applied

sciences
Article
Measurement Uncertainty Analysis of the Stitching Linear-Scan
Method for the Measurable Dimension of Small Cylinders
Jiali Zhao 1, *, Liang Zhang 1 , Dan Wu 1 , Bobo Shen 1 and Qiaolin Li 2

1 School of Mechanical and Electrical Engineering, Lanzhou University of Technology, Lanzhou 730050, China;
zhangl_21@lut.edu.cn (L.Z.); wd927@lut.edu.cn (D.W.); shenbo@lut.edu.cn (B.S.)
2 Shenzhen International Graduate School, Tsinghua University, Shenzhen 518131, China;
li.qiaolin@sz.tsinghua.edu.cn
* Correspondence: zhaojl@lut.edu.cn; Tel.: +86-139-1949-8094

Abstract: A stitching linear scan method is proposed for roundness and diameter measurement
of small cylindrical workpieces instead of the conventional rotary scan method due to the crucial
alignments of eccentricity and inclination. To verify the reliability of the proposed method, by which
the coordinates of the cross-sectional circle of a small cylinder is divided into several equal parts to
be obtained and reconstructed, the diameter and roundness measurement uncertainties of the small
cylinders with a diameter 1.5 mm are evaluated to be 0.047 µm and 0.095 µm, respectively, which
can meet the uncertainty target of 0.1 µm. To investigate the measurable dimension by the proposed
method, measurement uncertainty analysis of the small cylinders with various dimensions has been
conducted according to the previous evaluation, since all the procedures are the same except for the
uncertainty of X coordinates, which changes with the measured dimension’s change. The results
show that the small cylinders with a diameter range from 0.01 mm to 50 mm can be measured by
the proposed method when the position error θZ is reduced to the corresponding value. There is no
measuring limitation set by the proposed model theoretically in the case of θX = θZ = 0.1◦ , while the
machine has a measuring limitation.

Keywords: small cylinder; roundness; measurement uncertainty; linear scan

Citation: Zhao, J.; Zhang, L.; Wu, D.;
Shen, B.; Li, Q. Measurement
Uncertainty Analysis of the Stitching
Linear-Scan Method for the
Measurable Dimension of Small 1. Introduction
Cylinders. Appl. Sci. 2023, 13, 9091. Fine mechanics, such as RV reducers, play a significant role in industrial robotics and
https://doi.org/10.3390/ machine tool spindles. There are many cylindrical parts with various diameters employed
app13169091 in RV reducers. The performance and life of an RV reducer are affected by the quality
Academic Editor: Alberto of these cylindrical parts very much [1–5]. The parameters of roundness and diameter
Corigliano are always used to evaluate the quality of the cylindrical parts. The more precise the
parameter is, the better the quality is. To enhance the quality of the cylindrical parts,
Received: 7 July 2023 precision measurement is necessary [6–11]. Conventionally, roundness measurement can
Revised: 4 August 2023
be carried out by the rotary scan method with a roundness measuring machine [12–15].
Accepted: 8 August 2023
In recent years, some alternative roundness measurement methods have been proposed,
Published: 9 August 2023
such as the multiple probe method and online method [16–19]. However, due to the crucial
alignments (inclination and eccentricity) of the rotary scan method, precision roundness
measurement become difficult when the diameter of the measured workpiece becomes
Copyright: © 2023 by the authors.
smaller. To address this issue, the stitching linear scan method is proposed [20–22]. In
Licensee MDPI, Basel, Switzerland. this method, the coordinates of the cross-sectional circle of the cylindrical workpiece,
This article is an open access article which is attached to a round magnetic jig and mounted on a V-groove, are divided into
distributed under the terms and several equal arcs to be scanned linearly by a profilometer. A set of arc coordinate data
conditions of the Creative Commons can be obtained after one linear scan on the surface of the cylindrical workpiece. The
Attribution (CC BY) license (https:// measured cylindrical workpiece is rotated by an equal angle to a new measuring position
creativecommons.org/licenses/by/ by rotating the magnetic jig and then scanned again. Another set of arc data can be
4.0/). obtained. We then repeat the procedure several times till the entire cross-sectional circle

Appl. Sci. 2023, 13, 9091. https://doi.org/10.3390/app13169091 https://www.mdpi.com/journal/applsci

Appl. Sci. 2023, 13, x FOR PEER REVIEW 2 of 13

Appl. Sci. 2023, 13, 9091 2 of 14

is rotated by an equal angle to a new measuring position by rotating the magnetic jig and
then scanned again. Another set of arc data can be obtained. We then repeat the procedure
several times till the entire cross-sectional circle of the cylindrical workpiece is scanned
of the cylindrical workpiece is scanned completely, then a series of arcs can be obtained.
completely, then a series of arcs can be obtained. The arc profiles, which can be character-
The arc profiles, which can be characterized according to the obtained arcs, are used to
ized according to the obtained arcs, are used to stitch into a roundness profile. Through the
stitch into a roundness profile. Through the stitching angle error compensation, overlap
stitching angle error compensation, overlap parts integration, and filter processing, an ac-
parts integration, and filter processing, an accurate, integral, smooth, continuous roundness
curate, integral, smooth, continuous roundness profile can be obtained [20–22].
profile can be obtained [20–22].
Although small cylindrical parts can be measured by the stitching linear scan
Although small cylindrical parts can be measured by the stitching linear scan method,
method, the measurable range of this method has not been analyzed. In this paper,
the measurable range of this method has not been analyzed. In this paper, measurement
measurement uncertainty is used to verify the reliability of the stitching linear scan
uncertainty is used to verify the reliability of the stitching linear scan method for the round-
method for the roundness measurement of small cylindrical parts with various diame-
ness measurement of small cylindrical parts with various diameters. Due to ambiguous
ters. Due to ambiguous random error and system error, the concept of measurement
random error and system error, the concept of measurement uncertainty was proposed
uncertainty
in 1993. Thewas proposed
measured in can
result 1993.
beThe measured
reasonably andresult can be reasonably
quantitively and quanti-
evaluated according to
tively evaluated according to the GUM (Guide to the Expression of
the GUM (Guide to the Expression of Uncertainty in Measurement), which is actually an Uncertainty in
Measurement),
error propagation which is actually
evaluation an error
[23–25]. propagation
Measurement evaluation
uncertainty is [23–25].
necessaryMeasurement
for multiple
uncertainty is necessary for multiple disciplines, such as air gauge back-pressure
disciplines, such as air gauge back-pressure uncertainty estimation for advanced test uncer-
rigs
tainty estimation
and precision for advanced
positioning test rigs and
measurement precision[26,27].
uncertainty positioning
In thismeasurement uncer-
paper, the analysis
tainty [26,27]. In this
of measurement paper, theisanalysis
uncertainty of measurement
presented uncertainty
and the measurable rangeis presented and the
of the cylindrical
measurable range of the
workpiece can be confirmed. cylindrical workpiece can be confirmed.

