EX-FLOW

Ex-Protected Mass Flow Meters and Controllers for Gases

 Introduction Mass Flow Controllers for every application
Bronkhorst High-Tech B.V., the European market leader in thermal Mass The control valve can be furnished as an integral part of an EX-FLOW Mass
Flow Meters/Controllers and Electronic Pressure Controllers, offers Flow Controller (MFC), or as a separate component. It is a proportional,
innovative solutions for many different applications in many different electromagnetic control valve with fast and smooth control characteristics.
markets. The instruments are made to customers’ specification, in various With reference to the specific field of application there are different series
styles, suitable for use in laboratory, industrial environment, hazardous of control valves. There is a standard direct acting valve for common
areas, semiconductor or analytical installations. applications, a pilot operated valve for high flow rates and the so-called
Vary-P valve with a pressure rating of 400 or 700 bar, that can cope with up
EX-FLOW series for hazardous areas to 400 bar ΔP. All valves are equipped with explosion protected certified
The Mass Flow Meters of the EX-FLOW series are of rugged design for gas coils, available in two executions:
flow applications in hazardous environments. Coil type XB: p rotection method "intrinsically safe"; rated for use up to
This intrinsically safe measuring head is IECEx and ATEX tested and can be Zone 0/20 in Gas and Dust Ex-atmospheres with marking:
used up to Zone 1 or EPL Gb flammable gas atmospheres with an ambient II 1 G D Ex ia ta IIC // IIIC T6 T80ºC Ga Da.
temperature up to +70°C with marking II 2 G Ex ib IIC T4 Gb. Coil type XC: p rotection method "increased safety"; rated for use up to
Zone 1/21 Gas and Dust Ex-atmospheres with marking:
Certifications II 2 G D Ex eb tb IIC // IIIC T4 T130ºC.
EU ATEX KEMA 01ATEX1172 (Equivalent IECEx Gb Db rating on request)
WW IECEx DEK14.0060
JP TIIS 検・第TC21584号 The electrical connection of flow meter and control valve to the power
KOR KCs 제2019-048293-01-1호 supply/readout system (located in the safe zone) is achieved via separate
cables. The readout system contains a controller function pc-board to
complete the control loop.
The housing of the electronics compartment is rated to IP65. Mass Flow
Meters can be supplied in ranges starting from 0,16…8 mln/min up to Power supply and readout
11000 m3n/h N2-equivalent, with pressure rating between vacuum and 700 An EX-FLOW MFM or MFC should be connected to an E-8000 Series power
bar. In combination with control valves, either integrated or separate, Mass supply / readout system with certified and integrated intrinsically safe
Flow Controllers can be offered up to 7,5…375 m3n/h N2-equivalent. galvanic isolation inputs and outputs. This unit must be installed in the safe
area. The actual configuration is of an on request modular build, according
to the number and execution of the instruments to be connected.

General EX-FLOW features

Typical Ex-system rating: ATEX Equipment Category 2, Zone 1 (Gas) or
IECEx EPL Gb
Flow ranges from 0,16…8 mln/min up to 220…11000 m3n/h
Pressure ratings up to 700 bar

Fields of application
Process gas measurement or control in (petro-) chemical industries
Fuel cell technology
Gas distribution systems
Hydrogenation processes
Gas consumption measurement for internal accounting
Heating or biogas production

Example of a multi-channel E-8000 power supply/readout F-106AX Ex-protected Mass Flow Meter for high flow ranges
system (to be located in the safe area)
 Technical specifications Models and flow ranges (based on N2)

Measurement / control system Mass Flow Meters (MFM); PN100 (pressure rating 100 bar)

Accuracy (incl. linearity) standard: ±1% FS; other on request Model min. flow max. flow
(based on actual calibration) (for flow > 1000 m3n/h contact factory)
F-110CX 0,15…7,5 mln/min 0,19…9,5 mln/min
Turndown 1 : 50 (2…100%)
F-111BX 0,3…15 mln/min 0,4…20 ln/min
Repeatability < ±0,2% Rd
F-111AX 0,1…5 ln/min 2…100 ln/min
Time constant 5 seconds
F-112AX 0,8…40 ln/min 5…250 ln/min
Operating temperature EX-FLOW sensor: -10…+70°C;
XB-coil: -40…+ 65°C F-113AX 4…200 ln/min 25…1250 ln/min
XC-coil: -40…+ 65°C F-116AX 0,4…20 m3n/h 4…200 m3n/h
Temperature sensitivity zero: < ±0,05% FS/°C; F-116BX 1…50 m3n/h 7,5…375 m3n/h
span: < ±0,05% Rd/°C
For ranges of 200, 400 or 700 bar rated MFMs please contact factory.
Leak integrity tested < 2 x 10-9 mbar l/s He
Attitude sensitivity max. error at 90° off horizontal 0,2% High-Flow MFMs; PN10 / PN16 / PN25 / PN40 / PN100
at 1 bar, typical N2
Model min. flow max. flow
Warm-up time 30 min. for optimum accuracy;
F-106AX/F-107AX/F-117AX 0,4…20 m3n/h 4…200 m3n/h
2 min for accuracy ± 2% FS
F-106BX/F-107BX/F-117BX 1…50 m3n/h 10…500 m3n/h

Mechanical parts F-106CX/F-107CX/F-117CX 2…100 m n/h 3

20…1000 m3n/h

Material (wetted parts) stainless steel 316L or comparable F-106DX/F-107DX/F-117DX 3,6…180 m n/h 3
36…1800 m3n/h

