OPTIC NANO Consult S.A.R.L provides scientific support in spectroscopic ellipsometry and polarimetry metrology for thin films and new materials. It was founded in 2011 and collaborates with research institutes, laboratories, and foundries. OPTIC NANO aims to give expert attention and advice within global research projects, using complementary advanced measurement techniques and modeling to investigate new products and materials while preserving confidentiality. The company's expertise comes from years of research experience in optics and relationships with instrument developers.
Fractal characterization of dynamic systems sectional imagesAlexander Decker
This document discusses using fractal analysis to characterize sectional images of dynamic systems. It simulates three systems - a hollow sphere, transmissibility ratio, and Lorenz weather model. For each system, it generates the governing equations, simulates the surface, takes 200 sectional images by passing a plane through the surface, and uses fractal disk dimension to characterize the roughness of each image. It finds the hollow sphere surface is smoothest, transmissibility ratio is rougher, and Lorenz weather model is roughest, indicating fractal analysis can distinguish linear from nonlinear system surfaces. The study demonstrates fractals' potential for image characterization in engineering applications.
From 3D Image to Simulation with Simpleware and COMSOLSimpleware
This document provides information on applications of the COMSOL Multiphysics software and how it can be used with Simpleware software. It describes how Simpleware allows users to import 3D image data, generate meshes, and export models to COMSOL for simulation. Examples are given of materials science applications investigating graphite porosity, medical research on transcranial direct current stimulation across skull defects, and battery research modeling lithium ion diffusion in porous particles.
This document describes an interactive software application developed using MATLAB for image reconstruction and analysis of corneal data from an in vivo confocal microscope. The software allows users to input 3D confocal files and interactively visualize the datasets. It provides quantitative measurements of corneal layers by generating a plot of image depth from a user-selected region of interest. A new feature allows users to pick the center of the region of interest for curve calculation, rather than always centering on the image center. Demonstrations on rabbit and mouse cornea examinations show the tool's capabilities for assessing corneal wound healing.
Victor Pashkov's CV outlines his education and experience developing optical and electronic instruments, including a LIDAR system, improving the GLONASS navigation message, simulating an optical electronic instrument with CCD matrices for space navigation, designing an optical switch and laser projection system, and managing projects for an optical projection TV and LED backlight unit for LCD displays.
Using physics-based OCT Monte Carlo simulation and wave optics models for synthesising new OCT volumes for ophthalmic deep learning.
Alternative download link:
https://www.dropbox.com/s/ax15qy47yi76eex/OCT_MonteCarlo.pdf?dl=0
The document describes the MiCRoN Project, a European Union funded project aimed at manipulating micro-sized objects. The project involves several European universities and research institutions working towards goals of closed-loop control of micro-robots, 3D object recognition and tracking at the micro-level. Key areas discussed include micro-camera image acquisition, geometric hashing algorithms for object recognition and tracking in 3D, bounded Hough transforms, using focus stacks to enable depth perception, and tests of micro-grippers.
COIFLET-BASED FUZZY-CLASSIFIER FOR DEFECT DETECTION IN INDUSTRIAL LNG/LPG TANKScsandit
This document describes a method for classifying defects in large LNG tanks using a fuzzy inference system applied to raw sensor data from a magnetic flux leakage (MFL) sensing system. The method involves decomposing the MFL signals using a Coiflet wavelet transform to extract features, then applying a fuzzy classifier with three inputs (amplitude-to-width ratio, grass energy, bush energy) and three outputs (healthy, corroded, defective). Testing on a steel plate with a weld defect accurately classified the areas as healthy, corroded, or defective on a generated floor map. The method provides a way to automate tank inspections currently done manually.
This document discusses computer vision techniques for microscopes. It describes the MiCRoN European Union project, which aims to develop computer vision tools to manipulate and track microscopic objects. It provides examples of hardware and software used in the project, including a camera, microscope, and the Mimas computer vision toolkit. Geometric hashing is presented as a technique for recognizing objects in 2D and 3D under different degrees of freedom.
