Mks KF Oring
Mks KF Oring
Mks KF Oring
C O M
Vacuum Technology
Series 31
ISO-KF FITTINGS
SIZES NW 10 TO NW 100
(1/2 TO 4)
Table of Contents
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Flanges
Short Weld Stub . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
Long Weld Stub . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5
Braze Stub . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Weld Socket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Braze Socket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6
Blank with Bore . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7
Blank-Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .8
Unbored Stub . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .9
Seals
Centering Ring Assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-11
Adaptive Centering Ring Assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11-12
Replacement O-Rings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-13
Overpressure Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13
Clamps
Toggle Clamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .13
Toggle Clamp with Lanyard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14
Wing Nut Clamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .14
Bulkhead Clamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Chain Clamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
Reducers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
Adapters
Conical Adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .15
Step Adapter, ISO-MF to ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16
Adapter, ISO-KF to CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .16
Adapter, ISO-KF to ASA, without O-Ring Groove . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Adapter, ISO-MF to ASA, with O-Ring Groove . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Adapter, ISO-KF to Welch Pump Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .17
Adapter, ISO-KF to NPT Pipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .18
Adapter Tee, ISO-KF to NPT-F Pipe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19
Adapter, ISO-KF to Rubber Hose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .19
Adapter, ISO-KF to VCR-M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
Adapter, ISO-KF to VCR-F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
Adapter, ISO-KF to Pyrex Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
Adapter, ISO-KF to PVC Hose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .20
Adapter, ISO-KF to Compression Fitting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
Adapter, ISO-KF to Ball Socket, without O-Ring Groove . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .21
Adapter, ISO-MF to Ball Socket, with O-Ring Groove . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
Viewing Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .22
Elbows
90 Elbows, . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .22-23
45 Elbows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .23
Crosses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .23
Tees
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .24
Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .24-25
Straight Sections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .25
Tubing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .26
Flexible Sections
Metal Hose, Thick Wall . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .26
Metal Hose, Thin Wall . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .27
Braided Metal Hose . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .27
PVC Tubing & Clamps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .27-28
Bourdon Vacuum/Pressure Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .28
Flange Protector Caps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .28
Numerical Listing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .29-33
HPS Series 31
www.mksinst.com
Introduction
Series 31 is a line of ISO-KF standard vacuum components.
The ISO-KF system refers to the family of small vacuum
components (up to 2"), including flanges, elbows, tees and
crosses. The International Standards Organization (ISO) has
defined the interface dimensions, allowing the interchanging
of components that conform to the standards dimensions.
Applications
ISO-KF fittings can be used in a wide variety of applications
including:
Roughing and foreline plumbing
Small systems
Systems requiring frequent cleaning or modification
Research and teaching laboratories.
ISO-KF components are primarily designed for use at
subatmospheric pressure. Because of the large number of
elastomer seals used, typical limiting pressure without baking
is about 10-7 Torr. Baked systems using Viton seals can be
used to two decades lower.
Standard components can be used to slight overpressure. If
the ISO-KF system contains significant overpressure, i.e.,
5-100 psig, then use the HPS overpressure rings.
Installation
The ISO-KF components are assembled by inserting a
centering ring between the two flange faces, then securing
the assembly with a flange encompassing clamp (see
Figure 2).
There are a variety of clamp choices in the Series 31 line.
The wing-nut clamp, shown in Figure 2, is hand tightened
until metal contact is felt. A version of the wing-nut clamp
with a washer is available, contact MKS for more information.
The HPS toggle clamp is convenient and easy to use. The
clamp provides enough sealing force to fully compress the ORing, so that the flanges and the centering ring are metal to
metal. The heavy-duty spring supports the full range of production tolerance variables.
Description
The ISO-KF system is a modular, building block method of
creating a piping system. There are several advantages in
the use of ISO components. Since component dimensions
15
15
15
.48
(12)
15
.10
(2.5)
1.18
(30)
15
.10
(2.5)
1.03 1.57
(26) (40)
.68 1.18
(17) (30)
.10
(2.5)
.12
(3)
.10
(2.5)
.12
(3)
2.06 2.95
(52) (75)
1.62 2.16
(41) (55)
.12
(3)
.10
(2.5)
.12
(3)
.12
(3)
NW 10 ISO-KF
NW 16 ISO-KF
NW 25 ISO-KF
NW 40 ISO-KF
NW 50 ISO-KF
HPS Series 31
www.mksinst.com
Centering
Ring
Clamp
Flange
Flange
O-Ring
Clamp
Flange
O-Ring
Centering
Ring
Figure 2 - Component Assembly
1. Base Plate
2. Bulkhead Clamp
3. KF Flange
4. Seal
Weld assembly of stainless or aluminum parts should be performed by an experienced TIG welder. Using a rotating fixture simplifies creation of high quality joints. HPS aluminum
weld stubs are chamfered for using filler metal. Improper
welding can lead to warping of flanges.
