Datasheet ESRF-HF

MEMS Resistive Gas Flow Sensor

• State of the art performance due to MEMS resistive technology

• High accuracy
• 12 bit resolution
• Wide dynamic range (100:1)
• Low pressure drop
• Gas Flow sensor: up to 1500 ln/min
• Temperature compensation: 0oC to +50oC
• Calibrated & temperature compensated analog output (4-20mA)
• Excellent long term stability
• Compact size
• 10Hz output rate
• 14 to 32V Power Supply

Product Summary
ES Systems has developed ESRF-HF, a family of insertion gas flow transmitters, based on the
hot-film anemometer principle for mass gas flow measurements.

The ESRF-HF is a family of mass flow transmitters which enable fast and accurate
measurements of gas flow over a wide dynamic range. Each transmitter integrates a MEMS
flow sensor and readout electronics inside a housing with very small form factor made from
stainless steel. The duty pressure of the flow transmitter is 11bar. All measurement data are
fully calibrated, and temperature compensated on board, leading to a reduced temperature
coefficient and high measurement accuracy.

The standard system provides analog signal output, with excellent repeatability and hysteresis
combined with good resolution. Calibration gas is air, but other non-aggressive gases can be
also available upon request.

The compact size of the ESRF-HF flow transmitters combined with the ruggedized stainless-
steel housing makes them ideal for use in industrial applications within confined spaces. For
easier handling and mounting, a series of in-line pipe adaptors (Ø20, Ø25, Ø32) is also
available upon request.

Typical Applications
• Central gas medical systems
• Process control
• Industrial applications
• Pneumatic components
• General instrumentation

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Datasheet ESRF-HF

1. Total Error Band

Total Error Band (TEB) is a single specification that includes all possible sources of error in a gas flow measurement.
TEB should not be confused with accuracy, which is actually a component of TEB. TEB is the worst error that the sensor
could experience. The TEB specification on a datasheet may be confusing. ES Systems uses the TEB specification in its
datasheet because it is the most comprehensive measurement of a sensor’s true accuracy. ES Systems also provides
the accuracy specification in order to provide a common comparison with competitors’ literature that does not use the
TEB specification.

All Possible Errors

Offset

Full Scale Span

Flow Non-Linearity

Flow Hysteresis
Accuracy TEB
Noise

Flow Non-Repeatability

Thermal Effect on Offset

Thermal Effect on Span

Thermal Hysteresis

The figure below, illustrates the accuracy as well as the total error of the flow measurement of ESRF-HF sensors.

Accuracy Performance Total Error Band Performance

- 0% FS to 10%FS = ±0.5%FS - 0% FS to 10%FS = ±0.5%FS
- 10%FS to 100%FS = ±2.0% RD + 0.3%FS - 10%FS to 100%FS = ±5.0% RD + 0.5%FS

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Datasheet ESRF-HF

2. Absolute Maximum Ratings1

Characteristic Min. Max. Unit

Supply voltage (Vsupply) 14 32 Vdc

Voltage on any pin -0.3 6.5 V

Current on any pin - 2 mA

Burst pressure - 13 barg

Storage temperature -40[-40] +85[+185] o

C[oF]

Maximum flow applied -2200 2200 ln/min

1
Absolute maximum ratings are the extreme limits the device will withstand without damage. The electrical and
performance characteristics are not guaranteed as the maximum limits are approached, nor will the device necessarily
operate as specified at absolute maximum ratings. Prolonged operation at absolute maximum ratings will degrade
the device performance

CAUTION CAUTION
IMPROPER USE PRODUCT DAMAGE
Do not use these products to sense liquid flow. Do not disassemble these products.
Failure to comply with the instructions may Failure to comply with the instructions may
result in product damage. result in product damage.

3. Operating Specifications
Characteristic Min. Typ. Max. Unit

Supply voltage (Vsupply)1 14 24 32 V

Supply current - 60 - mA

Output Analog (4-20mA) -

Start-up time2 - 500 - msec

Operating temp. range -40[-40] - +85[+185] o

C[oF]

Compensated temp range 0[+32] - +50[+122] o

C[oF]

Relative humidity (non-condensing) 0 - 95 % RH

Compatible gases Inert non aggressive gases -

Gas conversion factor

Air to O2 - 1.0190 - -
Air to N2 0.9997

Update rate 100 - - ms

Analog output loading

Sink - - 10 mA
Source 20
1
The sensor is not reverse polarity protected. Incorrect application of supply voltage or ground to the wrong pin may
cause electrical failure
2
After 95% of Vsupply reached

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Datasheet ESRF-HF

4. Flow Sensor Specifications

Absolute
Characteristic Unit
Min. Typ. Max.