Unsupervised Building Extraction from High Resolution Satellite Images Irresp...CSCJournals
The document discusses an unsupervised method for extracting buildings from high resolution satellite images regardless of rooftop structures. The method first calculates NDVI and chromaticity ratios to segment vegetation and shadows. Rooftops and roads are then detected and eliminated. Principal component analysis and area analysis are performed to accurately extract buildings. The algorithm aims to eliminate inhomogeneities caused by varying building hierarchies by focusing on eliminating non-building regions rather than detecting building regions of interest. The methodology is tested on Quickbird satellite imagery and results indicate it can extract buildings in complex environments irrespective of rooftop shape.
This document summarizes research into developing a lower-cost method for real-time terahertz (THz) imaging using digital light processing and compressed sensing. The method projects coded apertures onto silicon using a DLP projector instead of fixed physical masks, allowing reconfigurable apertures. It also uses compressed sensing to reduce frame acquisition times by at least 40%, bringing real-time video rates closer to feasibility. The researchers believe with optimization, their approach could achieve real-time video imaging at resolutions up to 1k pixels for applications like medical diagnostics and quality control.
This document discusses using piezoelectric transducers and Lamb waves to perform structural health monitoring of aircraft structures. Lamb waves are ultrasonic guided waves that can propagate long distances in plate-like structures and be used to detect damage. A preliminary study investigated using a circular array of 16 piezoelectric transducers attached to an aluminum plate to generate and receive Lamb waves. Signals were processed to characterize the symmetric S0 wave mode for imaging. Future work will introduce damage and adapt the techniques for composite materials.
In this paper, we present a novel iterative reconstruction algorithm for discrete tomography (DT) named total variation regularized discrete algebraic reconstruction technique (TVR-DART) with automated gray value estimation. This algorithm is more robust and automated than the original DART algorithm, and is aimed at imaging of objects consisting of only a few different material compositions, each corresponding to a different gray value in the reconstruction. By exploiting two types of prior knowledge of the scanned object simultaneously, TVR-DART solves the discrete reconstruction problem within an optimization framework inspired by compressive sensing to steer the current reconstruction toward a solution with the specified number of discrete gray values. The gray values and the thresholds are estimated as the reconstruction improves through iterations. Extensive experiments from simulated data, experimental μCT, and electron tomography data sets show that TVR-DART is capable of providing more accurate reconstruction than existing algorithms under noisy conditions from a small number of projection images and/or from a small angular range. Furthermore, the new algorithm requires less effort on parameter tuning compared with the original DART algorithm. With TVR-DART, we aim to provide the tomography society with an easy-to-use and robust algorithm for DT.
IRJET - Tumor Identification from X-Ray Images using SVM KernelsIRJET Journal
This document presents a study on using support vector machines (SVMs) and different kernels to identify tumors in x-ray images of legs. It discusses preprocessing x-ray images, extracting features using singular value decomposition, and classifying images as having a tumor or not using SVMs with GURLS and Lib-SVM libraries. Experimental results show RBF kernels in GURLS achieved the highest accuracy of 95% for tumor identification, outperforming other kernels and libraries. The proposed framework demonstrates the effectiveness of GURLS and SVMs for tumor detection in x-rays.
This document discusses using metamaterials and plasmonic materials for optical camouflage and transparency of spherical nanoparticles. It conducted bibliographic research on using Drude's model for permittivity and Mie Theory for optical invisibility. Numerical simulations analyzed the electric field inside and outside particles under different geometric and electromagnetic configurations to obtain low and high observability. Figure 1 shows the electric field intensity inside a particle and its coat is considerably higher than the outside field, validating the effectiveness of the optical camouflage method described in the study.