Brass flanges, stub or socket types, are toleranced for silver
brazing where clearances of a few thousandths of an inch
are optimal for alloy flow. Brass components may be soft sol-
ISO-KF
NW 10
HPS Series 31
www.mksinst.com
ISO-KF
NW 16
Elastomer Comparison
Buna-N
Viton
Silicone
Compound
N674-70
V747-75
S604-70
Color
Black
Black
Rust
Bakeout
80C
150C
185C
Benefits
Chemical
Seals easier;
resistance;
lower cost
lasts longer
High
temperature
Specifications
NW 16, 25, 40
Over Pressure
Ring
Maximum Pressure
(with over pressure
ring)
NW 10, 50
Over Pressure
Ring
Minimum Pressure
10-9 Torr
Leak Check
<10-9 std-cc/s
Materials
Fittings
Clamps
Aluminum
Stainless Steel
Seal Assembly
HPS Series 31
www.mksinst.com
10
16
16
25
40
50
in./(mm)
For
Tubing
OD
/2"
/2"
3
/4"
1"
11/2"
2"
1
1
A
0.50
0.50
0.75
1.00
1.50
2.00
(13)
(13)
(19)
(25)
(38)
(51)
B
0.065
0.065
0.065
0.065
0.065
0.065
(1.7)
(1.7)
(1.7)
(1.7)
(1.7)
(1.7)
C
0.50
0.50
0.50
0.50
0.75
0.75
(13)
(13)
(13)
(13)
(19)
(19)
NW
NW
NW
NW
NW
16
16
25
40
50
For
Tubing
OD
/2"
/4"
1"
11/2"
2"
1
3
A
0.50
0.75
1.00
1.50
2.00
(13)
(19)
(25)
(38)
(51)
B
0.065
0.065
0.065
0.083
0.083
(1.7)
(1.7)
(1.7)
(2.1)
(2.1)
C
0.50
0.50
0.50
0.75
0.75
(13)
(13)
(13)
(19)
(19)
Part Number
Price
100310101
100310111
100310103
100310105
100310106
10
16
16
25
40
50
in./(mm)
For
Tubing
OD
/2"
/2"
3
/4"
1"
11/2"
2"
1
1
A
0.50
0.50
0.75
1.00
1.50
2.00
(13)
(13)
(19)
(25)
(38)
(51)
B
0.065
0.065
0.065
0.065
0.065
0.065
(1.7)
(1.7)
(1.7)
(1.7)
(1.7)
(1.7)
C
1.58
1.58
1.58
1.58
1.58
1.58
(40)
(40)
(40)
(40)
(40)
(40)
Part Number
Price
100315700
100315701
100315711
100315703
100315705
100315706
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
100310300
100310301
100310311
100310303
100310305
100310306
in./(mm)
Flange Size
(ISO)
Price
Part Number
16
16
25
40
50
For
Tubing
OD
/2"
/4"
1"
11/2"
2"
1
3
HPS Series 31
www.mksinst.com
A
0.50
0.75
1.00
1.50
2.00
(13)
(19)
(25)
(38)
(51)
B
0.065
0.065
0.065
0.083
0.083
(1.7)
(1.7)
(1.7)
(2.1)
(2.1)
C
1.58
1.58
1.58
1.58
1.58
(40)
(40)
(40)
(40)
(40)
Part Number
100310201
100310211
100310203
100310205
100310206
Price
in./(mm)
For
Tubing
OD
Flange Size
(ISO)
NW
NW
NW
NW
NW
NW
NW
NW
16
16
16
25
25
40
50
50
/2"
/8"
3
/4"
1"
11/8"
15/8"
2"
21/8"
0.50
0.62
0.75
1.00
1.12
1.62
2.00
2.12
(13)
(16)
(19)
(25)
(28)
(41)
(51)
(54)
1.00
1.00
1.00
1.38
1.38
1.58
1.58
1.58
Part Number
(25)
(25)
(25)
(35)
(35)
(40)
(40)
(40)
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
NW
16
16
16
25
40
50
For
Tubing
OD
/2"
/8"
3
/4"
1"
11/2"
2"
1
A
0.61
0.77
0.87
1.13
1.75
2.25
(15)
(20)
(22)
(29)
(44)
(57)
B
0.51
0.64
0.76
1.02
1.50
2.02
(13)
(16)
(19)
(26)
(38)
(51)
C
0.45
0.58
0.68
0.87
1.37
1.87
(11)
(15)
(17)
(22)
(35)
(47)
Part Number
Price
100318301
100318311
100318321
100318303
100318305
100318306
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
NW
NW
NW
100315401
100315411
100315421
100315403
100315413
100315405
100315406
100315416
Yellow Brass
Standard Inch Tube ODs
Price
16
16
16
25
25
40
50
50
For
Tubing
OD
/2"
/8"
3
/4"
1"
11/8"
15/8"
2"
21/8"
1
A
0.50
0.63
0.75
1.00
1.13
1.63
2.00
2.13
(13)
(16)
(19)
(25)
(29)
(41)
(51)
(54)
B
0.25 (6)
0.25 (6)
0.25 (6)
0.25 (6)
0.25 (6)
0.50 (13)
0.50 (13)
0.50 (13)
C
0.50
0.50
0.62
0.50
0.62
1.00
1.00
1.00
(13)
(13)
(16)
(13)
(16)
(25)
(25)
(25)
Part Number
Price
100315301
100315311
100315321
100315303
100315313
100315305
100315306
100315316
Yellow Brass
Standard Inch Tube ODs
HPS Series 31
www.mksinst.com
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
10
10
10
16
16
16
16
25
25
25
25
25
40
40
40
40
40
40
50
50
50
50
50
50
50
in./(mm)
Bore
Size
/4"
/8"
1
/2"
1
/4"
3
/8"
1
/2"
3
/4"
1
/4"
3
/8"
1
/2"
3
/4"
1"
1
/4"
3
/8"
1
/2"
3
/4"
1"
11/2"
1
/4"
3
/8"
1
/2"
3
/4"
1"
11/2"
2"
1
A
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
0.20
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
(5)
Part Number
0.26 (7)
0.39 (10)
0.44 (11)
0.26 (7)
0.39 (10)
0.51 (13)
0.68 (17)
0.26 (7)
0.39 (10)
0.51 (13)
0.63 (16)
0.89 (23)
0.26 (7)
0.39 (10)
0.51 (13)
0.63 (16)
0.89 (23)
1.39 (35)
0.26 (7)
0.39 (10)
0.51 (13)
0.63 (16)
0.89 (23)
1.39 (35)
1.89 (48)
N/A
N/A
0.51 (13)
N/A
N/A
N/A
0.76 (19)
N/A
N/A
N/A
0.76 (19)
1.02 (26)
N/A
N/A
N/A
0.76 (19)
1.02 (26)
1.52 (39)
N/A
N/A
N/A
0.76 (19)
1.02 (26)
