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    LP EEE413 1 Sp2021

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    Hasan Sweet
    This document provides information about the EEE413 Fundamentals of Nanotechnology course offered in Spring 2021. The course will cover material growth, nanoscale device fabrication and characterization techniques. Students will learn about CMOS technology, carbon nanotechnology, 2D materials and group III-V semiconductors. The course objectives are to discuss challenges in nanoscale transistor fabrication and emerging nanomaterials. Students will learn nanoscale fabrication and characterization methods and discuss advances in microelectronics from micro to nanoscale. The course will be taught by Professor M. Ryyan Khan and include lectures, assignments, projects, and exams.

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    LP EEE413 1 Sp2021

    Uploaded by

    Hasan Sweet
    21 views4 pages
    This document provides information about the EEE413 Fundamentals of Nanotechnology course offered in Spring 2021. The course will cover material growth, nanoscale device fabrication and characterization techniques. Students will learn about CMOS technology, carbon nanotechnology, 2D materials and group III-V semiconductors. The course objectives are to discuss challenges in nanoscale transistor fabrication and emerging nanomaterials. Students will learn nanoscale fabrication and characterization methods and discuss advances in microelectronics from micro to nanoscale. The course will be taught by Professor M. Ryyan Khan and include lectures, assignments, projects, and exams.

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    LP_EEE413_1_Sp2021

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    This document provides information about the EEE413 Fundamentals of Nanotechnology course offered in Spring 2021. The course will cover material growth, nanoscale device fabrication and characterization techniques. Students will learn about CMOS technology, carbon nanotechnology, 2D materials and group III-V semiconductors. The course objectives are to discuss challenges in nanoscale transistor fabrication and emerging nanomaterials. Students will learn nanoscale fabrication and characterization methods and discuss advances in microelectronics from micro to nanoscale. The course will be taught by Professor M. Ryyan Khan and include lectures, assignments, projects, and exams.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    21 views4 pages

    LP EEE413 1 Sp2021

    Uploaded by

    Hasan Sweet
    This document provides information about the EEE413 Fundamentals of Nanotechnology course offered in Spring 2021. The course will cover material growth, nanoscale device fabrication and characterization techniques. Students will learn about CMOS technology, carbon nanotechnology, 2D materials and group III-V semiconductors. The course objectives are to discuss challenges in nanoscale transistor fabrication and emerging nanomaterials. Students will learn nanoscale fabrication and characterization methods and discuss advances in microelectronics from micro to nanoscale. The course will be taught by Professor M. Ryyan Khan and include lectures, assignments, projects, and exams.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 4

    Department of Electrical & Electronic

    Engineering

    Spring 2021

    Section (1): MW 1:30-3:00 [R-219]

    EEE413: Fundamentals of Nanotechnology


    Credits: 3+0 = 3, Pre-requisite: EEE 308
    Course webpage:

    Rationale of the course


    Nanotechnology is behind many cutting edge electronic devices that find applications in diverse
    areas such as modern computer processors, data storage devices and biosensors. This course
    provides a comprehensive understanding of nanotechnology by covering material growth,
    nanoscale device fabrication and characterization techniques. Students will have an in-depth
    understanding of existing CMOS (complementary metal-oxide semiconductor) technology as
    well as exploratory materials such as carbon based nanotechnology, 2D materials and group III-
    V semiconductors.

    Course Objectives:
    The objectives of the course are to
    1. Discuss history of scaling in CMOS technology from microscale to nanoscale
    2. Explain the challenges of fabricating nanoscale transistors and discuss the future of
    scaling
    3. Discuss nanoscale device fabrication, nanolithography and device characterization
    techniques
    4. Discuss the challenges and opportunities of nanotechnology based on emerging materials
    such as carbon, 2D materials and group III-V semiconductors
    5. Explain nanoscale storage technologies using magnetic systems
    6. Explain the application of nanotechnology for biomedical applications

    Course Outcomes: [CO]


    At the end of the course, the students are expected to demonstrate knowledge and understanding
    of:
    1. Explain nanoscale fabrication and characterization
    2. Describe different types of nanomaterials and/or nanostructures and their applications
    3. Discuss advances in microelectronics from microscale to nanoscale
    4. Molecular electronics, nanoscale optoelectronics/photonics, MEMS, NEMS etc.

    Page 1 of 4
    Course instructor:
    M. Ryyan Khan, Assistant Professor, Department of EEE.
    email: ryyan@ewubd.edu
    Room: 539

    Textbook
    • Introduction to nanoscale science & technology, by Di Ventra, S. Evoy, and J. R. Heflin,
    2004.

    Course content and tentative lecture plan

    Contents Lectures

    Introduction: Basic idea, what is nanotechnology, course outline Lec 1


    Fabrication techniques: cleanroom basics; sample preparations; CVD,
    PVD; wet and dry etching; Lithography, LELE; Bottom-up and top-down; Lec 2-4
    self-assembly
    Characterization methods Lec 5-6
    Nanophotonics and metamaterials Lec 7-8
    Mid-1: Lec 1-8
    MOS: intro/recap Lec 9
    MOS: operations and physical effects of scaling Lec 10-11
    MOS: scaling and evolution Lec 12-13
    MOS: variability and reliability Lec 14-15
    Review and practice
    Mid-2: Lec 9-15
    MEMS: applications, basic operation. Example case study: accelerometer,
    Lec 16-17
    biosensing, etc.
    Nanobiomedicine, nanobiosensors Lec 18-19
    Student presentations
    Final

    Important dates
    Mid-1 Wednesday 24 March 2021
    Mid-2 Wednesday 21 April 2021
    Final Monday 31 May 2021

    Page 2 of 4
    Classes and office hours (tentative)

    Grading policy (tentative)


    Attendance
    Class performance 10%
    Mid-1, Mid-2, Final 20%, 25%, 25%
    Project 20%
    Assignment

    Page 3 of 4
    University grading scheme

    Range Gd Gp Range Gd Gp Range Gd Gp

    Below 60 F 0.0 70 – below 73 C 2.0 83 – below 87 B+ 3.3

    60 – below 63 D 1.0 73 – below 77 C+ 2.3 87 – below 90 A- 3.7

    63 – below 67 D+ 1.3 77 – below 80 B- 2.7 90 – below 97 A 4.0

    67 – below 70 C- 1.7 80 – below 83 B 3.0 97 - 100 A+ 4.0

    Essential Policy Information

    1. Zero tolerance for cheating


    2. No makeup for quizzes
    3. Makeup exam for midterms and final may be arranged for compelling reasons. The
    student must apply with supporting documents
    4. A student may be forced to drop/withdraw the course if his/her attendance goes below
    70%

    Page 4 of 4

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