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Stress-Dependent Optical Extinction in LPCVD Silicon Nitride Measured by Nanomechanical Photothermal Sensing
Authors:
Kostas Kanellopulos,
Robert G. West,
Stefan Emminger,
Paolo Martini,
Markus Sauer,
Annette Foelske,
Silvan Schmid
Abstract:
Understanding optical absorption in silicon nitride is crucial for cutting-edge technologies like photonic integrated circuits, nanomechanical photothermal infrared sensing and spectroscopy, and cavity optomechanics. Yet, the origin of its strong dependence on film deposition and fabrication process is not fully understood. This Letter leverages nanomechanical photothermal sensing to investigate o…
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Understanding optical absorption in silicon nitride is crucial for cutting-edge technologies like photonic integrated circuits, nanomechanical photothermal infrared sensing and spectroscopy, and cavity optomechanics. Yet, the origin of its strong dependence on film deposition and fabrication process is not fully understood. This Letter leverages nanomechanical photothermal sensing to investigate optical extinction $κ_{\mathrm{ext}}$ at 632.8 nm wavelength in LPCVD SiN strings across a wide range of deposition-related tensile stresses ($200-850$ MPa). Measurements reveal a reduction in $κ_{\mathrm{ext}}$ from 10$^3$ to 10$^1$ ppm with increasing stress, correlated to variations in Si/N content ratio. Within the band-fluctuations framework, this trend indicates an increase of the energy bandgap with the stress, ultimately reducing absorption. Overall, this study showcases the power and simplicity of nanomechanical photothermal sensing for low absorption measurements, offering a sensitive, scattering-free platform for material analysis in nanophotonics and nanomechanics.
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Submitted 20 June, 2024;
originally announced June 2024.
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Comparative Analysis of Nanomechanical Resonators: Sensitivity, Response Time, and Practical Considerations in Photothermal Sensing
Authors:
Kostas Kanellopulos,
Friedrich Ladinig,
Stefan Emminger,
Paolo Martini,
Robert G. West,
Silvan Schmid
Abstract:
Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection through the use of nanomechanical resonators that detect shifts in resonant frequency due to photothermal heating. However, the relationship between resonator design, photothermal sensitivity, and response time remains unclear. This paper compares three resona…
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Nanomechanical photothermal sensing has significantly advanced single-molecule/particle microscopy and spectroscopy, and infrared detection through the use of nanomechanical resonators that detect shifts in resonant frequency due to photothermal heating. However, the relationship between resonator design, photothermal sensitivity, and response time remains unclear. This paper compares three resonator types - strings, drumheads, and trampolines - to explore this relationship. Through theoretical modeling, experimental validation, and finite element method simulations, we find that strings offer the highest sensitivity (with a noise equivalent power of 280 fW/Hz$^{1/2}$ for strings made of silicon nitride), while drumheads exhibit the fastest thermal response. The study reveals that photothermal sensitivity correlates with the average temperature rise and not the peak temperature. Finally, the impact of photothermal back-action is discussed, which can be a major source of frequency instability. This work clarifies the performance differences and limits among resonator designs and guides the development of advanced nanomechanical photothermal sensors, benefiting a wide range of applications.
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Submitted 18 June, 2024; v1 submitted 5 June, 2024;
originally announced June 2024.
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Optimized Signal Estimation in Nanomechanical Photothermal Sensing via Thermal Response Modelling and Kalman Filtering
Authors:
Hajrudin Bešić,
Andreas Deutschmann-Olek,
Kenan Mešić,
Kostas Kanellopulos,
Silvan Schmid
Abstract:
We present an advanced thermal response model for micro- and nanomechanical systems in photothermal sensing, designed to balance speed and precision. Our model considers the two time constants of the nanomechanical element and the supporting chip, triggered by photothermal heating, enabling precise photothermal input signal estimation through Kalman filtering. By integrating heat transfer and nois…
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We present an advanced thermal response model for micro- and nanomechanical systems in photothermal sensing, designed to balance speed and precision. Our model considers the two time constants of the nanomechanical element and the supporting chip, triggered by photothermal heating, enabling precise photothermal input signal estimation through Kalman filtering. By integrating heat transfer and noise models, we apply an adaptive Kalman filter optimized for FPGA systems in real-time or offline. This method, used for photothermal infrared (IR) spectroscopy with nanomechanical resonators and a quantum cascade laser (QCL) in step-scan mode, enhances response speed beyond standard low-pass filters, reducing the effects of drift and random walk. Analytical calculations show the significant impact of the thermal expansion coefficients' ratio on the frequency response. The adaptive Kalman filter, informed by the QCL's input characteristics, accelerates the system's response, allowing rapid and precise IR spectrum generation. The use of the Levenberg-Marquardt algorithm and PSD analysis for system identification further refines our approach, promising fast and accurate nanomechanical photothermal sensing.
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Submitted 28 May, 2024; v1 submitted 24 May, 2024;
originally announced May 2024.