1.52 (39)
2.02 (51)
100319710
100319720
100319700
100319711
100319721
100319731
100319701
100319713
100319723
100319733
100319743
100319703
100319715
100319725
100319735
100319745
100319755
100319705
100319716
100319726
100319736
100319746
100319756
100319766
100319706
HPS Series 31
www.mksinst.com
in./(mm)
Flange Size
(ISO)
Bore
Size
Part Number
NW 80
NW 100
3"
4"
4.49 (114)
5.28 (134)
3.27 (83)
4.02 (102)
2.90 (74)
3.87 (98)
100319801
100319803
Price
Price
in./(mm)
Flange Size
(ISO)
Part Number
NW 10
NW 16
NW 25
NW 40
NW 50
NW 80
NW 100
0.20 (5)
0.20 (5)
0.20 (5)
0.20 (5)
0.20 (5)
0.43 (11)
0.43 (11)
100311700
100311701
100311703
100311705
100311706
100319802
100319804
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
10
16
25
40
50
A
0.20
0.20
0.20
0.20
0.20
Part Number
(5)
(5)
(5)
(5)
(5)
Price
100311600
100311601
100311603
100311605
100311606
Aluminum Alloy
To Close Off Unused Ports
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
Price
16
25
40
50
A
0.20
0.20
0.20
0.20
Part Number
(5)
(5)
(5)
(5)
Price
100315501
100315503
100315505
100315506
Yellow Brass
To Close Off Unused Ports
HPS Series 31
www.mksinst.com
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
10
16
25
40
50
A
0.75
0.75
1.00
1.50
2.00
(19)
(19)
(25)
(38)
(51)
B
0.75
0.75
0.75
1.00
1.00
(19)
(19)
(19)
(25)
(25)
100311300
100311301
100311303
100311305
100311306
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
10
16
25
40
50
A
0.75
0.75
1.00
1.50
2.00
(19)
(19)
(25)
(38)
(51)
B
0.75
0.75
0.75
1.00
1.00
(19)
(19)
(19)
(25)
(25)
Part Number
Price
100311100
100311101
100311103
100311105
100311106
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
Price
Part Number
Yellow Brass
Stub may be turned, bored or tapped to fit
HPS Series 31
www.mksinst.com
16
25
40
50
A
0.75
1.00
1.50
2.00
(19)
(25)
(38)
(51)
B
0.75
0.75
1.00
1.00
(19)
(19)
(25)
(25)
Part Number
100311401
100311403
100311405
100311406
Price
in./(mm)
Flange Size
(ISO)
Part Number
NW 10
NW 16
NW 25
NW 40
NW 50
NW 80
NW 100
100312700
100312701
100312703
100312705
100312706
100760508
100760510
180C Max
Replaceable O-Ring
NW 80/100 includes aluminum spacer ring
in./(mm)
Flange Size
(ISO)
Part Number
NW 10
NW 16
NW 25
NW 40
NW 50
NW 80
NW 100
100312600
100312601
100312603
100312605
100312606
100760608
100760610
Flange Size
(ISO)
NW
NW
NW
NW
NW
10
16
25
40
50
in./(mm)
Part Number
Price
100312800
100312801
100312803
100312805
100312806
80C Max
Replaceable O-Ring
Price
180C Max
Replaceable O-Ring
NW 80/100 includes aluminum spacer ring
Price
in./(mm)
Flange Size
(ISO)
Part Number
NW 10
NW 16
NW 25
NW 40
NW 50
NW 80
NW 100
100312500
100312501
100312503
100312505
100312506
100760708
100760710
Price
80C Max
Replaceable O-Ring
NW 80/100 includes aluminum spacer ring
10
HPS Series 31
www.mksinst.com
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
Part Number
10
16
25
40
50
100317300
100317301
100317303
100317305
100317306
200C Max
Replaceable O-Ring
Flange Size
(ISO)
Part Number
NW 25
NW 40
NW 50
100936525
100936524
100936523
Flange Size
(ISO)
NW
NW
NW
NW
Price
in./(mm)
Part Number
16
25
40
50
Price
100318601
100318603
100318605
100318606
in./(mm)
Price
HPS Series 31
www.mksinst.com
11
in./(mm)
Flange Size
(ISO)
Flange Size
(ISO)
Part Number
NW 16
NW 25
NW 40
NW 10
NW 20
NW 32
100315821
100315823
100315825
Price
in./(mm)
Flange Size
(ISO)
Flange Size
(ISO)
Part Number
NW 16
NW 25
NW 40
NW 10
NW 20
NW 32
100315811
100315813
100315815
in./(mm)
Flange Size
(ISO)
Flange Size
(ISO)
Part Number
NW 16
NW 25
NW 40
NW 10
NW 20
NW 32
100315801
100315803
100315805
Flange Size
(ISO)
Part Number
NW 10
NW 16
NW 25
NW 40
NW 50
NW 80
NW 100
2-312
2-314
2-320
2-326
2-330
2-340
2-346
100314000
100314001
100314003
100314005
100314006
100762008
100762010
in./(mm)
Price
in./(mm)
Flange Size Standard O(ISO)
Ring Size
NW 10
NW 16
NW 25
NW 40
NW 50
NW 80
NW 100
Price
Replaceable O-Ring
For Obsolete Bore Sizes
Price
2-312
2-314
2-320
2-326
2-330
2-340
2-346
Part Number
Price
100313900
100313901
100313903
100313905
100313906
100761908
100761910
12
HPS Series 31
www.mksinst.com
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
Part Number
2-312
2-314
2-320
2-326
2-330
100317310
100317311
100317313
100317315
100317316
10
16
25
40
50
Ring, Overpressure
in./(mm)
Flange Size
Max.