2. Principles
Principles and Experiment
As is known to all, the surface form of a measured workpiece can be modeled and
reconstructed
reconstructed by by coordinates.
coordinates.InInthis thispaper,
paper,the thecoordinates
coordinates ofof
thethe
cross-sectional
cross-sectional circle of
circle
aofsmall cylindrical
a small workpiece
cylindrical workpiece are divided into several
are divided equalequal
into several arcs toarcs
be scanned by a pro-
to be scanned by
filometer. The diameter
a profilometer. The diameterand center coordinates
and center of these
coordinates arcs can
of these arcsbecan fitted by thebyleast
be fitted the
least square
square method.
method. The The arc profiles
arc profiles cancan
be be characterized
characterized according
according totothe
thearcarc data.
data. The
roundness profile
profileofofthe
thesmall
smallcylindrical partpart
cylindrical can be
canobtained by stitching
be obtained these arc
by stitching profiles
these arc
one by one
profiles oneinbysequence.
one in sequence.
As shown in Figure 1a, a small cylindrical workpiece with a diameter of 1.5 mm and
length of 7.8 mm is attached to the circular magnetic jig, which is marked by eight equal
on the
lines on the surface.
surface.ThisThiskind
kindofofcombination
combinationisismountedmounted onon
thethe V-groove.
V-groove. AsAs shown
shown in
in Figure
Figure 1b,1b,
thethe stylus
stylus of the
of the profilometer
profilometer is brought
is brought to scan
to scan on the
on the surface
surface of the
of the small
small cy-
cylindrical
lindrical workpieceand
workpiece andreturned
returned toto the
the initial
initial position,
position,after
afterwhich
which thethe
first arcarc
first coordinate
coordi-
data can be obtained. The small cylindrical workpiece is rotated by 45 ◦ by rotating the
nate data can be obtained. The small cylindrical workpiece is rotated by 45° by rotating
circular
the magnetic
circular jig by
magnetic jigone equal
by one part.part.
equal The The
stylus scans
stylus on the
scans on surface
the surfaceof theofworkpiece
the work-
again and returns, then the second set of arc coordinate data can
piece again and returns, then the second set of arc coordinate data can be obtained.be obtained. We repeat
We
the procedure
repeat seven times,
the procedure then eight
seven times, thensets
eight ofsets
arc coordinate data can
of arc coordinate databecanobtained. Since
be obtained.
the maximum
Since measuring
the maximum inclination
measuring of the stylus
inclination ±45◦ ,isonly
of theisstylus 85◦only
±45°, arc coordinate data are
85° arc coordinate
extracted for the following data processing.
data are extracted for the following data processing.

Figure 1. (a) Linear scan with a stylus; (b) small cylinder mounted on the V-groove and scanned
linearly.
 Appl. Sci. 2023, 13, x FOR PEER REVIEW 3 of 13

Appl. Sci. 2023, 13, 9091 3 of 14

Figure 1. (a) Linear scan with a stylus; (b) small cylinder mounted on the V-groove and scanned
linearly.

The
The eight
eight arc
arc profiles
profiles with
with respect
respect to to the
the arc
arc coordinate
coordinate cancan be
be characterized
characterized by a
series
seriesofofdata
dataprocesses.
processes.An An inaccurate
inaccurate roundness
roundness profile
profile can
can be formed by stitching these
eight
eightarc
arcprofiles
profilestogether.
together.Regarding
Regarding thethestitching
stitchingprocedure,
procedure, as as
shown
shown in Figure
in Figure 2a,b, arc
2a,b,
profiles 1 and1 2and
arc profiles are2atare
theatinitial position.
the initial As shown
position. in Figure
As shown 2c, the
in Figure 2c,first
the arc
firstprofile is kept
arc profile is
static
kept and
staticthe second
and arc profile
the second arc is rotated
profile by 45◦ , since
is rotated there
by 45°, 45◦ angular
is athere
since is a 45°displacement
angular dis-
between
placement adjacent arc profiles
between adjacent according to theaccording
arc profiles measuringto procedure. As shown
the measuring in Figure As
procedure. 2d,
the second arc profile is second
kept static, and the thirdstatic,
arc profile is third
rotated ◦
shown in Figure 2d, the arc profile is kept and the arcby 45 , while
profile the
is rotated
rest of the
by 45°, arc the
while profiles are
rest of thestitched in this
arc profiles aremanner.
stitched However, there However,
in this manner. are some therestitching
are
angle
someerrors between
stitching angleadjacent arc profiles,
errors between since the
adjacent arcsmall cylindrical
profiles, since theworkpiece is rotated
small cylindrical
manually, ◦
workpiecenamely, the angular
is rotated manually, displacement
namely, thebetweenangularadjacent arc profiles
displacement is notadjacent
between always 45 arc.
Therefore,
profiles is stitching
not always angle
45°.error compensation
Therefore, stitchingisangle
necessary. An accurate, integral,
error compensation smooth,
is necessary. An
continuous roundness profile can be obtained after stitching error compensation,
accurate, integral, smooth, continuous roundness profile can be obtained after stitching overlap
part
errorcombination,
compensation, andoverlap
low-pass partfiltering.
combination, and low-pass filtering.

Figure2.2. The
Figure The stitching
stitching procedure:
procedure:(a) (a)profile
profile1;1;(b)
(b)profile
profile2; 2;
(c)(c)
thethe
stitching of profiles
stitching 1 and
of profiles 2; (d)
1 and 2;
the stitching of the rest of the arc profiles.
(d) the stitching of the rest of the arc profiles.