Poster - Convolutional Neural Networks for Real-time Road Sign Detection-V3Mr...Guangrui Liu
The document summarizes a convolutional neural network model called YOLO that performs real-time road sign detection in one stage. It divides the input image into a 7x7 grid, with each grid predicting 2 bounding boxes and confidence scores. It is trained on a dataset of 484 stop signs and 284 yield signs over 5000 batches, and tests at over 24 frames per second on videos with an overall accuracy of 92.5%, detecting stop signs at 90% accuracy and yield signs at 95% accuracy.
Este documento proporciona definiciones en español de varios términos relacionados con la tecnología electrónica e informática, incluyendo dispositivos como pulseras antiestáticas, baterías, interruptores, cables, discos compactos, circuitos, computadoras, monitores, ratones, impresoras, parlantes y cámaras web. También define conceptos como electricidad, software, virus, voltaje y desarrollo sostenible.
The document discusses expertise in optical metrology and polarimetry for micro and nano-technology, including establishing measurement protocols, optimizing data acquisition from instruments, and providing consulting services, training, and guidance for industrial projects utilizing ellipsometry and polarimetry techniques. Resources and capabilities mentioned include a research environment, characterization instruments, and experience supporting over 50 publications and various industrial projects involving spectroscopic ellipsometry.
Picnik is a free online photo editing program that allows users to easily correct, enhance, and share photos directly from their computer or online. Key features include one-click photo corrections, advanced tools to refine images, real-time resizing and rotation, thousands of effects and filters, and sharing photos online or via email. Word is a word processing program included in Microsoft Office that enables users to create all types of written documents. It offers formatting tools for page layout, fonts, images, tables, form letters, and a print preview function.
Este documento proporciona definiciones en español de varios términos relacionados con la tecnología electrónica e informática, incluyendo dispositivos como pulseras antiestáticas, baterías, interruptores, cables, discos compactos, circuitos, computadoras, monitores, ratones, impresoras, parlantes y cámaras web. También define conceptos como electricidad, software, virus, voltaje y desarrollo sostenible.
This document provides information on optical metrology and polarimetry consulting services. The consulting services include:
- Protocol establishment and assistance with industrial optical characterization requests regarding thin films, new materials, and ellipsometry/polarimetry setup.
- Expert guidance and experience on realizing metrology measurements using unique resources at SERMA Technologies and MINATEC facilities.
- Assistance selecting suitable measurement instruments and optimizing data acquisition.
- Support for European or regional research program proposals regarding feasibility and relevance.
- The consultant has over 50 publications in ellipsometry and polarimetry and experience participating in industrial projects and interacting with measurement instrument companies.
El documento presenta los compromisos de Roger Navarro con el medio ambiente, que incluyen proteger la naturaleza de daños humanos, informar a las personas sobre daños al planeta y comprometerse a no dañar la naturaleza.
Las principales herramientas ofimáticas son Word para procesar textos, Excel para hojas de cálculo, Power Point para presentaciones multimedia, Access para bases de datos, y OneNote para agendas o blogs. Outlook se usa para correo electrónico.
Picnik is a free online photo editing program that allows users to easily correct, enhance, and share photos directly from their web browser without needing to download or install any software. It offers basic editing tools like rotating and resizing photos as well as advanced effects and publishing options. Word is a word processing program included in the Microsoft Office suite that enables users to create all types of written documents. It provides formatting controls and features for working with text, images, tables, and mail merges. Both programs allow for simple yet powerful editing of photos and documents directly from a web browser or computer.
Este documento proporciona definiciones en español de varios términos relacionados con la tecnología electrónica e informática, incluyendo dispositivos como pulseras antiestáticas, baterías, interruptores, cables, discos compactos, circuitos, computadoras, monitores, ratones, impresoras, parlantes y cámaras web. También define conceptos como electricidad, software, virus, voltaje y desarrollo sostenible.
Picnik is a free online photo editing program that allows users to easily correct, enhance, and share photos directly from their web browser without needing to download or install any software. It features basic editing tools as well as advanced controls and thousands of effects and templates. Word is a word processing program included in the Microsoft Office suite that enables users to create all types of written documents. It offers formatting and layout options like page margins and numbering, fonts and styles, images, tables, form letters, and a print preview.
