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    Spatial Light Valve

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    Micralyne
    Micralyne’s MEMS-based SLV is a diffractive spatial light modulator (SLM) that can control light at extremely high speeds on a pixel-by-pixel basis. This deformable mirror device varies the light intensity according to its electrically addressable reflective ribbon pattern, which is fabricated on a silicon base.

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    Spatial Light Valve

    Uploaded by

    Micralyne
    193 views2 pages
    Micralyne’s MEMS-based SLV is a diffractive spatial light modulator (SLM) that can control light at extremely high speeds on a pixel-by-pixel basis. This deformable mirror device varies the light intensity according to its electrically addressable reflective ribbon pattern, which is fabricated on a silicon base.

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    Micralyne’s MEMS-based SLV is a diffractive spatial light modulator (SLM) that can control light at extremely high speeds on a pixel-by-pixel basis. This deformable mirror device varies the light intensity according to its electrically addressable reflective ribbon pattern, which is fabricated on a silicon base.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    193 views2 pages

    Spatial Light Valve

    Uploaded by

    Micralyne
    Micralyne’s MEMS-based SLV is a diffractive spatial light modulator (SLM) that can control light at extremely high speeds on a pixel-by-pixel basis. This deformable mirror device varies the light intensity according to its electrically addressable reflective ribbon pattern, which is fabricated on a silicon base.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 2

    Bringing Your MEMS to Market

    Spatial Light Valve (SLV)


    MEMS Deformable Mirror

    Overview Benefits of Micralyne’s Spatial Light Valve


    Micralyne’s MEMS-based SLV is • Market leading 10 MHz digital imaging speed
    a diffractive spatial light • 5-year track record in a commercial application
    modulator (SLM) that can • Highly efficient with 98% light throughput
    control light at extremely high • Scalable for high volume production
    speeds on a pixel-by-pixel • High resolution with up to 40:1 contrast
    basis. This deformable mirror
    device varies the light
    intensity according to its
    electrically addressable
    reflective ribbon pattern, which
    is fabricated on a silicon base.

    The photograph above shows an array of 960


    channels with bonding pads extended out to the
    perimeter to address each segment.

    Custom Spatial Light Valves


    Micralyne custom designs and manufactures application-specific Spatial Light
    Valves for customers using our core competencies in thin film metallization, silicon
    micromachining, and MEMS. Micralyne works closely with its customers from
    product design, through prototype development and into volume
    manufacturing. Micralyne’s MEMS-based SLV is ideal for several digital imaging
    applications such as high-resolution displays and lithography tools. Wavelengths
    from 400 nm UV to 10.6 micron far IR have been tested on devices with
    geometries optimized for these type of applications. The SLV is covered by US
    patents 6,661,561; 6,836,352; 6,856,448 and German patent DE10213579.

    www.micralyne.com ETDS313_Rev030-0907_SLV
    Bringing Your MEMS to Market

    Spatial Light Valve (SLV)


    Specifications

    About Micralyne Spatial Light Valve Capabilities


    Micralyne is a world leading The table below summarizes the standard capabilities of Micralyne’s MEMS-based
    independent MEMS foundry. Spatial Light Valve as a digital imaging device:
    From its state-of-the-art
    50,000 ft2 manufacturing Speed Throughput # of Channels Contrast Size
    Micralyne SLV
    facility, Micralyne develops and 10 MHz plus 98% 1000+ 40:1 40 µm wide
    300 µm long
    manufactures MEMS-based
    components in volume.
    Micralyne is a profitable and
    growing company located in
    Edmonton, Alberta, Canada.

    For More Information...


    Membrane type structure lends to high speed with reasonable contrast. Greater
    Micralyne Inc. than 1 MHz resonant frequency shown in the graph above with a 20:1 contrast
    1911 – 94 Street ratio.
    Edmonton, Alberta
    Canada T6N 1E6
    The SEM photograph shown on
    Tel: +1.780.431.4400 the right displays 40 micron by
    Fax: +1.780.431.4422 300 micron elements, separated
    by 1 micron spaces.
    info@micralyne.com
    www.micralyne.com

    ETDS313_Rev030-0907_SLV
    www.micralyne.com

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