3.3.Measurement
MeasurementUncertainty
UncertaintyAnalysis
Analysis of
of the
the Linear
Linear Scan
Scan Method
Method
3.1. Mathematical Modeling
3.1. Mathematical Modeling
The
Theuncertainty
uncertaintyofofroundness
roundnessand and diameter
diameter measurements
measurements of of aa small
small cylinder
cylinder with with aa
diameter of 1.5 mm and length of 7.8 mm by the stitching linear scan
diameter of 1.5 mm and length of 7.8 mm by the stitching linear scan method is carried method is carried out
atout
first.
at Mathematical modelling
first. Mathematical was conducted
modelling was conducted to calculate the measurement
to calculate uncertainty
the measurement un-
of the diameter and roundness. The arc coordinate (x , z ) in the rectangular
certainty of the diameter and roundness. The arc coordinate (xi, zi) in the rectangular co-
i i coordinate
system
ordinate cansystem
be obtained
can bebyobtained
a profilometer
by a with its stylus.with
profilometer The its mathematical
stylus. Themodel used for
mathematical
radius
model used for radius calculation and the uncertainty factors deriving from the shown
calculation and the uncertainty factors deriving from the measurements are meas-
in Figure 3a.
urements areThe radius
shown of each3a.arc
in Figure can
The be fitted
radius by the
of each arc least
can be square
fittedmethod.
by the leastRadius
squareRi
of an arbitrary measuring point can be expressed by Equation
method. Radius Ri of an arbitrary measuring point can be expressed by i Equation (1), where (x , z i ) is the arc
(1),
coordinate.
where (xi, zi) is the arc coordinate.
q
2 2 (1)
Ri 𝑅=𝑖 = √𝑥
xi 2𝑖 ++zi𝑧2𝑖 (1)
Asderived
As derivedfrom
fromEquation
Equation
(1),(1),
thethe combined
combined standard
standard uncertainty
uncertainty u(Ri )u(R ) ofmea-
of ithe the
measured arc radius can be expressed as follows:
sured arc radius can be expressed as follows:
 𝜕𝑅 𝑖  𝜕𝑅 𝑖 𝑥𝑖 2 𝑧𝑖 2
2 𝑢2 (𝑅𝑖 ) =∂R
( i )2𝑢2 (𝑥𝑖 ) + (∂Ri ) 𝑢22 (𝑧𝑖 ) = 2xi 2 2 𝑢22 (𝑥𝑖 ) + 2 zi 2 2 𝑢22 (𝑧𝑖 ) (2)
u ( Ri ) = 𝜕𝑥𝑖u ( xi ) + 𝜕𝑧𝑖 u (zi ) = 𝑧𝑖2 + 𝑥𝑖2 u ( xi ) + 𝑧𝑖 2 + 𝑥𝑖 2 u (zi ) (2)
∂xi ∂zi zi + xi zi + xi
Appl. Sci.Sci.
Appl. 2023, 13,13,
2023, x FOR
9091 PEER REVIEW 4 14
4 of of 13

Figure
Figure3.3.(a)
(a)Schematic of the
Schematic of theradius
radiusmeasurement
measurement andand
thethe uncertainty
uncertainty components;
components; (b) schematic
(b) schematic of
ofthe
theroundness
roundness measurement and the uncertainty components.
measurement and the uncertainty components.

The
Theuncertainties
uncertainties in the figure
figureare
areas
asfollows.
follows.
(1)
(1) Uncertainty
Uncertainty of of output zzii in the
the Z-axis
Z-axisdirection.
direction.
u(ecalibration_Z
u(e calibration_Z ): Uncertainty
): Uncertainty ofofstylus
styluscalibration
calibrationin
inthe
the Z-axis
Z-axis direction.
direction.
u(e ): Uncertainty due to stylus resolution.
u(eresolution): Uncertainty due to stylus resolution.
resolution
u(erepeat
u(e ): ):Uncertainty
repeat Uncertaintyofofrepeatability.
repeatability.
(2) Uncertainty
(2) Uncertainty of
of output
output xxii in
in the
the X-axis
X-axisdirection
direction
u(ecalibration_X ): Uncertainty of stylus calibration in the X-axis direction.
u(e
u(ecalibration_X): Uncertainty of stylus calibration in the X-axis direction.
alignment_Z ): Uncertainty due to position error around the Z-axis of the workpiece.
u(e
u(ealignment_Z ): Uncertainty due to position error around the Z-axis of the workpiece.
alignment_X ): Uncertainty due to position error around the X-axis of the workpiece.
u(ealignment_X): Uncertainty due to position error around the X-axis of the workpiece.
In summary, the combined standard uncertainty zi of the Z-axis output and the com-
Instandard
bined summary, the combined
uncertainty standard
of the X-axis uncertainty
coordinate zi of the
xi are expressed by Z-axis output
Equations and
(3) and (4),the
combined standard uncertainty of the X-axis coordinate xi are expressed by Equations (3)
respectively.
and (4), respectively.
u2 (zi ) = u2 ecalibration_z + u2 (eresolution )+u2 erepeat



(3)
𝑢2 (𝑧𝑖 ) = 𝑢2 (𝑒𝑐𝑎𝑙𝑖𝑏𝑟𝑎𝑡𝑖𝑜𝑛_𝑧) + 𝑢2 (𝑒𝑟𝑒𝑠𝑜𝑙𝑢𝑡𝑖𝑜𝑛
 )+𝑢

2
(𝑒𝑟𝑒𝑝𝑒𝑎𝑡) (3)
2 2 2 2
u ( xi ) = u (ecalibation_X ) + u ealignment_Z + u ealignment_X (4)
𝑢2 (𝑥𝑖 ) = 𝑢2 (𝑒𝑐𝑎𝑙𝑖𝑏𝑎𝑡𝑖𝑜𝑛_𝑋 ) + 𝑢2 (𝑒𝑎𝑙𝑖𝑔𝑛𝑚𝑒𝑛𝑡_𝑍 ) + 𝑢2 (𝑒𝑎𝑙𝑖𝑔𝑛𝑚𝑒𝑛𝑡_𝑋 ) (4)
For the calculation of roundness, it is assumed that there is a deviation from the ap-
proximate
For thecenter of the circle,
calculation rather than it
of roundness, theisradian of a perfect
assumed circle,isand
that there the approximate
a deviation from the
center of the center
approximate circle isofsetthe
as circle,
the origin. The
rather output
than the of zi canofbeaobtained
radian by Equation
perfect circle, (5),ap-
and the
where R
proximate is the radius of the arbitrary point of the measured
i center of the circle is set as the origin. The output of z arc and R is the peak radius.
0 i can be obtained by
Equation (5), where Ri is the radius of the q
arbitrary point of the measured arc and R0 is
the peak radius. z i = R0 − R i 2 − x i 2 (5)

