
Abnormal motor operation
See FANUC AC SERVO MOTOR αi series / FANUC AC SERVO MOTOR βi series/ FANUC LINEAR LiS series /
FANUC BUILT-IN SERVO MOTOR DiS series Parameter Manual (B-65270EN).
(1) βiSV4, βiSV20
Yamanashi 401-0597 JAPAN made in JAPAN
ALM LED (yellow)
LINK LED (green)
POWER LED (green)
- 10 -
4.CONFIRMATION OF THE
B-65325EN/02 START-UP PROCEDURE FOR βiSV OPERATION
(2) βiSV40, βiSV80, βiSV10HV, βiSV20HV, βiSV40HV
Yamanashi 401-0597 JAPAN
ALM LED (yellow)
LINK LED (green)
POWER LED (green)
- 11 -
(3) βiSV20/20, βiSV40/40
Yamanashi 401-0597 JAPAN
ALM LED
(yellow)
LINK LED
(green)
POWER LED
(green)
(a) βiSV20/20, (b) βiSV40/40
4.1.2 VRDY-OFF Alarm Indicated on the CNC Screen

When the VRDY-OFF alarm is indicated on the CNC, check the items listed below. In addition,
VRDY-OFF can occur also for reasons other than listed below. If the following items turn out to have not
caused VRDY-OFF, check diagnosis information No. 358 (V ready-off information) on the diagnosis
screen and report it to FANUC.
(1) Emergency stop signal (ESP)

Has the emergency stop signal (connector: CX30) applied to the βiSV been released? Alternatively, is
the signal connected correctly?
(2) MCON signal
Hasn't setting up the axis detach function disabled the transmission of the ready command signal
MCON from the CNC to the βiSV?
(3) βiSV control printed-circuit board
The βiSV control printed-circuit board may be poorly installed or faulty. Be sure to push the faceplate
as far as it will go. If the problem persist, replace the control printed-circuit board.
- 12 -
Checking diagnosis information (DGN) No. 358 makes it possible to analyze the cause of the VRDY-OFF
alarm.
* For Series 16i /18i /21i/0i/PMi, this function is supported in servo software Series 90B0/D(04) and
subsequent editions.
Diagnosis 358 V ready-off information

Convert the displayed value to binary form, and check bits 5 to 14 of the resulting binary number.
When the servo amplifier starts working, these bits become 1 sequentially, starting at bit 5. When the servo
amplifier has started normally, all of bits 5 to 14 become 1.
Check bits 5 to 14 sequentially, starting at the lowest-order bit. The first lowest bit that is not 0 corresponds
to the processing that caused the V ready-off alarm.
#15 #14 #13 #12 #11 #10 #9 #8

SRDY DRDY INTL RLY CRDY MCOFF MCONA
#7 #6 #5 #4 #3 #2 #1 #0
MCONS *ESP HRDY
#06(*ESP) : Emergency stop signal
#07,#08,#09 : MCON signal (CNC → amplifier → converter)
#10(CRDY) : Converter preparation completed signal
#11(RLY) : Relay signal (DB relay energized)
#12(INTL) : Interlock signal (DB relay de-energized)
#13(DRDY) : Amplifier preparation completed signal
The following table lists the values of diagnosis information No.358 and the major failure causes. Do not
detach or attach any connector while the power is on.
Values of diagnosis
Description of failures Check items
information No. 358
417 Emergency stop has not been (1) Check that an emergency stop signal applied to CX30
released. of the common power supply has been released.
(2) Check that there is no anomaly on the connection for
communication between the amplifiers or the related
cable.
(3) Replace the servo amplifier.
993 The βiSV ready signal (CRDY) (1) Check that there is no problem with the connection for
is not output. communication (CXA2A/B) between the amplifiers or
the related cable.
(2) Check that the input power is supplied.
(3) Check that the operation coil of the magnetic
contactor is supplied with power and that there is no
problem with the connection of CX29 of βiSV.
4065 The interlock signal is not input. Replace the servo amplifier.
225 - Replace the servo amplifier.
97 - Check that the axis detach function has not been set.
- 13 -
4.1.3 Method for Observing Motor Current

This subsection explains how to observe the current that flows through the servo motor.
(1) Method of using the SERVO GUIDE

Refer to online help for explanations about how to connect to and use the servo adjustment tool "SERVO
GUIDE" and applicable CNC systems.
- Setting
Select an axis to be subjected to measurement in graph window channel setting. Also select IR and IS under
Kind. Under Coef (conversion coefficient), set the maximum allowable current (Ap) for the amplifier in
use.
NOTE
1 In servo software series except for series 9096, the minimum motor current
sampling cycle depends on the current control cycle.
2 Servo software series 9096 supports setting of a motor current sampling period of
1 ms only.
- Display
Select the XTYT mode from the graph window mode (M) menu to display waveforms.
(2) Method of using the servo check board

For details on how to connect and use the servo check board, refer to “FANUC AC SERVO MOTOR αi
series / FANUC AC SERVO MOTOR βi series/ FANUC LINEAR LiS series / FANUC BUILT-IN SERVO
MOTOR DiS series Parameter Manual (B-65270EN).”
For Series 30i/31i/32i and Series 0i-MODEL C, D, use the SERVO GUIDE because the servo check board
cannot be connected and used.
- Required units
• Servo check board
A06B-6057-H630
• Oscilloscope
- 14 -
- Settings
⋅ CNC setting
Parameter setting for servo software series 90B0
Output channel Data number 5 Data number 6

FS15i No.1726 No.1774 No.1775 No.1776
FS16i/18i/21i/0i/PMi No.2115 No.2151 No.2152 No.2153
Measurement axis/ current
IR IS
phase
L-axis (Note 1) 370 0 402 0
M-axis (Note 1) 2418 0 2450 0
Parameter setting for servo software series 9096

FS16i/18i/21i/0i/PMi No.2115 No.2115
Measurement axis/ current
IR IS
phase
L-axis (Note 1) 370 402
M-axis (Note 1) 1010 1042
(Note 2)
When series 9096 is used, if no axis is paired with the measurement axis , IR and IS cannot be
observed simultaneously.
NOTE
1 The L-axis is an axis identified with an odd number set in parameter No. 1023. The
M-axis is an axis identified with an even number set in parameter No. 1023.
2 The axis specified as 2n-1 in parameter No. 1023 and the axis specified as 2n will
be in a pair.
Setting the output period of motor current data (for the 90B0 series only)
Parameter No. 1746 /

Output period
Bit 7 of parameter No. 2206
Velocity loop period 0 (default)
Current loop period 1 (Note 3)
NOTE
3 If the current loop period is set up as the motor current data output period,
selecting data number 0, 1, 2, or 4 disables the output of signals (such as a
velocity command) to channels. To observe the motor current and other signals
(such as a velocity command), specify the output period as 1 ms.
4 For the servo software series 9096, the output period of the motor current is only 1
msec. The current loop period cannot be used for output.
⋅ Setting up the check board

• Set the AXIS digit of the LED display with an axis number from 1 to 8 specified in parameter No.
1023.
• Set the DATA digit of the LED display with a data number from 5 to 6.
- 15 -
- Method for observing the motor current

The voltage corresponding to the motor current is output to a channel for which 5 or 6 is set as the data
number on the servo check board.
The waveform of the motor current can be observed by measuring the voltage mentioned above with an
oscilloscope.
The following table lists the relationships between the observed voltage and the motor current.
Maximum amplifier current βiSV type Motor current/ observed voltage [A/V]
4A βiSV4 1
10A βiSV10HV 2.5
βiSV20, βiSV20/20
20A 5
βiSV20HV
βiSV40, βiSV40/40
40A 10
βiSV40HV
80A βiSV80 20
For the βiSV20, for example, the motor current is 5A (actual value rather than effective value) if the
observed voltage is 1V.
- 16 -
II. TROUBLESHOOTING FOR βiSV
B-65325EN/02 TROUBLESHOOTING FOR βiSV 1.OVERVIEW
1 OVERVIEW
This part describes the troubleshooting procedure. Read the section related to your current trouble to locate
it and take an appropriate action.
First, check the alarm number (indicated by the CNC) and the βiSV indication in Chapter 2 to find the
cause.
Then, take an appropriate action according to the corresponding description in Chapter 3.
- 19 -
2. ALARM NUMBERS AND
BRIEF DESCRIPTIONS TROUBLESHOOTING FOR βiSV B-65325EN/02
2 ALARM NUMBERS AND BRIEF

DESCRIPTIONS
2.1 FOR Series 30i/31i/32i/35i-B, Power Motion i-A
2.1.1 Servo Alarm

Alarm No. Description Reference item
SV0361 Pulsecoder phase error (built-in) 3.2.7 (1)
SV0364 Soft phase alarm (built-in) 3.2.7 (1)
SV0365 LED error (built-in) 3.2.7 (1)
SV0366 Pulse error (built-in) 3.2.7 (1)
SV0367 Count error (built-in) 3.2.7 (1)
SV0368 Serial data error (built-in) 3.2.7 (3)
SV0369 Data transfer error (built-in) 3.2.7 (3)
SV0380 LED error (separate) 3.2.7 (2)
SV0381 Pulsecoder phase error (separate) 3.2.7 (2)
SV0382 Count error (separate) 3.2.7 (2)
SV0383 Pulse error (separate) 3.2.7 (2)
SV0384 Soft phase alarm (separate) 3.2.7 (2)
SV0385 Serial data error (separate) 3.2.7 (3)
SV0386 Data transfer error (separate) 3.2.7 (3)
SV0387 Sensor error (separate) 3.2.7 (2)
SV0417 Invalid parameter 3.2.6
SV0421 Excessive semi-full error 3.2.8
SV0430 Servo motor overheat 3.2.5
SV0432 PS: control undervoltage 3.1.4
SV0433 PS: DC link undervoltage 3.1.1
SV0436 Soft thermal (OVC) 3.2.3
SV0438 SV : current alarm 3.1.9
SV0439 PS : DC link overvoltage 3.1.2
SV0440 PS : Excessive regenerative power 2 3.1.3
SV0441 Current offset error 3.2.8
SV0444 SV: internal cooling fan stopped 3.1.5
SV0445 Soft disconnection alarm 3.2.4
SV0447 Hard disconnection alarm (separate) 3.2.4
SV0448 Feedback mismatch alarm 3.2.8
SV0449 SV: IPM alarm 3.1.7
SV0453 Soft disconnection alarm (α Pulsecoder) 3.2.4
SV0601 SV: cooling fan stopped of the radiator 3.1.6
SV0603 SV: IPM alarm (OH) 3.1.8
2.2 FOR Series 30i/31i/32i-A
2.2.1 Servo Alarm

- 20 -
2.ALARM NUMBERS AND
B-65325EN/02 TROUBLESHOOTING FOR βiSV BRIEF DESCRIPTIONS

SV0432 Converter: control power supply undervoltage 3.1.4
SV0433 Converter: DC link undervoltage 3.1.1
SV0438 Inverter: motor current alarm 3.1.9
SV0439 Converter: DC link overvoltage 3.1.2
SV0440 Converter: Excessive deceleration power 3.1.3
SV0444 Inverter: internal cooling fan stopped 3.1.5
SV0449 Inverter: IPM alarm 3.1.7
SV0601 Inverter: cooling fan stopped of the radiator 3.1.6
SV0603 Inverter: IPM alarm (OH) 3.1.8
2.3 FOR Series 0i/0i Mate-D
2.3.1 Servo Alarm

- 21 -
BRIEF DESCRIPTIONS TROUBLESHOOTING FOR βiSV B-65325EN/02

2.4 FOR Series 15i
2.4.1 Servo Alarm

SV0027 Invalid digital servo parameter setting 3.2.6
- 22 -
2.ALARM NUMBERS AND
B-65325EN/02 TROUBLESHOOTING FOR βiSV BRIEF DESCRIPTIONS

2.5 FOR Series 16i, 18i, 20i, 21i, 0i, AND Power Mate i
2.5.1 Servo Alarm

361 Pulsecoder phase error (built-in) 3.2.7 (1)
364 Soft phase alarm (built-in) 3.2.7 (1)
365 LED error (built-in) 3.2.7 (1)
366 Pulse error (built-in) 3.2.7 (1)
367 Count error (built-in) 3.2.7 (1)
368 Serial data error (built-in) 3.2.7 (3)
369 Data transfer error (built-in) 3.2.7 (3)
380 LED error (separate) 3.2.7 (2)
381 Pulsecoder phase error (separate) 3.2.7 (2)
382 Count error (separate) 3.2.7 (2)
383 Pulse error (separate) 3.2.7 (2)
384 Soft phase alarm (separate) 3.2.7 (2)
385 Serial data error (separate) 3.2.7 (3)
386 Data transfer error (separate) 3.2.7 (3)
387 Sensor error (separate) 3.2.7 (2)
417 Invalid parameter 3.2.6
421 Excessive semi-full error 3.2.8
430 Servo motor overheat 3.2.5
432 Converter: control power supply undervoltage 3.1.4
433 Converter: DC link undervoltage 3.1.1
436 Soft thermal (OVC) 3.2.3
438 Inverter: motor current alarm 3.1.9
439 Converter: DC link overvoltage 3.1.2
440 Converter: Excessive deceleration power 3.1.3
441 Current offset error 3.2.8
444 Inverter: internal cooling fan stopped 3.1.5
445 Soft disconnection alarm 3.2.4
447 Hard disconnection alarm (separate) 3.2.4
448 Feedback mismatch alarm 3.2.8
449 Inverter: IPM alarm 3.1.7
453 Soft disconnection alarm (α Pulsecoder) 3.2.4
601 Inverter: cooling fan stopped of the radiator 3.1.6
603 Inverter: IPM alarm (OH) 3.1.8
- 23 -
3. TROUBLESHOOTING
AND ACTION TROUBLESHOOTING FOR βiSV B-65325EN/02
3 TROUBLESHOOTING AND ACTION

3.1 SERVO AMPLIFIER MODULE
The following table lists alarms related to the servo amplifier module.
See this table and the CNC alarm code indicated in Chapter 2, "ALARM NUMBERS AND BRIEF
DESCRIPTIONS".
LED Reference
Alarm Major cause
display item
Converter: DC link undervoltage Voltage drop at the DC link in the main circuit 3.1.1
ON
PS: DC link undervoltage
Converter: DC link overvoltage Voltage rise at the DC link in the main circuit 3.1.2
ON
PS: DC link overvoltage
Converter: excessive deceleration power - Too large regenerative discharge amount 3.1.3
ON
PS: Excessive regenerative power 2 - Abnormal regenerative discharge circuit
Converter: control power supply - Drop in external control power supply (24 3.1.4
undervoltage V)
PS: control power supply undervoltage ON - Connector/cable (CXA19A, CXA19B)
defective
- βiSV failure
- Fan not running.
Inverter: internal cooling fan stopped
ON - Fan motor connector or cable defective 3.1.5
SV: internal cooling fan stopped
- βiSV failure
Inverter: cooling fan stopped of the - Fan not running.
radiator ON - Fan motor connector or cable defective 3.1.6
SV: cooling fan stopped of the radiator - βiSV failure
- Short-circuit between power lead phases or
ground fault in them
Inverter: IPM alarm
ON - Short-circuit between motor winding 3.1.7
SV: IPM alarm
phases or ground fault in them
- βiSV failure
- The motor is being used under a harsh
Inverter: IPM alarm (OH) condition.
ON 3.1.8
SV: IPM alarm (OH) - The ambient temperature is high.
- βiSV failure
- Short-circuit between power lead phases or
Inverter: motor current alarm - Short-circuit between motor winding
ON 3.1.9
SV: current alarm phases or ground fault in them
- Incorrect motor ID setting
- βiSV or motor failure
- Connector or cable failure
FSSB communication error ON 3.1.10
- βiSV or CNC failure
3.1.1 Converter: DC Link Undervoltage

(1) Meaning
The voltage at the DC link of the converter is low.
(2) Cause and troubleshooting
(a) A small power dip has occurred.
→ Check the power supply.
(b) Low input power supply voltage
- 24 -
3.TROUBLESHOOTING
B-65325EN/02 TROUBLESHOOTING FOR βiSV AND ACTION
→ Check the power supply specification.

(c) Insert the βiSV face plate (control printed-circuit board) securely.
(d) Replace the βiSV.
3.1.2 Converter: DC Link Overvoltage

(1) Meaning
In the main circuit, the voltage at the DC link is abnormally high.
(a) βiSV4 and βiSV20
Use a regenerative resistor.
(b) Excessive regenerated power
Increase the acceleration/deceleration time constant. If this alarm occurs less frequently, the
regeneration capacity is not sufficient. Set the acceleration/deceleration time constant to such a
level that does not cause any alarm.
(e) Check that the regenerative resistor is broken or poorly connected.
3.1.3 Converter: Excessive Deceleration Power

(1) Meaning
The converter deceleration power is too large.
For βiSV4 and βiSV20
• When a separate regenerative resistor is not used
(a) Connect CXA20 by using a dummy connector.
(b) Insert the βiSV face plate (control printed-circuit board) securely.
(c) Replace the βiSV.
• When a separate regenerative resistor is used
(a) Check the resistance at both ends of connector CXA20 on the regenerative resistor side to
confirm that the resistance is 0 Ω.
(b) The average regenerative power may be high. Decrease the frequency of
acceleration/deceleration, or review the resistor specification.
For βiSV40 and βiSV80

(a) Connect CXA20 and CZ6 by using a dummy connector.
• When a separate regenerative resistor is used

(a) Check the resistance at both ends of connector CXA20 on the regenerative resistor side to
confirm that the resistance is 0 Ω.
- 25 -
3. TROUBLESHOOTING
3.1.4 Converter: Control Power Supply Undervoltage

(1) Meaning
The external control power supply (24 VDC) voltage is low.
(a) Check the voltage level of the external power supply (24 VDC). (Normal voltage: 21.6 V or
higher)
(b) Check the connector and cable (CXA19A, CXA19B).
(c) Replace the βiSV.
3.1.5 Inverter: Internal Cooling Fan Stopped

(1) Meaning
Inverter: internal cooling fan stopped
(a) Check whether there is any foreign material in the fan.
(b) Be sure to push the faceplate (control printed-circuit board) as far as it will go.
(c) Check that the fan connector is attached correctly.
(d) Replace the fan.
(e) Replace the βiSV.
3.1.6 Inverter: Cooling Fan Stopped of the Radiator

(1) Meaning
Inverter: cooling fan stopped of the radiator
(a) Check whether there is any foreign material in the fan.
(c) Check that the fan connector is attached correctly.
(d) Replace the fan.
(e) Replace the βiSV.
3.1.7 Inverter: IPM Alarm

(1) Meaning
Inverter: IPM alarm
(a) Be sure to push the faceplate (control printed-circuit board) as far as it will go.
(b) Disconnect the motor power leads from the βiSV, and release the βiSV from an emergency stop
condition.
<1> If no IPM alarm condition has occurred
→ Go to (c).
<2> If an IPM alarm condition has occurred
→ Replace the βiSV.
(c) Disconnect the motor power leads from the βiSV, and check the insulation between PE and the
motor power lead U, V, or W.
<1> If the insulation is deteriorated
→ Go to (d).
<2> If the insulation is normal
- 26 -
3.TROUBLESHOOTING
(d) Disconnect the motor from its power leads, and check whether the insulation of the motor or
power leads is deteriorated.
<1> If the insulation of the motor is deteriorated
→ Replace the motor.
<2> If the insulation of any power lead is deteriorated
→ Replace the power lead.
3.1.8 Inverter: IPM Alarm (OH)

(1) Meaning
Inverter: IPM alarm (OH)
(a) Be sure to push the faceplate (control printed-circuit board) as far as it will go.
(b) Check that the heat sink cooling fan is running.
(c) Check that the motor is being used at or below its continuous rating.
(d) Check that the cooling capacity of the cabinet is sufficient (inspect the fans and filters).
(e) Check that the ambient temperature is not too high.
(f) Replace the βiSV.
3.1.9 Inverter: Motor Current Alarm

(1) Meaning
Inverter: DC link current alarm
(a) Checking the servo parameters
Referring to " FANUC AC SERVO MOTOR αi series / FANUC AC SERVO MOTOR βi series/
FANUC LINEAR LiS series / FANUC BUILT-IN SERVO MOTOR DiS series Parameter
Manual (B-65270EN)," check whether the following parameters have default values.
Series 15i No.1809 No.1852 No.1853
Other than Series 15i No.2004 No.2040 No.2041
Alternatively, if an abnormal motor current alarm condition occurs only on rapid
acceleration/deceleration, it is likely that the motor is being used under too harsh a condition.
Increase the acceleration/deceleration time constant, and see what will occur.
(c) Disconnect the motor power leads from the βiSV, and release the βiSV from an emergency stop
condition.
<1> If no abnormal motor current occurs
→ Go to (d).
<2> If an abnormal motor current occurs
(d) Disconnect the motor power leads from the βiSV, and check the insulation between PE and the
motor power lead U, V, or W.
→ Go to (e).
(e) Disconnect the motor from its power leads, and check whether the insulation of the motor or
power leads is deteriorated.
<2> If the insulation of any power lead is deteriorated
→ Replace the power lead.
- 27 -
3. TROUBLESHOOTING
3.1.10 FSSB Communication Error

(1) Meaning
Inverter: FSSB communication error
(a) Replace the optical cable (COP10A) of the βiSV that is nearest to the CNC among the amplifiers
on which the ALM LED is lit (in Fig. 3.1.10, the cable between UNIT2 and UNIT3).
(b) Replace the βiSV that is the second nearest to the CNC among the amplifiers on which the ALM
LED is lit (in Fig. 3.1.10, UNIT3).
(c) Replace the βiSV that is nearest to the CNC among the amplifiers on which the ALM LED is lit
(in Fig. 3.1.10, UNIT2).
(d) Replace the servo card in the CNC.
UNIT1 UNIT2 UNIT3 UNIT4
(C) (b)
COP10B COP10B COP10B COP10B

Master side
(CNC side)
Slave side
(a)
COP10A COP10A COP10A COP10A
LED “ALM” LED “ALM” LED “ALM” LED “ALM”
Off On On On
Fig. 3.1.10
3.2 SERVO SOFTWARE

If a servo alarm is issued, an alarm message is output, and details of the alarm are also displayed on the
servo adjustment screen or the diagnosis screen. Using the alarm identification table given in this section,
determine the alarm, and take a proper action.
3.2.1 Servo Adjustment Screen

The following procedure can be used to display the servo adjustment screen.
(The DPL/MDI of the Power Mate has no servo adjustment screen.)
z Series 15i
SYSTEM → [CHAPTER] → [SERVO] → [ ] → [SERVO ALARM]
z Series30i, 31i, 32i,16i,18i,21i,0i

SYSTEM → [SYSTEM] → [ ] → [SV-PRM] → [SV-TUN]
If the servo setting screen does not appear, specify the following parameter, then switch the CNC off and on
again.
- 28 -
3.TROUBLESHOOTING
#7 #6 #5 #4 #3 #2 #1 #0
3111 SVS
SVS (#0) 1 (to display the servo setting screen)
Alarm detail
information
<1>
<2>
<3>
<4>
<5>
Fig. 3.2.1(a) Servo adjustment screen
Alarm detail
information <1> <6>
<2> <7>
<3> <8>
<4> <9>
<5>
Fig. 3.2.1(b) Series 15i servo alarm screen
The table below indicates the names of the alarm bits.
Table 3.2.1 List of alarm bit names

#7 #6 #5 #4 #3 #2 #1 #0
<1> Alarm 1 OVL LVA OVC HCA HVA DCA FBA OFA
<2> Alarm 2 ALD EXP
<3> Alarm 3 CSA BLA PHA RCA BZA CKA SPH
<4> Alarm 4 DTE CRC STB PRM
<5> Alarm 5 OFS MCC LDM PMS FAN DAL ABF
<6> Alarm 6 SFA
<7> Alarm 7 OHA LDA BLA PHA CMA BZA PMA SPH
<8> Alarm 8 DTE CRC STB SPD
<9> Alarm 9 FSD SVE IDW NCE IFE
NOTE
The empty fields do not represent alarm codes.
- 29 -
3. TROUBLESHOOTING
3.2.2 Diagnosis Screen

The alarm items of the servo adjustment screen correspond to the diagnosis screen numbers indicated in the
table below.
Table 3.2.2 Correspondence between the servo adjustment screen and diagnosis screen
Alarm No. Series15i Series16i,18i,21i,0i
<1> Alarm 1 No 3014+20(X-1) No 200
<2> Alarm 2 3015+20(X-1) 201
<3> Alarm 3 3016+20(X-1) 202
<4> Alarm 4 3017+20(X-1) 203
<5> Alarm 5 ―――――― 204
<6> Alarm 6 ―――――― ――
<7> Alarm 7 ―――――― 205
<8> Alarm 8 ―――――― 206
<9> Alarm 9 ―――――― ――
<1> <7>
<2> <8>
<3>
<4>
<5>
Fig. 3.2.2 Diagnosis screen
3.2.3 Overload Alarm (Soft Thermal, OVC)

(Alarm identification method)
#7 #6 #5 #4 #3 #2 #1 #0
(Action)
(1) Make sure that the motor is not vibrating.
⇒ If a motor vibrates, the current flowing in it becomes more than necessary, resulting in an alarm.
(2) Make sure that the power lead to the motor is connected correctly.
⇒ If the connection is incorrect, an abnormal current flows in the motor, resulting in an alarm.
(3) Make sure that the following parameters are set correctly.
⇒ An overload alarm is issued based on the result of calculation of these parameters. Be sure to set
them to the standard values. For details of the standard values, refer to the FANUC AC SERVO
MOTOR αi series / FANUC AC SERVO MOTOR βi series/ FANUC LINEAR LiS series /
FANUC BUILT-IN SERVO MOTOR DiS series Parameter Manual (B-65270EN).

No. 2062 (FS16i)

No. 2063 (FS16i)
- 30 -
3.TROUBLESHOOTING
No. 1893 (FS15i) Overload protection coefficient (OVCLMT)
No. 2065 (FS16i)

No. 2162 (FS16i)

No. 2163 (FS16i)
No. 1787 (FS15i) Overload protection coefficient (OVCLMT2)

No. 2164 (FS16i)
(4) Attach the check board to connector JX5 to measure the waveform of the actual current (IR and IS) of
the servo amplifier module. (This check pin board differs from that for the α series.)
Run the motor and measure its actual currents (IR and IS). Then compare the measurement results with
the overload duty curve shown in "FANUC AC SERVO MOTOR βi series Descriptions
(B-65302EN)," and see whether the machine load is too heavy compared with the motor capacity. If
the actual current is high on acceleration/deceleration, it is likely that the time constant is too small.
3.2.4 Feedback Disconnected Alarm

#7 #6 #5 #4 #3 #2 #1 #0
<2> Alarm 2 ALD EXP
<6> Alarm 6 SFA
FBA ALD EXP SFA Alarm description Action

1 1 1 0 Hard disconnection (separate phase A/B) 1
1 0 0 0 Soft disconnection (closed loop) 2
1 0 0 1 Soft disconnection (αi Pulsecoder) 3
(Action)
Action 1:
This alarm is issued when a separate phase A/B scale is used. Check if the phase A/B detector is
connected correctly.
Action 2:
This alarm is issued when the position feedback pulse variation is small relative to the velocity
feedback pulse variation. This means that this alarm is not issued when a semi-full is used. Check if the
separate detector outputs position feedback pulses correctly. If position feedback pulses are output
correctly, it is considered that the motor alone is rotating in the reverse direction at the start of machine
operation because of a large backlash between the motor position and scale position.
#7 #6 #5 #4 #3 #2 #1 #0
No. 1808 (FS15i) TGAL
No. 2003 (FS16i)
TGAL (#1) 1: Uses the parameter for the soft disconnection alarm detection level.
No. 1892 (FS15i) Soft disconnection alarm level

No. 2064 (FS16i)
Standard setting 4: Alarm issued for a 1/8 rotation of the motor.
Increase this value.
- 31 -
3. TROUBLESHOOTING
Action 3:
This alarm is issued when synchronization between the absolute position data sent from the built-in
Pulsecoder and phase data is lost. Turn off the power to the CNC, then detach the Pulsecoder cable
then attach it again. If this alarm is still issued, replace the Pulsecoder.
3.2.5 Overheat Alarm

#7 #6 #5 #4 #3 #2 #1 #0
<2> Alarm 2 ALD EXP
OVL ALD EXP Alarm description Action

1 1 0 Motor overheat 1
1 0 0 Amplifier overheat 1
(Action)
Action 1:
If this alarm is issued after a long-time of continuous operation, it is considered that the motor and
amplifier are overheated. Stop operation for a while, then make a check. If this alarm is still issued
after the power is off for about 10 minutes then is turned on again, the thermostat is considered to be
faulty. If this alarm is issued intermittently, increase the time constant or increase stop time in the
program to suppress the rise in temperature.
3.2.6 Invalid Servo Parameter Setting Alarm

The invalid servo parameter setting alarm is issued when a setting out of the specifiable range is specified,
or an overflow has occurred in an internal calculation. When an invalid parameter is detected on the servo
side, alarm 4#4(PRM)=1 results.

#7 #6 #5 #4 #3 #2 #1 #0
For details and action required when the invalid servo parameter setting alarm is issued on the servo side,
refer to the FANUC AC SERVO MOTOR αi series / FANUC AC SERVO MOTOR βi series/ FANUC
LINEAR LiS series / FANUC BUILT-IN SERVO MOTOR DiS series Parameter Manual (B-65270EN).
(Reference information)
Method of checking details of an invalid parameter detected on the servo side
(For Series 15i)

A number is indicated in the item "Details of invalid parameter" on the servo alarm screen (Fig.
3.2.1(b)).
(For Series 30i, 16i, 18i, 21i, 0i, and Power Mate i)
A number is indicated in No. 352 of the diagnosis screen.
- 32 -
3.TROUBLESHOOTING
3.2.7 Alarms Related to Pulsecoder and Separate Serial Detector

(Bits for alarm identification)
#7 #6 #5 #4 #3 #2 #1 #0
<2> Alarm 2 ALD EXP
<6> Alarm 6 SFA
(1) For a built-in Pulsecoder

An alarm is determined from the bits of alarms 1, 2, 3, and 5. The table below indicates the meaning of
each bit.
Alarm 3 Alarm 5 1 Alarm 2 Actio

Alarm description
CSA BLA PHA RCA BZA CKA SPH LDM PMA FBA ALD EXP n
1 Soft phase alarm 2
1 Zero battery voltage 1
1 1 1 0 Count error alarm 2
1 Phase alarm 2
1 Battery voltage decrease (Caution) 1
1 Pulse error alarm
1 LED error alarm
CAUTION
An alarm for which no action number is given is considered to be caused by a
Pulsecoder failure. Replace the Pulsecoder.
(2) For a separate serial detector

An alarm is determined from the bits of alarm 7. The table below indicates the meaning of each bit.
Alarm 7
Alarm description Action
OHA LDA BLA PHA CMA BZA PMA SPH
1 Pulse error alarm
1 Count error alarm 2
1 Phase alarm 2
1 LED error alarm
1 Separate detector alarm 3
CAUTION
detector failure. Replace the detector.
- 33 -
3. TROUBLESHOOTING
(Action)
Action 1: Battery-related alarms
Check if a battery is connected. When the power is turned on for the first time after a battery is
connected, the zero battery voltage alarm is issued. In such a case, turn off the power, then turn on
the power again. If the alarm is still issued, check the battery voltage. If the battery voltage
decrease alarm is issued, check the voltage, and replace the battery as required.
Action 2: Alarms that may be issued for noise

If an alarm is issued intermittently or after emergency stop cancellation, noise is probably the
cause. So, provide noise protection. If the same alarm is still issued after noise protection is
provided, replace the detector.
Action 3: Alarm condition detected by the separate detector

If the separate detector detects an alarm condition, contact the manufacturer of the detector for
information on troubleshooting.
(3) Alarms related to serial communication

An alarm is determined from the bits of alarms 4 and 8.
Alarm 4 Alarm 8
Alarm description
DTE CRC STB DTE CRC STB
1
1 Serial Pulsecoder communication alarm
1
1
1 Separate serial Pulsecoder communication alarm
1
Action:
Serial communication is not performed correctly. Check if the cable is connected correctly and is
not broken. If CRC or STB is issued, noise may be the cause. So, provide noise protection. If
CRC or STB is always issued after the power is turned on, the Pulsecoder or amplifier control
board or the pulse module may be faulty.
3.2.8 Other Alarms

#7 #6 #5 #4 #3 #2 #1 #0
OFS DAL ABF Alarm description Action

1 Feedback mismatch alarm 1
1 Excessive semi-full error alarm 2
1 Current offset error alarm 3
(Action)
Action 1:
This alarm is issued when the move direction of the position detector is opposite to the move direction
of the speed detector. Check the rotation direction of the separate detector. If the rotation direction of
the separate detector is opposite to the rotation direction of the motor, take the following action:
For a phase A/B detector: Reverse the connections of A and XA.
For a serial detector: Reverse the setting of the signal direction of the separate detector.
In the Series 90B0/G(07) and subsequent editions, the following settings enable signal directions in
the A/B phase detector to be inverted.
- 34 -
3.TROUBLESHOOTING
#7 #6 #5 #4 #3 #2 #1 #0
No. 1960 (FS15i) RVRSE
No. 2018 (FS16i)
RVRSE (#0) Reverses the signal direction of the separate detector.
0: Does not reverse the signal direction of the separate detector.
1: Reverses the signal direction of the separate detector.
If a large distortion exists between the motor and separate detector, this alarm may be issued in the case
of abrupt acceleration/deceleration. In such a case, modify the detection level.
#7 #6 #5 #4 #3 #2 #1 #0
No. 1741 (FS15i) RNLV
No. 2201 (FS16i)
RNLV (#1) Modifies the feedback mismatch alarm detection level.
1: Detected with 1000 min-1 or more
Action 2:
This alarm is issued when the difference between the motor position and separate detector position
exceeds the excessive semi-full error level. Check if the conversion efficient for dual position
feedback is set correctly. If the conversion efficient is set correctly, increase the alarm level. If this
alarm is still issued after the level is modified, check the connection direction of the scale.
No. 1971 (FS15i) Dual position feedback conversion coefficient (numerator)

No. 2078 (FS16i)
No. 1972 (FS15i) Dual position feedback conversion coefficient (denominator)

No. 2079 (FS16i)
Number of feedback pulses per motor

revolution (detection unit)
Conversion coefficient =
1,000,000
No. 1729 (FS15i) Dual position feedback semi-full error level