(ISO)
Pressure
NW
NW
NW
NW
NW
10
16
25
40
50
100 psig
100 psig
100 psig
75 psig
50 psig
1.25
1.25
1.66
2.25
2.75
(31)
(31)
(42)
(57)
(70)
1.09
1.19
1.58
2.17
2.66
(28)
(30)
(40)
(55)
(68)
Part
Number
C
0.14
0.35
0.35
0.35
0.14
(4)
(9)
(9)
(9)
(4)
Price
100316300
100316301
100316303
100316305
100316306
Stainless Steel
Fits over OD of O-ring
Use to retain O-ring when system is used at internal
pressures over atmospheric
Clamp, Toggle
in./(mm)
Flange Size
Fits Sizes
(ISO)
NW
NW
NW
NW
Price
16
25
40
50
16/10
25/20
40/32
50
Aluminum
Quick Operating
Positive Locking Method
Self Adjusting
Cannot Be Over-tightened
HPS Series 31
www.mksinst.com
13
A
4.05
4.31
4.87
6.34
(103)
(109)
(124)
(161)
B
2.50 (64)
2.96 (75)
3.29 (84)
4.73 (120)
C
0.75
0.75
0.75
0.89
(19)
(19)
(19)
(23)
Part Number
100318801
100318803
100318805
100318806
Price
in./(mm)
Flange
Size
(ISO)
NW
NW
NW
NW
Fits
Sizes
16
25
40
50
16/10
25/20
40/32
50
A
4.05
4.31
4.87
6.34
(103)
(109)
(124)
(161)
2.50 (64)
2.96 (75)
3.29 (84)
4.73 (120)
0.75
0.75
0.75
0.89
Part Number
(19)
(19)
(19)
(23)
in./(mm)
Flange
Size
(ISO)
NW
NW
NW
NW
16
25
40
50
Fits
Sizes
16/10
25/20
40/32
50
2.24 (57)
2.76 (70)
3.39 (86)
4.33 (110)
B
1.69
2.17
2.76
3.70
(43)
(55)
(70)
(94)
C
0.63
0.63
0.63
0.79
(16)
(16)
(16)
(20)
Part Number
Price
100312901
100312903
100312905
100312906
Aluminum
70 inch-pounds max torque
Clamp, Bulkhead
in./(mm)
Flange
Size
(ISO)
NW
NW
NW
NW
100318801-L
100318803-L
100318805-L
100318806-L
Aluminum
Fastening pin on lanyard prevents accidental opening and
pin loss
Positive locking method
Self-adjusting
Heavy duty spring supports the full range of production
tolerance variables
Price
16
25
40
50
Number
of Bolts
6
6
6
8
0.36 (9)
0.39 (10)
0.37 (9)
0.40 (10)
B
2.00
2.38
2.94
3.75
(51)
(60)
(75)
(95)
C
1.50
1.89
2.44
3.25
(38)
(48)
(62)
(83)
Part Number
Price
100318901
100318903
100318905
100318906
Aluminum
Adapts to a baseplate or fixed flange
Standard KF seal assembly
Stainless steel bolts and washers included, 10-32 x 5/8
14
HPS Series 31
www.mksinst.com
Clamp, Chain
in./(mm)
Flange Size
(ISO)
Part Number
NW 80
NW 100
100993460
100994717
in./(mm)
Flange
Size
(ISO)
NW
NW
NW
NW
NW
NW
16
16
16
25
25
40
Flange
Size
(ISO)
NW
NW
NW
NW
NW
NW
25
40
50
40
50
50
A
0.62
0.62
0.62
0.87
0.87
1.34
(16)
(16)
(16)
(22)
(22)
(34)
B
1.57
1.57
1.57
1.57
1.57
1.57
(40)
(40)
(40)
(40)
(40)
(40)
Price
100313711
100313712
100313713
100313714
100313715
100313716
in./(mm)
Flange
Size
(ISO)
NW
NW
NW
NW
NW
NW
16
16
16
25
25
40
Flange
Size
(ISO)
NW
NW
NW
NW
NW
NW
25
40
50
40
50
50
A
0.62
0.62
0.62
0.87
0.87
1.34
(16)
(16)
(16)
(22)
(22)
(34)
B
1.57
1.57
1.57
1.57
1.57
1.57
(40)
(40)
(40)
(40)
(40)
(40)
Part Number
Price
100313511
100313512
100313513
100313514
100313515
100313516
in./(mm)
Flange Size
(ISO)
Part Number
Price
HPS Series 31
www.mksinst.com
15
(60)
(60)
(73)
(73)
(97)
C
1.37
1.87
1.37
1.87
1.87
(35)
(47)
(35)
(47)
(47)
Part Number
100765006
100765017
100765016
100765008
100765018
Price
in./(mm)
Flange Size
(ISO)
NW 63 to NW 40
NW 63 to NW 50
NW 80 to NW 40
NW 80 to NW 50
NW 100 to NW 40
NW 100 to NW 50
1.77
1.77
1.77
1.77
1.77
1.77
(45)
(45)
(45)
(45)
(45)
(45)
1.37
1.87
1.87
1.87
1.37
1.87
Part Number
(35)
(47)
(47)
(47)
(35)
(47)
100762606
100762617
100762616
100762608
100762620
100762618
Adapter, ISO-KF to CF
in./(mm)
Flange
Size
(KF)
NW
NW
NW
NW
NW
NW
NW
16
16
25
25
40
50
50
Flange
Size
(CF)
Mini 11/3
23/4
21/8
23/4
23/4
23/4
41/2
2.08
1.78
1.89
1.78
1.78
2.11
1.95
(53)
(45)
(48)
(45)
(45)
(54)
(50)
0.62
0.62
0.87
0.87
1.33
1.37
1.83
Part Number
(16)
(16)
(22)
(22)
(34)
(35)
(46)
Price
100315601
100315611
100319812
100315603
100315605
100319813
100315606
Price
40
40
40
50
50
50
11/2
2
3
11/2
2
3
in./(mm)
A
1.81
1.81
1.81
1.81
1.81
1.81
(46)
(46)
(46)
(46)
(46)
(46)
B
1.33
1.33
1.33
1.83
1.83
1.83
(34)
(34)
(34)
(46)
(46)
(46)
C
5.00
6.00
7.50
5.00
6.00
7.50
(127)
(152)
(191)
(127)
(152)
(191)
Part Number
Price
100316755
100316705
100316715
100316756
100316706
100316716
16
HPS Series 31
www.mksinst.com
40
40
40
50
50
50
in./(mm)
Flange
Groove ID
Size
(O-Ring)
(ASA)
11/2
2
3
11/2
2
3
2.66 (2-231)
3.42 (2-237)
4.69 (2-247)
2.66 (2-231)
3.42 (2-237)
4.69 (2-247)
A
1.81
1.81
1.81
1.81
1.81
1.81
(46)
(46)
(46)
(46)
(46)
(46)
1.33
1.33
1.33
1.83
1.83
1.83
(34)
(34)
(34)