The radius Ri after the stitching process is √

calculated
2 2 according to Equation (6). (5)
𝑧𝑖 = 𝑅0 − 𝑅𝑖 − 𝑥𝑖
u(∆zq) = u(∆r (θ ) ) + u(∆r (θ )min ) (6)
The radius Ri after the stitching processmax
is calculated according to Equation (6).
∆ri is the radial deviation at any
= measured point
) + and ∆r0 is the radial deviation at the (6)
𝑢(∆𝑧𝑞) 𝑢(∆𝑟(𝜃)𝑚𝑎𝑥 𝑢(∆𝑟(𝜃) 𝑚𝑖𝑛 )
arc apex.
Δri is the radial deviation at Rany R + ∆ri ( R point
i =measured  ∆riand
) Δr0 is the radial deviation at (7)the
arc apex.
𝑅𝑖 R=+𝑅̅∆r
R0 = ̅≫

( R𝑖 (𝑅
+ 0∆𝑟 ∆r∆𝑟
0)𝑖) (8) (7)

𝑅0 = 𝑅̅ + ∆𝑟0 (𝑅̅ ≫ ∆𝑟0 ) (8)

Appl. Sci. 2023, 13, x FOR PEER REVIEW 5 of 13

Appl. Sci. 2023, 13, 9091 5 of 14

We square both sides of Equation (5), substitute this into Equations (7) and (8), and
rearrange.
We square both sides of Equation (5), substitute this into Equations (7) and (8), and
rearrange. 2𝑅̅𝑧𝑖 − 𝑧𝑖 2 − 𝑥𝑖 2
∆𝑟𝑖 =2Rzi − zi 2 − xi 2 (9)
∆ri = 2𝑅̅ (9)
2R
From Equation (9), the combined standard uncertainty u(Δri) of the radial deviation
From
of any Equation (9),
measurement the can
point combined standard
be expressed as:uncertainty u(∆ri ) of the radial deviation of
any measurement point can be expressed as:
𝜕∆𝑟𝑖 2 𝜕∆𝑟 2 𝜕∆𝑟 2
𝑢2 (∆𝑟𝑖 ) =(∂∆r )2 𝑢2 (𝑅 ̅ ) +( 𝑖 )2 𝑢2 (𝑥𝑖 ) +( 𝑖 )2 𝑢2 (𝑧𝑖 )
i̅ 𝜕𝑥i 𝜕𝑧i
u2 (∆ri ) = ∂R 𝜕𝑅 u2 R + ∂∆r 2 2

∂∆r
∂xi 𝑖 u ( xi ) + ∂zi 𝑖 u ( zi )
(10)
(10)
 𝑥 22 +2𝑧22 2
 𝑥
 2 2 𝑧 2
xi𝑖 +zi 𝑖 2 ̅
2 (𝑅 x 𝑖 2 2 z
2
𝑖 2 2
==( u 𝑢R + +−(−
) ) i
)u 𝑢( x(𝑥
i) + −−
𝑖 ) +1(1 R 𝑅)
i
u (𝑢zi (𝑧
) 𝑖)
2𝑅
2R ̅
2 2 R𝑅 ̅
The uncertainty
The factors shown
uncertainty factors shown in in Figure
Figure 3b 3b are
are similar
similar to
to thethe radius
radius measurement
measurement
model stated above. Therefore, the combined standard uncertainty zi for the Z-axis output
model stated above. Therefore, the combined standard uncertainty zi for the Z-axis out-
and the combined standard uncertainty for the X-axis coordinate x are expressed by
put and the combined standard uncertainty for the X-axis coordinate xi i are expressed by
Equations (6) and (7), respectively. The uncertainty of the radius after the stitching process
Equations (6) and (7), respectively. The uncertainty of the radius after the stitching pro-
is expressed by Equation (11), where u(R ) is the combined standard uncertainty of the
cess is expressed by Equation (11), wherei u(Ri) is the combined standard uncertainty of
radius obtained from Equation (6) and N is the dividing number.
the radius obtained from Equation (6) and N is the dividing number.
u(𝑢(𝑅
Ri )𝑖 ) u𝑢(𝑅 ( R ))
== √ i 𝑖


u R𝑢(𝑅̅= ) =√ (11)
(11)
N
√𝑁 √88

3.2. Measurement Uncertainty Evaluation

3.2. Measurement Uncertainty Evaluation
The standard uncertainty of each uncertainty factor can be analyzed and obtained
The standard
according to GUM.uncertainty of each uncertainty factor can be analyzed and obtained
according to GUM.
1. Uncertainty coefficient of the Z-axis coordinate zi .
1. Uncertainty coefficient of the Z-axis coordinate zi.
(1)
(1) Uncertainty
Uncertainty of
of stylus
stylus calibration
calibration in
in Z-axis direction u(e
Z-axis direction u(ecalibration_Z
calibration_Z).
).
The calibration
calibrationof ofthe
theemployed
employedForm Form Talysurf
TalysurfPGI420
PGI420is conducted
is conductedwithwith
the dedicated
the dedi-
mastermaster
cated spheresphere
shownshown
in Figure 4a. The
in Figure 4a.PtThe
value, whichwhich
Pt value, is theisminimum
the minimumand maximum
and max-
width
imum after
widthlinear
after expansion of the arc
linear expansion measured
of the at the known
arc measured radius values
at the known radius shown
values
in Figure
shown in 4b, includes
Figure the shape
4b, includes theerror
shapeof the master
error of theball, the shape
master error
ball, the of the
shape stylus
error tip
of the
diameter, the electrical noise of the system, and mechanical and environmental
stylus tip diameter, the electrical noise of the system, and mechanical and environmental disturbances.
The Pt value The
disturbances. = 0.0337 µm =exists
Pt value 0.0337inμm theexists
radial
indirection,
the radial but assuming
direction, that it exists
but assuming thatinit
exists in the Z-axis direction and the X-axis direction, respectively, the uncertainty probe
the Z-axis direction and the X-axis direction, respectively, the uncertainty of the of the
calibration
probe in the Z-axis
calibration direction
in the Z-axis can be can
direction expressed by the by
be expressed following equation.
the following equation.
u𝑢(𝑒
(ecalibration_Z )=
𝑐𝑎𝑙𝑖𝑏𝑟𝑎𝑡𝑖𝑜𝑛_𝑍 )= 0.0337
0.0337 µmμm
= =33.7
33.7
nmnm (12)

