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Block Copolymers as a Tool for Nanomaterial
Fabrication
Article in Advanced Materials · October 2003
DOI: 10.1002/adma.200300382
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REVIEW
Block Copolymers as a Tool
for Nanomaterial Fabrication**
By Massimo Lazzari*
and M. Arturo López-Quintela*
In this review the latest developments regarding the use of self-assembled copolymers
for the fabrication of nanomaterials will be presented and their real potential evaluated. Most of the strategies reported so far are herewith classified under two main
approaches: a) use of block copolymers as nanostructured materials, either ªas they
areº or through a selective isolation of one or more component blocks, and b) as templates for the synthesis of metallic or semiconducting nanomaterials. The problems of
the orientation and large-scale order of self-organizing block copolymer mesophases
will be also introduced, due to their importance as a route towards further improvements of the nanofabrication means.
1. Introduction
The fabrication of systems having characteristic dimensions
smaller than 100 nm requires the ability to obtain, control,
manipulate, and modify structures at the nanometer length
scale, a step beyond microtechnology. It is well established
that microstructured materials may be industrially prepared,
e.g., by photolithography, but as the demand for smaller and
smaller feature sizes always impose to lower the current stateof-the-art limits, further steps towards miniaturization have
been raised in the last decade, focusing on different and more
suitable strategies, which are based on both ªtop±downº and
ªbottom±upº approaches. Many methods for the fabrication
of nanomaterials have been proposed, mainly to meet the de-
±
[*] Dr. M. Lazzari[+]
Dept. of Chemistry IPM
University of Torino
Via P. Giuria 7, I-10125 Torino (Italy)
E-mail: massimo.lazzari@unito.it
Prof. M. A. López-Quintela
Dept. of Physical Chemistry
University of Santiago de Compostela
E-15782 Santiago de Compostela (Spain)
E-mail: qfarturo@usc.es
[+] Current address: Magnetism and Nanotechnology Laboratory, Institute
of Technological Investigations, University of Santiago de Compostela,
E-15782 Santiago de Compostela, Spain. E-mail: qflzzmsm@usc.es
[**] Our own activities in the field are financed by the Ministerio de Ciencia y
Tecnologia. (MAT2002-00824: Synthesis and properties of 1D, 2D, and 3D
magnetic nanomaterials). M. L. also acknowledges the financial support
from the European Union for his stay at the University of Santiago
(MCFI-2001-0837: Polymeric membranes with tunable nanochannels for
the electrodeposition of metal nanowires) and the University of Torino
for conceding research leave.
Adv. Mater. 2003, 15, No. 19, October 2
DOI: 10.1002/adma.200300382
mand of the microelectronic industries, ranging from milling
techniques to non-traditional photolitographic and chemical
methods, with a strong prevalence of methods based on template synthesis.[1] However, their main weakness still remain
in the difficult and poor control of the final morphology of the
produced nanostructures. In such a sense polymers represent
ideal nanoscale tools,[2] not only due to their intrinsic dimensions, ease of synthesis and processing, strict control of architecture and chemical functionality, but also because of their
peculiar mesophase separation both in bulk and in solution,
particularly in the case of block copolymers (BCs).[3±5]
BCs may be considered as two or more chemically homogeneous polymer fragments, i.e., homopolymer chains, joined together by covalent bonds to form more complex macromolecules such as linear di-, tri-, or multiblock copolymers, and
nonlinear architectures such as multiarm, starblock, or graft
copolymers. In the frequent case of immiscibility among the
constituent polymers, the competing thermodynamic effects
give rise to different kind of self-assembled morphologies, depending both in structural and dimensional terms on composition, segmental interaction, and molecular weights, and having periodicity suitable for application in nanotechnology.[6]
The existence of some morphologies can be theoretically predicted within the self-consistent field theory,[7] on the basis of
the volume fraction of the components, the number of segments in the copolymer, and the Flory±Huggins interaction
parameter, as is the case for the spherical, cylindrical, gyroid,
and lamellar phases, which have been observed in the simplest
amorphous diblock copolymers. Particularly in the case of
more complex systems, differences from the theoretical predictions can, however, be expected, mainly because of chain
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fluctuations and conformational block asymmetries. Also for
this reason, more recent efforts have focused on ordered
structures obtained from BCs having both rigid and flexible
segments,[8] and also from triblock and even tetrablock copolymers, with the observation of a series of novel and unconventional morphologies such as zig±zag,[9] core±shell double
gyroid,[10] spheres or rods between lamellae,[11] helices around
cylinders,[12] and hexagonal double[10] or triple[13] coaxial cylinder structures. A few of these morphologies, the ones most
frequently used for nanofabrication, are illustrated schematically in Figure 1.