This document discusses using spectroscopic ellipsometry to analyze molecular fractal surfaces through physical adsorption of water and other liquids. It provides background on existing surface adsorption theories and how they have been expanded to account for fractal surfaces. Experimental data is presented on water adsorption measured by ellipsometry on various surfaces like gold, silicon, and germanium. The data is analyzed using modified adsorption models that incorporate the fractal dimension of the surfaces to determine properties like monolayer coverage and surface dimensionality.
Picnik is a free online photo editing program that allows users to easily correct, enhance, and share photos directly from their web browser without needing to download or install any software. It features basic editing tools as well as advanced controls and thousands of effects and templates. Word is a word processing program included in the Microsoft Office suite that enables users to create all types of written documents. It offers formatting and layout options like page margins and numbering, fonts and styles, images, tables, form letters, and a print preview.
our make it better is..................................................................................................................................................................................................................................................................................................................................
This document discusses using Mueller matrices to characterize textured films and periodic grating structures. It begins by explaining how Mueller matrices can measure depolarization, which provides new insights into surface roughness characterization compared to conventional ellipsometry. It then discusses using Mueller matrices to characterize the angular distribution of slopes on rough surfaces and relates this to a depolarization index. The document provides examples of using Mueller matrix polarimeters to characterize materials like aluminum films, plastic films, and silicon nanowires. It also discusses using Mueller matrix scatterometry to characterize periodic grating structures for applications like lithography.
The good the bad the ugly presentation team 2 - 2003 formatumangbali
Adidas is summarized as "The Good" for its environmental approach to reducing impacts in its supply chain and developing more sustainable products. IKEA is described as "The Bad" despite environmental initiatives, as its business model is questioned for wood sourcing practices and product durability. Monsanto is labeled "The Ugly" for its development of terminator seeds and role in creating markets from ecological crises.
Dr. Gernot S. Pomrenke presents an overview of his program, Photonics and Optoelectronics, at the AFOSR 2013 Spring Review. At this review, Program Officers from AFOSR Technical Divisions will present briefings that highlight basic research programs beneficial to the Air Force.
A new Compton scattered tomography modality and its application to material n...irjes
This document describes a new Compton scattered tomography modality and its application to non-destructive material evaluation, specifically for concrete. The modality utilizes Compton scattering of gamma rays to reconstruct the electron density distribution within an object. Data is acquired by rotating a gamma ray source and detector around the object, collecting scattered radiation along circular arcs. The electron density can then be reconstructed using an inverse Radon transform formula. Simulations demonstrate the viability of using this technique to image rebar grids and cracks within concrete samples. The reconstructed electron density provides complementary information to attenuation-based techniques for non-destructive concrete evaluation.
T Wood has experience in optical characterization of materials for applications in photonics and optoelectronics. Their past research includes characterization of waveguide materials for photonic gas sensors during their PhD and determining the complex refractive index of organic semiconductors for solar cells as a postdoc. More recently, they have studied plasmonic nanostructures and fabricated metallic gratings for sensing. Going forward, they are interested in research at the intersection of experiments and simulations to optimize photonic device performance and characterize materials.
This curriculum vitae outlines the educational and professional experiences of Dr. Felice Pignatiello. They include a Master's degree in laser spectroscopy, work developing laser systems for printing applications, and project management. Their roles have involved the development of laser technologies, including low power lasers for computer-to-plate applications and high power lasers. They have also conducted research on laser spectroscopy and optical sensing techniques. Currently, they work on optoelectronic projects for printing and collaborate on a project using UV illumination for medical applications.
The document discusses using polarimetry to characterize the surface properties of nanotechnology materials. Polarimetry measurements can provide information about surface roughness and periodic structures. Models are presented for using polarimetry to evaluate parameters like depolarization, entropy, and roughness for both random and periodic surfaces. Case studies are described applying these techniques to materials like aluminum films, silicon nanowires, and plastic films.