Figure 4. (a)
Figure 4. (a) Standard
Standard ball; (b) calibration
ball; (b) calibration result.
result.

(2) Uncertainty due to stylus resolution u(eresolution).

Appl. Sci. 2023, 13, 9091 6 of 14

(2) Uncertainty due to stylus resolution u(eresolution ).

The stylus of the Form Talysurf PGI420 has a vertical resolution of 3.2 nm. Since the
uncertainty due to the resolution of the probe is considered to be a square distribution of
±1.6 nm, it is obtained by the following equation using B-type evaluation.

3.2/2
u(eresolution ) = √ = 0.92 nm (13)
3

(3) Uncertainty of repeated measurements u(erepeat ).

The uncertainty due to the measurement error can be evaluated by the results of
the repeated measurements of the small cylinder with a diameter 1.5 mm. Since it has a
repeatability of 59.93 nm from the results of 10 repeated measurements, the uncertainty of
repeated measurements can be obtained by the following formula using A type evaluation.

59.93
u erepeat = √ = 18.95 nm (14)
10
2. Uncertainty coefficient of the X-axis coordinate xi .
(1) Uncertainty of stylus calibration in the X-axis direction u(ecalibration_X ).
When picking up the output zi in the Z-axis direction as the uncertainty coefficient,
it is assumed that Pt values exist in the Z-axis and X-axis directions, respectively, so the
uncertainty of the stylus calibration in the X-axis direction is the same as that in the X-axis
direction, expressed by the following equation.

u(ecalibration_X ) = 33.7 nm (15)

(2) Uncertainty due to position error around the Z-axis of the workpiece u(ealignment_Z ).
The uncertainty due to the workpiece position error can be obtained according to
B type evaluation by using the value of the calculated measurement error, which can be
obtained from the mathematical modeling. The influence of the position error around the
Z-axis of the measured cylinder is shown in Figure 5a, in which D is the diameter of the
workpiece, R is the radius, (xedge , zedge ) is the end point coordinate of the obtained arc, and
θZ is the angle of the position error around the Z-axis. The position error around the Z-axis
causes the measurement result of the geometric circle of the geometric cylinder to appear
as an ellipse, with its main axis in the X-axis direction. Since the arc of ϕ = 85◦ , that is, the
arc of height h from the vertex shown in Equation (17), is extracted regardless of the size
of the workpiece diameter, an error occurs in the X-axis coordinate. If the error angle is
±θZ ◦ and this error has a rectangular distribution, the uncertainty due to the position error
around the Z-axis can be represented by the following equation.
ϕ
h = R × (1 − cos ) (16)
2
  xedge ϕ 1
u ealignment_Z = − xedge = Rsin ( − 1) (17)
θ
cos √Z 2 cos √
θZ
3 3
 mized. As a result, the error angle θX was measured as small as possible. Assuming that the
error angle at this time is ±0.1°, the uncertainty due to the attitude error around the X-axis is
obtained as follows, by substituting the radius after stitching processing into Equation (20).
Appl. Sci. 2023, 13, 9091 85° 1° 7 of 14
𝑢(𝑒𝑎𝑙𝑖𝑔𝑛𝑚𝑒𝑛𝑡_𝑋 ) = 0.74940 × sin (1 − cos ) = 0.00000257 mm = 0.26 nm (20)
2 √3

Figure 5. (a) Influence of 5.attitude

Figure errorofofattitude
(a) Influence roll workpiece
error of rollaround Z-axis;
workpiece (b)Z-axis;
around influence of attitude
(b) influence of attitude error
error of roll workpiece around X-axis.
of roll workpiece around X-axis.

Tables 1 and 2 show a summary

In the of the calculation
actual measurement, resultsoffor
the alignment theeach uncertainty.
rotating stage and From
the scanning of
the stylus were
these results, the combined repeated
standard to converge
uncertainty the Z-axis
of the obtained arc length
direction to theziminimum,
output and the and the
combined standard measurement
uncertaintywas performed
of the X-axis with the error
coordinate xi angle θZ being as
are expressed bysmall as possible.
Equation (21). Assuming
◦
that the error angle at this time is ±1 , the uncertainty due to the attitude error around the Z-
axis can be obtained
2 as follows, by2substituting the radius
2 after stitching into Equation (18).
𝑢(𝑧𝑖 ) = √𝑢 (𝑒𝑐𝑎𝑙𝑖𝑏𝑟𝑎𝑡𝑖𝑜𝑛_𝑍 ) + 𝑢 (𝑒𝑟𝑒𝑠𝑜𝑙𝑢𝑡𝑖𝑜𝑛 ) + 𝑢 (𝑒𝑟𝑒𝑝𝑒𝑎𝑡 )
  (21)
= √33.7)2 = 0.922 +×18.95
+ 0.74940 852◦= 1 nm 
 38.45
u(ealignment_Z sin 1◦
−1 = 0.00002568 mm = 25.68 nm (18)
2 cos √
3

