MEMS inclinometer based on a novel piezoresistor structure
Abstract
References
Index Terms
- MEMS inclinometer based on a novel piezoresistor structure
Recommendations
A novel cavity-first process for flexible fabrication of MEMS on silicon on insulator (SOI) wafer
Graphical abstractDisplay Omitted A novel approach for producing released MEMS from front side of SOI wafer.A cavity underneath device layer was fabricated and then sealed by a fluoropolymer.Only dry processes were used for cavity formation, cavity ...
Novel SU-8 based vacuum wafer-level packaging for MEMS devices
This work presents a simple and low-cost SU-8 based wafer-level vacuum packaging method which is CMOS and MEMS compatible. Different approaches have been investigated by taking advantage of the properties of SU-8, such as chemical resistance, optical ...
Autonomous MEMS Inclinometer
AIS 2012: Proceedings of the Third International Conference on Autonomous and Intelligent Systems - Volume 7326Pull-in voltage measurements are used in this work as the transduction mechanism to build a novel microelectromechanical system MEMS inclinometer. By successively bringing the microstructure to pull-in while measuring the pull-in voltage allows the ...
Comments
Information & Contributors
Information
Published In
Publisher
Elsevier Science Publishers B. V.
Netherlands
Publication History
Author Tags
Qualifiers
- Article
Contributors
Other Metrics
Bibliometrics & Citations
Bibliometrics
Article Metrics
- 0Total Citations
- 0Total Downloads
- Downloads (Last 12 months)0
- Downloads (Last 6 weeks)0
Other Metrics
Citations
View Options
View options
Get Access
Login options
Check if you have access through your login credentials or your institution to get full access on this article.
Sign in