Moreover, separation and orientation of domains are also
influenced, especially in thin films, by surface±interfacial interactions as well as by the interplay between structural periodicity and film thickness.[14] Such molecular self-assembly of
block copolymers therefore allows one to obtain in a simple
manner a large variety of highly regular mesostructures without any direct human intervention, in a way similar to processes occurring commonly throughout nature.[15]
The potential technological application of such variety of
mesostructures, and particularly of those formed in the case
of thin films, can be easily appreciated by non-specialists alike
and has been widely recognized, e.g., since the first successful
attempts to use self-assembly strategy for the preparation of
membranes with tunable nanochannels[16] and the early block
copolymer-based nanolithography,[17] but only partially explored. In this review, the recent developments regarding the
Fig. 1. Sketches of equilibrium morphologies from BC self-assembly, among the
most frequently used for nanofabrication. For diblock copolymers in bulk:
body-centered cubic-packed spheres (1), hexagonally ordered cylinders (2),
lamellae (3). For triblock copolymers: lamellae (4), hexagonal coaxial cylinders
(5), spheres between lamellae (6). For amphiphilic BCs in solution: spherical
micelles (7), and cylindrical micelles (8). Periodicities, or micellar dimensions,
are in the range 10±100 nm.
use of BCs as a tool for the fabrication of nanomaterials are
presented, paying also attention to the possible application of
amphiphilic BCs (Fig. 1), i.e., copolymers having both hydrophilic and hydrophobic blocks.[18] Nanomaterial synthesis is
herewith considered in its broader sense with the aim to include the most diverse aspects, from the direct use of self-as-
Massimo Lazzari studied Chemistry at the University of Torino (Italy) from 1986 to 1990. During the following years, his research focused on the characterization of copolymers (EnichemÐ
Research Centre of Mantova, Italy). He did his Ph.D. with Prof. O. Chiantore. After two years
postdoctoral work with Prof. K. Hatada at the Osaka University (Osaka, Japan), where he
learned the secrets of anionic polymerization, he joined the Group of Polymeric Materials at the
University of Torino in 1998, working on the characterization and degradation of complex
polymer systems. He is currently at the University of Santiago, Laboratory of Magnetism and
Nanotechnology (Santiago de Compostela, Spain) as visiting Professor. His current research
interests are focused on the synthesis and controlled degradation of self-assembling copolymers,
with special attention on their use as templates for the fabrication of metal nanomaterials.
M. Arturo Lopez-Quintela studied Chemistry at the University of Santiago de Compostela
(Spain) from 1970 to 1975. After finishing his PhD in chemical kinetics, his research focused on
chemical reactions in non-homogenous media. After postdoctoral work in Germany at the MaxPlanck-Institut für Biophysikalische Chemie, Göttingen, and at University of Bielefeld (1980-84)
he came back to the University of Santiago de Compostela as Professor of Physical Chemistry.
In collaboration with Prof. J. Rivas from the Applied Physics Department, he created a Laboratory of Nanotechnology in 1988. In 1990 and 1991 he spent several months at the Max-PlanckInstitut für Metallforschung, Stuttgart, and at the Centre for Magnetic Recording Research,
UCLA, USA, working in hard and soft magnetic nanomaterials. In 2001±2002 he spent a sabbatical year in Japan at the Yokohama National University (Prof. Kunieda) and at the Research
Center for Materials Science (Prof. Imae) working in phase diagrams and microstructure of
diblock copolymers and surfactants, and incorporation of nanoparticles into dendrimers. His
current research interests are focused on the synthesis of magnetic nanomaterials, using different
kinds of templates, by chemical and electrochemical methods.
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2. Block Copolymers as Nanomaterials
REVIEW
sembled nanostructures, to processes based on BCs either in
solution or as thin films for the fabrication of nanodevices or
of metallic or semiconducting nanostructures, through the
more general preparation of polymeric nano-objects as
spheres, rods, or tubes. All of them are suitable for technological application or of remarkable interest as model objects,
which can have fascinating properties or are simply intended
as an academic exercise.
Most of the strategies developed so far may be classified
into two different main approaches to nanomaterial fabrication, which are schematically discussed in the paper as follows: a) use of self-assembled copolymers as nanostructured
materials, either ªas they areº or through selective chemical
isolation or processing of one or more components; b) via
template formation, including both the use of copolymer films
directly as the template and the fabrication techniques, which
rely on the preliminary formation of the template through a
first processing, followed by a nanoscale synthesis. Methods
presenting original approaches or requiring innovative manipulation will be especially emphasized, also taking into account
their potential for large scale applications.
As the scope of the review is limited by space, although also
BC/ceramic hybrid materials[19] and, more generally, BC
nanocomposites[20] are extensively researched subjects, their
potential for the preparation of novel materials and nano-objects is not discussed here. However, it is possible to extend
the applicability of the methodologies of fabrication herewith
shown to any other BC-based material.
2.1. Polymeric Nano-objects
Different types of self-assembling BCs have been used to
prepare individual polymeric nano-objects, with each method
having its advantages and limitations. In principle any of the
mesostructures in bulk so far reported, and even those still
not discovered, could be used to create well-defined objects
with predetermined shapes, sizes, and compositions. For example, polymeric spheres, rods, or fibers are obtainable by
some direct chemical isolation from the simplest spherical and
cylindrical morphologies (Fig. 1, items 1 and 2, respectively).
The most complete investigation focused on this concept
has been carried out by Liu et al., and is based on block copolymers, which contain crosslinkable moieties.[24] Nanofibers
can be easily prepared from poly(styrene)-block-poly(2-cinnamoethyl methacrylate) (PS-b-PCEMA)[25] and poly(styrene)block-poly(isoprene) (PS-b-PI)[26] diblock copolymers, properly selecting samples which allow a hexagonally packed cylinder morphology (Fig. 1, 2) of the non-styrenic block dispersed in the continuous matrix of the PS block. Following
Liu's strategy, the cylindrical domains of the minority block
are locked in by crosslinking, either photoinduced or through
chemical processes, on PCEMA and PI chains, respectively.