No. 2118 (FS16i)
[Setting] Detection unit. When 0 is set, no detection is made.
Action 3:
The current offset value of the current detector (equivalent to the current value in the emergency stop
state) is abnormally high. If this alarm is still issued after the power is turned off then back on, the
current detector is faulty. For the βi series, replace the amplifier.
- 35 -
4. REPLACING SERVO
AMPLIFIER COMPONENTS TROUBLESHOOTING FOR βiSV B-65325EN/02
4 REPLACING SERVO AMPLIFIER

COMPONENTS
This chapter describes how to replace a fan motor, absolute Pulsecoder battery, fuses, and printed-circuit
board.
WARNING
Because the Servo Amplifier uses a large-capacitance electrolytic capacitor
internally, the Servo Amplifier remains charged for a while even after the power is
turned off. Before touching the Servo Amplifier for maintenance or other purposes,
ensure your safety by measuring the residual voltage in the DC link with a tester
and confirming that the charge indication LED (red) is off.
4.1 REPLACEMENT OF A FAN MOTOR
4.1.1 For the Internal Cooling Fan Motor: βiSV4, βiSV20

<1> Pull out the fan connector upward.
<2> Push the front of the fan unit to disengage the lug.
<3> Disengage the rear of the fan unit.
<4> Lift the fan unit in a slant direction.
When replacing the fan motor, pay

attention to its orientation and the
cable drawing position.
<4>
<3> Fan motor blow
direction
<1> <2>
Fan unit
Notches for fan unit

installation
Fan connector
- 36 -
4.REPLACING SERVO
B-65325EN/02 TROUBLESHOOTING FOR βiSV AMPLIFIER COMPONENTS
4.1.2 For the Internal Cooling Fan Motor:

βiSV40, βiSV80, βiSV10HV, βiSV20HV, βiSV40HV
1 Hold the two handles of the fan unit and pull up them in the direction (the upward direction of the
figure) of the arrow.
Holding the two lugs on the fan unit,

lift the fan unit in the direction of the When replacing the fan motor, pay
arrow (toward the top in the figure). attention to its orientation and the
orientation of the connector.
Lugs
Pay attention White

to the Black
orientation of Red
the connector
key. Fan unit
- 37 -
4. REPLACING SERVO
4.1.3 For the Internal Cooling Fan Motor: βiSV20/20, βiSV40/40

1 Hold the two handles of the fan unit and pull up them in the direction (the upward direction of the
figure) of the arrow.
Ho lding the two lugs o n the fan unit,

lift th e fan unit i n the direction of the When rep laci ng the fan motor, pay
arrow (to ward the top in the fi gure). atte nti on to its orientation and the
orie nta tion of the connector.
Lu gs
P ay attenti on White
to th e Black
o rientation of Red
the connector
key. Fa n u nit
- 38 -
4.REPLACING SERVO
4.1.4 For the Radiator Cooling Fan Motor:

βiSV40, βiSV80, βiSV10HV, βiSV20HV, βiSV40HV
1 Holding the two lugs on the fan unit, lift the fan unit in the direction of the arrow (upward in the
figure).
Four M4
screws
Fan motor blow direction
- 39 -
4. REPLACING SERVO
4.2 REPLACING BATTERY FOR ABSOLUTE PULSECODERS
4.2.1 Overview
• When the voltage of the batteries for absolute Pulsecoders becomes low, alarm 307 or 306 occurs, with
the following indication in the CNC state display at the bottom of the CNC screen.
Alarm 307 (alarm indicating the voltage of the battery becomes low) :
The indication "APC" blinks in reversed display.
Alarm 306 (battery zero alarm) :
The indication "ALM" blinks in reversed display.
• When alarm 307 (alarm indicating the voltage of the battery becomes low) occurs, replace the battery
as soon as possible. In general, the battery should be replaced within one or two weeks, however, this
depends on the number of Pulsecoders used.
• When alarm 306 (battery zero alarm) occurs, Pulsecoders are reset to the initial state, in which absolute
positions are not held. Alarm 300 (reference position return request alarm) also occurs, indicating that
reference position return is required.
• In general, replace the batteries periodically within the service life listed below.
- A06B-6050-K061 or D-size alkaline dry cells (LR20) : Two years (for each six-axis
configuration)
- A06B-6093-K001 : One years (for each three-axis configuration)
- A06B-6114-K504 : One year (for each three-axis configuration)
NOTE
The above values indicate the estimated service life of batteries used with FANUC
absolute Pulsecoders. The actual battery service life depends on the machine
configuration based on, for example, detector types. For details, contact the
machine tool builder.
4.2.2 Replacing Batteries

To prevent absolute position information in absolute Pulsecoders from being lost, turn on the machine
power before replacing the battery. The replacement procedure is described below.
<1> Ensure that the power to the servo amplifier is turned on.
<2> Ensure that the machine is in the emergency stop state (the motor is inactive).
<3> Ensure that the DC link charge LED of the servo amplifier is off.
<4> Detach the old batteries and attach new ones.
The replacement of the batteries in a separate battery case and the replacement of the battery built into the
servo amplifier are described below in detail.
WARNING
1 The absolute Pulsecoder of each of the βi series servo motors (βiS0.4 to βiS40,
βiSc, and βiF) has a built-in backup capacitor. Therefore, even when the power to
the servo amplifier is off and the batteries are replaced, reference position return is
not required if the replacement completes within less than 10 minutes. Turn the
power on and replace the batteries if the replacement will take 10 minutes or more.
2 To prevent electric shock, be careful not to touch metal parts in the power
magnetics cabinet when replacing the batteries.
- 40 -
4.REPLACING SERVO
WARNING
3 Because the servo amplifier uses a large-capacitance electrolytic capacitor
internally, the servo amplifier remains charged for a while even after the power is
turned off. Before touching the servo amplifier for maintenance or other purposes,
4 Be sure to replace the batteries with specified ones. Pay attention to the battery
polarity. If a wrong type of battery is used or a battery is installed with incorrect
polarity, the battery may overheat, blow out, or catch fire, or the absolute position
information in the absolute Pulsecoders may be lost.
5 Ensure that the battery connector is inserted in the correct position.
4.2.3 Replacing the Batteries in a Separate Battery Case

Use the following procedure to replace the batteries in the battery case.
<1> Loosen the screws on the battery case and detach the cover.
<2> Replace the batteries in the case (pay attention to the polarity).
<3> Attach the cover to the battery case.
Battery case (with a cover)
A06B-6050-K060
Batteries
Four A06B-6050-K061 batteries or
D-size alkaline dry cells
CAUTION
1 Four D-size alkaline dry cells (LR20) that are commercially available can be used
as batteries. A set of four A06B-6050-K061 batteries is optionally available from
FANUC.
2 Replace all the four batteries with new ones. If old and new batteries are mixed,
the absolute position information in the absolute Pulsecoders may be lost.
4.2.4 Replacing the Battery Built into the Servo Amplifier

Use the following procedure to replace the special lithium battery.
<1> Detach the battery case.
<2> Replace the special lithium battery.
<3> Attach the battery case.
CAUTION
1 Purchase the battery from FANUC because it is not commercially available. It is
therefore recommended that you have a backup battery.
2 When the built-in battery is used, do not connect BATL (B3) of connector
CXA19B/CXA19A. Also, do not connect two or more batteries to the same BATL
(B3) line. These connections are dangerous because battery output voltages may
be short-circuited, causing the batteries to overheat.
3 Install the battery in the servo amplifier in a direction that allows slack in the cable.
If the battery cable is under tension, a bad connection may occur.
- 41 -
4. REPLACING SERVO
CAUTION
4 If the +6 V pin and 0 V pin of CX5X are short-circuited, the battery may overheat,
blow out, or catch fire, or the absolute position information in the absolute
Pulsecoders may be lost.
5 When inserting the connector, align it to the connector pins.
(1) For βiSV4 and βiSV20

βi SV Insertion direction
Cable side
Red: +6 V
Black: 0 V
Connector
CX5X
Battery +6V
0V
Battery case
(2) For βiSV40, βiSV80, βiSV10HV, βiSV20HV, and βiSV40HV

βi SV
Insertion direction
Cable side
Red: +6 V
Connector Black: 0 V
Battery
CX5X
Battery case
+6V
0V
- 42 -
4.REPLACING SERVO
(3) For βiSV20/20 and βiSV40/40
Insertion direction
Cable side
Red: +6 V
Connecto Black: 0 V
CX5X
Battery
+6V Battery case
0V
Used batteries
Old batteries should be disposed as "INDUSTRIAL WASTES" according to the regulations of the country
or autonomy where your machine has been installed.
4.2.5 Notes on Replacing a Battery (Supplementary Explanation)
4.2.5.1 Battery connection modes

The battery for the absolute Pulsecoder can be connected using [Connection method 1] and [Connection
method 2] explained below.
For details, refer to "Connecting the Battery" in the FANUC SERVO AMPLIFIER βi Series Descriptions
(B-65322EN).
[Connection method 1] Method of supplying battery power from one battery to

multiple βiSV amplifiers
Battery case
A06B-6050-K060
βiSV βi SV Battery
CXA19B CXA19B A06 B-6050-K061
CXA19A CXA19A
Connector
A06B-6130-K201
• If a low battery voltage or a battery voltage of 0 V is indicated by an APC (absolute Pulsecoder) alarm,
replace the battery. If a battery voltage of 0 V is indicated, you need to make a zero point return.
• The absolute Pulsecoder of the βi series servo motor (βiS 0.4 to βiS 40, βiSc, and βiF) is incorporated
with a backup capacitor as standard. This backup capacitor enables an absolute position detection to be
continued for about 10 minutes. Therefore, no zero point return need be performed if the time during
which servo amplifier power is kept off for battery replacement is within 10 minutes.
The Pulsecoder of the β series servo motors and some of the βi series servo motors (βiS 0.2 to βiS0.3)
does not include a backup capacitor. Be careful when replacing the battery for this Pulsecoder. See
Subsection 4.2.5.2, “Connecting the battery for the β series motor” at the end of this section for details.
• The battery service life is about two years for the βi series servo motors (βiS 0.4 to βiS 40, βiSc, and
βiF) if servo motors for six axes are connected. For the β series servo motors and some of the βi series
servo motors (βiS 0.2 to βiS0.3), the battery service life is about one year.
- 43 -
4. REPLACING SERVO
FANUC recommends that you replace the batteries periodically according to the battery service life.
• The battery unit consists of four R20 alkaline batteries. Commercial batteries can be used in the battery
unit. The optional battery offered by FANUC is A06B-6050-K061.
WARNING
1 Do not connect more than one battery to the same BAT (B3) line. If the output
voltage is different between the batteries, they may be short-circuited, resulting in
the batteries becoming very hot.
2 Install the battery with correct polarity. If the battery is installed with incorrect
polarity, it may overheat, blow out, or catch fire.
[Connection method 2] Method of building a built-in battery into each βiSV

2-axis β iSV
βiSV βiSV
Battery case
A06 B-6093-K002
Battery
A06 B-6093-K001
CX5X CX5X CX5X
Battery case
Battery case
A06B-6114-K505
A06B-6093-K002
Battery Battery
A06B-6093-K001 A06B-6114-K504
replace the battery (A06B-6093-K001). If a battery voltage of 0 V is indicated, you need to make a
zero point return.
The Pulsecoder of the β series servo motors and some of the βi series servo motors (βiS 0.2 to βiS0.3)
Subsection 4.2.5.2, “Connecting the battery for the β series motor” at the end of this section for details.
βiF). For the β series servo motors and some of the βiS series servo motors (βiS 0.2 to βiS0.3), the
battery service life is about one year.
• The built-in batteries are not commercially available. They must be purchased from FANUC. So,
FANUC recommends that you keep spares.
- 44 -
4.REPLACING SERVO
WARNING
1 When using the built-in batteries (A06B-6073-K001), do not connect them to the
BAT (B3) of connector CXA19B/CXA19A.
The output voltages from different batteries may be short-circuited, resulting in the
batteries becoming very hot.
2 Do not connect more than one battery to the same BAT (B3) line. If the output
4.2.5.2 Connecting the battery for the β series motor

The Pulsecoder for the β series servo motor and some models (βiS 0.2 to βiS 0.3) of he βi series servo motor
is not incorporated with a backup capacitor as standard. To keep the absolute position information in the
absolute Pulsecoder, you need to keep the control power turned on during battery replacement. Follow the
procedure explained below.
[Replacing procedure for the battery]

1. Make sure that the power to the βiSV is on (the LED "POWER" on the front of the βiSV is on).
2. Make sure that the emergency stop button of the system has been pressed.
3. Make sure that the motor is not activated.
4. Make sure that the DC link charge LED of the βiSV is off.
5. Remove the old battery, and install a new battery.
6. This completes the replacement. You can turn off the power to the system.
WARNING
1 When replacing the battery, be careful not to touch bare metal parts in the panel.
In particular, be careful not to touch any high-voltage circuits due to the electric
shock hazard.
2 Before replacing the battery, check that the DC link charge confirmation LED on
the front of the servo amplifier is off. Neglecting this check creates an electric
shock hazard.
4 Avoid a short-circuit between the +6 V and 0 V lines of a battery or cable. A
short-circuit may lead to a hot battery, an explosion, or fire.
4.2.5.3 Notes on attaching connectors

If an excessive strain is applied to a connector when it is inserted or removed, a poor contact may result.
When inserting and removing the battery connector, therefore, be careful not to apply an excessive
wrenching force to it; just follow the instructions given in the following table.
(1) Attaching connectors

Check the attachment
<1>
position.
- 45 -
4. REPLACING SERVO
Plug the cable connector while

<2>
raising it slightly.
10 degrees or less
Here, the angle of the cable

<5> connector to the horizontal
must be 5 degrees or less.
5 degrees or less
After passing the lock pin,

<3>
insert the connector straight.
The attachment of the

<4>
connector is completed.
(2) Detaching the connector
Hold both the sides of the

<1> cable insulator and the cable,
and pull them horizontally.
Pull out the cable side while

<2>
10 degrees or less
Here, the angle of the cable to

<3> the horizontal must be 5
degrees or less.
5 degrees or less
- 46 -
4.REPLACING SERVO
4.3 HOW TO REPLACE THE FUSES AND PRINTED CIRCUIT

BOARDS
4.3.1 How to Replace the Fuses and Printed Circuit Boards

In the βi series, a printed-circuit board can be removed and inserted from the front of the servo amplifier.
(1) For βiSV 4 and βiSV20
Hold the upper and

lower hooks.
Pull the
printed-circuit board
toward you.
Printed-circuit board
To insert the printed-circuit board, reverse the above procedure.

Ensure that the upper and lower hooks snap into the housing.
If the printed-circuit board is not inserted completely, the housing remains lifted. Pull out the
printed-circuit board and insert it again.
- 47 -
4. REPLACING SERVO
(2) For βiSV40, βiSV 80, βiSV10HV, βiSV20HV, and βiSV40HV
Hold the upper and

lower hook s.
Pull the
printed-circ uit board
toward you.

- 48 -
4.REPLACING SERVO
(3) For βiSV20/20, and βiSV40/40
Hold the upper and

lower hooks.
Pull the
printed-circuit board
toward you.

- 49 -
4. REPLACING SERVO
4.3.2 Fuse Locations

There is one fuse on the βiSV printed-circuit board.
(1) A20B-2101-0050, A20B-2101-0051, and A20B-2102-0081
FU1 (3.2A) FU1 3.2A
(Rating indicated in white)

Printed circuit board

(2) A20B-2101-0290 and A20B-2101-0881
FU1 (3.2A)
Fuse specification
Symbol Ordering number
FU1 A60L-0001-0290/LM32C
- 50 -
III. START-UP PROCEDURE FOR βiSVSP
B-65325EN/02 START-UP PROCEDURE FOR βiSVSP 1.OVERVIEW
1 OVERVIEW
This part describes the units and components of the FANUC Servo Amplifier βi series. It also explains the
following information necessary to start up the servo amplifier:
• Configurations
• Start-up procedure
• Confirmation of the operation
• Periodic maintenance of servo amplifier
- 53 -
2.CONFIGURATIONS START-UP PROCEDURE FOR βiSVSP B-65325EN/02
2 CONFIGURATIONS
2.1 CONFIGURATIONS
The Servo Amplifier βiSVSP consists of the units and components listed below:
(1) βi SVSP and βi SVSPc (basic)
(2) AC reactor (basic)
(3) Connectors (for connecting cables) (basic)
(4) Fuses (option)
(5) Power transformer (option)
Constituent (example)
FAN MOTOR FAN MOTOR
※CAUTION1
(For external cooling) (For external cooling)
βiSVSP*-7.5,11,15
CXA2A
βiSVSPc*-7.5,7.5L,11
Power failure JF1 Servo Motor
CX36
detect signal
Pulse Coder I/F JF2 Servo Motor
CX38
JF3 Servo Motor
CX3 JX6
ESP CX4 JY1 LM,SM,OVR
JA7B CNC
DC24V Power Supply CXA2C Spindle I/F
JA7A
BATTERY CX5X
JYA2 Spindle Motor Sensor (αiM Sensor, αiMZ Sensor)
COP10B
CNC
(FSSB I/F) Spindle Sensor JYA3 Separated Sensor (αi PositionCoder, αiCZ Sensor)※CAUTION2
COP10A Separated Sensor (αiBZ Sensor, α PositionCoderS)

JYA4
(FSSB I/F)
BREAKER2 Lightning Surge CZ2L CZ2M CZ2N TB1 TB3

TB2 FLANGE
(5A) Absorber
BREAKER1 MCC AC Reactor

DC24V Power Supply
AC200V～240V
For Motor Brake
G G
JF3
JF2
Pulse Coder I/F
JYA2
JF1
Spindle Motor Servo Motor
NOTE
1 Always install the circuit breakers, magnetic contactor, and AC reactor.
2 Use the stabilized power supply 24VDC for the servo amplifier. Power supply
24VDC for the servo amplifier and power supply 24VDC for the motor brake
cannot be shared.
3 To protect the equipment from lightning surge voltages, install a lightning surge
absorber across each pair of power lines and across each power line and the
grounding line at the power inlet of the power magnetics cabinet.
4 Always ground the grounding terminal (G) on TB2 and the tapped hole for
grounding the flange.
- 54 -
B-65325EN/02 START-UP PROCEDURE FOR βiSVSP 2.CONFIGURATIONS
NOTE
5 The AC reactor is different from the AC line filter, which is designed for another
purpose. Substituting one for the other or using one as both the reactor and filter is
not allowed.
CAUTION
1 In the βiSVSP*-7.5 and -11, as well as the βiSVSPc*-7.5L and -11, install only one
separated cooling fan motor (for cooling the radiator fin). If installing only one,
install it on this side.
2 The αiCZ sensor cannot be connected to the βiSVSPc.
2.2 MAJOR COMPONENTS
2.2.1 βiSVSP
(1) βiSVSP
Power printed Control printed Module printed
Model Order specification Unit specification circuit board circuit board circuit board
specification specification specification
βiSVSP20/20-5.5 A06B-6134-H201#A A06B-6134-C201#A A20B-2101-0020
βiSVSP20/20-11 A06B-6134-H202#A A06B-6134-C202#A A20B-2101-0021 A20B-2101-0012
βiSVSP40/40-15 A06B-6134-H203#A A06B-6134-C203#A A20B-2101-0022
A20B-2902-0670
βiSVSP20/20/40-5.5 A06B-6134-H301#A A06B-6134-C301#A A20B-2101-0023
βiSVSP20/20/40-11 A06B-6134-H302#A A06B-6134-C302#A A20B-2101-0024 A20B-2101-0013
βiSVSP40/40/40-15 A06B-6134-H303#A A06B-6134-C303#A A20B-2101-0025
βiSVSP20/20-5.5 A06B-6134-H201#C A06B-6134-C201#C A20B-2101-0020
βiSVSP20/20-11 A06B-6134-H202#C A06B-6134-C202#C A20B-2101-0021 A20B-2101-0012
βiSVSP40/40-15 A06B-6134-H203#C A06B-6134-C203#C A20B-2101-0022
A20B-2902-0672
βiSVSP20/20/40-5.5 A06B-6134-H301#C A06B-6134-C301#C A20B-2101-0023
βiSVSP20/20/40-11 A06B-6134-H302#C A06B-6134-C302#C A20B-2101-0024 A20B-2101-0013
βiSVSP40/40/40-15 A06B-6134-H303#C A06B-6134-C303#C A20B-2101-0025
βiSVSP20/20-7.5 A06B-6134-H201#D A06B-6134-C201#D A20B-2101-0440
βiSVSP20/20-11 A06B-6134-H202#D A06B-6134-C202#D A20B-2101-0441 A20B-2101-0450 −
βiSVSP40/40-15 A06B-6134-H203#D A06B-6134-C203#D A20B-2101-0022
βiSVSP20/20/40-7.5 A06B-6134-H301#D A06B-6134-C301#D A20B-2101-0581
βiSVSP20/20/40-11 A06B-6134-H302#D A06B-6134-C302#D A20B-2101-0582
A20B-2101-0452 −
(2) βiSVSP for 0i/0i Mate-D series CNC

βiSVSP20/20-7.5 A06B-6164-H201#H580 A06B-6164-C201 A20B-2101-0440
βiSVSP20/20-11 A06B-6164-H202#H580 A06B-6164-C202 A20B-2101-0441 A20B-2101-0710 A20B-2902-0671
βiSVSP40/40-15 A06B-6164-H223#H580 A06B-6164-C223 A20B-2101-0022
A20B-2102-0206 A20B-2902-0674
βiSVSP20/20/40-7.5 A06B-6164-H311#H580 A06B-6164-C311 A20B-2101-0581
βiSVSP20/20/40-11 A06B-6164-H312#H580 A06B-6164-C312 A20B-2101-0582
A20B-2101-0711 A20B-2902-0671
- 55 -
2.CONFIGURATIONS START-UP PROCEDURE FOR βiSVSP B-65325EN/02

A20B-2102-0207 A20B-2902-0674
βiSVSP20/20-7.5 A06B-6165-H201#H560 A06B-6165-C201 A20B-2101-0440
βiSVSP20/20-11 A06B-6165-H202#H560 A06B-6165-C202 A20B-2101-0441 A20B-2101-0710
βiSVSP20/20/40-7.5 A06B-6165-H311#H560 A06B-6165-C311 A20B-2101-0581 A20B-2902-0672
A20B-2101-0711
2.2.2 βiSVSPc
βiSVSPc20/20-7.5 A06B-6167-H201#H560 A06B-6167-C201 A20B-2101-0440
βiSVSPc20/20-7.5L A06B-6167-H209#H560 A06B-6167-C209 A20B-2101-0440 A20B-2101-0710
βiSVSPc20/20-11 A06B-6167-H202#H560 A06B-6165-C202 A20B-2101-0441
A20B-2902-0673
βiSVSPc20/20/20-7.5 A06B-6167-H301#H560 A06B-6167-C301 A20B-2102-0104
βiSVSPc20/20/20-7.5L A06B-6167-H309#H560 A06B-6167-C309 A20B-2102-0104 A20B-2101-0711
βiSVSPc20/20/20-11 A06B-6167-H302#H560 A06B-6165-C302 A20B-2102-0105
- 56 -
B-65325EN/02 START-UP PROCEDURE FOR βiSVSP 3.START-UP PROCEDURE
3 START-UP PROCEDURE
3.1 START-UP PROCEDURE (OVERVIEW)
Make sure that the specifications of the CNC, servo motors, spindle motors, servo amplifiers, and other
units you received are exactly what you ordered, and these units are connected correctly. Then, turn on the
power.
The items to be checked are described below.

Checking the installation of the servo amplifier
1 Specification of the servo Check the combination of the servo amplifier and the servo motor is correct.
amplifier and servo motor Refer to the Servo Amplifier βi series Descriptions (B-65322EN).
2 Packing of the flange Check the supplied packing is attached properly and that there is no gap
between the control panel and the amplifier flange.
3 Keeping maintenance Keep maintenance areas above and below the amplifier.
areas For details, refer to the Servo Amplifier βi series Descriptions (B-65322EN).
4 Prevention of contact Check a protective plate is attached to the DC link terminal board.
with conductive section For details, refer to the Servo Amplifier βi series Descriptions (B-65322EN).
5 Measure against entry of Take a measure to prevent electroconductive, flammable, and corrosive material
coolant as well as mist and water drop from getting in the unit. For keeping of the
effective closeness of the control panel, refer to Appendix G "EXAMPLES OF
RECOMMENDED POWER MAGNETICS CABINETS FOR SERVO AMPLIFIER
INSTALLATION" in the αi series Servo Amplifier Descriptions” (B-65412EN).
Checking the wiring for the servo amplifier
6 Screwing to the terminal When connecting wires to the servo amplifier terminal board, be sure to tighten
block the screws with a proper torque. For the detail of the tightening torque for the
terminal board screws, refer to the Servo Amplifier βi series Descriptions
(B-65322EN).
7 Connecting protective Use a proper cable for grounding in order to prevent electrical shocks at a ground
ground fault. For details, refer to Subsection 9.3.1.7 of the Servo Amplifier βi series
Descriptions” (B-65322EN).
8 Installing the lightning In order to prevent damage due to a surge voltage applied to the input power
serge protector supply, install a lightning surge protector. For details, refer to the Servo Amplifier
βi series Descriptions” (B-65322EN).
9 Measure against noise Check that ground wires, including feedback cable shielding clamps, are
connected to proper places to maintain a stable operation of the machine. For
details, refer to the Servo Amplifier βi series Descriptions” (B-65322EN).
10 Phase order of motor If the phase order of motor power lines is incorrect, the motor may operate
power lines unexpectedly. Make sure that the motor power lines are connected correctly.
11 Checking the axis to If the axis to which the motor feedback wire and power wire are connected is
which the motor feedback incorrect, the motor may operate unexpectedly. So, make sure that the
wire and power wire are connection is correct.
connected
12 Connection of batteries Do not connect the built-in batteries in parallel. Please make sure, if the built-in
batteries are used with an amp-to-amp battery connection cable (CXA2A/C or
BATL (B3)) attached, they may be connected in parallel. For details, refer to the
Servo Amplifier βi series Descriptions” (B-65322EN).
Check during startup of operation
13 Checking the power Before turning on the power, check that the power supply voltage is in its proper
supply voltage range. For details of the power supply voltage specification, refer to the Servo
Amplifier βi series Descriptions” (B-65322EN).
- 57 -
3.START-UP PROCEDURE START-UP PROCEDURE FOR βiSVSP B-65325EN/02

14 Setting the ground fault Use a ground fault interrupter that supports inverters. For information about
breaker leakage current, refer to the Servo Amplifier βi series Descriptions (B-65322EN).
15 Checking the control Check that the voltage of the 24 V power supply for amplifiers is in its proper
power range and the selected current capacity is proper. For details, refer to the Servo
Amplifier βi series Descriptions (B-65322EN).
16 Setting parameters Set initial parameters with reference to Section 3.3.
17 Handling early failures To solve start-up problems, such as being impossible to turn on the power, motor
failing to rotate, and occurrence of an alarm, see Chapter 4 of this document.
3.2 CONNECTING THE POWER
3.2.1 Checking the Voltage and Capacity of the Power

Before connecting the power, you should measure the AC power voltage.
Table 3.2.1(a) Action for the AC power (200-V input type)

Permissible voltage
fluctuation width
Permitted.
-15% 3-phae
Note) If the voltage is below the rated value, the rated output may
+10% 200 to 240V
not be obtained.
Not permitted.
-15%
380 to 550V This power line must be connected through an insulation
+10%
transformer to step down the voltage to 200 V.
Tables 3.2.1 (b), (c), and (d) list the input power specification for the power supply module. Use a power
source with sufficient capacity so that the system will not malfunction due to a voltage drop even at a time
of peak load.
(1) βiSVSP
Table 3.2.1(b) AC power voltage specifications (200-V input type)
A06B-6134-H201#A A06B-6134-H202#A A06B-6134-H203#A
Specification
A06B-6134-H201#C A06B-6134-H202#C A06B-6134-H203#C
Model βiSVSP20/20-5.5 βiSVSP20/20-11 βiSVSP40/40-15
Power source capacity (for the main
9 17 22
circuit) [kVA]
Power source capacity (for the
24V 1.5A ±10%
control circuit)
A06B-6134-H301#A A06B-6134-H302#A A06B-6134-H303#A

Specification
A06B-6134-H301#C A06B-6134-H302#C A06B-6134-H303#C
Model βiSVSP20/20/40-5.5 βiSVSP20/20/40-11 βiSVSP40/40/40-15
9 17 22
circuit) [kVA]
24V 1.5A ±10%
control circuit)
- 58 -
Specification A06B-6134-H201#D A06B-6134-H202#D A06B-6134-H203#D

Model βiSVSP20/20-7.5 βiSVSP20/20-11 βiSVSP40/40-15
13 18 24
circuit) [kVA]
24V 1.5Amax ±10%
control circuit)
Specification A06B-6134-H301#D A06B-6134-H302#D A06B-6134-H303#D A06B-6134-H313#D

Model βiSVSP20/20/40-5.5 βiSVSP20/20/40-11 βiSVSP40/40/40-15 βiSVSP40/40/80-15
Nominal voltage
200 to 240VAC -15%,+10%
rating
Power source
50/60Hz ±1Hz
frequency
Power source
capacity (for the 13 19 24 25
main circuit) [kVA]
Power source
capacity (for the 24V 1.5Amax ±10%
control circuit)
(2) βiSVSP for 0i/0i Mate-D series CNC

Table 3.2.1(c) AC power voltage specifications (200-V input type)
A06B-6164 A06B-6164 A06B-6164
-H201#H580 -H202#H580 -H223#H580 A06B-6164 A06B-6164
Specification
A06B-6165 A06B-6165 A06B-6165 -H224#H580 -H244#H580
-H201#H560 -H202#H560 -H223#H560
Model βiSVSP20/20-7.5 βiSVSP20/20-11 βiSVSP40/40-15 βiSVSP40/40-18 βiSVSP80/80-18
Nominal voltage
200 to 240VAC -15%,+10%
rating
Power source
50/60Hz ±1Hz
frequency
Power source
capacity (for the 11 14 21 26 27
main circuit) [kVA]
Power source
control circuit)
- 59 -
3.START-UP PROCEDURE START-UP PROCEDURE FOR βiSVSP B-65325EN/02
A06B-6164 A06B-6164 A06B-6164 A06B-6164

-H311#H580 -H312#H580 -H333#H580 -H343#H580 A06B-6164 A06B-6164
Specification
A06B-6165 A06B-6165 A06B-6165 A06B-6165 -H344#H580 -H364#H580
-H311#H560 -H312#H560 -H333#H560 -H343#H560
βiSVSP20/20/40 βiSVSP20/20/40 βiSVSP40/40/40 βiSVSP40/40/80 βiSVSP40/40/80 βiSVSP80/80/80
Model
-7.5 -11 -15 -15 -18 -18
Nominal voltage
200 to 240VAC -15%,+10%
rating
Power source
50/60Hz ±1Hz
frequency
Power source
capacity (for the
13 16 23 24 28 29
main circuit)
[kVA]
Power source
control circuit)
(3) βiSVSPc
Table 3.2.1(c) AC power voltage specifications (200-V input type)
Specification A06B-6167-H201#H560 A06B-6167-H209#H560 A06B-6167-H202#H560
Model βiSVSPc20/20-7.5 βiSVSPc20/20-7.5L βiSVSPc20/20-11
11 11 14
circuit) [kVA]
24V 1.5A ±10%
control circuit)
Specification A06B-6167-H301#H560 A06B-6167-H309#H560 A06B-6167-H302#H560

Model βiSVSPc20/20/20-7.5 βiSVSPc20/20/20-7.5L βiSVSPc20/20/20-11
Nominal voltage rating AC200V∼240V -15%,+10%
12 12 15
circuit) [kVA]
24V 1.5A ±10%
control circuit)
3.2.2 Connecting a Protective Ground

Check that a protective ground is connected correctly with reference to individual items in Chapter 6
3.2.3 Selecting the Ground Fault Interrupter That Matches the

Leakage Current
Check that a ground fault breaker is selected correctly with reference to individual items in Chapter 6
- 60 -
3.3 INITIALIZING PARAMETERS

(1) Servo motor
For the initialization of servo parameters, refer to the following manual:
FANUC AC SERVO MOTOR αi series / FANUC AC SERVO MOTOR βi series/ FANUC LINEAR
LiS series / FANUC BUILT-IN SERVO MOTOR DiS series Parameter Manual (B-65270EN)
(2) Spindle motor

For the initialization of spindle parameters, refer to the following manual:
FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series /FANUC
BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)
- 61 -
OPERATION START-UP PROCEDURE FOR βiSVSP B-65325EN/02
4 CONFIRMATION OF THE OPERATION

4.1 OUTLINE OF βiSVSP
4.1.1 Connector and STATUS LED Locations

(1) βiSVSP(A06B-6134-H***#A,#C)
No. Name Remarks
1 STATUS1 Status LED : spindle
2 STATUS2 Status LED : servo
3 CX3 Main power MCC control signal
1
4 CX4 Emergency stop signal (ESP)
5 CXA2C 24VDC power input
6 COP10B Servo FSSB I/F
2
7 CX5X Absolute Pulsecoder battery
3
8 JF1 Pulsecoder : L axis
4 9 JF2 Pulsecoder : M axis
5 10 JF3 Pulsecoder : N axis
11 JX6 Power outage backup module
6
7
12 JY1 Load meter, speedometer, analog
8
override
9 13 JA7B Spindle interface input
10 14 JA7A Spindle interface output
11 15 JYA2 Spindle sensor Mi,MZi
12 16 JYA3 αi position coder
13
External one-rotation signal
14
17 JYA4 (Unused)
15
16
18 TB3 DC link terminal block
17 19 DC link charge LED (Warning)
21 22 23 20 TB1 Main power supply connection terminal
board
21 CZ2L Servo motor power line : L axis
22 CZ2M Servo motor power line : M axis
24 20 19 18
23 CZ2N Servo motor power line : N axis
25 24 TB2 Spindle motor power line
25 Tapped hole for grounding the flange
WARNING
Do not touch any component in the module or any connected cable when LED 19
is on, because it is dangerous.
- 62 -
B-65325EN/02 START-UP PROCEDURE FOR βiSVSP OPERATION
(2) βiSVSP(A06B-6134-H***#D)
No. Name Remarks

3 CX36 Power outage output
4 CX38 Power outage input
2
5 CX3 Main power MCC control signal
1 6 CX4 Emergency stop signal (ESP)
5 8 CXA2A 24VDC power output
3 9 COP10B Servo FSSB I/F
4 6
7 10 COP10A Servo FSSB I/F
8 11 CX5X Absolute Pulsecoder battery
12 JF1 Pulsecoder : L axis
9
13 JF2 Pulsecoder : M axis
10 14 JF3 Pulsecoder : N axis
11 15 JX6 Power outage backup module
12 16 JY1 Load meter, speedometer, analog
13 override
15
18 JA7A Spindle interface output
16
17 19 JYA2 Spindle sensor Mi,MZi
18 20 JYA3 αi position coder
19 External one-rotation signal
20 21 Signal grounding terminal
21
25 26 27 22 TB3 DC link terminal block
23 DC link charge LED (Warning)
24 TB1 Main power supply connection terminal
board
28 24
23 22 25 CZ2L Servo motor power line : L axis
29
28 TB2 Spindle motor power line
WARNING
- 63 -
(3) βiSVSP(A06B-6164-H***#H580, A06B-6165-H***#H560), βiSVSPc(A06B-6167-H***#H560)

No. Name Remarks
31
3 CX38 Power outage input
2 4 CX3 Main power MCC control signal
1
5 CX4 Emergency stop signal (ESP)
5 6 CX36 Power outage output
3 4 6 8 CXA2A 24VDC power output
7 9 COP10B Servo FSSB I/F
8 10 COP10A Servo FSSB I/F
9 11 CX5X Absolute Pulsecoder battery
10 12 JF1 Pulsecoder : L axis
13 JF2 Pulsecoder : M axis
11
14 JF3 Pulsecoder : N axis
12
15 JX6 Power outage backup module
13
14 Load meter, speedometer, analog
16 JY1
15 override
17 18 JA7A Spindle interface output
18
19 JYA2 Spindle sensor αi M, αi MZ
19
Separate spindle sensor
20
20 JYA3 (αi position coder, αiCZ sensor)
22 21
26 27 28 External one-rotation signal
Separate spindle sensor
21 JYA４
(α position coder S, αiBZ sensor)
22 Signal grounding terminal
23 TB3 DC link terminal block

29 30 25 24 23
24 V4 DC link charge LED (Warning)
Main power supply connection terminal

25 TB1
board
26 CZ2L Servo motor power line : L axis
29 TB2 Spindle motor power line
31 CN4 Connector for internal cooling fan
WARNING
- 64 -
4.1.2 Start-up Procedure

Check each item according to the procedure described below.
1. Check connection.
2. Supply control power (24 VDC) to the β iSVSP
3. Check the STATUS indicator. Alarm issued.