(46)
(46)
(46)
C
5.00
6.00
7.50
5.00
6.00
7.50
(127)
(152)
(191)
(127)
(152)
(191)
Part
Number
100316775
100316725
100316735
100316776
100316726
100316736
in./(mm)
Flange Size
(ASA)
O-Ring
Part Number
11/2
2
3
2-231
2-237
2-247
100001380
100006098
100006099
Price
HPS Series 31
www.mksinst.com
in./(mm)
Welch Pump
Number
Thread
Size
NW 16
1399, 1400,
1410, 3014
3/8 - 18
1.77 (45)
NW 16
1405, 3018
3/4 - 20
2.56 (65)
NW 25
1 - 20
2.76 (70)
NW 40
1-3/4 - 20
2.56 (65)
17
Price
Part
Number
Price
in./(mm)
Flange
Size
(NPT)
10
10
16
16
25
25
40
40
50
50
/8
/4
1
/8
1
/4
1
/8
1
/4
1
/8
1
/4
1
/8
1
/4
1
1
A
0.62
0.62
0.62
0.62
0.88
0.88
1.25
1.25
1.75
1.75
(16)
(16)
(16)
(16)
(22)
(22)
(32)
(32)
(44)
(44)
B
0.75
0.75
0.75
0.75
0.75
0.75
1.00
1.00
1.00
1.00
(19)
(19)
(19)
(19)
(19)
(19)
(25)
(25)
(25)
(25)
Flange
Size
(KF)
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
100312100
100312300
100312101
100312301
100312103
100312303
100312105
100312305
100312106
100312306
in./(mm)
Flange
Size
(NPT)
10
10
16
16
25
25
40
40
50
50
/8
/4
1
/8
1
/4
1
/8
1
/4
1
/8
1
/4
1
/8
1
/4
1
1
A
0.62
0.62
0.62
0.62
0.88
0.88
1.25
1.25
1.75
1.75
(16)
(16)
(16)
(16)
(22)
(22)
(32)
(32)
(44)
(44)
B
0.75
0.75
0.75
0.75
0.75
0.75
1.00
1.00
1.00
1.00
(19)
(19)
(19)
(19)
(19)
(19)
(25)
(25)
(25)
(25)
Part Number
Price
100312000
100312200
100312001
100312201
100312003
100312203
100312005
100312205
100312006
100312206
Price
Part Number
Stainless Steel
Hex Shank
Tapered Thread
Teflon Tape recommended to seal
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
16
16
25
25
25
25
40
40
40
40
40
40
50
50
50
50
50
18
in./(mm)
Flange
Size
(NPT)
/8
/4
1
/8
1
/4
1
/2
3
/4
1
/4
1
/2
3
/4
1
11/4
11/2
1
/4
1
/2
3
/4
1
2
1
1
A
1.57
1.97
1.57
1.97
2.95
2.95
1.97
2.95
2.95
2.95
2.00
2.00
1.97
2.95
2.95
2.95
2.00
(40)
(50)
(40)
(50)
(75)
(75)
(50)
(75)
(75)
(75)
(51)
(51)
(50)
(75)
(75)
(75)
(51)
Part Number
0.19 (5)
0.26 (7)
0.19 (5)
0.26 (7)
0.45 (11)
0.78 (20)
0.26 (7)
0.45 (11)
0.78 (20)
0.88 (22)
1.12 (28)
1.34 (34)
0.26 (7)
0.45 (11)
0.78 (20)
0.88 (22)
1.87 (47)
100316801
100316811
100316803
100316813
100316823
100316833
100316805
100316815
100316825
100316835
100316844
100316845
100316806
100316816
100316826
100316836
100316846
Price
HPS Series 31
www.mksinst.com
16
16
25
25
40
40
50
50
Flange
Size
(NPT)
/8 Tapped
/4 Tapped
1
/8 Tapped
1
/4 Tapped
1
/8 Tapped
1
/4 Tapped
1
/8 Tapped
1
/4 Tapped
1
1
in./(mm)
A
0.76
0.76
0.76
0.76
0.76
0.76
0.76
0.76
(19)
(19)
(19)
(19)
(19)
(19)
(19)
(19)
B
1.57
1.57
1.57
1.57
1.57
1.57
1.57
1.57
(40)
(40)
(40)
(40)
(40)
(40)
(40)
(40)
Flange
Size
(KF)
NW
NW
NW
NW
NW
NW
NW
NW
100319401
100319601
100319403
100319603
100319405
100319605
100319406
100319606
16
16
25
25
40
40
50
50
in./(mm)
Flange
Size
(NPT)
/8 Tapped
/4 Tapped
1
/8 Tapped
1
/4 Tapped
1
/8 Tapped
1
/4 Tapped
1
/8 Tapped
1
/4 Tapped
1
1
A
0.76
0.76
0.76
0.76
0.76
0.76
0.76
0.76
(19)
(19)
(19)
(19)
(19)
(19)
(19)
(19)
B
1.57
1.57
1.57
1.57
1.57
1.57
1.57
1.57
(40)
(40)
(40)
(40)
(40)
(40)
(40)
(40)
Part Number
Price
100319301
100319501
100319303
100319503
100319305
100319505
100319306
100319506
in./(mm)
Flange
Size
(ISO)
NW
NW
NW
NW
NW
Price
Part Number
16
16
25
40
50
Aluminum
Compatible with standard vacuum hose bores
HPS Series 31
www.mksinst.com
19
Hose Size
/2 or
/8 or
3
/4 or
11/2 or
11/2 or
/8
/4
7
/8
15/8
15/8
A
0.63
0.75
0.88
1.63
1.63
(16)
(19)
(22)
(41)
(41)
B
1.65
1.65
1.73
2.17
2.17
(42)
(42)
(44)
(55)
(55)
Part Number
100311811
100311801
100311803
100311805
100311806
Price
in./(mm)
Flange Size
(ISO)
Stainless Steel
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
16
16
25
25
25
40
40
40
50
50
50
Flange
Size
(VCR)
4 VCR
8 VCR
4 VCR
8 VCR
12 VCR
4 VCR
8 VCR
12 VCR
4 VCR
8 VCR
12 VCR
A
1.40
1.63
1.40
1.60
2.14
1.40
1.60
2.10
1.40
1.60
2.10
(36)
(41)
(36)
(41)
(54)
(36)
(41)
(53)
(36)
(41)
(53)
0.19 (5)
0.41 (10)
0.19 (5)
0.41 (10)
0.62 (16)
0.19 (5)
0.41 (10)
0.62 (16)
0.19 (5)
0.41 (10)
0.62 (16)
VCR
Size
Part Number
/4
/2
1
/4
1
/2
3
/4
1
/4
1
/2
3
/4
1
/4
1
/2
3
/4
100319111
100319121
100319113
100319123
100319133
100319115
100319125
100319135
100319116
100319126
100319136
1
1
in./(mm)
Flange Size
(ISO)
Stainless Steel
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
16
16
25
25
25
40
40
40
50
50
50
Flange
Size
(VCR)
4 VCR
