High Performance Digital Gas Mass Flow Meters & Controllers: N N N N N
High Performance Digital Gas Mass Flow Meters & Controllers: N N N N N
High Performance Digital Gas Mass Flow Meters & Controllers: N N N N N
High Performance
Digital Gas Mass Flow
Meters & Controllers
nn Measure and control gas mass flow rates up to
1000 slpm
nn Pressure up to 5000 psig (333 barg)
®
nn Ideal for OEM, industry or research applications
nn True linear performance provides high
accuracy and great flexibility in multiple gases DESCRIPTION
nn With Dial-A-Gas® Technology, you select from up
to ten pre-programmed gases or substitute your martTrak® 100 Series features unprecedented
own S performance, user-friendly features, and
nn Unique Pilot Module (mounted or hand-held) lets flexibility. The 100 Series gives users
you view and change critical control functions the world’s most linear sensor, smoother valve
nn All control functions are also available from your performance, more robust electronics and even more
PC or workstation via supplied SmartTrak 100 control over a wide range of functions. The result
software is a series of mass flow meters and controllers that
nn 316 stainless steel construction demonstrates premium flow instrumentation which
is easy to use.
nn Small footprint and great flexibility facilitates
replacement of older MFM or MFC
The 100 Series is designed so that the physics
nn Factory calibration done with primary standards are correct. Excellent performance results from a
directly traceable to NIST
patented, inherently linear Laminar Flow Element
nn Proprietary frictionless-hovering direct-acting (LFE) design, advanced platinum sensor technology,
control valve technology and Sierra’s proprietary frictionless-hovering control
nn Single-sided 24 VDC input power reduces valve.
installation cost and complexity
nn CE approved The 100 Series is available with an innovative
and user-friendly Pilot Module, a front-mounted
nn Choose from multiple analog or digital signals
including: RS-232, RS-485, 4-20 mA, 0-5, 1-5, or hand-held control device that allows users to
0-10 VDC Dial-A-Gas, change flow rate, modify engineering
units or re-configure the instrument. With the Pilot
nn Digital communications protocols supported
Module, the user can set zero, span, and full scale
nn Modbus for each of the 10 different gases independently to
nn Profibus DP accommodate unexpected application or system
nn Foundation Fieldbus design changes.
w w w. s i e r r a i n s t r u m e n t s . c o m
PERFORMANCE SPECIFICATIONS Gas and Ambient Temperature
32 to 122°F (0 to 50°C)
2
Accuracy
Standard Gas Pressure
Standard: ± 1.0 % of full scale including linearity under
500 psig (34.5 barg) maximum, burst tested to 750 psig
calibration conditions
(51.7 barg)
(± 2.0 of full scale for 100M from 201-300 slpm)
High Pressure
Dial-A-Gas
5000 psig (333 barg) maximum, burst tested to 7500 psig
± 1.0 % of full scale in all 10 standard gases (see chart below)
(500 barg)
Repeatability
Leak Integrity
± 0.2% of full scale
5 X 10-9 atm cc/sec of helium or better
Temperature Coefficient
Power Requirements
± 0.025% of full scale per °F (± 0.05% of full scale per °C),
(ripple should not exceed 100 mV peak-to-peak)
or better
For Mass Flow Meters:
Pressure Coefficient 15-24 VDC ±10%, (230 mA, regulated)
± 0.01% of full scale per psi (± 0.15% of full scale per bar), For Mass Flow Controllers:
or better C100L: 24 VDC ±10% (500 mA, regulated)
C100L High Pressure: 24 VDC ±10% (800 mA, regulated)
Response Time C100M: 24 VDC ±10%, (800 mA, regulated)
2 seconds (typical) to within ± 2% of final value (includes C100H: 24 VDC ±10%, (1260 mA, regulated)
settling time), faster or slower available upon request
(controllers only). Control Range For Controllers
2–100% of full scale flow; automatic shut-off at 1.9%.
OPERATION SPECIFICATIONS Output Signal
Analog:
Mass Flow Rates Linear 4–20 mA, 500 ohms maximum loop resistance
100L Low Flow: 0 -10 sccm to 0 -50 slpm and one of the following (user selectable):
C100L High Pressure: 100 sccm to 20 slpm Linear 0–5 VDC, 1000 ohms minimum load resistance
100M Medium Flow: 0-20 to 0-300 slpm Linear 0-10 VDC, 1000 ohms minimum load resistance
100H High Flow: 0-100 to 0-1000 slpm (higher flows available) Linear 1-5 VDC, 1000 ohms minimum load resistance
Flow ranges specified are for an equivalent flow of nitrogen at
760 mm Hg and 21°C (70°F); other ranges in other units are Command Signal
available (e.g., nlpm, scfh, nm3/h, kg/h) Analog (choice of one):
Linear 4–20 mA, 0–5 VDC, 0-10 VDC, 1-5 VDC
For measuring or controlling flows below 5 sccm, please
consider Sierra's MicroTrak™ 101. Wetted Material
316 stainless steel or equivalent; 416 stainless steel;
For measuring or controlling flows above 1000 slpm, please Viton “O”-rings and valve seat standard;
consider Sierra's MaxTrak 180. other elastomers are available (consult factory)
High pressure unit should be used for pressures from 500 to High Pressure Version: Viton"O"-rings and polyamide valve
5000 psig (34.5 to 333 barg). seat
® SmartTrak & Dial-A Gas are registered trademarks of Sierra Instruments, ® Nylon,
Viton, Neoprene, Kalrez are registered trademarks of DuPont, ® Windows is a registered
trademark of Microsoft
Pressure Drop Across a Meter 3
Pressure must be above the values in the table below. Note that pressure increases with flow rate.