After fixing the structure, nanofibers with PS hairs on their
surface are easily separated via solvent dispersion in tetrahydrofurane (THF), i.e., a good solvent for PS, but they can retain their structural integrity in many other organic solvents.
From the structural point of view, such BC nanofibers may be
considered as the macroscopic counterparts of polymeric
chains (suprapolymer chains) and, in principle, are suitable
for characterization and fractionation through the techniques
that have been developed for polymers. Among their peculiar
solution properties[27] it is worth mentioning the formation of
lyotropic liquid-crystalline phases.[25]
A similar but more complex procedure which applies a
triblock copolymer is also suitable for the preparation of
nanotubes having inner hydrophilic walls,[28] as it is schematized in Figure 2. Self-assembly in thin films of poly(butyl
methacrylate)-block-poly(2-cinnamoethyl methacrylate)-blockpoly-(tert-butyl acrylate) (PBMA-b-PCEMA-b-PtBA) triblock
copolymers with higher content in PBMA formed hexagonally
packed concentric cylinders of PtBA surrounded by PCEMA
Direct use of the self-assembled BC morphologies without
any further manipulation or processing appears quite intriguing, but so far only a few potential applications have been seriously explored, mainly taking advantage of the BC optical
properties or of the electrical conductivity of at least one
block. Fink et al.[21] introduced the idea of using one-, two-,
and three-dimensional (1D, 2D, and 3D, respectively) BC periodic structures (e.g., morphologies 2±5 in Fig. 1) as photonic
crystals, namely materials in which the refractive index is a
periodic function of space. For a rigorous analysis of the real
promise that BC thin films can offer to photonic
applications, as well as for the illustration of the
major technological challenges still to overcome in
order to achieve the desired photonic properties,
the reading of two recently published reviews is
suggested.[22] Another potential direct application
of BC nanostructures deals with the preparation of
BCs containing conducting polymers or oligomer
units. In particular, McCullough and co-workers
have focused their investigation on a series of polythiophene-based BCs,[23] which pave the way to utiFig. 2. Schematic representation of the process for the preparation of nanotubes from a PBMAlize conjugated polymers for molecular level elecb-PCEMA-b-PtBA triblock copolymer (reprinted with permission from Yian et al. [28], copytronic devices.
right 2001 American Chemical Society).
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and dispersed in the PBMA matrix (Fig. 1, 5). Once more the
PCEMA shells are photo-crosslinked by UV irradiation, and
the cylindrical domains separated from one another in THF,
yielding nanofiber dispersions. Due to their core±shell structure these nanofibers may be further processed through a selective hydrolysis of tert-butyl groups of PtBA to yield poly
(acrylic acid) (PAA)-lined nanotubes of PBMA-b-PCEMA.
The location of acid groups inside the cores was elegantly
demonstrated by reporting the production of c-Fe2O3-impregnated nanotubes (Fig. 3) through a method based on the hydrophilic interaction with ferrous ions. This shows, at the same
time, the potential offered by this synthetic route to prepare
hollow nanostructures with an inner diameter of about 40 nm.
Fig. 3. Transmission electron micrograph of c-Fe2O3-impregnated PBMA-bPCEMA nanotubes with PAA-lined inner walls (reprinted with permission
from Yian et al. [28], copyright 2001 American Chemical Society).
Other complex objects have been created via the synthetic
detour through the bulk phase of triblock copolymer films
which exhibit the so-called lamellae±sphere morphology, with
spheres narrowly distributed at the interface of the lamellae
(Fig. 1, item 6). Crosslinking in the bulk of the block that
forms spherical domains leads to the conservation of the compartmentalization of the other blocks after dissolution in a
selective solvent. Janus-type[29] nanoparticles consisting of an
interlocked core about 10 nm in radius and a corona with two
well-separated hemispheres were synthesized from poly(styrene)-block-poly(2-vinylpyridine)-block-poly(butyl methacrylate) (PS-b-PVP-b-PBMA)[30] and poly(styrene)-block-poly
(butadiene)-block-poly(methyl methacrylate) (PS-b-PB-bPMMA)[31] of tailored compositions through crosslinking of
the PVP and PB blocks, respectively.
It is finally worth mentioning that polymeric nanofibers
have also been prepared from self-organizing supramolecules
(also called supramolecular BCs).[32] Poly(4-vinylpyridine)block-poly(styrene) (P4VP-b-PS) diblock copolymers were
stoichiometrically (with respect to the number of pyridine
groups that act as hydrogen bonding acceptors) combined
with a low molecular weight amphiphile, namely pentadecylphenol (PDP), to yield P4VP(PDP)-b-PS supramolecules.[33]
Proper selection of the volume ratio between the P4VP(PDP)
complex and the PS block allowed the formation of a morphology of PS cylinders inside a P4VP(PDP) matrix (see
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Fig. 1, 2-like). Subsequent removal of PDP with ethanol,
which is a good solvent for the P4VP block as well, yields PS
nanofibers. The straightforward merit of this proposal is that
the simple choice of different alkylphenols or other amphiphilic additives would allow tuning of the supramolecular BC
self-organization and therefore controlling the shape of the
isolable objects, without the requirement of a time consuming
new BC synthesis. Moreover, countless many BC±amphiphile
pairs with different morphologies can easily be envisaged,
thus illustrating a facile concept of fabrication aimed to introduce novel design principles for the prediction of nanostructures.