8 VCR
4 VCR
8 VCR
12 VCR
4 VCR
8 VCR
12 VCR
4 VCR
8 VCR
12 VCR
A
1.40
1.63
1.40
1.60
2.14
1.40
1.60
2.10
1.40
1.60
2.10
(36)
(41)
(36)
(41)
(54)
(36)
(41)
(53)
(36)
(41)
(53)
0.19 (5)
0.41 (10)
0.19 (5)
0.41 (10)
0.62 (16)
0.19 (5)
0.41 (10)
0.62 (16)
0.19 (5)
0.41 (10)
0.62 (16)
VCR
Size
Part Number
/4
/2
1
/4
1
/2
3
/4
1
/4
1
/2
3
/4
1
/4
1
/2
3
/4
100319211
100319221
100319213
100319223
100319233
100319215
100319225
100319235
100319216
100319226
100319236
1
1
NW
NW
NW
NW
16
16
25
40
5.25
5.25
5.25
5.50
(133)
(133)
(133)
(140)
0.50
0.75
1.00
1.50
Part Number
(13)
(19)
(25)
(38)
Price
100318501
100318511
100318503
100318505
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
NW
Price
in./(mm)
Flange Size
(ISO)
Price
10
16
16
25
40
50
Hose
Size
/2
/2
3
/4
1
11/2
2
1
1
A
0.50
0.50
0.75
1.00
1.50
2.00
(13)
(13)
(19)
(25)
(38)
(51)
B
1.26
1.26
1.26
1.50
1.97
2.17
(32)
(32)
(32)
(38)
(50)
(55)
C
0.79
0.79
0.79
1.02
1.50
1.61
(20)
(20)
(20)
(26)
(38)
(41)
Part Number
Price
100316400
100316411
100316401
100316403
100316405
100316406
20
HPS Series 31
www.mksinst.com
Stainless Steel
Viton O-Ring
Compression fitting tightened by hand
Compression connect for tube insertion
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
in./(mm)
For
Tubing
OD
/2
/4
1
/2
3
/4
1
/2
3
/4
1
1
/2
3
/4
1
11/8
11/2
3
/4
1
11/8
11/2
2
0.41 (10)
0.19 (5)
0.41 (10)
0.62 (16)
0.41 (10)
0.62 (16)
0.88 (22)
0.41 (10)
0.62 (16)
0.88 (22)
1.14 (29)
1.25 (32)
0.62 (16)
0.88 (22)
1.14 (29)
1.25 (32)
2.01 (51)
10
16
16
16
25
25
25
40
40
40
40
40
50
50
50
50
50
1
1
B
2.1
1.4
2.4
2.4
2.4
2.5
2.4
2.6
2.8
2.8
2.9
2.9
2.8
2.8
2.9
3.0
3.4
(53)
(36)
(61)
(61)
(61)
(64)
(61)
(66)
(71)
(71)
(74)
(74)
(71)
(71)
(74)
(76)
(87)
.80
.62
.80
.94
.80
.94
.94
.80
.94
.94
.94
.94
.94
.94
.94
.94
2.5
Part Number
(20)
(16)
(20)
(24)
(20)
(24)
(24)
(20)
(24)
(24)
(24)
(24)
(24)
(24)
(24)
(24)
(63)
Part Number
NW 40
50/30
2.00 (50)
2.75 (70)
100318205
NW 50
75/50
3.00 (75)
3.25 (83)
100318206
Price
100316910
100316911
100316921
100316931
100316903
100316913
100316923
100316905
100316915
100316925
100316945
100316935
100316926
100316936
100316946
100316906
100316916
in./(mm)
Price
Flange
Size
(ISO)
Coupling
Size
NW 40
50/30
2-224
100318215
NW 50
75/50
2-232
100318216
HPS Series 31
www.mksinst.com
in./(mm)
21
O-Ring
Part Number
Size
Price
in./(mm)
Coupling
Size
O-Ring
Size
Part Number
50/30
2-224
100001654
75/50
2-232
100001381
in./(mm)
Flange Size
(ISO)
Part Number
NW 40
0.93 (24)
100319005
NW 50
1.25 (32)
100319006
Price
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
Price
16
25
40
50
A
1.57
1.97
2.56
2.76
(40)
(50)
(65)
(70)
Part Number
Price
100314401
100314403
100314505
100314506
22
HPS Series 31
www.mksinst.com
in./(mm)
Flange Size
(ISO)
Part Number
NW 40
5.12 (130)
100314415
NW 50
5.51 (140)
100314416
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
16
25
40
50
0.91
1.12
1.68
1.99
Part Number
(23)
(28)
(43)
(51)
Price
100318701
100318703
100318705
100318706
ISO-KF Cross
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
Price
HPS Series 31
www.mksinst.com
23
16
25
40
50
A
1.57
1.97
2.56
2.76
(40)
(50)
(65)
(70)
Part Number
3.15 (80)
3.94 (100)
5.12 (130)
5.51 (140)
100314801
100314803
100314805
100314806
Price
ISO-KF Tee
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
16
25
40
50
1.57
1.97
2.56
2.76
(40)
(50)
(65)
(70)
Part Number
3.15 (80)
3.94 (100)
5.12 (130)
5.51 (140)
100314601
100314603
100314605
100314606
in./(mm)
Flange
Size
(ISO)
NW
NW
NW
NW
NW
NW
Flange
Size
(ISO) Tee
25
40
50
40
50
50
NW
NW
NW
NW
NW
NW
16
16
16
25
25
40
A
3.94
5.12
5.51
4.80
6.29
6.29
(100)
(130)
(140)
(122)
(160)
(160)
1.08
1.32
1.58
2.40
2.65
2.65
(27)
(34)
(40)
(61)
(67)
(67)
1.97
2.56
2.76
2.40
3.15
3.15
(50)
(65)
(70)
(61)
(80)
(80)
Part
Number
Price
100318403
100318405
100318406
100319816
100319815
100319814
Price
in./(mm)
Flange Size
(ISO)
Plate
Hole
Diameter
Part
Number
NW 25
0.75 (19)
1.62 (41)
2.88 (73)
100317903
NW 40
0.75 (19)
1.62 (41)
3.12 (79)
100317905
Price
Stainless Steel
Suitable for plates up to 1 thickness
Stainless steel washer, nut and Viton O-ring seal (2-216)
provided
24
HPS Series 31
www.mksinst.com
in./(mm)
Flange
FeedSize
through
(ISO) Tubing OD
Tube
Wall
NW 25
0.25 (6)
NW 40
0.25 (6)
in./(mm)
Flange
FeedSize
through