Flow direction Unidirectional -

100, 150, 250, 300, 500, 600, 700, 800, 1000, 1200,
Full scale ranges ln/min1
1500

Flow cut2 1.0 %FS3

Max measured flow - - 1500 ln/min

Calibration gas Clean, Dry Air4 -

Operating temp. range5 -40[-40] - +85[+185] C[oF]

o

Compensated temp range6 0[+32] - +50[+122] C[oF]

o

Operating pressure 1.0 - 10 bara

Proof pressure - - 11 bara

Effective resolution 12 - - bits

Response time - 100 - msec

Total error band (<10%FS)

7
- ±0.5 - %FS

Total error band (>10%FS) - ±5.0+0.5 - %RD8 +%FS

Accuracy9 (<10%FS) - ±0.5 - %FS

Accuracy (>10%FS) - ±2.0+0.3 - %RD+%FS

Orientation sensitivity10 - 0.001 - %FS/o

Long term stability11 - - ±0.1 %FSS12

1
In normal liters per minute at 0oC and 1013 mbar
2
Flow measured below this point will always indicate 0 ln/min
3
% of the full scale
4
Other, non-aggressive, gases available upon request
5
The temperature range over which the sensor will produce an output proportional to flow (Non condensing
humidity)
6
The temperature range over which the sensor will produce an output proportional to flow within the specified
performance limits. Note that for valid datasheet values, ambient and gas temperatures must be the same
7
The maximum deviation from ideal transfer function over the entire compensated temperature and flow range.
Includes all errors due to offset, full scale span, accuracy, thermal effect on offset, thermal effect on span and thermal
hysteresis
8
% of the reading value
9
The maximum deviation in output from a Best Fit Straight Line (BFSL) fitted to the output measured over the flow
range at 21oC [69.8oF]. Includes all errors due to flow non-linearity, flow hysteresis, non-repeatability and noise
10
Added measurement error due to orientation deviation from the optimal (calibration) position
11
Accelerated Life Test Profile: 100hours at 90oC
12
Full Scale Span (FSS): The algebraic difference between the output signal measured at the maximum (U max) and the
minimum (Umin) limits of the flow range

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Datasheet ESRF-HF

5. Flow Range Specifications (ln/min)

Flow Range Pressure Pressure Pressure

Drop @ Drop @ Drop @
Flow Range Unit FS FS FS Unit
Umin1 Umax DN20 DN25 DN32

0100NL 1 100 ln/min 0.141 0.045 0.016 mbar

0150NL 1.5 150 ln/min 0.293 0.08 0.044 mbar

0250NL 2.5 250 ln/min 0.73 0.195 0.103 mbar

0300NL 3 300 ln/min 1.028 0.28 0.135 mbar

0500NL 5 500 ln/min 2.67 0.71 0.349 mbar

0600NL 6 600 ln/min 3.865 0.98 0.49 mbar

0700NL 4.7 700 ln/min 5.01 1.28 0.661 mbar

0800NL 5.3 800 ln/min 6.58 1.666 0.874 mbar

1000NL 6.7 1000 ln/min 10.68 2.506 1.33 mbar

1200NL 8 1200 ln/min 15.57 3.662 1.95 mbar

1500NL 15 1500 Ln/min 24.8 5.707 3.12 mbar

1
Flows below Umin will always indicate 0 ln/min

6. Environmental Specifications
Characteristic Parameter

Wetted materials degree of protection IEC IP40 (excluding tubing sections)

Vibration 15g, 10Hz to 2 kHz

Shock 100g, 6ms duration

ESD IEC6100-4-2 air discharge up to 8 kV, or direct

ESD
contact discharge up to 4 kV

level 3 from 80 MHz to 1000 MHz per IEC61000-4-

EMC/EMI 3, 1m shielded cable with 3cm exposed leads at
connector.

Life1 1 million flow cycles minimum

1
Life may vary depending on specific application in which the sensor is used

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Datasheet ESRF-HF

7. Analog Interface

Supply +
+
F
Supply -
-
A
Signal
I

ESRF-HF sensors feature an analog current output (4-20mA), which allows for the readout of
flow in an analog way by means of a data acquisition system (PLC) or a multimeter. The
current to flow conversion formula is shown below. Flow is represented in ln/min.