A further type of processing, which can in principle be considered as specular to the isolation of polymeric nano-objects
from thin films, is that leading to porous nanostructures. It is
well known that commercially available membranes for ultrafiltration purposes can easily be prepared by track-etching
from polymeric sheets.[34] However, the resulting nanopores
(diameter as small as 10 nm) are not regularly packed and
their density is low, whereas in the case of BC thin films, the
selective degradation of e.g., cylindrical domains in morphology 2 (Fig. 1), may result in the formation of more homogeneous membranes. For example, membranes with regularly
spaced nanochannels with diameters of 20±30 nm and periodicities of around 50 nm have been prepared from PCEMA-bPtBA (through hydrolysis of the PtBA minor block),[35] and
bicontinuous nanoporous networks from PS-b-PI (via ozone
degradation of the PI minor block).[16] 3D nanostructured
films have also been produced from silicon-containing triblock copolymers films through the selective removal of the
hydrocarbon block and the conversion of the silicon-containing block to a highly stable silicon oxycarbide ceramic.[36] As
these highly ordered nanoporous membranes have also been
extensively investigated as templates, the last developments
regarding their preparation and the solution of the non-trivial
problem of the orientation of the domains will be discussed in
detail in Section 3.
Another general approach for the preparation of nano-objects is based on amphiphilic BCs.[18] In a solvent that preferentially dissolves one block, often an aqueous media or a polar solvent, these copolymers form well-defined micelles with
a core consisting of the less soluble block(s) and a highly swollen corona of the more soluble block.[37] Depending on the degree of swelling of the corona and the relative composition of
the copolymer, spherical (Fig. 1, 7) and worm- or rod-like
(Fig. 1, 8) micelles are formed, as well as more complex polymer vesicles[38] and compound micelles.[39] A specific case is
that of the so-called crew-cut aggregates, which are formed by
amphiphilic BCs having a short hydrophilic block.[40] Aggregates are prepared by first dissolving the BC in a good solvent
for both blocks, and subsequently adding water or decreasing
the temperature to cause aggregation of the hydrophobic
block into a variety of morphologies, which resemble those of
typical micelles.
Although only crew-cut micelle-like aggregates directly refer to objects existing under non-equilibrium conditions, also
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Fig. 4. Schematic illustration of the formation of ªhardº micelles from PEO-bPDMA-b-PDEA triblock copolymers by crosslinking of the PDMA inner shells
with 1,2-bis(2-iodoethyloxy)ethane (BIEE) [44].
PDEA core, and show a degree of (de)swelling strictly dependent on the degree of inner-shell crosslinking, PDEA block
length, and solution pH. Furthermore, Underhill and Liu
reported the preparation of hollow triblock nanospheres[45]
following an approach based on the methodology already presented in Figure 2. A PI-b-PCEMA-b-PtBA, with 370 isoprene, 420 CEMA, and 350 tBA units, was used to form three
layer ªonion-likeº micelles in THF comprising PI-hydroxylated coronas, solvent insoluble PCEMA shells, and PtBA cores.
The structures were locked by photo-crosslinking the
PCEMA shell to yield ªhardº nanospheres. The core was cavitated and made compatible with inorganic species by removal
of the tert-butyl groups through controlled hydrolysis. A similar approach has also been used for the preparation of nanotubes, i.e., hollow cylindrical micelles, in methanol from a dif-
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ferent PI-b-PCEMA-b-PtBA.[46] The PCEMA shell of the
cylindrical micelle was photo-crosslinked, in this case followed by the complete degradation of the PI core through
ozonolysis. The dispersion medium for the whole structure
was provided by the high molecular weight PtBA corona.
Fixation of non-spherical micelles to get individual macromolecular objects with molar masses several orders of magnitude greater than those of conventional polymers has been
mainly investigated by Bates and co-workers, around 20 years
later the first impressive images of collapsed BC worm-like
micelles.[37b,c] Self-assembly of a low molecular weight poly(ethylene oxide)-block-poly(butadiene) (PEO-b-PB) containing 50 wt.-% of PEO gave rise to the formation of worm-like
micelles at low concentration in water (< 5 wt.-%), while the
presence of reactive double bonds in the PB cores allowed the
use of a conventional water-based crosslinker without disruption of the cylindrical morphology (Fig. 5).[47] The authors
also pointed out the irreplaceable utilization of these covalently bonded giant macromolecules as model nano-objects,
thus investigating their peculiar rheological properties.[48] In
our opinion, such results represent the best example of a direct comparison between the properties of ªlivingº, less
stable, micellar systems and those of ªpermanentº micelles.
Fig. 5. Cryo-transmission electron micrograph of a 0.05 wt.- % solution in water
of crosslinked worm-like micelles of PEO-b-PB (reprinted with permission
from Won et al. [47], copyright 1999 American Association for the Advancement of Science).