(ISO) Tubing OD
Tube
Wall
Part
Number
NW 25
0.25 (6)
NW 40
0.25 (6)
Price
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
NW
NW
NW
Price
Part
Number
HPS Series 31
www.mksinst.com
25
16
16
25
25
40
40
50
50
Part Number
3.15 (80)
12.60 (320)
3.94 (100)
12.60 (320)
5.12 (130)
12.60 (320)
5.51 (140)
12.60 (320)
100315101
100315111
100315103
100315113
100315105
100315115
100315106
100315116
Price
Tubing
in./(mm)
Flange Size
(ISO)
NW 10
NW 16
NW 25
NW 40
NW 50
NW 80
NW 100
NW 100
0.50 (13)
0.75 (19)
1.00 (25)
1.50 (38)
2.00 (51)
3.00 (76)
4.00 (102)
4.00 (102)
(1.7)
(1.7)
(1.7)
(1.7)
(1.7)
(1.7)
(1.7)
(2.1)
100314300
100314301
100314303
100314305
100314306
100764508
100764510
100764511
in./(mm)
Flange Static
Size
Bend
(ISO) Radius
NW
NW
NW
NW
16
25
40
50
11/8
13/8
21/2
31/4
Hose
Wall
.006
.006
.006
.006
(0.15)
(0.15)
(0.15)
(0.15)
3.94
3.94
3.94
3.94
(100)
(100)
(100)
(100)
3.07
3.07
2.93
3.11
(78)
(78)
(74)
(79)
Spring
Rate
56
44
32
32
lb/in
lb/in
lb/in
lb/in
Part
Number
Price
100314911
100314913
100314915
100314916
in./(mm)
Flange Static
Size Bend
(ISO) Radius
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
Price
16
16
16
25
25
25
40
40
40
50
50
50
21/8
21/8
21/8
27/8
27/8
27/8
31/2
31/2
31/2
51/4
51/4
51/4
Hose
Wall
.012
.012
.012
.012
.012
.012
.012
.012
.012
.012
.012
.012
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
(0.30)
Spring
Rate
Part
Number
9.84 (250)
19.69 (500)
39.40 (1000)
9.84 (250)
19.69 (500)
39.40 (1000)
9.84 (250)
19.69 (500)
39.40 (1000)
9.84 (250)
19.69 (500)
39.40 (1000)
256 lb/in
128 lb/in
64 lb/in
224 lb/in
112 lb/in
56 lb/in
220 lb/in
110 lb/in
55 lb/in
220 lb/in
110 lb/in
55 lb/in
100315901
100316001
100316111
100315903
100316003
100316113
100315905
100316005
100316115
100315906
100316006
100316116
Price
Stainless Steel
Unsheathed
Butt Welded
Special Lengths to Order
Thick wall hose static bend radius is to point of permanent
deformation
26
HPS Series 31
www.mksinst.com
in./(mm)
Flange Static
Size
Bend
(ISO) Radius
Stainless Steel
Unsheathed
Butt Welded
Special Lengths to Order
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
16
16
16
16
16
25
25
25
25
25
40
40
40
40
40
50
50
50
50
50
15/8
15/8
15/8
15/8
15/8
13/8
13/8
13/8
13/8
13/8
21/2
21/2
21/2
21/2
21/2
31/4
31/4
31/4
31/4
31/4
Hose
Wall
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
(0.15)
Spring
Rate
Part
Number
9.84 (250)
12.02 (305)
19.69 (500)
24.09 (612)
39.40 (1000)
9.84 (250)
11.99 (305)
19.69 (500)
24.00 (610)
39.40 (1000)
9.84 (250)
12.12 (308)
19.69 (500)
24.05 (611)
39.40 (1000)
9.84 (250)
11.93 (303)
19.69 (500)
24.08 (612)
39.40 (1000)
6.41 (163)
7.82 (199)
12.30 (313)
18.12 (460)
24.10 (613)
6.41 (163)
7.82 (199)
12.30 (313)
18.12 (460)
24.10 (613)
6.23 (158)
7.88 (200)
11.70 (297)
18.12 (460)
22.50 (571)
7.05 (179)
8.64 (219)
13.50 (342)
18.12 (460)
26.30 (667)
27 lb/in
21 lb/in
12 lb/in
9 lb/in
5.8 lb/in
16 lb/in
14 lb/in
7.3 lb/in
6.5 lb/in
3.4 lb/in
8.6 lb/in
7 lb/in
3.9 lb/in
3 lb/in
1.9 lb/in
13 lb/in
12 lb/in
5.9 lb/in
5 lb/in
2.9 lb/in
100317411
100319805
100317421
100319808
100317441
100317413
100319806
100317423
100319809
100317443
100317415
100319807
100317425
100319810
100317445
100317416
100319817
100317426
100319811
100317446
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
Static Bend
Radius
Part Number
21/2
21/2
21/2
3
3
3
5
5
5
6
6
6
10.23 (259)
20.23 (514)
40.23 (1022)
10.27 (261)
20.27 (515)
40.27 (1023)
10.28 (261)
20.28 (515)
40.28 (1023)
10.53 (268)
20.53 (522)
40.53 (1030)
100313201
100313301
100313401
100313203
100313303
100313403
100313205
100313305
100313405
100313206
100313306
100313406
16
16
16
25
25
25
40
40
40
50
50
50
NW
NW
NW
NW
NW
NW
NW
NW
NW
NW
HPS Series 31
www.mksinst.com
Price
in./(mm)
Flange Size
(ISO)
Price
27
10
10
16
16
25
25
40
40
50
50
Part Number
19.69 (500)
39.40 (1000)
19.69 (500)
39.40 (1000)
19.69 (500)
39.40 (1000)
19.69 (500)
39.40 (1000)
19.69 (500)
39.40 (1000)
100316500
100316510
100316501
100316511
100316503
100316513
100316505
100316515
100316506
100316516
Price
PVC Hose
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
10
16
25
40
50
A
0.50
0.75
1.00
1.50
2.00
Part Number
(13)
(19)
(25)
(38)
(51)
100317500
100317501
100317503
100317505
100317506
Cut to length. Add the length (in feet) to the end of the part number.