IV. Troubleshooting
See Subsection 4.3.1.
OK
4.Has the system been us ed with this c onnection status?
Yes
No
5. Prepare and check a PMC ladder.
6. Set and check spindle-related parameters.

(The parameter manual is required.)
7. Check the waveform on the s ensor. See Subs ection 4.3.4.
8. Check CNC parameters (including s ervo

parameters ).
Alarm iss ued.

9. Release the s ystem from the IV. Troubleshooting
emergency stop state.
10. Make sure that the magnetic contactor for input is turned on.
See Section 4.2.
11. Start operating spindle motor in normal operation mode (S command).
12. Check operations of optional spindle functions.
Abnormal operation See the Parameter

13. Check servo motor operation. Manual.
- 65 -
4.2 βiSVSP COMMON POWER SUPPLY UNIT
4.2.1 The LED (STATUS Indicator) Is Off.

Table 4.2.1 Check method and action
No. Cause of trouble Check method Action
24-VDC power for the Check that power is connected to
1
control circuit not supplied connector CXA2C.
Replace the fuse. If the fuse blows
Blown fuse in the control
2 Check whether FU1 has blown. again after the replacement, replace
circuit
the printed circuit board.
Check the wiring according to the
3 Incorrect wiring
Descriptions.
24VDC power output Check whether 24VDC power output
4 Remove the cause of a short circuit.
(CXA2A) short-circuited has been short-circuited.
Check whether the number of amplifiers
connected to 24VDC power output
Load of 24VDC power
5 (CXA2A) exceeds a specified number
output (CXA2A) too large
or a device other than an amplifier is
connected to 24VDC power output.
The LED indicator operates on the +5-V Replace the printed circuit board,
Faulty power supply circuit
6 power supply. Check the control power driver board, or power distribution
on the printed circuit board
voltage. board.
4.2.2 Checking Method when Magnetic Contactor Is not Switched

On
(1) The system is still in an emergency stop status.
→ Check the connection.
(2) There is a connector problem.
(a) Check that the connectors are attached to correct locations.
(3) The power for driving the magnetic contactor is not supplied.
→ Check the voltage across the both ends of the coil of the magnetic contactor.
(4) The relay for driving the magnetic contactor is defective.
→ Check that a circuit between pins CX3-1 and CX3-3 of connector is closed and opened.
β iS VSP
CX3-1
MCC driving rela y
CX3-3
(5) The βiSVSP is defective.

→ Replace the defective βiSVSP.
- 66 -
4.2.3 Check Terminal on the Printed-circuit Board

The input current check signal is output to connector JX6 on the βiSVSP. To observe the output, use the
servo check pin board A06B-6071-K290 (see below).
Table 4.2.3 (a) Check pins

Check pin Description Location of observation Remark
IR L1 phase (R-phase) current JX6-pin1 The "+" sign with respect to the input
IS L2 phase (S-phase) current JX6-pin2 of the amplifier.
If the L1 or L2 phase current exceeds
Reference point of
0V JX6-pin12,14,16 the overcurrent alarm level, an alarm
observation
condition occurs in the βiSVSP.
Table 4.2.3 (b) IR and IS current conversion value

Model Current conversion
βiSVSP*-5.5 133A/1V (2.5 V at the center)
βiSVSP*-7.5 133A/1V (2.5 V at the center)
βiSVSP*-11 133A/1V (2.5 V at the center)
About the servo check pin board A06B-6071-K290
The servo check pin board can be used to observe signals in the βiSVSP.
(1) Specification
Order specification Description Remark
Printed-circuit board Printed-circuit board with check pins
A20B-1005-0340 mounted
A06B-6071-K290
Cable 20-conductor one-to-one cable
A660-2042-T031#L200R0 Length : 200mm
Printed-circuit board : A20B-1005-0340
A20B-1005-0340
<5> <4> <3> <2> <1>
<10> <9> <8> <7> <6>

34mm
<15> <14> <13> <12> <11>
<20> <19> <18> <17> <16>
CN1 CN2
100mm
Cable : A660-2042-T031#L200R0
Approx. 200mm
One-to-one wiring is provided between CN1 and CN2.

The connector pin numbers correspond to the check pin numbers.
- 67 -
(2) Connection
Connect the cable to the connector JX6 at the front of the βiSVSP.
SVPM
A20B-1005-0340
JX6
CN2
CN1
4.3 βiSVSP SPINDLE UNIT
4.3.1 STATUS 1 Indicator
ALM
ERR
STATUS １
No. ALM ERR STATUS1 Description

The control power supply has not been switched on.
1 No indication
The power supply circuit is defective.
For about 1.0 s after the control power supply is switched on, the lower
2 80 two digits of the spindle software series No. are indicated.
Example) 80: Software series No. 9D80
The spindle software edition number is displayed for about 1.0 s. 01, 02,
3 04 03, and so on correspond to A, B, C, and so on, respectively.
Example) 04: software edition D
The CNC has not been switched on.
--
4 The machine is waiting for serial communication and parameter
Blinking
loading to end.
--
5 Parameter loading has ended. The motor is not supplied with power.
Lighting
6 00 The motor is supplied with power.
Alarm state
01 or above is
7 Lighting The βiSVSP is not operable.
displayed.
See Chapter 1 of Part IV.
01 or above is Error state
8 Lighting
displayed. Incorrect parameter setting or improper sequence.
- 68 -
4.3.2 Troubleshooting at Startup
4.3.2.1 The STATUS 1 indicator is blinking with "--."

(1) When no spindle communication alarm message is indicated on the CNC
Check whether the CNC software option setting or bit setting is correct.
(2) When a communication alarm message is indicated on the CNC
No. Cause of trouble Check method Action
Note that the cable used for
connecting an electric/optical
Replace the cable with a correct
1 The cable is incorrect. adapter and the cable connected
cable.
directly to the CNC differ in
specifications.
Check the connector housing
2 The cable is defective. Repair or replace the cable.
section.
3 The printed circuit board is defective. Replace the unit.
4.3.2.2 The motor does not turn.

(1) When "--" is indicated on the STATUS 1 indicator of the βiSVSP
Check whether spindle control signals are input. (An example for the first spindle is shown below.)
FS0i #7 #6 #5 #4 #3 #2 #1 #0
G070 MRDYA SFRA SRVA
G071 *ESPA
G029 *SSTP
G030 SOV7 SOV6 SOV5 SOV4 SOV3 SOV2 SOV1 SOV0
(2) When "00" is indicated on the STATUS 1 indicator of the βiSVSP

No spindle speed command is input.
Refer to Chapter 1 in " FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi
series /FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)," and check
related parameters.
(3) When an alarm number is indicated on the STATUS 1 indicator of the βiSVSP
See the description of the alarm number in Part IV.
4.3.2.3 A specified speed cannot be obtained.

(1) When the speed always differs from a specified speed
Check parameters.
Refer to Chapter 1 in " FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi
series /FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)," and check
related parameters.
(2) When an alarm number is indicated on the STATUS 1 indicator of the βiSVSP
See the description of the alarm number in Part IV.
- 69 -
4.3.2.4 When cutting is not performed, the spindle vibrates, making

noise.
(1) When the spindle vibrates at a particular speed
Check whether the spindle also vibrates when the motor is turning by inertia. If the same vibration
occurs when the motor is turning by inertia, investigate the source of mechanical vibration. There are
several methods for turning the spindle by inertia, as described below. Because these methods involve
machine sequences, be sure to consult with the machine tool builder.
A. Input signal MPOF(FS30i:G73#2, FS15i:G228#2) to 1 immediately causes the spindle to turn by
inertia.
B. Set bit 2 (ALSP) of parameter No. 4009 (FS30i) or No. 3009 (FS15i) to 1. Then, when the power
to the CNC is turned off during spindle rotation, the spindle turns by inertia. At this time, on the
spindle amplifier, Alarm 24 is indicated.
(2) When the spindle vibrates regardless of the speed (also during a control stop)
A. Check and adjust the waveform of the spindle sensor. For details, see Subsection 4.3.4.
B. Check that the motor part number matches its parameters.
Refer to FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series
/FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN) for details.
C. Adjust the velocity loop gain and so forth.
4.3.2.5 An overshoot or hunting occurs.

Refer to FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series /FANUC
BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN), and adjust parameters.
4.3.2.6 Cutting power weakens or acceleration/deceleration slows

down.
(1) When the load meter does not indicate the maximum output
A. A mechanical cause such as a belt slip may occur.
(2) When the load meter indicates the maximum output
A. Check whether the torque limit signal is input incorrectly.
FS0i #7 #6 #5 #4 #3 #2 #1 #0
G070 TLMHA TLMLA
B. When the αiBZ sensor is used, the sensor gear may slide over the spindle during acceleration.
C. The motor part number may not appropriate for the specific parameters.
D. The output limit pattern may be set incorrectly.
- 70 -
4.3.3 Status Error Indication Function

When there is a sequence or parameter error, the error LED (yellow) in the STATUS 1 indicator of the
βiSVSP goes on with an error code displayed. This can ease troubleshooting at the time of machine startup.
status
The error LED

(yellow) lights.
An error code is indicated. (from 01)
If the βiSVSP spindle unit does not operate for a particular function, check whether a status error is
indicated in βiSVSP STATUS1.
No. Description Action

Although neither *ESP (emergency stop signal)
(there are two types of signals, a PMC signal and
Check the *ESP and MRDY sequences. For MRDY,
PSM contact signal) nor MRDY (machine ready
01 pay attention to the parameter that specifies whether to
signal) has been input, SFR (forward rotation
use the MRDY signal (bit 0 of parameter No. 4001).
signal), SRV (reverse rotation signal), or ORCM
(orientation command) is input.
Although parameter settings are such that that there
is no position sensor (position control is not to be
performed, that is, bits 3, 2, 1, and 0 of parameter
03 Check setting of the parameter.
No. 4002 are, respectively, 0, 0, 0, and 0), a Cs axis
contour control command has been issued.
In this case, the motor is not activated.
performed, that is, bits 3, 2, 1, and 0 of parameter
No. 4002 are, respectively, 0, 0, 0, and 0), a servo
04 Check setting of the parameter.
mode (such as rigid tapping or Cs axis control)
command or spindle synchronization control
command has been issued.
In this case, the motor is not activated.
Although optional parameter for the orientation
05 function is not set, an ORCM (orientation command) Check setting of the parameter for orientation.
is input.
Although optional parameter for the output switching
Check setting of the parameter for output switching and
06 option is not set, low-speed winding is selected
the power line status signal (RCH).
(RCH = 1).
Although Cs contour control mode is input, neither
07 SFR (forward rotation signal) nor SRV (reverse Check the sequence.
rotation signal) is input.
Although servo mode (such as rigid tapping or Cs
axis control) control command is input, neither SFR
08 Check the sequence.
(forward rotation signal) nor SRV (reverse rotation
signal) is input.
Although spindle synchronization control command
09 is input, neither SFR (forward rotation signal) nor Check the sequence.
SRV (reverse rotation signal) is input.
Although Cs contour control command is input, Do not specify another mode during execution of the Cs
10 another operation mode (servo mode, spindle contour control command. Before entering another
synchronization, or orientation) is specified. mode, cancel the Cs contour control command.
Although servo mode (such as rigid tapping or
Do not specify another mode during execution of the
spindle positioning) is input, another operation mode
11 servo mode command. Before entering another mode,
(Cs contour control, spindle synchronization, or
cancel servo mode.
orientation) is specified.
- 71 -

Do not specify another mode during execution of the
Although spindle synchronization is input, another
spindle synchronization command. Before entering
12 operation mode (Cs contour control, servo mode, or
another mode, cancel the spindle synchronization
orientation) is specified.
command.
Although orientation specification is input, another Do not specify another mode during execution of the
13 operation mode (Cs contour control, servo mode, or orientation command. Before entering another mode,
synchronization control) is specified. cancel the orientation command.
The SFR (forward rotation signal) and SRV (reverse
14 Input one of the SFR and SRV signals.
rotation signal) are input at the same time.
Although the parameter not to use the differential
speed control function (bit 5 of parameter No. 4000 = Check the setting of the parameter and the differential
16
0) is set, DEFMD (differential speed mode speed mode command.
command) is input.
The parameter settings for the speed detector (bits
17 2, 1, and 0 of parameter No. 4011) are invalid. There Check the setting of the parameter.
is no speed detector that matches the settings.
18 performed, that is, "bits 3, 2, 1, and 0 of parameter Check the setting of the parameter and the input signal.
No. 4002 are, respectively, 0, 0, 0, and 0," a position
coder-based orientation command has been issued.
Although magnetic sensor orientation command is Do not specify another mode during execution of the
19 input, another operation mode (Cs contour control, orientation command. Before entering another mode,
servo mode, or spindle synchronization) is specified. cancel the orientation command.
The tandem operation command was input in the Input the tandem operation command when spindle
21
spindle synchronization control enable state. synchronization control is canceled.
Spindle synchronization control was specified in the Specify spindle synchronization control when torque
22
tandem operation enable state. tandem operation is canceled.
The tandem operation command is input without the Torque tandem control requires a CNC software option.
23
required option. Check the option.
Although continuous indexing in position
Check the INCMD (incremental command).
coder-based orientation is to be performed, an
24 Be sure to perform absolute position command-based
absolute position command (INCMD = 0) has been
orientation before an absolute position command.
issued after incremental operation (INCMD = 1).
The parameter settings are such that both spindle Check the parameter settings and the input signal.
26 switch and three-stage speed range switch are
used.
Parameter settings are such that the shortest-time
orientation function is to be used (bit 6 of parameter The shortest-time orientation function cannot be used
29
No. 4018 is 0 and parameter Nos. 4320 to 4323 are in the βiSVSP. Use a different type of orientation.
nonzero).
The magnetic pole has not been detected, but a In the magnetic pole undetected state (EPFIXA = 0),
command is input. the motor cannot be driven even when a command is
input. Input a command in the magnetic pole detected
30 state (EPFIXA = 1). When EPFSTR is set to 1, any
command is ignored and this error is displayed even in
the magnetic pole detected state. After the completion
of magnetic pole detection, set EPFSTR to 0.
This hardware configuration does not support the
31 use of the spindle FAD function. In this case, the Check the CNC model.
motor is not activated.
S0 is not specified in the velocity mode, but the Specify S0 in the velocity mode before enabling the
32 disturbance input function is enabled (bit 7 of disturbance input function (bit 7 of parameter No. 4395
parameter No. 4395 is set to 1). to 1).
- 72 -

This hardware configuration does not support the
33 use of the spindle EGB function. In this case, the Check the CNC model.
motor is not activated.
Both spindle FAD function and spindle EGB function These functions cannot be used at the same time.
34
are enabled. In this case, the motor is not activated. Enable only one of the functions.
Spindle Amplifier (SP) ID information cannot be Replace the spindle amplifier with one with correct ID
35
obtained. information.
The submodule SM (SSM) is faulty . For the action to be taken for this status error, refer to
1) The interface signal between the Spindle Section 1.4, "Submodule SM," in Part IV in the FANUC
36 Amplifier and SSM is disconnected. AC SPINDLE MOTOR αi series / FANUC AC SPINDLE
2) SSM failure MOTOR βi series / FANUC BUILT-IN SPINDLE
MOTOR Bi series Parameter Manual (B-65280EN).
The current loop setting (No. 4012) has been Check the setting of parameter No. 4012, and turn the
37
changed. power off, then on again.
A parameter related to communication between Check the parameters.
spindle amplifiers is specified incorrectly.
38
Alternatively, a function unavailable with the torque
tandem function is set.
Although SFR (forward rotation command), SRV Check the sequence. Do not input DSCN
(reverse rotation command), or ORCM (orientation (disconnection detection disable signal) during the
39
command) is input, DSCN (disconnection detection input of a command which excites the motor.
disable signal) is input.
A setting which does not support the αiCZ sensor Check the parameter settings.
43
(serial) is used.
The spindle amplifier does not support the control Check the setting of parameter No. 4012.
44
period setting.
The setting of the maximum output limit during This is a status error concerning the function for output
cutting is not supported. limit during cutting. This function cannot be used in a
45
system in which this error occurs. Disable this function
by setting bit 6 of parameter No. 4011 to 0.
The CNC system software does not support spindle The CNC system software does not support a
46 synchronous control using a nano-command. nano-command. Check the series and edition of the
CNC system software.
The parameter setting for concurrent use of Set non-zero value to the parameter for the servo mode
57 optimum orientation is used and servo mode reference position return speed (parameter No. 4074).
reference position return is not correct.
The setting for the spindle orientation stop position • The CNC system software does not support the
least setting unit 360/32768deg is not correct. spindle orientation stop position least setting unit
360/32768deg. Check the series and edition of the
59 CNC system software.
• Concurrent use with the orientation function in
spindle synchronization control (bit 6 of parameter
No. 4014 is 1) is invalid.
The sequence for using spindle phase synchronous Check the sequence for phase matching of spindle
control is not correct. synchronous control. When bit 3 of parameter No. 4006
is set to 1 (not to detect the one-rotation signal
60 automatically), if the spindle phase synchronous
command is entered in a state where the one-rotation
signal is not detected, this error occurs. Check this
point.
Spindle DC-link stabilizer during power failure is not The spindle control software does not support spindle
63 supported. DC-link stabilizer during power failure. Check the series
and edition of the spindle control software.
- 73 -
NOTE
*1 When status error 43 is displayed, check the following items. The items to be
checked differ depending on the series and edition of the spindle software.
Series 9D80 edition E (edition 05) or edition F (edition 06): Items <1> to <12>
Series 9D80 edition G (edition 07): Items <1> to <9>, <12>, and <13>
Series 9D80 edition H (edition 08): Items <1> to <9>, <13>, and <14>
(1) For both the motor sensor and spindle sensor, the setting is made to use an
αiCZ sensor (serial). (No.4010#2,1,0=0,1,0 and No.4002#3,2,1,0=0,1,1,0)
(2) Spindle HRV control is not set. (No.4012#7=0)
(3) The setting is made to use the differential speed control function.
(No.4000#5=1)
(4) The setting is made to use the spindle switch control function.
(No.4014#0=1)
(5) The setting is made so that an alarm related to position feedback is not
detected. (No.4007#6=1 or No.4016#5=0)
(6) The setting is made so that the disconnection of the feedback signal is not
detected. (No.4007#5=1)
(7) The setting is made so that an alarm related to position signal feedback is not
detected during thread cutting. (No.4016#5=0)
(8) The setting is made to use an external one-rotation signal. (No.4004#2=1)
(9) The setting is made to use a position coder. (No.4002#3,2,1,0=0,0,1,0)
(10) The setting is made to drive a synchronous spindle motor. (No.4012#6=1)
(11) The setting is made to use communication between Spindle Amplifiers.
(No.4352#7=1 or No.4352#6=1)
(12) The setting is made to use the Dual Check Safety function.
(13) The setting is made to use the spindle tandem function. (No.4015#3=1)
(14) Although the setting is made to use an αiCZ sensor (serial) as the motor
sensor, the Dual Check Safety function is enabled.
4.3.4 Observing Data Using the SERVO GUIDE

4.3.4.1 Overview
Using the servo adjustment tool, SERVO GUIDE, enables you to observe internal data for the spindle.
This subsection describes the spindle data that can be observed using the SERVO GUIDE. It also presents
examples of observed data. Refer to online help for detailed explanations about how to use the SERVO
GUIDE.
4.3.4.2 Usable series and editions

(a) For βiSVSP
Series 9D50/G(07) and subsequent editions
Series 9D5A/A(01) and subsequent editions
Series 9D80/A(01) and subsequent editions
Series 9D8A/A(01) and subsequent editions
(b) For βiSVSPc
Series 9D60/C(03) and subsequent editions
- 74 -
4.3.4.3 List of spindle data that can be observed using the SERVO
GUIDE
(a) For βiSVSP
The following table lists the spindle data that can be observed using the SERVO GUIDE.
Data type Description Remark

SPEED Motor speed
INORM Motor current amplitude
TCMD Torque command
TCMD2 Torque command 2 9D5A/16 and subsequent editions (*4)
VCMD Motor speed command
VERR Speed deviation
MCMD Move command for an individual communication cycle
ERR Position deviation 9D50/11 and subsequent editions (*1)
ERRC Position deviation (CNC)
SYNC Synchronization error 9D50/11 and subsequent editions (*1)
ORERR Position error at orientation
ORSEQ Orientation sequence data
PCPOS Integration of position feedback value
CSPOS Integration of position feedback value
WMDAT Motion command per position loop
ERR2 Position deviation 2
ERR2C Position deviation 2 (CNC) 9D50/11 and subsequent editions (*1)
SPCMD Speed command data from the CNC
SPSPD Spindle speed 9D50/11 and subsequent editions (*1)
SPCT1 Spindle control signal 1
SPST1 Spindle status signal 1
SFLG1 Spindle flag 1 9D50/11 and subsequent editions (*1)
SPPOS Spindle position data 9D50/12 and subsequent editions (*1)
LMDAT Load meter data 9D50/11 and subsequent editions (*1)
Spindle load torque (Unexpected disturbance torque
DTRQ 9D50/11 and subsequent editions (*1)
detection function)
Frequency of disturbance torque (Disturbance input
FREQ 9D50/11 and subsequent editions (*1)
function)
GAIN Gain data (Disturbance input function) 9D50/11 and subsequent editions (*1)
MTTMP Motor winding temperature 9D50/11 and subsequent editions (*1)
Motor sensor feedback incremental data
MFBDF (For tuning amplitude ratio and phase difference 9D50/11 and subsequent editions (*1)
compensation)
Spindle sensor feedback incremental data
SFBDF (For tuning amplitude ratio and phase difference 9D50/11 and subsequent editions (*1)
compensation)
PA1 AD data of A phase of motor sensor 9D50/11 and subsequent editions (*1)
PB1 AD data of B phase of motor sensor 9D50/11 and subsequent editions (*1)
PA2 AD data of A phase of spindle sensor 9D50/11 and subsequent editions (*1)
PB2 AD data of B phase of spindle sensor 9D50/11 and subsequent editions (*1)
VDC DC link voltage 9D50/11 and subsequent editions (*1)
SFERR Semi-full error (Dual position feedback) 9D50/11 and subsequent editions (*1)
SMERR Semi-closed side error (Dual position feedback) 9D50/11 and subsequent editions (*1)
SPACC Spindle acceleration data 9D50/20 and subsequent editions (*3)
- 75 -
NOTE
*1 Available with 9D80/01 and subsequent editions, 9D5A/01 and subsequent
editions, and 9D8A/01 and subsequent editions
*2 To observe the data of *1, the SERVO GUIDE Ver. 3.0 or later is required.
*3 Available with 9D80/04 and subsequent editions, 9D5A/01 and subsequent
editions, and 9D8A/01 and subsequent editions. To observe this data, the SERVO
GUIDE Ver. 4.10 or later is required.
*4 Available with 9D8A/03 and subsequent editions. To observe this data, the
SERVO GUIDE Ver. 8.10 or later is required.
(b) For βiSVSPc

The following table lists the spindle data that can be observed using the SERVO GUIDE.
Data type Description Remark

SPEED Motor speed
INORM Motor current amplitude
TCMD Torque command
VCMD Motor speed command
VERR Speed deviation
MCMD Move command for an individual communication cycle
ERR Position deviation
ERRC Position deviation (CNC)
SYNC Synchronization error
ORERR Position error at orientation
ORSEQ Orientation sequence data
PCPOS Integration of position feedback value
WMDAT Motion command per position loop
ERR2 Position deviation 2
ERR2C Position deviation 2 (CNC)
SPCMD Speed command data from the CNC
SPSPD Spindle speed
SFLG1 Spindle flag 1
SPPOS Spindle position data
LMDAT Load meter data
MTTMP Motor winding temperature
VDC DC link voltage
4.3.4.4 About the spindle control and spindle status signals

As stated in the previous item, the SERVO GUIDE can be used to observe the PMC signals (spindle control
signals 1, 2, and 3 and spindle status signals 1 and 2) used by the spindle.
Listed below is the data configuration for spindle control signals 1 and 2 and spindle status signals 1 and 2.
Refer to Chapter 3, "Input/Output Signals (CNC ↔ PMC)" of " FANUC AC SPINDLE MOTOR αi series
/ FANUC AC SPINDLE MOTOR βi series /FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter
Manual (B-65280EN)" for explanations about each signal.
- 76 -
(a) Spindle control signal 1 (SPCT1)
#15 #14 #13 #12 #11 #10 #9 #8
RCH RSL INTG SOCN MCFN SPSL *ESP ARST
#7 #6 #5 #4 #3 #2 #1 #0
MRDY ORCM SFR SRV CTH1 CTH2 TLMH TLML
(b) Spindle control signal 2 (SPCT2)

#15 #14 #13 #12 #11 #10 #9 #8
DSCN SORSL MPOF
#7 #6 #5 #4 #3 #2 #1 #0
RCHHG MFNHG INCMD OVR NRRO ROTA INDX
(c) Spindle control signal 3 (SPCT3)

#15 #14 #13 #12 #11 #10 #9 #8
#7 #6 #5 #4 #3 #2 #1 #0
(d) Spindle status signal 1 (SPST1)

#15 #14 #13 #12 #11 #10 #9 #8
RCFN RCHP CFIN CHP
#7 #6 #5 #4 #3 #2 #1 #0
ORAR TLM LDT2 LDT1 SAR SDT SST ALM
(e) Spindle status signal 2 (SPST2)

#15 #14 #13 #12 #11 #10 #9 #8
#7 #6 #5 #4 #3 #2 #1 #0
EXOF SOREN INCST PC1DT
4.3.4.5 Example of observing data

The following figure shows an example of data (synchronization error and motor speed at rigid tapping)
observed using the SERVO GUIDE.
DRAW1：SYNC
DRAW2：SPEED
DRAW1 : SYNC (synchronization error) (*1)

DRAW2 : SPEED (motor speed)
*1 The synchronization error can be observed in the servo axis.
- 77 -
4.3.5 Spindle Check Board

When connecting the spindle check board, you can:
<1> Observe signal waveforms.
<2> Observe internal data.
<3> Check spindle parameter values.
4.3.5.1 Spindle check board specifications

Spindle check board specifications is bellow.
Table 4.3.5.1 Spindle check board specifications

Specification Drawing No. of printed circuit board Applicable unit
A06B-6078-H001 A20B-2001-0830 βiSVSP
4.3.5.2 Spindle check board connection

β iSVSP
JX6
JY1
Spindle check
JY 1A JX4A
board
A20B-2001-0830
JY 1B JX4B
Output equivalent to JY1
4.3.5.3 Check terminal output signals

(1) βiSVSP
Check Check
Signal name Signal name
terminal terminal
LM Load meter signal PA1 A phase sine wave signal 1
SM Speedometer signal PB1 B phase sine wave signal 1
Analog output for internal data observation
CH1 PS1 Z phase sine wave signal 1
(Phase U current: IU)
CH2 PA2 Disuse
(Motor speed TSA: 1638 min-1/V)
CH1D Output for internal data bit observation PB2 Disuse
CH2D Output for internal data bit observation PS2 Disuse
VRM Disuse PA3 Disuse
LSA1 Disuse PB3 Disuse
EXTSC1 External one-rotation signal (MAIN) PA4 Disuse
EXTSC2 Disuse OVR2 Analog override command
PAD Disuse 15V Disuse
- 78 -
Check Check
terminal terminal
PBD Disuse 5V +5 VDC power check
PSD Disuse -15V Disuse
GND 0V
(2) βiSVSP and βiSVSPc (For αiM, αiMZ sensor-less)

Check Check
terminal terminal
Speedometer signal (This can be switched to
LM PA1 Disuse
the load meter signal by parameter setting.)
SM Disuse PB1 Disuse
CH1 PS1 Disuse
(Phase U current: IU)
CH2 PA2 Disuse
(Estimated motor speed : 1638 min-1/V)
CH1D Output for internal data bit observation PB2 Disuse
CH2D Output for internal data bit observation PS2 Disuse
VRM Disuse PA3 Disuse
EXTSC1 Disuse PA4 Disuse
EXTSC2 Disuse OVR2 Analog override command
PAD Disuse 15V Disuse
PBD Disuse 5V +5 VDC power check
PSD Disuse -15V Disuse
GND 0V
Check terminal arrangement
PIL
LM CH1
Indicator
LSA2 LSA1
SM CH1D
EXTSC2 EXTSC1
VRM CH2
PAD CH2D
0V 0V
PBD PA3
PA2 Operation PA 1
PSD buttons PB3
PB2 PB 1
5V MODE UP PA4
PS2 PS 1
15V DATA PB4
SET DO WN
0V 0V
-15V 0VR2
- 79 -
4.3.6 Checking the Feedback Signal Waveform

The measurement locations and the method for attaching connectors vary depending on the configuration of
the detector. Check the waveform while seeing Table 4.3.6. The check terminals are on the check board.
Table 4.3.4(a) Signals input to the βiSVSP and corresponding check terminals on the check board
Check Spindle Amplifier input signal
Main sensors Remarks
terminal name (connector name-pin No.)
PA1 JYA2-pin5,6 αi M, αi MZ, and αi BZ sensors
PB1 JYA2-pin7,8 Analog αi CZ sensor
αi BZ sensor
PA2 JYA4-pin5,6
Analog αi CZ sensor
PB2 JYA4-pin7,8
α position coder Ｓ(1024λ)
αi MZ and αi BZ sensors (one-rotation signal)
PS1 JYA2-pin1,2
Analog αi CZ sensor (one-rotation signal)
αi BZ sensor (one-rotation signal)
PS2 JYA4-pin1,2
Analog αi CZ sensor (one-rotation signal)
EXTSC1 JYA3-pin15 Proximity switch (external one-rotation signal)
For the αi position coder and α position coder S (one-rotation signal), observe the Spindle Amplifier input
signal directly, using the servo check pin board A06B-6071-K290.
4.3.6.1 αi M sensor, αi MZ sensor, and αi BZ sensor

Measurement Measurement
Sample waveform
location condition
PA1, PB1 The speed must be 1500
Waveforms of phase
min-1 or less. A and phase B PA1 (PA2)
Vpp
Rotation direction: CW
Detection gear Vphase
Voffs
Motor PB1 (PB2)
CW
0V
Ripples of phase A and

phase B
PA1, PB1 (PA2, PB2)
Vrip
For αi MZ and αi BZ sensors only

Waveform of
phase Z (Z - *Z)
Vpz
Voffz
0V
- 80 -
Measurement item Specification Measurement method Adjustment method

Vpp 0.5 to 1.2 Vp-p
Normally, only the αi M and αi MZ
Use the DC range of a digital
Voffs, Voffsz 2.5 V ±100 mV sensors need not be adjusted. For
voltmeter.
Voffs and Voffz, only level check is
Vphase 90 ±3°
possible, but adjustment is not
Vrip < 70 mV
possible.
Vpz > 0.5 V
4.3.6.2 αi CZ sensor
For how to check the serial output αiCZ sensor signals, refer to the technical report of the relevant sensor.
4.3.6.3 α position coder S

Measurement Measurement
Sample waveform
location condition
PA2, PB2 CW rotation direction
Waveforms of phase
as viewed from the Vpp
A and phase B PA1 (PA2)
flange
Vphase
Voffs
PB1 (PB2)
0V
Waveform of phase
Z (Z - *Z)
0V
Measurement item Specification Measurement method Adjustment method

Vpp 0.8 to 1.2 Vp-p
Use the DC range of a digital Only level check is possible, but
Voffs,Voffsz 2.5 V ±100 mV
voltmeter. adjustment is not possible.
Vphase 90 ±5°
- 81 -
4.4 βiSVSP SERVO UNIT
4.4.1 Checking the STATUS 2 Indicator
S TATUS 2
STATUS display Description

The STATUS LED is off.
The control power is not supplied, a cable is faulty, or the control power circuit is defective.
The control power is short-circuited ("-" blinks).
A cable is faulty.
The system is waiting for the READY signal from the CNC.
Ready status
The servo motor is in the activation state.
4.4.2 VRDY-OFF Alarm Indicated on the CNC Screen

When the VRDY-OFF alarm is indicated on the CNC, check the items listed below. In addition,
VRDY-OFF can occur also for reasons other than listed below. If the following items turn out to have not
caused VRDY-OFF, check diagnosis information No. 358 (V ready-off information) on the diagnosis
screen and report it to FANUC.
(1) Emergency stop signal (ESP)