Also the intrinsic properties of amphiphilic rod±coil diblock
copolymers have been exploited for the fabrication of ªhardº
micelles. These polymers, consisting of a flexible block attached to a rigid or semi-rigid second block, present morphologies that result from the competition between microphase
separation of the immiscible blocks and aggregation of the
rod-segments into crystalline domains. Those polymers, in
which the crystalline blocks are also insoluble, may self-assemble into micelles, whose core structure depends on the
strong crystal packing forces. Manners and Winnik have investigated the structures formed from poly(ferrocenylsilane)block-poly(dimethylsiloxane) (PFS-b-PDMS) in hydrocarbon
solvents in which the PFS block is insoluble. Some of these co-
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the stability of micellar associates in thermodynamic equilibrium depends on phenomena that involve basic molecular interactions, as such ªsoftº assemblies are held together essentially
by weak undirected forces (van der Waals forces, hydrophobic
effects). As a consequence, all the structures constructed with
these macromolecular amphiphiles are not only non-permanent, but even a relatively slight change in the physical conditions that resulted in the original self-assembly can completely
disrupt them. For this reason, notwithstanding micelles and
crew-cut aggregates have been a popular subject of research
activity, the impossibility to fractionate these nano-objects
make them far from the philosophy of nanomaterial fabrication that this review aims to highlight. Only the development
of tailored amphiphile-based materials that are less sensible
to environmental perturbation will therefore be documented
in detail.
Successful approaches for the preparation of stable micelles
consist of the use of amphiphilic BCs that either have reactive
functional groups or a block which can crystallize, in both
cases with the final aim to fix the micellar structures.[41] Since
the first systematic works on crosslinked micelles,[42] increasing interest has been focused on the chemical fixation of more
and more complex structures,[43] up to triblock micelles with
surprising characteristics such as tunable hydrophilic or hollow cores. For example, Armes and co-workers[44] has developed an efficient synthesis of micelles with pH-responsive
cores from a series of poly(ethylene oxide)-block-poly[2-(dimethylamino)ethyl methacrylate]-block-poly[2-(diethylamino) methacrylate] (PEO-b-PDMA-b-PDEA) triblock copolymers (Fig. 4). The micelles formed in aqueous solution at
> pH 7.3 consist of a PEO corona, a PDMA innershell, and a
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polymers formed long, thin, relatively flexible cylindrical micelles having a crystalline PFS core,[49] while in the case of the
highly asymmetric PFS-b-PDMS with a block ratio of 1:12 the
samples generated a tubular morphology.[50] In the latter case,
when aggregation occurs, the short PFS block crystallizes to
form a shell with a central cavity, surrounded by a solvent
swollen PDMS corona. These equilibrium structures are
stable in a wide range of temperatures, and their structure was
confirmed by the encapsulation of Pb(n-Bu)4. The tubes
formed are up to 100 lm long and have both wall thickness
and interior cavity of ca. 10 nm (Fig. 6). As the authors suggested, the potential of these copolymers is intriguing, not
only for encapsulation purposes but particularly because PFS
is a red±ox material with semiconducting properties, which
can also serve as ceramic precursor.[36]
the use of 2D-ordered morphologies from diblock copolymer
films, which are processed through the eventual removal of
one of the blocks, and using the film as a mask for subsequent
deposition steps or etching through the film to transfer the
BC motif pattern to a substrate. This part will be followed by
an overview on the potential of amphiphilic BCs in solution
as templates.
3.1. Nanolithography
A prime satisfactory example of the utilization of BC thin
films as templates for lithography under conventional reactive
ion etching (RIE) techniques was provided by Park et al.,[17b]
who managed to transfer the spherical microdomain pattern
of a PS-b-PB monolayer to the underlying silicon nitride. Notwithstanding, further refinement of this technique, the two
processing approaches reproduced in Figure 7 still exemplify
the potential offered by nanolithography well. In general, as
the etching rates of different organic polymers are almost
identical, it is first necessary to resort to some manipulation
for enhancing the etching selectivity between the different regions. One approach involves the selective removal of one
Fig. 6. Chemical structure of PFS-b-PDMS and transmission electron microscopy image of its assemblies formed in n-decane (reprinted with permission from
Raez et al. [50], copyright 2002 American Chemical Society).
3. Block Copolymers as Templates
Many polymer systems have been successfully employed as
templates for nanofabrication,[1c,d,g,h] and among them, all the
above mentioned self-organizing BC systems may play a crucial role, mainly because of the variety of tunable matrixes at
nanoscale level that they offer, ranging from micelles to 3D
structures. Since the remarkable number of related works
published in journals of many different fields, e.g., chemistry,
physics, materials science, and engineering, and the possibility
of scale-up for industrial applications, a special emphasis will
first be placed on the sophisticated procedures to arrive at
continuous arrays of metallic or semiconducting objects from
BC thin films. The most common methods are those based on
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Fig. 7. Fabrication processes of silicon nitride dot (B) and hole (C) arrays via a
nanolithography template consisting of a uniform monolayer of hexagonally ordered PB spheres in a PS matrix (cross-sectional view in A). PB wets the interfaces with the air and the silicon nitride substrate due to preferential interactions (reprinted with permission from Park et al. [17b], copyright 1997
American Association for the Advancement of Science).