√𝑢2 (𝑒𝑐𝑎𝑙𝑖𝑏𝑟𝑎𝑡𝑖𝑜𝑛_𝑋
𝑖 ) =Uncertainty
𝑢(𝑥(3) ) + 𝑢2 (𝑒error
due to position around) the
𝑎𝑙𝑖𝑔𝑛𝑚𝑒𝑛𝑡_𝑍
2 (𝑒
+ 𝑢X-axis
𝑎𝑙𝑖𝑔𝑛𝑚𝑒𝑛𝑡_𝑋 )
of the workpiece u(ealignment_Z ).
(22)
The influence of the position error around the X-axis of the measured cylinder is
= √33.72 + 25.682 + 0.262 = 42.37 nm
shown in Figure 5b, in which D is the workpiece diameter, R is the radius, the coordinates
(xedge , zedge ) are the end point of the obtained arc, and θX is the angle of position error,
which causes measurements of geometric circles to geometric cylinders to appear as ellipses,
with the major axis along the Z-axis. Since the arc with height h from the vertex is extracted
in the same way as when there is a posture error around the Z-axis, an error occurs in
the X-axis coordinate. Assuming that the error angle is θX , which forms a rectangular
distribution, the uncertainty due to the position error around the X-axis is expressed by the
following equation.

θ ϕ θ
u(ealignment_X ) = xedge − xedge cos √X = Rsin (1 − cos √X ) (19)
3 2 3

In the actual measurement, the manual stage was moved in the Y-axis direction while
the stylus was in contact with the flat surface of the mounting table, and alignment was
performed using the tilting stage so that the change in displacement output was minimized.
As a result, the error angle θX was measured as small as possible. Assuming that the error
angle at this time is ±0.1◦ , the uncertainty due to the attitude error around the X-axis is
obtained as follows, by substituting the radius after stitching processing into Equation (20).
Appl. Sci. 2023, 13, 9091 8 of 14

85◦ 1◦
 
u(ealignment_X ) = 0.74940 × sin 1 − cos √ = 0.00000257 mm = 0.26 nm (20)
2 3

Tables 1 and 2 show a summary of the calculation results for each uncertainty. From
these results, the combined standard uncertainty of the Z-axis direction output zi and the
combined standard uncertainty of the X-axis coordinate xi are expressed by Equation (21).
r  

u ( zi ) = u2 ecalibration_Z + u2 (eresolution ) + u2 erepeat
(21)
√
= 33.72 + 0.922 + 18.952 = 38.45 nm
r    
u ( xi ) = u2 (ecalibration_X ) + u2 ealignment_Z + u2 ealignment_X
(22)
√
= 33.72 + 25.682 + 0.262 = 42.37 nm

Table 1. Uncertainty budget of the output in the Z-axis direction.

Source of Coverage Standard Sensitivity |ci | × u(xi )

Symbol Type
Uncertainty Factor Uncertainty Coefficient nm
Calibration
u(ecalibration_Z ) A — 33.7 1 33.7
of probe
√
Resolution u(eresolution ) B 3 0.92 1 0.92
Repeatability u(erepeat ) A — 18.95 1 18.95
Combined
standard u(zi ) — 38.45
uncertainty

Table 2. Uncertainty budget of the X-axis coordinate.

Source of Coverage Standard Sensitivity |ci | × u(xi )

Symbol Type
Uncertainty Factor Uncertainty Coefficient nm
Calibration
u(ecalibration_X ) A — 33.7 1 33.7
of probe
Attitude error √
around u(ealignment_Z ) B 3 25.68 1 25.68
Z-axis
Attitude error √
around u(ealignment_X ) B 3 0.26 1 0.26
X-axis
Combined
standard u(xi ) — 42.37
uncertainty

Using the calculated uncertainties, the combined standard uncertainty u(Ri ) of the
radius of the measured arc can be obtained from Equation (23). u(Ri ) can be obtained by
Equation (24).
u(∆r (θ )) = u(m(θ )) = 26.92 nm (23)
Appl. Sci. 2023, 13, 9091 9 of 14

r
xi 2 2
u ( Ri ) = zi 2 + xi2
u2 ( xi ) + z 2z+
i
xi2
u2 ( z i )
i

(24)
q
0.505752 0.552802
= 0.552802 +0.505752
× 42.372 + 0.552802 +0.505752
× 38.452
= 40.28 nm
The uncertainty of the radius after the stitching process can be obtained by substituting
the values obtained in Equation (13) into Equation (11) to obtain the following equation.

u( R ) 40.28
u R = √ i = √ = 14.24 nm


(25)
8 8

The uncertainty of the diameter measurement is twice the uncertainty of the radius.

u( D ) = 2 × u( Ri ) = 2 × 14.24 = 28.48 nm (26)

The expanded uncertainty can be calculated when k = 2.

U ( D ) = ku( D ) = 2 × 28.48 = 56.96 nm (27)

As can be seen above, the uncertainty of the diameter measurement of the 1.5 mm small
cylindrical workpiece using the linear scanning method was estimated to be ±47.24 nm,
achieving a target measurement uncertainty within ±0.1 µm. Table 3 summarizes the
results of the standard uncertainty.

Table 3. Uncertainty budget of diameter measurement by the proposed method.

Source of Coverage Standard Sensitivity |ci | × u(xi )

Symbol Type
Uncertainty Factor Uncertainty Coefficient nm
Output in
u(zi ) — — 38.45 1 38.45
Z-axis direction
Coordinate of
u(xi ) — — 42.37 1 42.37
X-axis
Combined
standard u(Ri ) — 40.28
uncertainty
Radius after
stitching u( R) — 14.24
process
Diameter u(D) — 28.48
Expanded
uncertainty U(D) — 56.96
(k = 2)

Using the calculated uncertainty, the combined standard uncertainty u(∆ri ) of the ra-
dial deviation of an arbitrary measured point on the arc can be obtained from Equation (10).
Substituting the combination of (xi , mi ), the coordinates of the endpoint of the arc
(xedge , zedge ) = (0.50575, 0.55280) and the radius after the stitching process, for which u
obtained from the measurement u(∆ri ) is maximum, the following equation is obtained.
Appl. Sci. 2023, 13, 9091 10 of 14

s 2 2 2
xi2 +z2i
 
u(∆ri ) = 2 u2 R + − xRi u2 ( xi ) + 1 − zi
R
u2 ( z i )
2R
(28)
r 2
0.505752 +0.552802 0.50575

2 0.55280 2


= 2×0.749402
× 14.242 + − 0.74940 × 42.372 + 1 − 0.74940 × 38.452

= 34.84 nm

Using the same assumptions as in Equations (6) and (29), the combined standard
uncertainty u(∆zq) of roundness can be expressed as follows.

u(∆zq) = 2u(∆r (θ )) (29)

u ∆zq = 2u(∆ri )


(30)
Substituting the uncertainty calculated in Equation (26), the combined standard uncer-
tainty u(∆zq) is obtained from Equation (27), as shown in Equation (31) below.

u ∆zq = 2u(∆ri ) = 2 × 34.84 = 69.68 nm

(31)

The expanded uncertainty can be obtained when k = 2 shown in Equation (32).