Has the emergency stop signal (connector: CX4) applied to the βiSVSP been released? Alternatively,
is the signal connected correctly?
(2) MCON signal
Hasn't setting up the axis detach function disabled the transmission of the ready command signal
MCON from the CNC to the βiSVSP?
(3) βiSVSP control printed-circuit board
The βiSVSP control printed-circuit board may be poorly installed or faulty. Be sure to push the
faceplate as far as it will go. If the problem persist, replace the control printed-circuit board.
- 82 -
Checking diagnosis information (DGN) No. 358 makes it possible to analyze the cause of the VRDY-OFF
alarm.
* Some CNCs such as Series 16i/18i/21i-A do not support this function.
Diagnosis 358 V ready-off information

Convert the displayed value to binary form, and check bits 5 to 14 of the resulting binary number.
When the servo amplifier starts working, these bits become 1 sequentially, starting at bit 5. When the servo
amplifier has started normally, all of bits 5 to 14 become 1.
Check bits 5 to 14 sequentially, starting at the lowest-order bit. The first lowest bit that is not 0 corresponds
to the processing that caused the V ready-off alarm.
#15 #14 #13 #12 #11 #10 #9 #8

SRDY DRDY INTL RLY CRDY MCOFF MCONA
#7 #6 #5 #4 #3 #2 #1 #0
MCONS *ESP HRDY
#06(*ESP) Emergency stop signal
#07,#08,#09 MCON signal (CNC → amplifier → converter)
#10(CRDY) Converter preparation completed signal
#11(RLY) Relay signal (DB relay energized)
#12(INTL) Interlock signal (DB relay de-energized)
#13(DRDY) Amplifier preparation completed signal
The following table lists diagnosis No. 358 values and main causes of problems. Do not insert or remove
any connector when the power is on.
Diagnosis No. Problem Check item
358 value
417 The emergency stop state (1) Check whether the emergency stop signal input to CX4
persists. of βiSVSP has been released.
(2) Check whether there is no problem with the connection
or cable for communication between the amplifiers.
993 The βiSVSP (common power (1) Check whether there is no problem with the connection
supply) preparation completed or cable for communication (CXA2A/B) between the
signal (CRDY) is not output. amplifiers.
(2) Check whether the input power is supplied.
(3) Check whether power is supplied to the operation coil of
the magnetic contactor. Check whether there is no
problem with connection of CX3 of the common power
supply.
4065 The interlock signal is not input. Replace the servo amplifier.
97 - Check whether the axis detach function is set.
- 83 -
4.4.3 Method for Observing Motor Current

This subsection explains how to observe the current that flows through the servo motor.
(1) Method of using the SERVO GUIDE

Refer to online help for information about how to connect to and use the servo adjustment tool "SERVO
GUIDE" and applicable CNC systems.
- Setting
Select an axis to be subjected to measurement in graph window channel setting. Also select IR and IS under
Kind. Under Coef (conversion coefficient), set the maximum allowable current (Ap) for the amplifier in
use.
NOTE
1 In servo software except for series 9096, the motor current sampling cycle
depends on the current control cycle.
2 Servo software series 9096 supports setting of a motor current sampling period of
1 ms only.
- Display
Select the XTYT mode from the graph window mode (M) menu to display waveforms.
(2) Method of using the servo check board

For details on how to connect and use the servo check board, refer to the following:
Appendix I in the “FANUC AC SERVO MOTOR αi series/FANUC AC SERVO MOTOR βi
series/FANUC LINEAR MOTOR LiS series/FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR
DiS series Parameter Manual (B-65270EN).”
- Required units
• Servo check board
A06B-6057-H630
• Oscilloscope
- 84 -
- Setting
CNC setting
Parameter setting for servo software series 90B0
FS16i/18i/21i/0i/PMi No.2115 No.2151 No.2152 No.2153
Measurement axis/ current phase IR IS
L-axis (Note 1) 370 0 402 0
M-axis (Note 1) 2418 0 2450 0
Parameter setting for servo software series 9096

FS16i/18i/21i/0i/PMi No.2115 No.2115
Measurement axis/ current phase IR IS
L-axis (Note 1) 370 402
M-axis (Note 1) 1010 1042
(Note 2)
When series 9096 is used, if no axis is paired with the measurement axis , IR and IS cannot be
observed simultaneously.
NOTE
1 The L-axis is an axis identified with an odd number set in parameter No. 1023. The
M-axis is an axis identified with an even number set in parameter No. 1023.
2 The axis specified as 2n-1 in parameter No. 1023 and the axis specified as 2n will
be in a pair.
Setting the output period of motor current data (for the 90B0 series only)
Output period Parameter No. 1746 / Bit 7 of parameter No. 2206
Velocity loop period 0 (default)
Current loop period 1 (Note 3)
NOTE
3 If the current loop period is set up as the motor current data output period,
selecting data number 0, 1, 2, or 4 disables the output of signals (such as a
velocity command) to channels. To observe the motor current and other signals
(such as a velocity command), specify the output period as 1 ms.
4 For the servo software series 9096, the output period of the motor current is only 1
ms. The current loop period cannot be used for output.
- Setting up the check board

• Set the AXIS digit of the LED display with an axis number from 1 to 8 specified in parameter No.
1023.
• Set the DATA digit of the LED display with a data number from 5 to 6.
- Method for observing the motor current

The voltage corresponding to the motor current is output to a channel for which 5 or 6 is set as the data
number on the servo check board.
The waveform of the motor current can be observed by measuring the voltage mentioned above with an
oscilloscope.
The following table lists the relationships between the observed voltage and the motor current.
Maximum amplifier current Motor current/ observed voltage [A/V]
20Ap 5
40Ap 10
- 85 -
Maximum amplifier current Motor current/ observed voltage [A/V]

80Ap 20
Maximum amplifier current

βiSVSP L-axis M-axis N-axis
βiSVSP20/20-* 20Ａp 20Ap
βiSVSP40/40-* 40Ap 40Ap
βiSVSP80/80-* 80Ap 80Ap
βiSVSP20/20/20-* 20Ap 20Ap 20Ap
βiSVSP20/20/40-* 20Ap 20Ap 40Ap
βiSVSP40/40/40-* 40Ap 40Ap 40Ap
βiSVSP40/40/80-* 40Ap 40Ap 80Ap
βiSVSP80/80/80-* 80Ap 80Ap 80Ap
For the axis 20Ap, for example, the motor current is 5A (actual value rather than effective value) if the
observed voltage is 1V.
- 86 -
IV. TROUBLESHOOTING FOR βiSVSP
B-65325EN/02 TROUBLESHOOTING FOR βiSVSP 1.OVERVIEW
1 OVERVIEW
This part describes the troubleshooting procedure. Read the section related to your current trouble to locate
it and take an appropriate action.
First, check the alarm number (indicated by the CNC) and the STATUS1 and STATUS2 indications in
Chapter 2 to find the cause.
Then, take an appropriate action according to the corresponding description in Chapter 3.
- 89 -
BRIEF DESCRIPTIONS TROUBLESHOOTING FOR βiSVSP B-65325EN/02
2 ALARM NUMBERS AND BRIEF

DESCRIPTIONS
2.1 For Series 0i/0i Mate-D
2.1.1 Servo Alarm

Alarm No. SV Description Reference item
SV0417 Invalid parameter setting 3.3.6
SV0432 Converter: control power supply under voltage 3.1.8
SV0433 Converter: DC link under voltage 3.1.5
SV0438 b Inverter: motor current alarm (L axis) 3.2.8
SV0438 C Inverter: motor current alarm (M axis) 3.2.8
SV0438 d Inverter: motor current alarm (N axis) 3.2.8
SV0440 Converter: Excessive deceleration power
SV0444 1 Inverter: Internal cooling fan stopped 3.2.1
SV0449 8. Inverter: IPM alarm (L axis) 3.2.6
SV0449 9. Inverter: IPM alarm (M axis) 3.2.6
SV0449 A. Inverter: IPM alarm (N axis) 3.2.6
SV0453 α Pulsecoder: soft disconnection 3.3.4
SV0601 Inverter: cooling fan stopped of the radiator
SV0603 8. Inverter: IPM alarm (L axis) (OH) 3.2.7
SV0603 9. Inverter: IPM alarm (M axis) (OH) 3.2.7
SV0603 A. Inverter: IPM alarm (N axis) (OH) 3.2.7
SV0604 P Communication error between amplifier and module 3.2.5
- 90 -
2.ALARM NUMBERS AND
B-65325EN/02 TROUBLESHOOTING FOR βiSVSP BRIEF DESCRIPTIONS
2.1.2 Spindle Alarm

Alarm No. SP Description Reference item
SP9001 01 Motor overheat 3.4.1
SP9002 02 Excessive speed deviation 3.4.2
SP9003 03 DC link fuse broken 3.4.3
SP9004 04 PS improper input power 3.1.1
SP9006 06 Temperature sensor disconnected 3.4.4
SP9007 07 Over speed 3.4.5
SP9009 09 Main circuit overheat 3.4.6
SP9010 10 Input power supply low voltage 3.4.7
SP9011 11 PS: DC link overvoltage 3.1.2
SP9012 12 DC link overcurrent 3.4.8
SP12xx 13 CPU internal data memory error 3.4.9
SP9014 14 Software series mismatch 3.4.10
SP9015 15 Spindle switching/speed range switching alarm 3.4.11
SP9016 16 RAM error 3.4.12
SP9017 17 ID number parity error 3.4.13
SP12xx 18 Program ROM sum check error 3.4.14
SP12xx 19 Excessive offset of the phase U current detection 3.4.15
SP12xx 20 Excessive offset of the phase V current detection 3.4.15
SP9021 21 Position sensor polarity setting incorrect 3.4.16
SP9022 22 SP: Over current 3.4.17
SP12xx 24 Serial transfer data error 3.4.18
SP9027 27 Position coder signal disconnected 3.4.19
SP9029 29 Overload 3.4.20
SP9030 30 PS: Input overcurrent 3.1.3
SP9031 31 Motor lock 3.4.21
SP9032 32 Serial LSI RAM error 3.4.22
SP9033 33 PS: Precharge failure 3.1.4
SP9034 34 Illegal parameter 3.4.23
SP9035 35 Excessive gear ratio setting data 3.4.24
SP9036 36 Error counter overflow 3.4.25
SP9037 37 Speed detection parameter error 3.4.26
SP9041 41 PC one-rotation signal detection error 3.4.27
SP9042 42 PC one-rotation signal undetected 3.4.28
SP9043 43 Position coder signal for differential speed is disconnected 3.4.29
SP9046 46 PC one-rotation signal detection error during threading 3.4.30
SP9047 47 Position coder signal error 3.4.31
SP9049 49 Excessive differential speed 3.4.32
SP9050 50 Excessive spindle speed in spindle synchronization 3.4.33
SP9051 51 PS: DC link low voltage 3.1.5
SP9052 52 ITP signal error I 3.4.34
SP9053 53 ITP signal error II 3.4.34
SP9054 54 Over current 3.4.35
SP9055 55 Illegal switching of power line 3.4.36
SP9056 56 Internal cooling fan stopped 3.4.37
SP9058 58 PS: main circuit overload 3.1.6
SP9059 59 PS: Internal cooling fan stopped 3.1.7
SP9061 61 Excessive dual position FB semi-full error 3.4.38
SP9066 66 Communication error between spindle amplifiers 3.4.39
SP9067 67 FSC/EGB command error 3.4.40
SP9068 68 Invalid spindle parameter setting 3.4.41
SP9069 69 Safety speed exceeded 3.4.42
SP9070 70 Axis data error 3.4.43
- 91 -
Alarm No. SP Description Reference item

SP9071 71 Safety parameter error 3.4.44
SP9072 72 Mismatch result of motor speed check 3.4.45
SP9073 73 Motor sensor disconnected 3.4.46
SP9074 74 CPU test alarm 3.4.47
SP9075 75 CRC test alarm 3.4.48
SP9076 76 Safety function not executed 3.4.49
SP9077 77 Mismatch result of axis number check 3.4.50
SP9078 78 Mismatch result of safety parameter check 3.4.51
SP9079 79 Initial test error 3.4.52
SP9081 81 Motor sensor one-rotation signal detection error 3.4.53
SP9082 82 Motor sensor one-rotation signal not detected 3.4.54
SP9083 83 Motor sensor signal error 3.4.55
SP9084 84 Spindle sensor disconnected 3.4.56
SP9085 85 Spindle sensor one-rotation signal detection error 3.4.57
SP9086 86 Spindle sensor one-rotation signal not detected 3.4.58
SP9087 87 Spindle sensor signal error 3.4.59
SP9088 88 Radiator cooling fan stopped 3.4.60
SP9092 92 Excessive speed (against velocity command) 3.4.61
SP12xx A Program ROM error 3.4.62
SP12xx A1 Program ROM error 3.4.62
SP12xx A2 Program ROM error 3.4.62
SP9110 b0 Communication error between amplifiers 3.4.63
SP9111 b1 PS: control power low voltage 3.1.8
SP9120 C0 Communication data error 3.4.64
SP9123 C3 Spindle switching circuit error 3.4.65
SP9128 C8 Spindle synchronous control: Excessive speed deviation 3.4.66
SP9129 C9 Spindle synchronous control: Excessive position deviation 3.4.67
SP9131 d1 Spindle tuning function alarm 3.4.68
SP9132 d2 Serial sensor: Data error 3.4.69
SP9133 d3 Serial sensor: Data transfer error 3.4.70
SP9134 d4 Serial sensor: Soft phase alarm 3.4.71
SP9136 d6 Mismatch result of safety speed zero check (SP) 3.4.72
SP9137 d7 SP: Device communication error 3.4.73
SP9138 d8 Current limit level setting error 3.4.74
SP9139 d9 Serial sensor: Pulse miss 3.4.75
SP9140 E0 Serial sensor: Count miss 3.4.76
SP9141 E1 Serial sensor: One-rotation signal undetected 3.4.77
SP9142 E2 Serial sensor error 3.4.78
SP9158 F8 Mismatch result of mode (DCS) 3.4.79
Spindle synchronous control for guide bush
SP9166 G6*1 3.4.80
: Excessive synchronous error
SP9167 G7*1 Failure of SP control sequence 3.4.81
(*1) The seven-segment LED indicates "F9".
- 92 -
2.ALARM NUMBERS AND
2.2 For Series 0i/0i Mate-B,C
2.2.1 Servo Alarm

Servo Spindle STATUS1 STATUS2 Reference
Description
alarm alarm Spindle unit Servo unit item
361 Pulsecoder phase error (built-in) 3.3.7 (1)
364 Soft phase alarm (built-in) 3.3.7 (1)
365 LED error (built-in) 3.3.7 (1)
366 Pulse error (built-in) 3.3.7 (1)
367 Count error (built-in) 3.3.7 (1)
368 Serial data error (built-in) 3.3.7 (3)
369 Data transfer error (built-in) 3.3.7 (3)
380 LED error (separate) 3.3.7 (2)
381 Pulsecoder phase error (separate) 3.3.7 (2)
382 Count error (separate) 3.3.7 (2)
383 Pulse error (separate) 3.3.7 (2)
384 Soft phase alarm (separate) 3.3.7 (2)
385 Serial data error (separate) 3.3.7 (3)
386 Data transfer error (separate) 3.3.7 (3)
387 Sensor error (separate) 3.3.7 (2)
417 Invalid parameter setting 3.3.6
421 Excessive semi-full error 3.3.8
430 Servo motor overheat 3.3.5
431 9058 58 Converter: main circuit overload 3.1.6
432 9111 b1 Converter: control power supply undervoltage 3.1.8
433 9051 51 Converter: DC link undervoltage 3.1.5
434 2 Inverter: control power supply low voltage 3.2.2
435 5 Inverter: DC link undervoltage 3.2.3
436 Soft thermal (OVC) 3.3.3
437 9030 30 Overcurrent in the converter input circuit 3.1.3
438 b Inverter: motor current alarm (L axis) 3.2.8
438 C Inverter: motor current alarm (M axis) 3.2.8
438 d Inverter: motor current alarm (N axis) 3.2.8
439 9011 11 Converter: DC link overvoltage 3.1.2
441 Current offset error 3.3.8
442 9033 33 Converter: DC link precharge failure 3.1.4
445 Soft disconnection alarm 3.3.4
447 Hard disconnection alarm (separate) 3.3.4
448 Feedback mismatch alarm 3.3.4
449 8. Inverter: IPM alarm (L axis) 3.2.6
449 9. Inverter: IPM alarm (M axis) 3.2.6
449 A. Inverter: IPM alarm (N axis) 3.2.6
453 α Pulsecoder: soft disconnection 3.3.4
601 F Inverter: cooling fan stopped of the radiator
602 6 Inverter: overheat 3.2.4
603 8. Inverter: IPM alarm (L axis) (OH) 3.2.7
603 9. Inverter: IPM alarm (M axis) (OH) 3.2.7
603 A. Inverter: IPM alarm (N axis) (OH) 3.2.7
Communication error between amplifier and
604 P 3.2.5
module
607 9004 04 Open phase in the converter main power supply 3.1.1
- 93 -
2.2.2 Spindle Alarm

Servo Spindle STATUS1 STATUS2 Description Reference
9001 01 Motor overheat 3.4.1
9002 02 Excessive speed deviation 3.4.2
9003 03 DC link fuse broken 3.4.3
607 9004 04 PS improper input power 3.1.1
9006 06 Temperature sensor disconnected 3.4.4
9007 07 Over speed 3.4.5
9009 09 Main circuit overheat 3.4.6
9010 10 Input power supply low voltage 3.4.7
439 9011 11 PS: DC link overvoltage 3.1.2
9012 12 DC link overcurrent 3.4.8
9013 13 CPU internal data memory error 3.4.9
9014 14 Software series mismatch 3.4.10
9015 15 Spindle switching/speed range switching alarm 3.4.11
9016 16 RAM error 3.4.12
9017 17 ID number parity error 3.4.13
750 18 Program ROM sum check error 3.4.14
750 19 Excessive offset of the phase U current detection 3.4.15
750 20 Excessive offset of the phase V current detection 3.4.15
9021 21 Position sensor polarity setting incorrect 3.4.16
9022 22 SP: Over current 3.4.17
749 24 Serial transfer data error 3.4.18
9027 27 Position coder signal disconnected 3.4.19
9029 29 Overload 3.4.20
437 9030 30 PS: Input overcurrent 3.1.3
9031 31 Motor lock 3.4.21
9032 32 Serial LSI RAM error 3.4.22
442 9033 33 PS: Precharge failure 3.1.4
9034 34 Illegal parameter 3.4.23
9035 35 Excessive gear ratio setting data 3.4.24
9036 36 Error counter overflow 3.4.25
9037 37 Speed detection parameter error 3.4.26
9041 41 PC one-rotation signal detection error 3.4.27
9042 42 PC one-rotation signal undetected 3.4.28
43 Position coder signal for differential speed is 3.4.29
9043
disconnected
46 PC one-rotation signal detection error during 3.4.30
9046
threading
9047 47 Position coder signal error 3.4.31
9049 49 Excessive differential speed 3.4.32
50 Excessive spindle speed in spindle 3.4.33
9050
synchronization
433 9051 51 PS: DC link low voltage 3.1.5
9052 52 ITP signal error I 3.4.34
9053 53 ITP signal error II 3.4.34
9054 54 Over current 3.4.35
9055 55 Illegal switching of power line 3.4.36
9056 56 Internal cooling fan stopped 3.4.37
431 9058 58 PS: Main circuit overload 3.1.6
9059 59 PS: Internal cooling fan stopped 3.1.7
9061 61 Excessive dual position FB semi-full error 3.4.38
9067 67 FSC/EGB command error 3.4.40
- 94 -
2.ALARM NUMBERS AND
Servo Spindle STATUS1 STATUS2 Description Reference

9068 68 Invalid spindle parameter setting 3.4.41
9073 73 Motor sensor disconnected 3.4.46
9074 74 CPU test alarm 3.4.47
9075 75 CRC test alarm 3.4.48
9079 79 Initial test error 3.4.52
9081 81 Motor sensor one-rotation signal detection error 3.4.53
9082 82 Motor sensor one-rotation signal not detected 3.4.54
9083 83 Motor sensor signal error 3.4.55
9084 84 Spindle sensor disconnected 3.4.56
9085 85 Spindle sensor one-rotation signal detection error 3.4.57
9086 86 Spindle sensor one-rotation signal not detected 3.4.58
9087 87 Spindle sensor signal error 3.4.59
9088 88 Radiator cooling fan stopped 3.4.60
9092 92 Excessive speed (against velocity command) 3.4.61
749 A Program ROM error 3.4.62
749 A1 Program ROM error 3.4.62
749 A2 Program ROM error 3.4.62
432 9111 b1 PS: control power supply low voltage 3.1.8
9120 C0 Communication data error 3.4.64
9123 C3 Spindle switching circuit error 3.4.65
Spindle synchronous control: Excessive speed
9128 C8 3.4.66
deviation
Spindle synchronous control: Excessive position
9129 C9 3.4.67
deviation
9131 d1 Spindle tuning function alarm 3.4.68
9132 d2 Serial sensor: Data error 3.4.69
9133 d3 Serial sensor: Data transfer error 3.4.70
9134 d4 Serial sensor: Soft phase alarm 3.4.71
9137 d7 SP: Device communication error 3.4.73
9138 d8 Current limit level setting error 3.4.74
9139 d9 Serial sensor: Pulse miss 3.4.75
9140 E0 Serial sensor: Count miss 3.4.76
9141 E1 Serial sensor: One-rotation signal undetected 3.4.77
9142 E2 Serial sensor error 3.4.78
9167 G7*1 Failure of SP control sequence 3.4.81
(*) The letter "n" in an alarm number indicates an axis number.
(*1) The seven-segment LED indicates "F9".
- 95 -
3. TROUBLESHOOTING
AND ACTION TROUBLESHOOTING FOR βiSVSP B-65325EN/02
3 TROUBLESHOOTING AND ACTION

3.1 COMMON TO SERVO AND SPINDLE UNITS
3.1.1 STATUS2 Alarm Code - STATUS1 Alarm Code 04 (SP9004)

(1) Meaning
The input power supply is abnormal (open phase).
(a) The input power supply has an open phase.
Check the power supply voltage.
→ If there is no problem with the power supply voltage, check the connections.

(1) Meaning
In the main circuit, the DC voltage at the DC link is abnormally high.
(a) Excessive regenerated power
The βiSVSP does not have a sufficient capacity.
→ Check the specification of the βiSVSP.
(b) The output impedance of the AC power source is too high.
→ Check the power source output impedance.
(Normal if the voltage variation at maximum output time is within 7%)
(c) The main circuit power supply may have been switched off with an emergency stop state
released.
→ Check the sequence.
(d) The emergency stop line and the MCC line are connected directly.
→ Check the connection of CX3 and CX4.

(1) Meaning
The main circuit power module (IPM) has detected an abnormal condition.
(a) Control supply voltage decrease of the power module (IPM)
→ Replace the βiSVSP.
(b) Input supply voltage imbalance
→ Check the input power supply specification.
(c) The specification of the AC reactor does not match the βiSVSP in use.
→ Check the βiSVSP and the specification of the AC reactor.
(d) IPM failure

(1) Meaning
The main circuit capacitor was not recharged within the specified time.
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3.TROUBLESHOOTING
B-65325EN/02 TROUBLESHOOTING FOR βiSVSP AND ACTION
(a) Too many βiSVSP units are connected.

→ Check the specification of the βiSVSP and the βi amplifier for additional axes.
(b) The DC link is short-circuited.
→ Check the connection.
(c) The recharge current limiting resistor is defective.

(1) Meaning
In the main circuit, the DC voltage (DC link) has dropped.
(a) A small power dip has occurred.
(b) Low input power supply voltage
→ Check the power supply specification.
(c) The main circuit power supply may have been switched off with an emergency stop state
released.
→ Check the sequence.

(1) Meaning
The temperature of the main circuit heat sink has risen abnormally.
(a) Cooling fan broken
Check whether the cooling fan rotates normally.
→ Replace the cooling fan.
(b) Dust accumulation
→ Clean the cooling system with a vacuum cleaner or the factory air blower.
(c) Overload
→ Examine the operating conditions.
(d) The control printed-circuit board is not mounted properly.
Be sure to push the βiSVSP control printed-circuit board as far as it will go. If failing to push it
properly, pull it out and then push it again.

(1) Meaning
An error was detected in the cooling fan of the control circuit section.
Replace the βiSVSP.
(a) The fan for internal cooling is faulty (for the βiSVSP*-18 model only).
→ Replace the fan for internal agitation.
(b) The cooling fan for internal cooling is not mounted correctly. (For the βiSVSP*-18 model only)
Be sure to push the internal cooling fan in the upper part as far as it will go.
If failing to push it properly, pull it out and then push it again.
(c) The control printed-circuit board is not mounted properly. (For the βiSVSP*-18 model only)
Be sure to push the control printed-circuit board as far as it will go. If failing to push it properly,
pull it out and then push it again.
(d) The control printed-circuit board or βiSVSP is faulty.
Replace the control printed-circuit board or βiSVSP.
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3. TROUBLESHOOTING
3.1.8 STATUS2 Alarm Code - STATUS1 Alarm Code b1 (SP9111)

(1) Meaning
The control power supply voltage decrease.
(a) Input voltage decrease
(b) The βiSVSP is faulty.
→ If merely turning on the control power supply causes this alarm, replace the βiSVSP.
3.2 SERVO UNIT

The following table lists alarms related to the servo amplifier. See this table while comparing the CNC
alarm codes presented in Chapter 2, "Alarm Numbers and Brief Description" with the LED displays of the
STATUS 2.
STATUS2 Reference
Alarm Major cause
display item
(Issued for the βiSVSP*-18 only)
• The fan is stopped.
Inverter: internal cooling fan stopped 1 3.2.1
• The connector/cable of the fan motor is faulty.
• Servo amplifier failure
• The 24 V control power supply input to the
Inverter: control power supply βiSVSP is low.
2 3.2.2
undervoltage • Connector/cable (CXA2A/C) defective
• βiSVSP failure
• Low input voltage
Inverter: DC link undervoltage 5 3.2.3
• βiSVSP failure
• The motor is being used under a harsh
condition.
Inverter: overheat 6 3.2.4
• The ambient temperature is high.
• βiSVSP failure
• This alarm is not issued in the βiSVSP.
Inverter: cooling fan stopped of the
F • If this alarm is issued, the βiSVSP may be
radiator
defective.
Communication error between amplifier • Connector/cable (CXA2A/C) defective
P 3.2.5
modules • Servo amplifier failure
Inverter: IPM alarm (L axis) 8. • Short-circuit between power line phases or
Inverter: IPM alarm (M axis) 9. • Short-circuit between motor winding phases or 3.2.6
Inverter: IPM alarm (N axis) A. • βiSVSP failure
Inverter: IPM alarm (OH) (L axis) 8. • The motor is being used under a harsh
condition.
Inverter: IPM alarm (OH) (M axis) 9. 3.2.7
• The ambient temperature is high.
Inverter: IPM alarm (OH) (N axis) A. • βiSVSP failure
• Short-circuit between power line phases or
Inverter: motor current alarm (L axis) b ground fault in them
• Short-circuit between motor winding phases or
Inverter: motor current alarm (M axis) C ground fault in them 3.2.8
• Incorrect motor ID setting
• βiSVSP failure
Inverter: motor current alarm (N axis) d
• Motor failure
- 98 -
3.TROUBLESHOOTING
STATUS2 Reference
Alarm Major cause
display item
• Connector/cable (JF*) defective
-
Inverter: Control power supply error • Motor failure 3.2.9
Flashing
• Servo amplifier failure
• Connector/cable (COP10B) defective
Inverter: FSSB communication error
U • βiSVSP failure 3.2.10
(COP10B)
• CNC failure
Inverter: FSSB communication error • Connector/cable (COP10A) defective
L 3.2.11
(COP10A) • Servo amplifier failure
3.2.1 STATUS2 Alarm Code 1 (SV0444)

(1) Meaning
The internal cooling fan of the inverter is stopped.
(a) Check if any foreign matter is caught in the fan.
(c) Check the connection of the fan connector.
(d) Replace the fan motor.
(e) Replace the servo amplifier.

(1) Meaning
The control power supply voltage of the inverter is low.
(a) Check the three-phase input voltage of the βiSVSP (the voltage shall not be lower than 85% of
the rated input voltage).
(b) Check the 24V power supply voltage.
(c) Check the connector and cable (CXA2A/C).
(d) Replace the βiSVSP.

(1) Meaning
The DC link voltage of the inverter is low.
(a) The three-phase input voltage level drops.
(b) Replace the control printed-circuit board.
(c) Replace the βiSVSP.

(1) Meaning
The inverter is overheated.
(a) Check that the motor is being used at or below its continuous rating.
(b) Check that the cooling capacity of the cabinet is sufficient (inspect the fans and filters).
(c) Check that the ambient temperature is not too high.
(d) Be sure to push the faceplate (control printed-circuit board) as far as it will go.
(e) Replace the βiSVSP.
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3. TROUBLESHOOTING
3.2.5 STATUS2 Alarm Code P (SV0604)

(1) Meaning
There is an error in communication between amplifiers.
(a) Check the connector and cable (CXA2A/C).
(b) Replace the control printed-circuit board.
(c) Replace the βiSVSP.
3.2.6 STATUS2 Alarm Code 8. , 9. , A. (SV0449)

(1) Meaning
An alarm is output from the IPM of the inverter.
(a) Be sure to push the control printed-circuit board as far as it will go.
(b) Disconnect the motor power lines from the βiSVSP, and release the βiSVSP from an emergency
stop condition.
<1> If no IPM alarm condition has occurred
→ Go to (c).
<2> If an IPM alarm condition has occurred
(c) Disconnect the motor power lines from the βiSVSP, and check the insulation between PE and the
motor power line U, V, or W.
→ Go to (d).
(d) Disconnect the motor from its power lines, and check whether the insulation of the motor or
power lines is deteriorated.
<2> If the insulation of any power line is deteriorated
→ Replace the power line.
3.2.7 STATUS2 Alarm Code 8. , 9. , A. (SV0603)

(1) Meaning
An overheat alarm is output from the IPM of the inverter.
(a) Be sure to push the control printed-circuit board as far as it will go.
(b) Check that the heat sink cooling fan is running.
(c) Check that the motor is being used at or below its continuous rating.
(d) Check that the cooling capacity of the cabinet is sufficient (inspect the fans and filters).
(e) Check that the ambient temperature is not too high.
(f) Replace the βiSVSP.
3.2.8 STATUS2 Alarm Code b , c , d (SV0438)

(1) Meaning
A motor current error was detected.
(a) Checking the servo parameters
- 100 -
3.TROUBLESHOOTING
Referring to "FANUC AC SERVO MOTOR αi series/FANUC AC SERVO MOTOR βi

series/FANUC LINEAR MOTOR LiS series/FANUC SYNCHRONOUS BUILT-IN SERVO
MOTOR DiS series Parameter Manual (B-65270EN)," check whether the following parameters
have default values.
Series 15i No.1809 No.1852 No.1853

Series 16i, 18i, 20i, 21i, 0i
No.2004 No.2040 No.2041
Power Mate i
Alternatively, if an abnormal motor current alarm condition occurs only on rapid
acceleration/deceleration, it is probable that the motor is being used under too harsh a condition.
Increase the acceleration/deceleration time constant, and see what will occur.
(b) Be sure to push the control printed-circuit board as far as it will go.
(c) Disconnect the motor power lines from the βiSVSP, and release the βiSVSP from an emergency
stop condition.
<1> If no abnormal motor current occurs
→ Go to (d).
<2> If an abnormal motor current occurs
(d) Disconnect the motor power lines from the βiSVSP, and check the insulation between PE and the
motor power line U, V, or W.
→ Go to (e).
(e) Disconnect the motor from its power lines, and check whether the insulation of the motor or
power lines is deteriorated.
<2> If the insulation of any power line is deteriorated
→ Replace the power line.
3.2.9 Alarm Code "-" Flashing

(1) Meaning
There is an error in the control power supply of the inverter.
(a) Disconnect the feedback cable (JF*) from the βiSVSP, and turn on the power.
<1> If the flashing does not stop
<2> If the flashing stops
→ Go to (b).
(b) Disconnect the feedback cable (JF*) from the pulse coder, and turn on the power. (Keep it
connected to the βiSVSP side.)
<1> If the flashing does not stop
→ Replace the cable.
<2> If the flashing stops
- 101 -
3. TROUBLESHOOTING
3.2.10 STATUS2 Alarm Code U

(1) Meaning
Inverter: FSSB communication error (COP10B) (NOTE)
(a) Replace the optical cable (COP10B) of the servo amplifier that is nearest the CNC on which "U"
is displayed. (In Fig. 3.2.10, the cable between UNIT2 and UNIT3)
(b) Replace the servo amplifier that is nearest the CNC on which "U" is displayed. (In Fig. 3.2.10,
UNIT3)
(c) Replace the COP10B-side servo amplifier of the servo amplifier that is nearest the CNC on which
"U" is displayed. (In Fig. 3.2.10, UNIT2)
(d) Replace the servo card in the CNC.
L L U U
CO P10B COP10B COP10B CO P10B

Master side
(CNC side) Slave side
CO P10A COP10A COP10A CO P10A
Fig. 3.2.10
NOTE
When the CNC power is turned on, "U" blinks momentarily, and then "-" steadily
lights. This is not a failure, though.
- 102 -
3.TROUBLESHOOTING
3.2.11 Alarm Code L

(1) Meaning
Inverter: FSSB communication error (COP10A)
(a) Replace the optical cable (COP10A) of the servo amplifier that is farthest the CNC on which "L"
is displayed. (In Fig. 3.2. 11, the cable between UNIT2 and UNIT3)
(b) Replace the servo amplifier that is farthest the CNC on which "L" is displayed. (In Fig. 3.2. 11,
UNIT2)
(c) Replace the COP10A-side servo amplifier of the servo amplifier that is farthest the CNC on
which "L" is displayed. (In Fig. 3.2. 11, UNIT3)
L L U U
CO P10B COP10B COP10B CO P10B

Master side
(CNC side) Slave side
CO P10A COP10A COP10A CO P10A
Fig. 3.2.11
3.3 SERVO SOFTWARE

If a servo alarm is issued, an alarm message is output, and details of the alarm are also displayed on the
servo adjustment screen or the diagnosis screen. Using the alarm identification table given in this section,
determine the alarm, and take a proper action.
3.3.1 Servo Tuning Screen