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REVIEW
block component before etching. For example, in Figure 7
(processing flow B) the spherical PB domains ordered in a 2D
hexagonal lattice are ozone degraded, leading to regular voids
in the PS matrix and hence to a variation in the thickness of
the mask. Once exposed to the etchings, the thinner parts of
the mask underneath the removed domains yield holes on the
substrate. Other procedures achieve etching contrast by loading one of the microphase separated blocks. In the case that
one block contains double bonds, it can selectively incorporate compounds containing transition metals possessing reactivity for unsaturated double bonds. In the processing shown
in Figure 7C, OsO4 staining PB reduces the etching rate of
such domains, producing an etching selectivity under CF4/O2±
RIE of PS to stained PB of approximately 2:1. When the plasma is applied, the regions below PB domains are partially
masked, resulting in the production of dots. Similar procedures have also been performed on PS-b-PI monolayers, in
both cases with the production of etched features on silicon,
silicon nitride, and germanium with a periodicity of 30±40 nm,
corresponding to a density of around 1011 cm±2, and an aspect
ratio of about one.[17b,51] More recently, the combination with
other microfabrication techniques has permitted the creation
of dense arrays of GaAs nanocrystals[52] and gold dots.[53] The
first were made through selective growing of GaAs into ordered holes patterned as reported above on a silicon nitride±
GaAs bilayer, while the latter where produced by combining
BC nanolithography with a trilayer resist technique, hence
transferring the pattern by different etching techniques from
the BC film to the underlying layers, down to the gold layer.
The real advantage this trilayer pattern-transfer method offers, despite its apparent complexity, is a viable route of general applicability for nanoscale patterning of different materials
on arbitrary surfaces. Moreover, the high aspect ratio holes
that are generated can be used for other applications, e.g.,
electroplating and elastomer molding.[54]
A simplification of the nanolithography process has consisted in approaches where ªimageableº BCs are used, in
which one of the blocks already contains components that
provide a barrier to etching, thus eliminating the preliminary
step, consisting of either the loading with inorganics or the selective removal of one block. Silicon-containing polymers,
and in particular BCs based on PFS (chemical structure in
Fig. 6),[55] have been proposed as good candidates, since they
can form a thin SixOyFez layer on the surface when exposed
to an oxygen plasma (O2±RIE). This results in a lower etching
rate and therefore in an etching selectivity that is as high as
50:1, in comparison with organic polymers. As an example,
Figure 8 shows the fabrication of a cobalt magnetic dot array
by lithography using a PS-b-PFS monolayer.[56] The first O2±
RIE step removes the organic part of the polymer and converts the PFS into the non-volatile iron±silicon oxides. The
spherical features of the template are transferred sequentially
through the silica, then the tungsten, and finally the cobalt,
with the formation of patterns A±D shown in Figure 9.
The main restriction for a wider use of all the above lithography processes is the limited aspect ratio and long-range or-
A
D
B
E
C
F
Fig. 8. Nanolithography fabrication of a cobalt dot array from PS-b-PFS.
A) Cross-sectional view of the spherical microdomain monolayer consisting of
PFS spheres ordered in a 2D hexagonal lattice on a multilayer of silica, tungsten
and cobalt. B) Formation of the mask through the O2±RIE process. C) Silica
patterning using CHF3±RIE. D) Tungsten patterning using CF4/O2±RIE.
E) Removal of silica and residual polymer by further CF4/O2±RIE at high pressure. F) Final formation of cobalt dots by ion beam etching [56].
der of the features fabricated by such monolayer masks. A
practical difficulty for the creation of higher (or deeper) features arises from the necessity to use thicker BC films with
suitable patterns, as might be the case with surface-perpendicular lamellae or cylinder morphologies (e.g., Fig. 1, items 2±
5). As mentioned in the introduction, the orientation of
domains is not at all a trivial problem, since their disposition
and long-range order are dependent upon the interaction with
the surfaces (usually a substrate and a free surface). Noteworthy efforts to understand and control the domain alignment in
BC morphologies have been carried out by several groups
through the investigation of the effect of external fields and
surface energy boundary conditions on the self-assembly process. These include the use of applied mechanical or electrical
fields,[57,58] applied temperature gradients,[59] solvent evaporation or crystallization,[60,61] and patterned or neutral surfaces.[62,63] The best results obtained so far, in terms of largearea ordering of domains and efficiency of orientation in
thicker films (up to few micrometers), were achieved from
directional crystallization of a solvent[61a] and application of
an electric field,[58a±c] respectively.
Despite of these promising results, the use of highly ordered
BC templates for nanolithography application is so far limited
to a surprisingly low number of cases, essentially based on
very thin films (< 50 nm thickness). In most investigations, PSb-PMMA films with PMMA cylinders normal to the surface
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M. Lazzari, M. A. López-Quintela/Block Copolymers for Nanomaterial Fabrication
A
B
3.2. Membrane-Based Synthesis
At the same time, the tuning of the procedure for the preparation of nanoporous
films with controlled spatial orientation (essentially carried out by Russell and coworkers)[66] has also constituted a decisive
step forward in membrane-based nanofabrication.[1d,i] Synthesis of nano-objects via
chemical- or electrodeposition[67,68] into
particle track-etched polymeric membranes
are performed with well established proceC
D
dures, and the introduction of a versatile
and robust route to the fabrication of
densely packed nanoporous arrays (as those
shown in Fig. 10) certainly opened up novel
unprecedented
developments.[69]
Two
groundbreaking papers have recently reported the electrodeposition of ferromagnetic cobalt nanowires,[70] and the chemical
deposition of nanoscopic SiO2 posts[71] into
nanoporous films used as scaffolds. In both
Fig. 9. Tilted scanning electron microscopy image of the intermediate stages of the PS-b-PFS nanolithography. A±D) Images correspond to the different patterns after the stages B,C,E,F as schematized in
cases, a template was used, which was genFigure 8 [56].