U ∆zq = ku ∆zq = 2 × 69.68 = 139.36 nm

(32)

As can be seen above, the uncertainty in the roundness measurement of a small

cylindrical workpiece with a diameter of 1.5 mm was estimated to be ±95.44 nm using the
linear scanning method, achieving a target measurement uncertainty of ±0.1 µm or less.
Table 3 summarizes the results of the standard uncertainty.

3.3. Variation of Uncertainty Due to Change in Workpiece Diameter

For the purpose of examining the cylindrical work diameter suitable for roundness
measurement using the profilometer, which is the stitching linear scan method, a simulation
is performed to calculate the measurement uncertainty when the work diameter is changed.
Of the uncertainty factors in (1) to (3) of 1 and (1) to (3) of 2, shown in the previous
section, the ones that change significantly depending on the workpiece diameter are the
uncertainty u(ealignment_Z ) due to the workpiece orientation error around the Z-axis and
the uncertainty u(ealignment_X ) due to the workpiece orientation error around the X-axis.
Figure 6a,b show the graphs of the uncertainty u(xi ) of the X-axis coordinate when the
workpiece diameter is varied from 0.01 mm to 50.00 mm using Equations (13) and (14).
From Figure 6a, as the diameter increases, u(ealignment_Z ) increases and becomes almost the
same value as u(xi ), but the amount of change in u(ealignment_X ) is small. In other words,
u(ealignment_Z ) is the dominant factor for changes in u(xi ). This is because the attitude error
angles θZ = ±1◦ and θX = ±0.1◦ are set in consideration of the alignment method and stylus
resolution, and θZ is estimated to be larger than θX . Figure 7a shows a graph showing
changes in diameter expanded uncertainty U(D) and roundness expanded uncertainty
U(∆zq) created by substituting u(xi ), which varies depending on the workpiece diameter,
and other standard uncertainties. It can be seen that both U(D) and U(∆zq) increase as the
workpiece diameter increases due to the influence of u(xi ). Figure 7b shows an enlarged
graph of the work diameter range from 0.01 mm to 10 mm. From this graph, when the
attitude error angle θZ = ±1◦ and θX = ±0.1◦ , it can be read that the conditions for the
workpiece diameter that can theoretically achieve the target measurement uncertainty
within ±0.1 µm are a U(D) of 5.58 mm or less and a U(∆zq) of 2.11 mm or less.
 U(Δzq) created by substituting u(xi), which varies depending on the workpiece diameter,
U(Δzq) created by substituting u(xi), which varies depending on the workpiece diameter,
and
and otherstandard
other standarduncertainties.
uncertainties. ItIt can
can be
be seen that both
seen that both U(D)
U(D) and and U(Δzq)
U(Δzq)increase
increaseas asthe
the
workpiece
workpiecediameter
diameter increases
increases due
due to
to the
the influence of u(x
influence of u(xii).). Figure
Figure 7b
7b shows
showsan anenlarged
enlarged
graph of the work diameter range from 0.01 mm to 10 mm. From
graph of the work diameter range from 0.01 mm to 10 mm. From this graph, when the this graph, when the
attitude
attitude error
error angle
angle θθZZ == ±1°
±1° and
and θ θXX == ±0.1°, it can
±0.1°, it can be
be read
read that that the
the conditions
conditions forfor the
the
Appl. Sci. 2023, 13, 9091 11 of 14
workpiece diameter that can theoretically achieve the target measurement
workpiece diameter that can theoretically achieve the target measurement uncertainty uncertainty
within
within±0.1
±0.1μm
μmare
are aa U(D)
U(D) ofof 5.58
5.58 mm
mm or or less and aa U(Δzq)
less and U(Δzq) of of 2.11
2.11 mm
mm or orless.
less.

Figure
Figure6.6.6.Variation
Figure Variation
Variationofof ofu(xu(x
u(x i)) in
i ) iin in accordance
accordance
accordance withwith diameter
the diameter
the diameter of workpiece:
of workpiece:
of workpiece: (a) influence
(a)
(a) influenceinfluence
of ofof
u(Δe
u(Δe
u(∆e alignment_Z );
alignment_Z
alignment_Z );(b)
(b)
(b) influence
influence
influence ofof
of u(Δe
u(Δe
u(∆e alignment_X
alignment_X
alignment_X ).
).

Figure
Figure
Figure 7.7.7. Variation
Variation
Variation of U(D)
of of U(D)
U(D) and
andand U(Δzq)
U(∆zq) in accordance
accordance
in accordance
U(Δzq) in with with diameter
diameter
with of
of workpiece:
of workpiece:
diameter (a)
(a)diameter
(a) diameter
workpiece: ф
diameterфф
0.01–50
0.01–50
0.01–50mm; mm;
mm;(b) (b) diameter
(b)diameter
diameter ф 0.01–10
ф 0.01–10 mm.
ф 0.01–10 mm.
mm.