The following procedure can be used to display the servo tuning screen.
z Series 0i
SYSTEM → [SYSTEM] → [ ] → [SV-PRM] → [SV-TUN]
If the servo setting screen does not appear, specify the following parameter, then switch the CNC off and on
again.
#7 #6 #5 #4 #3 #2 #1 #0
3111 SVS
SVS(♯0) 1: Displays the servo setting screen.
- 103 -
3. TROUBLESHOOTING
Alarm detail
information
<1>
<2>
<3>
<4>
<5>
Fig. 3.3.1 (a) Servo adjustment screen
3.3.2 Diagnosis Screen

The alarm items of the servo tuning screen correspond to the diagnosis screen numbers indicated in the table
below.
Table 3.3.2 (a) Correspondence between the servo tuning screen and diagnosis screen
Alarm No. Series 15i Series 16i, 18i, 21i, 0i
<1> Alarm 1 No 3014 + 20(X-1) No 200
<2> Alarm 2 3015 + 20(X-1) 201
<3> Alarm 3 3016 + 20(X-1) 202
<4> Alarm 4 3017 + 20(X-1) 203
<5> Alarm 5 ⎯⎯⎯⎯⎯ 204
<6> Alarm 6 ⎯⎯⎯⎯⎯ ⎯⎯
<7> Alarm 7 ⎯⎯⎯⎯⎯ 205
<8> Alarm 8 ⎯⎯⎯⎯⎯ 206
<9> Alarm 9 ⎯⎯⎯⎯⎯ ⎯⎯
<1> <7>
<2> <8>
<3>
<4>
<5>
Fig. 3.3.2 Diagnosis screen
- 104 -
3.TROUBLESHOOTING
The table below indicates the names of the alarm bits.
Table 3.3.2 (b) List of alarm bit names

#7 #6 #5 #4 #3 #2 #1 #0
<2> Alarm 2 ALD EXP
<6> Alarm 6 SFA
NOTE
The empty fields do not represent alarm codes.
3.3.3 Overload Alarm (Soft Thermal, OVC)

#7 #6 #5 #4 #3 #2 #1 #0
(Action)
(1) Make sure that the motor is not vibrating.
⇒ If a motor vibrates, the current flowing in it becomes more than necessary, resulting in an alarm.
(2) Make sure that the power lead to the motor is connected correctly.
⇒ If the connection is incorrect, an abnormal current flows in the motor, resulting in an alarm.
(3) Make sure that the following parameters are set correctly.
⇒ An overload alarm is issued based on the result of calculation of these parameters. Be sure to set
them to the standard values. For details of the standard values, refer to the FANUC AC SERVO
MOTOR αi series/FANUC AC SERVO MOTOR βi series/FANUC LINEAR MOTOR LiS
series/FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR DiS series Parameter Manual
(B-65270EN).
(4) Check the operation conditions. The machine load may be too heavy for the motor specification.
No. 2065 (FS0i) Overload protection coefficient (OVCLMT)
No. 2164 (FS0i) Overload protection coefficient (OVCLMT2)
- 105 -
3. TROUBLESHOOTING
3.3.4 Feedback Disconnected Alarm

#7 #6 #5 #4 #3 #2 #1 #0
<2> Alarm 2 ALD EXP
<6> Alarm 6 SFA
FBA ALD EXP SFA Alarm description Action

1 1 1 0 Hard disconnection (separate phase A/B) 1
1 0 0 0 Soft disconnection (closed loop) 2
1 0 0 1 Soft disconnection (αi Pulsecoder) 3
(Action)
Action 1:
This alarm is issued when a separate phase A/B scale is used. Check if the phase A/B detector is
connected correctly.
Action 2:
This alarm is issued when the position feedback pulse variation is small relative to the velocity
feedback pulse variation. This means that this alarm is not issued when a semi-full is used. Check if the
separate detector outputs position feedback pulses correctly. If position feedback pulses are output
correctly, it is considered that the motor alone is rotating in the reverse direction at the start of machine
operation because of a large backlash between the motor position and scale position.
#7 #6 #5 #4 #3 #2 #1 #0
No. 2003 (FS0i) TGAL
TGAL(#1) 1: Uses the parameter for the soft disconnection alarm detection level.
No. 2064 (FS0i) Soft disconnection alarm level

Standard setting 4: Alarm issued for a 1/8 rotation of the motor.
Increase this value.
Action 3:
This alarm is issued when synchronization between the absolute position data sent from the built-in
Pulsecoder and phase data is lost. Turn off the power to the CNC, then detach the Pulsecoder cable
then attach it again. If this alarm is still issued, replace the Pulsecoder.
3.3.5 Overheat Alarm

#7 #6 #5 #4 #3 #2 #1 #0
<2> Alarm 2 ALD EXP
OVL ALD EXP Alarm description Action

1 1 0 Motor overheat 1
1 0 0 Amplifier overheat 1
(Action)
Action 1:
If this alarm is issued after a long-time of continuous operation, it is considered that the motor and
amplifier are overheated. Stop operation for a while, then make a check. If this alarm is still issued
after the power is off for about 10 minutes then is turned on again, the thermostat is considered to be
faulty. If this alarm is issued intermittently, increase the time constant or increase stop time in the
program to suppress the rise in temperature.
- 106 -
3.TROUBLESHOOTING
3.3.6 Invalid Servo Parameter Setting Alarm

The invalid servo parameter setting alarm is issued when a setting out of the specifiable range is specified,
or an overflow has occurred in an internal calculation. When an invalid parameter is detected on the servo
side, alarm 4 #4 (PRM) = 1 results.

#7 #6 #5 #4 #3 #2 #1 #0
For details and action required when the invalid servo parameter setting alarm is issued on the servo side,
refer to the FANUC AC SERVO MOTOR αi series/FANUC AC SERVO MOTOR βi series/FANUC
LINEAR MOTOR LiS series/FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR DiS series
Parameter Manual (B-65270EN).
(Reference information)
Method of checking details of an invalid parameter detected on the servo side
(For Series 0i)

A number is indicated in No. 352 of the diagnosis screen.
3.3.7 Alarms Related to Pulsecoder and Separate Serial Detector

(Bits for alarm identification)
#7 #6 #5 #4 #3 #2 #1 #0
<2> Alarm 2 ALD EXP
<6> Alarm 6 SFA
(1) For a built-in Pulsecoder

An alarm is determined from the bits of alarms 1, 2, 3, and 5. The table below indicates the meaning of
each bit.
Alarm 3 Alarm 5 1 Alarm 2 Actio

Alarm description
CSA BLA PHA RCA BZA CKA SPH LDM PMA FBA ALD EXP n
1 1 1 0 Count error alarm 2
1 Phase alarm 2
1 Pulse error alarm
1 LED error alarm
CAUTION
Pulsecoder failure. Replace the Pulsecoder.
- 107 -
3. TROUBLESHOOTING
(2) For a separate serial detector

An alarm is determined from the bits of alarm 7. The table below indicates the meaning of each bit.
Alarm 7
Alarm description Action
OHA LDA BLA PHA CMA BZA PMA SPH
1 Pulse error alarm
1 Count error alarm 2
1 Phase alarm 2
1 LED error alarm
1 Separate detector alarm 3
NOTE
detector failure. Replace the detector.
(Action)
Action 1: Battery-related alarms
Check if a battery is connected. When the power is turned on for the first time after a battery is
connected, the zero battery voltage alarm is issued. In such a case, turn off the power, then turn on
the power again. If the alarm is still issued, check the battery voltage. If the battery voltage
decrease alarm is issued, check the voltage, and replace the battery as required.
Action 2: Alarms that may be issued for noise

If an alarm is issued intermittently or after emergency stop cancellation, noise is probably the
cause. So, provide noise protection. If the same alarm is still issued after noise protection is
provided, replace the detector.
Action 3: Alarm condition detected by the separate detector

If the separate detector detects an alarm condition, contact the manufacturer of the detector for
information on troubleshooting.
(3) Alarms related to serial communication

An alarm is determined from the bits of alarms 4 and 8.
Alarm 4 Alarm 8
Alarm description
DTE CRC STB DTE CRC STB
1
1 Serial Pulsecoder communication alarm
1
1
1 Separate serial Pulsecoder communication alarm
1
Action:
Serial communication is not performed correctly. Check if the cable is connected correctly and is
not broken. If CRC or STB is issued, noise may be the cause. So, provide noise protection. If
CRC or STB is always issued after the power is turned on, the Pulsecoder or amplifier control
board or the pulse module may be faulty.
- 108 -
3.TROUBLESHOOTING
3.3.8 Other Alarms

#7 #6 #5 #4 #3 #2 #1 #0
OFS DAL ABF Alarm description Action

1 Feedback mismatch alarm 1
1 Excessive semi-full error alarm 2
1 Current offset error alarm 3
(Action)
Action 1:
This alarm is issued when the move direction of the position detector is opposite to the move direction
of the speed detector. Check the rotation direction of the separate detector. If the rotation direction of
the separate detector is opposite to the rotation direction of the motor, take the following action:
For a phase A/B detector:
Reverse the connections of A and A .
For a serial detector:
Reverse the setting of the signal direction of the separate detector.
In the Series 90B0/G(07) and subsequent editions, the following settings enable signal directions in
the A/B phase detector to be inverted.
#7 #6 #5 #4 #3 #2 #1 #0
No. 1960 (FS15i) RVRSE
No. 2018 (FS16i)
RVRSE(#0) Reverses the signal direction of the separate detector.
0: Does not reverse the signal direction of the separate detector.
1: Reverses the signal direction of the separate detector.
If a large distortion exists between the motor and separate detector, this alarm may be issued in the case
of abrupt acceleration/deceleration. In such a case, modify the detection level.
#7 #6 #5 #4 #3 #2 #1 #0
No. 1741 (FS15i) RNLV
No. 2201 (FS16i)
RNLV(#1) Modifies the feedback mismatch alarm detection level.
Action 2:
This alarm is issued when the difference between the motor position and separate detector position
exceeds the excessive semi-full error level. Check if the conversion efficient for dual position
feedback is set correctly. If the conversion efficient is set correctly, increase the alarm level. If this
alarm is still issued after the level is modified, check the connection direction of the scale.
No. 2078 (FS0i) Dual position feedback conversion coefficient (numerator)
No. 2079 (FS0i) Dual position feedback conversion coefficient (denominator)
Number of feedback pulses per motor

revolution (detection unit)
Conversion coefficient =
1,000,000
- 109 -
3. TROUBLESHOOTING
No. 2118 (FS0i) Dual position feedback semi-full error level

[Setting] Detection unit. When 0 is set, no detection is made.
Action 3:
The current offset value of the current detector (equivalent to the current value in the emergency stop
state) is abnormally high. If this alarm is still issued after the power is turned off then back on, the
current detector is faulty. Replace the βiSVSP.
3.4 SPINDLE UNIT

When an alarm is issued, the alarm number (SPxxxx) is displayed on the CNC screen, and at the same time,
the alarm LED (red) on the STATUS1 display of the spindle section turns on, and the alarm code is displayed
on the 2-digit 7-segment LEDs. The following is a description of each alarm and the action to take for
recovery. In some cases, there may arise a need to replace the control printed-circuit board and other devices.
Before replacement work, be sure to turn off the power to the entire machine and check for safety. After
replacement work, check that the wiring is correct and check the surroundings before turning on the power to
the machine again.
The ALM LED
lights red.
status 1 Alarm code 01, 02 or above is indicated.
3.4.1 Alarm Code 01 (SP9001)

The inside temperature of the motor is higher than the specified temperature.
(1) If this alarm is issued during cutting (the motor temperature is high)
(a) Check the cooling state of the motor.
<1> If the cooling fan of the spindle motor is stopped, check the power supply of the cooling fan.
If the cooling fan is still inoperative, replace it with a new one.
<2> When a liquid-cooled motor is used, check the cooling system.
<3> When the ambient temperature of the spindle motor is higher than the specified temperature,
lower the ambient temperature to satisfy the specification.
(b) Recheck the cutting conditions.
(2) If this alarm is issued under a light load (the motor temperature is high)
(a) When the frequency of acceleration/deceleration is too high
Set such a use condition that the average including output at acceleration/deceleration does not
exceed the continuous rating.
(b) The parameters specific to the motor are not correctly.
Referring to "FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi
series / FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN),"
check the motor-specific parameters.
(3) If this alarm is issued when the motor temperature is low
(a) The spindle motor feedback cable is faulty.
Replace the cable.
(b) The parameters specific to the motor are not set correctly.
Referring to " FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi
FS0i For βi series motor
4134 Motor-specific parameter
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3.TROUBLESHOOTING
(c) The control printed-circuit board is faulty.
(d) The spindle motor (internal thermostat) is faulty.
Replace the spindle motor.
(e) The cable of the temperature sensor is connected incorrectly.
3.4.2 Alarm Code 02 (SP9002)

The actual motor speed is largely deviated from the commanded speed.
(1) If this alarm is issued during motor acceleration

(a) The parameter setting of acceleration/deceleration time is incorrect.
Set the following parameter with the actual acceleration/deceleration time for your machine plus
some margin.
FS0i Description
4082 Setting of acceleration/deceleration time
(b) The parameter for the speed detector is not set correctly.
series / FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)," set a
correct value.
(2) If this alarm is issued at a heavy cutting load
(a) The cutting load has exceeded the motor output power.
Check the load meter indication, and review the use condition.
(b) The parameters for output restriction are not set correctly.
Check that the settings of the following parameters satisfy the machine and motor specifications:
FS0i Description
4028 Output restriction pattern setting
4029 Output restriction value
(c) The parameters specific to the motor are not correctly.
(3) If this alarm is issued even during rotation with no load

(a) βiSVSP is faulty.
(b) The motor windings are disconnected.
Perform a continuity check on the motor windings.
(c) The power line is disconnected.
Perform a continuity check on the power line.
3.4.3 Alarm Code 03 (SP9003)

The fuse of the DC link melted. (The voltage of the DC link is insufficient.) This alarm is checked when an
emergency stop is released.
(1) If the alarm is issued during spindle operation (rotation)

Probable causes of this alarm are:
<1> The power line is grounded.
<2> The motor windings are grounded.
<3> The IGBT and IPM modules are faulty.
(2) If, when an emergency stop is released or when the CNC starts up, the MCC of the common power
input turns on, and is turned off due to this alarm
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3. TROUBLESHOOTING
(a) The βiSVSP control board is not mounted correctly.

Be sure to push the faceplate of the βiSVSP as far as it will go. (This alarm may be displayed due
to the poor contact of the connector connecting the control board to the power board.)
(b) βiSVSP is faulty.
3.4.4 Alarm Code 06 (SP9006)

An error was detected in the temperature sensor inside the spindle motor, or the disconnection of the
temperature sensor cable was detected.
(1) The motor-specific parameters are incorrect.

Referring to "FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series /
FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)," check the
motor-specific parameters.
(2) Feedback cable is faulty.
Replace the feedback cable.
(3) The control printed-circuit board is faulty.
(4) The temperature sensor inside the spindle motor is abnormal.
Replace the internal temperature sensor or the spindle motor.
(5) The ambient temperature of the spindle motor is outside the range of the specification (low).
The ambient temperature of the spindle motor must be in the range of the specification.
(6) The temperature sensor inside the spindle motor and the windings are short-circuited.
Coolant and so on may enter the inside of the spindle motor, so that the internal temperature sensor and
the windings may be short-circuited. Check if coolant and so on enter the inside of the spindle motor.
3.4.5 Alarm Code 07 (SP9007)

It was detected that the rotation of the spindle motor exceeded the maximum rotation speed of 115%
(standard parameter setting).
(1) If this alarm is issued during spindle synchronization

If one of the motors operating in spindle synchronization is deactivated (SFR or SRV) and activated
again, the spindle motor may accelerate to its maximum rotation speed in order to eliminate the
position error accumulated while the motor is off, resulting in this alarm being issued.
Modify the ladder in such a way that this sequence will not be used.
(2) βiSVSP is faulty.
(3) The sensor is faulty.
Replace the sensor.
3.4.6 Alarm Code 09 (SP9009)

It was detected that the temperature of the radiator of the βiSVSP was abnormally high.
(1) If this alarm is issued during cutting (the radiator temperature is high)
(a) If this alarm is issued when the load meter reads a value below the continuous rating of the
βiSVSP, check the cooling state of the radiator.
<1> The radiator is not cooled sufficiently if the filter of the air inlet port of the control panel is
soiled or if there are any objects that block the flow of air to the radiator. Make the necessary
improvement to ensure a sufficient flow of air to the radiator.
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3.TROUBLESHOOTING
<2> If the ambient temperature of the βiSVSP is outside the specification range (high), make the
necessary improvement so that it falls within the specification range.
(b) If this alarm is issued with the load meter being equal to or greater than the continuous rating of
the βiSVSP, review the cutting conditions.
(c) If the radiator of the βiSVSP is soiled remarkably, clean it with air and so on. Also, consider such
a control panel structure in which the radiator is not splashed directly with coolant and so on.
(2) If this alarm is issued under a light load (the radiator temperature is high)
(a) When the frequency of acceleration/deceleration is too high
Make the necessary modifications so that the average output of the spindle motor including the
output during acceleration/deceleration does not exceed the continuous rated output.
(b) The motor-specific parameters are incorrect.
(3) If this alarm is displayed immediately after the power is turned on
(a) The control printed-circuit board is not mounted properly.
properly, pull it out and then push it again. (This alarm may be displayed due to the poor contact
of the connector connecting the control printed-circuit board and the power printed-circuit
board.)
3.4.7 Alarm Code 10 (SP9010)

It was detected that the voltage of the control power supply (24 VDC) was low.
The control power supply (24 VDC), power cable, or βiSVSP is faulty.
Replace the control power supply (24 VDC), power cable, or βiSVSP.
3.4.8 Alarm Code 12 (SP9012)

An excessively large current flowed into the main circuit.
This alarm indicates that the power module (IPM) of the main circuit detected an error such as an excessive
load, overcurrent.
(1) Perform a check, referring to the description of alarm code 09.

(2) The βiSVSP control board is not mounted correctly.
Be sure to push the faceplate as far as it will go. (This alarm may be displayed due to the poor contact
of the connector connecting the control board to the power board.)
(3) If this alarm is issued immediately after a spindle rotation command is specified
(a) The motor power line is faulty.
Check for a short circuit between motor power lines and short-circuit to ground, and replace the
power line as required.
(b) The motor winding has an insulation failure.
If the motor is short-circuited to ground, replace the motor.
(c) The parameters specific to the motor are not correctly.
(d) βiSVSP is faulty.
A power element (IPM) may be destroyed. Replace the βiSVSP.
(4) If this alarm is issued during spindle rotation
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3. TROUBLESHOOTING
(a) A power element is destroyed.

A power element (IPM) may be destroyed. Replace the βiSVSP.
If the βiSVSP setting condition is not satisfied, or cooling is insufficient because the heat sink is
dirty, the power elements may be destroyed.
When the heat sink on the back of the βiSVSP is too dirty, clean the heat sink, for example, by
blowing air.
(b) The parameters specific to the motor are not correctly.
(c) The power line or the motor windings are disconnected.
The power line or the motor windings may be disconnected. Perform a continuity check on them.
(d) The belt slips.
The belt between the spindle and motor may slip. (For the spindle motor βiIc series only, this may
cause this alarm to be issued.) Clean the pulley, and tighten the belt again.
3.4.9 Alarm Code 13 (SP9013)

An error was detected in the internal RAM of the CPU.
βiSVSP is faulty. Replace the control printed-circuit board or βiSVSP.
3.4.10 Alarm Code 14 (SP9014)

It was detected that the amplifier ID data did not match the software series combination.
3.4.11 Alarm Code 15 (SP9015)

In speed range switching control, the switching operation sequence was not executed correctly. This alarm
is issued if one second or more elapses from the transition of a switch request signal (RSL) until a power
lead state check signal (RCH or RCHHG) makes a transition.
Troubleshooting when this alarm is issued
(a) The magnetic contactor (switch unit) for power lead switching is faulty.
If the contact is inoperative, check the power supply of the magnetic contactor.
If the magnetic contactor is still inoperative, replace the magnetic contactor.
(b) The I/O unit or wiring for checking the contact of the magnetic contactor is faulty.
If a defect is found in the I/O unit or wiring, replace the I/O unit or wiring.
(c) The sequence (ladder) is incorrect.
Modify the sequence so that switching is completed within 1 second.
3.4.12 Alarm Code 16 (SP9016)

In the dual check safety function, an error was found in the test on the internal RAM of the CPU. This alarm
is checked only when the dual check safety function is used.
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3.TROUBLESHOOTING
3.4.13 Alarm Code 17 (SP9017)

An error was detected in amplifier ID data.
The βiSVSP control printed-circuit board has poor contact, or the βiSVSP is abnormal. Check if the
βiSVSP control printed-circuit board is mounted properly. If it is mounted properly, replace the βiSVSP.
3.4.14 Alarm Code 18 (SP9018)

In communication between CPU and ROM inside the βiSVSP, a sum check error was detected.
3.4.15 Alarm Codes 19 and 20 (SP9019, SP9020)

The offset voltage of the phase U (alarm code 19) or phase V (alarm code 20) current detection circuit is
excessively high. A check is made when the power is turned on.
Check if the βiSVSP control printed-circuit board is mounted properly. If it is mounted properly, replace the
βiSVSP.
3.4.16 Alarm Code 21 (SP9021)

It was detected that the polarity (rotating direction) of the position sensor was not set correctly.
(a) Check the position sensor polarity parameter (bit 4 of parameter No. 4001). Refer to FANUC AC
SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series / FANUC BUILT-IN
SPINDLE MOTOR Bi series Parameter Manual (B-65280EN).
(b) Check the feedback cable of the position sensor. If the A/B phase signals are connected in the wrong
way, correct the cable.
(c) If the spindle is connected with a V belt, check if the belt slips.
(d) Check if the signals of the position sensor are normal.
(e) If none of the above errors is found, the βiSVSP may be faulty. Replace the βiSVSP.
3.4.17 Alarm Code 22 (SP9022)

A current that exceeded the rating flowed continuously for a short time. Probable causes are the high
frequency of acceleration/deceleration and high cutting load.
(1) The operating conditions for the spindle are severe.

Probable causes include the high acceleration/deceleration frequency of the spindle and high cutting
load. Review the operating conditions for the spindle.
motor-specific parameters.
3.4.18 Alarm Code 24 (SP9024)

Serial communication data transferred between the CNC and βiSVSP contains an error. (Note)
(1) Serial communication data between CNC and βiSVSP (connected with an electric cable) is abnormal
due to noise.
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3. TROUBLESHOOTING
(a) The cable wiring length exceeds the specification range.

Correct it so that the cable length is appropriate. For details, refer to the FANUC SERVO
AMPLIFIER βi series DESCRIPTIONS (B-65322EN).
(b) The feedback cable and the power line of the motor are bundled together.
If the feedback cable and the power line of the motor are bundled together, check the FANUC
SERVO AMPLIFIER βi series DESCRIPTIONS (B-65322EN), and bundle them separately.
(a) Referring to "FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi
(3) The communication cable between CNC and βiSVSP is faulty.
(a) Replace the communication cable.
If an optical I/O link adapter is used, the optical I/O link adapter or the optical cable may be
faulty.
(c) CNC is faulty.
Replace the board or module related to the serial spindle.
NOTE
This alarm is issued also if the CNC power is off. This is not a failure, though.
3.4.19 Alarm Code 27 (SP9027)

An error was detected in communication between αi position coder and βiSVSP.
(1) If this alarm is issued when the motor is deactivated

(a) The setting of a parameter is incorrect.
check the parameter for sensor setting.
(b) The βiSVSP side of the feedback cable of the αi position coder is connected incorrectly.
Referring to the FANUC SERVO AMPLIFIER βi series DESCRIPTIONS (B-65322EN), check
the connection.
(c) The feedback cable of the αi position coder is broken.
(2) If the alarm is issued when the feedback cable is moved (as in the case where the spindle moves)
(a) The control printed-circuit board is not mounted properly.
(b) The feedback cable of the αi position coder is broken.
(c) Coolant enters the connector.
If coolant enters the connector, replace the connector.
- 116 -
3.TROUBLESHOOTING
αi position c oder
Shielded cable
Sensor Amplifier
Connected to the frame ground

via a cable clamp.
(3) If this alarm is issued when the motor rotates

(a) The feedback cable is not shielded sufficiently.
the shielding of the feedback cable.
3.4.20 Alarm Code 29 (SP9029)

An excessive load (standard setting: load meter reading of 9.5 V) has been applied continuously for a
certain period (standard setting: 30 seconds).
(1) If this alarm is issued during cutting

(a) Check the load meter, and review the cutting condition.
(2) If this alarm is issued during a stop
(a) The spindle is locked.
Check the sequence to see if the spindle is locked when a command for very slow movement is
specified or orientation is specified for the spindle.
(3) If the spindle does not rotate as specified (the spindle rotates at a very low speed) and this alarm is
issued
(b) The phase sequence of the motor power line is incorrect.
Check the phase sequence of the motor power line once again.
(c) The feedback cable of the motor is connected incorrectly.
Check that the A/B phase signals of the spindle sensor are connected in the wrong way.
(d) The feedback cable of the motor or spindle sensor (or motor) is faulty.
Rotate the motor manually to see if a speed is indicated in the item of motor speed on the CNC
diagnosis screen or on the spindle check board. If no speed indication is provided, replace the
feedback cable or spindle sensor (or motor).
(4) If the spindle does not rotate as specified (the spindle does not rotate at all) and this alarm is issued
(a) The power line is abnormal.
Check that the power line is connected correctly from the βiSVSP to the motor. If output
switching and spindle switching are performed, check that the MCC on the side used is on.
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3. TROUBLESHOOTING
3.4.21 Alarm Code 31 (SP9031)

The motor failed to rotate as specified, and has stopped or is rotating at a very low speed.
(1) If the motor rotates at a very low speed and this alarm is issued
(b) The phase sequence of the motor power line is incorrect.
Check if the phase sequence of the motor power line is incorrect.
(c) The feedback cable of the motor has a problem.
Check that the A/B phase signals of the spindle sensor are connected in the wrong way.
(d) The feedback cable of the motor or spindle sensor (or motor) is faulty.
Rotate the motor manually to see if a speed is indicated in the item of motor speed on the CNC
diagnosis screen or on the spindle check board. If no speed indication is provided, replace the
feedback cable or spindle sensor (or motor).
(2) If the motor does not rotate at all and this alarm is issued
(a) The sequence for locking the spindle is incorrect.
Check the sequence to see if the spindle is locked.
(b) The power line is faulty.
Check that the power line is connected correctly from the βiSVSP to the motor. If output
switching and spindle switching are performed, check that the MCC on the side used is on.
(c) βiSVSP is faulty.
3.4.22 Alarm Code 32 (SP9032)

LSI memory for serial communication is abnormal. A check is made when the power is turned on.
βiSVSP is faulty.
3.4.23 Alarm Code 34 (SP9034)

A parameter outside the permissible range was set. Correct the parameter with either of methods (1) and (2).
(1) Connect the spindle check board (A06B-6078-H001) to connector JY1.

On the spindle check board (A06B-6078-H001), "AL-34" and "F-xxx" are displayed alternately.
"F-xxx" indicates the number of the parameter out of the permissible range. For correspondences
between CNC parameter numbers and "F-xxx", refer to "Internal number F-xxx" in Appendix,
"SPINDLE PARAMETER LIST", in the FANUC AC SPINDLE MOTOR αi series / FANUC AC
SPINDLE MOTOR βi series / FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual
(B-65280EN). Correct the setting of that parameter.
(2) The parameter outside the permissible range can be identified with the status error number. The status
error number of the diagnosis number, No. 710, indicates the internal number of that parameter. For
correspondences between internal numbers and actual parameter numbers, refer to "Internal number
F-xxx" in Appendix, "SPINDLE PARAMETER LIST", in the FANUC AC SPINDLE MOTOR αi
series / FANUC AC SPINDLE MOTOR βi series / FANUC BUILT-IN SPINDLE MOTOR Bi series
Parameter Manual (B-65280EN). Correct the setting of that parameter.
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3.TROUBLESHOOTING
3.4.24 Alarm Code 35 (SP9035)

This alarm is issued only when the spindle motor βiIc series is used.
There is a large difference between the motor speed calculated from the αi position coder and the motor
speed estimated with the spindle software.
(1) If an alarm is issued when a rotation command is entered

(a) Error in the αi position coder setting parameter
Correctly specify the bits representing the relationships between the direction of αi position
coder rotation and that of spindle rotation and between the direction of spindle rotation and that
of motor rotation.
FS0i Description
4000#0 Spindle and spindle motor rotation directions
4001#4 Spindle sensor (αi position coder) mounting direction
(b) Invalid gear ratio parameter setting

Check to see if an incorrect gear ratio has been specified.
This value is used to convert the position coder speed to the motor speed. Be sure to specify the
correct value.
FS0i Description
4056∼4059 Gear ratio between the spindle and motor
(c) Clutch/gear signal error

Make sure that the entered clutch/gear signals (CTH1A, CTH2A) are correct with respect to the
actually selected gear.
16i #7 #6 #5 #4 #3 #2 #1 #0
First spindle G070 CTH1A CTH2A
(d) Belt slippage between the spindle and spindle motor

Make adjustments so that no belt slippage will occur between the spindle and spindle motor.
(2) If an alarm is issued during a cutting operation

An overload has occurred to decrease the motor speed. Review the cutting condition.
3.4.25 Alarm Code 36 (SP9036)

The error counter overflowed.
(1) The setting of a parameter is incorrect.

(a) The gear ratio set in a parameter is incorrect.
Check if an excessively large gear ratio is set.
(b) The setting of a position gain is incorrect.
If the gear ratio data is correct, increase the position gain.
FS0i Description
4056 to 4059 Gear ratio between the spindle and motor
4060 to 4063 Position gain at orientation
4065 to 4068 Position gain in the servo mode/spindle synchronization
4069 to 4072 Position gain in Cs contour control
(2) Sequence error

(a) Check if the motor is deactivated (by turning off SFR/SRV) in a position control mode (rigid
tapping, Cs contour control, and spindle synchronous control).
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3. TROUBLESHOOTING
3.4.26 Alarm Code 37 (SP9037)

After emergency stop signal input, the motor is accelerated without being decelerated. This alarm is issued
also when the motor is not deactivated (the motor is not decelerated completely) when the
acceleration/deceleration time (initial parameter setting: 10 seconds) has elapsed after emergency stop
signal input.
(a) The parameter setting of the speed detector is incorrect.

FANUC BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)," set a correct
time.
(b) The parameter setting of an acceleration/deceleration time is not proper.

Check the parameter-set value and actual acceleration/ deceleration time, then set an actual
acceleration/deceleration time plus some margin.
FS0i Description
4082 Acceleration/deceleration time setting
3.4.27 Alarm Code 41 (SP9041)

The position where the one-rotation signal of the αi position coder is generated is incorrect.
αi position c oder
Shielded cable
Sensor Amplifier

via a cable clamp.

Referring to " FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series /
parameter for sensor setting.
(2) The αi position coder is faulty.
Observe the Z signal of the αi position coder. If the signal is not generated per rotation, replace the αi
position coder.
(3) The feedback cable is not shielded sufficiently.
Referring to the FANUC SERVO AMPLIFIER βi series DESCRIPTIONS (B-65322EN), check the
shielding of the feedback cable.
(4) The feedback cable and the power line of the motor are bundled together.
If the feedback cable and the power line of the motor are bundled together, check the FANUC SERVO
AMPLIFIER βi series DESCRIPTIONS (B-65322EN), and bundle them separately.
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3.TROUBLESHOOTING
3.4.28 Alarm Code 42 (SP9042)

The one-rotation signal of the αi position coder is not generated.

Referring to " FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series /
parameter for sensor setting.
(2) The feedback cable or αi position coder is faulty.
Observe the Z signal of the αi position coder. If the signal is not generated per rotation, replace the
feedback cable or αi position coder.
3.4.29 Alarm Code 43 (SP9043)

The position coder signal of the master spindle used in differential spindle speed control is disconnected.
Troubleshoot as in the case of alarm code 27.
3.4.30 Alarm Code 46 (SP9046)

The one-rotation signal of the position coder cannot be detected normally during thread cutting.
3.4.31 Alarm Code 47 (SP9047)

The count value of αi position coder signal pulses is abnormal.
Phases A and B for the αi position coder have a feedback pulse count of 4096 p/rev per spindle rotation. The
spindle control software checks the pulse counts of phases A and B equivalent to the position coder each
time a one-rotation signal is generated. The alarm is issued when a pulse count beyond the specified range is
detected.
(1) If this alarm is issued when the cable is moved (as in the case where the spindle moves)
(a) The feedback cable of the αi position coder is broken.
(b) Coolant enters the connector.
(2) In other cases
(b) The feedback cable is not shielded sufficiently.
(c) The feedback cable and the power line of the motor are bundled together.
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3. TROUBLESHOOTING
αi position c oder
Shielded cable
Sensor Amplifier

via a cable clamp.
3.4.32 Alarm Code 49 (SP9049)

In differential spindle speed control, the master spindle speed as converted into a slave spindle motor speed
exceeded the permissible value.
By multiplying the master spindle speed by the slave spindle-to-motor gear ratio, the master spindle speed
is converted into a slave spindle motor speed. Check if this value exceeds the maximum motor speed, and
operate so as not to exceed the maximum motor speed.
3.4.33 Alarm Code 50 (SP9050)

A value obtained by internal calculation in spindle synchronization exceeded the allowable range.

(a) The setting of parameters for gear ratio setting is incorrect.
Check if an excessively large gear ratio is set.
(b) Position gain setting limit
If correct gear ratio data is set, increase the position gain value in spindle synchronization.
FS0i Description
4056 to 4059 Gear ratio between the spindle and motor
4065 to 4068 Position gain in the servo mode/spindle synchronization
3.4.34 Alarm Codes 52 and 53 (SP9052, SP9053)

The synchronization signal (ITP) in communication data transferred to and from the CNC stopped.

(2) CNC is faulty.
3.4.35 Alarm Code 54 (SP9054)

A large current flowing in the motor for a long time was detected.
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3.TROUBLESHOOTING
3.4.36 Alarm Code 55 (SP9055)

In spindle speed range switching control, a mismatch between the switching request signal (SPSL or RSL)
and the power lead state check signal (RCH, or RCHHG) continues during motor excitation.
(a) The magnetic contactor (switch unit) for power lead switching is faulty.
If the contact is inoperative, check the power supply of the magnetic contactor.
If the magnetic contactor is still inoperative, replace the magnetic contactor.
(b) The I/O unit or wiring for checking the contact of the magnetic contactor is faulty.
If a defect is found in the I/O unit or wiring, replace the I/O unit or wiring.
(c) The sequence (ladder) is incorrect.
Modify the sequence so that switching of magnetic contactor is not performed during motor excitation.
3.4.37 Alarm Code 56 (SP9056)

The βiSVSP detects the stoppage of the fan motor (internal cooling fan) for cooling the inside of the
amplifier.
(1) The internal cooling fan is not mounted correctly.