erated by selective removal of PMMA domains from PS-b-PMMA films with hexagonally packed cylinder morphology and oriented normal to
and dispersed in the PS matrix were obtained by deposition
the surface either by application of an electric field[58b] or deonto a neutral surface,[63a] and subsequently transformed into
position onto a neutral substrate.[63a] The corresponding proa nanoporous template by elimination of PMMA domains via
cessing flows are shown in Figures 11,12 (the steps are deUV degradation. Such masks have found applications for
scribed in detail in the captions), while images of the arrays of
transferring the pattern (Fig. 10) over full silicon wafers and
into various substrate materials[64] including antiferromagnet±
ferromagnet bilayers, such as a FeF2±Fe bilayer.[65]
Fig. 10. Scanning electron microscopy images of a nanoporous template formed
from a 40 nm thick film of PS-b-PMMA self-assembled in a hexagonally ordered cylinder morphology normal to the surface. Dark regions correspond to
the pores (< 20 nm diameter) from which PMMA microdomains were removed
by UV degradation (reprinted with permission from Guarini et al. [64a], copyright 2001 AVSÐThe Science & Technology Society).
And finally, BC nanolithographic techniques certainly offer
unprecedented feature dimensions and densities well below
the photolithographic resolution limits, but this may not be
the only key advantage of BCs in the near future. At least as
important is that the feature sizes may be realized over
macroscopically larger areas than by standard top±down approaches.
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Fig. 11. Process of fabrication of cobalt nanowire arrays with densities in excess
of 1.9 1011 wires cm±2. A 1 lm thick film of PS-b-PMMA is annealed above
the glass-transition temperature of both blocks between an electric field, in
order to form a hexagonally ordered cylinder morphology normal to the electrodes (A). After removal of PMMA microdomains by UV degradation a nanoporous film (B) is left, which is used for the controlled electrodeposition of
nanowires (approximate diameter 15 nm, C), thus forming an array of nanowires within the PS matrix (reprinted with permission from Thurn-Albrecht et
al. [70], copyright 2000 American Association for the Advancement of Science).
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Adv. Mater. 2003, 15, No. 19, October 2
M. Lazzari, M. A. López-Quintela/Block Copolymers for Nanomaterial Fabrication
SiO2 are presented in Figure 13. In any case, the impact of
these highly ordered templates might be much broader, as
they offer different practical means of producing tailored
nanostructures. More recent publications demonstrated few
other likely routes, such as processing to high-density arrays
of chromium, and layered gold±chromium nanodots and
nanoholes by evaporation onto nanoporous templates.[72] In
addition, such nanoporous membranes have been proposed
for the creation of nanoelectrode arrays.[73]
A
B
Fig. 13. Atomic force microscopy height (A) and phase (B) images of the SiO2
nanoposts fabricated as schematized in Figure 12 (adapted from H.-C. Kim et
al. [71]). The size of the images is approximately 1 lm 1 lm.
3.3. Amphiphilic Block Copolymer Templates
The formation of ordered patterns is also possible by assembling BC micelles upon casting,[74] with a major interest in
terms of potential applications in nanotechnology placed on
Adv. Mater. 2003, 15, No. 19, October 2
http://www.advmat.de
Fig. 14. Transmission electron microscopy image of a PS-b-PAA monolayer
(film thickness 22 nm) containing silver nanoclusters. Silver was loaded as silver
acetate in aqueous solution and reduced in a hydrogen atmosphere (reprinted
with permission from Boontongkong and Cohen [78], copyright 2002 American
Chemical Society).
non-polar solvent. A large variety of inorganic compounds can
be loaded in the micellar polar cores and, in principle, their
chemical transformation can be performed either before or
after film deposition. At the same time, a large number of substrates can be used. It is also worth mentioning that the polymer can be removed after deposition, leaving on the substrate
an inorganic nanopattern suitable for other applications, such
as nanolithographic masks. Möller and co-workers reported
the application of this approach for the fabrication of quantum
structures with a very high aspect ratio of 1:10 and dimensions
down to 10 nm.[79] The metal cluster mask resulting from a
monolayer of Au-loaded PS-b-PVP micelles has been used in
a chlorine dry etching process to etch free-standing cylinders
in GaAs and its alloys on In and Al. This combination of standard and bottom±up lithography can be applied on virtually
any semiconductor material and could widen the possibility of
technological application of quantum dot devices.
Ó 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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REVIEW
Fig. 12. Process of fabrication of SiO2 nanoposts. A PS-b-PMMA thin film (A)
is selectively degraded to form a nanoporous template like that in Figure 10.