During the last decades a large effort has been invested in the development of a new
discipline devoted to benefit from optical excitations in materials where metals are
key element (Plasmonics). We will make an introduction on this topic below, but let’s
anticipate that two application areas are sensing and information technologies.
The following height extended abstracts, presented during the one-day NANOMAGMA
Symposium (Bilbao, Spain – April 13, 2011 reflects some of the latest developments on magneto-plasmonics.
In 2010 and 2011, the nanoICT project (EU/ICT/FET Coordination Action) launched
two calls for exchange visits for PhD students with the following main objectives: 1.
To perform joint work or to be trained in the leading European industrial and academic research institutions; 2. To enhance long-term collaborations within the ERA; 3. To
generate high-skilled personnel and to facilitate technology transfer;
The first outcome report was published in the issue 22 (August 2011) and this edition
contains four new articles providing insights in relevant fi elds for nanoICT.
We would like to thank all the authors who contributed to this issue as well as the European Commission for the financial support (projects nanoICT No. 216165 and NANOMAGMA No. FP7-214107-2).
Dr. Antonio Correia Editor - Phantoms Foundation
Thomas Michael Wood has extensive experience in optics research, having held several postdoctoral research positions between 2013 and present focused on topics like graphene photonics, photonic components for communications, and organic light emitters. He received his PhD in Physics from Aix-Marseille University in 2013 with a focus on guided optics techniques for gas sensing applications.
SAFARILAB: A Rugged and Reliable Optical Imaging System Characterization Set-...drboon
This work proposes a rugged and reliable set-up to characterize incoherently illuminated optical imaging systems. It complies with the ISO 12233 standard and is suitable for industrial applications. The standard has been implemented taking advantage of the allowed degrees of freedom to optimize noise robustness. Key points of the algorithm are automatization of the whole measurement procedure and customization, to comply with specific needs. Experimental results confirming the successful implementation are presented and discussed.
SAFARILAB: A Rugged and Reliable Optical Imaging System Characterization Set-...drboon
This work proposes a rugged and reliable set-up to characterize incoherently illuminated optical imaging systems. It complies with the ISO 12233 standard and is suitable for industrial applications. The standard has been implemented taking advantage of the allowed degrees of freedom to optimize noise robustness. Key points of the algorithm are automatization of the whole measurement procedure and customization, to comply with specific needs. Experimental results confirming the successful implementation are presented and discussed.
SNOTRA LLC has developed a new scanning probe nanotomography technology that allows for non-destructive 3D analysis of native nanoscale structures in soft materials like biomaterials and polymers. This novel technology combines scanning probe microscopy and cryoultramicrotomy to provide 3D structural information not available through other existing methods. SNOTRA has built a working prototype, published results in scientific journals, and is seeking partners for commercialization and further development through grant funding.
Integrated Optics and Lightwave : An International Journaloptljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
Integrated Optics and Light wave: An International Journal ( OPTLJ )optljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
Integrated Optics and Light wave: An International Journal ( OPTLJ )optljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
Integrated Optics and Light wave: An International Journal ( OPTLJ )optljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
Integrated Optics and Light wave: An International Journal ( OPTLJ )optljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
Integrated Optics and Light wave: An International Journal ( OPTLJ )optljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
REPORT on the Activities of Core FacilitiesCeitecNano
The document reports on the activities of core facilities for nanofabrication, nanocharacterization, and structural analysis at CEITEC. It provides a timeline of the facilities' development since 2008 and outlines their vision, staff, instruments, usage, costs, services, technological capabilities, organizational structure, and collaborations. The facilities aim to provide researchers open access to cutting-edge instrumentation through training and expert support. Summaries of several collaboration projects demonstrate how the facilities support multidisciplinary research.