Be sure to push the βiSVSP internal cooling fan as far as it will go.
If failing to push it properly, pull it out and then push it again.
(2) The control printed-circuit board is not mounted properly.
(3) The internal cooling fan is abnormal.
See “REPLACEMENT OF A FANMOTOR” chapters of this maintenance manual, and replace the
internal cooling fan.
3.4.38 Alarm Code 61 (SP9061)

In the dual position feedback function, the difference in position between the semi-closed loop and the
full-closed loop exceeded the preset level (No. 4354).
(1) If this alarm is issued when the machine starts up, there may be an error in the detector-related
parameters and the conversion coefficient parameters for motor edge position feedback.
Check if the settings of the motor sensor-to-spindle arbitrary gear ratios No. 4171/No. 4172 (for the
High gear) and No. 4173/No. 4174 (for the Low gear) are correct. Referring to "FANUC AC
SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series / FANUC BUILT-IN
SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)," check the parameter for sensor
setting.
(2) If the motor sensor-to-spindle arbitrary gear ratio is correct, the level set in No. 4354 may be too small.
(3) If this alarm is issued with a machine that has operated normally thus far, there may occur slippage
between the motor and the spindle. Check the machine.
(4) If this alarm is issued intermittently with a machine that has operated normally thus far, the motor edge
or spindle edge position feedback signal may be miscounted due to noise, etc. Take the necessary
measures against noise.
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3. TROUBLESHOOTING
3.4.39 Alarm Code 66 (SP9066)

This alarm is issued only when inter-spindle amplifier communication (connector JX4) is used.
The βiSVSP does not support inter-spindle amplifier communication (connector JX4).
If this alarm is issued, the βiSVSP is faulty. Replace the βiSVSP.
3.4.40 Alarm Code 67 (SP9067)

During the execution of the spindle electronic gear box (EGB), reference position return is specified for the
slave axis.
In spindle EGB mode (G81), reference position return cannot be performed. To perform reference position
return, turn off EGB mode (G80) first.
3.4.41 Alarm Code 68 (SP9068)

Parameter settings contain an error.
The details of the error can be identified with the status error number. Referring to the status error number of
the diagnosis number, No. 710, and Subsection 4.3.3, "Status Error Indication Function", correct the setting
of the relevant parameter.
3.4.42 Alarm Code 69 (SP9069)

This alarm is issued only when the dual check safety is used.
In safety signal mode C (a guard open request is input and the protective door is open), the spindle motor
speed exceeded the safety speed.
(1) If the protective door is open, operate at the safety speed or lower.
(2) Check the safety speed parameter.
3.4.43 Alarm Code 70 (SP9070)

The βiSVSP connection status does not match the hardware settings.
(1) Check the βiSVSP connection and settings.

(2) Replace the CPU card of the CNC or the βiSVSP.
(3) Replace the βiSVSP control printed-circuit board.
(4) The βiSVSP ID is not written.
If the amplifier ID cannot be read on the CNC screen, replace the βiSVSP.
3.4.44 Alarm Code 71 (SP9071)

An error occurred in the safety parameter.
(1) Re-set the safety parameter.

(2) Replace the CPU card of the CNC.
- 124 -
3.TROUBLESHOOTING

3.4.45 Alarm Code 72 (SP9072)

The βiSVSP speed check results do not match the CNC speed check results.
When the alarm is issued, replace the CPU card of the CNC or the βiSVSP control printed-circuit board.
3.4.46 Alarm Code 73 (SP9073)

The motor sensor signal has a something problem.
(1) If the alarm is issued when the motor excitation is off
(b) The feedback cable is disconnected.
(c) A motor sensor (αiBZ sensor or αiMZ sensor) is not adjusted correctly.
Adjust the motor sensor signal. If the sensor signal cannot be adjusted correctly, or the sensor
signal is not observed, replace the connection cable and motor sensor.
(a) Coolant enters the connector.
(3) If this alarm is issued when the motor rotates
(a) The shielding of the cable between the sensor and the βiSVSP is faulty.
αiMZ sensor, αiBZ sensor
Shielded cable
Sensor Amplifier
The cable is connected to the The cable is connected to

pin specified in the Descriptions pin 10 on the amplifier side.
on the sensor side.
- 125 -
3. TROUBLESHOOTING
3.4.47 Alarm Code 74 (SP9074)

The CPU test did not finish normally.
βiSVSP is faulty.
3.4.48 Alarm Code 75 (SP9075)

An error occurred in the CRC test.
βiSVSP is faulty.
3.4.49 Alarm Code 76 (SP9076)

The safety function of the spindle section is not executed.
βiSVSP is faulty.
3.4.50 Alarm Code 77 (SP9077)

The βiSVSP axis number check results do not match the CNC axis number check results.
3.4.51 Alarm Code 78 (SP9078)

The βiSVSP safety parameter check results do not match the CNC safety parameter check results.
3.4.52 Alarm Code 79 (SP9079)

An abnormality was detected during control program initialization.
βiSVSP is faulty.
3.4.53 Alarm Code 81 (SP9081)

The position where the one-rotation signal of the motor sensor is generated is incorrect.
(1) If the external one-rotation signal is used

(a) The settings of parameters are incorrect.
Check that the gear ratio data matches the specification of the machine.
- 126 -
3.TROUBLESHOOTING
FS0i Description
4171
Denominator of gear ratio between motor sensor and spindle
4173
4172
Numerator of gear ratio between motor sensor and spindle
4174
(b) Slippage between the spindle and motor

Check that there is no slippage between the spindle and motor. The external one-rotation signal is
not applicable to V-belt connection.
(2) Troubleshooting in other cases
(b) A motor sensor (αiBZ sensor or αiMZ sensor) is not adjusted correctly.
(c) The feedback cable is not shielded sufficiently.
(d) The feedback cable and the power line of the motor are bundled together.
(e) βiSVSP is faulty.
Shielded cable
Sensor Amplifier

on the sensor side.
3.4.54 Alarm Code 82 (SP9082)

The one-rotation signal of the motor sensor is not generated.
(1) If the external one-rotation signal (proximity switch) is used

(a) The external one-rotation signal is faulty.
Check the check pin EXTSC1 on the spindle check board. If the signal is not generated per
rotation, replace the connection cable and position coder.
- 127 -
3. TROUBLESHOOTING
(c) βiSVSP is faulty.
3.4.55 Alarm Code 83 (SP9083)

The spindle control software checks the pulse counts of phases A and B each time a one-rotation signal is
generated. The alarm is issued when a pulse count beyond the specified range is detected.
(a) Coolant enters the connector.
(c) The feedback cable is not shielded sufficiently.
(d) The feedback cable and the power line of the motor are bundled together.
(e) βiSVSP is faulty.
Shielded cable
Sensor Amplifier

on the sensor side.
3.4.56 Alarm Code 84 (SP9084)

The spindle sensor signal has a something problem.
Refer to Alarm Code 73 for this alarm trouble shooting.
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3.TROUBLESHOOTING
3.4.57 Alarm Code 85 (SP9085)

The one-rotation signal of the spindle sensor occurred in an incorrect location.
3.4.58 Alarm Code 86 (SP9086)

No spindle sensor one-rotation signal occurred.
3.4.59 Alarm Code 87 (SP9087)

A spindle sensor signal has a something problem.
3.4.60 Alarm Code 88 (SP9088)

The radiator cooling fan is stopped.
(1) The radiator cooling fan is abnormal.

See the appropriate maintenance parts and replacement chapters of this maintenance manual, and
replace the radiator cooling fan.
3.4.61 Alarm Code 92 (SP9092)

The actual cutting feedrate of the motor exceeded the acceleration level appropriate to the velocity
command.
If the alarm is issued at startup, all the causes (1) to (3) below are probable ones, but for a machine that has
operated normally thus far, the cause (3) is probable.
(1) Parameter (number of teeth of the motor sensor, number of electrodes of the motor) settings contain an
error.
parameters.
(2) For BiS series spindle motor (synchronous spindle motor) drive, the settings of AMR offset-related
parameters (Nos. 4084 and 4085) contain an error.
AMR offset No. 4084 is a parameter to adjust/set for each machine. If the phase relation between the
magnetic pole 0-degree position of the rotor and the one-rotation signal position of the detector
changes due to detector replacement, shaft slippage, and so on or if parameters are loaded from another
machine, re-adjustment is necessary.
Parameter No. 4085 is for AMR offset adjustment, and must usually be "0".
(3) The motor sensor is miscounting due to noise, etc.
Referring to the "INSTALLATION" chapter of the FANUC SERVO AMPLIFIER βi series
DESCRIPTIONS (B-65322EN), and take the necessary measures against noise.
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3. TROUBLESHOOTING
3.4.62 Alarm Codes A, A1,A2

The control program is not running.
An error was detected when the control program was running.
(1) If this alarm is issued when the βiSVSP power is switched on

(a) Wrong software specification
(2) If this alarm is issued when the motor is active.
(a) Influence by noise
Referring to the "INSTALLATION" chapter of the FANUC SERVO AMPLIFIER βi series
DESCRIPTIONS (B-65322EN), check the grounding-related wiring.
If the signal cable of the spindle sensor is bundled together with the power line of the motor,
bundle them separately.
3.4.63 Alarm Code b0 (SP9110)

There was an error in communication between amplifiers (spindle amplifier, servo amplifier).
(1) Check the locations of the connectors to which the cable for communication between amplifiers is
connected.
The correct status is that CXA2A and CXA2C are connected.
(2) The cable for communication between amplifiers is faulty.
Replace the cable for communication between amplifiers.
(3) Effect of noise
Check that the cable for communication between amplifiers is not routed together with the DC link
short-circuit bar and the power line.
(4) The βiSVSP, spindle amplifier, or servo amplifier is faulty.
Replace the control printed-circuit board of the βiSVSP, spindle amplifier, or servo amplifier; or
replace the βiSVSP, spindle amplifier, or servo amplifier.
3.4.64 Alarm Codes C0, C1, and C2 (SP9120, SP9121, and SP9122)
An error occurred in serial communication data between the CNC and βiSVSP.

(2) CNC is faulty.
3.4.65 Alarm Code C3 (SP9123)

In spindle switching, the switching request signal (SPSL) does not match the internal status of the
motor/spindle sensor signal switching circuit (submodule SW).
The βiSVSP does not support spindle switching, so usually, this alarm is not issued, but may be detected if
pin 17 of JYA2 is in contact with another pin (such as 5V).
Check the wiring of the feedback cable connected to JYA2.
- 130 -
3.TROUBLESHOOTING

In spindle synchronous control, the speed deviation (difference between the velocity command for the
spindle edge, as calculated from the position deviation and the position gain, and the actual cutting feedrate)
exceeds the alarm detection level (No. 4515).
(1) If, during spindle synchronous control, motor excitation (SFR, SRV) is turned off and the alarm is
issued immediately after it is turned on
The alarm may be issued because the spindle motor is accelerated to eliminate the position error
accumulated while the motor excitation is off. Correct the sequence so that spindle synchronous
control is released before motor excitation is turned off.
(2) If the alarm is issued during cutting
(a) An overload may have occurred. Review the cutting conditions.
(b) If no overload has occurred, Review to see if the setting of the alarm detection level is
appropriate.

In spindle synchronous control, the position deviation exceeded the alarm detection level (No. 4516).
Troubleshoot as in the case of alarm code C8.
3.4.68 Alarm Code d1 (SP9131)

An error occurred during the operation of the spindle adjustment function.
See the description of the error and the action displayed on the servo guide.

Communication between detector (serial) and βiSVSP is abnormal.
operated normally thus far, the causes (3) to (5) are probable.

Referring to Chapter, “Start-up” in "FANUC AC SPINDLE MOTOR αi series / FANUC AC
(B-65280EN)," check the parameter for sensor setting.
(2) The βiSVSP does not support the detector used.
Check the "Sensors" item in the FANUC SERVO AMPLIFIER αi series DESCRIPTIONS
(B-65282EN).
(3) The cable is disconnected or connected incorrectly.
Replace the cable or check the connection.
(4) The detector is faulty.
Replace the detector.

It was detected that the serial data between detector (serial) and βiSVSP that was received by the βiSVSP
was destroyed by noise.
- 131 -
3. TROUBLESHOOTING
Check the shielding of the cable between detector (serial) and βiSVSP.
Check the "Sensors" item in the FANUC SERVO AMPLIFIER αi series DESCRIPTIONS (B-65282EN).

It was detected that the position data from the detector (serial) changed beyond the anticipated range.
If the alarm is issued at startup, both causes (1) and (2) are probable ones, but for a machine that has
operated normally thus far, the cause (2) is probable.

Referring to Chapter, “Start-up” in "FANUC AC SPINDLE MOTOR αi series / FANUC AC
(B-65280EN)," check the parameter for sensor setting.
(2) Check the shielding of the cable between detector (serial) and βiSVSP.
Check the "Sensors" item in the FANUC SERVO AMPLIFIER αi series DESCRIPTIONS
(B-65282EN).

The βiSVSP safety speed zero monitoring state does not match the CNC safety speed zero monitoring state.
If this alarm is issued, a hardware error is suspected. Replace the CPU card of the CNC or the βiSVSP.

A communication error occurred in the electronic device on the βiSVSP control circuit.
(1) The control printed-circuit board is not mounted properly.


The setting of the current limit level is outside the permissible current value range of the βiSVSP.
Check the setting of the parameter (No. 4526).

An error occurred in the interpolation circuit of the detector (serial).
The detection circuit of the detector (serial) is abnormal. Replace the detection circuit.
3.4.76 Alarm Code E0 (SP9140)

The number of pulses between the one-rotation signals of the detector (serial) is outside the prescribed
range.
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3.TROUBLESHOOTING
The detection circuit of the detector (serial) is abnormal. Replace the detection circuit.

The one-rotation signal of the detector (serial) was not generated within five rotations after the power was
turned on.
operated normally thus far, the causes (2) and (3) are probable.

If the number of teeth of the detector is set incorrectly, this alarm may be issued because the actual
speed does not match the speed calculated by the βiSVSP. Referring to Chapter, “Start-up” in
"FANUC AC SPINDLE MOTOR αi series / FANUC AC SPINDLE MOTOR βi series / FANUC
BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)," check the parameter for
sensor setting.
(2) The detector is not adjusted correctly.
Referring to the "Sensors" item in the FANUC SERVO AMPLIFIER αi series DESCRIPTIONS
(B-65282EN), adjust the sensor signal.
(3) The detection circuit of the detector (serial) is abnormal.
Replace the detection circuit.

Some error or other occurred in the detector (serial). This alarm is output if a detector (serial) made by
another manufacturer is used.
For details of the error, contact the manufacturer of the detector.
3.4.79 Alarm Code F8 (SP9158)

The acceptance test mode state of the βiSVSP does not match the acceptance test mode setting of the CNC.
If this alarm is issued, a hardware error is suspected. Replace the CPU card of the CNC or the βiSVSP.
3.4.80 Alarm Code G6 (SP9166)

This alarm is issued only if the spindle synchronization function for guide bush is used.
The synchronization error of the guide bush axis relative to the master axis exceeds the parameter setting.
Check the parameter setting (No. 4628) of synchronization error limit. If the setting is correct, check if the
βiSVSP, sensor, and so on are abnormal.
3.4.81 Alarm Code G7 (SP9167)

The ladder sequence contains an error.
The details of the error can be identified with the status error number. Referring to the status error number of
the diagnosis number, No. 710, and Subsection 4.3.3, "Status Error Indication Function", correct the
relevant ladder sequence.
- 133 -
3. TROUBLESHOOTING
3.4.82 Other Alarms

(1) If 4, 11, 30, 33, 51, 58, 59, or b1 is issued on the STATUS display of the βiSVSP
This indicates that an alarm is issued in the common power supply. See Section 3.1.
(2) CNC alarms 756 and 766 (axis number errors)

This alarm is issued only if the dual check safety function is used. If this alarm is issued, check that
K90 in the figure below is mounted to the connector JA7A of the second spindle. For the first spindle
only, K90 is not necessary. If the wiring is correct, replace the βiSVSP.
CNC βiSVSP βiSVSP

(First spindle) (Second Details of K90
JA41 JA7B JA7A JA7B spindle) JA7A
K90
X2NDSP
(15)
0V
(11)
K90
20-pin half pitch connector
- 134 -
4.REPLACING SERVO
B-65325EN/02 TROUBLESHOOTING FOR βiSVSP AMPLIFIER COMPONENTS
4 REPLACING SERVO AMPLIFIER

COMPONENTS
This chapter describes how to replace a fan motor, absolute Pulsecoder battery, fuses, and printed-circuit
board.
WARNING
Because the Servo Amplifier uses a large-capacitance electrolytic capacitor
internally, the Servo Amplifier remains charged for a while even after the power is
turned off. Before touching the Servo Amplifier for maintenance or other purposes,
4.1 REPLACEMENT OF A FAN MOTOR
4.1.1 For the Internal Cooling Fan Motor: Model βiSVSP*-18 Only
1 Detach the cable and pull out the internal cooling fan motor upward.
2 Pull the internal cooling fan motor toward the front of the servo amplifier.
- 135 -
4. REPLACING SERVO
AMPLIFIER COMPONENTS TROUBLESHOOTING FOR βiSVSP B-65325EN/02
3 Lift the internal cooling fan motor in a slant direction and disengage the lug.
4 Lift the internal cooling fan motor upward.
4.1.2 External Cooling Fan Motor

Remove the four sheet metal mounting screws and pull out the external cooling fan motor.
Panel cut plane

Four M4×10 screws
- 136 -
4.REPLACING SERVO
4.2.1 Overview
• When the voltage of the batteries for absolute Pulsecoders becomes low, alarm 307 or 306 occurs, with
the following indication in the CNC state display at the bottom of the CNC screen.
Alarm 307 (alarm indicating the voltage of the battery becomes low) :
The indication "APC" blinks in reversed display.
Alarm 306 (battery zero alarm) :
The indication "ALM" blinks in reversed display.
• When alarm 307 (alarm indicating the voltage of the battery becomes low) occurs, replace the battery
as soon as possible. In general, the battery should be replaced within one or two weeks, however, this
depends on the number of Pulsecoders used.
• When alarm 306 (battery zero alarm) occurs, Pulsecoders are reset to the initial state, in which absolute
positions are not held. Alarm 300 (reference position return request alarm) also occurs, indicating that
reference position return is required.
• In general, replace the batteries periodically within the service life listed below.
- A06B-6050-K061 or D-size alkaline dry cells (LR20) : Two years (for each six-axis
configuration)
- A06B-6093-K001 : One years (for each three-axis configuration)
NOTE
The above values indicate the estimated service life of batteries used with FANUC
absolute Pulsecoders. The actual battery service life depends on the machine
configuration based on, for example, detector types. For details, contact the
machine tool builder.
4.2.2 Replacing Batteries

To prevent absolute position information in absolute Pulsecoders from being lost, turn on the machine
power before replacing the battery. The replacement procedure is described below.
<1> Ensure that the power to the servo amplifier is turned on.
<2> Ensure that the machine is in the emergency stop state (the motor is inactive).
<3> Ensure that the DC link charge LED of the servo amplifier is off.
<4> Detach the old batteries and attach new ones.
The replacement of the batteries in a separate battery case and the replacement of the battery built into the
servo amplifier are described below in detail.
WARNING
1 The absolute Pulsecoder of each of the βi series servo motors (βiS0.4 to βiS40,
βiSc, and βiF) has a built-in backup capacitor. Therefore, even when the power to
the servo amplifier is off and the batteries are replaced, reference position return is
not required if the replacement completes within less than 10 minutes. Turn the
power on and replace the batteries if the replacement will take 10 minutes or more.
2 To prevent electric shock, be careful not to touch metal parts in the power
magnetics cabinet when replacing the batteries.
3 Because the servo amplifier uses a large-capacitance electrolytic capacitor
internally, the servo amplifier remains charged for a while even after the power is
turned off. Before touching the servo amplifier for maintenance or other purposes,
- 137 -
4. REPLACING SERVO
WARNING
4 Be sure to replace the batteries with specified ones. Pay attention to the battery
polarity. If a wrong type of battery is used or a battery is installed with incorrect
polarity, the battery may overheat, blow out, or catch fire, or the absolute position
information in the absolute Pulsecoders may be lost.
5 Ensure that the battery connector is inserted in the correct position.
4.2.3 Replacing the Batteries in a Separate Battery Case

Use the following procedure to replace the batteries in the battery case.
<1> Loosen the screws on the battery case and detach the cover.
<2> Replace the batteries in the case (pay attention to the polarity).
<3> Attach the cover to the battery case.
Battery case (with a cover)
A06B-6050-K060
Batteries
Four A06B-6050-K061 batteries or
D-size alkaline dry cells
CAUTION
1 Four D-size alkaline dry cells (LR20) that are commercially available can be used
as batteries. A set of four A06B-6050-K061 batteries is optionally available from
FANUC.
2 Replace all the four batteries with new ones. If old and new batteries are mixed,
the absolute position information in the absolute Pulsecoders may be lost.
4.2.4 Replacing the Battery Built into the Servo Amplifier

Use the following procedure to replace the special lithium battery.
<1> Detach the battery case.
<2> Replace the special lithium battery.
<3> Attach the battery case.
CAUTION
1 Purchase the battery from FANUC because it is not commercially available. It is
therefore recommended that you have a backup battery.
2 When the built-in battery is used, do not connect BATL (B3) of connector
CXA2C/CXA2A. Also, do not connect two or more batteries to the same BATL
(B3) line. These connections are dangerous because battery output voltages may
be short-circuited, causing the batteries to overheat.
3 Install the battery in the servo amplifier in a direction that allows slack in the cable.
If the battery cable is under tension, a bad connection may occur.
4 If the +6 V pin and 0 V pin of CX5X are short-circuited, the battery may overheat,
blow out, or catch fire, or the absolute position information in the absolute
Pulsecoders may be lost.
5 When inserting the connector, align it to the connector pins.
- 138 -
4.REPLACING SERVO
βi SVSP
Insertion direction
Cable side
Red: +6 V
Connector Black: 0 V
CX5X
+6V
Battery
0V
Battery case
[Battery sets and outlines]

Battery ordering drawing Manufacturer model Battery case ordering
Outline
number number drawing number
BR-2/3AGCT4A
A06B-6114-K504 A06B-6114-K506
(Panasonic)
Used batteries
Old batteries should be disposed as "INDUSTRIAL WASTES" according to the regulations of the country
or autonomy where your machine has been installed.
- 139 -
4. REPLACING SERVO
4.2.5 Notes on Replacing a Battery (Supplementary Explanation)
4.2.5.1 Battery connection modes

The battery for the absolute Pulsecoder can be connected using [Connection method 1] and [Connection
method 2] explained below.
For details, refer to "Connecting the Battery" in the FANUC SERVO AMPLIFIER βi Series Descriptions
(B-65322EN).
[Connection method 1] Method of supplying battery power from one battery to

multiple βiSVSP amplifiers
Battery case
A06B-6050-K060
βiSVSP Battery
A0 6B-6050-K061
CX5X
Connector
A06B-6130-K201
replace the battery. If a battery voltage of 0 V is indicated, you need to make a zero point return.
• The absolute Pulsecoder of the βiS series servo motor (βiS 0.4 to βiS 40, βiSc, and βiF) is
incorporated with a backup capacitor as standard. This backup capacitor enables an absolute position
detection to be continued for about 10 minutes. Therefore, no zero point return need be performed if
the time during which servo amplifier power is kept off for battery replacement is within 10 minutes.
The Pulsecoder of the β series servo motors and some of the βiS series servo motors (βiS 0.2 to βiS0.3)
Subsection 4.2.5.2, “Connecting the battery for the β series motor” in Part II,
“TROUBLESHOOTING FOR βiSV” at the end of this section for details.
βiF) if servo motors for six axes are connected. For the β series servo motors and some of the βiS series
servo motors (βiS 0.2 to βiS0.3), the battery service life is about one year.
• The battery unit consists of four R20 alkaline batteries. Commercial batteries can be used in the battery
unit. The optional battery offered by FANUC is A06B-6050-K061.
WARNING
1 Do not connect more than one battery to the same BATL (B3) line. If the output
- 140 -
4.REPLACING SERVO
[Connection method 2] Method of building a built-in battery into each βiSVSP
βiSVSP
Battery case
A06B-6114-K501
Battery
A06B-6073-K001
CX5X
replace the battery (A06B-6073-K001). If a battery voltage of 0 V is indicated, you need to make a
zero point return.
The Pulsecoder of the β series servo motors and some of the βiS series servo motors (βiS 0.2 to βiS0.3)
Subsection 4.2.5.2, “Connecting the battery for the β series motor” in Part II,
“TROUBLESHOOTING FOR βiSV” at the end of this section for details.
βiF) if servo motors for three axes are connected.
• The built-in batteries are not commercially available. They must be purchased from FANUC. So,
FANUC recommends that you keep spares.
WARNING
1 When using the built-in batteries (A06B-6073-K001), do not connect them to the
BATL(B3) of connector CXA2C.
The output voltages from different batteries may be short-circuited, resulting in the
batteries becoming very hot.
2 Do not connect more than one battery to the same BATL(B3) line. If the output
- 141 -
4. REPLACING SERVO
4.2.6 Notes on Attaching Connectors

If an excessive strain is applied to a connector when it is inserted or removed, a poor contact may result.
When inserting and removing the battery connector, therefore, be careful not to apply an excessive
wrenching force to it; just follow the instructions given in the following table.
(1) Attaching connectors

Check the attachment
<1>
position.
Plug the cable connector while

<2>
10 degrees or less
Here, the angle of the cable

<5> connector to the horizontal
must be 5 degrees or less.
5 degrees or less
After passing the lock pin,

<3>
insert the connector straight.
The attachment of the

<4>
connector is completed.
(2) Detaching the connector
Hold both the sides of the

<1> cable insulator and the cable,
and pull them horizontally.
Pull out the cable side while

<2>
10 degrees or less
- 142 -
4.REPLACING SERVO
Here, the angle of the cable to

<3> the horizontal must be 5
degrees or less.
5 degrees or less
4.3 HOW TO REPLACE THE FUSES AND PRINTED CIRCUIT

BOARDS
4.3.1 How to Replace the Fuses and Printed Circuit Boards

In the βiSVSP, a printed circuit board can be removed and inserted from the front of the servo amplifier.
Remove the top

and bottom screws.
Pull the printed

circuit board
toward you.
Fuse specification
Symbol Ordering number
FU1 A60L-0001-0290/LM32C
When replacing the fuse, be sure to confirm the fuse specification.

Insert the fuse in the fuse socket securely.
When replacing the printed circuit board, fasten the upper and lower screws securely.
Poor connector contact may cause an unpredictable problem.
- 143 -
4. REPLACING SERVO
4.3.2 Fuse Locations

There is one fuse on the βiSVSP printed-circuit board.
FU1 3.2A
FU2 (2A)
- 144 -
V. MOTOR/DETECTOR/AMPLIFIER
PREVENTIVE MAINTENANCE
MOTOR/DETECTOR/AMPLIFIER 1.MOTOR/DETECTOR/AMPLIFIER
B-65325EN/02 PREVENTIVE MAINTENANCE PREVENTIVE MAINTENANCE
1 MOTOR/DETECTOR/AMPLIFIER
PREVENTIVE MAINTENANCE
This chapter describes preventive maintenance of motors, detectors, and amplifiers that is to be performed
by the customer the machine uses.
Contents
1.1 LIST OF MANUALS RELATED TO MOTORS AND AMPLIFIERS...........................................148

1.2 PREVENTIVE MAINTENANCE OF MOTORS AND DETECTORS...........................................149
1.2.1 Warnings, Cautions, and Notes on Preventive Maintenance of Motors and Detectors ........149
1.2.2 Preventive Maintenance of a Motor (Common to All Models) ............................................151
1.2.2.1 Main inspection items ...........................................................................................151
1.2.2.2 Periodic cleaning of a motor..................................................................................154
1.2.2.3 Notes on motor cleaning........................................................................................154
1.2.2.4 Notes on the cutting fluid (informational).............................................................154
1.2.3 Preventive Maintenance of a Linear Motor ..........................................................................155
1.2.3.1 Appearance inspection of the linear motor (magnet plate)....................................155
1.2.4 Maintenance of a Detector ....................................................................................................155
1.2.4.1 Alarms for built-in detectors (αi and βi Pulsecoders) and troubleshooting
actions....................................................................................................................156
1.2.4.2 Alarms for separate detectors and troubleshooting actions ...................................156
1.2.4.3 Detailed troubleshooting methods.........................................................................158
1.2.4.4 Maintenance of βiS servo motor ( 40 and 60) Pulsecoders.............................159
1.3 PREVENTIVE MAINTENANCE OF SERVO AMPLIFIERS........................................................160
1.3.1 Warnings, Cautions, and Notes on Operation of Servo Amplifiers......................................160
1.3.2 Preventive Maintenance of a Servo Amplifier......................................................................163
1.3.3 Maintenance of a Servo Amplifier........................................................................................164
1.3.3.1 Display of the servo amplifier operation status .....................................................164
1.3.3.2 Replacement of a fan motor ..................................................................................164
1.4 REPLACING BATTERY FOR ABSOLUTE PULSECODERS......................................................164
- 147 -
1.MOTOR/DETECTOR/AMPLIFIER MOTOR/DETECTOR/AMPLIFIER
PREVENTIVE MAINTENANCE PREVENTIVE MAINTENANCE B-65325EN/02
1.1 LIST OF MANUALS RELATED TO MOTORS AND

AMPLIFIERS
Details of individual motors and amplifiers are described in the manuals listed in the table below. Before
performing periodic inspection or any other maintenance work, consult with the machine tool builder and, if
necessary, obtain the latest version of the corresponding manual shown in the list. The information about
the specifications of each device, such as the weight and winding resistance value, is given in the relevant
"DESCRIPTIONS" manual.
Specification
Manual name Type of manual
number
FANUC AC SERVO MOTOR αi series DESCRIPTIONS B-65262EN
FANUC AC SERVO MOTOR βi series DESCRIPTIONS B-65302EN
FANUC SYNCHROUNOUS BUILT-IN SERVO MOTOR DiS series DESCRIPTIONS B-65332EN
FANUC LINEAR MOTOR LiS series DESCRIPTIONS B-65382EN
FANUC AC SPINDLE MOTOR αi series DESCRIPTIONS B-65272EN
FANUC AC SPINDLE MOTOR βi series DESCRIPTIONS B-65312EN
FANUC BUILT-IN SPINDLE MOTOR BiI series DESCRIPTIONS B-65292EN
FANUC SYNCHROUNOUS BUILT-IN SPINDLE MOTOR BiS series DESCRIPTIONS B-65342EN
FANUC - NSK SPINDLE UNIT series DESCRIPTIONS B-65352EN
FANUC SERVO AMPLIFIER αi series DESCRIPTIONS B-65282EN
FANUC SERVO AMPLIFIER βi series DESCRIPTIONS B-65322EN
FANUC AC SERVO MOTOR αi series
FANUC AC SERVO MOTOR βi series
FANUC LINEAR MOTOR LiS series
FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR DiS series
FANUC AC SPINDLE MOTOR αi/βi series
BUILT-IN SPINDLE MOTOR Bi series
FANUC AC SERVO MOTOR αi series
AC SPINDLE MOTOR αi series MAINTENANCE MANUAL B-65285EN
SERVO AMPLIFIER αi series
FANUC AC SERVO MOTOR βi series
AC SPINDLE MOTOR βi series MAINTENANCE MANUAL B-65325EN
SERVO AMPLIFIER βi series
FANUC SERVO AMPLIFIER βi series I/O Link Option MAINTENANCE MANUAL B-65395EN
FANUC SERVO GUIDE OPERATOR’S MANUAL B-65404EN
FANUC AC SERVO MOTOR αis/αi/βis series SERVO TUNING
B-65264EN
PROCEDURE (BASIC)
- 148 -
1.2 PREVENTIVE MAINTENANCE OF MOTORS AND

DETECTORS
1.2.1 Warnings, Cautions, and Notes on Preventive Maintenance of

Motors and Detectors
This subsection contains the safety precautions for motor and detector preventive maintenance, which are
classified into "warnings", "cautions", and "notes" according to their bearing on safety. Make sure that you
understand and comply with these precautions when carrying out the maintenance work.
WARNING
• Make sure that you are safely dressed and have a safe working environment when
performing preventive maintenance for a motor.
- Be dressed safely, e.g. by wearing gloves and safety shoes, to protect against injury due to an
edge or protrusion and electric shock.
- Have the work done by more than one person, where possible, so that immediate action can be
taken if an accident occurs when handling a motor.
- A motor is heavy. When moving it, use a crane or other appropriate equipment to protect against
injury. For information about the weight of the motor, refer to its DESCRIPTIONS manual
(shown earlier).
- Clothes or fingers can be caught in a rotating motor or come into contact with a moving part of it.
Standing in the direction of motor rotation (direction of motion) can pose a risk of injury. Before
rotating a motor, check that there is no object that is thrown away by motor rotation.
• Be careful about electric shock, fire, and other accidents.

- Do not handle a motor with a wet hand.
- To prevent electric shock, make sure that no conductive object, such as a terminal, is exposed
when the motor is powered on.
- Before touching a motor or any surrounding part, check that the power is shut off and take
appropriate safety precautions.
- High voltage remains across power line terminals of a motor even after the power is shut off (for
at least twenty minutes). Do not touch a motor in such a condition or connect it to other
equipment.
- A loose or disconnected terminal, short-circuited terminals, or a terminal connected to the ground
can cause overheating, spark, fire, or damage to the motor. Take appropriate precautions to
prevent these accidents.
- When placed near any inflammable object or material, a motor can be ignited, catch fire, or
explode. Avoid placing it near such object or material.
• Do not disassemble or modify a motor.

Motors such as linear motors, synchronous built-in servo motors, and synchronous built-in spindle
motors contain very strong magnets. If electronic medical apparatus comes near, these motors can
cause the apparatus to malfunction, potentially putting the user's life in danger. Also, disassembling or
modifying a motor can cause a failure, regardless of the type of motor. Do not disassemble or modify
a motor in any way not specified by FANUC.
- 149 -
CAUTION
• Ensure that the specified cooling conditions are met.