8. Wetted Matterials1
Component Flow Port

Stainless steel 316, Gold, Si, SiN, SiOx, epoxy, silicon

Ports and covers
rubber, FR4, polyurethane

Housing Stainless steel 316

Substrate Gold, FR4

Adhesives Epoxy

Weight
Sensor 151g
Sensor + DN20 adapter 979g
Sensor + DN25 adapter 1223g
Sensor + DN32 adapter 1673g

Directives compliance RoHS, WEEE

1
Contact ESS Customer Service for detailed material information

9. Pinout
Output White Blue Brown Grey Pink Green Yellow

Analog Output GND VDD NC NC NC NC

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Datasheet ESRF-HF

10. Inlet - Outlet Flow Conditions

The ESRF-HF series sensors are calibrated in a horizontal position. The sensor requires at least
20xØ of laminarizing pipe length in the flow inlet and another 20xØ in the outlet. ESRF-HF
series sensors are calibrated using DN20, DN25 or DN32 sensor adapters. For optimal
performance, the diameter of the inlet and outlet flow pipes should be as close to the
calibration diameter as possible.

11. Mechanical Drawings (mm)

12. Sensor Adapters

ES Systems provides a series of in-line pipe adapters for ease of mounting and handling. The
sensor adapters are manufactured with brass or stainless steel material.

Type A (mm) B (inch) C (mm) D (mm) E (mm)

DN20 20 3/4 BSP 40 36 68

DN25 25 1 BSP 42.5 40 78

DN32 32 1 1/4 BSP 46 48 88

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Datasheet ESRF-HF

13. Ordering Information

ESRF-HF-NNNNNN-NN-NN-NN-NN

Adapter
Flow Range FS (ln/min) Directionality
01 DN20 brass
0100NL 100 01 Unidirectional
02 DN25 brass
0150NL 150
03 DN32 brass
0250NL 250
Gas
0300NL 300 01 Air
0500NL 500 02 Other
0600NL 600
Output
0700NL 700
01 4-20mA
0800NL 800

1000NL 1000

1200NL 1200

1500NL 1500

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Datasheet ESRF-HF

Important Notes
No warranty applies to any party other than the original
PERSONAL INJURY
Customer. The remedies of the Customer set forth
DO NOT USE these products as safety or emergency herein are exclusive and the total liability of ES Systems
stop devices, or in any other application where with respect to this order, whether based on contract,
failure of the product could result in personal injury. warranty, negligence, indemnification, strict liability or
otherwise, shall not exceed the purchase price of the
Failure to comply with these instructions could result in
component upon which liability is based.
death or serious injury.
In no event shall ES Systems be liable for consequential,
WARRANTY
incidental or special damages.
ES Systems warrants this Product to be free of defects in
Specifications may change without notice. The
materials and workmanship for a period of one (1) year
information supplied is believed to be accurate and
from the date of purchase.
reliable as of this issue; however, ES Systems assumes no
Upon examination by ES Systems, if the unit is found to responsibility for its use.
be defective it will be repaired or replaced at no charge.
ES Systems' WARRANTY does not apply to defects
Contact Information
resulting from any action of the purchaser, including but
not limited to mishandling, improper interfacing, ES Systems S.A.
operation outside of design limits, improper repair, or Head Office:
unauthorized modification. This WARRANTY is VOID if the 7, Stratigi St., GR-154 51
unit shows evidence of having been tampered with or Neo Psychico, Greece
shows evidence of being damaged as a result of Tel: (+30) 210 672 8610,
excessive corrosion; or current, heat, moisture or Fax (+30) 210 672 8624
vibration;
improper specification; misapplication; misuse or other Factory:

operating conditions outside of ES Systems' control. 57, I.Metaxa str., GR-194 41

Components which wear are not warranted. Koropi, Greece

Tel: (+30) 216 2000 500,
ES Systems neither assumes responsibility for any Fax (+30) 216 2000 555
omissions or errors nor assumes liability for any
damages that result from the use of its Product in
accordance with information provided by ES Systems,
either verbal or written. ES Systems warrants only that
the parts manufactured by it will be as specified and free
of defects.

ES SYSTEMS MAKES NO OTHER WARRANTIES OR

REPRESENTATIONS OF ANY KIND WHATSOEVER,
EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND
ALL IMPLIED WARRANTIES INCLUDING ANY
WARRANTY OF MERCHANTABILITY AND FITNESS FOR
A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED.

No representative of ES Systems is authorized to extend

this Warranty or to change it in any manner whatsoever.

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