Integrated Optics and Light wave: An International Journal ( OPTLJ )optljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
Integrated Optics and Light wave: An International Journal ( OPTLJ )optljjournal
Innovations in optical fiber technology are revolutionizing world communications. Newly developed Optical fibers and amplifiers allow direct transmission of high-speed signals over transcontinental distances without the need for electronic regeneration. Optical fibers find new applications in data processing. The impact of fiber materials, devices and systems on communications in the coming decades will create an abundance of primary literature and the need for up-to-date reviews.
Integrated Optics and Light wave: An International Journal ( OPTLJ )
Our expertises
1. OPTIC NANO Consult S.A.R.L provides a Scientific Support in Spectroscopic ellipsometry and
Polarimetry metrology collaborating with research institute, laboratories as well as foundries. The field
of our applications is mostly devoted for thin films and new materials for nanotechnologies. OPTIC
NANO Consult S.A.R.L, just began, in July 2011 when entering in the French commercial register. It’s
WebSite* also retrieves many useful general information’s and not only to registered visitors. Our
metrological expertise, is based from many years of practice in the field, as well as following the
continuously updated new development in the optical technics. Advanced measurements technologies
and metrological standardization practices (reference material artifacts, traceability, uncertainty
analysis, and report transparency), underpin the modern, science-based approach that we try to
share. Years of research experiences in the earlier CNET and successively STMicroelectronics,
CEA/LETI MINATEC CNRS as well as our relationship with the sharp-edged optical tool instrument
developers and providers in Europe (early SOPRA, Jobin Yvon, now HORIBA and SEMILAB) and J.
Woollam or recent Film Sense from B. Johs in the US give us a great flexibility in contacts. We share
our experience giving advice with the choice of the right tools. An example was the first capability to
analyze the transition edge of SiO2 using a homemade VUV ellipsometer (3eV to 9.5 eV) at a moment
when J. Woollam equivalent instrument was not yet commercialized, (see SiO2 2006 conference in
Italy). We are within European or national project as well. (ANR or IMPACT project). OPTICNANO aim
is to give expert attention within global research environment, i.e.., inside group like SERMA
Technologies, the LETI unique subsidiary metrology potential of MINATEC. Then one has a complete
set of tools for characterization analyses (TEM, SIMS...). The use of complementary techniques
affords answer to new products, materials and films investigations. This is mandatory when
challenging properties existing between competitors in confront of concurrency techniques.
Nevertheless, this consulting expertise start always with specific roadmap agreement preserving
confidentiality through distinctive kickoff-meetings and inside a non-disclosure NDA protocol. The
results is a low cost of R and D studies.
Present expertise interest in the SRT-i24 of EMPIR:
Modeling:
http://www.opticnano.eu
see F. Ferrieu poster in first nanocharm workshop in advanced Polarimetry Instrumentation
and corresponding paper published in EJAP (Journal. European Applied physics, (2010)).
2. Polarimetry has been applied for many years in rather different fields. In radar remote sensing
polarimetry, mathematical basis of depolarizing systems have been first developed. In the visible
range optics, standard attenuation and retardance decomposition is currently used in turbid organic
media. Optical entropy and depolarization formalism have been applied for many years in rather
different fields. In radar remote polarimetry, mathematical basis of depolarizing systems have been
first developed from S. Cloude and E. Pottier (ESA). The technic is also presently developed in
astronomy as used for solar physics and exo planet detections (Leiden Workshop NL in 24 March
2014 and ASTROPOL Grenoble 20-30 may 2014).