If the specified cooling conditions are not met (the motor is insufficiently or excessively cooled), the
motor can fail. Problems that can cause a motor failure, such as liquid piping clog, leakage, and fan
motor trouble, should be eliminated through periodic inspection. Do not drive the motor when the
cooling system is in an abnormal condition.
• Do not change the system configuration.

Do not change the configuration of the system when it is running normally. Doing so can cause an
accident or failure. If you disconnect a cable for maintenance or some other purpose, take an
appropriate measure, such as putting a mark on it, to ensure you can restore the original state.
• Use the tapped holes of a motor only to move the motor.

Do not use the tapped holes of a motor to lift or move any other object along with the motor. Doing so
can damage the motor. Depending on the type of motor, the place and direction in which the motor can
be lifted may be predetermined. For details, refer to the DESCRIPTIONS manual of the motor (shown
earlier).
• Do not touch a motor when it is running or immediately after it stops.

A motor may get hot when it is running. Do not touch the motor before it gets cool enough. Otherwise,
you may get burned.
NOTE
• Do not remove a nameplate from a motor.

The nameplate is used to identify the motor during maintenance work. If a nameplate comes off, be
careful not to lose it.
• Do not step or sit on a motor, and avoid applying shock to a motor.

Any of these acts can deform or break the motor or affect its component, crippling the normal motor
operation. Do not put a motor on top of another motor.
• Comply with the specified conditions when conducting an electric test (winding
resistance test, insulation resistance test, etc.) for a motor or other device or
supplying power.
- Conduct an electric test according to the specified method. Conducting such a test by any method
that is not specified can damage the motor.
- Do not conduct a dielectric strength test or insulation test for a Pulsecoder or other detector, or do
not apply a commercial power source voltage. Doing so can destroy the internal elements.
• Perform preventive maintenance (inspection of the external appearance,

measurement of winding resistance, insulation resistance, etc.) and cleaning on a
regular basis.
To use a motor safely throughout its entire service life, perform preventive maintenance and cleaning
on a regular basis. Be careful, however, because excessively severe inspection (dielectric strength test,
etc.) can damage its windings. For information about winding resistance values, refer to the
DESCRIPTIONS manual of the motor (its specification number is shown in this manual). Information
about insulation resistance is given later in this manual.
- 150 -
NOTE
• This manual is focused on the preventive maintenance work to be performed for a
single FANUC motor or detector alone. The information contained herein may not
apply depending on the type or configuration of the machine. When reading this
manual, refer to the manual of the machine as well. If you have any questions or
doubts, do not act on your own; please contact the machine tool builder or
FANUC.
• For detailed information about a motor, see the manual list shown earlier and, if
necessary, obtain the latest version of the corresponding manual.
1.2.2 Preventive Maintenance of a Motor (Common to All Models)

This subsection describes the common preventive maintenance items to be handled regardless of the model
of the motor. For the items specific to a particular motor model, see one of the subsequent subsections that
pertains to that particular motor model.
CAUTION
• The preventive maintenance method differs from machine to machine in many
respects. Depending on the machine in use, it may be difficult for the user to
perform periodic inspection or cleaning. If you are not sure about anything as to
preventive maintenance, consult with the machine tool builder and ensure that you
can perform periodic inspection and cleaning.
• The machine should be used within the scope of specification defined by the
machine tool builder. Using the machine in any way that is outside the specified
scope can reduce the motor's service life or cause a failure.
1.2.2.1 Main inspection items

The following table summarizes the main inspection items for a motor. If any of these items is found to be
abnormal, stop the use of the machine immediately and fix the abnormal part by repairing or replacing
it. At the same time, identify and remove the cause and take a measure to prevent its recurrence. If it is
difficult to take a preventive measure or to prevent its recurrence, consult with the machine tool builder or
FANUC.
Appearance of Crack or - Check the motor for any scar, crack, deformation, bulge, etc.
the motor deformation - If the interior of the motor is visible or there is interference with a
peripheral component, it is imperative to replace the motor or the
peripheral component.
- A light peel-off or scar of the surface may be repairable; consult with
FANUC.
Wet or dirty part - If you find any wet or dirty part, clean it immediately.
- A preventive measure is needed if the part in question remains wet
continually due to cutting fluid or dew condensation.
Operating Temperature, - Comply with the operating conditions of the machine. For details of the
conditions humidity, etc. operating conditions of a specific motor, refer to the corresponding
DESCRIPTIONS manual. Generally, the ambient temperature should be
0°C to 40°C (or 30°C for a spindle unit) and dew condensation is not
allowed. In a place subject to severe vibration, the components of the
motor may be broken.
- 151 -
Connection Cable - Check for any cable sheath damage, exposed conductor, damaged
state conduit or cable bearing, abnormal bending, loose terminal, etc.
- If there is any trace of fluid flowing, the fluid may have entered the inside
of the motor or connector. It is necessary to make a check and take a
measure to prevent recurrence.
Connector/terminal - Check for any cracked, exposed, loose, or removed terminal or
connector, etc.
- Fluid causes a failure; be sure to remove fluid.
- A scarred or damaged connector or terminal needs to be replaced. In the
case of a resin molded motor, such as a linear motor, the motor needs to
be replaced.
Operation of Noise/vibration - Check for any abnormal noise or vibration not only when the motor is
the motor running (the spindle is rotating) but also when it is stopped.
- Abnormal noise heard when the motor is rotating indicates an
abnormality of the bearing or a failure inside the motor.
- If abnormal noise is generated from the connection section of a Spindle
Amplifier, check the following items:
Belt connection: Check whether the belt tension is appropriate.
Gear connection: Check whether an appropriate value is set for the gear
backlash.
Coupling connection: Check whether the coupling is free from
deformation, crack, and looseness.
Movement - Check that the motor operates normally and smoothly.
- If the circuit breaker trips at the same time the motor starts to operate, it
indicates abnormal motor windings.
Heat Check whether the motor does not overheat during the normal operation
cycle.
Note: While the motor is running or immediately after it is stopped, the motor
surface may become very hot. Instead of touching the motor directly by hand,
use a thermolabel, surface thermometer, etc.
Electric Winding resistance If the resistance value exceeds the specified range, the motor needs to be
characteristics replaced.
of the motor Note: When conducting winding resistance measurement, disconnect the
motor from the amplifier and measure the resistance at the power line or
connector closest to the motor.
Insulation For the measuring method and judgment criteria, see the table that follows.
resistance
Cooling fan Noise/vibration - Check that the fan blows air normally without causing abnormal noise or
(for a model vibration.
with a fan - If abnormal noise is heard even when the motor is stopped, it indicates a
motor) fan motor failure.
Movement - If the power is on and if the fan does not operate or the fan blades cannot
be moved even manually, or if the fan blades are rotating but no cooling
wind is blown out, the fan motor may have cutting chips or sludge
accumulated in it and needs to be cleaned.
- If the fan does not operate normally for any other reason, the fan motor
needs to be replaced.
- 152 -
Forcible Dew condensation - Check that forcible cooling does not cause dew condensation on the
cooling unit (over-cooling) motor surface. Dew condensation is likely particularly when the cooling
(when using an unit continues to run after the machine is stopped. In that case, be sure
external to make this check.
cooling unit - Dew condensation or water drop on the motor surface can reduce the
such as liquid motor's service life. It is necessary to wipe it dry and take a measure to
cooling unit) prevent recurrence.
Liquid - Check the cooling pipe for leakage or clog. Do not drive the motor unless
leakage/clog the leakage or clog is fixed.
- Liquid leakage from a spindle motor with a through hole indicates a
failure of the coolant joint. In this case, the joint needs to be replaced.
- In the case of liquid leakage from a linear motor (coil slider), the linear
motor (coil slider) needs to be replaced.
- If the motor gets wet due to liquid leakage or any other cause, it is
necessary to clean and dry the motor and perform electric characteristic
checks (winding resistance/insulation resistance).
Insulation resistance measurement

The following table shows the judgment criteria to be applied when measuring insulation resistance
between winding and frame using a megohmmeter (500 VDC).
Insulation resistance Judgment
100M Ω or higher Acceptable
The winding has begun deteriorating. There is no problem with the performance at present.
10M to 100M Ω
Be sure to perform periodic inspection.
The winding has considerably deteriorated. Special care is in need. Be sure to perform
1M to 10M Ω
periodic inspection.
Lower than 1M Ω Unacceptable. Replace the motor.
If insulation resistance drops sharply during a short period of time or if the circuit breaker trips, the cutting
fluid or other foreign matter may have entered the inside of the motor or cable. In that case, contact the
machine tool builder or FANUC for instructions.
CAUTION
• Let the motor dry and cool to room temperature before winding or insulation
resistance is measured. Otherwise, not only an accurate measurement cannot
be performed but also the motor may be damaged.
• The winding or insulation resistance measurement should be performed on the
motor alone, with its power line disconnected.
Measuring insulation resistance with the motor connected to the amplifier may
damage the amplifier.
• During insulation resistance measurement, applying voltage to the motor for a
long time may further deteriorate the insulation of the motor. Therefore, the
measurement of insulation resistance should be performed in a minimum amount
of time where possible.
• When disconnecting the power line and other cables, take an appropriate
measure, such as labeling, to ensure that they can be restored to their original
state.
- 153 -
1.2.2.2 Periodic cleaning of a motor

Periodic cleaning is necessary to remove an accumulation of cutting chips or sludge that may eventually
cause a failure. Also, leaving the cutting fluid or other chemical substance attached for a long time can
reduce the motor's service life substantially. When forcible cooling is provided by a liquid or air cooling
unit, check the unit for pipe clog, fan failure, etc. and perform cleaning periodically to ensure that the
coolant flows smoothly and that the motor is cooled properly.
WARNING
Depending on the type of motor, the handling may involve a risk and require safety
education in advance. Also, some machines are difficult for users to clean on their
own. If you are to clean the motor, consult with the machine tool builder in advance
with regard to the cleaning method, safety education, etc.
1.2.2.3 Notes on motor cleaning

A motor is an electric product, which is incompatible with most kinds of fluid. When removing cutting
chips, sludge, cutting fluid, etc. during cleaning, note the following.
Note on cleaning Measure

Do not sprinkle or spray detergent or any other fluid over the motor (including its
Do not sprinkle fluid.
peripheral components), or do not wash the motor by submerging it in such fluid. When
Do not wash by
cleaning the motor, use a cloth moistened with a small amount of neutral detergent so
submerging.
that the fluid does not enter the inside the motor.
Solvent may damage the motor; do not use one. If the dirt is difficult to remove with
neutral detergent, use a cloth moistened with a small amount of industrial alcohol (e.g.,
Do not use solvent.
IPA). Be careful, however, because rubbing with force or repeatedly may damage the
coated or resin surface.
If the motor is wet or moistened after cleaning, dry it before supplying power and before
Do not leave the motor
performing electric tests. When drying the motor in an oven, make sure that the
wet or moistened.
temperature is below 40°C and that hot air does not blow directly against the motor.
1.2.2.4 Notes on the cutting fluid (informational)

Depending on the type of cutting fluid used, the motor and amplifier may be affected greatly. Take due care
because, even if you ensure that they do not come into direct contact with the fluid, a mist or atmosphere of
the fluid can cause the problems described below.
Type of cutting fluid Expected problem

requiring care
Some types of cutting fluid contain highly active sulfur. If such cutting fluid enters the
Cutting fluid containing
inside of the motor or amplifier, it causes copper, silver, and other kinds of metal to
highly active sulfur
corrode, leading to a component failure.
Some types of cutting fluid containing such substance as polyalkylene glycol have
Synthetic cutting fluid
very high permeability. Such cutting fluid permeates into the inside of the motor,
with high permeability
causing insulation deterioration or component failure.
Some types of cutting fluid that enhance their alkaline property using such substance as
Highly alkaline,
alkanolamine remain highly alkaline - pH10 or higher - when diluted. If such cutting
water-soluble cutting
fluid is left attached for a long time, its chemical change will deteriorate the resin and
fluid
other materials of the motor and amplifier.
Other types of cutting fluid not mentioned above may cause various unexpected problems. If any problem
arises for which the cutting fluid is thought to be responsible, consult with the machine tool builder or
FANUC.
- 154 -
1.2.3 Preventive Maintenance of a Linear Motor

The magnet plate of a linear motor contains very strong magnets. When performing the maintenance work,
make sure all those engaged in the work fully understand the potential risks involved.
WARNING
• The FANUC linear motors use very strong magnets. Improper handling of the
motor is very dangerous and can lead to a serious accident. Particularly, a person
wearing a pacemaker or other medical apparatus should stay away from the linear
motor; otherwise, the apparatus may malfunction, potentially resulting in a
life-threatening accident.
• Those who will come near or touch a linear motor for maintenance work should
receive safety education in advance. For details, contact the machine tool builder
or FANUC.
1.2.3.1 Appearance inspection of the linear motor (magnet plate)

Perform an appearance inspection as well during cleaning or other maintenance work. A crack, chip,
deformation, or any other abnormality in appearance of the motor can lead to a serious failure in the
not-so-distant future. If you find any such abnormality, be sure to report it to the machine tool builder. A
scratch or other slight scar on the motor surface can also be a sign of future trouble and needs to be
addressed with care. Some suggested appearance inspection items for the magnet plate are described below.
* For the coil slider (the side to which the power line is connected), see "Main inspection items" earlier
in this manual.
Appearance of the magnet plate (which may have a stainless cover)

Appearance inspection item Measure
Crack or chip in the magnet plate resin The magnet plate needs to be replaced. If unattended, it can cause
Deformation or bulge of the magnet plate or trouble in the not-so-distant future. If the problem is extremely
softening of the resin minor, consult with the machine tool builder or FANUC.
The magnet is exposed, or the resin or
The magnet plate needs to be replaced urgently.
magnet is floating
Foreign matter may have entered into the motor, or interference
Scratch on the magnet plate between parts is likely. It is necessary to eliminate the cause and
take a measure to prevent recurrence.
Floating, bulging, or deformed stainless
The cover or magnet plate needs to be replaced.
cover
1.2.4 Maintenance of a Detector

CAUTION
• Detectors such as Pulsecoders are precision equipment. When handling a
detector, avoid applying shock to it. Also, exercise care to prevent cutting powder,
dust, cutting fluid, or other foreign matter from attaching to it.
• Make sure that all connectors are connected properly and securely. A connection
failure can cause an alarm or some other problem.
• If the detector and/or connectors are not installed securely, cutting fluid may enter
the inside of the detector, making it necessary to replace the detector. In that case,
contact the machine tool builder or FANUC.
- 155 -
NOTE
If you use a detector not manufactured by FANUC, contact the machine tool
builder or detector manufacturer for detailed information on the detector.
1.2.4.1 Alarms for built-in detectors (αi and βi Pulsecoders) and

troubleshooting actions
These alarms concern built-in detectors that are connected directly to the control unit (CNC/servo
amplifier).
Based on the alarm number and description, take an appropriate action as described in the following
subsection, "Detailed troubleshooting methods".
Detailed
Alarm No.: Alarm Description Possible cause Action troubleshooting
method
- Communication
361: ABNORMAL PHASE error in the - Pulse coder failure Replace the (3)
DATA(INT) Pulsecoder - Noise Pulsecoder. (4)
- ID data error
Check the effect
364: SOFT PHASE - Noise of noise. (1)
Position data alarm
ALARM(INT) - Entry of cutting fluid Replace the (3)
Pulsecoder.
Replace the
365: BROKEN LED(INT) LED disconnection - Pulse coder failure (3)
Pulsecoder.
Small internal signal - Pulse coder failure Replace the (3)
366: PULSE MISS(INT)
amplitude - Noise Pulsecoder. (4)
Position data count - Pulse coder failure Replace the (3)
367: COUNT MISS(INT)
error - Noise Pulsecoder. (4)
- Cable disconnection Check the cable. (2)
368: SERIAL DATA Communication
- Pulse coder failure Replace the (3)
ERROR(INT) interruption
- Noise Pulsecoder. (4)
369: DATA TRANS. Communication data Check the effect
- Noise (1)
ERROR(INT) alarm of noise.
453: SPC SOFT Position - pole data - Pulse coder failure Replace the
(3)
DISCONNECT ALARM error - Entry of cutting fluid Pulsecoder.
1.2.4.2 Alarms for separate detectors and troubleshooting actions

These alarms concern separate detectors that are connected to the control unit via a separate detector
interface unit (SDU).
Based on the alarm number and description, take an appropriate action as described in the following
subsection, "Detailed troubleshooting methods".
Detailed
method
380: BROKEN LED(EXT) LED disconnection
Position data count
382: COUNT MISS(EXT)
error
Replace the
Small internal - Detector failure (4)
383: PULSE MISS(EXT) detector.
signal amplitude
384: SOFT PHASE
Position data alarm
ALARM(EXT)
- 156 -
Detailed
method
Check the cable.
- Cable disconnection Check the effect (2)
385: SERIAL DATA Communication
- Noise of noise. (1)
ERROR(EXT) interruption
- Detector failure Replace the (4)
detector.
386: DATA TRANS. Communication Check the effect
- Noise (1)
ERROR(EXT) data alarm of noise.
381: ABNORMAL PHASE
(EXT)
For details, contact the machine tool builder or detector manufacturer.
387: ABNORMAL
ENCODER(EXT)
- 157 -
1.2.4.3 Detailed troubleshooting methods

(1) Checking the effect of noise
Check CNC diagnosis information No.356 (Built-in detector), No.357 (Separate detector).
Normally, 0 is displayed. However, if the position data from the Pulsecoder becomes unstable due to noise
or some other factor, this value is incremented. The value is cleared when the CNC unit is powered off.
Immediately after the power is turned on, 0 is displayed.
(2) Checking the cable

Check whether the feedback cable is not disconnected and whether the connector is properly plugged.
(3) Replacing the Pulsecoder

× Do not loosen
Bolt fastening the Pulsecoder cover M3
(3)-1 Pulse coder replacement procedure
<1> Remove the four M4 hexagon socket head cap

screws fastening the Pulsecoder. The M3 bolts ○ Remove
Bolt fastening the Pulsecoder M4
fastening the Pulsecoder cover do not need to
be loosed. (See the figure at right.)
<2> Remove the Pulsecoder and Oldham's coupling

(see the following figure). Oldham's coupling
<3> Set the new Pulsecoder and Oldham's coupling on
the motor. Adjust the direction of the mate
Oldham's coupling to that of the Oldham's coupling
so that the teeth are engaged.
Push in the Pulsecoder until the O ring fits in the

joint between the motor and Pulsecoder. Take care O ring
so that the O ring of the Pulsecoder is not bitten.
Mate Oldham's coupling
Thermistor connector
Adjust the connector direction
Attach the Pulsecoder in such a direction that the

power connector of the servo motor and the feedback
cable of the Pulsecoder face the same direction or that
Adjust the connection parts the thermistor connection parts of the servo motor
Pulse coder Servo motor and Pulsecoder match each other (see the figure at
left).
<4> Fastening the Pulsecoder with the four M4 hexagon socket head cap screws. (Appropriate torque: 1.5
Nm)
- 158 -
(3)-2 Feedback cable plugging procedure
Plug in the feedback cable connector, as instructed in the

procedure below, and check that the connector is securely
connected.
<1> Check the plugging side and key direction.

Main key Coupling nut
Check that the plugging side is free of foreign matter,
such as dirt or oil.
Straight type Right angle type

<2> Plug in the feedback cable connector.
Hold the connector, as shown in the figure at
right. Plug in the connector until you hear a
click.
Caution)
Do not hold the coupling nut.
<3> Check the connection condition.

1. Check that the arrow mark of the
connector is at the center, as shown in
1mm or less
the figure at right. If the arrow mark is
not at the center, turn the coupling nut
manually until the mark comes to the
appropriate position.
2. Hold the connector by the same part as in <2>, and pull it lightly to check that the connector does
not come off. Do not pull the cable.
(4) If troubleshooting is difficult for the user

If the problem is difficult for the user to troubleshoot because it is due to a detector failure or noise, consult
with the machine tool builder or FANUC.
1.2.4.4 Maintenance of βiS servo motor ( 40 and 60) Pulsecoders

Problems concerning the Pulsecoders of the motors listed in the table below require the maintenance
(replacement) of the entire motor (it is not possible to maintain the Pulsecoder alone).
Motor model Motor specification Remarks

βiS 0.2/5000 A06B-0111-Bcc3#dddd
Frame size 40
βiS 0.3/5000 A06B-0112-Bcc3#dddd
βiS 0.4/5000 A06B-0114-Bcc3#dddd
βiS 0.5/6000 A06B-0115-Bcc3#dddd Frame size 60
βiS 1/6000 A06B-0116-Bcc3#dddd
(cc, dddd : Any)
- 159 -
1.3 PREVENTIVE MAINTENANCE OF SERVO AMPLIFIERS
1.3.1 Warnings, Cautions, and Notes on Operation of Servo

Amplifiers
This subsection contains the safety precautions on preventive maintenance of a servo amplifier (a generic
term to refer to the βiSV and βiSVSP). These precautions are classified into "warnings", "cautions", and
"notes" according to their bearing on safety. Make sure that you understand and comply with these
precautions when carrying out the maintenance work.
WARNING
• Make sure that you are safely dressed and have a safe working environment when
performing preventive maintenance for a servo amplifier.
- Be dressed safely, e.g. by wearing gloves and safety shoes, to protect against injury due to an
edge or protrusion and electric shock.
- Have the work done by more than one person, where possible, so that immediate action can be
taken if an accident occurs when handling a motor.
- A servo amplifier and AC reactor contain heavy components. Be careful when transporting them
or mounting them on the power magnetic cabinet. Also be careful not to get your fingers caught
between the power magnetics cabinet and servo amplifier.
• Before turning on the power, check that the door of the power magnetics cabinet and
all other doors.
- Ensure that the door of the power magnetics cabinet containing the servo amplifier, as well as all
other doors, are closed and locked except during maintenance work.
• When the need arises to open the door of the power magnetics cabinet, only a person
trained in the maintenance of the corresponding machine or equipment should do the
task after shutting off the power supply to the power magnetics cabinet by opening
both the input circuit breaker of the power magnetics cabinet and the factory switch
used to supply power to the cabinet.
• Be careful about electric shock, fire, and other accidents.

- If the machine must be operated with the door open for adjustment or some other purpose, the
operator must keep his or her hands and tools well away from any dangerous voltages. Such work
must be done only by a person trained in the maintenance of the machine or equipment.
- Ensure that the door of the power magnetics cabinet is locked so that the door cannot be opened
by anyone, except service personnel or a qualified person trained in maintenance to prevent
electric shock, when the servo amplifier is powered on.
- When the need arises for an operator to open the door of the power magnetics cabinet and
perform an operation, ensure that the operator is sufficiently educated in safety or that a
protective cover is added to prevent the operator from touching any dangerous part.
- The servo amplifier contains a large-capacity electrolytic capacitor in it and remains charged for
a while after the power is shut off. Before touching the servo amplifier for maintenance or some
other purpose, measure the residual voltage of the DC link connection using a tester and check
that the red LED for indicating charging is in progress is not lit, in order to ensure safety.
- After wiring, be sure to close the servo amplifier cover.
- A loose screw or poor connector contact can cause a motor malfunction or overheating,
connection to ground, or short-circuit. Be extremely careful with power supply lines, motor
power lines, and DC link connections through which a large electric current flows, because a
loose screw or poor connector contact may lead to a fire. Tighten screws and connectors using the
specified screw tightening torque.
- 160 -
- The surfaces of the regenerative discharge unit and heat radiator may become very hot. Do not
touch them directly by hand.
• When operating the machine for the first time after preventive maintenance, check
that the machine operates as instructed.
- To check whether the machine operates as instructed, first specify a small value for the motor and
then increase the value gradually. If the motor operates abnormally, perform an emergency stop
immediately.
- When pressing the emergency stop button, check that the motor stops immediately and that the
power being supplied to the amplifier is shut off by the magnetic contactor.
• Notes on alarms
- If the machine stops due to an alarm, check the alarm number. Depending on the alarm issued, if
the power is supplied without replacing the failed component, another component may be
damaged, making it difficult to identify the original cause of the alarm.
- Before resetting an alarm, ensure that the original cause of the alarm has been removed.
• If the motor causes any abnormal noise or vibration while operating, stop it
immediately.
- Using the motor in spite of the abnormal noise or vibration may damage the servo amplifier.
• Do not disassemble or modify a servo amplifier.

Do not disassemble or modify a servo amplifier in any way not specified by FANUC; doing so can
lead to a failure.
CAUTION
• Notes on servo amplifier replacement and wiring
- The work of servo amplifier replacement and wiring should be carried out by a person trained in
the maintenance of the machine and equipment concerned.
- When replacing a servo amplifier, check that the combination of the amplifier and the motor is
appropriate.
- Check that the servo amplifier is securely mounted on the power magnetics cabinet. If there is
any clearance between the power magnetics cabinet and the surface on which the amplifier is
mounted, dust entering the gap may hinder the normal operation of the servo amplifier.
- Ensure that the power supply lines, motor power lines, and signal lines are each connected to the
correct terminal or connector.
- Unless otherwise instructed, do not unplug a connector and plug it back with the power on; doing
so may cause the servo amplifier to fail.
- When mounting or unmounting the servo amplifier, exercise care not to get your fingers caught
between the servo amplifier and power magnetics cabinet.
- Take care not to lose track of removed screws. Turning on the power with any lost screw left in
the unit may damage the machine.
- Exercise care to prevent the power supply lines and motor power lines from being connected to
the ground or being short-circuited.
- Protect the lines from any stress such as bending. Handle the line ends appropriately.
• Be careful about the handling of a servo amplifier.

- Do not disassemble a servo amplifier. Doing so poses the risk of electric shock, because the
capacitor may remain charged.
- Do not apply shock to a servo amplifier. Doing so may damage its components, potentially
causing the amplifier to malfunction.
- 161 -
- Do not apply an excessively large force to plastic parts. If a plastic section breaks, it may damage
internal parts, thus hindering normal operation or leading to a risk of injury due to a broken
section.
• Be careful about the operating environment of a servo amplifier.

- Prevent conductive, combustible, or corrosive foreign matter, mist, or drops of water from
entering the inside of the unit. The entry of any such material may cause the unit to explode,
break, malfunction, etc.
- Exercise care to prevent cutting fluid, oil mist, cutting chips, or other foreign matter from
attaching to the radiator or fan motor exposed to the outside of the power magnetics cabinet.
Otherwise, the servo amplifier may become unable to meet its specifications. The service lives of
the fan motor and semiconductors can also be reduced.
• Clean the heat sink and fan motor on a regular basis.

- Replace the filter of the power magnetics cabinet on a regular basis.
- Before cleaning the heat sink, shut down the power and ensure that the temperature of the heat
sink is as cool as the room temperature. The heat sink is very hot immediately after power
shutdown, touching it may cause burn injury.
- When cleaning the heat sink by blowing air, be careful about dust scattering. Conductive dust
attached to the servo amplifier or its peripheral equipment can lead to a failure.
NOTE
• Make sure that there is sufficient maintenance clearance around the doors of the
machine and equipment.
• Do not step or sit on the servo amplifier, or do not apply shock to it.
• Do not remove a nameplate from a motor.

- The nameplate is necessary to identify the servo amplifier during maintenance work.
- If a nameplate comes off, be careful not to lose it.
NOTE
1 This manual is focused on the preventive maintenance work to be performed for a
FANUC servo amplifier. The information contained herein may not apply
depending on the type or configuration of the machine. When reading this manual,
refer to the manual of the machine as well. If you have any questions or doubts, do
not act on your own; please contact the machine tool builder or FANUC.
2 For detailed information about a servo amplifier, see the manual list shown earlier
and, if necessary, obtain the latest version of the corresponding manual.
- 162 -
1.3.2 Preventive Maintenance of a Servo Amplifier

To use a servo amplifier safely throughout its entire service life, perform daily and periodic inspections.
CAUTION
1 The preventive maintenance method differs from machine to machine in many
respects. Depending on the machine in use, it may be difficult for the user to
perform periodic inspection or cleaning. If you are not sure about anything as to
preventive maintenance, consult with the machine tool builder and ensure that you
can perform periodic inspection and cleaning.
2 The machine should be used within the scope of specification defined by the
machine tool builder. Using the machine in any way that is outside the specified
scope can reduce the servo amplifier's service life or cause a failure.
Inspection Inspection interval

Inspection item Judgment criterion
part Routine Periodic
Ambient Around the power magnetics cabinet: 0°C - 45°C
V
temperature Inside the power magnetics cabinet: 0°C - 55°C
Humidity V 90% or below RH (dew condensation not allowed)
There shall be no dust or oil mist attached near the
Dust/oil mist V
servo amplifier.
The cooling fan shall be operating normally without
Operating Cooling air path V
the air flow being interrupted.
environment
- No abnormal noise or vibration shall be present
Abnormal that has not been experienced in the past.
V
vibration/noise - Vibration near the servo amplifier shall be 0.5 G
or less.
200-V input type: Within 200 - 240 V
Supply voltage V
400-V input type: Within 400 - 480 V
There shall be no abnormal noise or smell, and
General V
there shall be no dust or oil mist attached.
Screw V There shall be no loose screw.
- There shall be no abnormal vibration or noise,
Servo
Fan motor (NOTE 1, 2) V and the fan blades shall be rotating normally.
amplifier
- There shall be no dust or oil mist attached.
Connector V There shall be no loose or broken connector.
There shall be no sign of overheating or sheath
Cable V
deterioration (discoloration pr crack).
The machine operator's panel or screen shall not
Absolute (NOTE 2)
CNC V display the alarm indicating the battery voltage of
Pulse coder battery
the absolute Pulsecoder is low.
Magnetic contactor V The contactor shall not rattle or chatter.
External Ground fault
V The interrupter shall be able to trip.
equipment interrupter
AC reactor V There shall be no hum.
NOTE
1 Fan motors are periodic-replacement parts. It is recommended to inspect fan
motors on a routine basis and replace them in a preventive manner.
2 Fan motors and batteries are periodic-replacement parts. It is recommended to
keep spare parts.
- 163 -
1.3.3 Maintenance of a Servo Amplifier
1.3.3.1 Display of the servo amplifier operation status

The STATUS LEDs on the front of the servo amplifier indicate the operation status of the servo amplifier
(whether it is operating normally, the type of alarm, etc.). Use these LEDs for maintenance, inspection,
troubleshooting, etc.
CAUTION
A servo amplifier failure may arise from a combination of multiple causes, in which
case it can be difficult to identify all those causes. Handling the failure in an
improper way may worsen the problem. It is therefore important to analyze the
failure status minutely and identify the true cause or causes of the failure. There
may be cases in which the failure appears to have been fixed but later recurs or
cause a more serious trouble. If you are not sure about the root cause of or
corrective action for a failure, do not act on your own; please contact the machine
tool builder or FANUC for instructions on proper action.
(1) βiSV: See Chapter 4, “CONFIRMATION OF THE OPERATION” in Part I, “START-UP

PROCEDURE FOR βiSV.”
(2) βiSVSP: See Chapter 4, “CONFIRMATION OF THE OPERATION” in Part III, “S START-UP
PROCEDURE FOR βiSVSP.”
1.3.3.2 Replacement of a fan motor

(1) βiSV: See Section 4.1, “REPLACEMENT OF A FAN MOTOR” in Part II, “TROUBLESHOOTING
FOR βiSV.”
(2) βiSVSP: See Section 4.1, “REPLACEMENT OF A FAN MOTOR” in Part IV,
“TROUBLESHOOTING FOR βiSVSP.”

