Autonomous MEMS Inclinometer
Pages 26 - 33
Abstract
Pull-in voltage measurements are used in this work as the transduction mechanism to build a novel microelectromechanical system MEMS inclinometer. By successively bringing the microstructure to pull-in while measuring the pull-in voltage allows the detection of external accelerations. Moreover, the availability of asymmetric pull-in voltages that depend on the same mechanical structure and properties enables the implementation of an auto-calibrated thermal compensated inclinometer. The thermal compensation method is described and it relies on the measurement of pull-in voltages only. Both simulations and experiments are used to validate this novel approach and first results show a sensitivity of 50mV/ï ź and a resolution of 0.006ï ź.
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- Autonomous MEMS Inclinometer
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Published: 25 June 2012
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