Exhaustive studies in the literature detail the Mueller matrices properties through
decomposition*.Today, spectroscopic polarimetry opens new fields of investigation for
nanotechnologies materials, photonics as well as for gratings and 3D structures analysis: the
computer codes as these we developed during the national consortium ANR08-NANO-020-03 should
be then adapted using also new algorithms. With this instrumentation progress, simulation remains a
key point to overpass as a challenge between future instruments. The theories for surfaces spectral
power density (PSD) and the random coupled wave approximation (RCWA) in periodic structures are
widely discussed in the literature. The implementation of some of these codes is mandatory for surface
analysis and lithography Scatterometry structures: grating and overlay. Optical measurements in multi
parameter metrology are key points when combining models and measurements. We have interest in
studying models for different structures dimension and overlay detections such as these used for
control of the lithographic process. Exhaustive studies in the literature already detail the Mueller
matrices properties through decomposition, optical entropy and depolarization formalism. In the visible
range optics, standard diattenuation and retardance decompositions are currently used in turbid
organic media by the LPICM group for medical applications. For nanotechnologies, the optical entropy
concept provides a very powerful analysis technique yielding important surface parameters such as
depolarization, correlation and roughness. Complementary applications exist in scatterometry for thin
periodic grating films with high capability polarimeters, such as the next generation of angle resolved
polarimeters instruments,
In the nanotechnology world, the optical entropy concept is an analysis technique yielding important
surface parameters such as depolarization, correlation and roughness. Complementary applications
http://www.opticnano.eu
see F. Ferrieu poster in first nanocharm workshop in advanced Polarimetry Instrumentation
and corresponding paper published in EJAP (Journal. European Applied physics, (2010)).
3. exist in scatterometry for thin periodic grating films. The next generation of angle resolved polarimeters
instruments from the LPICM opens new fields of investigation for nanotechnologies materials as well
as for gratings and photonics structures analysis. The implementation of new computer codes will be a
must for surface analysis and lithography, e.g. in scatterometry structures: grating overlay or double
patterning. Polarimetry of light scattered by surface roughness and textured films and periodic
structures in nanotechnologies is a challenge for Instrumentation and modeling. It implies also
dimensional metrology on complex 3D structures within present new 3D STANDFORD Lua codes or
the nodal finite elements Galerkin methods developed at the EPFL. We would participate in the
development and validation of these novel promising optical metrology approaches, i.e., scatterometry
for EUV as well as for IR, Mueller-Polarimetry. Extension of modelling and data analysis algorithms in
particular to 3D development of mathematical procedures for reliable determination of roughness
parameters and other systematic deviations (e.g. variations in multilayer substrates of EUV masks).
These known procedures have been now developed and are available, but they have also to be
significantly further improved to face the named challenges and expected methodical extensions (e. g.
in Mueller Polarimetry with enhanced structure complexity.
Instruments
We have demonstrated capabilities in the metrology for structures in the state of the art of optical
methods, like optical reflectometry, scatterometry or ellipsometry in the infrared (IR), visible (VIS) or
ultraviolet (UV/DUV) spectral range. In the case of IR, we supported the implementation of the LPICM
IR polarimeters in one of the lines at ESRF, (today unfortunately unrealizable and thus abandoned),
even though completely different from the only one instrument implemented at BESSY. Spectroscopic
ellipsometry or reflectometry are also used for characterizations of thin layers, layer structures and
optical material parameters (n&k, see EMPIR accuracy requests). With this instrumentation progress,
simulation remains a key point to overpass as a challenge between future instruments as that was
within the LTM IMPACT program todays under completion. However, for future applications with
complex layer structures, these methods have to be significantly improved. For ultrathin layers or very
small laterally structured features the optical material parameters can be often modified e. g. due to
quantum confinement as it has detected e.g. in the case of FDSOI, quantum dots and nanophase
materials (e.g. in HfO2). For new applications and clean room processing quality control, very accurate
http://www.opticnano.eu
see F. Ferrieu poster in first nanocharm workshop in advanced Polarimetry Instrumentation
and corresponding paper published in EJAP (Journal. European Applied physics, (2010)).
4. n&k metrology existing tools are not very suitable and enough accurate. Creation of IMT instruments
(integrated photonic metrology with for example micro-grid polarizer and LC phaser), is also our
concern as we already proposed, unfortunately unpublished but still remaining in the conference
proceeding abstracts booklet from the IECS in Kyoto (2013).
http://www.opticnano.eu
see F. Ferrieu poster in first nanocharm workshop in advanced Polarimetry Instrumentation
and corresponding paper published in EJAP (Journal. European Applied physics, (2010)).