Process connections compression type or face seal couplings; F-106EX 8…400 m3n/h 80…4000 m3n/h
wafer type on series F-106;
F-106FX 14…700 m3n/h 140…7000 m3n/h
DIN or ANSI flanges on series F-107
F-106GX 22…1100 m3n/h 220…11000 m3n/h
Seals standard: Viton®
options: EPDM, FFKM (Kalrez®), FDA and USP Class VI
approved compounds Mass Flow Controllers (MFC); PN64 / PN100
Ingress protection (housing) IP65 Model min. flow max. flow
F-200CX/F-210CX 0,19…9,5 mln/min 0,19…9,5 mln/min
Electrical properties
F-201CX/F-211CX 0,3…15 mln/min 0,4…20 ln/min
Output signal 15…20 mA (linear)
Terminal connection, cable gland M16x1,5 F-201AX/F-211AX 0,1…5 ln/min 2…100 ln/min

I/O signals via PS/Readout analog: 0…5 Vdc, 0…10 Vdc, 0…20 mA, 4…20 mA; F-202AX/F-212AX 0,6…30 ln/min 5…250 ln/min
(located in safe area) digital: RS232, PROFIBUS DP, DeviceNet™, Modbus F-203AX/F-213AX 4…200 ln/min 25…1250 ln/min
RTU or ASCII, PROFINET, EtherCAT®, FLOW- BUS
F-206AX/F-216AX 0,4…20 m3n/h 4…200 m3n/h
XB-coil Coil voltage max. 28 V/110mA;
295 Ohm at 20°C, cable gland M20x1,5 F-206BX/F-216BX 1…50 m3n/h 7,5…375 m3n/h

XC-coil Coil voltage max. 24 V; Contact factory for max. Kv-values (depending of coil type).
65 Ohm at 20°C, cable gland M20x1,5;
Pmax = 9W at 20°C MFCs for high-pressure / high-ΔP applications; PN400
Technical specifications subject to change without notice. Model min. flow max. flow
Related drawing 9.27.002N. No modifications permitted without approval of authorised person.
F-230MX 0,2…10 mln/min 10…500 mln/min
F-231MX 10…500 mln/min 0,2…10 ln/min
F-232MX 0,2…10 ln/min 2…100 ln/min
For ranges of 700 bar rated MFCs please contact factory.

F-112AX Mass Flow Meter F-202AX Mass Flow Controller F-107CX Mass Flow Meter for high flow ranges
(flanged type)
 Model number identification

F - N N NAA - HEE - NN - A

Base Ranges Connections (in/out)

0 Valve only 1 1/8“ OD compression type

for Flow Meters
1 Meter 2 1/4“ OD compression type
0CX 0…0,75 / 0…9,5 mln/min
2 Controller 3 6 mm OD compression type
1BX/1CX 0…15 / 0…20000 mln/min
4 12 mm OD compression type
1AX 0…5 / 0…100 ln/min
Pressure rating
5 1/2” OD compression type
2AX 0…40 / 0…250 ln/min
0 64 bar 6 20 mm OD compression type
3AX 0…200 / 0…1250 ln/min
1 100 bar 8 1/4” Face seal male
6AX/7AX 0…20 / 0…200 m3n/h
2 200 bar 9 other
6BX/7BX 0…50 / 0…500 m3n/h
3 400 bar
6CX/7CX 0…100 / 0…1000 m3n/h
4 700 bar Mounting between flanges
6DX/7DX 0…180 / 0…1800 m3n/h
01 mounting betw. flange DIN PN10
6EX 0…400 / 0…4000 m3n/h
02 mounting betw. flange DIN PN16
6FX 0…700 / 0…7000 m3n/h
03 mounting betw. flange DIN PN40
6GX 0…1100 / 0…11000 m3n/h
06 mounting betw. flange ANSI 150 lbs
for PN64/PN100 Flow Controllers 07 mounting betw. flange ANSI 300 lbs
0CX 0…9,5 mln/min 13 Flanged connections DIN PN40
1CX 0…15 / 0…20000 mln/min 15 Flanged connections DIN PN100
1AX 0…5 / 0…100 ln/min 26 Flanged connections ANSI 150 lbs
2AX 0…30 / 0…250 ln/min 27 Flanged connections ANSI 300 lbs
3AX 0…200 / 0…1250 ln/min 28 Flanged connections ANSI 600 lbs
6AX 0…20 / 0…200 m3n/h 99 other
6BX 0…50 / 0…375 m3n/h
Internal seals
for PN400 Flow Controllers
V Viton®
0MX 0…10 / 0…500 mln/min
E EPDM
1MX 0…0,5 / 0…10 ln/min
K Kalrez® (FFKM)
2MX 0…10 / 0…100 ln/min

Bronkhorst High-Tech designs and manufactures innovative instruments and subsystems for low-flow measurement
and control for use in laboratories, machinery and industry. Driven by a strong sense of sustainability and with
many years of experience, we offer an extensive range of (mass) flow meters and controllers for gases and liquids,
based on thermal, Coriolis and ultrasonic measuring principles. Our global sales and service network provides
local support in more than 40 countries. Discover Bronkhorst®!

Bronkhorst High-Tech B.V.

Nijverheidsstraat 1a Tel. +31 573 458800
www.bronkhorst.com NL-7261 AK Ruurlo, The Netherlands info@bronkhorst.com 9.27.002N P2000256 ©Bronkhorst®