0.6 (40.8)
0.7 (47.6)
0.9 (61.2)
1.1 (74.8)
1.3 (88.4)
3.0 (204)
5.0 (340)
PHYSICAL DIMENSIONS
All dimensions are in inches with (mm) in brackets. Certified drawings are available on request.
M100L & C100L Front View M100L & C100L Inlet View M100L & C100L Bottom View
(42.6)
1.68
(A) (B)
#8 – 32 UNC– 2B x .33 DP M4 x 0.7 x .32 DP
(128) (19.05)
5.04 INLET
.75
(109)
4.30
.13
(76.2) (37.8) (50.8) (3.3)
3.00 1.49 2.00 .13
L
(25.4)
1.00
C100 High Pressure Front View C100 High Pressure Inlet View C100 High Pressure Bottom View
C100L HP Bottom View
C100L HP FrontView C100L HP Inlet View
(1201.42)
47.3
(A) (B)
#8 – 32 UNC– 2B x .25 DP M6 – 1 x 6 DP
INLET (25.4)
(118.3) 1.00
4.66
(137.2) (6.1)
5.40 (52.7) (50.8) .24
2.075 2.00
(37.3)
1.47
(112.3)
4.425
L (37.3)
1.47
(A) (B)
#8 – 32 UNC– 2B x .25 DP M4 x 0.7 x .32 DP
(115.3) (25.4)
(140.4) 4.54 INLET 1.00
5.53
(6.1)
(50.8) (8.89) .24
2.00 .35
(50.2)
1.98
(101.6)
4.00 (37.5)
L 1.48
(47.4)
1.87
(125.9) (25.4)
4.96 INLET 1.00
(151.3)
5.96 (6.1)
(50.8) (8.89) .24
2.00 .35
(50.2)
1.98
(114.3)
4.50 (37.5)
1.48
L
PHYSICAL DIMENSIONS 6
All dimensions are in inches with [mm] in brackets. Certified drawings are available on request.
(101.6)
(75.9) 4.00
2.99 (36.8)
1.45
(164.8)
6.49 (75.9)
L 2.99
(201.9)
7.95
(75.9)
L 2.99
(A) (B)
10-32 UNF-2B X .3 DP M6-1 x .3 DP
(12.5)
(136.9) .495
5.39 (50.8)
(175.0) INLET 2.00
6.89
(101.6)
(75.9) 4.00
2.99 (36.8)
1.45
(164.8)
6.49
L (75.9)
2.99
(228.3)
8.99
(75.9)
L 2.99
ORDERING THE SMART TRAK 100 7
Features Options
Parent - - - - - - - - - - - - -
1 2 3 4 5 6 7 8 9 1 2 3 4
Instructions: To order a 100 please fill in each number block by selecting the codes from the corresponding features below and following pages.
Parent Number
M100 Mass Flow Meter, Digital High Performance with Multiple Gas Capability (Dial-A-Gas®)
C100 Mass Flow Controller, Digital High Performance with Multiple Gas Capability (Dial-A-Gas®)
* Flow bodies are sized for Nitrogen flow rates. Other gases must be converted to equivalent Nitrogen flow. Use K-Factor and size accordingly.
**You must select Low Flow Calibration under "Options" for 0-20 sccm full scale flow range or less.
Note: Consult factory for other elastomers. SN1 Neoprene® (or SK3 Kalrez® (or equivalent for high flow bodies)
equivalent)
SK1 Kalrez® (or VX1 (low ValFlex™ required for CO2 above 50%
equivalent for low flow only) concentration or 250 psi on C100L; available
flow bodies) for low flow body up to 20 slpm only.
ORDERING THE SMART TRAK 100 (continued) 8
Feature 6: Input Power Feature 8: External Setpoint Signal (MFC only)
PV1M 15-24 VDC for meters (optional) S0 Pilot Module/RS-232 (standard for S3 0-10 VDC , linear
Pilot Module/digital operation)
PV2 24 VDC for all instruments (standard)
S1 0-5 VDC, linear, standard for analog S4 4-20 mA , linear
operation
Feature 7: Output Signal
S2 1-5 VDC, linear S5 0-20 mA , linear
V1 0-5 VDC and 4-20 mA linear output signals (0-5 VDC not available with Compod)
V2 1-5 VDC and 4-20 mA linear output signals Note: Alternate among S0, S1, S2, S3, S4 with Pilot Module display/
interface or Smart-Trak Software
V3 0-10 VDC and 4-20 mA linear output signals
Note: Alternate among V1, V2, V3 with Pilot Module display/interface or Smart-Trak Software
NOTE: All communications, both analog and digital, go through the cable on Smart-Trak 2 instruments
PURCHASE ONLINE
100 Series Family