In the previous simulation, the position error angles were set to θZ = ±1◦ and
θX = ±0.1◦ , but improving the alignment increases the upper limit of the workpiece diame-
ter that satisfies the target measurement uncertainty. There is room for improvement in
the position error angle θZ around the Z-axis. Therefore, Figure 8a,b show the changes in
the expanded uncertainty of diameter U(D) and the expanded uncertainty of roundness
U(∆zq) when the attitude angle error occurs in a rectangular distribution of θZ = ±0.1◦ ,
±0.3◦ , ±0.5◦ , ±0.6◦ , ±0.7◦ , ±0.8◦ , ±0.9◦ , ±1◦ , ±1.5◦ and ±2◦ . Table 4 summarizes the
upper limit of the workpiece diameter that can achieve the target uncertainty of diameter
and roundness within ±0.1 µm at each attitude error angle θZ . From Table 4, we see that it
is desirable to converge θZ as small as possible by more accurate alignment when measur-
ing cylindrical workpieces with a large diameter. It can be confirmed that the proposed
method can cover all diameters of less than φ 3 mm, which are difficult to measure using
the rotational scanning measurement method, as long as θZ is kept smaller than ±0.8◦ .
Furthermore, if θZ can be made smaller, the proposed method can be used for workpieces
with a larger diameter. If alignment is possible up to θZ = θX = ±0.1◦ , there is no limitation
on the workpiece diameter theoretically. However, as the workpiece diameter increases,
the measurement range in the Z-axis and X-axis directions expands, so it is thought that the
upper limit of the workpiece diameter will be reached due to the increase in uncertainty
and the limitation of the measurement range of the measuring equipment used.
 Furthermore, if θZ can be made smaller, the proposed method can be used for workpieces
with a larger diameter. If alignment is possible up to θZ = θX = ±0.1°, there is no limitation
on the workpiece diameter theoretically. However, as the workpiece diameter increases,
the measurement range in the Z-axis and X-axis directions expands, so it is thought that
the13,upper
Appl. Sci. 2023, 9091 limit of the workpiece diameter will be reached due to the increase in uncer- 12 of 14
tainty and the limitation of the measurement range of the measuring equipment used.

Figure 8. (a) Variation in U(D)

Figure 8. (a) with the in
Variation diameter of the
U(D) with the diameter
workpiece; (b)workpiece;
of the variation (b)
in U(Δz q) in
variation inac-
U(∆zq ) in
cordance with the diameter of workpiece.
accordance with the diameter of workpiece.

Table 4. Limits
Table 4. Limits of diameter of diameter
that can that can be achieved.
be achieved.
Attitude Error AngleError Angle
Attitude 0.1 0.3 0.5 0.6 0.7 0.8 0.9 1 1.5 2
θZ deg. 0.1 0.3 0.5 0.6 0.7 0.8 0.9 1 1.5 2
θZ deg.
Work Diameter Upper
Work -
Diameter Upper 61.65 22.31 15.50 11.39 8.72 6.89 5.58 2.48 1.39
Limit mm (U(D))
- 61.65 22.31 15.50 11.39 8.72 6.89 5.58 2.48 1.39
Limit
Work Diameter Uppermm (U(D))
- 23.34 8.44 5.86 4.31 3.30 2.60 2.11 0.93 0.52
Limit mm (U(∆z ))
Work Diameter
q Upper
- 23.34 8.44 5.86 4.31 3.30 2.60 2.11 0.93 0.52
Limit mm (U(Δzq))
3.4. Discussion
3.4. Discussion For the precision roundness measurement of cylindrical parts, the conventional rotary
scan method cannot meet the requirements. Therefore, the stitching linear scan method has
For the precision roundness
been proposed. measurement
Since of of
the repeatability cylindrical
measurement parts, theimportant,
is very conventional ro-
large numbers of
tary scan methodexperiments
cannot meet the requirements.
are necessary Therefore,
[28]. For practical the stitching
applications, linearparts,
some cylindrical scansuch as
method has been theproposed. Since [29],
motor cylinders the can
repeatability
be measuredofbymeasurement is very
the stitching linear important,
scan method. Meanwhile,
large numbers of experiments are necessary [28]. For practical applications, some cylin-Contact
the reliability of the proposed method can be verified in practical application.
drical parts, suchmeasurements
as the motorwith a stylus or probe may not be accurate due to the measuring force and
cylinders [29], can be measured by the stitching linear
deformations, therefor it is necessary to develop non-contact measurements with optical
scan method. Meanwhile, the reliability of
linear encoder technology [30,31].the proposed
Furthermore, method can bemethod
the proposed verified
andin prac-
the verification
manner can be applied for the measurement or testing of cylindrical parts or round parts
made of other materials, such as functionally graded plates, which play a significant role in
building materials [32,33]. Measurement uncertainty is necessary for testing, inspection
and precision measurement. For the verification of the reliability of the proposed method,
the measurement of uncertainty is carried out in this paper. The upper limitation of the
proposed method can be investigated by the analysis and applications in a variety of fields.

4. Conclusions
The roundness profile of the small cylindrical parts can be reconstructed by coordinate
modeling in the stitching linear scan method. To verify the reliability of the method, the
measurement uncertainty of a small cylinder with a diameter 1.5 mm and length 7.8 mm
was evaluated to be 0.095 µm, which satisfies the target uncertainty of 0.1 µm. According
to the analysis, it can be determined that the uncertainty due to the position error around
the Z-axis is the main uncertainty source of the X coordinate, after which the measurement
uncertainties of the workpieces with a diameter from 0.01 mm to 50 mm can be analyzed.
Appl. Sci. 2023, 13, 9091 13 of 14

As a result, all the small cylinders with the dimensions mentioned above can be measured
with a measurement uncertainty less than 0.1 µm when the alignment is improved properly.
Theoretically, there is no limitation to the stitching linear scan method, while the employed
profilometer has a measuring limitation. Therefore, a machine with a large measuring
range will be used for investigating the limitation of the stitching linear scan method for
roundness measurements of cylindrical workpieces. In addition, the measuring efficiency
by the stitching linear scan method should be enhanced as well.

Author Contributions: J.Z.: methodology; resources; formal analysis; writing—original draft. L.Z.:
investigation; data curation; review and editing. D.W.: review and editing; project administration.
B.S.: data curation; visualization. Q.L.: investigation; visualization. All authors have read and agreed
to the published version of the manuscript.
Funding: This research was funded by the National Defense Basic Scientific Research Program of
China (Grant numbers JCKY2019427D002).
Data Availability Statement: The data that support the findings of this study are available from the
corresponding author upon reasonable request.
Conflicts of Interest: The authors declare no conflict of interest.

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