(1) βiSV: See Section 4.2, “REPLACING BATTERY FOR ABSOLUTE PULSECODERS” in Part II,
“TROUBLESHOOTING FOR βiSV.”
(2) βiSVSP: See Section 4.2, “REPLACING BATTERY FOR ABSOLUTE PULSECODERS” in Part IV,
“TROUBLESHOOTING FOR βiSVSP.”
- 164 -
VI. MOTOR MAINTENANCE
1.SERVO MOTOR
B-65325EN/02 MOTOR MAINTENANCE MAINTENANCE
1 SERVO MOTOR MAINTENANCE

1.1 SERVO MOTOR MAINTENANCE PARTS
1.1.1 Pulsecoder
The following lists the ordering specification numbers for maintenance.
(1) Pulsecoder: ordering specification

Motor model Motor specification Pulsecoder: ordering specification
A06B-0aaa-BccX Standard
X=3 A860-2020-T301 βiA128
βiS series (aaa, cc : Any) specification
βiF series A06B-0aaa -BccX #0100
X=3 A860-2020-T321 βiA128 IP67 specification
(aaa, cc : Any)
A06B-0aaa-BccX βiA128 Standard
X=7 A860-2020-T361
(aaa, cc : Any) (dedicated to the βiSc) specification
βiSc series
A06B-0aaa -BccX #0100 βiA128
X=7 A860-2020-T371 IP67 specification
(aaa, cc : Any) (dedicated to the βiSc)
(2) Oldham's coupling: ordering specification

Motor model Motor specification Oldham's coupling: ordering specification
βiS series
A06B-0aaa-BccX
βiSc series A290-0501-V535
(aaa, cc, X : Any)
βiF series
NOTE
Problems concerning the Pulsecoders of the motors listed in the table below
require the maintenance (replacement) of the entire motor.
(It is not possible to maintain the Pulsecoder alone.)
Motor model Motor specification Remark

βiS 0.2/5000 A06B-0111-Bcc3#dddd
Frame size 40
βiS 0.3/5000 A06B-0112-Bcc3#dddd
βiS 0.4/5000 A06B-0114-Bcc3#dddd
βiS 0.5/6000 A06B-0115-Bcc3#dddd Frame size 60
βiS 1/6000 A06B-0116-Bcc3#dddd
(cc, dddd : Any)
- 167 -
2. SPINDLE MOTOR
MAINTENANCE PARTS MOTOR MAINTENANCE B-65325EN/02
2 SPINDLE MOTOR MAINTENANCE PARTS

2.1 SPINDLE MOTOR MAINTENANCE PARTS
(1) Parts of the terminal box (βiI, βiIP, and βiIC series)
Model Terminal box assembly Lid of terminal box
βi I 3/10000, βi I 6/10000
A290-1404-T400 A290-1402-V410
βi IC 3/6000, βi IC 6/6000
βi I 8/8000 to βi I 15/7000
βi IP 8/6000 to βi IP 30/6000 A290-1406-T400 A290-1406-V410
βi IC 8/6000
βi IP 40/6000 A290-1410-T401 A290-1410-V410
(2) Fan motor parts (βiI, βiIP, and βiIC series)

Fan assembly Exhaust
Model Fan cover Fan motor
(*1) direction
βi I 3/10000, βi I 6/10000 A290-1404-T500 A90L-0001-0538/R Rear
A290-1404-X501
βi IC 3/6000, βi IC 6/6000 A290-1404-T501 A90L-0001-0538/F Front
βi I 8/8000 to βi I 12/8000 A290-1406-T500 A90L-0001-0515/R Rear
βi IP 8/6000, βi IP 12/6000 A290-1406-X501
A290-1406-T501 A90L-0001-0515/F Front
βi IC 8/6000
βi I 15/7000 A290-1408-T500 A90L-0001-0548/R Rear
A290-1408-X501
βi IP 15/6000 to βi IP 30/6000 A290-1408-T501 A90L-0001-0548/F Front
A290-1412-T510 A90L-0001-0554/RW Rear
βi IP 40/6000 A290-1412-X502
A290-1412-T511 A90L-0001-0554/FW Front
NOTE
1 These drawing numbers include fan motors.
- 168 -
APPENDIX
A.MEASURING SERVO MOTOR
B-65325EN/02 APPENDIX WAVEFORMS (TCMD, VCMD)
A MEASURING SERVO MOTOR

WAVEFORMS (TCMD, VCMD)
To use a servo motor in a good performance condition for a long time and prevent any failure from
occurring, the TCMD and VCMD waveforms of the servo motor can be checked as diagnosis.
(1) Observation of torque command (TCMD) and speed command (VCMD) waveforms
Check whether there is no abnormality in the waveforms.
For how to measure the TCMD and VCMD waveforms, refer to the FANUC AC SERVO MOTOR αi
series/FANUC AC SERVO MOTOR βi series/FANUC LINEAR MOTOR LiS series/FANUC
SYNCHRONOUS BUILT-IN SERVO MOTOR DiS series Parameter Manual (B-65270EN).
The waveforms vary according to the operating conditions such as load and cutting speed. Note that
you should make comparisons under the same condition (for example, during fast traverse to the
reference position or low-speed cutting).
(2) Diagnosis by waveforms

Check the measured waveforms to see whether:
<1> The peak current is within the limit to the current in the amplifier during rapid traverse,
acceleration, or deceleration.(TCMD)
The limit to the amplifier current is listed below.
Limit to the amplifier

current
Measured waveform
(TCMD)
0
Ö The motor used to accelerate/decelerate with the amplifier current within the limit (the
acceleration/deceleration torque used to be sufficient), but something is wrong now. If this
is the case, the probable causes are:
• The load conditions in the machine have changed because of changed friction or reduced
machine efficiency after long period of use.
• Motor failure
Increased friction
Reduced efficiency
- 171 -
A. MEASURING SERVO MOTOR
WAVEFORMS (TCMD, VCMD) APPENDIX B-65325EN/02
[Table 1]
Models Current
200V 400V value
βiS0.2/5000, βiS0.3/5000 4Ap
βiS2/4000HV, βiS4/4000HV, βiS8/3000HV 10Ap
βiS0.4/5000, βiS0.5/6000, βiS1/6000
βiS2/4000, βiS4/4000, βiS8/3000, βiS12/2000
βiS12/3000HV, βiS22/2000HV 20Ap
βiSc2/4000, βiSc4/4000, βiSc8/3000, βiSc12/2000
βiF4/3000, βiF8/2000, βiF12/2000
βiS12/3000, βiS22/2000
βiSc12/3000, βiSc22/2000 βiS22/3000HV, βiS30/2000HV, βiS40/2000HV 40Ap
βiF22/2000
βiS22/3000, βiS30/2000, βiS40/2000
80Ap
βiF30/1500
<2> The waveform has ripple during constant-speed feeding (VCMD).

Ripple
Measured waveform
(VCMD)
<3> The current waveform has ripple or jumps when the motor is not rotating (VCMD).
Ripple
Measured waveform
(VCMD)
0
If you find anything unusual in relation to the above items <1> to <3>, contact your FANUC service
staff.
- 172 -
B.USING THE SPINDLE CHECK
B-65325EN/02 APPENDIX BOARD
B USING THE SPINDLE CHECK BOARD

B.1 OBSERVING DATA USING THE SPINDLE CHECK BOARD
B.1.1 Overview
By using the spindle check board, you can convert digital values used for spindle control in the βiSVSP to
analog voltage, and observe the conversion result with an oscilloscope. For internal data observation, you
can use a two-channel analog output (CH1 and CH2, output: -5 to +5 V) and an output for checking specific
bits such as bit data (CH1D and CH2D). You can also view internal data on a 5-digit indicator.
B.1.2 Main Characteristics

Item
Measurement points CH1,CH2 CH1D,CH2D
H:2Vmin
Output voltage range -5V to +5V
L:0.8Vmax
About 39 mV
Resolution -
(10V/256)
Input impedance for external measuring
10kΩmin 10kΩmin
equipment
B.1.3 Observation Method

By setting data using four setting switches on the spindle check board, you can output internal data to the
5-digit indicator, analog voltage output circuit, and channels 1 and 2 (LM and SM or CH1 and CH2).
Data on channels 1 and 2 is output from an 8-bit D/A converter.
Channels 1 and 2 correspond to the check terminals as listed below.
Measurement point Check terminal

CH1
Channel 1
CH1D, data bit 0
CH2
Channel 2
CH2D, data bit 0
B.1.4 Setting Data to Be Observed

<1> Press the four setting switches at the same time for at least 1 second. [FFFFF] will be displayed on the
indicator.
<2> Turn the switches off and press the [MODE] switch. [d-00] will be displayed on the indicator and the
system will enter the internal data observation mode.
<3> Even in this mode, the motor can be operated normally. Press the [UP] or [DOWN] switch while
holding down the [MODE] switch. The indicator display will change in the range of [d-00] to [d-12].
<4> Addresses d-01 to d-12 correspond to the destinations of the internal data of the spindle as follows:
d-01 to 04: Specifies the number, data shift amount, and output display format (decimal or
hexadecimal) of data to be output to the indicator.
d-05 to 08: Specifies the number and data shift amount of data to be output to channel 1, and
whether an offset is provided.
d-09 to d-12: Specifies the number and data shift amount of data to be output to channel 2, and
whether an offset is provided.
- 173 -
BOARD APPENDIX B-65325EN/02
<5> Select address [d-xx] as instructed in step <3> for setting data.
<6> Turn the [MODE] switch off. [d-xx] will disappear 0.5 seconds later, and data will be displayed for 1
second. Change the data setting using the [UP] or [DOWN] switch within the second.
<7> If more than 1 second elapses without pressing the switch, the data setting cannot be changed.
In this case, turn the [MODE] switch on and off, and you can perform operation from the beginning of
step <6>.
B.1.5 Descriptions and Initial Values of Addresses

[Output to the indicator]
Address Description Initial value
d-01 Sets a data number. 0
d-02 Shift amount at data output (0 to 31 bits) 0
Data shift direction
d-03 0: Shifts data right. 0
1: Shifts data left.
Display format
d-04 0: Decimal notation 0
1: Hexadecimal notation (0 to F)
[Output to channel 1]
d-05 Sets a data number. 218（Phase U current）
d-07 0:Shifts data right. 0
Offset
d-08 0: Not provided. 1
1: Provided.
[Output to channel 2]
d-09 Sets a data number. 19（Motor speed）
d-11 0:Shifts data right. 0
Offset
d-12 0: Not provided. 1
1: Provided.
B.1.6 Principles in Outputting the Internal Data of the Spindle

The data length is 32 bits (BIT31 to BIT00) unless it is described as 16 bits.
BIT31 ･････ BIT03 BIT02 BIT01 BIT00
(1) Examples of outputting data to the indicator

Example 1: Displaying data in decimal
When the data shift amount (d-02) is 0 and data is displayed in decimal (d-04 = 0), the last 16 bits of
data (BIT15 to BIT00) are converted to decimal (0 to 65535 max.) and displayed.
- 174 -
BIT15 …… BIT01 BIT00
16 bits
Converted into decimal
data and displayed
Indicator X X X X X
Example 2: Displaying data in hexadecimal

When the data shift amount (d-02) is 0 and data is displayed in hexadecimal (d-04 = 1), the last 16 bits
of data (BIT15 to BIT00) are converted to hexadecimal (0 to FFFF max.) and displayed.
16 bits
Converted into hexadecimal
data and displayed
Indicator X X X X (The fifth digit is blank.)
Example 3: Shifting data left

When the data shift amount (d-02) is 3, the shift direction is left (d-03 = 1), and data is displayed in
hexadecimal (d-04 = 1), BIT12 to BIT00 and (the last three bits assumed to be 0) of data are converted
to hexadecimal (0 to FFFF max.) and displayed.
BIT12 …… BIT01 BIT00 0 0 0
16 bits
Converted into hexadecimal
data and displayed
Indicator X X X X (The fifth digit is blank.)
Example 4: Shifting data right

When the data shift amount (d-02) is 5, the shift direction is right (d-03 = 0), and data is displayed in
decimal (d-04 = 0), BIT20 to BIT05 of data are converted to decimal (0 to 65535 max.) and displayed.
16 bits
data and displayed
Indicator X X X X X
Example 5: Shifting data right when the data length is 16 bits

When the data length is 16 bits, the data shift amount (d-02) is 5, the shift direction is right (d-03 = 0),
and data is displayed in decimal (d-04 = 0), (the first five bits assumed to be 0) and BIT15 to BIT05 of
data are converted to decimal and displayed.
0 0 0 0 0 BIT15 …… BIT05
16 bits
data and displayed
Indicator X X X X X
(2) Examples of outputting data to channel 1

Internal data is output to channel 1 by setting it in an 8-bit D/A converter.
The D/A converter output ranges from -5 to +5 V, depending on a set value of internal data. See the table
below.
- 175 -
Internal data in binary d-08 setting

Output to channel 1
(decimal) (whether to provide an offset)
00000000(0) 0 -5V
11111111(255) 0 +4.96V
10000000(-128) 1 -5V
00000000(0) 1 0V
01111111(127) 1 +4.96V
Example 1: Setting data

When the data shift amount (d-06) is 0 and no offset is provided (d-08 = 0), the last eight bits of data
(BIT07 to BIT00) are set in the D/A converter.
BIT07 BIT06 BIT05 BIT04 BIT03 BIT02 BIT01 BIT00
Set in the D/A converter for channel 1 output
Example 2: Shifting data left

When the data shift amount (d-06) is 3, the shift direction is left (d-07 = 1), and no offset is provided
(d-08 = 0), BIT14 to BIT00 and (the last three bits assumed to be 0) of data are set in the D/A
converter.
BIT04 BIT03 BIT02 BIT01 BIT00 0 0 0
Example 3: Shifting data right

When the data shift amount (d-06) is 10, the shift direction is right (d-07 = 0), and no offset is provided
(d-08 = 0), BIT17 to BIT10 of data are set in the D/A converter.
Example 4: Shifting data right when the data length is 16 bits

When the data length is 16 bits, the data shift amount (d-06) is 10, the shift direction is right (d-07 = 0),
and no offset is provided (d-08 = 0), (the first two bits assumed to be 0) and BIT15 to BIT10 of data are
set in the D/A converter.
0 0 BIT15 BIT14 BIT13 BIT12 BIT11 BIT10
Example 5: When an offset is provided

When the data shift amount (d-06) is 10, the shift direction is right (d-07 = 0), and an offset is provided
(d-08 = 1), BIT17 to BIT10 of data with 1 added to the most significant bit (BIT17) are set in the D/A
converter.
BIT17 Data +1 BIT16 BIT15 BIT14 BIT13 BIT12 BIT11 BIT10
Example 6: Observing bit data

When the data shift amount (d-06) is 0 and no offset is provided (d-08 = 0), the status of the least
significant bit (BIT00) can be observed as a high/low level at check terminal CH1D.
- 176 -
Output to check terminal CH1D
(3) Examples of outputting data to channel 2

Data is output to channel 2 in the same way as to channel 1. The addresses for setting data (d-09 to d-12) are
different from those for outputting data to channel 1.
You can set motor speed information in channel 1 and the number of errors in channel 2 to observe the
change in each data item using the two channels.
B.1.7 Data Numbers

(1) Data numbers
Data No. Description Data length Remarks
Main data
16 Motor speed command 32 Bit 12 (BIT12) indicates the unit of min-1.
Bit 12 (BIT12) indicates the unit of min-1. (Estimated value for
19 Motor speed 32
the βiSVSP spindle sensorless model)
(Speed command - motor speed) Bit 12 (BIT12) indicates the
25 Motor speed deviation 32
unit of min-1.
4 Move command 32 Number of command pulses for ITP (usually 8 msec)
Number of erroneous pulses (Spindle synchronous control, Cs
9 Position error 32
contour control, and rigid tapping)
90 Torque command 16 0 to ±16384
131 Speedometer data 16 SM terminal
132 Load meter data 16 LM terminal
Number of erroneous pulses (position coder-based
136 Position error 32
orientation)
Data between the spindle and CNC
5 Speed command data 16 ±16384 for the maximum speed command
6 Spindle control signal 1 16 See the command signal from the PMC to the spindle in (3).
10 Load meter data 16 +32767 for the maximum output
11 Motor speed data 16 ±16384 for the maximum speed
12 Spindle status signal 1 16 See the status signal from the spindle to the PMC in (3).
66 Spindle control signal 2 16 See the command signal from the PMC to the spindle in (3).
182 Spindle status signal 2 16 See the status signal from the spindle to the PMC in (3).
Other data
Phase U current (A/D
218 16 10 V/FS by shifting 8 bits left
conversion data)
Phase V current (A/D
219 16
conversion data)
162 DC link voltage 16 1000 V/FS by shifting 8 bits left
(2) Internal data conversion

Data No. Signal name Description (when the shift amount is set to 8)
218 IU Phase U current The current is positive when it is input to the amplifier.
219 IV Phase V current *1
162 VDC DC link voltage signal
100V/1V
*1 Current conversion result for channels 218 and 219
Model Conversion result
βiSVSP*-5.5 16.7A/1V
- 177 -
Model Conversion result

βiSVSP*-7.5 26.7A/1V
βiSVSP*-11 33.3A/1V
(3) Spindle control signals and spindle status signals

Shown below are the data numbers for the PMC signals used by the spindle and the configuration of
each data item. For details of each signal, refer to Chapter 3, "PMC SIGNALS (CNC ↔ PMC)" in
"FANUC AC SPINDLE MOTOR αi series/FANUC AC SPINDLE MOTOR βi series/FANUC
BUILT-IN SPINDLE MOTOR Bi series Parameter Manual (B-65280EN)".
NOTE
The βiSVSP does not always support all of the following bits.
(a) Data number 6: Spindle control signal 1

#15 #14 #13 #12 #11 #10 #9 #8
RCH RSL INTG SOCN MCFN SPSL *ESP ARST
#7 #6 #5 #4 #3 #2 #1 #0
MRDY ORCM SFR SRV CTH1 CTH2 TLMH TLML
(b) Data number 66: Spindle control signal 2

#15 #14 #13 #12 #11 #10 #9 #8
DSCN SORSL MPOF
#7 #6 #5 #4 #3 #2 #1 #0
RCHHG MFNHG INCMD OVR NRRO ROTA INDX
(c) Data number 12: Spindle status signal 1

#15 #14 #13 #12 #11 #10 #9 #8
RCFN RCHP CFIN CHP
#7 #6 #5 #4 #3 #2 #1 #0
ORAR TLM LDT2 LDT1 SAR SDT SST ALM
(d) Data number 182: Spindle status signal 2

#15 #14 #13 #12 #11 #10 #9 #8
#7 #6 #5 #4 #3 #2 #1 #0
EXOF SOREN INCST PC1DT
B.1.8 Examples of Observing Data

(1) Example of observing a position error using channel 1
Address Description Sample data setting
d-05 Data number 9 9 9 9
d-06 Data shift amount 0 0 1 2
d-07 Data shift direction 0 0 1 1
d-08 Offset 1 0 1 1
Data unit (NOTE) 256p/FS 512p/FS 128p/FS 64p/FS
NOTE
FS=10V(-5V to +5V)
- 178 -
(2) Example of observing the motor speed using channel 2
Address Description Sample data setting
d-09 Data number 19 19 19
d-10 Data shift amount 12 13 11
d-11 Data shift direction 0 0 0
d-12 Offset 0 0 0
Data unit (NOTE) 256min-1/FS 512min-1/FS 128min-1/FS
NOTE
FS=10V(-5V to +5V)
(3) Observing of phase U current in the βiSVSP*-11

Setting the observing data
+5V
Data number: 218 100A
Data shift amount: 8
Data shift direction: 0
0V
Offset: 1
-5V 33.3A/1V
B.2 CHECKING PARAMETERS USING THE SPINDLE CHECK

BOARD
B.2.1 Overview
By using the spindle check board, you can check parameter values transferred to the βiSVSP.
Specify a parameter number using the four setting switches on the spindle check board, and check the
parameter value on the 5-digit indicator.
B.2.1.1 Checking parameters

<1> Press the four setting switches at the same time for at least 1 second. [FFFFF] will be displayed on the
indicator.
<2> Turn the switches off and press the [MODE] switch. [d-00] will be displayed on the indicator and the
system will enter the internal data observation mode.
<3> Set "0" for [d-00] and press the [MODE] and [DATA SET] switches at the same time for at least 1
second. [CCCCC] will be displayed on the indicator.
<4> Turn the switches off and press the [MODE] switch. [F-xxx] will be displayed on the indicator and the
system will enter the spindle parameter check mode (F-mode). (Even in this mode, the motor can be
operated normally.)
<5> Press the [UP] or [DOWN] switch while holding down the [MODE] switch (with [F-xxx] displayed).
The number of [F-xxx] will increase or decrease. Set the internal number of a parameter you want to
check. For correspondences between the parameter internal numbers and NC parameter numbers, refer
to the parameter list in the appendix of the Parameter Manual.
<6> Turn the switches off. The parameter value corresponding to the set internal number will be displayed
for about 1 second. (Bit parameter values are displayed in hexadecimal.)
- 179 -
B-65325EN/02 INDEX
INDEX
Alarm Code 76 (SP9076) .............................................126
<α > Alarm Code 77 (SP9077) .............................................126
αi M sensor, αi MZ sensor, and αi BZ sensor ...............80 Alarm Code 78 (SP9078) .............................................126
α position coder S ..........................................................81 Alarm Code 79 (SP9079) .............................................126
Alarm Code 81 (SP9081) .............................................126
<A> Alarm Code 82 (SP9082) .............................................127
A specified speed cannot be obtained. ...........................69 Alarm Code 83 (SP9083) .............................................128
About the spindle control and spindle status signals ......76 Alarm Code 84 (SP9084) .............................................128
Alarm Code "-" Flashing..............................................101 Alarm Code 85 (SP9085) .............................................129
Alarm Code 01 (SP9001) .............................................110 Alarm Code 86 (SP9086) .............................................129
Alarm Code 07 (SP9007) .............................................112 Alarm Code b0 (SP9110) .............................................130
Alarm Code 09 (SP9009) .............................................112 Alarm Code C3 (SP9123) ............................................130
Alarm Code 13 (SP9013) .............................................114 Alarm Code d1 (SP9131) .............................................131
Alarm Code 24 (SP9024) .............................................115 Alarm Code E0 (SP9140).............................................132
Alarm Code 31 (SP9031) .............................................118 Alarm Code F8 (SP9158).............................................133
Alarm Code 32 (SP9032) .............................................118 Alarm Code G6 (SP9166) ............................................133
Alarm Code 34 (SP9034) .............................................118 Alarm Code G7 (SP9167) ............................................133
Alarm Code 35 (SP9035) .............................................119 Alarm Code L ..............................................................103
Alarm Code 36 (SP9036) .............................................119 Alarm Codes 19 and 20 (SP9019, SP9020)..................115
Alarm Code 37 (SP9037) .............................................120 Alarm Codes 52 and 53 (SP9052, SP9053)..................122
Alarm Code 41 (SP9041) .............................................120 Alarm Codes A, A1,A2................................................130
Alarm Code 42 (SP9042) .............................................121 Alarm Codes C0, C1, and C2 (SP9120, SP9121, and
Alarm Code 43 (SP9043) .............................................121 SP9122) ....................................................................130
Alarm Code 46 (SP9046) .............................................121 ALARM NUMBERS AND BRIEF DESCRIPTIONS
Alarm Code 47 (SP9047) .............................................121 ...............................................................................20,90
Alarm Code 49 (SP9049) .............................................122 Alarms for built-in detectors (αi and βi Pulsecoders) and
Alarm Code 50 (SP9050) .............................................122 troubleshooting actions............................................156
Alarm Code 54 (SP9054) .............................................122 Alarms for separate detectors and troubleshooting
Alarm Code 55 (SP9055) .............................................123 actions ......................................................................156
Alarm Code 56 (SP9056) .............................................123 Alarms Related to Pulsecoder and Separate Serial
Alarm Code 61 (SP9061) .............................................123 Detector ...............................................................33,107
Alarm Code 66 (SP9066) .............................................124 An overshoot or hunting occurs. ....................................70
Alarm Code 67 (SP9067) .............................................124 Appearance inspection of the linear motor (magnet
Alarm Code 68 (SP9068) .............................................124 plate).........................................................................155
Alarm Code 69 (SP9069) .............................................124
Alarm Code 70 (SP9070) .............................................124 <B>
Alarm Code 71 (SP9071) .............................................124 Battery connection modes.......................................43,140
Alarm Code 72 (SP9072) .............................................125
Alarm Code 73 (SP9073) .............................................125 <C>
Alarm Code 74 (SP9074) .............................................126 Caution.....................................................s-11,s-13,s-5,s-9
Alarm Code 75 (SP9075) .............................................126 Check Procedure ............................................................10
i-1
INDEX B-65325EN/02
Check Terminal on the Printed-circuit Board ................67 For the Radiator Cooling Fan Motor: βiSV40, βiSV80,
Check terminal output signals ........................................78 βiSV10HV, βiSV20HV, βiSV40HV..........................39
Checking Method when Magnetic Contactor Is not FSSB Communication Error ..........................................28
Switched On ...............................................................66 Fuse Locations ........................................................ 50,144
Checking parameters....................................................179
CHECKING PARAMETERS USING THE SPINDLE <H>
CHECK BOARD......................................................179 How to Replace the Fuses and Printed Circuit Boards...47
Checking the Feedback Signal Waveform .....................80 HOW TO REPLACE THE FUSES AND PRINTED
Checking the STATUS 2 Indicator ................................82 CIRCUIT BOARDS............................................47,143
Checking the Voltage and Capacity of the Power.......7,58 How to Replace the Fuses and Printed Circuit Boards.143
COMMON TO SERVO AND SPINDLE UNITS..........96
CONFIGURATIONS..................................................4,54 <I>
CONFIRMATION OF THE OPERATION ..............10,62 αi CZ sensor...................................................................81
Connecting a Protective Ground .................................8,60 INITIALIZING PARAMETERS ...................................61
Connecting the battery for the β series motor ................45 INITIALIZING PARAMETERS (SWITCHES AND
CONNECTING THE POWER ...................................7,58 DUMMY CONNECTORS) .........................................9
Connector and STATUS LED Locations .......................62 INITIALIZING SETTINGS ............................................9
Converter: Control Power Supply Undervoltage............26 Invalid Servo Parameter Setting Alarm...................32,107
Converter: DC Link Overvoltage ...................................25 Inverter: Cooling Fan Stopped of the Radiator ..............26
Converter: DC Link Undervoltage .................................24 Inverter: Internal Cooling Fan Stopped..........................26
Converter: Excessive Deceleration Power .....................25 Inverter: IPM Alarm.......................................................26
Cutting power weakens or acceleration/deceleration Inverter: IPM Alarm (OH) .............................................27
slows down. ................................................................70 Inverter: Motor Current Alarm.......................................27
βiSVSP...........................................................................55
<D> βiSVSP COMMON POWER SUPPLY UNIT...............66
Data Numbers ..............................................................177 βiSVSP SERVO UNIT ..................................................82
DEFINITION OF WARNING, CAUTION, AND βiSVSP SPINDLE UNIT ...............................................68
NOTE ........................................................................s-2 βiSVSPc.........................................................................56
Descriptions and Initial Values of Addresses...............174
Detailed troubleshooting methods................................158 <L>
Diagnosis Screen.....................................................30,104 LIST OF MANUALS RELATED TO MOTORS AND
Display of the servo amplifier operation status ............164 AMPLIFIERS...........................................................148
List of spindle data that can be observed using the
<E> SERVO GUIDE .........................................................75
Example of observing data.............................................77
Examples of Observing Data........................................178 <M>
External Cooling Fan Motor ........................................136 Main Characteristics ....................................................173
Main inspection items ..................................................151
<F> Maintenance of βiS servo motor ( 40 and 60)
FANUC AC SERVO MOTOR βi series, FANUC AC Pulsecoders...............................................................159
SPINDLE MOTOR βi series .....................................s-3 Maintenance of a Detector ...........................................155
FANUC SERVO AMPLIFIER βi series .......................s-8 Maintenance of a Servo Amplifier ...............................164
Feedback Disconnected Alarm................................31,106 MAJOR COMPONENTS ...........................................5,55
For Series 0i/0i Mate-B,C ..............................................93 MEASURING SERVO MOTOR WAVEFORMS
FOR Series 0i/0i Mate-D................................................21 (TCMD, VCMD)......................................................171
For Series 0i/0i Mate-D..................................................90 Method for Observing Motor Current .......................14,84
FOR Series 15i ...............................................................22 MOTOR/DETECTOR/AMPLIFIER PREVENTIVE
FOR Series 16i, 18i, 20i, 21i, 0i, AND Power Mate i ....23 MAINTENANCE.....................................................147
FOR Series 30i/31i/32i/35i-B, Power Motion i-A..........20
FOR Series 30i/31i/32i-A...............................................20 <N>
For the Internal Cooling Fan Motor: βiSV20/20, Note............................................................... s-10,s-13,s-6
βiSV40/40 ..................................................................38 Notes on attaching connectors .......................................45
For the Internal Cooling Fan Motor: βiSV4, βiSV20.....36 Notes on Attaching Connectors....................................142
For the Internal Cooling Fan Motor: βiSV40, βiSV80, Notes on motor cleaning ..............................................154
βiSV10HV, βiSV20HV, βiSV40HV ..........................37 Notes on Replacing a Battery (Supplementary
For the Internal Cooling Fan Motor: Model βiSVSP*-18 Explanation) ........................................................ 43,140
Only..........................................................................135 Notes on the cutting fluid (informational)....................154
i-2
B-65325EN/02 INDEX
<O> SPINDLE UNIT...........................................................110
Observation Method.....................................................173 START-UP PROCEDURE .........................................6,57
Observing Data Using the SERVO GUIDE ...................74 Start-up Procedure..........................................................65
OBSERVING DATA USING THE SPINDLE CHECK START-UP PROCEDURE (OVERVIEW) ................6,57
BOARD....................................................................173 STATUS 1 Indicator ......................................................68
Other Alarms....................................................34,109,134 Status Error Indication Function ....................................71
OUTLINE OF βiSVSP...................................................62 STATUS2 Alarm Code - STATUS1 Alarm Code 04
Overheat Alarm.......................................................32,106 (SP9004).....................................................................96
Overload Alarm (Soft Thermal, OVC)....................30,105 STATUS2 Alarm Code - STATUS1 Alarm Code 11
OVERVIEW .....................................................3,19,53,89 (SP9011).....................................................................96
Overview.............................................. 40,74,137,173,179 STATUS2 Alarm Code - STATUS1 Alarm Code 30
(SP9030).....................................................................96
<P> STATUS2 Alarm Code - STATUS1 Alarm Code 33
Periodic cleaning of a motor ........................................154 (SP9033).....................................................................96
PREFACE .................................................................... p-1 STATUS2 Alarm Code - STATUS1 Alarm Code 51
Preventive Maintenance of a Linear Motor..................155 (SP9051).....................................................................97
Preventive Maintenance of a Motor (Common to All STATUS2 Alarm Code - STATUS1 Alarm Code 58
Models).....................................................................151 (SP9058).....................................................................97
Preventive Maintenance of a Servo Amplifier .............163 STATUS2 Alarm Code - STATUS1 Alarm Code 59
PREVENTIVE MAINTENANCE OF MOTORS AND (SP9059).....................................................................97
DETECTORS...........................................................149 STATUS2 Alarm Code - STATUS1 Alarm Code b1
PREVENTIVE MAINTENANCE OF SERVO (SP9111).....................................................................98
AMPLIFIERS...........................................................160 STATUS2 Alarm Code 1 (SV0444) ..............................99
Principles in Outputting the Internal Data of the Spindle STATUS2 Alarm Code 2 (SV0434) ..............................99
..................................................................................174 STATUS2 Alarm Code 5 (SV0435) ..............................99
Pulsecoder ....................................................................167 STATUS2 Alarm Code 6 (SV0602) ..............................99
STATUS2 Alarm Code 8. , 9. , A. (SV0449)...............100
<R> STATUS2 Alarm Code 8. , 9. , A. (SV0603)...............100
REPLACEMENT OF A FAN MOTOR..................36,135 STATUS2 Alarm Code b , c , d (SV0438)...................100
Replacement of a fan motor .........................................164 STATUS2 Alarm Code P (SV0604) ............................100
Replacing Batteries .................................................40,137 STATUS2 Alarm Code U ............................................102
REPLACING BATTERY FOR ABSOLUTE
PULSECODERS ..........................................40,137,164 <T>
REPLACING SERVO AMPLIFIER COMPONENTS The LED (STATUS Indicator) Is Off. ...........................66
.............................................................................36,135 The motor does not turn. ................................................69
Replacing the Batteries in a Separate Battery Case.41,138 The STATUS 1 indicator is blinking with "--." .............69
Replacing the Battery Built into the Servo Amplifier TROUBLESHOOTING AND ACTION...................24,96
.............................................................................41,138 Troubleshooting at Startup.............................................69
<S> <U>
SAFETY PRECAUTIONS ...........................................s-1 Usable series and editions ..............................................74
Selecting the Ground Fault Interrupter That Matches the USING THE SPINDLE CHECK BOARD ..................173
Leakage Current ......................................................8,60
Servo Adjustment Screen ...............................................28 <V>
Servo Alarm .......................................... 20,21,22,23,90,93 VRDY-OFF Alarm Indicated on the CNC Screen ....12,82
Servo Amplifier................................................................5
SERVO AMPLIFIER MODULE..............................10,24 <W>
SERVO MOTOR MAINTENANCE ...........................167 Warning ...................................................s-10,s-12,s-3,s-8
SERVO MOTOR MAINTENANCE PARTS ..............167 Warnings and Cautions Relating to a Pilot Run.......... s-10
SERVO SOFTWARE .............................................28,103 Warnings and Cautions Relating to Maintenance ....... s-12
Servo Tuning Screen ....................................................103 Warnings and Cautions Relating to Mounting .............. s-8
SERVO UNIT ................................................................98 Warnings, Cautions, and Notes on Operation of Servo
Setting Data to Be Observed ........................................173 Amplifiers ................................................................160
Spindle Alarm ...........................................................91,94 Warnings, Cautions, and Notes on Preventive
Spindle Check Board......................................................78 Maintenance of Motors and Detectors.....................149
Spindle check board connection.....................................78 When cutting is not performed, the spindle vibrates,
Spindle check board specifications ................................78 making noise. .............................................................70
SPINDLE MOTOR MAINTENANCE PARTS...........168
i-3
B-65325EN/02 REVISION RECORD
REVISION RECORD
Edition Date Contents
02 Jul., 2013 Total revision
01 Sep., 2003
r-1
B-65325EN/02
* B - 6 5 3 2 5 E N / 0 2 *

Maintenance Manual: Fanuc Ac Servo Motor #+ Series Fanuc Ac Spindle Motor #+ Series Fanuc Servo Amplifier #+ Series

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FANUC AC SERVO MOTOR #+ series

FANUC AC SPINDLE MOTOR #+ series

• If operation is abnormal, for example, when an alarm is issued or a hardware failure

DEFINITION OF WARNING, CAUTION, AND NOTE.........................................................................s-2

DEFINITION OF WARNING, CAUTION, AND NOTE

* Read this manual carefully, and store it in a safe place.

FANUC AC SERVO MOTOR βi series, FANUC AC SPINDLE MOTOR

- Do not ground a motor power wire terminal or short-circuit it to another power

- Assemble and install a power connector securely.

- Do not touch a motor with a wet hand.

- Before touching a motor, shut off the power to it.

- On the machine, install a stop device for securing safety.

- Fasten a motor firmly before driving the motor.

- Do not get close to a rotary section of a motor when it is rotating.

- Do not drive a motor with an object such as a key exposed.

- Do not apply a radial load exceeding the "allowable radial load".

- To drive a motor, use a specified amplifier and parameters.

- Do not bring any dangerous stuff near a motor.

- Be safely dressed when handling a motor.

- Use a crane or lift to move a motor from one place to another.

- Do not touch a motor when it is running or immediately after it stops.

- Be careful not get your hair or cloths caught in a fan.

- Install the components around a motor securely.

- Do not disassemble a motor.

- Do not machine and modify a motor.

- Do not conduct dielectric strength or insulation test for a sensor.

- Be sure to connect motor cables correctly.

- Do not apply shocks to a motor or cause scratches to it.

- When attaching a component having inertia, such as a pulley, to a motor,

- Be sure to attach a key to a motor with a keyed shaft.

- Use a motor under an appropriate environmental condition.

- Do not apply a commercial power source voltage directly to a motor.

- Do not use the brake built into a motor for braking.

- When storing a motor, put it in a dry (non-condensing) place at room

- Ensure that a base or frame on which a motor is mounted is strong enough.

- Do not remove a nameplate from a motor.

- When testing the winding or insulation resistance of a motor, satisfy the

- To use a motor as long as possible, perform periodic maintenance and

MOTOR INSULATION RESISTANCE MEASUREMENT

Insulation resistance Judgment

FANUC SERVO AMPLIFIER βi series

- Mount a ground fault interrupter.

- Securely ground the amplifier.

- Be aware of the weight of the amplifier and other components.

- Insulate all exposed parts that are charged.

- Never touch the regenerative discharge resistor or radiator directly.

- Close the amplifier cover after completing the wiring.

- Do not disassemble the amplifier.

- Do not apply an excessively large force to plastic parts.

- Do not step or sit on the amplifier.

- Use the amplifier in an appropriate environment.

- Protect the amplifier from corrosive or conductive mist or drops of water.

- Protect the amplifier from impact.

- Do not block the air inlet to the radiator.

- Connect the signal lines to the appropriate connectors.

- Ensure that the combination of motor and amplifier is appropriate.

- Ensure that valid parameters are specified.

- Apply appropriate countermeasures against noise.

- Keep the nameplate clearly visible.