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Photothermal Microscopy & Spectroscopy with Nanomechanical Resonators
Authors:
Robert G. West,
Kostas Kanellopulos,
Silvan Schmid
Abstract:
In nanomechanical photothermal absorption spectroscopy and microscopy, the measured substance becomes a part of the detection system itself, inducing a nanomechanical resonance frequency shift upon thermal relaxation. Suspended, nanometer-thin ceramic or 2D material resonators are innately highly-sensitive thermal detectors of localized heat exchanges from substances on their surface or integrated…
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In nanomechanical photothermal absorption spectroscopy and microscopy, the measured substance becomes a part of the detection system itself, inducing a nanomechanical resonance frequency shift upon thermal relaxation. Suspended, nanometer-thin ceramic or 2D material resonators are innately highly-sensitive thermal detectors of localized heat exchanges from substances on their surface or integrated into the resonator itself. Consequently, the combined nanoresonator-analyte system is a self-measuring spectrometer and microscope: responding to a substances transfer of heat over the entire spectrum for which it absorbs, according to the intensity it experiences. Limited by their own thermostatistical fluctuation phenomena, nanoresonators have demonstrated sufficient sensitivity for measuring trace analyte as well as single particles and molecules with incoherent light or focused and unfocused coherent light. They are versatile in their design, support various sampling methods and hyphenation with other spectroscopic methods, and are capable in a wide range of applications including fingerprinting, separation science, and surface sciences.
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Submitted 29 June, 2023; v1 submitted 28 June, 2023;
originally announced June 2023.
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Nanomechanical Photothermal Near Infrared Spectromicroscopy of Individual Nanorods
Authors:
Kostas Kanellopulos,
Robert G. West,
Silvan Schmid
Abstract:
Understanding light-matter interaction at the nanoscale requires probing the optical properties of matter at the individual nano-absorber level. To this end, we have developed a nanomechanical photothermal sensing platform that can be used as a full spectromicroscopy tool for single molecule and single particle analysis. As a demonstration, the absorption cross-section of individual gold nanorods…
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Understanding light-matter interaction at the nanoscale requires probing the optical properties of matter at the individual nano-absorber level. To this end, we have developed a nanomechanical photothermal sensing platform that can be used as a full spectromicroscopy tool for single molecule and single particle analysis. As a demonstration, the absorption cross-section of individual gold nanorods is resolved from the spectroscopic and polarization standpoint. By exploiting the capabilities of nanomechanical photothermal spectromicroscopy, the longitudinal localized surface plasmon resonance (LSPR) in the NIR range is unravelled and quantitatively characterized. The polarization features of the transversal surface plasmon resonance (TSPR) in the VIS range are also analyzed. The measurements are compared with the finite element method (FEM), elucidating the role played by electron-surface and bulk scattering in these plasmonic nanostructures, as well as the interaction between the nano-absorber and the nanoresonator, ultimately resulting in absorption strength modulation. Finally, a comprehensive comparison is conducted, evaluating the signal-to-noise ratio of nanomechanical photothermal spectromicroscopy against other cutting-edge single molecule and particle spectroscopy techniques. This analysis highlights the remarkable potential of nanomechanical photothermal spectromicroscopy due to its exceptional sensitivity.
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Submitted 5 July, 2023; v1 submitted 9 May, 2023;
originally announced May 2023.
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Nanomechanical absorption spectroscopy of 2D materials with femtowatt sensitivity
Authors:
Jan N. Kirchhof,
Yuefeng Yu,
Denis Yagodkin,
Nele Stetzuhn,
Daniel B. de Araújo,
Kostas Kanellopulos,
Samuel Manas-Valero,
Eugenio Coronado,
Herre van der Zant,
Stephanie Reich,
Silvan Schmid,
Kirill I. Bolotin
Abstract:
Nanomechanical spectroscopy (NMS) is a recently developed approach to determine optical absorption spectra of nanoscale materials via mechanical measurements. It is based on measuring changes in the resonance frequency of a membrane resonator vs. the photon energy of incoming light. This method is a direct measurement of absorption, which has practical advantages compared to common optical spectro…
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Nanomechanical spectroscopy (NMS) is a recently developed approach to determine optical absorption spectra of nanoscale materials via mechanical measurements. It is based on measuring changes in the resonance frequency of a membrane resonator vs. the photon energy of incoming light. This method is a direct measurement of absorption, which has practical advantages compared to common optical spectroscopy approaches. In the case of two-dimensional (2D) materials, NMS overcomes limitations inherent to conventional optical methods, such as the complications associated with measurements at high magnetic fields and low temperatures. In this work, we develop a protocol for NMS of 2D materials that yields two orders of magnitude improved sensitivity compared to previous approaches, while being simpler to use. To this end, we use electrical sample actuation, which simplifies the experiment and provides a reliable calibration for greater accuracy. Additionally, the use of low-stress silicon nitride membranes as our substrate reduces the noise-equivalent power to $NEP = 890 fW/\sqrt{Hz}$, comparable to commercial semiconductor photodetectors. We use our approach to spectroscopically characterize a two-dimensional transition metal dichalcogenide (WS$_2$), a layered magnetic semiconductor (CrPS$_4$), and a plasmonic supercrystal consisting of gold nanoparticles.
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Submitted 28 January, 2023;
originally announced January 2023.