SiO2 is grown within the nanoporous (B) by SiCl4 hydrolysis with atmospheric
water, then SiO2 nanoposts are left after removing PS matrix with CF4±RIE
(C, Kim et al. [71]).
laterally ordered hexagonal array of spherical micelles (Fig. 1,
item 7, with dimensions falling in the approximate 10±100 nm
range) deposited into a monolayer film. Furthermore, longrange positional order and orientation of these BC domains
can be efficiently controlled by the application of graphoepitaxy,[75] in which the surface-relief structure of the substrate
directs epitaxial growth of the overlying micelles.[76]
Micellar cores offer unique microenvironments (ªnanoreactorsº) in which inorganic precursors are loaded and then processed by wet chemical methods to produce comparatively
uniform nanoparticles, in a similar way as it is usually done
with microemulsions.[1 l] BC±nanoparticle hybrids present peculiar magnetic, electro-optical, and catalytic properties arising primarily from single inorganic colloids,[19a] but even more
fascinating are the possibilities, offered by their self-assembly,
as templates. Synthesis of different single-metal nanoclusters
within microphase separated domains of amphiphilic diblock
copolymers has been already reviewed,[19a] and need not to be
repeated here. Further developments that have been reported
are, for example, the ordered deposition of gold and silver
nanoclusters from micellar PS-b-PVP[77] and PS-b-PAA
(Fig. 14)[78] films, respectively. The versatility of this procedure
is such that it allows the use of various different amphiphilic
BC, with the only requirement to form reverse micelles in a
REVIEW
M. Lazzari, M. A. López-Quintela/Block Copolymers for Nanomaterial Fabrication
4. Summary and Outlook
Self-assembly of block copolymers into highly regular
morphologies has been investigated by chemists for several
decades[57a] but it is only in the last ten years that multidisciplinary groups have focused their research efforts on the use
of BCs as a tool for nanomaterial fabrication, following a
wider scientific and technological trend towards miniaturization. Diverse methods of fabrication have been presented
throughout the review, with the final aim to provide an overview of the potential applications offered by BC mesostructures (Table 1 summarizes the main research reported so far).
It has been shown that relatively simple processing of self-assembled BCs in bulk or in solution permits the creation of individual polymeric nano-objects with different shapes, such as
spheres, hollow spheres, fibres, and tubes. A better tailoring of
intrinsic properties and control of dimensions of such objects,
as well as optimization of fabrication methods currently available do not appear as too difficult challenges. However their
use for practical applications, as chemical or biological sensors
or for encapsulation purposes, e.g., as carriers, is possibly hindered by the limited efforts so far focused on the development
of efficient and reliable fractionation techniques.[26,27] Moreover, a tremendous, almost unexplored potential is likely to
reside in the development of processes based on the controlled
pyrolysis of polymeric nano-objects, as well as of self-assembled
BC films as a whole,[80] to yield nanostructured carbons.
The preparation of templates from BC thin films has already been performed by a relatively large number of research groups through similar approaches, even though the
key point for a wider application of these films is still represented by issues such as long-range order and control of domain orientation. Just few works have reported the application of large-area, highly oriented thin films as templates,
using methodologies that only apply to PS-b-PMMA, while
promising results can be also obtained from the use of ordering procedures, based on the deposition onto substrates
neutralized with substances that do not present preferential
interactions with any hydrocarbon polymers, such as carboncoated surfaces.[82] Notwithstanding many applications do not
require long-range order, e.g., preparation of individual nanoobjects or direct use of nanoporous films as membranes, only
the tuning of a reproducible orientation procedure applicable
with different BCs will permit more flexible fabrication of
very sharp, highly dense features, independently from the production either by nanolithography or via a templated synthesis, thereby pointing towards a route for further technological
developments of applications such as in addressable ultra-high
density recording media. If one could template through a
reproducible and robust process with those nanostructures
arrangements of single grain magnetic bits, storage densities
of more than 5 Tbit cm±2 could be achieved, which are two
orders of magnitude larger than the actual and most recent
developments of announced storage densities.
In addition, amphiphilic BC templates have demonstrated
their potential through the preparation of dense metal nanoclusters from as-cast monolayers of loaded micelles. Thus
following a procedure that could become an alternative, at
least in terms of ease of processing and reproducibility, to the
fabrication from nanoporous templates.
And finally, although polymer synthesis did not represent a
priori the limiting factor for further growth of interest in the
use of BCs for the fabrication of nanomaterials, it is worth
pointing out that a new field has been opened by the availability of mesostructures through reactive blending of homopolymers.[83]
Received: February 5, 2003
Final version: June 9, 2003
±
[1]
For early papers see: a) G. M. Whitesides, J. P. Mathias, C. T. Seto, Science
1991, 254, 1312. b) G. A. Ozin, Adv. Mater. 1992, 4, 612. c) C. R. Martin,
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BCs in bulk [b]
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nanolithographically patterned
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conducting BCs [23]
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As templates
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metal nanoclusters [19a,77,78]
nanolithographically patterned
materials [79]
inorganic colloids [19a]
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[b] Mainly as amorphous thin films.
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Adv. Mater. 2003, 15, No. 19, October 2
M. Lazzari, M. A. López-Quintela/Block Copolymers for Nanomaterial Fabrication
Adv. Mater. 2003, 15, No. 19, October 2
http://www.advmat.de
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