For example, a 6-foot long piece of the 2.0" OD tube would be 100317506-6.
Good for exhaust lines
Wire molded in tube wall for reinforcement
Larger OD PVC has limited flexibility in short lengths
in./(mm)
Flange Size
(ISO)
NW
NW
NW
NW
NW
10
16
25
40
50
Hose Size
Part Number
/2
/4
1
11/2
2
100000797
100000935
100000936
100000937
100000938
1
3
NW
NW
NW
NW
NW
10
16
25
40
50
Part Number
Price
100318000
100318001
100318003
100318005
100318006
in./(mm)
Flange Size
(ISO)
Price
in./(mm)
Flange Size
(ISO)
Price
NW
NW
NW
NW
28
16
25
40
50
Part Number
Price
100310001
100310003
100310005
100310006
HPS Series 31
www.mksinst.com
Numerical Listing
100000797
100311603
100000935
100311605
100000936
100311606
100000937
100000938
100311700
100311701
100001380
100311703
100001381
100311705
100001654
100311706
100006098
100006099
100311801
100311803
100310001
100311805
100310003
100311806
100310005
100311811
100310006
100310101
100312001
100310103
100312003
100310105
100312005
100310106
100312006
100310111
100310201
100312101
100310203
100312103
100310205
100312105
100310206
100312106
100310211
100310300
100312201
100310301
100312203
100310303
100312205
100310305
100312206
100310306
100310311
100312300
100312301
100311100
100312303
100311101
100312305
100311103
100312306
100311105
100311106
100312500
100312501
100311300
100312503
100311301
100312505
100311303
100312506
100311305
100311306
100312600
100312601
100311401
100312603
100311403
100312605
100311405
100312606
100311406
100311600
100312701
100311601
100312703
HPS Series 31
www.mksinst.com
29
100312705
100314401
100312706
100314403
100314415
100312800
100314416
100312801
100314505
100312803
100314506
100312805
100312806
100314601
100314603
100312901
100314605
100312903
100314606
100312905
100312906
100314801
100314803
100313201
100314805
100313203
100314806
100313205
100313206
100314911
100313301
100314913
100313303
100314915
100313305
100314916
100313306
100313401
100315101
100313403
100315103
100313405
100315105
100313406
100315106
100315111
100313511
100315113
100313512
100315115
100313513
100315116
100313514
100313515
100315301
100313516
100315303
100315305
100313711
100315306
100313712
100315311
100313713
100315313
100313714
100315316
100313715
100315321
100313716
100313900
100315403
100313901
100315405
100313903
100315406
100313905
100315411
100313906
100315413
100315416
100315421
100314000
100314001
100314003
100315501
100314005
100315503
100314006
100315505
100315506
100314300
100314301
100315601
100314303
100315603
100314305
100315605
100314306
100315606
100315611
30
HPS Series 31
www.mksinst.com
100315700
100316615
100315701
100316621
100315703
100315705
100316705
100315706
100316706
100315711
100316715
100316716
100315801
100315803
100316725
100315805
100316726
100316735
100316736
100316755
100316756
100315811
100315813
100315815
100315821
100315823
100316775
100315825
100316776
100315901
100316801
100315903
100316803
100315905
100316805
100315906
100316806
100316001
100316811
100316003
100316813
100316005
100316815
100316006
100316816
100316111
100316823
100316113
100316825
100316115
100316826
100316116
100316833
100316835
100316300
100316836
100316301
100316844
100316303
100316845
100316305
100316846
100316306
100316400
100316905
100316401
100316906
100316403
100316910
100316405
100316911
100316406
100316913
100316411
100316915
100316916
100316500
100316921
100316501
100316923
100316503
100316925
100316505
100316926
100316506
100316931
100316510
100316935
100316511
100316936
100316513
100316945
100316515
100316946
100316516
100316601
100317205
100316603
100317213
100316605
100317215
HPS Series 31
www.mksinst.com
31
100317300
100318511
100317301
100318601
100317303
100318603
100317305
100318605
100317306
100318606
100317310
100318701
100317311
100318703
100317313
100318705
100317315
100318706
100317316
100317411
100318803
100317413
100318805
100317415
100318806
100317416
100317421
100318801-L
100317423
100318803-L
100317425
100318805-L
100317426
100318806-L
100317441
100317443
100318901
100317445
100318903
100317446
100318905
100318906
100317500
100317501
100319005
100317503
100319006
100317505
100317506
100319111
100319113
100317903
100319115
100317905
100319116
100319121
100318000
100319123
100318001
100319125
100318003
100319126
100318005
100319133
100318006
100319135
100319136
100319211
100318205
100318206
100318215
100319213
100318216
100319215
100319216
100318301
100319221
100318303
100319223
100318305
100319225
100318306
100319226
100318311
100319233
100318321
100319235
100319236
Adapter,VCR-F, NW 50 to 12 VCR, SS
100318403
100318405
100319301
100318406
100319303
100319305
100319306
100318501
100318503
100318505
32
HPS Series 31
www.mksinst.com
100319816
100319817
100760508
100760510
100760608
100319505
100760610
100319506
100760708
100760710
100319401
100319403
100319405
100319406
100319501
100319503
100319601
100319603
100761908
100319605
100761910
100319606
100762008
100319700
100762010
100319701
100762606
100319703
100762608
100319705
100762616
100319706
100762617
100319710
100762618
100319711
100319713
100764508
100319715
100764510
100319716
100764511
100319720
100319721
100765006
100319723
100765008
100319725
100765016
100319726
100765017
100319731
100765018
100319733
100319735
100936523
100319736
100936524
100319743
100936525
100319745
100319746
100993460
100319755
100994717
100319756
100319766
100319801
100319802
100319803
100319804
100319805
100319806
100319807
100319808
100319809
100319810
100319811
100319812
100319813
100319814
100319815
HPS Series 31
www.mksinst.com
33
(303) 449.9861
(800) 345.1967 (in USA)